{"id":24841,"date":"2021-12-25T10:05:58","date_gmt":"2021-12-25T02:05:58","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=24841"},"modified":"2021-12-25T08:45:46","modified_gmt":"2021-12-25T00:45:46","slug":"%e5%85%b3%e4%ba%8e%e9%9d%99%e7%94%b5%e6%94%be%e7%94%b5%ef%bc%88esd%ef%bc%89%e5%8e%9f%e7%90%86%e4%bb%a5%e5%8f%8a%e5%85%b6%e4%bf%9d%e6%8a%a4%e6%96%b9%e6%b3%95%e7%9a%84%e8%af%a6%e7%bb%86%e5%88%86","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=24841","title":{"rendered":"\u5173\u4e8e\u9759\u7535\u653e\u7535\uff08ESD\uff09\u539f\u7406\u4ee5\u53ca\u5176\u4fdd\u62a4\u65b9\u6cd5\u7684\u8be6\u7ec6\u5206\u6790"},"content":{"rendered":"

\u4e00\u76f4\u60f3\u7ed9\u5927\u4f19\u513f\u8bb2\u4e0bESD\u7684\u57fa\u7840\u7406\u8bba\uff0c\u5f88\u7d93\u5178\u3002\u53ef\u662f\u56e0\u4e3a\u903b\u8f91\u6027\u592a\u5f3a\uff0c\u4e00\u5207\u57fa\u7840\u7406\u8bba\u5168\u662f\u4e00\u73af\u5957\u4e00\u73af\u7684\uff0c\u5047\u5982\u4f60\u80af\u5b9a\u4e0d\u4f1a\u753b\u9e21\u86cb\uff0c\u7ec8\u7a76\u4e86\u4f60\u4e5f\u5c31\u4e0d\u5bb9\u6613\u753b\u5927\u885b\u3002<\/p>\n

\u5148\u4f86\u8c08\u9759\u7535\u653e\u7535(ESD: Electrostatic Discharge)\u6709\u54ea\u4e9b\uff1f\u8fd9\u5e94\u8be5\u662f\u5bfc\u81f4\u5168\u90e8\u7535\u5b50\u5143\u4ef6\u6216\u7535\u5b50\u5668\u4ef6\u7cfb\u7edf\u8f6f\u4ef6\u5bfc\u81f4\u8fc7\u591a\u7535\u5185\u5e94\u529b\u6bc1\u574f\u7684\u9996\u8981\u7f6a\u9b41\u7978\u9996\u3002\u7531\u4e8e\u9759\u7535\u611f\u5e94\u901a\u5e38\u4e00\u77ac\u95f4\u5de5\u4f5c\u7535\u538b\u5341\u5206\u9ad8(>\u597d\u51e0\u5343\u4f0f)\uff0c\u56e0\u6b64\u8fd9\u7c7b\u635f\u5bb3\u662f\u7834\u574f\u6027\u548c\u6c38\u4e45\u7684\uff0c\u4f1a\u5bfc\u81f4\u7535\u6e90\u7535\u8def\u7acb\u5373\u635f\u574f\u3002\u56e0\u6b64\u9632\u8303\u9759\u7535\u611f\u5e94\u635f\u5bb3\u662f\u5168\u90e8IC\u8bbe\u8ba1\u65b9\u6848\u548c\u751f\u4ea7\u5236\u9020\u7684\u9996\u8981\u96be\u70b9\u3002<\/p>\n

 <\/p>\n

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\"1.png\"<\/p>\n

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\u4e4b\u524d\u7684\u4e13\u9898\u8bb2\u5ea7\u89e3\u8bfbPN\u7ed3\u4e8c\u6781\u7ba1\u57fa\u7840\u7406\u8bba\u7684\u60c5\u51b5\u4e0b\uff0c\u5c31\u8bb2\u8fc7\u4e8c\u6781\u7ba1\u6709\u4e00\u4e2a\u7279\u70b9\uff1a\u6b63\u6307\u5bfc\u901a\u53cd\u65b9\u5411\u622a\u81f3\uff0c\u5e76\u4e14\u53cd\u504f\u5de5\u4f5c\u7535\u538b\u518d\u6b21\u63d0\u5347\u4f1a\u4ea7\u751f\u96ea\u5d29\u51fb\u7a7f\u800c\u5173\u65ad\uff0c\u5927\u5bb6\u79f0\u4f5c\u94b3\u4f4d\u4e8c\u6781\u7ba1(Clamp)\u3002\u8fd9\u6070\u597d\u662f\u5927\u5bb6\u8bbe\u8ba1\u65b9\u6848\u9759\u7535\u4fdd\u62a4\u6240\u987b\u8981\u7684\u7406\u8bba\u57fa\u7840\uff0c\u5927\u5bb6\u4fbf\u662f\u8fd0\u7528\u8fd9\u4e00\u53cd\u65b9\u5411\u622a\u81f3\u7279\u70b9\u8ba9\u8fd9\u4e00\u65c1\u901a\u5728\u4e00\u5207\u6b63\u5e38\u4e1a\u52a1\u65f6\u5904\u5728\u65ad\u6389\u60c5\u51b5\uff0c\u800c\u5916\u90e8\u6709\u9759\u7535\u611f\u5e94\u7684\u60c5\u51b5\u4e0b\u8fd9\u4e00\u65c1\u901a\u4e8c\u6781\u7ba1\u4ea7\u751f\u96ea\u5d29\u51fb\u7a7f\u800c\u4ea7\u751f\u65c1\u901a\u901a\u9053\u7ef4\u62a4\u4e86\u5167\u90e8\u7535\u6e90\u7535\u8def\u6216\u662f\u6805\u538b(\u662f\u5426\u76f8\u8fd1\u5bb6\u4e2d\u4e0d\u9508\u94a2\u6c34\u69fd\u6709\u4e00\u4e2a\u6ea2\u6c34\u53e3\uff0c\u907f\u514d\u81ea\u6765\u6c34\u9f99\u5934\u5fd8\u5173\u6389\u9020\u6210\u5168\u90e8\u6d17\u624b\u95f4\u6d2a\u6c34\u707e\u5bb3)\u3002<\/p>\n

