{"id":24068,"date":"2021-12-23T10:52:47","date_gmt":"2021-12-23T02:52:47","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=24068"},"modified":"2021-12-22T15:16:27","modified_gmt":"2021-12-22T07:16:27","slug":"%e5%8c%96%e5%ad%a6%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af%ef%bc%88cvd%ef%bc%89%e6%8a%80%e6%9c%af%e6%a2%b3%e7%90%86","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=24068","title":{"rendered":"\u8f6c\u8f7d\uff1a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u6280\u672f\u68b3\u7406"},"content":{"rendered":"

\n

\u6750\u6599\u4eba\u53d1\u5e03\u5236\u53d6\u680f\u76ee\uff0c\u9080\u7ea6\u680f\u76ee\u9ad8\u65b0\u79d1\u6280\u54a8\u8be2\u987e\u95ee\u5199\u7a3f\u53d9\u8ff0\u5404\u79cd\u5404\u6837\u5236\u53d6\u6280\u672f\u6027\u3002\u6587\u4e2d\u7531\u6750\u6599\u4eba\u680f\u76ee\u9ad8\u65b0\u79d1\u6280\u54a8\u8be2\u987e\u95ee\u77f3\u78ca\u5199\u7a3f\u7ed9\u4e88\u3002<\/p>\n

 <\/p>\n

\n
\n

1. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u7684\u6765\u6e90\u4e8e\u53ca\u53d1\u5c55\u8d8b\u52bf<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08Chemical Vapor Deposition\uff09\u4e2d\u7684Vapor Deposition\u610f\u6307\u6c14\u76f8\u8272\u8c31\u5806\u79ef\uff0c\u5176\u4e49\u5c31\u662f\u6307\u8fd0\u7528\u6c14\u76f8\u8272\u8c31\u4e2d\u4ea7\u751f\u7684\u7269\u7406\u5b66\u3001\u6709\u673a\u5316\u5b66\u5168\u8fc7\u7a0b\uff0c\u5728\u6db2\u4f53\u8868\u5c42\u4ea7\u751f\u5806\u79ef\u7269\u7684\u6280\u672f\u6027\u3002\u4f9d\u7167\u539f\u7406\u5176\u53ef\u4ee5\u533a\u5212\u4e3a\u4e09\u5927\u7c7b\uff1a\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\uff08Physical\u00a0Vapor\u00a0Deposition,\u901a\u79f0PVD\uff09\uff0c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08Chemical\u00a0Vapor\u00a0Deposition,\u901a\u79f0CVD\uff09\u548c\u7b49\u79bb\u5b50\u6c14\u76f8\u8272\u8c31\u5806\u79ef\uff08Plasma Chemical Vapor Deposition,\u901a\u79f0PCVD\uff09\u3002[<\/sup>1]<\/sup>\u73b0\u9636\u6bb5CVD\u7684\u8fd0\u7528\u6700\u666e\u904d\uff0c\u5176\u6280\u672f\u6027\u53d1\u5c55\u8d8b\u52bf\u53ca\u79d1\u5b66\u7814\u7a76\u4e5f\u66f4\u4e3a\u5b8c\u5584\uff0c\u5176\u666e\u904d\u4f7f\u7528\u4e8e\u666e\u904d\u7528\u4ee5\u7eaf\u5316\u6210\u5206\u3001\u5236\u53d6\u5404\u79cd\u5404\u6837\u5355\u6676\u4f53\u3001\u591a\u6676\u4f53\u6216\u73bb\u7483\u6001\u6709\u673a\u7269\u5851\u6599\u8584\u819c\u539f\u6750\u6599\u3002<\/p>\n

