{"id":24011,"date":"2021-12-27T12:52:20","date_gmt":"2021-12-27T04:52:20","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=24011"},"modified":"2021-12-25T16:05:39","modified_gmt":"2021-12-25T08:05:39","slug":"%e8%81%9a%e5%af%b9%e4%ba%8c%e7%94%b2%e8%8b%af%e9%98%b2%e6%bd%ae%e8%96%84%e8%86%9c%e7%9a%84%e7%a0%94%e7%a9%b6","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=24011","title":{"rendered":"\u805a\u5bf9\u4e8c\u7532\u82ef\u9632\u6f6e\u8584\u819c\u7684\u7814\u7a76"},"content":{"rendered":"

\u6458\u00a0 \u8981: \u9009\u7528\u539f\u5b50\u529b\u663e\u5fae\u955c\u3001\u7ea2\u5916\u5149\u8c31\u3001X X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u3001\u7d2b\u5916\u5149- \u7531\u6b64\u53ef\u89c1- \u8fd1\u7ea2\u5916\u5149\u8c31\u4eea\u539f\u5b50\u5438\u6536\u5149\u8c31\u7684\u6d4b\u8bd5\u6807\u51c6,\u5bf9\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u8868\u5c42\u5916\u8c8c\u3001\u6784\u6210\u548c\u5149\u7535\u7279\u6027\u5f00\u5c55\u79d1\u5b66\u7814\u7a76. \u8bd5\u9a8c\u7ed3\u679c\u663e\u793a:\u771f\u7a7a\u6cf5\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u52a0\u5de5\u5de5\u827a\u5236\u53d6\u7684\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u8868\u5c42\u5e73\u6ed1\u5300\u79f0. \u5851\u6599\u8584\u819c\u5173\u952e\u7531\u6709\u6548\u6c2f\u5b98\u80fd\u56e2\u7684\u82ef\u73af\u548c\u7532\u57fa\u6784\u6210,\u8868\u5c42\u6709\u5c11\u91cf\u7684C \u2014O \u952e\u8f6c\u5316\u6210. \u5851\u6599\u8584\u819c\u5728\u7531\u6b64\u53ef\u89c1- \u8fd1\u7ea2\u5916\u5149\u8c31\u4eea\u80a1\u7968\u6ce2\u6bb5\u7684\u5149\u900f\u8fc7\u7387\u8d85\u51fa80 %. \u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u8986\u76d6\u7684\u7845\u80f6\u5e72\u71e5\u5242\u6e17\u5165\u6c34\u91cc\u7684\u9632\u6c34\u6389\u8272\u6642\u95f4\u53ef\u8fbe150 d ,\u9632\u6c34\u7279\u6027\u663e\u8457\u597d\u4e8e\u4f20\u7edf\u5f0f\u7684\u73af\u6c27\u6811\u8102\u80f6\u3001\u805a\u6c28\u916f\u6750\u6599\u7b49\u539f\u6750\u6599. \u5851\u6599\u8584\u819c\u7684\u6fc0\u5149\u5668\u635f\u574f\u9600\u503c\u4e3a4 J \u00b7cm- 2 (1 064 nm ,1 ns) .<\/p>\n

\u5173\u952e\u5b57: \u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c; \u9632\u6c34\u7279\u6027; \u7535\u5b50\u5149\u5b66\u7279\u6027; \u6fc0\u5149\u5668\u635f\u574f\u9600\u503c<\/p>\n

\n

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1 \u3000\u8bd5\u9a8c\u4e00\u90e8\u5206<\/p>\n

1. 1 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u5236\u53d6<\/p>\n

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\"1.png\"<\/p>\n

\u4e8b\u5148\u5c06\u539f\u6750\u6599(\u5bf9\u4e8c\u7532\u82ef\u73af\u4e8c\u4f53C \u578b) \u653e\u7f6e\u6c7d\u5316\u6bb5\u540e\u5bc6\u5c01\u6027,\u6839\u636e\u8d85\u6ee4\u88c5\u7f6e\u5bf9\u77f3\u82f1\u52a0\u70ed\u7ba1\u548c\u6d82\u819c\u5ba4\u771f\u7a7a\u5305\u88c5,\u91cd\u65b0\u542f\u52a8\u52a0\u70ed\u88c5\u7f6e\u52a0\u6e29\u539f\u6750\u6599,\u539f\u6750\u6599\u88c2\u5316\u540e\u8fdb\u5230\u6d82\u819c\u5ba4,\u4fbf\u4f1a\u5806\u79ef\u5728\u8d85\u4f4e\u6e29\u5e95\u6750(\u5355\u6676\u7845\u7247) \u4e0a\u4ea7\u751f\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c.<\/p>\n