\u90a3\u4e48\u95ee\u9898\u6765\u4e86\uff0c\u8fd9\u4e00\u7a7f\u900f\u4e86\u8fd9\u4e00\u7ef4\u62a4\u7535\u6e90\u7535\u8def\u662f\u5426\u5c31\u5b8c\u5168\u53bb\u4e16\u4e86\uff1f\u96be\u9053\u8bf4\u662f\u4e00\u6b21\u6027\u7684\uff1f\u56de\u7b54\u81ea\u7136\u5e76\u4e0d\u662f\u3002PN\u7ed3\u7684\u7a7f\u900f\u5206\u4e8c\u79cd\uff0c\u5206\u522b\u662f\u7535\u7a7f\u900f\u548c\u51fb\u7a7f\uff0c\u7535\u7a7f\u900f\u6307\u7684\u662f\u96ea\u5d29\u51fb\u7a7f(\u8f83\u4f4e\u6d53\u5ea6\u7684)\u548c\u9f50\u7eb3\u7a7f\u900f(\u6d53\u5ea6\u8f83\u9ad8\u7684)\uff0c\u800c\u8fd9\u4e00\u7535\u7a7f\u900f\u4e3b\u8981\u662f\u81ea\u7531\u7535\u5b50\u649e\u51fb\u6c34\u89e3\u9020\u6210\u65b0\u7684\u7535\u5b50\u5668\u4ef6-\u7a7a\u7a74\u5bf9(electron-hole)\uff0c\u56e0\u6b64\u5b83\u662f\u53ef\u4fee\u590d\u7684\u3002\u53ef\u662f\u51fb\u7a7f\u662f\u4e0d\u80fd\u4fee\u590d\u7684\uff0c\u7531\u4e8e\u53d1\u70ed\u91cf\u96c6\u805a\u9020\u6210\u7845(Si)\u88ab\u7194\u5316\u635f\u574f\u4e86\u3002\u56e0\u6b64\u5927\u5bb6\u5fc5\u987b\u64cd\u7eb5\u5728\u5173\u65ad\u7684\u4e00\u77ac\u95f4\u64cd\u7eb5\u7535\u6d41\u91cf\uff0c\u4e00\u822c\u4f1a\u5728\u7ef4\u62a4\u4e8c\u6781\u7ba1\u518d\u4e32\u8fde\u4e00\u4e2a\u9ad8\u7535\u963b\u5668\uff0c<\/p>\n

\u6b64\u5916\uff0c\u5927\u4f19\u513f\u662f\u5426\u53ef\u4ee5\u4e3e\u4e00\u53cd\u4e09\u4e86\u89e3\u4e3a\u4f55ESD\u7684\u5730\u533a\u662f\u4e0d\u53ef\u4ee5form Silicide\u7684\uff1f\u4e5f\u6709\u7ed9\u5927\u4f19\u513f\u4e00\u4e2a\u57fa\u7840\u7406\u8bba\uff0cESD\u901a\u5e38\u662f\u5728\u96c6\u6210ic\u952e\u5165\u7aefPad\u8fb9\u4e0a\uff0c\u4e0d\u53ef\u4ee5\u5728\u96c6\u6210ic\u91cc\u8fb9\uff0c\u7531\u4e8e\u5927\u5bb6\u4e00\u76f4\u671f\u5f85\u5916\u90e8\u7684\u9759\u7535\u611f\u5e94\u5fc5\u987b\u7b2c\u4e00\u65f6\u95f4\u6cc4\u6392\u6389\u5427\uff0c\u653e\u5230\u91cc\u8fb9\u4f1a\u51fa\u73b0\u5ef6\u8fdf\u65f6\u95f4\u7684(\u5173\u6ce8\u6211\u524d\u8fb9\u89e3\u5256\u5b66\u7684\u90a3\u4e00\u4e2a\u96c6\u6210icPAD\u8fb9\u4e0a\u90fd\u662f\u6709\u4e8c\u6781\u7ba1\u3002\u4e43\u81f3\u6709\u653e\u4e8c\u7ea7ESD\u7684\uff0c\u505a\u5230\u53cc\u5411\u4fdd\u969c\u7684\u76ee\u5730\u3002<\/p>\n

\"2.png\"<\/p>\n

\u5728\u8bb2ESD\u7684\u57fa\u672c\u539f\u7406\u548cProcess\u4ee5\u524d\uff0c\u5927\u5bb6\u5148\u8bb2\u4e0bESD\u7684\u89c4\u8303\u53ca\u5176\u6d4b\u8bd5\u6807\u51c6\uff0c\u4f9d\u636e\u9759\u7535\u7684\u4ea7\u751f\u65b9\u6cd5\u53ca\u5176\u5bf9\u7535\u6e90\u7535\u8def\u7684\u635f\u5bb3\u65b9\u5f0f\u4e0d\u4e00\u6837\u901a\u5e38\u5206\u6210\u56db\u79cd\u68c0\u6d4b\u65b9\u6cd5\uff1a\u8eab\u4f53\u5145\u653e\u7535\u65b9\u5f0f(HBM: Human-Body Model)\u3001\u8bbe\u5907\u5145\u653e\u7535\u65b9\u5f0f(Machine Model)\u3001\u5143\u5668\u4ef6\u7535\u6c60\u5145\u7535\u65b9\u5f0f(CDM: Charge-Device Model)\u3001\u9759\u7535\u573a\u78c1\u611f\u5e94\u65b9\u5f0f(FIM: Field-Induced Model)\uff0c\u53ef\u662f\u4e1a\u5185\u901a\u5e38\u5e94\u7528\u524d\u4e8c\u79cd\u65b9\u5f0f\u6765\u68c0\u6d4b(HBM, MM)\u3002<\/p>\n

1\u3001\u8eab\u4f53\u5145\u653e\u7535\u65b9\u5f0f(HBM)\uff1a\u81ea\u7136\u4fbf\u662f\u8eab\u4f53\u78e8\u64e6\u9020\u6210\u4e86\u6b63\u7535\u8377\u5ffd\u7136\u9047\u5230\u96c6\u6210ic\u91ca\u653e\u51fa\u6765\u7684\u6b63\u7535\u8377\u9020\u6210\u96c6\u6210ic\u635f\u574f\u7a7f\u900f\uff0c\u79cb\u5b63\u548c\u4ed6\u4eba\u78b0\u89e6\u5e38\u5e38\u89e6\u7535\u4e8b\u6545\u5c31\u662f\u8fd9\u4e2a\u7f18\u6545\u3002\u4e1a\u5185\u5bf9HBM\u7684ESD\u89c4\u8303\u4e5f\u5982\u5f71\u968f\u884c(MIL-STD-883C method 3015.7\uff0c\u7b49\u6548\u7535\u8def\u8eab\u4f53\u7535\u5bb9\u5668\u4e3a100pF\uff0c\u7b49\u6548\u7535\u8def\u4eba\u4f53\u7535\u963b\u4e3a1.5Kohm)\uff0c\u6216\u662f\u56fd\u9645\u7535\u5b50\u884c\u4e1a\u6807\u51c6(EIA\/JESD22-A114-A)\u4e5f\u662f\u6709\u8981\u6c42\uff0c\u770b\u7740\u4f60\u8981follow\u54ea\u4e00\u4efd\u4e86\u3002\u5982\u679c\u662fMIL-STD-883C method 3015.7\uff0c\u5b83\u8981\u6c42\u4f4e\u4e8e<2kV\u7684\u5219\u4e3aClass-1\uff0c\u57282kV~4kV\u7684\u4e3aclass-2\uff0c4kV~16kV\u7684\u4e3aclass-3\u3002<\/p>\n

