![\"1.png\"](\"\/wp-content\/uploads\/2021\/12\/20211215135316-61b9f34c7a783.png\" "\\"1.png\\"")
<\/p>\n\u6458\u3000\u8981\u3000\u9009\u7528X X\u5c04\u7ebf\u900f\u5c04(XRD) ,MOCON \u900f\u6c14\u6027\u4eea\u7b49\u79d1\u5b66\u7814\u7a76\u4e86\u4e0d\u4e00\u6837\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6Parylene C \u819c\u7684\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u6c34\u84b8\u6c14\u901a\u8fc7\u6027\u3001\u6297\u62c9\u5f3a\u5ea6\u3001\u96fe\u5ea6\u3001\u6e05\u6670\u5ea6\u968f\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u7684\u53d8\u5316\u8d8b\u52bf\u3002\u7ed3\u679c\u663e\u793a,\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, Parylene C \u819c\u76f8\u5bf9\u6027\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u900f\u6c14\u6027\u7279\u6027\u3001\u6297\u62c9\u5f3a\u5ea6\u3001\u6e05\u6670\u5ea6\u964d\u4f4e,\u96fe\u5ea6\u6269\u5927\u3002<\/p>\n
\u5173\u952e\u5b57\u3000Parylene C ,\u5806\u79ef\u5de5\u4f5c\u538b\u529b,\u73bb\u7483\u5316\u6e29\u5ea6<\/p>\n
\n
\u00a0 \u00a0 \u00a0 \u00a0Parylene C \u5851\u6599\u8584\u819c( Poly (chloro2p2Xylylene) ,\u901a\u79f0PC \u819c) \u56e0\u5177\u5907\u826f\u597d\u7684\u6c7d\u4f53\u4e0e\u6c34\u84b8\u6c14\u963b\u6321\u7279\u6027\u3001\u7269\u7406\u5b66\u7269\u7406\u6027\u80fd\u3001\u7535\u7edd\u7f18\u6027\u80fd\u3001\u76f8\u6eb6\u6027\u53ca\u5176\u8010\u8150\u8680\u7b49\u7279\u6027,\u8fdb\u800c\u5728\u534a\u5bfc\u4f53\u6750\u6599\u3001\u7535\u5b50\u5668\u4ef6\u3001\u7535\u5b50\u5149\u5b66\u673a\u68b0\u7ed3\u6784\u3001\u611f\u5e94\u5668\u3001\u533b\u7528\u4eea\u5668\u3001\u6587\u5316\u9057\u4ea7\u4fdd\u62a4\u3001\u539f\u6750\u6599\u9632\u6c34\u8986\u76d6\u7b49\u8bb8\u591a\u65b9\u9762\u83b7\u5f97\u5e7f\u6cdb\u8fd0\u7528\u3002<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u5728PC \u819c\u6d82\u819c\u5168\u8fc7\u7a0b\u4e2d,\u57fa\u6750\u6eab\u5ea6\u3001\u57fa\u6750\u8868\u5c42\u60c5\u51b5\u3001\u88c2\u5316\u6eab\u5ea6\u3001\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u7b49\u5bf9\u819c\u7279\u6027\u548c\u54c1\u8d28\u90fd\u662f\u6709\u4e00\u5b9a\u7684\u5371\u5bb3\u3002\u5728\u5176\u4e2d,\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u662f\u6700\u91cd\u8981\u7684\u5f71\u54cd\u56e0\u7d20,\u5728\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5\u540c\u6837\u65f6,\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u5371\u5bb3\u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c,\u800c\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c\u5371\u5bb3\u6d82\u5c42\u6c47\u805a\u5168\u8fc7\u7a0b[123 ] \u3002<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u672c\u65b9\u5f0f\u5b9e\u73b0\u5728\u4e0d\u4e00\u6837\u5300\u901f\u8fd0\u52a8\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6\u4e86PC \u819c,\u5e76\u5bf9\u819c\u5806\u79ef\u901f\u5ea6\u3001\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u900f\u6c14\u6027\u7279\u6027\u3001\u6297\u62c9\u5f3a\u5ea6\u3001\u6e05\u6670\u5ea6\u3001\u96fe\u5ea6\u5f00\u5c55\u4e86\u5256\u6790,\u79d1\u5b66\u7814\u7a76\u4e86\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9PC \u819c\u7279\u6027\u7684\u5371\u5bb3,\u5bf9PC \u9540\u5c42\u751f\u4ea7\u5de5\u827a\u63d0\u5347\u5177\u5907\u6838\u5fc3\u5b9e\u9645\u610f\u4e49\u3002<\/p>\n
\n
1 \u3000\u8bd5\u9a8c\u4e00\u90e8\u5206<\/p>\n
1. 1 \u3000\u6d82\u5c42\u5236\u53d6<\/p>\n
\u673a\u5668\u8bbe\u5907: PDS2060 \u9540\u5c42\u7089; \u539f\u6750\u6599: C \u578b\u73af\u4e8c\u4f53; \u653e\u6599\u91cf:200g ;\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5:15mT ;\u5806\u79ef\u5ba4\u771f\u7a7a\u503c:\u5404\u81ea\u4e3a40mT\u300150mT\u300160 mT\u300170 mT ;\u88c2\u89e3\u7089\u6eab\u5ea6:690 \u2103;\u6d82\u5c42\u677f\u6750:\u6253\u78e8\u629b\u5149\u77f3\u82f1\u77f3\u73bb\u7483;\u5806\u79ef\u5ba4:\u03a6460mm\u00d7330mm\u3002<\/p>\n
1. 2 \u3000X\u5c04\u7ebf\u884d\u5c04( XRD) \u5256\u6790<\/p>\n
\u9009\u7528Philips Analytical X2Ray ,\u52a0\u5feb\u5de5\u4f5c\u7535\u538b: 40kV ; \u626b\u63cf\u4eea\u89c6\u89d2:5105\u00b0\uff5e34195\u00b0;\u626b\u63cf\u65f6\u95f4:10min ;\u6301\u7eed\u9010\u884c\u626b\u63cf\u3002<\/p>\n
1. 3 \u3000\u6d82\u5c42\u6e05\u6670\u5ea6\u3001\u96fe\u5ea6\u68c0\u6d4b<\/p>\n
\u9009\u7528\u6cd5\u56fdDiffusion \u4f01\u4e1aM57D \u578b\u96fe\u5ea6\u8ba1\u6309GB2410280\u89c4\u8303\u5f00\u5c55\u68c0\u6d4b\u3002<\/p>\n
1. 4 \u3000\u6d82\u5c42\u900f\u6c14\u6027\u529f\u80fd\u6d4b\u8bd5<\/p>\n
\u9009\u7528MOCON PERMATRAN2W 3\/ 33MG\u578b\u900f\u6c14\u6027\u7279\u6027\u68c0\u6d4b\u4eea,\u68c0\u6d4b\u5de5\u4f5c\u6e29\u5ea620 \u00b12 \u2103,\u68c0\u6d4b\u6eab\u5ea63718 \u2103;N2 \u603b\u6d41\u91cf(100\u00b11) sccm;\u5851\u6599\u8584\u819c\u4e00\u4fa7\u7a7a\u6c14\u6e7f\u5ea6\u4e3a100 % ,\u53e6\u4e00\u4fa7\u8d34\u8fd10 % ,\u6570\u636e\u4fe1\u606f\u5206\u8fa8\u65b9\u5f0f\u4e3a\u7a0b\u5e8f\u6d41\u7a0b\u5168\u81ea\u52a8\u5faa\u73af\u7cfb\u7edf\u65b9\u5f0f\u3002<\/p>\n
1. 5 \u3000\u6d82\u5c42\u62c9\u7533\u529f\u80fd\u6d4b\u8bd5<\/p>\n
