{"id":24000,"date":"2021-12-23T10:52:16","date_gmt":"2021-12-23T02:52:16","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=24000"},"modified":"2021-12-22T15:19:46","modified_gmt":"2021-12-22T07:19:46","slug":"parylene%e8%96%84%e8%86%9c%e7%b4%ab%e5%a4%96%e5%85%89%e8%80%81%e5%8c%96%e7%9a%84%e7%a0%94%e7%a9%b6%e8%bf%9b%e5%b1%95","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=24000","title":{"rendered":"Parylene\u8584\u819c\u7d2b\u5916\u5149\u8001\u5316\u7684\u7814\u7a76\u8fdb\u5c55"},"content":{"rendered":"

Research Advances in UV Aging of Parylene Film<\/p>\n

\u6458\u3000\u8981 :<\/p>\n

\u7b80\u7565\u4ecb\u7d39\u4e86Parylene\u5851\u6599\u8584\u819c\u7684\u4f18\u826f\u7279\u6027\u53ca\u5176\u5173\u952e\u8fd0\u7528\u8303\u7574\u3002\u5177\u4f53\u63cf\u8ff0\u4e86\u56fd\u5185\u5bf9Parylene\u5851\u6599\u8584\u819c\u5728\u7d2b\u5916\u7ebf\u76f4\u5c04\u6807\u51c6\u4e0b\u8870\u8001\u4e2a\u4eba\u884c\u4e3a\u7684\u5168\u65b0\u7814\u7a76\u6210\u679c\u3002\u63a2\u8ba8\u4e86\u7d2b\u5916\u7ebf\u8870\u8001\u7684\u539f\u7406\u3001\u5173\u952e\u72b6\u51b5\u3001\u7269\u8d28\uff0c\u53ca\u5176\u8870\u8001\u5bf9Parylene\u8584\u819c\u5149\u5b66\u7279\u6027\u3001\u900f\u6c14\u6027\u900f\u6c14\u6027\u80fd\u80fd\u3001\u7269\u7406\u6027\u80fd\u3001\u7535\u78c1\u573a\u7406\u8bba\u7279\u6027\u7684\u5371\u5bb3\u3002<\/p>\n

Abstract :<\/p>\n

The excellent properties and main applications of Parylene film were introduced. The latestresearch advances in UV aging of Parylene film were summarized. The mechanism, main<\/p>\n

phenomenon and products of UV aging, and the effects of UV aging on the optical properties,water permeability and air permeability, mechanical properties and electromagnetic properties of Parylene film were discussed.<\/p>\n

\u5173\u952e\u5b57 :<\/p>\n

\u805a\u5bf9\u82ef\u6491\u4e8c\u7532\u57fa\uff1b\u7d2b\u5916\u7ebf\u8870\u8001\uff1b\u7269\u8d28\uff1b\u7279\u6027<\/p>\n

Key words :<\/p>\n

Parylene; UV aging; Products; Properties<\/p>\n

 <\/p>\n

\u805a\u5bf9\u82ef\u6491\u4e8c\u7532\u57fa[Poly(p-xylylene)]\u7cfb\u5217\u4ea7\u54c1\u5851\u6599\u8584\u819c\uff0c\u901a\u7528\u6027\u7684\u4ea7\u54c1\u540d\u53eb\u6d3e\u62c9\u6797(Parylene)\uff0c\u662f\u4e0a\u4e16\u7eaa60\u5e74\u7531\u82f1\u56fd\u53d1\u5c55\u8d8b\u52bf\u4e0b\u53bb\u7684\u4e00\u79cd\u7ebf\u5f62\u4e14\u5177\u5907\u9ad8\u73bb\u7483\u5316\u6e29\u5ea6[1]\u7684\u9ad8\u5206\u5b50\u6750\u6599\u9ad8\u805a\u7269\u3002\u82ef\u73af\u4e0a\u7684\u6c22\u53ef\u4ee5\u7531\u5364\u7d20\u706f\u6ce1\u3001\u7532\u57fa\u3001\u6c1f\u82ef\u3001\u78fa\u9178\u57fa\u7b49\u5b98\u80fd\u56e2\u66ff\u4ee3\uff0c\u4ea7\u751f\u4e0d\u4e00\u6837\u79cd\u7c7b\u3001\u7279\u6027\u76f8\u4eff\u7684\u4e00\u7cfb\u5217Parylene\u5851\u6599\u8584\u819c[2-6]\u3002\u73b0\u9636\u6bb5\u5e94\u7528\u8f83\u591a\u7684\u5173\u952e\u67093\u4e2a\u578b\u53f7\u89c4\u683c\uff1aN\u578b(\u65e0\u5b98\u80fd\u56e2)\u3001C\u578b(\u4e00\u6c2f\u5b98\u80fd\u56e2)\u548cD\u578b(\u4e8c\u6c2f\u5b98\u80fd\u56e2)\uff0c\u5176\u5206\u5b50\u5f0f\u5982\u4e0b\u56fe1\u6240\u663e\u793a[7-8]\u3002\u5728\u5176\u4e2d\u4ee5N\u578b\u7684\u7535\u529b\u5b66\u7279\u6027\u4e0d\u9519\uff0cC\u578b\u7684\u9632\u6c34\u7ef4\u62a4\u7279\u6027\u4e0d\u9519\uff0c\u800cD\u578b\u7684\u8010\u70ed\u6027\u4e0d\u9519\uff0c\u5728\u5177\u4f53\u8fd0\u7528\u4e2d\u4ee5Parylene C\u7684\u5e94\u7528\u66f4\u4e3a\u666e\u904d\u3002\u82f1\u56fdUnion Carbide\u516c\u53f8\u4e8e1953\u5e74\u6700\u5148\u53d1\u5e03Gorham\u6cd5[9]\u751f\u6210Parylene(\u7528\u73af\u4e8c\u805a\u4f53\u6839\u636e\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u2014CVD[10-11]\u6c47\u805a)\u3002\u6839\u636e\u6b64\u65b9\u5f0f\u914d\u5236\u7684\u805a\u5bf9\u82ef\u6491\u4e8c\u7532\u57fa\u4ea7\u54c1\u7cfb\u5217\u5177\u5907\u9ad8\u9ad8\u5bc6\u5ea6\u3001\u9ad8\u7eaf\u5ea6\uff0c\u51fa\u8272\u7684\u9632\u6c34\u3001\u9664\u9709\u3001\u9632\u8150\u8680\u3001\u9632\u6d53\u70df\uff0c\u53ca\u5176\u7edd\u7f18\u7279\u6027\u3001\u7269\u7406\u6027\u80fd\u3001\u7535\u5b50\u5149\u5b66\u7279\u6027\u548c\u76f8\u6eb6\u6027\u7b49\u7279\u70b9[12-16]\uff0c\u800c\u4e14\u7528CVD\u6cd5\u5236\u53d6\u65f6\u53ef\u4ee5\u51c6\u786e\u5730\u64cd\u7eb5\u5546\u54c1\u8584\u539a[17]\u3002<\/p>\n

