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1.5em\">\u74f7\u5668\/\u5939\u5c42\u73bb\u7483\uff1aA-174\u6c2f\u7845\u70f7\u9971\u548c\u6eb6\u6db2\u9884\u5907\u5904\u7406\u53ef\u4ee5\u6539\u8fdbParylene-C\u5851\u6599\u8584\u819c\u5728\u5e73\u677f\u7535\u8111\u73bb\u7483\u57fa\u677f\u8bd5\u54c1\u4e0a\u7684\u7c98\u5408\u529b[14]\u3002<\/p>\n<\/li>\n<li>\n<p style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;clear: both;min-height: 1em;line-height: 1.5em\">\u91d1\u5c5e\u6750\u6599\/\u94dd\u5408\u91d1\uff1a\u805a\u5bf9\u4e8c\u7532\u82ef\u666e\u904d\u7528\u4ee5\u6d82\u6577\u611f\u5e94\u5668\u57ab\u3002\uff08\u56fe\uff08a\uff09\u8868\u660e\u4e86\u4e00\u4e2a\u5851\u80f6\u5c01\u88c5\u5f62\u5f0f\u7684\u7845\u6db2\u4f4d\u4f20\u611f\u5668[1]\uff09\u3002\u805a\u5bf9\u4e8c\u7532\u82ef\u81ea\u8eab\u4e0e\u8d35\u91cd\u91d1\u5c5e\uff08\u5982\u91d1\u6709\u94c2\uff09\u7684\u7c98\u63a5\u6027\u8f83\u5f31\u3002\u4e3a\u4e86\u66f4\u597d\u5730\u63a8\u52a8\u4ed6\u4eec\u7684\u9ecf\u5408\uff0c\u53ef\u4ee5\u5e94\u7528\u5e02\u9762\u4e0a\u7684\u9ecf\u5408\u786b\u5316\u4fc3\u8fdb\u5242\uff0c\u636e\u62a5\u9053\uff0c\u5728\u8fd9\u7c7b\u9875\u9762\u4e0a\u9ecf\u5408\u6297\u538b\u5f3a\u5ea6\u63d0\u5347\u4e86100\u500d\uff0c\u5e76\u89c2\u67e5\u5230\u4e86\u76f8\u5bf9\u5e94\u7684\u8010\u4f53\u5185\u6e7f\u6c14\u8131\u79bb\u6027\u63d0\u5347[15]\u3002<\/p>\n<\/li>\n<li>\n<p style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;clear: both;min-height: 1em;line-height: 1.5em\">\u805a\u5bf9\u4e8c\u7532\u82ef\u2013\u91d1\u5c5e\u6750\u6599\u2013\u805a\u5bf9\u4e8c\u7532\u82ef\u9694\u5c42\u6784\u9020\u53ef\u505a\u4e3a\u8f6f\u6027\u7535\u7ea7\uff0c\u4f20\u611f\u5668\u751f\u4ea7\uff0c\u901a\u5e38\u505a\u4e3a\u76f8\u6eb6\u6027\u5047\u4f53\u751f\u4ea7\u5236\u9020[16] \u2013 [18]\u3002<\/p>\n<\/li>\n<li>\n<p style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;clear: both;min-height: 1em;line-height: 1.5em\">\u805a\u5bf9\u4e8c\u7532\u82ef-\u805a\u5bf9\u4e8c\u7532\u82ef\u7684\u5806\u79ef\u662f\u5f88\u6709\u53ef\u80fd\u7684\uff0c\u4f46\u5fc5\u987b\u5f00\u5c55\u540e\u5904\u7406\u5de5\u827a\u624d\u53ef\u4ee5\u6839\u636e\u70ed\u5904\u7406\u5de5\u827a\u4ea7\u751f\u6709\u673a\u5316\u5b66\u5e73\u7a33\u7684\u9875\u9762[16]\uff0c[19]\u3002<\/p>\n<\/li>\n<li>\n<p