1. 2 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u529f\u80fd\u6d4b\u8bd5<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u7ea2\u5916\u5149\u8c31(FTIR) \u68c0\u6d4b\u9009\u7528Bruker Tensor27 \u5085\u7acb\u53f6\u7ea2\u5916\u7ebf\u539f\u5b50\u5438\u6536\u5149\u8c31,\u5cf0\u4f4d\u5c4f\u5e55\u5206\u8fa8\u7387\u4e3a4 cm- 1 ,\u7845\u7247\u9009\u7528\u5355\u6676\u7845\u7247,\u5e76\u4e14\u7528\u672a\u8868\u5c42\u7684\u9540\u819c\u7684\u5355\u6676\u7845\u7247\u505a\u4e3a\u53c2\u7167.\u5851\u6599\u8584\u819c\u8868\u5c42\u5916\u8c8c\u9009\u7528\u539f\u5b50\u529b\u663e\u5fae\u955c(AFM) ( PSIAXE2100 ,Korea) \u5256\u6790,\u63a2\u5934\u4e3a\u975e\u63a5\u89e6\u5f0f,\u7845\u7247\u4e3a\u77f3\u82f1\u73bb\u7483\u7ba1.X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31(XPS) \u9009\u7528Micro lab2MK \u2161\u578b\u591a\u7528\u9014\u7535\u5b50\u5668\u4ef6\u80fd\u8c31\u4eea\u7cbe\u786e\u6d4b\u91cf,X X\u5c04\u7ebf\u6e90\u4e3aMg K\u03b1,\u52a8\u80fd\u4e3a1 253. 6 eV ,\u5256\u6790\u5ba4\u7684\u771f\u7a7a\u503c\u4e3a10 – 7 Pa ,\u9ad8\u8fa8\u522b\u626b\u63cf\u4eea\u8c31\u548c\u5168\u8c31\u7684\u6839\u636e\u80fd\u5747\u4e3a20 eV ,\u626b\u63cf\u4eea\u6b65\u5e45\u5404\u81ea\u4e3a0. 1 eV \u548c1 eV ,\u4ee5\u8bd5\u54c1\u8868\u5c42\u6765\u6e90\u4e8eXPS \u4eea\u5668\u8bbe\u5907\u81ea\u8eab\u7684\u6cb9\u73af\u5883\u6c61\u67d3\u78b3(C 1 s , Eb = 284. 6 eV) \u505a\u4e3a\u6d53\u5dee\u6781\u5316\u6821\u51c6\u89c4\u8303.<\/p>\n