Parylene\u81ea\u5f00\u53d1\u8bbe\u8ba1\u9762\u4e16\u81f3\u4eca\uff0c\u4ee5\u5176\u7279\u6709\u7684\u5236\u53d6\u52a0\u5de5\u5de5\u827a\u548c\u4f18\u79c0\u7684\u7279\u6027\uff0c\u5728\u4f17\u591a\u9ad8\u65b0\u6280\u672f\u884c\u4e1a\u83b7\u5f97\u666e\u904d\u7684\u8fd0\u7528\u3002\u4e0a\u4e16\u7eaa70\u65f6\u4ee3\u521d\uff0c\u8be5\u539f\u6750\u6599\u5c31\u88ab\u8fd0\u7528\u4e8e\u5404\u79cd\u5404\u6837\u822a\u7a7a\u822a\u5929\u56db\u8f74\u98de\u884c\u5668\u3002\u8fd1\u4e9b\u5e74\uff0cParylene\u7684\u5e94\u7528\u9886\u57df\u5728\u6b27\u7f8e\u56fd\u5bb6\u548c\u65e5\u672c\u7b49\u5de5\u4e1a\u751f\u4ea7\u8d44\u672c\u4e3b\u4e49\u56fd\u5bb6\u83b7\u5f97\u4e86\u5feb\u901f\u53d1\u5c55\u8d8b\u52bf\u2014\u2014\u5728\u7535\u5b50\u7ebf\u8def\u5143\u5668\u4ef6\u3001\u7535\u5b50\u5149\u5b66\u7535\u5b50\u5668\u4ef6[18]\u3001\u611f\u5e94\u5668[19]\u3001\u7535\u5b50\u5149\u5b66\u673a\u68b0\u7ed3\u6784(MEMS)[20-21]\u3001\u6c38\u78c1\u6750\u6599[22]\u3001\u751f\u7269\u4f53\u533b\u7597\u7535\u5b50\u5668\u4ef6[23]\u3001\u5149\u7ea4\u5149\u7f06\u6db2\u538b\u5bc6\u5c01\u4ef6[24]\u7b49\u9886\u57df\uff0c\u53ca\u5176\u751f\u7269\u533b\u5b66\u5de5\u7a0b[25-26]\u3001\u6587\u5316\u9057\u4ea7\u4fdd\u62a4[27]\u7b49\u4f17\u591a\u884c\u4e1a\u90fd\u51fa\u73fe\u4e86\u8bb8\u8bb8\u591a\u591a\u65b0\u7684\u8fd0\u7528\uff0c\u4e3a\u9ad8\u65b0\u79d1\u6280\u5f00\u53d1\u5e26\u6765\u4e86\u4e00\u79cd\u7406\u60f3\u5316\u7684\u914d\u5957\u8bbe\u65bd\u539f\u6750\u6599[28]\u3002<\/p>\n