\"3.gif\"<\/p>\n

2\u3001\u8bbe\u5907\u5145\u653e\u7535\u65b9\u5f0f(MM)\uff1a\u81ea\u7136\u4fbf\u662f\u8bbe\u5907(\u5982robot)\u632a\u52a8\u9020\u6210\u7684\u9759\u7535\u611f\u5e94\u78b0\u89e6\u96c6\u6210ic\u65f6\u7531pin\u811a\u91ca\u653e\u51fa\u6765\uff0c\u6b21\u89c4\u8303\u4e3aEIAJ-IC-121 method 20(\u6216\u662f\u89c4\u8303EIA\/JESD22-A115-A)\uff0c\u7b49\u6548\u7535\u8def\u8bbe\u5907\u7535\u963b\u5668\u4e3a0 (\u7531\u4e8e\u91d1\u5c5e\u6750\u6599)\uff0c\u7535\u5bb9\u5668\u4f9d\u7136\u4e3a100pF\u3002\u56e0\u4e3a\u4ea7\u54c1\u662f\u91d1\u5c5e\u6750\u6599\u4e14\u7535\u963b\u5668\u4e3a0\uff0c\u56e0\u6b64\u5145\u653e\u7535\u6642\u95f4\u5f88\u77ed\uff0c\u51e0\u4e4e\u662fms\u6216\u662fus\u4e2d\u95f4\u3002\u53ef\u662f\u66f4\u4e3b\u8981\u7684\u95ee\u9898\u662f\uff0c\u56e0\u4e3a\u7b49\u6548\u7535\u963b\u4e3a0\uff0c\u56e0\u6b64\u7535\u6d41\u91cf\u975e\u5e38\u5927\uff0c\u56e0\u6b64\u5373\u4f7f\u662f200V\u7684MM\u5145\u653e\u7535\u4e5f\u6bd42kV\u7684HBM\u5145\u653e\u7535\u7684\u4f24\u5bb3\u5927\u3002\u5e76\u4e14\u8bbe\u5907\u81ea\u8eab\u56e0\u4e3a\u6709\u5f88\u591a\u8f93\u7535\u7ebf\u76f8\u4e92\u4e4b\u95f4\u4f1a\u9020\u6210\u8026\u5408\u4f5c\u7528\uff0c\u56e0\u6b64\u7535\u6d41\u91cf\u4f1a\u968f\u65f6\u957f\u8f6c\u53d8\u800c\u5f71\u54cd\u8f6c\u53d8\u3002<\/p>\n

\"4.gif\"<\/p>\n

ESD\u7684\u6d4b\u8bd5\u6807\u51c6\u76f8\u8fd1FAB\u91cc\u8fb9\u7684GOI\u68c0\u6d4b\uff0c\u7279\u5b9apin\u4ee5\u540e\u5148\u4e3a\u4ed6\u4e00\u4e2aESD\u5de5\u4f5c\u7535\u538b\uff0c\u4e0d\u65ad\u4e00\u6bb5\u65f6\u95f4\u540e\uff0c\u968f\u540e\u518d\u56de\u5bb6\u68c0\u6d4b\u7535\u8377\u770b\u4e00\u4e0b\u662f\u4e0d\u662f\u6bc1\u574f\uff0c\u6ca1\u4ec0\u4e48\u95ee\u9898\u518d\u53bb\u52a0\u4e00\u4e2astep\u7684ESD\u5de5\u4f5c\u7535\u538b\u518d\u4e0d\u65ad\u4e00\u6bb5\u65f6\u95f4\uff0c\u518d\u6d4b\u7535\u8377\uff0c\u8fd9\u822c\u4e0d\u65ad\u76f4\u5230\u7a7f\u900f\uff0c\u8fd9\u65f6\u7684\u51fb\u7a7f\u7535\u538b\u4e3aESD\u7a7f\u900f\u7684\u4e34\u754c\u503c\u5de5\u4f5c\u7535\u538b(ESD failure threshold Voltage)\u3002\u901a\u5e38\u6211\u4eec\u662f\u7ed9\u7535\u6e90\u7535\u8def\u6253\u4e09\u6b21\u5de5\u4f5c\u7535\u538b(3 zaps)\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u51cf\u5c11\u68c0\u6d4b\u5468\u671f\u65f6\u95f4\uff0c\u901a\u5e38\u8d77\u6b62\u5de5\u4f5c\u7535\u538b\u7528\u89c4\u8303\u5de5\u4f5c\u7535\u538b\u768470% ESD threshold\uff0c\u6bcf\u4e00\u4e2astep\u53ef\u4ee5\u6309\u7167\u5fc5\u987b\u81ea\u8eab\u8c03\u828250V\u6216\u662f100V\u3002<\/p>\n\n\n\n\n\n
\n

(1). Stress number = 3 Zaps. (5 Zaps, the worst case)<\/p>\n<\/td>\n

<\/td>\n<\/tr>\n
\n

(2). Stress step<\/p>\n<\/td>\n

\n

\u0394VESD\u00a0= 50V(100V) for VZAP\u00a0 1000V<\/p>\n<\/td>\n<\/tr>\n

\n

(3). Starting VZAP\u00a0= 70% of averaged ESD failure threshold (VESD)<\/p>\n<\/td>\n

<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u6b64\u5916\uff0c\u7531\u4e8e\u6bcf\u4e00\u4e2achip\u7684pin\u811a\u8bb8\u591a\uff0c\u4f60\u662f\u4e00\u4e2a\u4e2apin\u68c0\u6d4b\u6216\u662f\u7ec4\u6210pin\u68c0\u6d4b\uff0c\u56e0\u6b64\u4f1a\u5206\u6210\u51e0\u7c7b\u7ec4\u6210\uff1aI\/O-pin\u68c0\u6d4b(Input and Output pins)\u3001pin-to-pin\u68c0\u6d4b\u3001Vdd-Vss\u68c0\u6d4b(\u952e\u5165\u7aef\u5230\u5bfc\u51fa\u7aef)\u3001Analog-pin\u3002<\/p>\n