 <\/p>\n

CVD\u548cPVD\u4e2d\u95f4\u7684\u5dee\u522b\u4e3b\u8981\u662f\uff0cCVD\u5806\u79ef\u5168\u8fc7\u7a0b\u8981\u4ea7\u751f\u5316\u5b66\u53d8\u5316\uff0c\u5f52\u5c5e\u4e8e\u6c14\u76f8\u8272\u8c31\u6709\u673a\u5316\u5b66\u751f\u957f\u53d1\u80b2\u5168\u8fc7\u7a0b\uff0c\u5176\u4e3b\u8981\u5c31\u662f\u6307\u8fd0\u7528\u6c7d\u6001\u6216\u662f\u84b8\u6c14\u6001\u7684\u6210\u5206\u5728\u6db2\u4f53\u754c\u9762\u4e0a\u4ea7\u751f\u5316\u5b66\u53d8\u5316\u8fdb\u800c\u8f6c\u5316\u6210\u56fa\u4f53\u5806\u79ef\u7269\u7684\u52a0\u5de5\u5de5\u827a\u5168\u8fc7\u7a0b\u3002\u7b80\u5355\u70b9\u6765\u8bf4\uff0c\u5373\u80fd\u591f\u5c06\u591a\u79cd\u591a\u6837\u6c7d\u4f53\u539f\u6750\u6599\u5bfc\u5230\u53cd\u6620\u623f\u95f4\u5185,\u4f7f\u5176\u76f8\u4e92\u4e4b\u95f4\u4ea7\u751f\u5316\u5b66\u53d8\u5316\u8f6c\u5316\u6210\u65b0\u578b\u6750\u6599\uff0c\u6700\u7ec8\u5806\u79ef\u5230\u7845\u7247\u4f53\u8868\u5c42\u7684\u5168\u8fc7\u7a0b\u3002CVD\u8fd9\u4e00\u540d\u5b57\u6700\u5f00\u59cb\u5728Powell C F\u7b49\u4eba1966\u5e74\u6240\u77e5\u540d\u4e3a\u300aVapor Deposition\u300b\u7684\u4e66\u91cc\u88ab\u521d\u6b21\u63d0\u53ca\uff0c\u4ee5\u540eChemical Vapor Deposition\u624d\u4e3a\u4eba\u6b63\u76f4\u666e\u904d\u63a5\u7eb3\u3002[<\/sup>2]<\/sup><\/p>\n