\"1.png\"<\/p>\n

\u56fe1 \u51e0\u7c7b\u5e38\u89c1Parylene\u7684\u5316\u5b66\u7ed3\u6784<\/p>\n

Fig.1 Chemical structure of commercial Parylenes<\/p>\n

\u73b0\u5982\u4eca\uff0cParylene\u5851\u6599\u8584\u819c\u7684\u4f17\u591a\u4f18\u52bf\u4f7f\u5176\u8fd0\u7528\u6108\u6765\u6108\u666e\u904d(\u5c24\u5176\u662f\u5728\u7535\u5b50\u5668\u4ef6\u5668\u6750\u3001\u822a\u5929\u822a\u7a7a\u3001\u56fd\u9632\u7b49\u9886\u57df\u7684\u8fd0\u7528)\u3002\u5927\u5bb6\u5728\u5173\u6ce8\u5176\u4f18\u52bf\u80fd\u7684\u4e0e\u6b64\u540c\u65f6\uff0c\u4e5f\u9010\u6e10\u4fa7\u91cd\u4e8eParylene\u5851\u6599\u8584\u819c\u8870\u8001\u4e2a\u4eba\u884c\u4e3a\u7684\u79d1\u5b66\u7814\u7a76\uff0c\u7531\u4e8e\u6d82\u5c42\u7684\u53ef\u9760\u6027\u3001\u6301\u7eed\u6027\u662f\u8054\u7cfb\u5230\u6240\u7ef4\u62a4\u5668\u6750\u7684\u4f7f\u7528\u671f\u9650\u548c\u8fdb\u4e00\u6b65\u62d3\u5c55Parylene\u5851\u6599\u8584\u819c\u8fd0\u7528\u8303\u7574\u7684\u4e3b\u8981\u8981\u7d20\u3002\u5f53\u4eca\uff0c\u4e16\u754c\u5404\u56fd\u9488\u5bf9Parylene\u5851\u6599\u8584\u819c\u8870\u8001\u7684\u7814\u7a76\u5185\u5bb9\u5173\u952e\u805a\u96c6\u5728\u7d2b\u5916\u7ebf\u8870\u8001\u3001\u70ed\u6c27\u5316\u548c\u8f90\u5c04\u6e90\u8870\u8001\u7b49\u5c42\u9762[17,29-35]\uff0c\u6587\u4e2d\u4ec5\u5c31Parylene\u5851\u6599\u8584\u819c\u5728\u9633\u5149\u7167\u5c04\u60c5\u51b5\u4e0b\u7684\u8870\u8001\u539f\u7406\u3001\u72b6\u51b5\u3001\u7269\u8d28\u5256\u6790\u53ca\u5176\u8870\u8001\u5bf9\u5851\u6599\u8584\u819c\u672c\u8eab\u7279\u6027\u7684\u5371\u5bb3\u5f00\u5c55\u4e86\u5177\u4f53\u63cf\u8ff0\u3002<\/p>\n

1 Parylene\u5851\u6599\u8584\u819c\u8001\u5316\u4e2a\u4eba\u884c\u4e3a<\/p>\n

Santuci\u7b49\u5bf9Parylene\u5851\u6599\u8584\u819c\u5728\u7d2b\u5916\u5149-\u80fd\u89c1\u5149\u533a\u5bf9\u5149\u7ebf\u7684\u6d88\u5316\u5438\u6536\u72b6\u51b5\u5f00\u5c55\u4e86\u8be6\u5c3d\u7684\u79d1\u5b66\u7814\u7a76\uff0c\u7ed3\u679c\u663e\u793a\uff0cParylene\u5851\u6599\u8584\u819c\u5bf9340 nm\u4e4b\u4e0b\u7684\u7d2b\u5916\u7ebf\u6d88\u5316\u5438\u6536\u660e\u663e\uff0c\u800c\u9488\u5bf9340nm\u4ee5\u4e0a\u7684\u5149\u57fa\u672c\u4e0a\u4e0d\u6d88\u5316\u5438\u6536[29,36-37]\u3002\u56e0\u800cParylene\u5851\u6599\u8584\u819c\u8001\u5316\u4e2a\u4eba\u884c\u4e3a\u5173\u952e\u79d1\u5b66\u7814\u7a76\u7684\u662f\u7d2b\u5916\u7ebf\u529f\u6548\u4e0b\u7684\u8870\u8001\u3002\u5b66\u8005\u5bf9Parylene C\u5851\u6599\u8584\u819c\u5728\u7d2b\u5916\u5149-\u53ef\u89c1\u5149\u8303\u56f4\u5185\u7684\u6d88\u5316\u5438\u6536\u72b6\u51b5\u5f00\u5c55\u4e86\u68c0\u6d4b\u5256\u6790(\u56fe2)\uff0c\u5e76\u89c2\u67e5\u5230\u5728\u7d2b\u5916\u7ebf\u76f4\u5c04\u4e0b\u5851\u6599\u8584\u819c\u4f1a\u9020\u6210\u201c\u5931\u7eff\u201d\u72b6\u51b5\uff1b\u6b64\u5916\u5728\u6709\u6c27\u8fd0\u52a8\u6807\u51c6\u4e0b\uff0c\u5176\u8001\u5316\u4e2a\u4eba\u884c\u4e3a\u4f1a\u52a0\u5feb\uff0c\u201c\u5931\u7eff\u201d\u72b6\u51b5\u66f4\u4e3a\u663e\u8457\u3002<\/p>\n

\"2.png\"<\/p>\n

\u56fe2 Parylene C\u5851\u6599\u8584\u819c\u7684\u7d2b\u5916\u5149-\u80fd\u89c1\u5149\u7684\u901a\u8fc7\u72b6\u51b5<\/p>\n