1. I\/O pins\uff1a\u4fbf\u662f\u5404\u81ea\u5bf9input-pin\u548coutput-pin\u505aESD\u68c0\u6d4b\uff0c\u5e76\u4e14\u6b63\u7535\u8377\u6709\u6b63\u8d1f\u6781\u4e4b\u5206\uff0c\u56e0\u6b64\u6709\u56db\u79cd\u7ec4\u6210\uff1ainput \u6b63\u7535\u3001input \u8d1f\u7535\u3001output \u6b63\u7535\u3001output \u8d1f\u7535\u3002\u68c0\u6d4binput\u60c5\u51b5\u4e0b\uff0c\u5219output\u548c\u522b\u7684pin\u6240\u6709\u6d6e\u63a5(floating)\uff0c\u76f8\u53cd\u4e5f\u662f\u3002<\/p>\n

\"5.jpg\"<\/p>\n

2. pin-to-pin\u68c0\u6d4b:\u00a0\u9759\u7535\u653e\u7535\u4ea7\u751f\u5728pin-to-pin\u4e2d\u95f4\u4ea7\u751f\u63a7\u5236\u56de\u8def\uff0c\u53ef\u662f\u8981\u662f\u8981\u5e38\u5e382\u4e2a\u811a\u68c0\u6d4b\u7ec4\u6210\u8fc7\u591a\uff0c\u7531\u4e8e\u4e00\u5207\u7684I\/O\u7ed9\u5de5\u4f5c\u7535\u538b\u4ee5\u540e\u5047\u5982\u8981\u5bf9\u5168\u90e8\u7535\u6e90\u7535\u8def\u9020\u6210\u5371\u5bb3\u4e00\u5b9a\u662f\u5148\u901a\u8fc7VDD\/Vss\u624d\u53ef\u4ee5\u5bf9\u5168\u90e8\u7535\u6e90\u7535\u8def\u914d\u7535\uff0c\u56e0\u6b64\u6539\u8fdb\u7248\u5219\u7528\u67d0\u4e00I\/O-pin\u52a0\u6b63\u6216\u8d1f\u7684ESD\u5de5\u4f5c\u7535\u538b\uff0c\u522b\u7684\u5168\u90e8I\/O\u4e00\u8d77\u63a5\u5730\u88c5\u7f6e\uff0c\u53ef\u662f\u952e\u5165\u548c\u5bfc\u51fa\u4e0e\u6b64\u540c\u65f6\u6d6e\u63a5(Floating)\u3002<\/p>\n

\"6.jpg\"<\/p>\n

3\u3001Vdd-Vss\u4e2d\u95f4\u9759\u7535\u653e\u7535\uff1a\u53ea\u8981\u628aVdd\u548cVss\u63a5\u8d77\u4f86\uff0c\u5168\u90e8\u7684I\/O\u6240\u6709\u6d6e\u63a5(floating)\uff0c\u90a3\u6837\u7ed9\u9759\u7535\u611f\u5e94\u4f7f\u4ed6\u8d8a\u8fc7Vdd\u4e0eVss\u4e2d\u95f4\u3002<\/p>\n

\"7.jpg\"<\/p>\n

4\u3001Analog-pin\u5145\u653e\u7535\u68c0\u6d4b\uff1a\u7531\u4e8e\u6570\u5b57\u96c6\u6210\u7535\u8def\u8bb8\u591a\u5dee\u5206\u4fe1\u53f7\u6838\u5bf9(Differential Pair)\u6216\u662f\u8fd0\u653e\u7535\u8def(OP AMP)\u5168\u662f\u6709\u4e24\u4e2a\u952e\u5165\u7aef\uff0c\u907f\u514d\u4e00\u4e2a\u6bc1\u574f\u9020\u6210\u5dee\u5206\u4fe1\u53f7\u6838\u5bf9\u6216\u8fd0\u7b97\u65e0\u6548\uff0c\u56e0\u6b64\u5fc5\u987b\u72ec\u7acb\u505aESD\u68c0\u6d4b\uff0c\u81ea\u7136\u4fbf\u662f\u53ea\u5bf9\u4e8e\u8fd9\u4e24\u4e2apin\uff0c\u522b\u7684pin\u6240\u6709\u6d6e\u63a5(floating)\u3002<\/p>\n

\"8.jpg\"<\/p>\n

\u597d\u5566\uff0cESD\u7684\u57fa\u672c\u539f\u7406\u548c\u68c0\u6d4b\u4e00\u90e8\u5206\u5c31\u8bb2\u5230\u8fd9\u513f\u4e86\uff0c\u4e0b\u8fb9\u7136\u540e\u8bb2Process\u548c\u8bbe\u8ba1\u65b9\u6848\u4e0a\u7684factor<\/p>\n

\u4f34\u968f\u7740\u98a0\u8986\u6027\u521b\u65b0\u7684\u8fdb\u4e00\u6b65\u53d8\u5c0f\uff0c\u5143\u5668\u4ef6\u89c4\u683c\u66f4\u52a0\u5c0f\uff0c\u7ed3\u6df1\u6108\u6765\u6108\u6d45\uff0cGOX\u6108\u6765\u6108\u8584\uff0c\u56e0\u6b64\u9759\u7535\u611f\u5e94\u7a7f\u900f\u6108\u6765\u6108\u975e\u5e38\u5bb9\u6613\uff0c\u5e76\u4e14\u5728Advance\u5236\u9020\u91cc\u8fb9\uff0cSilicide\u5f15\u8fdb\u4e5f\u4f1a\u8ba9\u9759\u7535\u611f\u5e94\u7a7f\u900f\u8d8a\u6765\u8d8a\u8d8a\u6765\u8d8a\u9510\u5229\uff0c\u56e0\u6b64\u51e0\u4e4e\u4efb\u4f55\u7684ic\u8bbe\u8ba1\u90fd\u9700\u8981\u6446\u8131\u9759\u7535\u611f\u5e94\u7a7f\u900f\u95ee\u9898\u3002<\/p>\n

\"9.png\"<\/p>\n

\u9759\u7535\u653e\u7535\u7ef4\u62a4\u53ef\u4ee5\u4eceFAB\u7aefProcess\u5904\u7406\uff0c\u8fd8\u53ef\u4ee5\u4eceIC\u8bbe\u8ba1\u65b9\u6848\u7aefLayout\u8bbe\u8ba1\u5236\u4f5c\uff0c\u56e0\u6b64\u4f60\u80fd\u89c1\u5230Prcess\u6709\u4e00\u4e2aESD\u7684option layer\uff0c\u6216\u662fDesign rule\u91cc\u8fb9\u6709ESD\u7684\u8bbe\u8ba1\u65b9\u6848\u6807\u51c6\u53ef\u4f9b\u987e\u5ba2\u6311\u9009\u8fd9\u4e9b\u3002\u81ea\u7136\u6709\u4e00\u4e9b\u987e\u5ba2\u4e5f\u4f1a\u81ea\u8eab\u4f9d\u636eSPICE model\u7684\u7535\u8377\u6839\u636elayout\u8bbe\u8ba1\u5236\u4f5cESD\u3002<\/p>\n