\u9009\u7528\u5170\u5149XLW (L ) PC \u578b\u667a\u80fd\u8bbe\u5907\u62c9\u529b\u6d4b\u8bd5\u673a, \u6309GB13022291 \u8bd5\u884c\u6837,\u68c0\u6d4b\u5de5\u4f5c\u6e29\u5ea6: (20 \u00b12) \u2103;\u62c9\u7533\u901f\u7387:100mm\/ min ;\u8bd5\u54c1\u603b\u5bbd:15mm\u3002<\/p>\n
\n
2 \u3000\u7d50\u679c\u4e0e\u63a2\u8ba8<\/p>\n
2. 1 \u3000\u73bb\u7483\u5316\u6e29\u5ea6\u4e0e\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u5173\u8054<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u56fe1 \u4e3a\u4e0d\u4e00\u6837\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6PC \u819c\u7684XRD \u8d8b\u52bf\u56fe,PC \u819c\u5728\u7ea614\u00b0\u5904\u53d1\u751f\u4e86\u7ed3\u6676\u4f53\u5cf0,\u5cf0\u6297\u538b\u5f3a\u5ea6\u3001\u5cf0\u5bbd\u968f\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347\u800c\u51cf\u5c11,\u800c\u5cf0\u7684\u6297\u538b\u5f3a\u5ea6\u610f\u5473\u7740\u4e86\u819c\u7684\u76f8\u5bf9\u6027\u73bb\u7483\u5316\u6e29\u5ea6,\u56e0\u6b64PC \u819c\u73bb\u7483\u5316\u6e29\u5ea6\u968f\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347\u800c\u51cf\u5c11\u3002\u8fd9\u5173\u952e\u662f\u5728\u8f83\u4f4e\u5de5\u4f5c\u538b\u529b\u4e0b,\u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c\u8f83\u4f4e,\u5355\u4e2a\u6709\u5145\u88d5\u6642\u95f4\u5f00\u5c55\u6c47\u805a,\u5176\u6c47\u805a\u66f4\u8d8b\u4e8e\u4e95\u7136\u6709\u5e8f\u3001\u9ad8\u5bc6\u5ea6[4 ] ,\u4ea7\u751fPC \u819c\u73bb\u7483\u5316\u6e29\u5ea6\u8f83\u9ad8;\u5f53\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u589e\u9ad8\u540e,\u5355\u4e2a\u6d53\u5ea6\u503c\u63d0\u5347,\u5806\u79ef\u901f\u5ea6\u6269\u5927,\u4e00\u90e8\u5206\u5355\u5206\u5b50\u7ed3\u6784\u8d76\u4e0d\u53ca\u4e95\u7136\u6709\u5e8f\u5806\u79ef,\u8fdb\u800c\u4f7f\u819c\u7684\u73bb\u7483\u5316\u6e29\u5ea6\u51cf\u5c11\u3002<\/p>\n
<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0Gazicki M[5 ]\u7684\u7814\u7a76\u8868\u660e,\u4f34\u968f\u7740\u73af\u4e8c\u4f53\u63d0\u5347\u901f\u5ea6\u52a0\u901f, PC\u819c\u5185\u4e8c\u805a\u7269\u548c\u4f4e\u805a\u7269\u5c06\u663e\u8457\u589e\u52a0\u3002\u5728\u8f83\u9ad8\u7684\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0b,\u63d0\u5347\u901f\u5ea6\u52a0\u901f,\u73af\u4e8c\u4f53\u63d0\u5347\u540e\u5728\u88c2\u89e3\u7089\u5185\u505c\u7559\u7684\u65f6\u95f4\u76f8\u5bf9\u6027\u51cf\u5c11,\u4e00\u90e8\u5206\u4e8c\u805a\u7269\u8d76\u4e0d\u53ca\u88c2\u5316,\u8fdb\u5230\u5806\u79ef\u5ba4\u5806\u79ef\u4e8ePC \u819c\u5185,\u51cf\u5c11PC\u819c\u73bb\u7483\u5316\u6e29\u5ea6\u3002<\/p>\n