Fig.2 UV-visible light transmittance of Parylene C film<\/p>\n

1.1 Parylene\u5851\u6599\u8584\u819c\u8001\u5316\u539f\u7406<\/p>\n

Parylene\u5851\u6599\u8584\u819c\u5728\u6237\u5916\u7ecf\u957f\u65f6\u95f4\u65e5\u5149\u76f4\u5c04\u540e\uff0c\u53ef\u9760\u6027\u6025\u5267\u4e0b\u964d[38-39]\uff0c\u5ef6\u6027\u63d0\u5347\u4e14\u6297\u62c9\u5f3a\u5ea6\u51cf\u5c11\u3002Bera\u7b49\u5c31Parylene C\u5851\u6599\u8584\u819c\u7684\u8001\u5316\u5f00\u5c55\u4e86\u8bb8\u591a\u79d1\u5b66\u7814\u7a76\uff0c\u7279\u522b\u662f\u8d85\u8fc7300 nm\u7d2b\u5916\u7ebf\u4e0b\u7684\u8106\u5316\u4e2a\u4eba\u884c\u4e3a[40-41]\uff0c\u5e76\u9009\u7528\u591a\u79cd\u5f62\u5f0f\u5256\u6790\u4e86\u5176\u8001\u5316\u7269\u8d28\uff0c\u6700\u540e\u5f3a\u8c03Parylene C\u5851\u6599\u8584\u819c\u4f1a\u88ab\u5149\u6fc0\u8d77\u800c\u65ad\u952e\uff0c\u9020\u6210\u6c27\u81ea\u7531\u57fa\u8fdb\u800c\u9020\u6210\u5316\u5b66\u964d\u89e3\uff0c\u8f6c\u5316\u6210\u4e00\u4e9b\u4f4e\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u7684\u8870\u8001\u7269\u8d28\uff0c\u5176\u5173\u952e\u6eb6\u89e3\u5168\u8fc7\u7a0b\u5982\u4e0b\u56fe3\u6240\u663e\u793a\u3002\u5979\u4eec\u4e86\u89e3\u4e86Parylene N\u7684\u8870\u8001\u539f\u7406\uff0c\u89c9\u5f97\u5b83\u7684\u8870\u8001\u6700\u5148\u662f\u4ee5\u2014CH2\u2014\u7684\u7a7a\u6c14\u6c27\u5316\u9010\u6e10\uff0c\u8fdb\u800c\u5728\u9633\u5149\u7167\u5c04\u72b6\u51b5\u4e0b\u8f6c\u5316\u6210\u919b\u3001\u82ac\u82b3\u9178\u3001\u916f\u7b49\u6c27\u5316\u4ea7\u7269\uff1b\u6b64\u5916\uff0c\u6839\u636e\u8001\u5316\u7269\u8d28\u7684\u50ac\u5316\u88c2\u89e3\u5b9e\u9a8c\u53d1\u89c9\u4e86\u5c0f\u91cf\u6c2f\u4e01\u4e8c\u70ef\u7684\u9020\u6210\uff0c\u8fd9\u8fdb\u4e00\u6b65\u8868\u660e\u5149\u6c27\u8870\u8001\u662f\u6839\u636e\u81ea\u7531\u57fa\u53cd\u5e94\u539f\u7406\u5f00\u5c55\u7684\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u9488\u5bf9Parylene\u9ad8\u805a\u7269\uff0c\u5b98\u80fd\u56e2\u5bf9\u5176\u7279\u6027\u5371\u5bb3\u975e\u5e38\u5927\uff0c\u56e0\u800c\u76f8\u5173Parylene C\u5851\u6599\u8584\u819c\u8870\u8001\u539f\u7406\u548c\u7279\u6027\u8f6c\u53d8\u7684\u79d1\u5b66\u7814\u7a76\u4e5f\u6709\u5f88\u591a\u5de5\u4f5c\u4e2d\u5fc5\u987b\u8fdb\u884c\u3002<\/p>\n

\"3.png\"<\/p>\n

\u56fe3 Parylene C\u6d88\u5316\u5438\u6536\u5149\u7834\u88c2\u4ea7\u751f\u7684\u5c0f\u5206\u5b50\u6c34<\/p>\n

Fig.3 Formation of low molecular due to \\’light absorbing\\’ of Parylene C<\/p>\n

1.2 Parylene\u5851\u6599\u8584\u819c\u8001\u5316\u72b6\u51b5<\/p>\n

\u5728\u9633\u5149\u7167\u5c04\u5168\u8fc7\u7a0b\u4e2d\uff0cParylene\u5851\u6599\u8584\u819c\u8868\u5c42\u6162\u6162\u53d8\u9ec4\uff0c\u800c\u4e14\u8fd9\u7c7b\u201c\u5931\u7eff\u201d\u72b6\u51b5\u4f1a\u4f34\u968f\u7740\u9633\u5149\u7167\u5c04\u6642\u95f4\u7684\u589e\u52a0\u800c\u8d8a\u6765\u8d8a\u6108\u53d1\u663e\u8457\u3002Bera\u7b49[40]\u89c9\u5f97Parylene C\u5851\u6599\u8584\u819c\u7684\u201c\u5931\u7eff\u201d\u8981\u6bd4Parylene N\u5851\u6599\u8584\u819c\u66f4\u663e\u8457\uff0c\u5e76\u5c06\u8be5\u201c\u5931\u7eff\u201d\u72b6\u51b5\u8868\u8ff0\u4e3a\u8f6c\u5316\u6210\u4e86\u5171\u632f\u6001\u82b4\u7c7b\u7269\u8d28\u3002\u800c\u674e\u5c0f\u9f99\u7535\u5f71\u7b49[17]\u5219\u89c9\u5f97\u4e94\u5143\u73af\u82b4\u7c7b\u7269\u8d28\u5728\u53cd\u6620\u539f\u59cb\u5c31\u5c11\u4e861\u4e2a\u7532\u57fa\uff0c\u6b64\u5916\u6839\u636e\u5bf9\u50ac\u5316\u88c2\u89e3\u6b8b\u7247\u6b63\u79bb\u5b50\u7684\u68c0\u9a8c\uff0c\u89c9\u5f97\u516d\u5143\u73af\u7269\u8d28\u76f8\u5bf9\u6027\u66f4\u6613\u4ea7\u751f\u3001\u66f4\u5e73\u7a33\uff0c\u5e76\u4e14\u66f4\u52a0\u6709\u6548\u3002\u4e8c\u8005\u7684\u8f6c\u5316\u6210\u5168\u8fc7\u7a0b\u5982\u4e0b\u56fe4\u6240\u663e\u793a\u3002<\/p>\n