\u00a0<\/sup><\/p>\n

CVD\u6280\u672f\u6027\u7684\u8fd0\u7528\u6700\u5f00\u59cb\u53ef\u4ee5\u88ab\u4e0a\u6eaf\u5230\u8fdc\u53e4\u4eba\u7c7b\u9636\u6bb5\uff0c\u5c71\u6d1e\u58c1\u6216\u5ca9\u5c42\u4e0a\u7559\u4e0b\u6765\u4e86\u56e0\u4e3a\u4f9b\u6696\u548c\u70e4\u4e32\u7b49\u4ea7\u751f\u7684\u7070\u9ed1\u8272\u78b3\u5c42\u3002\u5f53\u4ee3CVD\u6280\u672f\u6027\u840c\u82bd\u671f\u4e8e20\u65b0\u4e16\u7eaa\u768450\u65f6\u4ee3\uff0c\u90a3\u65f6\u5019\u5176\u5173\u952e\u8fd0\u7528\u4e8e\u5236\u505a\u6570\u63a7\u5200\u7247\u7684\u9540\u5c42\u300220\u65b0\u4e16\u7eaa60\uff5e70\u65f6\u4ee3\u81f3\u4eca\uff0c\u4f34\u968f\u7740\u534a\u5bfc\u4f53\u6750\u6599\u548c\u7535\u5b50\u5668\u4ef6\u6280\u672f\u6027\u7684\u53d1\u5c55\u8d8b\u52bf\uff0cCVD\u6280\u672f\u6027\u83b7\u5f97\u4e86\u957f\u4e45\u7684\u5feb\u901f\u53d1\u5c55\u548c\u53d1\u5c55\u30021968\u5e74Nishizawa\u7814\u7a76\u7ec4\u521d\u6b21\u5e94\u7528\u4f4e\u7535\u538b\u6c5e\u706f\u79d1\u5b66\u7814\u7a76\u4e86\u5149\u76f4\u5c04\u5bf9\u56fa\u6001\u754c\u9762\u4e0a\u5806\u79efP\u578b\u5149\u4f0f\u7535\u6c60\u819c\u7684\u5371\u5bb3\uff0c\u6253\u5f00\u4e86\u5149\u5806\u79ef\u7684\u79d1\u5b66\u7814\u7a76\u3002[<\/sup>3]\u00a0<\/sup>1972\u5e74Nelson\u548cRichardson\u7528CO2<\/sub>\u6fc0\u5149\u5668\u5bf9\u7126\u675f\u5806\u79ef\u78b3\u819c\uff0c\u5f00\u59cb\u4e86\u6fc0\u5149\u5668\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u79d1\u5b66\u7814\u7a76\u3002[<\/sup>4]\u00a0<\/sup>\u7ee7Nelson\u4ee5\u540e\uff0c\u5b66\u8005\u4eec\u9009\u7528\u8f93\u51fa\u529f\u7387\u4e3a\u51e0\u5341\u74e6\u7684\u6fc0\u5149\u53d1\u751f\u5668\u5806\u79efSiC\u3001Si3<\/sub>N4<\/sub>\u7b49\u975e\u91d1\u5c5e\u6750\u6599\u819c\u548cFe\u3001Ni\u3001W\u3001Mo\u7b49\u9676\u74f7\u819c\u548c\u94dd\u5408\u91d1\u7a7a\u6c14\u6c27\u5316\u819c\uff0c\u4fc3\u8fdb\u4e86\u6fc0\u5149\u5668\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u53d1\u5c55\u8d8b\u52bf\u3002[<\/sup>5-7]<\/sup>\u00a0\u539f\u82cf\u8054Deryagin\u548cFedoseev\u7b49\u57281970\u5e74\u5f15\u8fdb\u5206\u5b50\u6c22\u5f00\u8f9f\u4e86\u6fc0\u8bdd\u4f4e\u7535\u538bCVD\u91d1\u94a2\u77f3\u5851\u6599\u8584\u819c\u751f\u957f\u53d1\u80b2\u6280\u672f\u6027\uff0c80\u65f6\u4ee3\u5728\u5168\u7403\u4ea7\u751f\u4e86\u79d1\u5b66\u7814\u7a76\u98ce\u6f6e\u3002[<\/sup>8,9]<\/sup>\u00a0\u73b0\u9636\u6bb5CVD\u6280\u672f\u6027\u5728\u7535\u5b50\u5668\u4ef6\u3001\u673a\u68b0\u8bbe\u5907\u7b49\u4ea7\u4e1a\u90e8\u95e8\u4e2d\u6fc0\u53d1\u4e86\u5173\u952e\u4f5c\u7528\uff0c\u5c24\u5176\u5bf9\u4e00\u4e9b\u5982\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6e17\u78b3\u4f53\u3001\u91d1\u94a2\u77f3\u548c\u7c7b\u91d1\u94a2\u77f3\u7b49\u4f5c\u7528\u5851\u6599\u8584\u819c\u548c\u8d85\u786c\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u3002\u7279\u522b\u662f\u5728\u73b0\u9636\u6bb5\u8d85\u7eaf\u7845\u539f\u6750\u6599-\u8d85\u7eaf\u591a\u6676\u7845\u7684\u5de5\u4f5c\u53ea\u6709\u6839\u636eCVD\u6280\u672f\u6027\u3002<\/p>\n

 <\/p>\n

\n
\n

2. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u53cd\u6620\u539f\u7406[<\/sup>10-12]<\/sup><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\u5982\u524d\u6240\u8ff0\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u662f\u6784\u5efa\u5728\u5316\u5b66\u53d8\u5316\u4ee5\u4e0a\u7684\uff0c\u6311\u9009\u9002\u5b9c\u7684\u4f5c\u7528\u539f\u6750\u6599\u548c\u5806\u79ef\u53cd\u6620\u6709\u5229\u4e8e\u83b7\u5f97\u6027\u80fd\u5353\u8d8a\u7684\u539f\u6750\u6599\u3002<\/p>\n

