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100%\">\u7eb3\u7c73\u9540\u819c\u6280\u672f\u6027\u3002\u5728\u5176\u4e2d\u6700\u5178\u578b\u6027\u7684\u662f\u7eb3\u7c73\u6280\u672f\u4eb2\u6c34\u6027\u819c\uff0c\u8fd0\u7528\u8377\u53f6\u6548\u5e94\u57fa\u672c\u539f\u7406\uff0c\u5f53\u6c34\u73e0\u4e0e\u539f\u6599\u8868\u5c42\u7684\u8868\u9762\u5f20\u529b\u8d85\u8fc790\u5ea6\u65f6\uff0c\u6c34\u73e0\u5c31\u6ca1\u6cd5\u7c98\u9644\u5728\u539f\u6599\u8868\u5c42\u800c\u6eda\u4e0b\u6765\u51fa\u6765\uff0c\u5145\u5206\u53d1\u6325\u4eb2\u6c34\u6027\u6548\u7528\u3002<\/p>\n<p><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215141949-61b9f9851595d.png\" title=\"\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b3.png\" alt=\"\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b3.png\" \/><\/p>\n<\/p>\n<p><strong style=\"margin: 0px;padding: 0px;max-width: 100%\">\u6d3e\u745e\u6797\u6700\u5f00\u59cb\u53d1\u751f\uff0c\u7528\u7279\u6709\u7684\u771f\u7a7a\u6cf5\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u52a0\u5de5\u5de5\u827a\u5236\u53d6\uff0c\u7531\u6d3b\u529b\u5c0f\u5206\u5b50\u6c34\u5728\u677f\u6750\u8868\u5c42\u201c\u751f\u957f\u53d1\u80b2\u201d\u51fa\u5f7b\u5e95\u6577\u5f62\u7684\u9ad8\u805a\u7269\u5851\u6599\u8584\u819c\u9540\u5c42\uff0c\u80fd\u6d82\u8986\u5230\u5404\u79cd\u5f62\u72b6\u7684\u8868\u5c42\uff0c\u5305\u542b\u9510\u5229\u7684\u68f1\u8fb9\uff0c\u7f1d\u9699\u91cc\u548c\u5185\u8868\u5c42\u3002\u6d3e\u745e\u6797\u662f\u516d\u5341\u5e74\u4ee3\u4e2d\u540e\u671f\u82f1\u56fdUnion Carbide Co. \u5f00\u53d1\u8bbe\u8ba1\u8fd0\u7528\u7684\u4e00\u79cd\u65b0\u5f0f\u6577\u5f62\u9540\u5c42\u539f\u6750\u6599\uff0c\u5b83\u662f\u4e00\u79cd\u5bf9\u4e8c\u7532\u82ef\u7684\u9ad8\u805a\u7269\uff0c\u4f9d\u636e\u5206\u5b50\u5f0f\u7684\u4e0d\u4e00\u6837\uff0c\u53ef\u5206\u6210N\u578b\u3001C\u578b\u3001D\u578b\u3001HT\u578b\u7b49\u591a\u79cd\u4e0d\u540c\uff0c\u4ef7\u94b1\u533a\u522b\u4e5f\u975e\u5e38\u5927\u3002<\/p>\n<p>\u00a0<\/p>\n<p>\u6d3e\u745e\u6797\u6d82\u6577\u5168\u8fc7\u7a0b\u5982\u4e0b\u56fe\u6240\u793a\uff1a<\/p>\n<p><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p style=\"text-align:center\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215141949-61b9f985385bc.png\" title=\"\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b4.png\" alt=\"\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b4.png\" \/><\/p>\n<p><strong style=\"margin: 0px;padding: 0px;max-width: 100%\">\u5bf9\u6bd4\u4e09\u9632\u6f06\uff0c\u6d3e\u745e\u6797\u6709\u5f88\u591a\u4f18\u70b9\uff1a<\/p>\n<p><strong style=\"margin: 0px;padding: 