\"4.png\"<\/p>\n

\u56fe4 Parylene C\u7684\u82b4\u7c7b\u548c\u516d\u5143\u73af\u201c\u5931\u7eff\u201d\u7269\u8d28<\/p>\n

Fig.4 Etiolated production of fluorenes and hexatomic ring of Parylene C<\/p>\n

\u8001\u5316\u9020\u6210Parylene C\u5851\u6599\u8584\u819c\u53d8\u8106\uff0c\u5f3a\u5ea6\u63d0\u5347\u4e14\u6297\u62c9\u5f3a\u5ea6\u964d\u4f4e\u3002Nowlin[32]\u7684\u7814\u7a76\u7ed3\u679c\u663e\u793a\uff0c\u5851\u6599\u8584\u819c\u7684\u6297\u62c9\u5f3a\u5ea6\u4e0e\u88ab\u6c27\u5316\u6c34\u5e73\u76f8\u5173\uff0c\u7a7a\u6c14\u6c27\u5316\u6c34\u5e73\u8d8a\u9ad8\uff0c\u6297\u62c9\u5f3a\u5ea6\u8d8a\u4f4e\uff1b\u6b64\u5916\uff0c\u901a\u8fc7\u7d2b\u5916\u7ebf\u76f4\u5c04\u540e\uff0c\u5851\u6599\u8584\u819c\u7684\u76f8\u5bf9\u6027\u73bb\u7483\u5316\u6e29\u5ea6\u5148\u63d0\u5347\u540e\u51cf\u5c11\u3002<\/p>\n

1.3 Parylene\u5851\u6599\u8584\u819c\u8001\u5316\u7269\u8d28<\/p>\n

Pruden\u3001Santuci\u7b49\u5e72\u4e86Parylene\u5851\u6599\u8584\u819c\u7684\u5149\u6c27\u9ad8\u4f4e\u6e29\u8bd5\u9a8c\uff0c\u53d1\u89c9\u7269\u8d28\u5173\u952e\u4e3a\u5e26\u6709C=O\u7684\u5316\u5b66\u7269\u8d28[29,36,42]\u3002C=O\u4ea7\u751f\u540e\uff0c\u5206\u5b50\u7ed3\u6784\u94fe\u4fbf\u4f1a\u5728\u4e00\u5b9a\u6c34\u5e73\u4e0a\u52a0\u5feb\u6eb6\u89e3[43]\u3002\u66f9\u743c\u534e\u7b49[35]\u6839\u636ePY-GC\/MS\u6280\u672f\u6027\u5bf9Parylene C\u5851\u6599\u8584\u819c\u8001\u5316\u88c2\u5316\u7269\u8d28\u5f00\u5c55\u4e86\u5256\u6790\uff0c\u5f97\u5230\u8d28\u8c31\u5206\u6790\u8bc4\u5b9a\u7d50\u679c(\u5982\u88681\u6240\u663e\u793a)\u3002\u4ece\u88681\u53ef\u4ee5\u770b\u5f97\u51fa\uff0c\u5149\u6c27\u8870\u8001\u540e\uff0cParylene C\u5851\u6599\u8584\u819c\u7684\u8f6c\u5316\u7269\u8d28\u5173\u952e\u6709\u82ef\u7532\u919b\u7c7b\u7a7a\u6c14\u6c27\u5316\u6b8b\u7247\u53ca\u5355\u4e2a\u6b8b\u7247\uff0c\u8868\u660e\u5149\u6c27\u8870\u8001\u540e\uff0c\u5851\u6599\u8584\u819c\u8868\u5c42\u5173\u952e\u8f6c\u5316\u6210\u4e86\u82ef\u7532\u919b\u7c7b\u548c\u7fa7\u9178\u7c7b\u5c0f\u5206\u5b50\u6c34\u7269\u8d28\u3002\u6b64\u5916\u6839\u636e\u5bf9\u88c2\u5316\u5173\u952e\u6c27\u5316\u4ea7\u7269\u6b63\u79bb\u5b50\u5cf0\u603b\u9762\u79ef\u7684\u534a\u5b9a\u91cf\u5206\u6790\uff0c\u53d1\u89c9\u9633\u5149\u7167\u5c04\u6642\u95f4\u4f4e\u4e8e80 h\u65f6\uff0c\u5404\u6c27\u5316\u4ea7\u7269\u6b8b\u7247\u57fa\u672c\u4e0a\u6c92\u6709\u8f6c\u53d8\uff1b\u800c\u5728\u9633\u5149\u7167\u5c0480~120 h\u5168\u8fc7\u7a0b\u4e2d\uff0c\u5851\u6599\u8584\u819c\u88c2\u5316\u7684\u6c27\u5316\u4ea7\u7269\u8f83\u591a\uff0c\u53d1\u751f\u4e86\u4e00\u4e2a\u8fde\u7eed\u51fd\u6570\uff1b\u5f53\u9633\u5149\u7167\u5c04\u8d85\u51fa120 h\u540e\uff0c\u6c27\u5316\u4ea7\u7269\u91cf\u663e\u8457\u964d\u4f4e\u3002<\/p>\n

\u88681 \u7d2b\u5916\u7ebf\u8870\u8001\u7269\u8d28<\/p>\n

Tab.1 UV aging products of Parylene C<\/p>\n

\"5.png\"<\/p>\n

2 \u8001\u5316\u5bf9Parylene\u5851\u6599\u8584\u819c\u7279\u6027\u7684\u5371\u5bb3<\/p>\n

