{"id":24299,"date":"2021-12-27T09:57:16","date_gmt":"2021-12-27T01:57:16","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=24299"},"modified":"2021-12-25T15:47:33","modified_gmt":"2021-12-25T07:47:33","slug":"%e8%b6%85%e7%96%8f%e6%b0%b4%e8%86%9c%e5%b1%82%e9%98%b2%e8%85%90%e8%9a%80%e6%9c%ba%e7%90%86%e5%8f%8a%e6%b0%94%e7%9b%b8%e6%b3%95%e5%88%b6%e5%a4%87%e6%8a%80%e6%9c%af","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=24299","title":{"rendered":"\u8d85\u758f\u6c34\u819c\u5c42\u9632\u8150\u8680\u673a\u7406\u53ca\u6c14\u76f8\u6cd5\u5236\u5907\u6280\u672f"},"content":{"rendered":"

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\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\uff08CVD\uff09\u662f\u8fd0\u7528\u6c14\u76f8\u53cd\u5e94\u7269\u5728\u677f\u6750\u8868\u5c42\u5806\u79ef\u4ea7\u751f\u56fa\u4f53\u819c\u7684\u6280\u672f\u6027\uff0c\u5177\u5907\u5851\u6599\u8584\u819c\u6784\u6210\u53ef\u63a7\u6027\u3001\u4f4e\u6210\u672c\u3001\u4f7f\u7528\u65b9\u4fbf\u3001\u5236\u53d6\u819c\u5c42\u91cd\u590d\u597d\u3001\u819c\u5c42\u5300\u79f0\u3001\u5e94\u7528\u9886\u57df\u5e7f\u3001\u4e0d\u4f1a\u53d7\u5230\u677f\u6750\u6837\u5b50\u9650\u5b9a\u53ca\u5176\u5bf9\u57fa\u7840\u539f\u6750\u6599\u65e0\u5371\u5bb3\u7b49\u4f18\u52bf\uff0c\u662f\u66f4\u6539\u8868\u5c42\u7279\u6027\u548c\u5916\u90e8\u7ecf\u6d4e\u7ed3\u6784\u7279\u5f81\u7684\u6709\u6548\u7684\u65b9\u5f0f\u3002\u6587\u4e2d\u5177\u4f53\u63cf\u8ff0\u4e86\u8d85\u758f\u6c34\u819c\u5c42\u7684\u8010\u8150\u8680\u539f\u7406\u548c\u9ad8\u6548\u6db2\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u5728\u8010\u8150\u8680\u884c\u4e1a\u7684\u7814\u7a76\u6210\u679c\uff0c\u53ca\u5176\u5bf9\u8d85\u758f\u6c34\u819c\u5c42\u5c06\u6765\u7684\u672a\u6765\u5c55\u671b\u3002<\/p>\n

1 \u8d85\u758f\u6c34\u819c\u5c42\u8010\u8150\u8680\u539f\u7406<\/p>\n

1.1 \u6c14\u57abcc\u6548\u7528<\/p>\n

Wenzel\u548cCassie\u5404\u81ea\u5c31\u8d85\u758f\u6c34\u8868\u5c42\u4e0e\u6db2\u6001\u7684\u89e6\u78b0\u79cd\u7c7b\u521b\u5efa\u4e86\u6570\u5b66\u5206\u6790\u6a21\u578b\uff0c\u5404\u81ea\u79f0\u4e4b\u4e3aWenzel\u5b9e\u4f53\u6a21\u578b\u548cCassie\u5b9e\u4f53\u6a21\u578b\u3002\u4f7f\u8868\u5c42\u5f97\u5230\u8d85\u758f\u6c34\u7279\u6027\u7684\u5148\u51b3\u6761\u4ef6\u4e4b\u4e00\u4e3a\u8868\u9762\u5c42\u6784\u5efa\u5177\u6709\u4e00\u5b9a\u8868\u9762\u7c97\u7cd9\u5ea6\u7684\u5fae-\u7eb3\u7c73\u6280\u672f\u5c42\u9762\u7684\u9636\u7ea7\u6784\u9020\uff0c\u56e0\u800c\uff0cWenze\u89c9\u5f97\u56fa\u9ad8\u6548\u6db2\u76f8\u4e2d\u95f4\u89e6\u78b0\u7684\u5177\u4f53\u603b\u9762\u79ef\u8981\u8d85\u8fc7\u8868\u89c2\u51e0\u4f55\u56fe\u5f62\u4e0a\u7559\u610f\u5230\u7684\u603b\u9762\u79ef\uff0c\u5e76\u5bf9\u6768\u6c0f\u6a21\u578b\u5f00\u5c55\u4e86\u8c03\u6574\uff0c\u5f15\u8fdb\u4e86\u8868\u9762\u7c97\u7cd9\u5ea6\u8981\u7d20r,\u5176\u5b9e\u4f53\u6a21\u578b\u516c\u5f0f\u8ba1\u7b97\u4e3a\uff1a<\/p>\n

\"1.png\"<\/p>\n

\n

\u5728\u5176\u4e2d\uff0c\u03b8 \u2018\u4e3aWenzel\u5b9e\u4f53\u6a21\u578b\u4e0b\u7684\u8868\u9762\u5f20\u529b\uff0cr\u4e3a\u8868\u9762\u7c97\u7cd9\u5ea6\u8981\u7d20\uff0c\u03c3SV\u3001\u03c3SL\u548c\u03c3LV\u5404\u81ea\u4e3a\u56fa-\u6c14\u3001\u56fa-\u6db2\u548c\u6db2-\u6c14\u7684\u8868\u9762\u5f20\u529b\uff0c\u03b8\u4e3a\u7406\u60f3\u5316\u5149\u6ed1\u8868\u5c42\u7684\u8868\u9762\u5f20\u529b\u3002<\/p>\n

\u4f46\u5728\u771f\u5b9e\u4e2d\uff0c\u6db2\u6001\u4e0e\u8d85\u758f\u6c34\u8868\u5c42\u7684\u89e6\u78b0\u901a\u5e38\u4e3a\u590d\u5408\u578b\u89e6\u78b0\uff0c\u5373\u5728\u51fa\u6db2\u4e0e\u9875\u9762\u4e2d\u95f4\u201c\u5305\u56ca\u201d\u6709\u6c14\u4f53\uff0c\u4ece\u800c\uff0cCassie\u4ece\u70ed\u5b66\u89c6\u89d2\u63a8\u8bba\u521b\u5efa\u4e86Cassie\u5b9e\u4f53\u6a21\u578b,\u5176\u65b9\u7a0b\u5f0f\u4e3a\uff1a<\/p>\n

\"2.png\"<\/p>\n

\n

\u5728\u5176\u4e2d\uff0c\u03b8*\u4e3aCassie\u5b9e\u4f53\u6a21\u578b\u4e0b\u7684\u8868\u9762\u5f20\u529b\uff0cf1\u548cf2\u5404\u81ea\u4e3a2\u79cd\u7269\u8d28\u5728\u8868\u5c42\u7684\u603b\u9762\u79ef\u6210\u7ee9\uff0c\u03b81\u548c\u03b82\u5404\u81ea\u4e3a\u8fd9\u4e8c\u79cd\u7269\u8d28\u4e0a\u7684\u672c\u5f81\u8868\u9762\u5f20\u529b\u3002<\/p>\n