1\u3001\u5236\u9020\u4e0a\u7684ESD\uff1a\u8981\u4e0d\u66f4\u6539PN\u7ed3\uff0c\u8981\u4e0d\u66f4\u6539PN\u7ed3\u7684\u8d1f\u8f7d\u7535\u963b\uff0c\u800c\u66f4\u6539PN\u7ed3\u53ea\u80fd\u4f9d\u9760ESD_IMP\u4e86\uff0c\u800c\u589e\u52a0\u4e0ePN\u7ed3\u7684\u8d1f\u8f7d\u7535\u963b\uff0c\u4fbf\u662f\u7528non-silicide\u6216\u662f\u4e32\u8054\u7535\u963b\u7684\u529e\u6cd5\u4e86\u3002<\/p>\n

1) Source\/Drain\u7684ESD implant\uff1a\u7531\u4e8e\u5927\u5bb6\u7684LDD\u6784\u9020\u5728gate poly\u4e24\u4fa7\u975e\u5e38\u5bb9\u6613\u4ea7\u751f2\u4e2a\u6d45\u7ed3\uff0c\u800c\u8fd9\u4e00\u6d45\u7ed3\u7684\u659c\u89d2\u9759\u7535\u573a\u8f83\u4e3a\u96c6\u4e2d\u5316\uff0c\u5e76\u4e14\u7531\u4e8e\u662f\u6d45\u7ed3\uff0c\u56e0\u6b64\u5b83\u4e0eGate\u8f83\u4e3a\u8fd1\uff0c\u56e0\u6b64\u53d7Gate\u7684\u5c3e\u7aef\u9759\u7535\u573a\u5371\u5bb3\u8f83\u4e3a\u5927\uff0c\u56e0\u6b64\u90a3\u6837\u7684LDD\u659c\u89d2\u5728\u8010ESD\u5145\u653e\u7535\u7684\u5b9e\u529b\u662f\u8f83\u4e3a\u5dee\u7684(4kV)\u3002\u53ef\u662f\u90a3\u6837\u7684\u8bdd\u8fd9\u4e00\u9644\u52a0\u7684MOS\u7684Gate\u5c31\u52a1\u5fc5\u8f83\u957f\u907f\u514d\u79bb\u65ad(punchthrough)\uff0c\u5e76\u4e14\u7531\u4e8e\u5143\u5668\u4ef6\u4e0d\u4e00\u6837\u4e86\uff0c\u56e0\u6b64\u5fc5\u987b\u72ec\u7acb\u83b7\u53d6\u5143\u5668\u4ef6\u7684SPICE Model\u3002<\/p>\n

\"10.gif\"<\/p>\n

2) \u89e6\u78b0\u5b54(contact)\u7684ESD implant\uff1a\u5728LDD\u5143\u5668\u4ef6\u7684N \u6f0f\u6781\u7684\u5b54\u4e0b\u8fb9\u6253\u4e00\u4e2aP \u7684\u787c\uff0c\u5e76\u4e14\u6df1\u5c42\u8981\u8d85\u51faN \u6f0f\u6781(drain)\u7684\u6df1\u5c42\uff0c\u90a3\u6837\u5c31\u53ef\u4ee5\u8ba9\u539f\u5148Drain\u7684\u51fb\u7a7f\u7535\u538b\u51cf\u5c11(8V–>6V)\uff0c\u56e0\u6b64\u53ef\u4ee5\u5728LDD\u659c\u89d2\u4ea7\u751f\u7a7f\u900f\u4ee5\u524d\u5148\u4eceDrain\u7a7f\u900f\u5bfc\u8d70\u8fdb\u800c\u7ef4\u62a4Drain\u548cGate\u7684\u7a7f\u900f\u3002\u56e0\u6b64\u90a3\u6837\u7684\u5236\u5b9a\u53ef\u4ee5\u7ef4\u6301\u5143\u5668\u4ef6\u89c4\u683c\u4e0d\u4f1a\u6539\u53d8\uff0c\u4e14MOS\u6784\u9020\u6c92\u6709\u66f4\u6539\uff0c\u6545\u4e0d\u7528\u518d\u6b21\u83b7\u53d6SPICE model\u3002\u81ea\u7136\u8fd9\u7c7b\u667a\u80fd\u5316\u7528\u4ee5non-silicide\u5236\u9020\uff0c\u4e0d\u7136contact\u4f60\u4e5f\u6253\u4e0d\u8fdb\u53bbimplant\u3002<\/p>\n

\"11.gif\"<\/p>\n

3) SAB (SAlicide Block)\uff1a\u4e00\u822c\u5927\u5bb6\u4e3a\u4e86\u66f4\u597d\u5730\u51cf\u5c11MOS\u7684\u4e92\u8054\u7535\u5bb9\u5668\uff0c\u5927\u5bb6\u4f1a\u5e94\u7528silicide\/SAlicide\u5236\u9020\uff0c\u53ef\u662f\u90a3\u6837\u5143\u5668\u4ef6\u5047\u5982\u5de5\u4f5c\u4e2d\u5728\u5bfc\u51fa\u7aef\uff0c\u5927\u5bb6\u7684\u5143\u5668\u4ef6\u8d1f\u8f7d\u7535\u963b\u964d\u4f4e\uff0c\u5916\u90e8ESD\u5de5\u4f5c\u7535\u538b\u53ef\u80fd\u6240\u6709\u8f7d\u5165\u5728LDD\u548cGate\u6784\u9020\u4e2d\u95f4\u975e\u5e38\u5bb9\u6613\u7a7f\u900f\u635f\u5bb3\uff0c\u56e0\u6b64\u5728\u5bfc\u51fa\u7ea7\u7684MOS\u7684Silicide\/Salicide\u5927\u5bb6\u901a\u5e38\u7528\u5230SAB(SAlicide Block)\u5149\u7f69\u906e\u6321RPO\uff0c\u4e0d\u5fc5\u4ea7\u751fsilicide\uff0c\u63d0\u5347\u4e00\u4e2aphoto layer\u6210\u672c\u4e0a\u5347\uff0c\u53ef\u662fESD\u5de5\u4f5c\u7535\u538b\u53ef\u4ee5\u4ece1kV\u63d0\u5347\u52304kV\u3002<\/p>\n