\u9009\u7528Alpha2step100 \u53f0\u9636\u4eea\u7cbe\u786e\u6d4b\u91cf\u5851\u6599\u8584\u819c\u7684\u5177\u4f53\u8584\u539a.<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u6839\u636e\u5bf9\u7845\u80f6\u5e72\u71e5\u5242\u5f00\u5c55\u5851\u6599\u8584\u819c\u8986\u76d6,\u5c06\u5176\u6d78\u4e8e\u6c34\u91cc\u6765\u68c0\u6d4b\u5851\u6599\u8584\u819c\u7684\u9632\u6f6e\u7279\u6027. \u53d6\u51e0\u9897\u7845\u80f6\u5e72\u71e5\u5242(\u4e0a\u6d77\u5e02\u5316\u5b66\u836f\u54c1\u4f01\u4e1a,\u5438\u5490\u91cf\u226520. 0 % ,\u5e72\u8e81\u65e0\u91cd\u529b\u22645. 0 %) ,\u7528\u7535\u5b50\u79f0\u5404\u81ea\u79f0\u91cd\u540e,\u653e\u7f6e80 \u2103\u7684\u70d8\u5e72\u7bb1\u4e2d\u7ef4\u63012 h ,\u5feb\u901f\u53d6\u4e0b\u540e\u518d\u653e\u8fdb\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD) \u673a\u5668\u8bbe\u5907\u7684\u6d82\u819c\u5ba4\u4e2d,\u5404\u81ea\u5bf9\u7845\u80f6\u5e72\u71e5\u5242\u9540\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c,\u5728\u5ba4\u5185\u6e29\u5ea6(\u7ea625 \u2103) \u4e0b\u5c06\u5176\u653e\u7f6e\u6c34\u91cc. \u4e00\u4e2a\u6708\u540e\u53d6\u4e0b,\u968f\u540e\u653e\u7f6e\u9632\u6f6e\u67dc(\u73af\u5883\u6e7f\u5ea6\u7ea620 %) \u4e2d\u7ef4\u630120 min ,\u4f7f\u5851\u6599\u8584\u819c\u8868\u5c42\u53d8\u5e72,\u518d\u5ea6\u79f0\u91cd\u7845\u80f6\u6750\u6599\u7684\u54c1\u8d28. \u79f0\u91cd\u5b8c\u6bd5\u540e\u518d\u5ea6\u653e\u8fdb\u6c34\u91cc,\u76f4\u5230\u7845\u80f6\u6750\u6599\u7531\u6df1\u84dd\u8272\u53d8\u6210\u6ca1\u6709\u989c\u8272\u5168\u900f\u660e.\u9009\u7528JASCO V2570 \u578b\u53cc\u5149\u675f\u7d2b\u5916\u5149- \u8fd1\u7ea2\u5916\u5149\u8c31\u4eea\u539f\u5b50\u5438\u6536\u5149\u8c31,\u7cbe\u786e\u6d4b\u91cf\u5851\u6599\u8584\u819c\u7531\u7d2b\u5916\u5149\u5230\u8fd1\u7ea2\u5916\u5149\u8c31\u4eea(200\uff5e1 200nm) \u7684\u8fd1\u7ad6\u76f4\u7535\u5b50\u6563\u5c04\u548c\u5149\u8c31\u56fe.<\/p>\n

\u4f9d\u7167ISO11254 – 2. 1 \u68c0\u6d4b\u6807\u51c6,\u5bf9\u8bd5\u54c1\u5f00\u5c55\u6fc0\u5149\u5668\u635f\u574f\u9600\u503c\u7684\u68c0\u6d4b,\u8bd5\u9a8c\u7531\u4e0a\u6d77\u5149\u673a\u6240\u5927\u529f\u7387\u6fc0\u5149\u5668\u7269\u7406\u5b66\u534f\u540c\u8bd5\u9a8c\u5ba4\u8fdb\u884c. \u6fc0\u5149\u5668\u5bfc\u51fa\u52a8\u80fd\u7ea6\u4e3a800 mJ ,\u8109\u51b2\u5bbd\u5ea6\u4e3a10 ns ,\u7d50\u679c\u5747\u6362\u7b97\u4e3a1 ns ;\u6fc0\u5149\u5668\u5355\u8109\u51b2\u4e3a\u7ebf\u504f\u632f\u6001\u548c\u5355\u6a2a\u65b9\u5f0f;\u53cd\u590d\u5de5\u4f5c\u9891\u7387\u4e3a\u6bcf\u6b21,\u6d4b\u8bd5\u6807\u51c6\u9009\u75281 – on – 1 (single shot per site) ;\u8868\u5c42\u635f\u5bb3\u5916\u8c8c\u9009\u752850\uff5e200 \u500dL EICADMR HCS \u663e\u5fae\u955c\u89c2\u5bdf.<\/p>\n