0px;max-width: 100%\"><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p style=\"text-align:center\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215141949-61b9f9855f006.png\" title=\"\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b5.png\" alt=\"\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b5.png\" \/><\/p>\n<p>\u4ece\u4e0a\u4e16\u7eaa90\u65f6\u4ee3\u672b\uff0c\u6d3e\u745e\u6797\u5c31\u88ab\u5f15\u8fdb\u4e2d\u56fd\u9500\u552e\u5e02\u573a\uff0c20\u5e74\u4ee5\u6765\u4ecd\u672a\u5f7b\u5e95\u66ff\u4ee3\u4e09\u9632\u6f06\u3002\u76f4\u63a5\u539f\u56e0\u6216\u662f\u6210\u672c\u8d39\u95ee\u9898\u3002\u4f20\u7edf\u5f0f\u516c\u53f8\u642d\u5efa\u4e09\u9632\u6f06\u751f\u4ea7\u7ebf\uff0c\u6210\u672c\u8d39\u53ea\u9700\u5341\u51e0\u4e07\uff0c\u800c\u6d3e\u745e\u6797\u673a\u5668\u8bbe\u5907\u8981\u51e0\u5341\u4e07\uff1b\u6d3e\u745e\u6797\u539f\u6599N\u578b\u3001C\u578b\u76f8\u5bf9\u6027\u8f83\u5212\u7b97\uff0c\u4f46\u5b58\u6709\u4e0d\u6297\u9633\u5149\u7167\u5c04\u3001\u7c98\u5408\u529b\u8f83\u5f31\u7b49\u95ee\u9898\uff0c\u800c\u4e09\u9632\u6f06\u7684\u4ef7\u94b1\u603b\u4f53\u5c31\u5341\u5206\u53cb\u5584\u3002\u4ece\u5b9e\u9645\u6765\u770b\uff0c\u6d3e\u745e\u6797\u8981\u5f7b\u5e95\u66ff\u4ee3\u4e09\u9632\u6f06\u5728\u4f20\u7edf\u4ea7\u4e1a\u7684\u5f71\u54cd\u529b\uff0c\u8def\u8fd8\u8f83\u957f\uff1b\u4f46\u54b1\u4eec\u4e5f\u89c1\u5230\u4e2d\u56fd\u6d3e\u745e\u6797\u539f\u6750\u6599\u901a\u8fc7\u591a\u5e74\u7684\u78e8\u70bc\uff0c\u7279\u6027\u5df2\u7ecf\u8fc5\u901f\u63d0\u9ad8\uff0c\u5df2\u5927\u81f4\u53ef\u4ee5\u5b8c\u6210\u539f\u6750\u6599\u56fd\u5185\u751f\u4ea7\u5236\u9020\u7684\u3002<\/p>\n<p>\u00a0<\/p>\n<p>\u9664\u5f00\u4e09\u9632\u6f06\uff0c\u6d3e\u745e\u6797\u8fd8\u6709\u4e00\u4e2a\u7ade\u4e89\u8005\uff0c\u53eb<strong style=\"margin: 0px;padding: 0px;max-width: 100%\">\u4f4e\u6e29\u7b49\u79bb\u5b50\u7eb3\u7c73\u9540\u819c\uff08PECVD\uff09\u3002<\/p>\n<p>\u00a0<\/p>\n<p>\u5bf9\u6bd4\u6d3e\u745e\u6797\uff0cPECVD\u6709\u4e0b\u5217\u4e24\u5c42\u9762\u4f18\u70b9\uff1a<\/p>\n<p><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p>1.\u5de5\u827a\u6d41\u7a0b\u63d0\u5347<br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p>\u662f\u4f9d\u9760\u5fae\u6ce2\u52a0\u70ed\u6216\u5fae\u6ce2\u5c04\u9891\uff0c\u4f7f\u5e26\u6709\u5851\u6599\u8584\u819c\u6784\u6210\u5206\u5b50\u7684\u6c7d\u4f53\u6c34\u89e3\uff0c\u5728\u90e8\u5206\u4ea7\u751f\u7b49\u79bb\u5b50\u3002\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6d3b\u529b\u5f3a\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u53cd\u6620\uff0c\u5728\u5546\u54c1\u4e0a\u5806\u79ef\u51fa\u671f\u5f85\u5851\u6599\u8584\u819c\u3002\u5728\u5de5\u827a\u6d41\u7a0b\u4e0a\uff0c\u6bd4\u6d3e\u745e\u6797\u5c11\u4e86\u6c7d\u5316\u3001\u88c2\u53162\u4e2a\u9636\u6bb5\uff0c\u5728\u6052\u6e29\u60c5\u51b5\u4e0b\u5c31\u53ef\u4ee5\u5b8c\u6210\u3002<\/p>\n<p><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p>2.