 <\/p>\n

a)\u9ad8\u6eab\u5316\u5408\u53cd\u5e94<\/strong><\/p>\n

 <\/p>\n

CVD\u5806\u79ef\u53cd\u6620\u91cc\u975e\u5e38\u7b80\u5355\u7acb\u5373\u7684\u5f62\u5f0f\u4fbf\u662f\u5206\u89e3\u53cd\u5e94\u53cd\u6620\uff0c\u5176\u57fa\u672c\u539f\u7406\u4e3b\u8981\u662f\u56fa\u4f53\u5316\u5b66\u7269\u8d28\u63d0\u6e29\u5230\u4e00\u5b9a\u6eab\u5ea6\u4f1a\u6eb6\u89e3\u4e3a\u56fa\u4f53\u603b\u4f53\u76ee\u6807\u7269\u8d28\u548c\u6c7d\u6001\u526f\u4ea7\u54c1\u3002\u64cd\u4f5c\u8fc7\u7a0b\u4e00\u822c\u662f\u5411\u8fd0\u884c\u6216\u53ef\u5851\u6027\u6c1b\u56f4\u4e0b\u7684\u5355\u6e29\u533a\u771f\u7a7a\u70d8\u7bb1\u5bfc\u8fdb\u53cd\u6620\u6c7d\u4f53\uff0c\u5c06\u6e29\u5ea6\u63a7\u5236\u5347\u5230\u5316\u5b66\u7269\u8d28\u7684\u6eb6\u89e3\u6eab\u5ea6\u4f7f\u4e4b\u4ea7\u751f\u6eb6\u89e3\uff0c\u5728\u7845\u7247\u4e0a\u5806\u79ef\u83b7\u5f97\u603b\u4f53\u76ee\u6807\u7269\u8d28\u3002\u5206\u89e3\u53cd\u5e94\u53cd\u6620\u7684\u91cd\u70b9\u5728\u4e8e\u9002\u5408\u6325\u8d77\u6e90\u548c\u6eb6\u89e3\u6eab\u5ea6\u7684\u6311\u9009\uff0c\u7279\u522b\u662f\u5728\u8981\u9700\u6ce8\u610f\u539f\u6599\u5728\u4e0d\u4e00\u6837\u73af\u5883\u6e29\u5ea6\u4e0b\u7684\u8f6c\u5316\u7269\u8d28\u3002\u73b0\u9636\u6bb5\u5e38\u8fd0\u7528\u7684\u539f\u6750\u6599\u6709\u6c22\u5316\u7269\u3001\u7fb0\u57fa\u5316\u5408\u7269\u548c\u91d1\u5c5e\u6750\u6599\u6709\u673a\u7269\u7b49\uff0c\u56e0\u5176\u79bb\u5b50\u952e\u7684\u89e3\u79bb\u80fd\u90fd\u5e7f\u6cdb\u8f83\u5c0f\uff0c\u6613\u6eb6\u89e3\uff0c\u6eb6\u89e3\u6eab\u5ea6\u76f8\u6bd4\u8f83\u4f4e\uff0c\u7279\u522b\u662f\u5728\u6c22\u5316\u7269\u6eb6\u89e3\u540e\u7684\u526f\u4ea7\u54c1\u662f\u6c92\u6709\u8150\u8680\u7684\u6c21\u6c14\u3002\u5206\u89e3\u53cd\u5e94\u53cd\u6620\u5173\u952e\u9002\u7528\u91d1\u5c5e\u6750\u6599\u3001\u534a\u5bfc\u4f53\u6750\u6599\u3001\u7edd\u7f18\u7269\u7b49\u6750\u8d28\u7684\u5236\u53d6\u3002<\/p>\n

 <\/p>\n

1)\u6c22\u5316\u7269\u6eb6\u89e3\u5236\u53d6\u591a\u6676\u7845\u548c\u975e\u6676\u7845\uff1aSiH4\u00a0<\/sub>(g)\u00a0\u2192 Si (s) 2H2\u00a0<\/sub>(g) \u00a0 \u00a0650\u2103<\/p>\n