Parylene\u5851\u6599\u8584\u819c\u7684\u7535\u5b50\u5149\u5b66\u7279\u6027\u3001\u900f\u6c14\u6027\u900f\u6c14\u6027\u80fd\u80fd\u3001\u7269\u7406\u6027\u80fd\uff0c\u53ca\u5176\u7535\u78c1\u573a\u7406\u8bba\u7279\u6027\u662f\u5176\u5173\u952e\u6307\u6807\u503c\uff0c\u5bf9\u5176\u8fd0\u7528\u5177\u6709\u975e\u5e38\u91cd\u8981\u7684\u5371\u5bb3\u3002\u56e0\u800c\u79d1\u5b66\u7814\u7a76\u8001\u5316\u540eParylene\u5851\u6599\u8584\u819c\u7279\u6027\u7684\u8f6c\u53d8\uff0c\u5bf9\u5176\u5177\u4f53\u8fd0\u7528\u5177\u5907\u4e3b\u8981\u73b0\u5b9e\u610f\u4e49\u3002<\/p>\n

2.1 \u7535\u5b50\u5149\u5b66\u7279\u6027<\/p>\n

Parylene\u5851\u6599\u8584\u819c\u5bf9\u80fd\u89c1\u5149\u7684\u900f\u5149\u5ea6\u4e3a90%\u4e0a\u4e0b\u3002Santucci\u7b49[29]\u5e72\u4e86\u7ecf\u7d2b\u5916\u7ebf\u76f4\u5c04\u7684Parylene C\u5851\u6599\u8584\u819c\u4e8e\u6c14\u4f53\u3001H2O\u3001H2O2\u3001O2\u3001He\u6807\u51c6\u4e0b\uff0c\u5728\u80fd\u89c1\u5149\u5730\u533a\u5f00\u5c55\u900f\u5149\u5ea6\u79d1\u5b66\u7814\u7a76\u3002\u5c06\u8584\u539a\u4e3a300 nm\u7684Parylene C\u5851\u6599\u8584\u819c\u5404\u81ea\u653e\u7f6e\u4e0d\u4e00\u6837\u7684\u6c7d\u4f53\u6c1b\u56f4\u4e2d\uff0c\u5e76\u4e14\u4ee5254 nm\u7684\u7d2b\u5916\u7ebf\u76f4\u5c04120 min\u3002\u7d50\u679c\u53d1\u89c9\uff1a\u89e3\u51b3\u8fc7\u7684\u5851\u6599\u8584\u819c\u5bf9\u80fd\u89c1\u5149\u7684\u900f\u5149\u5ea6\u57fa\u672c\u4e0a\u6c92\u6709\u8f6c\u53d8\uff0c\u89c1\u56fe5\uff1b\u4f46\u5f53\u53d1\u751f\u201c\u5931\u7eff\u201d\u72b6\u51b5(\u5851\u6599\u8584\u819c\u5df2\u663e\u8457\u8870\u8001)\u540e\uff0c\u5176\u900f\u5149\u5ea6\u663e\u8457\u964d\u4f4e\u3002<\/p>\n

\"6.png\"<\/p>\n

\u56fe5 \u5728\u4e0d\u4e00\u6837\u6c7d\u4f53\u4e2d\u900f\u5149\u5ea6\u968f\u76f4\u5c04\u6642\u95f4\u7684\u8f6c\u53d8<\/p>\n

Fig.5 Transmittance changes with irradiation time in different gases<\/p>\n

2.2 \u900f\u6c14\u6027\u900f\u6c14\u6027\u80fd\u80fd<\/p>\n

Parylene\u5851\u6599\u8584\u819c\u5bf9\u6c34\u84b8\u6c7d\u3001CO2\u7b49\u6c7d\u4f53\u7684\u9ad8\u963b\u9694\u662f\u5176\u7279\u6027\u7684\u4e3b\u8981\u6807\u51c6\u4e4b\u4e00\uff0c\u662f\u786e\u5b9a\u5176\u4f7f\u7528\u8303\u7574\u7684\u5c24\u4e3a\u91cd\u8981\u7684\u8981\u7d20\u3002W H Hubbell\u7b49[44]\u7814\u7a76\u53d1\u73b0\uff0cParyleneC\u5851\u6599\u8584\u819c\u5177\u8f83\u597d\u7684\u6297\u6e7f\u9632\u6c34\u53ca\u6c7d\u4f53\u9694\u7edd\u7279\u70b9\uff1b\u6b64\u5916\u6211\u4eec\u8fd8\u53d1\u89c9\uff0c\u4e0d\u4e00\u6837\u79cd\u7c7bParylene\u5851\u6599\u8584\u819c\u4e2d\uff0cParylene C\u5851\u6599\u8584\u819c\u5bf9H2O\u3001O2\u548cCO2\u7684\u9694\u7edd\u7279\u6027\u6700\u597d\u662f[45]\u3002\u6709\u7814\u7a76\u8868\u660e\uff0c\u6c34\u84b8\u6c7d\u7b49\u5728\u5851\u6599\u8584\u819c\u4e2d\u7684\u8513\u5ef6\u548c\u6e17\u5165\u4e3b\u8981\u662f\u6839\u636e\u4e0d\u5b9a\u5f62\u533a\u8fdb\u884c\u7684[46]\uff1b\u7ecf\u7d2b\u5916\u7ebf\u76f4\u5c04\u540e\uff0c\u5851\u6599\u8584\u819c\u7684\u76f8\u5bf9\u6027\u73bb\u7483\u5316\u6e29\u5ea6\u8d8b\u5411\u5065\u5168\uff0c\u4e0d\u5b9a\u5f62\u5730\u533a\u964d\u4f4e\uff0c\u56e0\u800c\u5bf9\u6c34\u84b8\u6c7d\u7684\u9694\u7edd\u7279\u6027\u6709\u6240\u589e\u52a0\uff1b\u4f46\u5f53\u76f4\u5c04\u6642\u95f4\u8fdb\u4e00\u6b65\u63d0\u5347\uff0c\u5851\u6599\u8584\u819c\u7684\u5206\u5b50\u7ed3\u6784\u94fe\u5f88\u6709\u53ef\u80fd\u4ea7\u751f\u7834\u88c2\uff0c\u5bfc\u81f4\u73bb\u7483\u5316\u6e29\u5ea6\u964d\u4f4e\u3001\u900f\u6c14\u6027\u80fd\u63d0\u5347[47]\uff0c\u89c1\u56fe6\u3002<\/p>\n