\u5b9e\u9645\u6548\u679c\u63d0\u5347<\/p>\n<p>\u4ece\u5b9e\u9645\u6548\u679c\u770b\u6765\uff0cPECVD\u6bd4Parylene\u4e5f\u662f\u6709\u975e\u5e38\u5927\u4f18\u70b9\uff1a<\/p>\n<p><br style=\"margin: 0px;padding: 0px;max-width: 100%\" \/><\/p>\n<p style=\"text-align:center\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215141949-61b9f9857f255.png\" title=\"6\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b.png\" alt=\"6\u7535\u5b50\u4ea7\u54c1\u9632\u6c34\u6d82\u8986\u90a3\u4e9b\u4e8b.png\" \/><\/p>\n<p>\u4ee5\u624b\u673a\u4e0a\u6574\u4f53\u8868\u5c42\u8868\u5c42\u7684\u9540\u819c\u4e3a\u4f8b\u5b50\uff0c\u6d3e\u745e\u6797\u4e00\u65e6\u819c\u539a\u8d85\u51fa\u4e00\u5b9a\u8584\u539a\uff08\u51e0\u5341\u7eb3\u7c73\u6280\u672f\uff09\uff0c\u4fbf\u4f1a\u5728\u592a\u9633\u5e95\u4e0b\u53d1\u751f\u5f02\u8272\u95ee\u9898\uff0c\u800cPECVD\u6280\u672f\u6027\u53ef\u4ee5\u5728\u5341\u51e0\u7eb3\u7c73\u6280\u672f\u8584\u539a\u7684\u60c5\u5f62\u4e0b\u7ef4\u6301\u5546\u54c1\u4e00\u81f4\u6027\uff0c\u56e0\u6b64PECVD\u53d8\u6210\u624b\u673a\u4e0a\u6574\u4f53\u8868\u5c42\u8868\u5c42\u7684\u9540\u819c\u7684\u9996\u9009\u89e3\u51b3\u65b9\u6cd5\u3002<\/p>\n<p>\u00a0<\/p>\n<p>\u5ba2\u89c2\u6027\u800c\u8a00\uff0c\u6d3e\u745e\u6797\u548c\u4f4e\u6e29\u7b49\u79bb\u5b50\u8868\u5c42\u7684\u9540\u819c\u7684\u6280\u672f\u6027\u5e94\u7528\u9886\u57df\u5404\u6709\u4e0d\u540c\u3002Parylene\u662f\u4e00\u79cd\u89c4\u8303\u5546\u54c1\uff0c\u4e0d\u4f46\u53ef\u4ee5\u8fd0\u7528\u5728\u7535\u5b50\u8bbe\u5907\u7684\u9632\u6f6e\u8fd0\u7528\uff0c\u8fd8\u53ef\u4ee5\u89c4\u6a21\u6027\u3001\u89c4\u8303\u5316\u5730\u5728\u5927\u91cf\u4f20\u7edf\u4ea7\u4e1a\u8425\u9500\u63a8\u5e7f\u906e\u76d6\uff0c\u8981\u662f\u6ca1\u6709\u7cbe\u51c6\u8584\u539a\u9650\u5b9a\uff0c\u53ef\u4ee5\u4f9d\u7167\u89c4\u8303\u751f\u4ea7\u7ebf\u914d\u5907\u673a\u5668\u8bbe\u5907\uff0c\u5355\u72ec\u8d2d\u7f6e\u6d3e\u745e\u6797\u539f\u6750\u6599\uff1bPECVD\u5219\u5927\u91cf\u7528\u4ee5\u7cbe\u51c6\u7ea4\u8584\u6d82\u6577\u60c5\u666f\uff0c\u4f9d\u636e\u4f01\u4e1a\u4ea7\u54c1\u7279\u6027\uff0c\u8ba2\u5236\u5316\u914d\u7f6e\u539f\u6599\uff0c\u8fdb\u4e00\u6b65\u884d\u5316\u51fa\u590d\u5408\u888b\u539f\u6750\u6599\u3002<\/p>\n<p><br 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