\u5177\u6709Cassie\u5b9e\u4f53\u6a21\u578b\u7684\u8d85\u758f\u6c34\u8868\u5c42\uff0c\u5747\u6709\u6c14\u57abcc\u6548\u7528\u7684\u5b58\u6709\uff0c\u800c\u6c14\u57abcc\u6548\u7528\u5c31\u662f\u6307\u8d85\u758f\u6c34\u8868\u5c42\u72ec\u6709\u7684\u5fae-\u7eb3\u7c73\u6280\u672f\u4e8c\u5143\u7ed3\u6784\uff0c\u5c06\u6c14\u4f53\u201c\u5305\u56ca\u201d\u4e4b\u4e2d\uff0c\u4f7f\u677f\u6750\u8868\u5c42\u4ea7\u751f\u4e00\u4e2a\u4e2a\u7684\u201c\u6c14\u888b\u201d\uff0c\u5982\u6c14\u57abcc\u4e00\u822c\uff0c\u5c06\u6d78\u8680\u7269\u8d28\u4e0e\u677f\u6750\u5206\u9694\uff0c\u505a\u5230\u8010\u8150\u8680\u7684\u5b9e\u9645\u6548\u679c\u3002Qu\u00e9r\u00e9\u7b49\u7814\u7a76\u53d1\u73b0\uff0c\u9488\u5bf9\u4eb2\u6c34\u6027\u8868\u5c42\uff0c\u6df1\u9677\u4e0d\u5149\u6ed1\u8868\u5c42\u7684\u6c14\u4f53\u5904\u5728\u4e9a\u7a33\u60c5\u51b5\u7684\u6807\u51c6\u4e3a\uff1a<\/p>\n

\"3.png\"<\/p>\n

\n

\u5728\u5176\u4e2d\uff0c\u03c6s\u4e3a\u51fa\u6db2\u4e0b\u56fa-\u6db2\u9875\u9762\u6240\u5360\u7684\u5360\u6bd4\u3002\u7531\u6b64\u53ef\u89c1\uff0c\u5f53\u03b8>90\u00b0\u65f6\uff0c\u6c14\u4f53\u5c06\u88ab\u201c\u5305\u56ca\u201d\u4e8e\u8868\u5c42\u5fae-\u7eb3\u7c73\u6280\u672f\u4e8c\u5143\u7ed3\u6784\u4e2d\u3002Ishizaki\u7b49\u548cHe\u7b49\u7684\u5149\u7535\u50ac\u5316\u68c0\u6d4b\u7ed3\u679c\u663e\u793a\uff0c\u53ea\u9700\u8fbe\u5230\u8be5\u4e9a\u7a33\u6001\u6807\u51c6\uff0c\u6c14\u4f53\u819c\u5c31\u53ef\u4ee5\u5e73\u7a33\u5b58\u6709\u4e8e\u8d85\u758f\u6c34\u8868\u5c42\u7684\u4e0d\u5149\u6ed1\u6784\u9020\u4e2d\u3002<\/p>\n

1.2 \u5b54\u72b6\u6548\u7528<\/p>\n

\u8d85\u758f\u6c34\u8868\u5c42\u5177\u5907\u5f88\u591a\u5fae-\u7eb3\u9650\u5ea6\u7684\u51f8\u8d77\u548c\u5b54\u72b6\u6784\u9020\uff0c\u8fd9\u79cd\u6784\u9020\u201c\u5305\u56ca\u201d\u4e86\u5f88\u591a\u6c14\u4f53\uff0c\u7ec4\u6210\u6bdb\u7ec6\u8840\u7ba1\u7ba1\u7406\u4f53\u7cfb\uff0c\u5728\u6db2\u3001\u6c14\u9875\u9762\uff0c\u56e0\u4e3a\u6bdb\u7ec6\u4f5c\u7528\uff0c\u4ea7\u751f\u51f8\u73af\u5f62\u9875\u9762\uff0c\u5728\u5b54\u72b6\u5de5\u4f5c\u538b\u529b\u529f\u6548\u4e0b\uff0c\u963b\u62e6\u6db2\u6001\u6e17\u900f\u5230\u8d85\u758f\u6c34\u8868\u5c42\u3002\u6bdb\u7ec6\u8840\u7ba1\u4e2d\u659c\u9762\u538b\u529b\u5dee\u53ef\u4ee5\u7528\u4e0b\u5f0f\u8868\u660e\uff1a<\/p>\n

\"4.png\"<\/p>\n

\u5728\u5176\u4e2d\uff0cPc\u4e3a\u5b54\u72b6\u5de5\u4f5c\u538b\u529b\uff0cR\u4e3a\u6bdb\u7ec6\u8840\u7ba1\u7684\u534a\u5f84\uff0c\u03b3\u4e3a\u6db2\/\u6c14\u9875\u9762\u754c\u9762\u5f20\u529b\u3002\u9488\u5bf9\u8d85\u758f\u6c34\u8868\u5c42\uff0c\u6c34\u8868\u9762\u5f20\u529b>150\u00b0\uff0c\u4f9d\u636e\u4e0a\u5f0f\u5f97\u77e5\uff0cPc<0,\u5373\u659c\u9762\u538b\u529b\u5dee\u4e3a\u8d1f\u6570\uff0c\u4f7f\u6d78\u8680\u7269\u8d28\u4e0d\u4f46\u4e0d\u5bb9\u6613\u6839\u636e\u7a7a\u9699\u6e17\u900f\u5230\u5230\u539f\u6750\u6599\u8868\u5c42\uff0c\u4e5f\u6709\u88ab\u6392\u51fa\u6765\u7684\u53d1\u5c55\u8d8b\u52bf\uff0c\u8fdb\u800c\u51cf\u5c11\u91d1\u5c5e\u6750\u6599\u57fa\u6750\u4ea7\u751f\u6d78\u8680\u7684\u6982\u7387\uff0c\u8fd9\u7c7b\u6548\u7528\u5c31\u79f0\u4e4b\u4e3a\u5b54\u72b6\u6548\u7528\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u6db2\/\u6c14\u9875\u9762\u8fd8\u627f\u62c5\u7740\u7531\u6db2\u6001\u91cd\u80fd\u529b\u9020\u6210\u7684\u5de5\u4f5c\u538b\u529bPg\uff1a<\/p>\n

\"5.png\"<\/p>\n

\u5728\u5176\u4e2d\uff0c\u03c1\u4e3a\u9971\u548c\u6eb6\u6db2\u76f8\u5bf9\u5bc6\u5ea6\uff0cg\u662f\u91cd\u529b\u52a0\u901f\u5ea6\uff0ch\u4e3a\u8bd5\u4ef6\u6e17\u5165\u6df1\u5c42\u3002\u6db2\u3001\u6c14\u9875\u9762\u5728Pc\u548cPg\u4e00\u540c\u7684\u4f5c\u7528\u4e0b\uff0c\u5e73\u8861\u6761\u4ef6\u4e3a\uff1aPc Pg=0\u4ece\u800c\u53ef\u83b7\u5f97\uff1a<\/p>\n