2 \u3000\u7d50\u679c\u4e0e\u63a2\u8ba8<\/p>\n

2. 1 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u5149\u8c31<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u56fe1 \u4e3a\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u5149\u8c31\u56fe. \u5256\u6790\u5982\u4e0b\u6240\u793a:3 016 cm- 1\u5904\u662f\u82ef\u73af\u4e0a\u7684C \u2014H \u952e\u4f38\u7f29\u5f0f\u9707\u52a8\u5cf0;816 cm- 1 \u662f\u82ef\u73af\u4e0a\u7684C \u2014H \u952e\u9762\u5916\u5f2f\u6298\u9707\u52a8\u5cf0;1 210\uff5e1 010 cm- 1\u5de6\u53f3\u7684\u5cf0\u610f\u5473\u7740\u82ef\u73af\u4e0a\u7684C \u2014H \u952e\u9762\u5185\u5f2f\u6298\u9707\u52a8\u5cf0,\u6d88\u5316\u5438\u6536\u5cf0\u6bd4\u8f83\u591a,\u5f52\u5c5e\u4e8e\u6307\u7eb9\u8bc6\u522b\u533a[2 ] ;1 508 cm- 1 \u5468\u8fb9\u7684\u597d\u591a\u4e2a\u5cf0\u662f\u82ef\u73af\u7684\u6846\u67b6\u9707\u52a8\u5cf0;2 853 cm- 1\u548c2 922 cm- 1\u662f\u7532\u57fa\u7684C \u2014H \u952e\u5bf9\u79f0\u6027\u548c\u62b5\u5236\u79f0\u4f38\u7f29\u5f0f\u9707\u52a8\u5cf0; 1 446 cm- 1 \u5219\u4e3a\u2014CH2 \u2014\u7684C \u2014H \u952e\u7684\u7279\u70b9\u9707\u52a8\u6d88\u5316\u5438\u6536\u5cf0[2 ] . \u4ece\u800c\u53ef\u4ee5\u5206\u8fa8,\u9488\u5bf9\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c,\u5176\u6210\u4efd\u5305\u542b\u82ef\u73af\u548c\u7532\u57fa. \u6d88\u5316\u5438\u6536\u5cf0\u4e2d1 604 cm- 1\u548c1 556 cm- 1\u662f\u82ef\u73af\u4ea7\u751f\u66ff\u4ee3\u63d0\u5347\u7684\u82ef\u73af\u6846\u67b6\u9707\u52a8\u5cf0,873 cm- 1\u4e5f\u662f\u56e0\u4e3a\u82ef\u73af\u4ea7\u751f\u66ff\u4ee3\u540e\u63d0\u5347\u7684\u82ef\u73af\u4e0a\u7684C \u2014H \u952e\u9762\u5916\u5f2f\u6298\u9707\u52a8\u5cf0,684cm- 1\u662fC \u2014Cl \u952e\u7684\u7279\u70b9\u9707\u52a8\u6d88\u5316\u5438\u6536\u5cf0; 435 cm- 1 \u662fC \u2014Cl \u952e\u7684\u5bf9\u79f0\u6027\u4f38\u7f29\u5f0f\u9707\u52a8\u5cf0[3 ] . \u8fd9\u8868\u660e,\u82ef\u73af\u4e0a\u9762\u6709\u6c2f\u539f\u5b50\u5b98\u80fd\u56e2. \u6839\u636e\u7ea2\u5916\u5149\u8c31\u5206\u6790\u5f97\u77e5,\u771f\u7a7a\u6cf5\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u52a0\u5de5\u5de5\u827a\u5236\u53d6\u7684\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u5927\u90e8\u5206\u6ca1\u6709\u522b\u7684\u6b8b\u6e23.\u57281 010 cm- 1\u4e0a\u6709\u6d88\u5316\u5438\u6536\u5cf0,\u8be5\u5cf0\u4e3a\u2014CH2 \u2014OH \u9187\u5b98\u80fd\u56e2\u4e2dC \u2014O \u952e\u7684\u4f38\u7f29\u5f0f\u9707\u52a8. \u8fd9\u4e5f\u662f\u7531\u819c\u8868\u5c42\u7684\u9ad8\u805a\u7269\u94fe\u7aef\u4e0e\u7a7a\u6c14\u4e2d\u7684o2\u6216\u6c34\u4ea7\u751f\u53cd\u6620\u9020\u6210\u7684.<\/p>\n

\"2.png\"<\/p>\n

\u56fe1 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u5149\u8c31<\/p>\n

Fig. 1 \u3000FTIR spectra of parylene f ilms<\/p>\n

2. 2 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u8868\u5c42\u5916\u8c8c<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u56fe2 \u4e3a\u805a\u5bf9\u4e8c\u7532\u82ef\u7684AFM \u56fe. \u4ece\u56fe\u5185\u53ef\u4ee5\u770b\u5f97\u51fa,\u5851\u6599\u8584\u819c\u8868\u5c42\u7531\u7eb3\u7c73\u9897\u7c92\u7269\u548c\u5b54\u773c\u6784\u6210,\u5c3a\u5bf8\u4e3a200nm \u4e0a\u4e0b, \u5851\u6599\u8584\u819c\u8868\u5c42\u7684\u8868\u9762\u7c97\u7cd9\u5ea6Ra = 16. 536 nm.<\/p>\n