\"7.png\"<\/p>\n

\u56fe6 \u6c34\u84b8\u6c7d\u901a\u8fc7\u6027\u968f\u76f4\u5c04\u6642\u95f4\u7684\u8f6c\u53d8\u66f2\u7ebf\u56fe<\/p>\n

Fig.6 Variation curve between vapor permeability and irradiation time<\/p>\n

 <\/p>\n

2.3 \u7269\u7406\u6027\u80fd<\/p>\n

Fortin[6]\u89c9\u5f97\uff0c\u7ecf\u7d2b\u5916\u7ebf\u76f4\u5c04\u7684Parylene\u5851\u6599\u8584\u819c\u9020\u6210\u7684\u6846\u67b6\u7834\u88c2\u53ca\u5176\u5316\u5b66\u7ed3\u6784\u8f6c\u53d8\u7b49\uff0c\u4f1a\u9020\u6210\u70b9\u7f3a\u9677\uff0c\u5bfc\u81f4\u819c\u7684\u8584\u539a\u964d\u4f4e\uff1b\u6b64\u5916\u8fd8\u4f1a\u7ee7\u7eed\u9020\u6210\u819c\u7684\u6297\u62c9\u5f3a\u5ea6\u6025\u5267\u4e0b\u964d\uff0c\u5ef6\u6027\u63d0\u5347\u3002Santucci\u7b49[29]\u5728\u4e0d\u4e00\u6837\u7684\u6c7d\u4f53\u6c1b\u56f4\u9009\u7528254 nm\u7d2b\u5916\u7ebf\u76f4\u5c04Parylene C\u5851\u6599\u8584\u819c\uff0c\u4f7f\u5851\u6599\u8584\u819c\u7684\u8868\u9762\u5f20\u529b\u4ece100\u00b0\u964d\u4f4e\u52306\u00b0\uff0c\u660e\u663e\u63d0\u5347\u4e86\u5851\u6599\u8584\u819c\u8868\u5c42\u6d3b\u5316\u80fd\uff0c\u5927\u5927\u589e\u52a0\u4e86\u8868\u5c42\u7684\u53ef\u6da6\u6ed1\u6027\uff0c\u63d0\u5347\u4e86\u4e0e\u5176\u5b83\u8d44\u6599\u7684\u9ecf\u7ed3\u6027\u80fd\uff0c\u8fdb\u800c\u964d\u4f4e\u4e86Parylene\u5851\u6599\u8584\u819c\u7684\u8fd0\u7528\u8303\u7574\u3002<\/p>\n

2.4 \u7535\u78c1\u573a\u7406\u8bba\u7279\u6027<\/p>\n

Parylene\u5851\u6599\u8584\u819c\u5177\u5907\u826f\u597d\u7684\u7535\u529b\u5b66\u7279\u6027[45]\uff0c\u5c24\u5176\u662f\u5177\u5907\u8f83\u4f4e\u7684\u8017\u635f\u56e0\u7d20\u3002\u901a\u8fc7\u7d2b\u5916\u7ebf\u76f4\u5c04\u540e\uff0c\u5176\u529b\u5b66\u7279\u6027\u663e\u8457\u964d\u4f4e\uff1b\u5e76\u4e14\u4f34\u968f\u7740\u7d2b\u5916\u7ebf\u76f4\u5c04\u6642\u95f4\u7684\u589e\u52a0\uff0c\u5851\u6599\u8584\u819c\u7684\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u3001\u635f\u8017\u56e0\u7d20(\u4ecb\u7535\u635f\u8017\u89d2)\u5747\u63d0\u5347\u3002\u8fd9\u4e5f\u8bb8\u4e0e\u8870\u8001\u5168\u8fc7\u7a0b\u4e2d\u8f6c\u5316\u6210\u7684\u7269\u8d28\u76f8\u5173\uff0c\u5728\u5176\u4e2d\u6eb6\u89e3\u9020\u6210\u7684\u70c3\u57fa\u5bf9\u7535\u529b\u5b66\u7279\u6027\u7684\u5371\u5bb3\u5c24\u5176\u663e\u8457\uff1b\u6b64\u5916\uff0co2\u7684\u5b58\u6709\u4e5f\u4f1a\u9020\u6210\u7535\u6781\u6781\u5316\u63d0\u9ad8\uff0c\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u63d0\u5347[31]\u3002<\/p>\n