2. 2 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0e\u63d0\u5347\u901f\u5ea6\u3001\u5806\u79ef\u901f\u5ea6\u7684\u5173\u8054<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u56fe2 \u4e3a\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9\u63d0\u5347\u901f\u5ea6\u548c\u5806\u79ef\u901f\u5ea6\u7684\u5371\u5bb3,\u5982\u4e0b\u56fe\u6240\u793a,\u5728\u539f\u6750\u6599\u91cf\u53ca\u5806\u79ef\u5ba4\u5bb9\u91cf\u4e00\u5b9a\u65f6,\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u63d0\u5347,\u539f\u6750\u6599\u63d0\u5347\u901f\u5ea6\u63d0\u5347,\u4e0e\u771f\u7a7a\u503c\u6210\u7ebf\u6027\u76f8\u5173\u3002\u56e0\u4e3a\u8bd5\u9a8c\u4e2d,\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5\u4e00\u81f4,\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u7acb\u5373\u4f53\u73b0\u4e86\u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c,\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u63d0\u5347,\u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c\u63d0\u5347,\u63d0\u5347\u901f\u5ea6\u52a0\u901f,\u5806\u79ef\u901f\u5ea6\u968f\u7740\u6269\u5927\u3002\u5728\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e3a40mT \u65f6,200g\u539f\u6750\u6599\u5f7b\u5e95\u63d0\u5347\u7684\u65f6\u95f4\u662f70mT \u7684217 \u500d,\u63d0\u5347\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b,\u80fd\u660e\u663e\u51cf\u5c11\u9540\u5c42\u6642\u95f4\u3002<\/p>\n
<\/p>\n
![\"2.png\"](\"\/wp-content\/uploads\/2021\/12\/20211215135316-61b9f34cab9b8.png\" "\\"2.png\\"")
<\/p>\n
\u4e0e\u6b64\u540c\u65f6\u5728\u8bd5\u9a8c\u4e2d\u53d1\u89c9,\u4f34\u968f\u7740\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, PC \u819c\u5c3d\u7ba1\u5355\u4f4d\u65f6\u95f4\u5806\u79ef\u901f\u5ea6\u660e\u663e\u63d0\u5347,\u53ef\u662f\u603bPC \u819c\u8584\u539a\u5374\u6709\u4e00\u5b9a\u6c34\u5e73\u51cf\u5c11,\u6b64\u7ed3\u679c\u8feb\u5207\u9700\u8981\u8fdb\u4e00\u6b65\u8bd5\u9a8c\u4e86\u89e3\u3002<\/p>\n
2. 3 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0ePC\u819c\u900f\u6c34\u7387\u5173\u8054<\/p>\n
\u900f\u6c34\u7387\u8868\u660e:\u5355\u4f4d\u65f6\u95f4\u5185,\u6c34\u84b8\u6c14\u4ece\u4f01\u4e1a\u8584\u539a\u5851\u6599\u8584\u819c\u9ad8\u73af\u5883\u6e7f\u5ea6\u4fa7\u9762\u4f4e\u73af\u5883\u6e7f\u5ea6\u4fa7\u6e17\u5165\u5de5\u4f5c\u80fd\u529b,\u8ba1\u7b97\u65b9\u6cd5:<\/p>\n
q =\u0394m \u00d7dS \u00d7t(1)<\/p>\n
\u5f0f\u4e2d:q – \u6c34\u84b8\u6c14\u8986\u76d6\u7387,g. mm\/ (m2 . day) ;\u0394m – \u6c34\u84b8\u6c7d\u6e17\u5165\u91cf,g ; d – PC \u819c\u8584\u539a,mm; S – \u900f\u6c14\u6027\u603b\u9762\u79ef,m2 ; t – \u6642\u95f4,day\u3002<\/p>\n