2. 3 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u8868\u9762\u5c42\u6210\u4efd<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u56fe3 \u4e3a\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u8868\u5c42\u5728\u7535\u5b50\u5668\u4ef6\u7ed3\u5408\u80fd\u57280\uff5e1 000 eV \u8303\u7574\u5185\u7684XPS \u5256\u6790\u56fe\u666e(\u73b0\u53d6200\uff5e600 eV \u8303\u7574) . \u9488\u5bf9\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c,\u5173\u952e\u4ec5\u6709\u78b3\u548c\u6c22\u4e8c\u79cd\u539f\u7d20,XPS \u4e0d\u53ef\u4ee5\u5256\u6790\u6c22\u5143\u7d20,\u56e0\u800c\u5728285 eV\u5468\u8fb9\u5b58\u6709\u4e00\u4e2a\u660e\u663e\u7684\u78b31 s \u5cf0(\u56fe3a) . \u9664\u5f00\u78b31 s\u5cf0\u5916,\u5728201 eV \u5468\u8fb9\u6709\u4e00\u4e2a\u6c2f\u76842 p \u5cf0. \u8fd9\u4e0e\u805a\u5bf9\u4e8c\u7532\u82ef\u7684\u6210\u4efd\u76f8\u7b26\u5408. \u5728532 eV \u5468\u8fb9\u6709\u4e00\u4e2a\u5f3a\u70c8\u7684\u6c271 s \u5cf0,\u8fd9\u8868\u660e\u5851\u6599\u8584\u819c\u8868\u5c42\u5e26\u6709\u6c27\u5143\u7d20.<\/p>\n

\u3000\u3000\u4ece\u56fe3b \u7684\u78b31 s \u7684XPS \u8c31\u53ef\u4ee5\u770b\u5f97\u51fa,\u5728285. 1eV \u5904\u7684\u5cf0\u9876\u4e3a\u82ef\u73af\u4e0a\u7684C C \u952e\u548c\u6dfb\u52a0\u94fe\u4e0a\u7684C \u2014C\u952e, 286. 6 eV \u7684\u5cf0\u662f\u9ad8\u805a\u7269\u94fe\u4e0a\u7684C \u2014O\u952e[4 ] . \u6839\u636e\u9762\u79ef\u6362\u7b97, C \u2014O \u952e\u7684\u76f8\u5bf9\u6027\u767e\u5206\u6570\u4e3a7. 8 %. \u8fd9\u8868\u660e,\u5851\u6599\u8584\u819c\u8868\u5c42\u4ea7\u751f\u8f7b\u5fae\u7684\u94fe\u7aef\u6c27\u5316\u8fd8\u539f\u53cd\u5e94.<\/p>\n

\"3.png\"\"3.png\"<\/p>\n

\u56fe2 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684AFM\u76f8\u7247<\/p>\n

Fig. 2 \u3000AFM photos of parylene f ilms<\/p>\n

\"5.png\"<\/p>\n

\u56fe3 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u8868\u5c42XPS \u8c31<\/p>\n

