{"id":24538,"date":"2021-12-26T10:01:22","date_gmt":"2021-12-26T02:01:22","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=24538"},"modified":"2021-12-25T15:18:16","modified_gmt":"2021-12-25T07:18:16","slug":"%e7%ad%89%e7%a6%bb%e5%ad%90%e4%bd%93%e5%8a%a0%e5%bc%ba%e5%8c%96%e5%ad%a6%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%afpecvd%e7%99%be%e7%a7%91%e7%9f%a5%e8%af%86","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=24538","title":{"rendered":"\u7b49\u79bb\u5b50\u4f53\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79efpecvd\u767e\u79d1\u77e5\u8bc6"},"content":{"rendered":"

PECVD<\/p>\n

PECVD ( Plasma Enhanced Chemical Vapor Deposition ) — \u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u3002<\/p>\n

PECVD\uff1a\u662f\u4f9d\u9760\u5fae\u6ce2\u52a0\u70ed\u6216\u5fae\u6ce2\u5c04\u9891\u7b49\u4f7f\u5e26\u6709\u5851\u6599\u8584\u819c\u6784\u6210\u5206\u5b50\u7684\u6c7d\u4f53\u6c34\u89e3\uff0c\u5728\u90e8\u5206\u4ea7\u751f\u7b49\u79bb\u5b50\uff0c\u800c\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6d3b\u529b\u5f88\u5f3a\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u53cd\u6620\uff0c\u5728\u7845\u7247\u4e0a\u5806\u79ef\u6d3e\u51fa\u6240\u671f\u5f85\u7684\u5851\u6599\u8584\u819c\u3002\u4e3a\u4e86\u66f4\u597d\u5730\u4f7f\u5316\u5b66\u53d8\u5316\u80fd\u5728\u8f83\u4f4e\u7684\u6eab\u5ea6\u4e0b\u5f00\u5c55\uff0c\u884c\u9a76\u4e86\u7b49\u79bb\u5b50\u7684\u6d3b\u529b\u6765\u63a8\u52a8\u53cd\u6620\uff0c\u56e0\u6b64\u8fd9\u7c7bCVD\u79f0\u4e4b\u4e3a\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(PECVD).<\/p>\n

\u5b9a\u4e49<\/p>\n

PECVD ( Plasma Enhanced Chemical Vapor Deposition ) — \u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5<\/p>\n

PECVD\uff1a\u662f\u4f9d\u9760\u5fae\u6ce2\u52a0\u70ed\u6216\u5fae\u6ce2\u5c04\u9891\u7b49\u4f7f\u5e26\u6709\u5851\u6599\u8584\u819c\u6784\u6210\u5206\u5b50\u7684\u6c7d\u4f53\u6c34\u89e3\uff0c\u5728\u90e8\u5206\u4ea7\u751f\u7b49\u79bb\u5b50\uff0c\u800c\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6d3b\u529b\u5f88\u5f3a\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u53cd\u6620\uff0c\u5728\u7845\u7247\u4e0a\u5806\u79ef\u6d3e\u51fa\u6240\u671f\u5f85\u7684\u5851\u6599\u8584\u819c\u3002\u4e3a\u4e86\u66f4\u597d\u5730\u4f7f\u5316\u5b66\u53d8\u5316\u80fd\u5728\u8f83\u4f4e\u7684\u6eab\u5ea6\u4e0b\u5f00\u5c55\uff0c\u884c\u9a76\u4e86\u7b49\u79bb\u5b50\u7684\u6d3b\u529b\u6765\u63a8\u52a8\u53cd\u6620\uff0c\u56e0\u6b64\u8fd9\u7c7bCVD\u79f0\u4e4b\u4e3a\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(PECVD).<\/p>\n

\u8bd5\u9a8c\u539f\u7406<\/p>\n

\u662f\u4f9d\u9760\u5fae\u6ce2\u52a0\u70ed\u6216\u5fae\u6ce2\u5c04\u9891\u7b49\u4f7f\u5e26\u6709\u5851\u6599\u8584\u819c\u6784\u6210\u5206\u5b50\u7684\u6c7d\u4f53\uff0c\u5728\u90e8\u5206\u4ea7\u751f\u7b49\u79bb\u5b50\uff0c\u800c\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6d3b\u529b\u5f88\u5f3a\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u53cd\u6620\uff0c\u5728\u7845\u7247\u4e0a\u5806\u79ef\u6d3e\u51fa\u6240\u671f\u5f85\u7684\u5851\u6599\u8584\u819c\u3002<\/p>\n