3 \u603b\u7ed3<\/p>\n

\u5728\u9633\u5149\u7167\u5c04\u81ea\u7136\u73af\u5883\u4e2d\uff0c\u7d2b\u5916\u7ebf\u662f\u9020\u6210Parylene\u5851\u6599\u8584\u819c\u8870\u8001\u7684\u9996\u8981\u7f18\u6545\uff0c\u800co2\u7684\u5b58\u6709\u53ef\u80fd\u52a0\u91cd\u8001\u5316\u3002\u5728\u6709\u6c27\u8fd0\u52a8\u72b6\u51b5\u4e0b\uff0cParylene\u5851\u6599\u8584\u819c\u8001\u5316\u540e\u4f1a\u8f6c\u5316\u6210\u4e00\u7cfb\u5217\u7684\u6c27\u5316\u4ea7\u7269\u548c\u53ef\u6325\u53d1\u7269\u5c0f\u5206\u5b50\u6c34\u6210\u5206\u3002\u8001\u5316\u5bf9Parylene\u5851\u6599\u8584\u819c\u7684\u900f\u6c14\u6027\u900f\u6c14\u6027\u80fd\uff0c\u53ca\u5176\u7535\u5b50\u5149\u5b66\u3001\u7535\u78c1\u573a\u7406\u8bba\u3001\u7ed3\u6784\u529b\u5b66\u7b49\u7279\u6027\u5747\u6709\u8f83\u5927\u5371\u5bb3\u3002\u73b0\u9636\u6bb5\u4e2d\u56fd\u5bf9Parylene\u5851\u6599\u8584\u819c\u7684\u4e3b\u8981\u7528\u9014\u53ca\u8fd0\u7528\u6df1\u5c42\u4e0e\u6d77\u5916\u540c\u884c\u5bf9\u6bd4\u4e5f\u6709\u4e00\u5b9a\u7684\u5dee\u522b\u3002\u4f34\u968f\u7740\u4e2d\u56fd\u5bf9Parylene\u5851\u6599\u8584\u819c\u5e94\u7528\u7684\u53d1\u5c55\u8d8b\u52bf\uff0cParylene\u5851\u6599\u8584\u819c\u8870\u8001\u79d1\u5b66\u7814\u7a76\u4e5f\u5c06\u8fdb\u4e00\u6b65\u6df1\u5c42\u6b21\uff0c\u5c24\u5176\u8981\u91cd\u89c6\u5bf9\u8001\u5316\u539f\u7406\u7684\u7814\u7a76\u3002\u6b64\u5916\uff0c\u4e5f\u9700\u8981\u4e0b\u624bParylene\u5851\u6599\u8584\u819c\u8868\u5c42\u4fee\u8865\u548c\u8868\u5c42\u7ef4\u62a4\u65b0\u6280\u672f\u5e94\u7528\u7684\u79d1\u7814\u5f00\u53d1\u8bbe\u8ba1\uff0c\u4ee5\u907f\u514d\u6216\u964d\u4f4e\u5149\u5bf9Parylene\u5851\u6599\u8584\u819c\u7684\u4f24\u5bb3\uff0c\u8fdb\u800c\u589e\u52a0Parylene\u5851\u6599\u8584\u819c\u6240\u7ef4\u62a4\u5668\u6750\u7684\u53ef\u9760\u6027\u4ee5\u53ca\u4f7f\u7528\u671f\u9650\u3002<\/p>\n

\u8bba\u6587\u53c2\u8003\u6587\u732e\uff1a<\/p>\n

[1] Beach W F, Lee C, Bassett D R, et al. Xylene polymers[M]\/\/encyclo pedia of polymer science and engineering.NewYork: Wiley, 1989: 195-197.<\/p>\n

[2] William F Gorham, Berkeley Heights N J. Halogenateddipxylylenes: US, 3221068[P]. 1965-11-30.<\/p>\n

[3] William F Gorham, Berkeley Height S N J. Para-xylylenecopolymers: US, 3288728[P]. 1966-11-29.<\/p>\n

[4] Thomas E Baker, Northboro, George L Fix, et al. Processfor forming polymeric paraxylylene coatings and filmspossessing improved oxidation resistance: US, 4176209[P].1979-11-27.<\/p>\n

[5] \u738b\u52a9\u98de,\u4e01\u58eb\u8fdb,\u5f20\u536b,\u7b49. ULSI\u4f4e\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u539f\u6750\u6599\u5236\u53d6\u4e2dCVD\u6280\u672f\u6027[J]. \u7ec6\u5fae\u751f\u4ea7\u52a0\u5de5\u6280\u672f\u6027, 2001, 30(1): 39-43.<\/p>\n

[6] Jeffrey B Fortin, et al. Chemical vapor deposition polymerization:The growth and properties of parylene thin films[M].Netherlands: Kluwer Academic Publishers, 2004: 1-2.<\/p>\n

[7] \u9f9a\u5fb7\u624d,\u595a\u4e09\u5f69,\u738b\u52c9. \u6d3e\u62c9\u7eb6\u6d82\u819c\u6280\u672f\u6027\u5728\u73cd\u8d35\u6587\u7269\u53ca\u4e66\u7c4d\u7ef4\u62a4\u4e2d\u7684\u5e94\u7528\u7814\u7a76[J]. \u65b0\u578b\u529f\u80fd\u6750\u6599\u4e0e\u5143\u5668\u4ef6\u5b66\u520a, 1996 (8): 29-34.<\/p>\n

[8] Senkevich J J, Desu S B, Simkovic V. Temperature studiesof optial birefringence and X-ray diffraction with poly(pxylylen),poly(chloro-p-xylylene) and poly(tetra-fluoro-pxylylene)CVD thin films[J]. Polymer, 2000, 41(7): 2 379-2 390.<\/p>\n

[9] Gorham W F. Para-xylylene polymers: US, 3342754[P].1967-09-19.<\/p>\n

[10] Waters J F, Sutter J K, Meador M A. Addition curingthermosets endcapped with 4-amino[2.2]paracyclophane<\/p>\n

 <\/p>\n

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