Fig. 3 \u3000XPS spectra of parylene f ilms surface<\/p>\n

2. 4 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u7d2b\u5916\u5149- \u7531\u6b64\u53ef\u89c1\u901a\u8fc7\u5149\u8c31\u4eea<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u56fe4 \u4e3a\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u7d2b\u5916\u5149- \u7531\u6b64\u53ef\u89c1\u7535\u5b50\u6563\u5c04\u5149\u8c31\u4eea,\u5851\u6599\u8584\u819c\u7684\u8584\u539a1. 70\u03bcm. \u7531\u56fe4a \u770b\u5f97\u51fa,\u5851\u6599\u8584\u819c\u5728\u80fd\u89c1\u5149\u533a\u7684\u900f\u5c04\u7cfb\u6570\u8d85\u51fa80 % ,\u5728\u7d2b\u5916\u7ebf\u533a\u900f\u5c04\u7cfb\u6570\u5219\u5feb\u901f\u51cf\u5c11,\u5728300 nm \u4e0a\u4e0b\u900f\u5c04\u7cfb\u6570\u9aa4\u964d,\u5728280 nm\u4e0a\u4e0b\u57fa\u672c\u4e0a\u63a5\u8fd1\u4e8e\u96f6,\u63a5\u7740\u53d1\u751f\u4e86\u4e00\u4e2a\u7535\u5b50\u6563\u5c04\u9876\u5cf0. \u7531\u56fe4b \u53ef\u4ee5\u770b\u5f97\u51fa,\u5851\u6599\u8584\u819c\u5728280 nm \u5149\u6ce2\u957f\u4e0b\u5217\u4ea7\u751f\u660e\u663e\u7684\u6d88\u5316\u5438\u6536. \u8fd9\u8868\u660e,\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u5bf9\u7d2b\u5916\u7ebf\u5177\u5907\u4e00\u5b9a\u7684\u6d88\u5316\u5438\u6536\u529f\u6548. \u56e0\u4e3a\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u5177\u5907\u82ef\u73af\u70c3\u57fa\u7684\u751f\u8272\u56e2,\u5176\u7279\u70b9\u6d88\u5316\u5438\u6536\u5149\u6ce2\u957f\u4e3a256 nm ,\u5f53\u82ef\u73af\u4e2d\u7684\u7535\u5b50\u5668\u4ef6\u6d88\u5316\u5438\u6536\u8be5\u5149\u6ce2\u957f\u7684\u5149\u91cf\u5b50\u540e,\u4fbf\u4f1a\u4ece\u6fc0\u53d1\u6001\u7684\u03c0\u8def\u8f68\u8d8a\u8fc1\u5230\u53cd\u952e\u03c03\u8def\u8f68[5 ] . \u5728271 nm \u53d1\u751f\u7684\u6325\u53d1\u5cf0,\u4e3a\u82ef\u73af\u4e0a\u4ea7\u751f\u7684\u6c2f\u66ff\u4ee3\u7269\u52a9\u8272\u56e2\u6240\u9020\u6210,\u8be5\u5149\u6ce2\u957f\u4e3a\u5176\u7279\u70b9\u6d88\u5316\u5438\u6536\u5149\u6ce2\u957f[5 ] . \u7d2b\u5916\u5149\u6d88\u5316\u5438\u6536\u4f1a\u5bf9\u5851\u6599\u8584\u819c\u7684\u6784\u9020\u9020\u6210\u5f71\u54cd\u529f\u6548,\u8fdb\u800c\u9020\u6210\u5851\u6599\u8584\u819c\u7279\u6027\u4e0b\u964d.<\/p>\n

\"6.png\"<\/p>\n

2. 5 \u3000\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u9632\u6c34\u758f\u6c34\u6027\u80fd<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u5728\u6e7f\u51b7\u7684\u6761\u4ef6\u4e2d,\u539f\u6750\u6599\u4f1a\u6d88\u5316\u5438\u6536\u4e00\u5b9a\u91cf\u7684\u6c34\u800c\u4f53\u91cd\u589e\u52a0,\u6839\u636e\u6d4b\u91cf\u4f01\u4e1a\u54c1\u8d28\u539f\u6750\u6599\u7684\u5438\u6c34\u6d41\u91cf,\u53ef\u5b9a\u91cf\u5206\u6790\u5206\u8fa8\u539f\u6750\u6599\u7684\u9632\u6f6e\u7279\u6027;\u5c06\u6613\u5438\u6e7f\u7269\u4ef6\u8986\u76d6\u540e\u653e\u7f6e\u6e7f\u51b7\u7684\u6761\u4ef6\u4e2d,\u7cbe\u786e\u6d4b\u91cf\u7269\u4ef6\u7684\u5438\u6e7f\u589e\u52a0\u91cf,\u5c31\u53ef\u4ee5\u5224\u5b9a\u8be5\u539f\u6750\u6599\u7684\u9632\u6c34\u7279\u6027[6 ,7 ] . \u6587\u4e2d\u7528\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u5bf9\u7845\u80f6\u5e72\u71e5\u5242\u5f00\u5c55\u8986\u76d6,\u5c06\u5176\u653e\u7f6e\u6e7f\u51b7\u7684\u6761\u4ef6\u4e2d,\u56e0\u4e3a\u7845\u80f6\u5e72\u71e5\u5242\u5177\u5907\u7075\u5de7\u7684\u5438\u6e7f\u6027\u6389\u8272\u7279\u70b9,\u4ed4\u7ec6\u89c2\u5bdf\u5176\u8272\u5f69\u7684\u66f4\u6539\u53ef\u4ee5\u5f62\u8c61\u5316\u5730\u5f97\u5230\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u9632\u6c34\u5b9e\u9645\u6548\u679c. \u6d4b\u5b9a\u6d4b\u8bd5\u6570\u636e\u89c1\u88681.<\/p>\n

\u88681 \u3000\u8986\u76d6\u805a\u5bf9\u4e8c\u7532\u82ef\u7684\u7845\u80f6\u5e72\u71e5\u5242\u7684\u5438\u6e7f\u6027\u6389\u8272\u72b6\u51b5<\/p>\n