\"6.png\"<\/p>\n

\u56e0\u800c\uff0c\u5f53\u8d85\u758f\u6c34\u8868\u5c42\u6e17\u5165\u6d78\u8680\u7269\u8d28\u91cc\u65f6\uff0c\u80fd\u5408\u7406\u5c06\u91d1\u5c5e\u6750\u6599\u57fa\u6750\u4e0e\u6d78\u8680\u4ecb\u8d28\u9694\u79bb\u5f00\u7684\u6d78\u6ca1\u6df1\u5c42\u4e0e\u6db2\/\u6c14\u9875\u9762\u754c\u9762\u5f20\u529b\u3001\u95f4\u9699\u7684\u534a\u5f84\u3001\u6d78\u8680\u7269\u8d28\u7279\u6027\u53ca\u8868\u5c42\u758f\u6c34\u6027\u606f\u606f\u76f8\u5173\uff1b\u5f53\u6e17\u5165\u6df1\u5c42\u8d85\u51fahc\u65f6\uff0cPg>Pc,\u6d78\u8680\u7269\u8d28\u6e17\u900f\u5230\u5cf0\u65f6\u4e2d\u95f4\uff0c\u5c06\u201c\u5305\u56ca\u201d\u7684\u6c14\u4f53\u6392\u51fa\u6765\uff0c\u6e17\u900f\u5230\u819c\u5c42\uff0c\u52a0\u5feb\u91d1\u5c5e\u6750\u6599\u677f\u6750\u7684\u6d78\u8680\u8fc7\u7a0b\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u878d\u5408\u516c\u5f0f\u8ba1\u7b97\u5256\u6790\u53ef\u5f97\u5230\uff0c\u5f53\u5916\u8868\u7c97\u7cd9\u5ea6\u4e00\u5b9a\u65f6\uff0c\u91c7\u7528\u53ef\u5408\u7406\u51cf\u5c11\u9875\u9762\u8868\u9762\u7684\u4f4e\u8981\u6210\u5206\uff0c\u53ef\u5408\u7406\u6269\u5927\u6db2\/\u6c14\u9875\u9762\u754c\u9762\u5f20\u529b \uff08\u03b3\uff09\uff0c\u8fdb\u800c\u63d0\u5347\u8868\u5c42\u758f\u6c34\u6027\u80fd\u3002<\/p>\n

1.3\u8d85\u758f\u6c34\u819c\u5c42\u8010\u8150\u8680\u539f\u7406\u79d1\u5b66\u7814\u7a76<\/p>\n

\u5f20\u76fe\u7b49\u9009\u7528\u591a\u79cd\u591a\u6837\u65b9\u5f0f\u53d6\u5f97\u6210\u529f\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u819c\u5c42\uff0c\u5e76\u5bf9\u8d85\u758f\u6c34\u819c\u5c42\u7684\u8010\u8150\u8680\u7279\u6027\u548c\u8010\u8150\u8680\u539f\u7406\u5f00\u5c55\u4e86\u5f88\u591a\u79d1\u5b66\u7814\u7a76\u3002\u5979\u4eec\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\uff08\u56fe1a\uff09\u8868\u9762\u5f20\u529b\uff08WCA\uff09 \u505a\u5230152.5\u00b0\u3002\u5bf9\u6ca1\u7ecf\u52a0\u5de5\u5904\u7406\u7684\u950c\u7247\uff08BS\uff09\u3001\u201c\u5305\u56ca\u201d\u6709\u6c14\u4f53\u7684\u7eb3\u7c73\u7ea4\u7ef4\u819c\uff08SS\uff09\u548c\u6c92\u6709\u201c\u5305\u56ca\u201d\u6c14\u4f53\u7684\u7eb3\u7c73\u7ea4\u7ef4\u819c\uff08DS\uff093\u79cd\u5178\u578b\u6027\u8bd5\u4ef6\u5149\u7535\u50ac\u5316\u68c0\u6d4b\u6570\u636e\u663e\u793a \uff08\u56fe1b\uff09\uff0cDS\u548cBS\u7535\u4f4d\u5dee\u5e73\u7a33\u5728-1.2 V\u4e0a\u4e0b\uff0c\u800cSS\u7535\u4f4d\u5dee\u8f83DS\u548cBS\u66f4\u6539\uff0c\u5728-0.7~-0.6\u4e2d\u95f4\u8d77\u4f0f\u3002\u4e0d\u96be\u770b\u51fa\uff0c\u8d85\u758f\u6c34\u8868\u5c42\u7684\u8010\u8150\u8680\u7279\u6027\u4e0e\u8868\u5c42\u80fd\u4e0d\u80fd\u201c\u5305\u56ca\u201d\u6c14\u4f53\u76f8\u5173\u3002\u4e3a\u4e86\u66f4\u597d\u5730\u8ba4\u8bc1\u4ee5\u4e0a\u7ed3\u679c\uff0c\u5979\u4eec\u8fd8\u7528\u7535\u89e3\u98df\u76d0\u6c34\u5728\u950c\u8868\u5c42\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\uff0c\u79d1\u5b66\u7814\u7a76\u4e86\u7a7a\u6c14\u57ab\u5728\u8d85\u758f\u6c34\u8868\u5c42\u8010\u8150\u8680\u8fd0\u7528\u4e2d\u7684\u529f\u6548\uff0c\u8bc1\u5b9e\u4e86\u7a7a\u6c14\u57ab\u9488\u5bf9\u63d0\u5347\u8d85\u758f\u6c34\u8868\u5c42\u7684\u8010\u8150\u8680\u5b9e\u9645\u6548\u679c\u5c24\u4e3a\u91cd\u8981\u3002<\/p>\n

\u56fe1 \u8d85\u758f\u6c34\u819c\u5c42\u5916\u90e8\u7ecf\u6d4e\u5916\u8c8c\u573a\u53d1\u9001\u7535\u955c\u50cf\u53ca3.5%NaCl\u9971\u548c\u6eb6\u6db2\u4e2d\u8bd5\u4ef6\u4e0d\u4e00\u6837\u89e3\u51b3\u540e\u7684\u7535\u4f4d\u5dee-\u65f6\u95f4\u66f2\u7ebf<\/p>\n

<\/p>\n

\n

Liu\u7b49\u628a\u8c46\u853b\u9178\u7194\u8986\u4e8eCu\u8868\u5c42\u4ea7\u751f\u8d85\u758f\u6c34\u8868\u5c42\uff0cWCA\u505a\u5230158\u00b0\uff0c\u5e76\u89c9\u5f97\u8d85\u758f\u6c34\u8868\u5c42\u7684\u963b\u9694\u529f\u6548\u662f\u6c14\u57abcc\u6548\u7528\u548c\u5b54\u72b6\u6548\u7528\u534f\u540c\u6548\u5e94\u7684\u7d50\u679c\uff0c\u4e00\u65b9\u9762\uff0c\u8d85\u758f\u6c34\u8868\u5c42\u7684\u5fae-\u7eb3\u6784\u9020\u5c06\u6c14\u4f53\u201c\u5305\u56ca\u201d\u5728\u5176\u5cf0\u65f6\u4e2d\u95f4\uff0c\u5728\u8868\u5c42\u4ea7\u751f\u6c14\u4f53\u819c\uff0c\u51ed\u7740\u6c14\u4f53\u7684\u5835\u585e\u6548\u7528\uff0c\u963b\u9694\u6d78\u8680\u7269\u8d28\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u56e0\u4e3a\u6bdb\u7ec6\u8840\u7ba1\u6548\u7528\u7684\u5b58\u6709\uff0c\u5f53\u6bdb\u7ec6\u4f5c\u7528\u529b\u8d85\u8fc7\u6c34\u672c\u8eab\u91cd\u80fd\u529b\u65f6\uff0c\u8d85\u758f\u6c34\u8868\u5c42\u5fae\u5b54\u677f\u91cc\u7684\u6c34\u53ef\u80fd\u5728\u62c9\u666e\u62c9\u65af\u5de5\u4f5c\u538b\u529b\u7684\u6548\u679c\u4e0b\u88ab\u6392\u51fa\u6765\uff0c\u963b\u62e6\u4e86Cl-\u7684\u8fdb\u5230\uff0c\u5176\u8010\u8150\u8680\u5b9e\u4f53\u6a21\u578b\u5982\u4e0b\u56fe2\u6240\u663e\u793a\u3002<\/p>\n

\u56fe2 \u8d85\u758f\u6c34\u8868\u5c42\u4e0e\u6c34\u7684\u89e6\u78b0\u9875\u9762\u5b9e\u4f53\u6a21\u578b<\/p>\n