style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;clear: both;min-height: 1em;line-height: 1.5em\">\u9ad8\u805a\u7269\uff1a\u5149\u81f4\u6297\u8680\u5242\u4e0a\u7684\u805a\u5bf9\u4e8c\u7532\u82efC\u53ef\u4ee5\u7ecf\u8fc7\u6539\u8fdb\u6297\u8680\u5242\u7684\u9ecf\u9644\u529b\u6765\u5b8c\u6210\uff0c\u805a\u5bf9\u4e8c\u7532\u82ef\u53ef\u4ee5\u5f15\u8fdb\u6539\u5584\u7684\u6c2f\u7845\u70f7\u5316\u9884\u5907\u5904\u7406\uff0c\u5305\u542b\u70ed\u5904\u7406\u5de5\u827a\u4ee5\u4ece\u6297\u8680\u5242\u8868\u5c42\u9664\u53bb\u7532\u57fa\u3002[2]<\/p>\n<\/li>\n<li>\n<p style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;clear: both;min-height: 1em;line-height: 1.5em\">\u5728\u6cb9\u4e0a\uff1a\u5f53\u6cb9\u7684\u84b8\u6c14\u653e\u4f4e\uff08&lt;5 Pa\uff09\u65f6\uff0c\u53ef\u4ee5\u5728\u9876\u7aef\u5806\u79ef\u805a\u5bf9\u4e8c\u7532\u82ef[3]\u3002\u6d82\u5728\u6cb9\u4e0a\u7684\u805a\u5bf9\u4e8c\u7532\u82ef\u5185\u5e94\u529b\u4e0d\u5927\uff0c\u53ef\u4ee5\u5ffd\u7565[4]\u3002\u805a\u5bf9\u4e8c\u7532\u82ef\u4e0a\u6cb9\u5806\u79ef\u6cd5\uff08CVD\uff09\u5df2\u7528\u4ee5\u5236\u53d6\u957f\u671f\u6027\u53ef\u5d4c\u5165\u7684\u6db2\u4f4d\u4f20\u611f\u5668[5]\uff0c\u4ece\u6cb9\u4e2d\u83b7\u53d6\u5149\u5b66\u955c\u7247[6] \u2013 [8]\u5e76\u6839\u636e\u5728\u5806\u79ef\u540e\u5206\u79bb\u51fa\u6765\u805a\u5bf9\u4e8c\u7532\u82ef\u6765\u5236\u53d6\u9632\u62a4\u7684\u805a\u5bf9\u4e8c\u7532\u82ef\u819c[9]\uff0c[10]\u3002<\/p>\n<p style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;clear: both;min-height: 1em\"><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<\/li>\n<\/ul>\n<p>\u53c2\u8003\u6587\u732e<\/p>\n<p>[1] M. Kraft\u548cNM White\uff0c\u300a\u6c7d\u8f66\u548c\u822a\u7a7a\u822a\u5929\u5e94\u7528\u7684\u5907\u5fd8\u5f55\u300b\u3002Elsevier\uff0c2013\u5e74\u3002<\/p>\n<p>[2] Y. Li \u7b49\u3002\uff0c\u201c\u805a\u5bf9\u4e8c\u7532\u82ef\u5149\u81f4\u6297\u8680\u5242\uff08POP\uff09\uff1a\u7528\u4ee5\u9ad8\u805a\u7269\/\u91d1\u5c5e\u6750\u6599\u7eb3\u7c73\u7ebf\u751f\u4ea7\u5236\u9020\u7684\u8d85\u4f4e\u6e29\u57ab\u5708\u8ba1\u5212\u65b9\u6848\u201d\uff0c\u300a\u5fae\u673a\u68b0\u5fae\u5de5\u7a0b\u300b\uff0c\u7b2c1\u5377\u300221\u53f7 6\uff0c\u7b2c\u00a0067001\uff0c2011\u5e744\u6708\uff0cdoi\uff1a10.1088 \/ 0960-1317 \/ 21\/6\/067001\u3002<\/p>\n<p>[3] A. Homsy \u7b49\u3002\uff0c\u201c\u56fa\u4f53\u5806\u79ef\uff0c\u6280\u672f\u6027\u89e3\u51b3\u65b9\u6cd5\u7684\u5177\u4f53\u63cf\u8ff0\u201d\uff0cMicroelectron\u3002\u3002\uff0c\u5377 141\uff0c\u7b2c267-279\u9875\uff0c2015\u5e746\u6708\uff0cdoi\uff1a10.1016 \/ j.mee.2015.03.068\u3002<\/p>\n<p>[4]\u201c\u805a\u5bf9\u4e8c\u7532\u82ef\u5728\u6db2\u6001\u4e0a\u5806\u79ef\u7684\u62c9\u4f38\u7f20\u7ed5\u819c\u5185\u5e94\u529b|\u00a0\u6717\u7f2a\u5c14\u3002\u201d https:\/\/pubs.acs.org\/doi\/10.1021\/la102790w(2020\u5e744\u670826\u65e5\u6d4f\u89c8\uff09\u3002<\/p>\n<p>[5] AM Shapero\uff0cY\u3002Liu\u548cY.-C\u3002Tai\uff0c\u201c\u7528\u4ee5\u957f\u671f\u6027\u690d\u5165\u5f0f\u6db2\u4f4d\u4f20\u611f\u5668\u7684\u805a\u5bf9\u4e8c\u7532\u82ef\u4e0a\u6cb9\u5305\u88dd\u201d\uff0cBiomed\u3002\u5c0f\u578b\u5377\u300218\u53f7 4\uff0c\u7b2c 66\uff0c2016\u5e747\u6708\uff0cdoi\uff1a10.1007 \/ s10544-016-0089-4\u3002<\/p>\n<p>[6] Binh-Khiem Nguyen\uff0cEiji Iwase\uff0cKioshi Matsumoto\u548cIsao Shimoyama\uff0c\u201c\u6839\u636e\u5c06\u805a\u5bf9\u4e8c\u7532\u82ef\u7acb\u5373\u5806\u79ef\u5728\u6db2\u6001\u4e0a\u800c\u5236\u4f5c\u7684\u7535\u63a8\u52a8\u8c03\u7126\u7535\u5b50\u5149\u5b66\u5fae\u955c\u7247\u201d\uff0c\u57282007\u5e74IEEE\u7b2c20\u5c4a\u56fd\u9645\u6027\u7535\u5b50\u5149\u5b66\u673a\u68b0\u7ed3\u6784\uff08MEMS\uff09\u5927\u4f1a\u4e0a\uff0c 2007\uff0c\u7b2c305\u2013308\u9875\uff0cdoi\uff1a10.1109 \/ MEMSYS.2007.4433059\u3002<\/p>\n<p>[7] T. Kan\uff0cH\u3002Aoki\uff0cN\u3002Binh-Khiem\uff0cK\u3002Matsumoto\u548cI. Shimoyama\uff0c\u201c\u5e94\u7528\u4e8c\u79cd\u8367\u5149\u67d3\u6599\u878d\u89e3\u5728\u7531\u805a\u5bf9\u4e8c\u7532\u82ef\u819c\u5c01\u88c5\u5f62\u5f0f\u7684\u79bb\u5b50\u6db2\u4f53\u4e2d\u7684\u6bd4\u4f8b\u7535\u5b50\u5149\u5b66\u6e29\u5ea6\u611f\u5e94\u5668\u201d\uff0c\u611f\u5e94\u5668\uff0c\u7b2c1\u671f\u300213\u53f7 4\uff0c\u7b2c4138\u20134145\u9875\uff0c2013\u5e744\u6708\uff0cdoi\uff1a10.3390 \/ s130404138\u3002<\/p>\n<p>[8] WF Gorham\uff0c\u201c\u4e00\u79cd\u5236\u53d6\u7ebf\u5f62\u805a\u5bf9\u4e8c\u7532\u82ef\u7684\u65b0\u5f0f\u901a\u7528\u6027\u751f\u6210\u65b9\u5f0f\u201d\uff0cJ\u3002Polym\u3002\u79d1\u5b66\u5408\u7406\u00a0[A1]\uff0c\u7b2c\u4e00\u5377\u30024\uff0c\u6c92\u6709 