\u76ca\u5904<\/p>\n

\u57fa\u672c\u4e0a\u6e29\u5ea6\u4f4e\uff1b\u5806\u79ef\u901f\u5ea6\u5feb\uff1b\u6d82\u819c\u6027\u4ef7\u6bd4\u9ad8\uff0c\u9488\u773c\u8f83\u5c11\uff0c\u4e0d\u5bb9\u6613\u5f00\u88c2\u3002<\/p>\n

\u7455\u73b7<\/p>\n

1.\u673a\u5668\u8bbe\u5907\u9879\u76ee\u6295\u8d44\u5927\u3001\u6210\u672c\u589e\u52a0\uff0c\u5bf9\u7a7a\u6c14\u7684\u7eaf\u51c0\u5ea6\u89c4\u5b9a\u9ad8\uff1b<\/p>\n

2.\u9540\u5c42\u5168\u8fc7\u7a0b\u4e2d\u5f62\u6210\u7684\u5f3a\u70c8\u566a\u58f0\u3001\u5f3a\u5149\u8f90\u5c04\u3001\u6709\u5bb3\u7269\u8d28\u3001\u91d1\u5c5e\u6750\u6599\u84b8\u6c14\u70df\u5c18\u7b49\u5bf9\u8eab\u4f53\u6709\u5371\u5bb3\uff1b<\/p>\n

3.\u5bf9\u5c0f\u5706\u5b54\u76f4\u5f84\u5185\u5916\u578b\u65e0\u6cd5\u9540\u5c42\u7b49\u3002<\/p>\n

4.\u5806\u79ef\u4ee5\u540e\u9020\u6210\u7684\u5e9f\u6c14\u4e0d\u5bb9\u6613\u89e3\u51b3\u3002<\/p>\n

\u4e8b\u4f8b\uff1a\u5728PECVD\u52a0\u5de5\u5de5\u827a\u4e2d\u7531\u4e8e\u7b49\u79bb\u5b50\u4e2d\u5feb\u901f\u8fd0\u52a8\u7684\u7535\u5b50\u5668\u4ef6\u649e\u5230\u4e2d\u6027\u5316\u7684\u53cd\u6620\u6c7d\u4f53\u5206\u5b50\u7ed3\u6784\uff0c\u4fbf\u4f1a\u4f7f\u4e2d\u6027\u5316\u53cd\u6620\u6c7d\u4f53\u5206\u5b50\u7ed3\u6784\u53d8\u4e3a\u6b8b\u7247\u6216\u5904\u5728\u6fc0\u8bdd\u7684\u60c5\u51b5\u975e\u5e38\u5bb9\u6613\u51fa\u73b0\u53cd\u6620\u3002\u886c\u5e95\u6eab\u5ea6\u901a\u5e38\u7ef4\u6301\u5728350\u2103\u4e0a\u4e0b\u5c31\u53ef\u4ee5\u83b7\u5f97\u51fa\u8272\u7684SiOx\u6216SiNx\u5851\u6599\u8584\u819c\uff0c\u53ef\u4ee5\u505a\u4e3a\u7535\u5b50\u5668\u4ef6\u6700\u7ec8\u7684\u949d\u5316\u73cd\u60dc\u5c42\uff0c\u53d1\u5c55\u7535\u5b50\u5668\u4ef6\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n