\"12.png\"<\/p>\n

4)\u4e32\u8054\u7535\u963b\u6cd5\uff1a\u8fd9\u7c7b\u529e\u6cd5\u65e0\u9700\u63d0\u5347\u5149\u7f69\uff0c\u5e94\u8be5\u662f\u6700\u8282\u7701\u6210\u672c\u7684\u4e86\uff0c\u57fa\u672c\u539f\u7406\u6709\u70b9\u76f8\u8fd1\u7b2c\u4e09\u79cd(SAB)\u63d0\u5347\u7535\u963b\u5668\u6cd5\uff0c\u6211\u4fbf\u6545\u610f\u4e3a\u4ed6\u4e32\u8fde\u4e00\u4e2a\u7535\u963b\u5668(\u4f8b\u5982Rs_NW\uff0c\u6216\u662fHiR\uff0c\u7b49)\uff0c\u90a3\u6837\u4e5f\u5230\u8fbe\u4e86SAB\u7684\u65b9\u5f0f\u3002<\/p>\n

\"13.gif\"<\/p>\n

2\u3001\u8bbe\u8ba1\u65b9\u6848\u4e0a\u7684ESD\uff1a\u8fd9\u5c31\u5f7b\u5e95\u9760\u8bbe\u8ba1\u5e08\u7684\u65f6\u95f4\u4e86\uff0c\u6709\u4e00\u4e9b\u516c\u53f8\u5728\u8bbe\u8ba1\u65b9\u6848\u6807\u51c6\u5c31\u65e9\u5df2\u7ed9\u4e88\u7ed9\u987e\u5ba2solution\u4e86\uff0c\u987e\u5ba2\u53ea\u9700\u5bf9\u7740\u753b\u5c31\u53ef\u4ee5\u4e86\uff0c\u6709\u4e00\u4e9b\u6c92\u6709\u7684\u5219\u53ea\u80fd\u4f9d\u9760\u987e\u5ba2\u81ea\u8eab\u7684designer\u4e86\uff0c\u8bb8\u591a\u8bbe\u8ba1\u65b9\u6848\u6807\u51c6\u5168\u662f\u5199\u7740\u8fd9\u4e00\u4ec5\u4ec5guideline\/reference\uff0c\u5e76\u4e0d\u662fguarantee\u7684\u3002\u4e00\u822c\u5168\u662f\u628aGate\/Source\/Bulk\u77ed\u8def\u5728\u4e00\u8d77\uff0c\u628aDrain\u7ed3\u5728I\/O\u7aef\u627f\u62c5ESD\u7684\u6d6a\u6d8c\u4fdd\u62a4\u5668(surge)\u5de5\u4f5c\u7535\u538b\uff0cNMOS\u79f0\u4f5cGGNMOS (Gate-Grounded NMOS)\uff0cPMOS\u79f0\u4f5cGDPMOS (Gate-to-Drain PMOS)\u3002<\/p>\n

\u4ee5NMOS\u4e3a\u4f8b\u5b50\uff0c\u57fa\u672c\u539f\u7406\u5168\u662fGate\u5173\u6389\u60c5\u51b5\uff0cSource\/Bulk\u7684PN\u7ed3\u539f\u672c\u662f\u77ed\u8def0\u504f\u7684\uff0c\u5f53I\/O\u7aef\u6709\u5927\u5de5\u4f5c\u7535\u538b\u65f6\uff0c\u5219Drain\/Bulk PN\u7ed3\u96ea\u5d29\u51fb\u7a7f\uff0c\u4e00\u77ac\u95f4bulk\u6709\u5f88\u5927\u7535\u6d41\u91cf\u4e0e\u886c\u5e95\u7535\u963b\u5668\u4ea7\u751f\u538b\u529b\u5dee\u9020\u6210Bulk\/Source\u7684PN\u6b63\u504f\uff0c\u56e0\u6b64\u8fd9\u4e00MOS\u7684\u751f\u5b58\u6a2a\u7740NPN\u7ba1\u8fdb\u5230\u53d8\u5927\u533a(\u53d1\u5c04\u7ed3\u6b63\u504f,\u96c6\u7535\u7ed3\u53cd\u504f)\uff0c\u56e0\u6b64\u5c55\u73b0Snap-Back\u7279\u70b9\uff0c\u5177\u6709\u4fdd\u969c\u529f\u6548\u3002PMOS\u540c\u6837\u63a8\u8bba\u3002<\/p>\n

\"14.png\"<\/p>\n

\u8fd9\u4e00\u57fa\u672c\u539f\u7406\u770b\u4e0a\u53bb\u7b80\u6613\uff0c\u53ef\u662f\u8bbe\u8ba1\u65b9\u6848\u7684\u6838\u5fc3\u601d\u60f3(know-how)\u6709\u54ea\u4e9b\uff1f\u5982\u4f55\u5f00\u542fBJT\uff1f\u5982\u4f55\u4fdd\u6301Snap-back\uff1f\u5982\u4f55\u6491\u4f4fHBM>2KV or 4KV\uff1f<\/p>\n

\u600e\u6837\u5f00\u542f\uff1f\u52a1\u5fc5\u6709\u5145\u8db3\u5927\u7684\u886c\u5e95\u7535\u6d41\u91cf\uff0c\u56e0\u6b64\u4e4b\u540e\u53d1\u5c55\u8d8b\u52bf\u5230\u4e86\u5982\u4eca\u5e7f\u6cdb\u91c7\u53d6\u7684\u591a\u6307\u4ea4\u53c9\u5f0f\u5e76\u63a5\u6784\u9020(multi-finger)\u3002\u53ef\u662f\u8fd9\u7c7b\u6784\u9020\u5173\u952e\u6280\u672f\u6027\u95ee\u9898\u662f\u57fa\u533a\u603b\u5bbd\u63d0\u5347\uff0c\u653e\u5927\u7cfb\u6570\u51cf\u5c11\uff0c\u56e0\u6b64Snap-back\u4e0d\u6613\u6253\u5f00\u3002\u5e76\u4e14\u4f34\u968f\u7740finger\u603b\u6570\u589e\u52a0\uff0c\u4f1a\u9020\u6210\u6bcf\u4e00\u4e2afinger\u4e2d\u95f4\u7684\u5300\u79f0\u6253\u5f00\u8d8a\u6765\u8d8a\u5f88\u8270\u96be\uff0c\u8fd9\u4e5f\u662fESD\u8bbe\u8ba1\u65b9\u6848\u7684\u77ed\u677f\u6240\u5c5e\u3002<\/p>\n