12\uff0cpp\u30023027-3039\uff0c1966\uff0cdoi\uff1a10.1002 \/ pol.1966.150041209\u3002<\/p>\n<p>[9] H. Keppner\u548cM. Benkhaira\uff0c\u201c\u751f\u4ea7\u5236\u9020\u5851\u6599\u8584\u819c\u8bbe\u5907\u7684\u65b9\u5f0f \u548c\u4ece\u800c\u5f97\u5230\u7684\u8bbe\u5907\u201d\uff0cUS20090246546A1\uff0c2009\u5e7410\u67081\u65e5\u3002<\/p>\n<p>[10] N. Binh-Khiem\uff0cK\u3002Matsumoto\u548cI. Shimoyama\uff0c\u201c\u591a\u5b54\u7ed3\u6784\u805a\u5bf9\u4e8c\u7532\u82ef\u548c\u6db2\u6001\u5bf9\u5806\u79ef\u5728\u6db2\u6001\u4e0a\u7684\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u5371\u5bb3\u201d\uff0c\u57282011\u5e74IEEE\u7b2c24\u5c4a\u5fae\u673a\u7535\u7cfb\u7edf\u56fd\u9645\u5b66\u672f\u4f1a\u8bae\u4e0a\uff0c\u7b2cpp \u3002111\u2013114\uff0cdoi\uff1a10.1109 \/ MEMSYS.2011.5734374\u3002<\/p>\n<p>[11] A. Hogg\uff0c\u201c\u7528\u4ee5\u690d\u5165\u5f0f\u533b\u7597\u5668\u68b0\u7684\u8d85\u5c42\u6790\u5305\u88dd\u7684\u7814\u53d1\u548c\u7279\u70b9\u201d\uff0c\u7b2c134\u9875\u3002219\u3002<\/p>\n<p>[12] H. Noh\uff0cK\u3002Moon\uff0cA\u3002Cannon\uff0cPJ Hesketh\u548cCP Wong\uff0c\u201c\u5e94\u7528\u805a\u5bf9\u4e8c\u7532\u82ef\u5185\u5c42\u7684\u5fae\u6ce2\u52a0\u70ed\u5f00\u5c55\u5706\u6676\u5f15\u7ebf\u952e\u5408\u201d\uff0c\u300a\u5fae\u673a\u68b0\u5fae\u5de5\u7a0b\u300b\uff0c\u7b2c1\u5377\u300214\u53f7 4\uff0c\u7b2c625\u2013631\u9875\uff0c2004\u5e744\u6708\uff0cdoi\uff1a10.1088 \/ 0960-1317 \/ 14\/4\/025\u3002<\/p>\n<p>[13]\u5362\u5e0c\u6587\uff0c\u90ed\u6587\u6210\uff0c\u6768\u8000\u4e54\u548c\u6cf0\u7389\u5d07\uff0c\u201c\u91cd\u7ed3\u6676\u805a\u5bf9\u4e8c\u7532\u82ef\u4f5c\u4e3a\u7845\u6709\u673a\u5316\u5b66\u8680\u523b\u52a0\u5de5\u7684\u63a9\u819c\u201d\uff0c\u57282008\u5e74\u7b2c\u4e09\u5c4aIEEE\u7eb3\u7c73\u6280\u672f\/\u5fae\u5de5\u7a0b\u9879\u76ee\u548c\u5206\u5b50\u7ed3\u6784\u7cfb\u7edf\u8f6f\u4ef6\u56fd\u9645\u5b66\u672f\u4f1a\u8bae\u4e0a\uff0c2008\u5e741\u6708\uff0c\u7b2c881\u2013884\u9875\uff0cdoi\uff1a10.1109 \/ NEMS.2008.4484464\u3002<\/p>\n<p>[14]\u201c\u805a\u5bf9\u4e8c\u7532\u82ef-C\u5851\u6599\u8584\u819c\u7684\u9ecf\u5408\u7279\u6027| Scientific.Net\u3002\u201d