\u4e8b\u4f8b<\/p>\n

\u5728PECVD\u52a0\u5de5\u5de5\u827a\u4e2d\u7531\u4e8e\u7b49\u79bb\u5b50\u4e2d\u5feb\u901f\u8fd0\u52a8\u7684\u7535\u5b50\u5668\u4ef6\u649e\u5230\u4e2d\u6027\u5316\u7684\u53cd\u6620\u6c7d\u4f53\u5206\u5b50\u7ed3\u6784\uff0c\u4fbf\u4f1a\u4f7f\u4e2d\u6027\u5316\u53cd\u6620\u6c7d\u4f53\u5206\u5b50\u7ed3\u6784\u53d8\u4e3a\u6b8b\u7247\u6216\u5904\u5728\u6fc0\u8bdd\u7684\u60c5\u51b5\u975e\u5e38\u5bb9\u6613\u51fa\u73b0\u53cd\u6620\u3002\u886c\u5e95\u6eab\u5ea6\u901a\u5e38\u7ef4\u6301\u5728350\u2103\u4e0a\u4e0b\u5c31\u53ef\u4ee5\u83b7\u5f97\u51fa\u8272\u7684SiOx\u6216SiNx\u5851\u6599\u8584\u819c\uff0c\u53ef\u4ee5\u505a\u4e3a\u7535\u5b50\u5668\u4ef6\u6700\u7ec8\u7684\u949d\u5316\u73cd\u60dc\u5c42\uff0c\u53d1\u5c55\u7535\u5b50\u5668\u4ef6\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n

\u51e0\u7c7bPECVD\u5b89\u88c5<\/p>\n

\u56fe\uff08a\uff09\u662f\u4e00\u79cd\u975e\u5e38\u7b80\u5355\u7684\u7535\u611f\u8026\u5408\u9020\u6210\u7b49\u79bb\u5b50\u7684PECVD\u5b89\u88c5\uff0c\u53ef\u4ee5\u5728\u8bd5\u9a8c\u5ba4\u4e2d\u5e94\u7528\u3002<\/p>\n

\u56feb\uff09\u5b83\u662f\u4e00\u79cd\u5e73\u884c\u9762\u677f\u7ed3\u6784\u5b89\u88c5\u3002\u886c\u5e95\u653e\u5230\u5177\u5907\u6e29\u5ea6\u63a7\u5236\u5b89\u88c5\u7684\u4e0b\u8fb9\u5e73\u677f\u7535\u8111\u4e0a\uff0c\u6c14\u4f53\u538b\u5f3a\u901a\u5e38\u7ef4\u6301\u5728133Pa\u4e0a\u4e0b\uff0c\u5fae\u6ce2\u5c04\u9891\u5de5\u4f5c\u7535\u538b\u52a0\u5728\u5de6\u53f3\u5e73\u884c\u9762\u677f\u4e2d\u95f4\uff0c\u56e0\u6b64\u5728\u5de6\u53f3\u5e73\u677f\u7535\u8111\u95f4\u4fbf\u4f1a\u53d1\u751f\u7535\u5bb9\u8026\u5408\u5f0f\u7684\u6c7d\u4f53\u5145\u653e\u7535\uff0c\u5e76\u9020\u6210\u7b49\u79bb\u5b50\u3002<\/p>\n

\u56fe\uff08c\uff09\u662f\u4e00\u79cd\u6269\u6563\u7089\u5185\u7f6e\u653e\u591a\u4e2a\u5e73\u884c\u9762\u677f\u3001\u7531\u7535\u5bb9\u4f20\u611f\u5668\u5145\u653e\u7535\u9020\u6210\u7b49\u79bb\u5b50\u7684PECVD\u5b89\u88c5\u3002\u5b83\u7684\u8bbe\u8ba1\u65b9\u6848\u5173\u952e\u4e3a\u4e86\u66f4\u597d\u5730\u76f8\u4e92\u914d\u5408\u52a0\u5de5\u5382\u5236\u9020\u7684\u5fc5\u9700\uff0c\u63d0\u9ad8\u7089\u751f\u4ea7\u91cf\u3002<\/p>\n