![\"3.png\"](\"\/wp-content\/uploads\/2021\/12\/20211215135316-61b9f34ccb10d.png\" "\\"3.png\\"")
<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u56fe3 \u4e3a\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9PC \u819c\u900f\u6c14\u6027\u7279\u6027\u7684\u5371\u5bb3,\u5982\u4e0b\u56fe\u6240\u793a,\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u503c\u63d0\u5347,PC \u819c\u6c34\u84b8\u6c14\u901a\u8fc7\u6307\u6570\u6269\u5927\u3002\u6c34\u5206\u901a\u8fc7PC \u819c\u7b49\u805a\u5408\u7269\u662f\u6839\u636e\u878d\u89e32\u8513\u5ef6\u5168\u8fc7\u7a0b\u6765\u8fdb\u884c\u7684[6 ] ,\u6c34\u5206\u5728\u805a\u5408\u7269\u819c\u5185\u7684\u878d\u89e3\u5173\u952e\u4ea7\u751f\u5728\u975e\u6676\u533a,\u975e\u6676\u533a\u5360\u6bd4\u8d8a\u5927,\u6eb6\u89e3\u6027\u8d8a\u5927;\u6c34\u5206\u5728PC \u819c\u5185\u7684\u8513\u5ef6\u4e5f\u5173\u952e\u4ea7\u751f\u5728\u975e\u6676\u533a,\u5373\u9ad8\u5206\u5b50\u6750\u6599\u94fe\u95f4\u7684\u4e3b\u8981\u4e00\u90e8\u5206,\u8fd9\u79cd\u7a7a\u9699\u7684\u6837\u5b50\u3001\u5c3a\u5bf8\u3001\u904d\u5e03\u60c5\u51b5\u90fd\u5371\u5bb3\u6c34\u5206\u5b50\u6269\u6563\u901f\u5ea6\u3002\u6269\u6563\u7cfb\u6570\u4e0e\u73bb\u7483\u5316\u6e29\u5ea6\u5173\u8054\u5173\u8054\u4e3a:D = Da\/\u03c4,Da \u4e3a\u6c7d\u4f53\u5728\u9ad8\u805a\u7269\u975e\u6676\u533a\u7684\u6269\u6563\u7cfb\u6570,\u03c4\u4e3a\u901a\u8fc7\u6c7d\u4f53\u5206\u5b50\u7ed3\u6784\u907f\u8fc7\u6676\u533a\u7684\u9014\u5f84\u5f2f\u6298\u5ea6\u3002\u56e0\u800c,\u73bb\u7483\u5316\u6e29\u5ea6\u8d8a\u9ad8,\u819c\u7684\u5408\u7406\u6e17\u5165\u603b\u9762\u79ef\u8d8a\u5c0f,\u7d50\u679c\u9020\u6210\u6c34\u84b8\u6c14\u901a\u8fc7\u6027\u51cf\u5c11\u3002<\/p>\n
2. 4 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0e\u819c\u6297\u62c9\u5f3a\u5ea6\u5173\u8054<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u56fe3 \u8868\u660e,\u4f34\u968f\u7740\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u4e0a\u5347,\u5851\u6599\u8584\u819c\u6297\u62c9\u5f3a\u5ea6\u964d\u4f4e\u3002\u56e0\u4e3a\u4f34\u968f\u7740\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, PC \u819c\u5806\u79ef\u6709\u5e8f\u5316\u51cf\u5c11,\u672a\u88c2\u5316\u73af\u4e8c\u4f53\u53ca\u4f4e\u805a\u7269\u589e\u52a0,\u8fdb\u800c\u9020\u6210\u5851\u6599\u8584\u819c\u4e2d\u7684\u65e0\u5b9a\u5f62\u533a\u5360\u6bd4\u63d0\u5347,\u51cf\u5c11\u4e86\u5176\u7269\u7406\u6027\u80fd,\u5bfc\u81f4PC \u819c\u6297\u62c9\u5f3a\u5ea6\u964d\u4f4e\u3002<\/p>\n