 <\/p>\n

2)\u7fb0\u57fa\u6c1f\u5316\u7269\u6eb6\u89e3\u5806\u79ef\u8d35\u91cd\u91d1\u5c5e\u6216\u662f\u8fc7\u6e21\u5143\u7d20\uff1aNi(CO)4\u00a0<\/sub>(s)\u00a0\u2192 Ni (s) 4CO (g) \u00a0 \u00a0 140-240\u2103<\/p>\n

 <\/p>\n

3)\u91d1\u5c5e\u6750\u6599\u6709\u673a\u5316\u5408\u7269\u6eb6\u89e3\u5806\u79efAl2<\/sub>O3<\/sub>\uff1a2Al(OC3<\/sub>H7<\/sub>)3\u00a0<\/sub>(s)\u00a0\u2192 Al2<\/sub>O3\u00a0<\/sub>(s) 6C3<\/sub>H6\u00a0<\/sub>(g) 3H2<\/sub>O (g) \u00a0 \u00a0420\u2103<\/p>\n

 <\/p>\n

b)\u4eba\u5de5\u5408\u6210\u53cd\u6620<\/strong><\/p>\n

 <\/p>\n

CVD\u5806\u79ef\u53cd\u6620\u91cc\u4f7f\u7528\u6700\u666e\u904d\u7684\u5f53\u5c5e\u4eba\u5de5\u5408\u6210\u53cd\u6620\uff0c\u5176\u5173\u952e\u7275\u6d89\u5230\u591a\u79cd\u591a\u6837\u53cd\u6620\u6c7d\u4f53\u5728\u7845\u7247\u8868\u5c42\u4e92\u76f8\u53cd\u6620\u5806\u79ef\u8f6c\u5316\u6210\u56fa\u6001\u5851\u6599\u8584\u819c\u7684\u5168\u8fc7\u7a0b\uff0c\u56e0\u800c\u79f0\u4e4b\u4e3a\u4eba\u5de5\u5408\u6210\u53cd\u6620\uff0cCVD\u5806\u79ef\u53cd\u6620\u5927\u591a\u6570\u90fd\u5f52\u5c5e\u4e8e\u8be5\u7c7b\u3002\u4e00\u822c\u662f\u5c06\u591a\u79cd\u591a\u6837\u53cd\u6620\u6c7d\u4f53\u8fdb\u5165\u5411\u8fd0\u884c\u6216\u53ef\u5851\u6027\u6c1b\u56f4\u4e0b\u7684\u5355\u6e29\u533a\u771f\u7a7a\u70d8\u7bb1\u4e2d\uff0c\u6e29\u5ea6\u63a7\u5236\u5347\u5230\u9002\u5408\u7684\u6eab\u5ea6\u4f7f\u4e4b\u5728\u7845\u7247\u4e0a\u4ea7\u751f\u751f\u6210\u53cd\u6620\u83b7\u5f97\u603b\u4f53\u76ee\u6807\u7269\u8d28\u3002\u4eba\u5de5\u5408\u6210\u53cd\u6620\u7684\u91cd\u70b9\u5728\u4e8e\u53cd\u6620\u7269\u8d28\u7684\u6311\u9009\uff0c\u6807\u51c6\u8981\u5c3d\u91cf\u51cf\u5c11\u526f\u4ea7\u54c1\u7684\u8f6c\u5316\u6210\u3002\u7531\u4e8e\u8fd0\u7528\u5206\u89e3\u53cd\u5e94\u5806\u79ef\u603b\u4f53\u76ee\u6807\u7269\u8d28\u7684\u539f\u6750\u6599\u4f7f\u7528\u533a\u57df\u76f8\u5bf9\u6027\u72ed\u5c0f\uff0c\u800c\u7406\u8bba\u4e0a\u968f\u610f\u4e00\u79cd\u65e0\u673a\u6750\u6599\u90fd\u80fd\u591f\u6839\u636e\u591a\u79cd\u591a\u6837\u539f\u6750\u6599\u7684\u7f6e\u6362\u53cd\u5e94\u6765\u83b7\u5f97\u3002\u56e0\u800c\uff0c\u4e0e\u5206\u89e3\u53cd\u5e94\u53cd\u6620\u5bf9\u6bd4\uff0c\u4eba\u5de5\u5408\u6210\u53cd\u6620\u8fd0\u7528\u6700\u666e\u904d\uff0c\u5176\u5173\u952e\u8fd0\u7528\u4e8e\u5236\u53d6\u5404\u79cd\u5404\u6837\u591a\u6676\u6001\u548c\u73bb\u7483\u6001\u7684\u51b2\u79ef\u7269\u3001\u7edd\u7f18\u5c42\u819c\u7b49\uff0c\u5982SiO2<\/sub>\u3001Al2<\/sub>O3<\/sub>\u3001Si3<\/sub>N4<\/sub>\u3002<\/p>\n