<\/p>\n

\n

\u53c2\u8003\u6587\u732e\u7684\u79d1\u5b66\u7814\u7a76\u7d50\u679c\u4e5f\u8ba4\u8bc1\u4e86\u8d85\u758f\u6c34\u8868\u5c42\u7684\u8010\u8150\u8680\u539f\u7406\u662f\u5b54\u72b6\u6548\u7528\u548c\u6c14\u57abcc\u6548\u7528\u7684\u534f\u540c\u6548\u5e94\u7684\u7d50\u679c\u3002<\/p>\n

1.4 \u8d85\u758f\u6c34\u819c\u5c42\u6d78\u8680\u6bc1\u574f\u539f\u7406\u79d1\u5b66\u7814\u7a76<\/p>\n

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2 \u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u7814\u7a76\u6210\u679c<\/p>\n

\u73b0\u9636\u6bb5\u7528\u4ee5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684CVD\u65b9\u5f0f\u5305\u542b\u5e38\u6e29\u5e38\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \uff08\u5e38\u6e29\u5e38\u538bCVD\uff09\u3001\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \uff08PECVD\uff09\u3001\u5927\u6c14\u6c14\u6eb6\u80f6\u534f\u52a9\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \uff08AACVD\uff09 \u7b49\u3002<\/p>\n

2.1 \u5e38\u6e29\u5e38\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef<\/p>\n

\u5e38\u6e29\u5e38\u538bCVD\u4e0d\u7528\u7e41\u6742\u9ad8\u7cbe\u5bc6\u673a\u5668\u8bbe\u5907\uff0c\u5806\u79ef\u5851\u6599\u8584\u819c\u6784\u6210\u53ca\u6784\u9020\u53ef\u63a7\u6027\uff0c\u5177\u5907\u4f4e\u6210\u672c\u3001\u4f7f\u7528\u65b9\u4fbf\u3001\u5236\u53d6\u819c\u5c42\u91cd\u590d\u597d\u3001\u819c\u5c42\u5300\u79f0\u3001\u5e94\u7528\u9886\u57df\u5e7f\u53ca\u5176\u5bf9\u57fa\u7840\u539f\u6750\u6599\u65e0\u5371\u5bb3\u7b49\u4f18\u52bf\u3002<\/p>\n

Rollings\u7b49\u79d1\u5b66\u7814\u7a76\u4e86\u7f9f\u57fa\u4e09\u6c2f\u7845\u70f7\uff08TCMS\uff09\u751f\u6210\u7eb3\u7c73\u7ea4\u7ef4\u7684\u5f71\u54cd\u56e0\u7d20\uff0c\u5305\u542b\u751f\u6210\u7269\u6d53\u5ea6\u503c\u548c\u914d\u5236\u3001\u751f\u6210\u7269\u904d\u5e03\u5747\u4e00\u6027\u3001\u751f\u6210\u6642\u95f4\u548c\u91d1\u5c5e\u50ac\u5316\u5242\u4f7f\u7528\u91cf\uff1b\u6709\u5173\u4e13\u5bb6\u5b66\u8005\u8fd8\u79d1\u5b66\u7814\u7a76\u4e86\u53cd\u6620\u6eab\u5ea6\u5bf9\u5236\u53d6\u819c\u5c42\u758f\u6c34\u6027\u7684\u5371\u5bb3;Karla\u7b49\u9009\u7528\u62c9\u66fc\u5149\u8c31\u539f\u70b9\u76d1\u6d4b\u7cfb\u7edf\u79d1\u5b66\u7814\u7a76\u4e86CVD\u5236\u53d6\u7eb3\u7c73\u78b3\u7ba1 \uff08CNT\uff09 \u7684\u751f\u6210\u548c\u53d1\u80b2\u5168\u8fc7\u7a0b\u3002\u5979\u4eec\u7684\u6210\u679c\u4fc3\u8fdb\u4e86\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u57fa\u7840\u7814\u7a76\u548c\u6280\u672f\u63d0\u5347\u3002<\/p>\n

Georg\u7b49\u9009\u7528CVD\u6280\u672f\u6027\uff0c\u8fd0\u7528TCMS\u7194\u70b9\u4f4e\u53ca\u5176\u4e0e\u6c34\u53cd\u5e94\u8fc5\u901f\u7684\u7279\u6027\uff0c\u5728\u94dd\u5408\u91d1\u578b\u6750\u3001\u68c9\u7d6e\u3001\u5939\u5c42\u73bb\u7483\u7b49\u539f\u6750\u6599\u8868\u5c42\uff0c\u5806\u79ef\u4ea7\u751f\u4e00\u5c42\u5168\u900f\u660e\u4e14\u5177\u5907\u8d85\u758f\u6c34\u7279\u6027\u7684\u805a\u7f9f\u57fa\u7845\u500d\u534a\u6c27\u70f7\u819c\u5c42 \uff08\u56fe3\uff09\uff0c\u5728\u5176\u4e2d\u94dd\u5408\u91d1\u578b\u6750\u8868\u5c42\u5236\u53d6\u7684\u7eb3\u7c73\u7ea4\u7ef4\u819c\u5c42\u7684WCA\u4e3a \uff08168\u00b11\uff09\u00b0\uff0c\u7ffb\u8f6c\u89d2 \uff08SA\uff09 \u4e3a\uff088\u00b11\uff09\u00b0\uff0c\u7a7a\u6c14\u5730\u7406\u73af\u5883\u66dd\u97321 a\u540e \uff08\u56fe4\uff09\uff0c\u4f9d\u7136\u7ef4\u6301\u51fa\u8272\u8d85\u758f\u6c34\u7279\u6027\uff0c\u800c\u4e14\u6839\u636e\u70ed\u5904\u7406\u5de5\u827a\u53ef\u663e\u7740\u63d0\u5347\u819c\u5c42\u7684\u81ea\u7136\u73af\u5883\u8010\u7528\u6027\uff1b\u4e0e\u6b64\u540c\u65f6\uff0c\u8be5\u819c\u5c42\u5728\u6709\u673a\u6eb6\u6db2\u3001\u4e2d\u6027\u6eb6\u5242\u3001\u5f31\u9178\u6027\u9971\u548c\u6eb6\u6db2\u53ca\u5176\u5f31\u78b1\u6027\u6e05\u6d01\u6db2\u9971\u548c\u6eb6\u6db2\u4e2d\u4ecd\u5177\u5907\u826f\u597d\u7684\u6709\u673a\u5316\u5b66\u53ef\u9760\u6027\u3002\u8868\u660eCVD\u6cd5\u5236\u53d6\u7684\u6c2f\u7845\u70f7\u7eb3\u7c73\u7ebf\u8d85\u758f\u6c34\u819c\u5c42\u5177\u5907\u826f\u597d\u7684\u81ea\u7136\u73af\u5883\u8010\u7528\u6027\u548c\u6709\u673a\u5316\u5b66\u53ef\u9760\u6027\u3002<\/p>\n

\u56fe3 \u6c2f\u7845\u70f7\u7eb3\u7c73\u7ebf\u819c\u5c42\u7684SEM\u50cf<\/p>\n

<\/p>\n

\n

\u56fe4 \u6c2f\u7845\u70f7\u7eb3\u7c73\u7ebf\u8d85\u758f\u6c34\u819c\u5c42WCA\u548cSA\u4e0e\u66dd\u9732\u6642\u95f4\u7684\u5173\u8054<\/p>\n