2. 5 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0e\u819c\u6e05\u6670\u5ea6\u3001\u96fe\u5ea6\u5173\u8054<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u6e05\u6670\u5ea6\u548c\u96fe\u5ea6\u662f\u8868\u73b0\u5851\u6599\u8584\u819c\u5916\u578b\u54c1\u8d28\u7684\u4e3b\u8981\u6307\u6807\u503c\u3002\u96fe\u5ea6\u8868\u660e\u901a\u8fc7\u8bd5\u4ef6\u800c\u504f\u79fb\u5165\u5c04\u89d2\u65b9\u4f4d\u7684\u900f\u5c04\u6d41\u660e\u503c\u4e0e\u7535\u5b50\u6563\u5c04\u6d41\u660e\u503c\u4e4b\u6bd4,\u7528\u767e\u5206\u6570\u8868\u793a,\u901a\u5e38\u5c06\u504f\u79fb\u5165\u5c04\u89d2\u65b9\u4f4d215\u00b0\u4ee5\u4e0a\u7684\u900f\u5c04\u6d41\u660e\u503c\u7528\u4ee5\u6d4b\u7b97\u96fe\u5ea6\u3002\u56fe4 \u662f\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9PC \u819c\u6e05\u6670\u5ea6\u548c\u96fe\u5ea6\u7684\u5371\u5bb3,\u5982\u4e0b\u56fe\u6240\u793a,\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, PC \u819c\u6e05\u6670\u5ea6\u51cf\u5c11,\u96fe\u5ea6\u589e\u52a0\u3002<\/p>\n
![\"5.png\"](\"\/wp-content\/uploads\/2021\/12\/20211215135316-61b9f34ceade9.png\" "\\"5.png\\"")
<\/p>\n
\u56e0\u4e3a\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u589e\u9ad8\u540e,\u672a\u88c2\u5316\u7684\u73af\u4e8c\u4f53\u548cPC \u819c\u5185\u4f4e\u805a\u7269\u589e\u52a0,\u7b49\u540c\u4e8e\u5728PC \u819c\u4e2d\u5bfc\u5165\u4e86\u6b8b\u6e23,\u5371\u5bb3\u5149\u6e90\u5728PC \u819c\u4e2d\u7684\u900f\u8fc7\u7387(\u6e05\u6670\u5ea6) ,\u6b8b\u6e23\u589e\u52a0\u540e\u5149\u6e90\u8d8a\u8fc7PC \u819c\u65f6\u4ea7\u751f\u53cd\u5c04\u9762\u6216\u6620\u5c04\u673a\u9047\u6269\u5927,\u9020\u6210PC \u819c\u96fe\u5ea6\u4e0a\u5347\u3002<\/p>\n
\n
3 \u3000\u7ed3\u3000\u8bba<\/p>\n
\u00a0 \u00a0 \u00a0 \u00a0\u5728\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5\u3001\u539f\u6750\u6599\u91cf\u3001\u5806\u79ef\u5ba4\u5bb9\u91cf\u4e00\u81f4\u72b6\u51b5\u4e0b,\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4ece40mT \u5347\u523070mT :\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347,\u539f\u6750\u6599\u63d0\u5347\u901f\u5ea6\u3001\u5851\u6599\u8584\u819c\u5806\u79ef\u901f\u5ea6\u63d0\u5347,\u5851\u6599\u8584\u819c\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u9632\u7a7a\u6c14\u6e17\u5165\u3001\u6297\u62c9\u5f3a\u5ea6\u7b49\u7279\u6027\u51cf\u5c11\u3002\u800c\u4e14\u968f\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0a\u5347\u5851\u6599\u8584\u819c\u96fe\u5ea6\u6269\u5927\u3001\u6e05\u6670\u5ea6\u51cf\u5c11\u3002<\/p>\n
\u8bba\u6587\u53c2\u8003\u6587\u732e<\/p>\n