Tab. 1 \u3000Moisture absorption of allochroicsilicagels coated with parylene<\/p>\n

\"8.png\"<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u672a\u8986\u76d6\u7684\u7845\u80f6\u6750\u6599\u653e\u7f6e\u6c34\u91cc7 min \u540e\u9010\u6e10\u6389\u8272\u53d8\u788e,\u56e0\u800c\u53ea\u6709\u653e\u7f6e\u5ba4\u5185\u6e29\u5ea6\u7a7a\u6c14\u4e2d\u5f00\u5c55\u5438\u6e7f\u6027\u68c0\u6d4b,\u6eab\u5ea6\u4e3a23 \u2103,\u7a7a\u6c14\u6e7f\u5ea6\u4e3a60 %. \u8986\u76d6\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c\u7684\u8bd5\u54c1\u653e\u5230\u7a7a\u6c14\u4e2d\u6389\u8272\u7684\u5168\u8fc7\u7a0b\u8fdf\u7f13\u800c\u65e0\u6cd5\u89c2\u5bdf\u5230,\u9700\u5728\u5176\u6240\u6709\u6e17\u5165\u6c34\u91cc\u5f00\u5c55\u5438\u6e7f\u6027\u68c0\u6d4b,\u6eab\u5ea6\u4e3a10\uff5e30 \u2103;\u5728\u6e17\u5165\u6c34\u91cc24 h \u540e,\u5438\u6c34\u6027\u4f4e\u4e8e0. 025 %. \u51e0\u7c7b\u591a\u89c1\u7684\u9632\u6c34\u5851\u6599\u8584\u819c\u7684\u5438\u6c34\u6027(25 \u2103,\u73af\u5883\u6e7f\u5ea6\u4e3a90 % , 24 h)\u4e3a[8 ,9 ] :\u73af\u6c27\u6811\u8102\u80f60. 08 %\uff5e0. 15 % ,\u805a\u6c28\u916f\u6750\u65990. 02 %\uff5e4. 50 %. \u4e0d\u96be\u770b\u51fa,\u805a\u5bf9\u4e8c\u7532\u82ef\u7684\u9632\u6c34\u7279\u6027\u663e\u8457\u597d\u4e8e\u8fd9\u79cd\u666e\u904d\u7684\u9632\u6f6e\u819c.<\/p>\n

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\"\"<\/p>\n

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 <\/p>\n

\u8bba\u6587\u53c2\u8003\u6587\u732e:<\/p>\n

[ 1 ] \u3000Lee S M. Kirk2othemer encycl [J ] . Chem Tech ,1983 ,24 (3) :744 – 771.<\/p>\n

[ 2 ] \u3000\u5f20\u53d4\u826f,\u6613\u5927\u5e74\u591c,\u5434\u5929\u660e. \u7ea2\u5916\u5149\u8c31\u5206\u6790\u4e0e\u65b0\u6280\u672f\u5e94\u7528[M] . \u5317\u4eac\u5e02:\u4e2d\u56fd\u836f\u4e1a\u9ad8\u65b0\u79d1\u6280\u51fa\u7248\u793e\u51fa\u7248,1993.<\/p>\n

\u3000\u3000\u3000ZHANG Shu2liang , YI Da2nian ,WU Tian2ming. Analysis and newtechnology of infrared spectra[M] .Beijing :Chinese Medicine and Sci2ence Press ,1993.<\/p>\n

[ 3 ] \u3000Bio2Rad Laboratories Inc. KnowItAll Software for Infrared Analysis[CP\/ DK] . Information system 3. 0. California :Bio2Rad LaboratoriesInc ,2002 – 2003.<\/p>\n

[ 4 ] \u3000Pruden K G,Sinclair K,Beaudoin S. Characterization of parylene2N and parylene2C photooxidation [J ] . J Polym Sci ,2003 , (41) :1486 – 1496.<\/p>\n

[ 5 ] \u3000\u9ec4\u3000\u53ef. \u836f\u54c1\u5305\u88c5\u8bbe\u8ba1\u7684\u9632\u6c34\u7279\u6027\u89c4\u5b9a[ J ] . \u533b\u836f\u5bfc\u62a5,1998 ,17(5) : 349 – 350.<\/p>\n

\u3000\u3000\u3000HUANG Ke. Request of moisture2proof in medicine package [J ] .Herald of Medicine ,1998 ,17 (5) :349 – 350.<\/p>\n