\"10.png\"<\/p>\n

\n

Rezaei\u7b49\u9009\u7528\u5e38\u6e29\u5e38\u538bCVD\u6280\u672f\u6027\uff0c\u5728\u5939\u5c42\u73bb\u7483\u3001\u5355\u6676\u7845\u7247\u548c\u94dd\u5757\u4e0a\u53d6\u5f97\u6210\u529f\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u819c\u5c42\u3002CVD\u6280\u672f\u6027\u548csol-gel\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u8d85\u758f\u6c34\u7279\u6027\u7684\u6bd4\u7167\u79d1\u5b66\u7814\u7a76\u8868\u660e\uff1aCVD\u6cd5\u5236\u53d6\u819c\u5c42\u7684\u758f\u6c34\u6027\u597d\u4e8esol-gel\u6cd5\u3002\u5434\u4fca\u5347\u7b49\u9009\u7528CVD\u6280\u672f\u6027\u6539\u6027\u6750\u65991 h\u5373\u5f97\u5230\u4e86\u9ad8\u6548\u6db2\u76f8\u6cd5\u6539\u6027\u6750\u65997 d\u7684\u8d85\u758f\u6c34\u7279\u6027\uff0c\u819c\u5c42\u7684\u8d85\u758f\u6c34\u53ef\u9760\u6027\u80fd\u66f4\u5e73\u7a33\uff0c\u57283.5%NaCl\u9971\u548c\u6eb6\u6db2\u4e2d\u6ce1\u6d7821 d\u65f6\uff0cWCA\u4ecd\u8fbe\u5230135\u00b0\uff0c\u4e14\u819c\u5c42\u8be6\u7ec6\u3002Ebert\u7b49[46]\u5728\u901a\u8fc7O2\/CF4\u4f4e\u6e29\u7b49\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165\u7684PDMS\u8868\u5c42\uff0c\u5404\u81ea\u9009\u7528C4F8\u4f4e\u6e29\u7b49\u79bb\u5b50\u6539\u6027\u6750\u6599\u548c\u5e38\u6e29\u4e0b\u6c14\u76f8\u8272\u8c31\u5806\u79efPFOTCS\u5f00\u5c55\u6539\u6027\u6750\u6599\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u8868\u5c42\uff0c\u5e76\u5bf9\u5176\u5f62\u72b6\u8bb0\u5fc6\u7279\u6027\u8fdb\u884c\u4e86\u8bc4\u5b9a\u3002<\/p>\n

\u603b\u7684\u6765\u8bf4\uff0c\u9009\u7528\u5e38\u6e29\u5e38\u538bCVD\u6280\u672f\u6027\u6539\u6027\u6750\u6599\u5236\u53d6\u7684\u7eb3\u7c73\u7ea4\u7ef4\u819c\u5c42\u76f8\u6bd4\u4e8esol-gel\u6cd5\u7b49\u9ad8\u6548\u6db2\u76f8\u6cd5\u6539\u6027\u6750\u6599\u5236\u53d6\u7684\u819c\u5c42\u758f\u6c34\u6027\u3001\u5300\u79f0\u6027\u3001\u6709\u673a\u5316\u5b66\u7a33\u5b9a\u548c\u81ea\u7136\u73af\u5883\u8010\u7528\u6027\u5747\u66f4\u51fa\u8272\u3002\u4f46\u8be5\u65b9\u5f0f\u5236\u53d6\u7684\u7eb3\u7c73\u7ea4\u7ef4\u819c\u5c42\u7684\u758f\u6c34\u5c42\u975e\u5e38\u8584\uff0c\u901a\u5e38\u4e3a\u5355\u5206\u5b50\u7ed3\u6784\u6216\u597d\u591a\u4e2a\u5206\u5b50\u7ed3\u6784\u5c42\u8584\u539a\uff0c\u6297\u51b2\u51fb\u548c\u635f\u574f\u5de5\u4f5c\u80fd\u529b\u5f31\uff0c\u4ec5\u80fd\u7528\u4ee5\u4e0d\u627f\u53d7\u529b\u7684\u573a\u6240\u3002<\/p>\n

2.2\u4f4e\u6e29\u7b49\u79bb\u5b50\u63d0\u9ad8\u5316\u5b66\u6c14\u76f8\u6c89\u79ef<\/p>\n

PECVD\u5c31\u662f\u6307\u4f9d\u9760\u5916\u754c\u6240\u52a0\u9759\u7535\u573a\u7684\u529f\u6548\u9020\u6210\u5145\u653e\u7535\uff0c\u4f7f\u539f\u6750\u6599\u6c7d\u4f53\u53d8\u6210\u7b49\u79bb\u5b50\u60c5\u51b5\uff0c\u53d8\u6210\u6709\u673a\u5316\u5b66\u4e0a\u5f02\u5e38\u5f00\u6717\u7684\u6fc0\u8d77\u5206\u5b50\u7ed3\u6784\u3001\u5206\u5b50\u3001\u6b63\u79bb\u5b50\u548c\u539f\u5b50\u56e2\u7b49\uff0c\u63a8\u52a8\u5316\u5b66\u53d8\u5316\uff0c\u5728\u677f\u6750\u8868\u5c42\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002PECVD\u5177\u5907\u5e38\u6e29\u5e38\u538bCVD\u6280\u672f\u6027\u7684\u7edd\u5927\u90e8\u5206\u4f18\u52bf\uff0c\u800c\u4e14\u56e0\u4e3a\u7b49\u79bb\u5b50\u7684\u529f\u6548\u53ca\u7b49\u79bb\u5b50\u53c2\u52a0\u53cd\u6620\uff0c\u4f7f\u751f\u6210\u7269\u548c\u677f\u6750\u8868\u5c42\u5747\u9020\u6210\u5f88\u591a\u6b63\u79bb\u5b50\u3001\u6c27\u81ea\u7531\u57fa\u548c\u4e9a\u7a33\u6001\u6210\u5206\u7b49\u6d3b\u529b\u5b98\u80fd\u56e2\uff0c\u51cf\u5c11\u53cd\u6620\u4ea7\u751f\u7684\u6eab\u5ea6\uff0c\u51cf\u5c11\u53cd\u5e94\u901f\u5ea6\uff0c\u4f7f\u70ed\u5b66\u4e0a\u65e0\u6cd5\u53d1\u73b0\u7684\u53cd\u6620\u53d8\u6210\u5f88\u6709\u53ef\u80fd\uff0c\u63a8\u52a8\u5316\u5b66\u53d8\u5316\u7684\u5f00\u5c55\u3002\u73b0\u9636\u6bb5\u5df2\u9009\u7528PECVD\u6280\u672f\u6027\u5728\u591a\u79cd\u591a\u6837\u539f\u6750\u6599\u8868\u9762\u4e0a\u5236\u53d6\u5f97\u5230\u8d85\u758f\u6c34\u819c\u5c42\u3002<\/p>\n