[ 1 ] \u3000\u80e1\u56fd\u8d1e,\u9648\u68a6\u96ea. \u5851\u6599\u8584\u819c\u9540\u5c42\u539f\u6750\u6599\u2014\u2014\u2014\u805a\u5bf9\u4e8c\u7532\u82ef[J ] . \u6210\u90fd\u6559\u80b2\u5b66\u9662\u5b66\u520a, 2005 ,1 :43244.<\/p>\n
[ 2 ] \u3000\u5f20\u5360\u6587,\u5218\u6587. \u6c14\u76f8\u8272\u8c31\u5806\u79ef\u6cd5\u5236\u53d6\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c[J ] . \u6750\u6599\u5bfc\u62a5,2003 ,6 :83286.<\/p>\n
[ 3 ] \u3000\u5434\u793c\u7fa4. Parylene \u6577\u5f62\u9540\u5c42[J ] . Elect ro2Mechanical Engineer2ing ,2004 ,20 :51261.<\/p>\n
[ 4 ] \u3000Zhang X , Dabral S. Crystallinity properties of parylene2n affect2ing it s use as an ILD insubmicron integrated circuit technology[J ] . Thin Solid Films ,1995 (270) :5082511.<\/p>\n
[ 5 ] \u3000Gazicki M. Polymerization of Para2xylene Derivatives. V.Effect s of Sublimation Rate of Di2p2xylylene on t he Crystallinityof Parylene C Deposited at Different Temperatures[J ] . Polymer<\/p>\n
Chemist ry ,1987 ,25 :208922106.<\/p>\n
[ 6 ] \u3000\u5f20\u9896,\u738b\u5fd7. \u9ad8\u5206\u5b50\u6750\u6599\u819c\u7ed3\u6784\u5de5\u7a0b\u5bf9\u6c7d\u4f53\u4f20\u9001\u7684\u5371\u5bb3[J ] . \u9ad8\u5206\u5b50\u6750\u6599\u7ba1\u7406\u79d1\u5b66\u4e0e\u5de5\u7a0b\u9879\u76ee,2004 ,4 :24227.<\/p>\n
<\/p>\n
\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n
\n
<\/p>\n
\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":" \u6458\u3000\u8981\u3000\u91c7\u7528X\u5c04\u7ebf\u884d\u5c04(XRD),MOCON\u900f\u6e7f\u4eea\u7b49\u7814\u7a76\u4e86\u4e0d\u540c\u6c89\u79ef\u538b\u529b\u4e0b\u5236\u5907ParyleneC\u819c\u7684\u7ed3\u6676\u5ea6\u3001\u6c34\u84b8\u6c7d\u900f\u8fc7\u6027\u3001\u62c9\u4f38\u5f3a\u5ea6\u3001\u96fe\u5ea6\u3001\u900f\u660e\u5ea6\u968f\u6c89\u79ef\u538b\u529b\u7684\u53d8\u5316\u89c4\u5f8b\u3002\u7ed3\u679c\u8868\u660e,\u968f\u7740\u6c89\u79ef\u5ba4\u538b\u529b\u5347\u9ad8,ParyleneC\u819c\u76f8\u5bf9\u7ed3\u6676\u5ea6\u3001\u900f\u6e7f\u6027<\/p>\n","protected":false},"author":1,"featured_media":24096,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[59],"tags":[3643,1545,1544,3620],"class_list":["post-24097","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-information","tag-c-d-n-f-ht","tag-parylene","tag-1544","tag-3620"],"jetpack_featured_media_url":"\/wp-content\/uploads\/2021\/12\/20211215135317-61b9f34d32120.png","jetpack-related-posts":[{"id":19620,"url":"https:\/\/www.paiqinano.com\/?p=19620","url_meta":{"origin":24097,"position":0},"title":"\u6c89\u79ef\u538b\u529b\u5bf9Parylene 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