 <\/p>\n

1)\u56db\u6c2f\u5316\u7845\u5916\u5ef6\u6027\u6cd5\u751f\u957f\u53d1\u80b2\u7845\u5916\u5ef6\u7247\uff1aSiCl4<\/sub>\u00a0(s) 2H2<\/sub>\u00a0(g) \u2192\u00a0Si (s) 4HCl (g) \u00a0 \u00a01150-1200\u2103<\/p>\n

 <\/p>\n

2)\u534a\u5bfc\u4f53\u6750\u6599SiO2<\/sub>\u63a9\u819c\u52a0\u5de5\u5de5\u827a\uff1aSiH4<\/sub>\u00a0(s) 2O2<\/sub>\u00a0(g)\u00a0\u2192 SiO2<\/sub>\u00a0(s) 2H2<\/sub>O (g) \u00a0 \u00a0325-475\u2103<\/p>\n

 <\/p>\n

3)Si3<\/sub>N4<\/sub>\u7b49\u7edd\u7f18\u5c42\u819c\u7684\u5806\u79ef\uff1a3SiCl4<\/sub>\u00a0(s) 4NH3<\/sub>\u00a0(g)\u00a0\u2192 Si3<\/sub>N4<\/sub>\u00a0(s) 12HCl (g) \u00a0 \u00a0850-900\u2103<\/p>\n

 <\/p>\n

c)\u6709\u673a\u5316\u5b66\u4f20\u9001\u53cd\u6620<\/strong><\/p>\n

 <\/p>\n

\u6709\u673a\u5316\u5b66\u52a8\u529b\u5b66\u53cd\u6620\u5c06\u603b\u4f53\u76ee\u6807\u7269\u8d28\u505a\u4e3a\u6325\u8d77\u6e90\uff0c\u51ed\u501f\u5747\u8861\u53cd\u6620\u6765\u5806\u79ef\u603b\u4f53\u76ee\u6807\u7269\u8d28\uff0c\u5176\u501f\u52a9\u6c7d\u4f53\u4e0e\u4e4b\u4f5c\u7528\u8f6c\u5316\u6210\u70c3\u7c7b\u5316\u5b66\u7269\u8d28\uff0c\u8f6c\u5316\u6210\u7684\u6c7d\u6001\u5316\u5b66\u7269\u8d28\u7ecf\u8f7d\u6c14\u8fd0\u9001\u5230\u4e0e\u84b8\u53d1\u533a\u6eab\u5ea6\u4e0d\u4e00\u6837\u7684\u5806\u79ef\u533a\u4ea7\u751f\u9006\u5411\u53cd\u5e94\uff0c\u5728\u5e95\u6750\u4e0a\u8f6c\u5316\u6210\u6e90\u6210\u5206\u3002\u6709\u673a\u5316\u5b66\u4f20\u9001\u53cd\u6620\u7684\u91cd\u70b9\u5728\u4e8e\u8f93\u8fd0\u53cd\u6620\u7ba1\u7406\u4f53\u7cfb\u548c\u6807\u51c6(\u6eab\u5ea6\u3001\u8f93\u8fd0\u5242\u7684\u4f7f\u7528\u91cf\u8fd9\u4e9b)\u7684\u6311\u9009\uff0c\u8fd9\u5f53\u4e2d\u7275\u6d89\u5230\u4e00\u90e8\u5206\u6709\u673a\u5316\u5b66\u70ed\u5b66\u6709\u5173\u7684\u4e13\u4e1a\u77e5\u8bc6\uff0c\u4e00\u822c\u8f6c\u5316\u6210\u70c3\u7c7b\u5316\u5b66\u7269\u8d28\u7684\u6c14\u6e29\u901a\u5e38\u6bd4\u518d\u6b21\u53cd\u6620\u5806\u79ef\u65f6\u8981\u9ad8\u4e00\u4e9b\u3002<\/p>\n