https:\/\/www.scientific.net\/AMM.421.337(2020\u5e744\u670826\u65e5\u6d4f\u89c8\uff09\u3002<\/p>\n<p>[15]\u201c\u5851\u6599\u8584\u819c\u805a\u5bf9\u4e8c\u7532\u82ef\u7cfb\u7edf\u8f6f\u4ef6\u5728\u6e7f\u533a\u81ea\u7136\u73af\u5883\u4e2d\u7684\u9ecf\u5408\u7279\u70b9\u548c\u6539\u6027\u6750\u6599-IEEE Journals\uff06Magazine\u201d\uff0c\u6d4f\u89c8\uff1a2020\u5e744\u670826\u65e5\u3002[\u7ebf\u4e0a]\u3002\u53ef\u4ee5\u7528\uff1ahttps\uff1a\/\/ieeexplore.ieee.org\/abstract\/document\/8418313\u3002<\/p>\n<p>[16] RP von Metzen\u548cT. Stieglitz\uff0c\u201c\u6dec\u706b\u5bf9\u805a\u5bf9\u4e8c\u7532\u82efC\u7684\u673a\u68b0\u8bbe\u5907\uff0c\u6709\u673a\u5316\u5b66\u548c\u5316\u5b66\u6027\u8d28\u53ca\u5176\u6784\u9020\u53ef\u9760\u6027\u7684\u5371\u5bb3\u201d\uff0cBiomed\u3002\u5c0f\u578b\u5377\u300215\u53f7 5\uff0c\u7b2c727\u2013735\u9875\uff0c2013\u5e7410\u6708\uff0cdoi\uff1a10.1007 \/ s10544-013-9758-8\u3002<\/p>\n<p>[17] W. Li\uff0cDC Rodger\uff0cE\u3002Meng\uff0cJD Weiland\uff0cMS Humayun\u548cY.-C\u3002Tai\uff0c\u201c\u7528\u4ee5\u89c6\u7f51\u819c\u9f3b\u5b50\u5047\u4f53\u7684\u8f6f\u6027\u805a\u5bf9\u4e8c\u7532\u82ef\u5305\u88dd\u7684\u773c\u7403\u7535\u78c1\u7ebf\u5708\u201d\uff0c\u57282006\u5e74\u56fd\u9645\u533b\u7597\u548c\u5206\u5b50\u751f\u7269\u5b66\u5fae\u6280\u672f\u5927\u4f1a\u4e0a\uff0c2006\u5e745\u6708\uff0c\u7b2c105-108\u9875\uff0cdoi\uff1a10.1109 \/ MMB.2006.251502\u3002<\/p>\n<p>[18] S. Minnikanti \u7b49\u3002\uff0c\u201c\u5e94\u7528\u52a0\u5feb\u9ad8\u4f4e\u6e29\u8bd5\u9a8c\u548c\u5149\u7535\u50ac\u5316\u8868\u73b0\u5bf9\u7528\u4ee5\u795e\u7ecf\u7cfb\u7edf\u9875\u9762\u7684\u5206\u5b50\u5c42\u5806\u79ef\u7684Al2O3-Parylene C\u4e24\u5c42\u9540\u5c42\u5f00\u5c55\u7ec8\u751f\u8bc4\u5b9a\uff0c\u201d Acta Biomater\u3002\uff0c\u5377 10\u53f7 2\uff0c\u7b2c960-967\u9875\uff0c2014\u5e742\u6708\uff0cdoi\uff1a10.1016 \/ j.actbio.2013.10.031\u3002<\/p>\n<p>[19] J. Ortigoza-Diaz \u7b49\u3002\uff0c\u201c Parylene C\u5fae\u673a\u7535\u7cfb\u7edf\u7ec6\u5fae\u751f\u4ea7\u52a0\u5de5\u4e2d\u7684\u5de5\u827a\u548c\u5e38\u89c1\u95ee\u9898\u201d\uff0c\u300a\u5fae\u673a\u68b0\u300b\uff0c\u7b2c\u4e00\u5377\u30029\u53f7 2018\u5e748\u67089\u65e5\uff0cdoi\uff1a10.3390 \/ mi9090422\u3002<\/p>\n<p><\/p>\n<p><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-size: 8pt;color: #999999\"><em>         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