\u53c2\u8003\u6587\u732e\u6700\u5148\u7528\u5fae\u6ce2\u52a0\u70ed\u4f4e\u6e29\u7b49\u79bb\u5b50\u63d0\u9ad8\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\uff08MPECVD\uff09\uff0c\u53d6\u5f97\u6210\u529f\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u819c\u5c42\uff0c\u8be5\u819c\u5c42WCA\u968f\u751f\u6210\u7269\u5206\u538b\u7684\u4e0a\u5347\u800c\u6269\u5927\uff0c\u8f83\u5927\u8868\u9762\u5f20\u529b\u7ea6160\u00b0\u3002Ishizaki\u7b49\u5e94\u7528MPECVD\u6280\u672f\u6027\u5728AZ31\u94dd\u9541\u5408\u91d1\u4e0a\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u819c\u5c42\uff0c\u5176\u5916\u8868\u7c97\u7cd9\u5ea6\u968f\u5806\u79ef\u6642\u95f4\u7684\u589e\u52a0\u800c\u6269\u5927\uff0c\u5176WCA\u8d85\u8fc7150\u00b0\u3002\u8150\u8680\u80fd\u5b9e\u9a8c\u6570\u636e\u663e\u793a\uff0c\u8d85\u758f\u6c34\u89e3\u51b3\u4f7fAZ31\u7684\u9633\u6781\u6c27\u5316\u548c\u8d1f\u6781\u7535\u6d41\u5f3a\u5ea6\u663e\u7740\u51cf\u5c11\u3001\u7279\u6027\u963b\u6297\u663e\u7740\u6269\u5927 \uff08\u56fe5\uff09\uff0c\u800c\u4e14\u5728\u5f31\u9178\u6027\u548c\u78b1\u6027\u6eb6\u6db2\u4e2d\u5448\u73b0\u51fa\u8f83\u597d\u7684\u6709\u673a\u5316\u5b66\u53ef\u9760\u6027 \uff08\u56fe6\uff09\uff0c\u660e\u663e\u6539\u8fdb\u4e86\u94dd\u9541\u5408\u91d1\u8010\u8150\u8680\u7279\u6027\u3002<\/p>\n

\u56fe5 AZ31\u548c\u8d85\u758f\u6c34\u819c\u5c42\u57283.5%NaCl\u9971\u548c\u6eb6\u6db2\u4e2d\u7684\u5149\u7535\u50ac\u5316\u68c0\u6d4b\u7d50\u679c<\/p>\n

<\/p>\n

\n

\u56fe6 \u8d85\u758f\u6c34\u819c\u5c42WCA\u4e0e\u6ce1\u6d78\u6642\u95f4\u7684\u5173\u8054<\/p>\n

\"12.png\"<\/p>\n

\n

PECVD\u5c3d\u7ba1\u76f8\u6bd4\u4e8e\u5e38\u6e29\u5e38\u538bCVD\u5728\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u819c\u539a\u3001\u819c\u5c42\u9ad8\u5bc6\u5ea6\u6027\u3001\u758f\u6c34\u6027\u7b49\u9886\u57df\u6709\u4e00\u5b9a\u4f18\u70b9\uff0c\u4f46\u5176\u5fc5\u987b\u4f9d\u9760\u4ef7\u683c\u6602\u8d35\u7684\u4e13\u7528\u8bbe\u5907\u548c\u82db\u523b\u7684\u5236\u53d6\u6807\u51c6\uff0c\u4ee5\u81f4\u4e8e\u5728\u89c4\u6a21\u6027\u5de5\u4e1a\u5316\u751f\u4ea7\u4e2d\u8425\u9500\u63a8\u5e7f\u4e0d\u5177\u6709\u4f18\u70b9\u3002<\/p>\n

2.3 \u5927\u6c14\u6c14\u6eb6\u80f6\u534f\u52a9\u5316\u5b66\u6c14\u76f8\u6c89\u79ef<\/p>\n

\u5927\u6c14\u6c14\u6eb6\u80f6\u5c31\u662f\u6307\u4e00\u5207\u6210\u5206\u7684\u56fa\u6001\u9897\u7c92\u6216\u6db2\u6001\u9897\u7c92\u98d8\u6d6e\u4e8e\u6c7d\u4f53\u7269\u8d28\u4e2d\u6240\u4ea7\u751f\u7684\u5177\u5907\u7279\u6b8a\u8fd0\u52a8\u89c4\u5f8b\u7684\u5168\u90e8\u5206\u6563\u5316\u7ba1\u7406\u4f53\u7cfb\u3002\u5927\u6c14\u6c14\u6eb6\u80f6\u79d1\u5b66\u5408\u7406\u5728\u5de5\u4e1a\u751f\u4ea7\u73af\u5883\u536b\u751f\u3001\u751f\u6001\u73af\u5883\u4fdd\u62a4\u53ca\u5176\u4e2d\u56fd\u6838\u5de5\u4e1a\u7684\u5c04\u7ebf\u9632\u62a4\u7b49\u65b9\u9762\u62e5\u6709\u81f3\u5173\u91cd\u8981\u7684\u529f\u6548\uff0c\u4f46\u5c06\u5927\u6c14\u6c14\u6eb6\u80f6\u7528\u4ee5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u5206\u6790\u5374\u975e\u5e38\u5c11\u62a5\u5bfc\u3002AACVD\u9009\u7528\u7c98\u7a20\u5ea6\u5f88\u4f4e\u7684\u80f6\u4f53\u6eb6\u6db2\uff0c\u4f7f\u80f6\u4f53\u6eb6\u6db2\u9897\u7c92\u5728\u6c14\u76f8\u8272\u8c31\u6807\u51c6\u4e0b\u4ea7\u751f\u7f29\u805a\u53cd\u5e94\uff0c\u5e76\u5728\u677f\u6750\u8868\u5c42\u81ea\u7ec4\u88c5\u4ea7\u751f\u5916\u90e8\u7ecf\u6d4e\u4e0d\u5149\u6ed1\u6784\u9020\uff0c\u4ee5\u5f97\u5230\u8d85\u758f\u6c34\u8868\u5c42\u3002AACVD\u6cd5\u662f\u6839\u636e\u5e38\u6e29\u5e38\u538bCVD\u6cd5\u5f00\u53d1\u8bbe\u8ba1\u7684\u65b0\u65b9\u5f0f\uff0c\u53ef\u5728\u4e00\u5207\u677f\u6750\u8868\u5c42\u5236\u5907\u8d85\u758f\u6c34\u819c\u5c42\u3002<\/p>\n

Colin\u7b49\u9009\u7528AACVD\u6280\u672f\u6027\uff0c\u5c06SYLGARD?184\u6c2f\u7845\u70f7\u5f39\u6027\u4f53\u6750\u6599\u5806\u79ef\u5230\u57fa\u6750\u8868\u5c42\uff0c\u4f7f\u8868\u5c42\u5f97\u5230\u8d85\u758f\u6c34\u7279\u6027\u3002\u5176\u57fa\u672c\u539f\u7406\u662f\uff1aSYLGARD\u00ae184\u6c2f\u7845\u70f7\u5f39\u6027\u4f53\u6750\u6599\u7531\u4e24\u90e8\u4efd\u6784\u6210\u2236\u5f39\u6027\u4f53\u6750\u6599\u548c\u73af\u6c27\u56fa\u5316\u5242\uff0c\u5c06\u8fd92\u79cd\u6210\u4efd\u4ee510\u22361\u7684\u5360\u6bd4\u6eb6\u89e3\u4e59\u919a\u4e2d\u8fc5\u901f\u62cc\u548c5 min,\u914d\u51fa\u80f6\u4f53\u6eb6\u6db2\uff0c\u5c06\u914d\u7f6e\u7684\u80f6\u4f53\u6eb6\u6db2\u4ee5\u6c14\u76f8\u8272\u8c31\u5bfc\u8fdb\u53cd\u6620\u5ba4\uff0c\u4ea7\u751f\u5927\u6c14\u6c14\u6eb6\u80f6\uff0c\u4f34\u968f\u7740\u4e59\u919a\u7684\u84b8\u53d1\uff0c\u5f39\u6027\u4f53\u6750\u6599\u4e0e\u73af\u6c27\u56fa\u5316\u5242\u5728\u57fa\u6750\u8868\u5c42\u4ea7\u751f\u5316\u5b66\u4ea4\u8054\u53cd\u6620\u548c\u5e72\u56fa\u53cd\u6620\uff0c\u4ea7\u751f\u4f20\u70ed\u7cfb\u6570\u7279\u6027\u4f18\u8d28\u7684\u9ad8\u805a\u7269\u3002\u819c\u5c42\u758f\u6c34\u6027\u4e0e\u5806\u79ef\u6eab\u5ea6\u76f8\u5173\uff0c\u5747\u503cWCA\u548c\u8f83\u5927WCA\u5747\u968f\u5806\u79ef\u6eab\u5ea6\u7684\u4e0a\u5347\u800c\u6269\u5927\uff08\u89c1\u88681\uff09\uff0cSA\u968f\u5806\u79ef\u6eab\u5ea6\u7684\u4e0a\u5347\u800c\u51cf\u5c11\u3002\u73b0\u9636\u6bb5\uff0c\u8fd0\u7528AACVD\u6280\u672f\u6027\u5df2\u5728\u591a\u79cd\u591a\u6837\u677f\u6750\u4e0a\u5236\u53d6\u4e86\u8d85\u758f\u6c34\u9540\u5c42\uff0c\u5f97\u5230\u8d85\u758f\u6c34\u8868\u5c42\u5176\u8f83\u5927WCA\u8fbe\u5230170\u00b0\uff0cSA\u4f4e\u81f31~2\u00b0\u3002<\/p>\n