 <\/p>\n

\u6709\u8272\u91d1\u5c5e\u7684\u7eaf\u5316\u548cZnSe\u7b49\u5355\u6676\u4f53\u7684\u751f\u957f\u53d1\u80b2\uff1aZnSe (s) I2<\/sub>\u00a0(g)ZnI2<\/sub>\u00a0(g) 1\/2 Se2<\/sub>\u00a0(g)<\/p>\n

ZnS (s) I2<\/sub>\u00a0(g)ZnI2<\/sub>\u00a0(g) 1\/2 S2<\/sub>\u00a0(g)<\/p>\n

 <\/p>\n

\n
\n

3. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u6280\u672f\u6027\u7684\u4e3b\u8981\u89c4\u5b9a<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\u5e94\u7528CVD\u6280\u672f\u6027\u5806\u79ef\u603b\u4f53\u76ee\u6807\u7269\u8d28\u65f6\uff0c\u5176\u603b\u4f53\u76ee\u6807\u7269\u8d28\u3001\u539f\u6599\u53ca\u53cd\u5e94\u7c7b\u578b\u7684\u6311\u9009\u901a\u5e38\u8981\u9075\u5faa\u4e0b\u52173\u9879\u6807\u51c6\uff1a<\/p>\n

 <\/p>\n

(1)\u539f\u6599\u5728\u8f83\u4f4e\u6eab\u5ea6\u4e0b\u5e94\u5177\u5907\u8f83\u9ad8\u7684\u84b8\u6c7d\u538b\u4e14\u4fbf\u4e8e\u84b8\u53d1\u6210\u84b8\u6c14\u5e76\u5177\u5907\u5f88\u9ad8\u7684\u7eaf\u51c0\u5ea6\uff0c\u7b80\u5355\u70b9\u6765\u8bf4\u539f\u6599\u84b8\u53d1\u6210\u6c14\u4f53\u7684\u6eab\u5ea6\u4e0d\u80fd\u8fc7\u9ad8\uff0c\u4e00\u822c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6eab\u5ea6\u90fd\u662f\u57281000\u2103\u4e0b\u5217\u3002<\/p>\n

 <\/p>\n

(2)\u6839\u636e\u7edc\u5408\u53cd\u5e94\u548c\u539f\u6599\u7684\u6311\u9009\u5c3d\u91cf\u51cf\u5c11\u526f\u4ea7\u54c1\u7684\u8f6c\u5316\u6210\uff0c\u82e5\u6709\u526f\u4ea7\u54c1\u7684\u5b58\u6709\uff0c\u5728\u53cd\u6620\u6eab\u5ea6\u4e0b\u526f\u4ea7\u54c1\u5e94\u5bb9\u6613\u6325\u53d1\u4e3a\u6c7d\u6001\uff0c\u90a3\u6837\u4fbf\u4e8e\u6392\u6389\u6216\u5206\u79bb\u51fa\u6765\u3002<\/p>\n