<\/p>\n

CVD\u8fd0\u7528\uff1a<\/p>\n

\u5728\u534a\u5bfc\u4f53\u6750\u6599\u5de5\u4e1a\u751f\u4ea7\u4e2d\u7684\u8fd0\u7528\u4f34\u968f\u7740\u534a\u5bfc\u4f53\u6750\u6599\u5de5\u4e1a\u751f\u4ea7\u7684\u53d1\u5c55\u8d8b\u52bf,\u5851\u6599\u8584\u819c\u539f\u6750\u6599\u5728\u534a\u5bfc\u4f53\u6750\u6599\u5de5\u4e1a\u751f\u4ea7\u4e2d\u4e5f\u62e5\u6709\u666e\u904d\u7684\u4e3b\u8981\u7528\u9014,\u5982\u53ef\u4ee5\u4f5c\u4e3a\u6805\u7535\u7ea7\u3001\u53cc\u5c42\u8d70\u7ebf\u7684\u56fa\u5c42\u7edd\u7f18\u5c42\u819c\u3001\u91d1\u5c5e\u6750\u6599\u8d70\u7ebf\u3001\u7535\u963b\u5668\u53ca\u5176\u6392\u70ed\u539f\u6750\u6599\u7b49\u3002\u9009\u7528\u6781\u9ad8\u771f\u7a7a\u6cf5(UHV) \/ \u7d2b\u5916\u7ebf( HV) \u80fd \u91cf\u534f\u52a9\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u52a0\u5de5\u5de5\u827a\u751f\u957f\u53d1\u80b2\u7684SiGe\/ Si \u539f\u6750\u6599\u4ee5\u5176\u5feb\u901f\u3001\u6210\u672c\u4f4e\u7684\u5f15\u98ce,\u5411\u4f20\u7edf\u5f0f\u7684Si\u548cGaAs \u6280\u672f\u6027\u4ea7\u751f\u660e\u663e\u7684\u53eb\u56a3\u3002\u884c\u9a76UHV\/UV\/ CVD \u52a0\u5de5\u5de5\u827a\u53ef\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u83b7\u5f97SiGe \u539f\u6750\u6599,\u9632\u6b62\u4e86\u4f20\u7edf\u624b\u5de5\u827a\u56e0\u9ad8\u6eab\u800c\u4ea7\u751f\u7684\u82af\u7247\u6da8\u7f29\u3001\u6bc1\u574f\u91d1\u5c5e\u6750\u6599\u8d70\u7ebf\u7b49\u66f2\u7ebf\u56fe,\u8f6c\u5316\u6210\u7684SiGe \u5355\u6676\u4f53\u5851\u6599\u8584\u819c\u5916\u578b\u5e73\u6574\u5149\u6d01,\u6a2a\u65ad\u9762\u5300\u79f0\u3002\u5728\u96c6\u6210\u7535\u8def\u5de5\u827a\u7535\u5b50\u5668\u4ef6\u5236\u9020\u4e2d,\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u8fd8\u80fd\u591f\u7528\u4e8e\u5806\u79ef\u591a\u6676\u7845\u819c\u3001\u94a8\u819c\u3001\u94dd\u6a21\u3001\u91d1\u5c5e\u6750\u6599\u7845\u5316\u7269\u3001\u4e8c\u6c27\u5316\u7845\u819c\u53ca\u5176\u6c2e\u5316\u7845\u819c\u7b49\u3002<\/p>\n

 <\/p>\n

\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\"\"<\/p>\n

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PECVDPECVD ( Plasma Enhanced Chemical Vapor Deposition ) — \u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u3002PECVD\uff1a\u662f\u501f\u52a9\u5fae\u6ce2\u6216\u5c04\u9891\u7b49\u4f7f\u542b\u6709\u8584\u819c\u7ec4\u6210\u539f\u5b50\u7684\u6c14\u4f53\u7535\u79bb\uff0c\u5728\u5c40\u90e8\u5f62\u6210\u7b49\u79bb\u5b50\u4f53\uff0c\u800c\u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6d3b\u6027\u5f88\u5f3a\uff0c\u5f88\u5bb9\u6613\u53d1\u751f\u53cd\u5e94\uff0c\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u51fa\u6240\u671f\u671b\u7684\u8584\u819c\u3002\u4e3a\u4e86\u4f7f\u5316\u5b66\u53cd\u5e94\u80fd\u5728\u8f83\u4f4e\u7684\u6e29\u5ea6\u4e0b\u8fdb\u884c\uff0c\u5229\u7528\u4e86\u7b49\u79bb\u5b50\u4f53\u7684\u6d3b\u6027\u6765\u4fc3\u8fdb\u53cd\u5e94\uff0c\u56e0\u800c\u8fd9\u79cdCVD\u79f0\u4e3a\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(PECVD).\u6982\u5ff5 PECVD 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