[ 6 ] \u3000\u80e1\u51e4\u5e73,\u90ac\u6587\u529b,\u53f6\u51e4\u743c. \u94dd\u7b94\u888b\u6750\u6599\u9632\u6c34\u6548\u679c\u8f83\u4e3a[J ] . \u4e2d\u836f,1997 ,20 (5) :254 – 255.<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 HU Feng2ping , WU Wen2li , YE Feng2qiong. Studies on the mois2ture2proof of aluminium foil packaged materials[J ] . Chinese MedicalMaterials ,1997 ,20 (5) :254 – 255.<\/p>\n

[ 7 ] \u3000Dolbier W R J ,Beach W F. Parylene2AF4 :A polymer with ex2ceptional dielectrical and thermal properties[J ] . J Fluorine Chem2istry ,2003 , (122) :97 – 104.<\/p>\n

[ 8 ] \u3000\u4e09\u5409\u72ec\u7279\u6d82\u6577\u6280\u672f\u6027\u8bd5\u9a8c\u5ba4. \u805a\u5bf9\u4e8c\u7532\u82ef\u72ec\u7279\u9540\u5c42\u8fd0\u7528\u53ca\u7279\u6027[ Z] . \u4e0a\u6d77\u5e02,2001.<\/p>\n

\u3000\u3000\u3000Sanji Specialty Coating Technology Laboratory. Application andperformance of specialty coating technology parylene[ Z] . Shang2hai ,2001.<\/p>\n

[ 9 ] \u3000\u738b\u4e00\u4e34. \u94dd\u578b\u5851\u6599\u8584\u819c\u9632\u6c34\u7279\u6027\u7684\u79d1\u5b66\u7814\u7a76[ J ] . \u5e94\u7528\u5316\u5de5,1991 ,12(4) :187 – 190 .<\/p>\n

\u3000\u3000\u3000WANG Yi2lin. Studies on the moisture2proof of aluminium2pal2stic film[J ] . Packaging Engineering ,1991 ,12 (4) :187 – 190.<\/p>\n

[ 10 ] \u3000Beach W F. Encycl polym science and engineering [ M] . NewYork :Wiley and Sons ,1989.<\/p>\n

[ 11 ] \u3000Ranby B ,Rabek J F. \u9ad8\u805a\u7269\u7684\u5316\u5b66\u964d\u89e3\u3001\u5149\u6c27\u50ac\u5316\u548c\u5149\u5e73\u7a33[M] .\u5d14\u5b5f\u5143\u8bd1. \u5317\u4eac\u5e02:\u79d1\u5b66\u51fa\u7248\u793e,1986.<\/p>\n

\u3000\u3000\u3000Ranby B ,Rabek J F. Photodegradation ,photooxidation and lightstability of polymer[M] . Translated by CUI Meng2yuan.Beijing :Science Press ,1986.<\/p>\n

[12 ] \u3000\u6768\u3000\u5e06. \u9ad8\u539f\u53cd\u5e94\u819c\u5236\u53d6\u4ee5\u53ca\u6fc0\u5149\u5668\u635f\u5bb3\u539f\u7406\u79d1\u5b66\u7814\u7a76[D] . \u4e0a\u6d77\u5e02:\u4e0a\u6d77\u540c\u6d4e\u5927\u5b66\u7406\u5b66\u9662\u7269\u7406\u7cfb,2003.<\/p>\n

\u3000YANG Fan. Preparation of high reflection coating and studies onits laser2induced damage mechanisms[D] . Shanghai : Physics De2partment of Science of College ,Tongji University ,2003.<\/p>\n

[13 ] \u3000\u5218\u660e\u6e05,\u5510\u6c38\u987a,\u4e50\u6708\u7434,\u7b49. KDP \u7ed3\u6676\u589e\u900f\u819c\u548c\u9632\u6f6e\u819c\u7279\u6027\u7684\u79d1\u5b66\u7814\u7a76[J ] . \u5f3a\u6fc0\u5149\u5668\u4e0e\u7c92\u5b50\u675f,1999 ,11 (2) :220 – 224.<\/p>\n

\u3000\u3000\u3000ZHANG Wei2qing , TANG Yong2xing ,L E Yue2qin ,et al. Studyon the preparation performances of antireflective and protectivecoating of DKP crystals [ J ] . High Power Laser and ParticleBeams ,1999 ,11 (2) :220 – 224.<\/p>\n

\n

\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\"\"<\/p>\n

 <\/p>\n

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