\"15.png\"<\/p>\n

\u5047\u5982\u8981\u66f4\u6539\u8fd9\u7c7b\u95ee\u9898\uff0c\u5927\u7ea6\u67092\u79cd\u4f5c\u6cd5(\u7531\u4e8etriger\u7684\u662f\u5de5\u4f5c\u7535\u538b\uff0c\u6539\u8fdb\u5de5\u4f5c\u7535\u538b\u8981\u4e0d\u662f\u7535\u963b\u5668\u8981\u4e0d\u662f\u7535\u6d41\u91cf)\uff1a1\u3001\u8fd0\u7528SAB(SAlicide-Block)\u5728I\/O\u7684Drain\u4e0a\u4ea7\u751f\u4e00\u4e2a\u9ad8\u963b\u7684non-Silicide\u5730\u533a\uff0c\u4fc3\u4f7f\u6f0f\u6781\u65b9\u5757\u7535\u963b\u6269\u5927\uff0c\u800c\u4fc3\u4f7fESD\u7535\u6d41\u91cf\u904d\u5e03\u66f4\u5300\u79f0\uff0c\u8fdb\u800c\u63d0\u5347\u6cc4\u6d41\u5de5\u4f5c\u80fd\u529b\uff1b2\u3001\u63d0\u5347\u4e00\u9053P-ESD (Inner-Pickup imp\uff0c\u76f8\u8fd1\u4e0a\u8fb9\u7684\u89e6\u78b0\u5b54P ESD imp)\uff0c\u5728N Drain\u4e0b\u8fb9\u6253\u4e00\u4e2aP \uff0c\u51cf\u5c11Drain\u7684\u96ea\u5d29\u51fb\u7a7f\u5de5\u4f5c\u7535\u538b\uff0c\u66f4\u4e45\u6709\u6bd4\u8f83\u591a\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u6d41\u91cf(\u8be6\u89c1\u53c2\u8003\u6587\u732e\u6bd5\u4e1a\u8bba\u6587: Inner Pickup on ESD of multi-finger NMOS.pdf)\u3002<\/p>\n

\u9488\u5bf9Snap-back\u7684ESD\u6709\u4e24\u4e2a\u5c0f\u5c0f\u57fa\u672c\u5e38\u8bc6\u8981\u8ddf\u5404\u4f4d\u5171\u4eab\u4e00\u4e0b\uff1a<\/p>\n

1)NMOS\u5927\u5bb6\u901a\u5e38\u90fd\u80fd\u89c1\u5230\u6bd4\u8f83\u597d\u7684Snap-back\u7279\u70b9\uff0c\u53ef\u662f\u4e8b\u5b9e\u4e0aPMOS\u96be\u4ee5\u6709snap-back\u7279\u70b9\uff0c\u5e76\u4e14PMOS\u8010ESD\u7684\u7279\u70b9\u5e7f\u6cdb\u6bd4NMOS\u597d\uff0c\u8fd9\u4e00\u5927\u9053\u7406\u540cHCI\u6548\u7528\uff0c\u6839\u672c\u539f\u56e0\u662fNMOS\u7a7f\u900f\u60c5\u51b5\u4e0b\u9020\u6210\u7684\u662f\u7535\u5b50\u5668\u4ef6\uff0c\u8fc1\u79fb\u7387\u975e\u5e38\u5927\uff0c\u56e0\u6b64Isub\u975e\u5e38\u5927\u975e\u5e38\u5bb9\u6613\u4fc3\u4f7fBulk\/Source\u6b63\u6307\u5bfc\u901a\uff0c\u53ef\u662fPMOS\u5c31\u96be\u54af\u3002<\/p>\n

2) Trigger\u5de5\u4f5c\u7535\u538b\/Hold\u5de5\u4f5c\u7535\u538b: Trigger\u5de5\u4f5c\u7535\u538b\u81ea\u7136\u4fbf\u662f\u4ee5\u524d\u5c06\u7684snap-back\u7684\u7b2c\u4e00\u4e2a\u8f6c\u6298\u70b9(Knee-point)\uff0c\u751f\u5b58BJT\u7684\u51fb\u7a7f\u7535\u538b\uff0c\u5e76\u4e14\u8981\u5904\u4e8eBVCEO\u4e0eBVCBO\u4e2d\u95f4\u3002\u800cHold\u5de5\u4f5c\u7535\u538b\u4fbf\u662f\u8981\u4fdd\u6301Snap-back\u4e0d\u65adON\uff0c\u53ef\u662f\u53c8\u53ef\u4ee5\u8fdb\u5230\u6805\u9501(Latch-up)\u60c5\u51b5\uff0c\u4e0d\u7136\u5c31\u8fdb\u5230\u4e8c\u6b21\u7a7f\u900f(\u51fb\u7a7f)\u800c\u7834\u574f\u4e86\u3002\u4e5f\u6709\u4e2a\u5b9a\u4e49\u4fbf\u662f\u4e8c\u6b21\u7a7f\u900f\u7535\u6d41\u91cf\uff0c\u4fbf\u662f\u8fdb\u5230Latch-up\u4ee5\u540eI^2*R\u53d1\u70ed\u91cf\u5267\u589e\u9020\u6210\u7845\u878d\u5316\u4e86\uff0c\u800c\u8fd9\u4e00\u4fbf\u662f\u8981\u8fc7\u6d41\u4fdd\u62a4\uff0c\u53ef\u4ee5\u5229\u7528\u64cd\u7eb5W\/L\uff0c\u6216\u662f\u63d0\u5347\u4e00\u4e2a\u8fc7\u6d41\u4fdd\u62a4\u9ad8\u963b\uff0c\u975e\u5e38\u7b80\u5355\u6700\u5e38\u89c1\u7684\u529e\u6cd5\u662f\u653e\u5927Drain\u7684\u95f4\u8ddd\/\u62c9\u5927sAB\u7684\u95f4\u8ddd(ESD rule\u7684\u5e38\u89c1\u4f5c\u6cd5)\u3002<\/p>\n