 <\/p>\n

(3)\u5c3d\u53ef\u80fd\u6311\u9009\u5806\u79ef\u6e29\u5ea6\u4f4e\u7684\u53cd\u6620\u5806\u79ef\u603b\u4f53\u76ee\u6807\u7269\u8d28\uff0c\u56e0\u5927\u90e8\u5206\u57fa\u6750\u539f\u6750\u6599\u6ca1\u6cd5\u627f\u62c5CVD\u7684\u9ad8\u6eab\u3002<\/p>\n

 <\/p>\n

(4)\u53cd\u6620\u5168\u8fc7\u7a0b\u5c3d\u53ef\u80fd\u7b80\u6613\u6613\u4e8e\u63a7\u5236<\/p>\n

 <\/p>\n

\n
\n

\u8bba\u6587\u53c2\u8003\u6587\u732e<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

[1] \u5218\u8273\u7ea2, \u5f20\u8fce\u6625, \u845b\u660c\u7eaf. \u91d1\u5c5e\u94a8\u9540\u5c42\u5236\u53d6\u6280\u672f\u7684\u7814\u7a76\u6210\u679c. \u7c89\u672b\u51b6\u91d1\u6750\u6599\u79d1\u5b66\u5408\u7406\u4e0e\u5de5\u7a0b\u9879\u76ee, 2011, 16, 315-322.<\/p>\n

 <\/p>\n

[2] Powell C F, Oxley J H, Blocher J M. Vapor Deposition. sponsored by the Electrochemical Society, New York\uff08The Electrochemical Society series\uff09 UMI Books on Demand, 1966.<\/p>\n

 <\/p>\n

[3] Kumagawa M, Sunami H, Terasaki T, Nishizawa J I. Epitaxial Growth with Light Irradiation. Japanese Journal of Applied Physics, 2014, 7, 1332-1341.<\/p>\n

 <\/p>\n

[4] Nelson L S, Richardson N L. Formation of Thin Rods of Pyrolytic Carbon by Heating with A Focused Carbon Dioxide Laser. Materials Research Bulletin, 1972, 7, 971-975.<\/p>\n

 <\/p>\n

[5] Leyendecker G, Bauerle D, Geittner P,\u00a0Lydtin H. Laser Induced Chemical Vapor Deposition of Carbon. Applied Physics Letters, 1981, 39, 921-923.<\/p>\n

 <\/p>\n

[6] Kwok K, Chiu W K S. Growth of Carbon Nanotubes by Open-Air Laser-Induced Chemical Vapor Deposition. Carbon, 2005, 43, 437-446.<\/p>\n

 <\/p>\n

[7] Michaelis F B, Weatherup R S, Bayer B C, Bock M C, Sugime H, Caneva S, Robertson J, Baumberg J J, Hofmann S. Co-Catalytic Absorption Layers for Controlled Laser-Induced Chemical Vapor Deposition of Carbon Nanotubes. ACS Applied Materials & Interfaces, 2014, 6, 4025-4032.<\/p>\n

 <\/p>\n

[8] Deryagin B V, Fedoseev D V. Epitaxial Synthesis of Diamond in the Metastable Region. Russian Chemical Reviews, 1970, 39, 1661\u20131671.<\/p>\n

 <\/p>\n

[9] Deryagin B V, Fedoseev D V. Growth of Diamond and Graphite from the Gas<\/p>\n

Phase, Nauka, Moscow (1977); (English translation in Diamond Growth and Films, edited by UCFMG, Elsevier, New York, 1989).<\/p>\n

 <\/p>\n

[10] \u80e1\u660c\u4e49, \u674e\u5929\u738b\u534e. \u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\u4e0e\u539f\u6750\u6599\u5236\u53d6. \u6709\u8272\u91d1\u5c5e, 2001, 25, 364-368.<\/p>\n

 <\/p>\n

[11] \u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u548c\u6709\u673a\u7269\u65b0\u578b\u6750\u6599[B].<\/p>\n

 <\/p>\n

[12] \u7530\u6c11\u6ce2. \u5316\u5b66\u6c14\u76f8\u6c89\u79ef. \u8868\u9762\u6280\u672f, 1989, 3, 33-37.<\/p>\n

 <\/p>\n

\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\n

 <\/p>\n

\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

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