\"13.png\"<\/p>\n

\n

Colin\u7b49\u8fd8\u6839\u636eAACVD\u6280\u672f\u6027\u4e0e\u5e38\u6e29\u5e38\u538bCVD\u6280\u672f\u6027\u7684\u878d\u5408\uff0c\u4ee5\u9178\u50ac\u5316\u6b63\u7845\u9178\u4e59\u916f\u5927\u6c14\u6c14\u6eb6\u80f6\u6c34\u89e3\u53cd\u5e94\uff0c\u4ea7\u751fSiO2\u9897\u7c92\uff0c\u5806\u79ef\u5728\u88c5\u7247\u4e0a\uff0c\u4ea7\u751f\u5916\u90e8\u7ecf\u6d4e\u4e0d\u5149\u6ed1\u7684SiO2\u819c\u5c42\uff0c\u5e76\u4e14\u7528\u516d\u7f9f\u57fa\u4e8c\u6c2f\u7845\u70f7\u5f00\u5c55\u5916\u8868\u6539\u6027\u6750\u6599\uff0c\u5f97\u5230\u8d85\u758f\u6c34\u7279\u6027\uff0cWCA\u6700\u5927\u8fbe180\u00b0\uff0c\u7ffb\u8f6c\u89d2\u4f4e\u4e8e1\u00b0\u3002<\/p>\n

Philip\u7b49\u9009\u7528\u4e2d\u5b50\u53cd\u5c04\u9762\u6280\u672f\u6027\u79d1\u5b66\u7814\u7a76\u4e86AACVD\u6280\u672f\u6027\u5236\u53d6\u7684\u8d85\u758f\u6c34\u9540\u5c42\u4e0b\u677f\u6750\u7684\u6d78\u8680\u5de5\u4f5c\u8fdb\u5c55\uff0c\u5176\u819c\u5c42\u8584\u539a\u53ca\u904d\u5e03\u89c1\u56fe7a\u3002\u56fe7b\u4e3a\u6d78\u8680\u7269\u8d28\u5c42\u8584\u539a\u968f\u6ce1\u6d78\u6642\u95f4\u7684\u8f6c\u53d8\uff0c\u4f34\u968f\u7740\u57285%NaCl D2O\u9971\u548c\u6eb6\u6db2\u4e2d\u6ce1\u6d78\u6642\u95f4\u7684\u589e\u52a0\uff0c\u8d85\u758f\u6c34\u819c\u5c42\u4e0b\u7684\u9508\u8680\u7269\u8d28\u8fdf\u7f13\u63d0\u5347\uff0c\u5176\u57fa\u6750\u8150\u8680\u6df1\u5ea6\u7ea6\u4e3a\u672a\u589e\u52a0\u7ef4\u62a4\u7684\u94dd\u8150\u8680\u6df1\u5ea6\u7684\u5341\u5206\u4e4b\u4e00\u3002\u7ed3\u679c\u663e\u793a\uff0c\u8d85\u758f\u6c34\u819c\u5c42\u5408\u7406\u963b\u62e6\u4e86\u8150\u5316\u7269\u8d28\u7684\u6e17\u900f\u5230\uff0c\u663e\u7740\u7f13\u89e3\u4e86\u94dd\u5408\u91d1\u578b\u6750\u677f\u6750\u7684\u6d78\u8680\u3002<\/p>\n

\u56fe7 \u8d85\u758f\u6c34\u819c\u5c42\u8584\u539a\u53ca\u904d\u5e03\u53ca\u94dd\u6a21\u5c42\u8584\u539a\u968f\u65f6\u957f\u8f6c\u53d8\u66f2\u7ebf\u56fe<\/p>\n

\"14.png\"<\/p>\n

\n

Ekrem\u7b49\u4f9d\u9760AACVD\u6280\u672f\u6027\u5236\u53d6\u7684\u8d85\u758f\u6c34\u6291\u83cc\u7535\u9540\u94dc\u9ad8\u805a\u7269\u819c\u5c42\u7684WCA\u8d85\u51fa150\u00b0\uff0cSA\u4f4e\u81f31\u00b0\uff0c\u5bf9\u9769\u5170\u9634\u6027\u6746\u83cc\u3001\u9769\u5170\u6c0f\u67d3\u8272\u5448\u9633\u6027\u75c5\u83cc\u3001\u5927\u80a0\u57c3\u5e0c\u83cc\u548c\u6a59\u9ec4\u8272\u8461\u8404\u7403\u83cc\u611f\u67d3\u7b494\u79cd\u75c5\u83cc\u5177\u5907\u826f\u597d\u7684\u6d88\u706d\u5b9e\u9645\u6548\u679c \uff08\u5982\u4e0b\u56fe8\uff09\uff0c\u6ce8\u5c04\u5927\u80a0\u57c3\u5e0c\u83cc15 min\u540e\uff0cPDMS\u548c\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u5236\u53d6PDMS\u8868\u5c42\u75c5\u83cc\u603b\u6570\u76f8\u5bf9\u6027\u4e8e\u5939\u5c42\u73bb\u7483\u8868\u5c42\u7a0d\u6709\u51cf\u5c11\u6216\u4e00\u6837\uff0c\u4f46\u8d85\u758f\u6c34\u6291\u83cc\u7535\u9540\u94dc\u9ad8\u805a\u7269\u819c\u5c42\u8868\u5c42\u6a59\u9ec4\u8272\u91d1\u9ec4\u8461\u8404\u7403\u83cc\u603b\u6570\u4f34\u968f\u7740\u6642\u95f4\u7684\u589e\u52a0\u5448\u6307\u6570\u578b\u51cf\u5c11\uff0c15 min\u540e\u5373\u4f4e\u81f3\u68c0\u9a8c\u6975\u9650\uff1b\u6ce8\u5c04\u5927\u80a0\u57c3\u5e0c\u83cc1 h\u540e\uff0cPDMS\u548c\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u5236\u53d6PDMS\u8868\u5c42\u75c5\u83cc\u603b\u6570\u63d0\u5347\uff0c\u4f46\u8d85\u758f\u6c34\u6291\u83cc\u7535\u9540\u94dc\u9ad8\u805a\u7269\u819c\u5c42\u8868\u5c42\u94fe\u7403\u83cc\u603b\u6570\u4f34\u968f\u7740\u6642\u95f4\u7684\u589e\u52a0\u6162\u6162\u51cf\u5c11\uff0c1 h\u540e\u5373\u4f4e\u81f3\u68c0\u9a8c\u6975\u9650\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u8868\u5c42\u6297\u7c98\u9644\u7279\u6027\u4e0e\u8868\u5c42\u7684\u758f\u6c34\u6027\u80fd\u606f\u606f\u76f8\u5173\uff0c\u758f\u6c34\u6027\u8d8a\u597d\uff0c\u75c5\u83cc\u7684\u7c98\u9644\u6bd4\u8d8a\u4f4e\u3002\u8be5\u6291\u83cc\u8d85\u758f\u6c34\u819c\u5c42\u7684\u53d6\u5f97\u6210\u529f\u5236\u53d6\uff0c\u662fAACVD\u6280\u672f\u6027\u5728\u8239\u8230\u8239\u58f3\u7b49\u8868\u5c42\u5236\u53d6\u8010\u6c61\u3001\u6291\u83cc\u3001\u8010\u8150\u8680\u8d85\u758f\u6c34\u819c\u5c42\u5c42\u9762\u7684\u5f3a\u6709\u529b\u63a2\u5bfb\u3002<\/p>\n