3\u3001\u6805\u538b\u85d5\u5408(Gate-Couple) ESD\u6280\u672f\u6027\uff1a\u5927\u5bb6\u521a\u624d\u8bb2\u8fc7\uff0cMulti-finger\u7684ESD\u8bbe\u8ba1\u65b9\u6848\u7684\u77ed\u677f\u662f\u6253\u5f00\u7684\u5300\u79f0\u6027\uff0c\u5047\u5b9a\u670910\u53eafinger\uff0c\u800c\u5728ESD \u5145\u653e\u7535\u4ea7\u751f\u65f6\uff0c\u8fd910 \u652ffinger \u5e76\u4e0d\u4e00\u5b9a\u4f1a\u4e0e\u6b64\u540c\u65f6\u5173\u65ad(\u4e00\u822c\u662f\u56e0Breakdown \u800c\u5173\u65ad)\uff0c\u666e\u904d\u5230\u4ec5\u67092-3 \u652ffinger\u4f1a\u4e3b\u5bfc\u901a\uff0c\u8fd9\u4e5f\u662f\u56e0\u5408\u7406\u5e03\u5c40\u4e0a\u6ca1\u6cd5\u4f7f\u6bcffinger\u7684\u76f8\u5bf9\u4f4d\u7f6e\u53ca\u540a\u7ebf\u65b9\u4f4d\u5b8c\u5168\u4e00\u81f4\u800c\u81f4\uff0c\u8fd92~3 \u652ffinger \u4e00\u5173\u65ad\uff0cESD\u7535\u6d41\u91cf\u4fbf\u96c6\u4e2d\u5316\u6d41\u5165\u8fd92~3\u652f\u7684finger\uff0c\u800c\u5176\u4ed6\u7684finger \u4ecd\u662f\u7ef4\u6301\u5173\u6389\u7684\uff0c\u56e0\u6b64\u5176ESD \u5b89\u5168\u9632\u62a4\u5de5\u4f5c\u80fd\u529b\u7b49\u6548\u4e8e\u4ec5\u67092~3 \u652ffinger\u7684\u5b89\u5168\u9632\u62a4\u5de5\u4f5c\u80fd\u529b\uff0c\u800c\u4e0d\u662f10 \u652ffinger \u7684\u5b89\u5168\u9632\u62a4\u5de5\u4f5c\u80fd\u529b\u3002<\/p>\n

\u8fd9\u4e5f\u5c31\u662f\u4e3a\u4ec0\u4e48\u90e8\u4ef6\u89c4\u683c\u65e9\u5df2\u505a\u5f97\u975e\u5e38\u5927\uff0c\u4f46ESD \u5b89\u5168\u9632\u62a4\u5de5\u4f5c\u80fd\u529b\u5e76\u6ca1\u6709\u5982\u9884\u4f30\u4f3c\u5730\u5347\u9ad8\u7684\u9996\u8981\u7f18\u6545\uff0c\u589e\u6253\u603b\u9762\u79ef\u65e0\u6cd5\u9884\u4f30\u4ea7\u751fESD\u63d0\u9ad8\uff0c\u8be5\u600e\u4e48\u529e\uff1f\u5176\u5b9e\u4e0d\u662f\u5f88\u96be\uff0c\u4fbf\u662f\u8981\u51cf\u5c11Vt1(Trigger\u5de5\u4f5c\u7535\u538b)\uff0c\u5927\u5bb6\u6839\u636e\u6805\u538b\u63d0\u5347\u5de5\u4f5c\u7535\u538b\u7684\u65b9\u6cd5\uff0c\u8ba9\u886c\u5e95\u5148\u6253\u5f00\u66ff\u4ee3\u7a7f\u900f\u800c\u63d0\u6d41\u677f\u901a\u9020\u6210\u886c\u5e95\u7535\u6d41\u91cf\uff0c\u6b64\u523b\u5c31\u53ef\u4ee5\u8ba9\u522b\u7684finger\u4e5f\u4e00\u8d77\u6253\u5f00\u8fdb\u5230\u5173\u65ad\u60c5\u51b5\uff0c\u8ba9\u6bcf\u4e00\u4e2afinger\u90fd\u6765\u627f\u62c5ESD\u7535\u6d41\u91cf\uff0c\u771f\u771f\u6b63\u6b63\u5145\u5206\u53d1\u6325\u5927\u89c4\u6a21\u7684ESD\u529f\u6548\u3002<\/p>\n

\u53ef\u662f\u8fd9\u7c7bGCNMOS\u7684ESD\u8bbe\u8ba1\u65b9\u6848\u6709\u4e00\u4e2a\u7f3a\u9677\u662f\u65ad\u9762\u6253\u5f00\u4e86\u9020\u6210\u4e86\u7535\u6d41\u91cf\u975e\u5e38\u5bb9\u6613\u5bfc\u81f4\u6805\u6c27\u7a7f\u900f\uff0c\u56e0\u6b64\u4ed6\u770b\u4e0d\u5230\u7684\u662f\u4e00\u79cd\u6709\u6548\u7684ESD\u65b9\u6848\u8bbe\u8ba1\uff0c\u5e76\u4e14\u6570\u5b57\u529f\u653e\u533a\u8d8a\u5c0f\u8005\u6805\u538b\u7684\u5371\u5bb3\u8d8a\u5927\uff0c\u800c\u6570\u5b57\u529f\u653e\u533a\u8d8a\u5927\u5219snap-back\u4f1a\u96be\u6253\u5f00\uff0c\u56e0\u6b64\u96be\u4ee5\u638c\u63e1\u3002<\/p>\n

4\u3001\u4e5f\u6709\u4e00\u79cd\u9519\u7efc\u590d\u6742\u7684ESD\u7ef4\u62a4\u7535\u6e90\u7535\u8def: \u6676\u95f8\u7ba1\u53ef\u63a7\u7845(SCR: Silicon Controlled Rectifier)\uff0c\u5b83\u4fbf\u662f\u5927\u5bb6\u4ee5\u524d\u8bb2\u8fc7\u7684CMOS\u751f\u5b58\u7684PNPN\u7ed3\u6784\u5f00\u542f\u9020\u6210Snap-Back\u800c\u4e14Latch-up\uff0c\u6839\u636eON\/OFF\u5b8c\u6210\u5bf9\u7535\u6e90\u7535\u8def\u7684\u7ef4\u62a4\uff0c\u5927\u4f19\u513f\u53ef\u4ee5\u56de\u671b\u4e00\u4e0b\uff0c\u53ea\u9700\u628a\u4e0a\u4e00\u7bc7\u91cc\u8fb9\u8fd9\u4e9b\u6291\u6b62LATCH-up\u7684factor\u5ff5\u5934\u8ba9\u5176\u4ea7\u751f\u5c31\u53ef\u4ee5\u4e86\uff0c\u4f46\u662f\u53ea\u6709\u9002\u7528Layout\uff0c\u4e0d\u53ef\u4ee5\u9002\u7528Process\uff0c\u4e0d\u7136Latch-up\u53c8\u8981fail\u4e86\u3002<\/p>\n

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