\u56fe8 \u4e0d\u4e00\u6837\u8bd5\u54c1\u8868\u5c42\u6ce8\u5c04\u75c5\u83cc\uff0c \u75c5\u83cc\u603b\u6570\u968f\u6642\u95f4\u7684\u8f6c\u53d8<\/p>\n

\"15.png\"<\/p>\n

\n

\u76f8\u6bd4\u4e8e\u5e38\u6e29\u5e38\u538bCVD\u548cPECVD,AACVD\u6cd5\u5177\u5907\u4f4e\u6210\u672c\u3001\u52a0\u5de5\u5de5\u827a\u7b80\u6613\u548c\u4e0d\u7528\u7e41\u6742\u4ef7\u683c\u6602\u8d35\u673a\u5668\u8bbe\u5907\u7b49\u4f18\u52bf\uff0c\u66f4\u5177\u6709\u4ea7\u54c1\u5316\u8fd0\u7528\u7684\u53d1\u5c55\u6f5c\u529b\u3002<\/p>\n

2.4 \u522b\u7684<\/p>\n

Ignasi\u7b49\u9009\u7528\u6b63\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165\u548c\u8fd0\u884c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08iCVD\uff09\u7d27\u5bc6\u7ed3\u5408\u7684\u4e8c\u6b65\u6cd5\uff0c\u4f7f\u94dc\u5916\u89c2\u5f97\u5230\u8d85\u758f\u6c34\u7279\u6027\uff0c\u5e76\u9009\u7528\u539f\u5b50\u529b\u663e\u5fae\u955c\uff08AFM\uff09\u3001\u7535\u955c\uff08SEM\uff09\u3001\u5206\u5b50\u63a2\u5934\uff08XPS\uff09\u3001\u6781\u5316\u66f2\u7ebf\u68c0\u6d4b\u7b49\u65b9\u5f0f\u79d1\u5b66\u7814\u7a76\u5256\u6790\u4e86\u8d85\u758f\u6c34\u819c\u5c42\u7684\u5916\u8c8c\u3001\u6210\u5206\u548c\u8010\u8150\u8680\u7279\u6027\uff0c\u7ed3\u679c\u663e\u793a\uff0c\u94dc\u8868\u5c42WCA\u8fbe\u5230163\u00b0\uff0c\u6ede\u540e\u89d2\u4f4e\u81f31\u00b0\u3002\u6839\u636e\u6781\u5316\u66f2\u7ebf\u5256\u6790\uff08\u56fe9\uff09\u5f97\u77e5\uff0c\u88f8\u94dc\u3001\u81ea\u7ec4\u88c5\u6c1f\u6c2f\u7845\u70f7\u6539\u6027\u6750\u6599\u94dc\u548c\u8d85\u758f\u6c34\u94dc\u7684\u8150\u8680\u6df1\u5ea6\u5404\u81ea\u4e3a51,2.5\u548c0.077 \u03bcm\/a,\u8d85\u758f\u6c34\u94dc\u5177\u6709\u51fa\u8272\u7684\u8010\u8150\u8680\u7279\u6027\u3002<\/p>\n

\u56fe9 \u88f8\u94dc\u3001\u81ea\u7ec4\u88c5\u6c1f\u6c2f\u7845\u70f7\u6539\u6027\u6750\u6599\u94dc\u548c\u8d85\u758f\u6c34\u94dc\u57283.5%NaCl\u4e2d\u7684\u5854\u83f2\u5c14\u6781\u5316\u66f2\u7ebf<\/p>\n

\"16.png\"<\/p>\n

\n

3 \u7ed3\u8bed<\/p>\n

\u7efc\u5408\u5206\u6790\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u5728\u8010\u8150\u8680\u884c\u4e1a\u7684\u7814\u7a76\u6210\u679c\u5f97\u77e5\uff0c\u8d85\u758f\u6c34\u819c\u5c42\u5bf9\u6d78\u8680\u7269\u8d28\u5177\u6709\u51fa\u8272\u7684\u963b\u9694\u529f\u6548\uff0c\u53ef\u4ee5\u5408\u7406\u5730\u9632\u6b62\u6216\u7f13\u89e3\u677f\u6750\u91d1\u5c5e\u6750\u6599\u7684\u7535\u5316\u5b66\u53cd\u5e94\uff1b\u4e0e\u6b64\u540c\u65f6\uff0c\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u7684\u7eb3\u7c73\u7ea4\u7ef4\u819c\u5c42\u76f8\u6bd4\u4e8e\u9ad8\u6548\u6db2\u76f8\u6cd5\uff0c\u5728\u758f\u6c34\u6027\u3001\u6709\u673a\u5316\u5b66\u53ef\u9760\u6027\u3001\u81ea\u7136\u73af\u5883\u8010\u7528\u6027\u3001\u751f\u4ea7\u6d41\u7a0b\u3001\u6210\u672c\u8d39\u53ca\u5176\u7eff\u8272\u73af\u4fdd\u7b49\u9886\u57df\u5177\u5907\u66f4\u52a0\u7a81\u663e\u7684\u4f18\u70b9\u3002\u4f46\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u58c1\u539a\u8584\uff0c\u6297\u78e8\u635f\u548c\u8010\u673a\u5668\u4f24\u5bb3\u7684\u80fd\u529b\u5dee\uff0c\u6bd4\u8f83\u4e25\u91cd\u59a8\u788d\u4e86\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u9020\u6280\u672f\u6027\u5728\u8d85\u758f\u6c34\u819c\u5c42\u5236\u53d6\u4e2d\u7684\u4ea7\u54c1\u5316\u8fd0\u7528\u3002\u76ee\u524d\u4e3a\u6b62\uff0c\u4ec5\u6781\u5c11\u6570\u4e13\u5bb6\u5b66\u8005\u5c31\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u7684\u6297\u78e8\u635f\u3001\u8010\u673a\u5668\u635f\u5bb3\u7b49\u7279\u6027\u8fdb\u884c\u7cfb\u7edf\u8f6f\u4ef6\u79d1\u5b66\u7814\u7a76\u3002<\/p>\n

\u56e0\u800c\uff0c\u4e3a\u4fc3\u8fdb\u6c14\u76f8\u8272\u8c31\u6cd5\u5236\u53d6\u8d85\u758f\u6c34\u819c\u5c42\u5728\u8010\u8150\u8680\u884c\u4e1a\u7684\u4ea7\u54c1\u5316\u8fd0\u7528\uff0c\u8fd8\u5fc5\u987b\u8fdb\u4e00\u6b65\u52a0\u5f3a3\u4e2a\u9886\u57df\u7684\u79d1\u5b66\u7814\u7a76\uff1a<\/p>\n

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