{"id":23990,"date":"2021-12-27T12:52:12","date_gmt":"2021-12-27T04:52:12","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=23990"},"modified":"2021-12-25T16:06:47","modified_gmt":"2021-12-25T08:06:47","slug":"parylene%e8%96%84%e8%86%9c%e5%8f%8a%e5%85%b6%e5%9c%a8mems%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=23990","title":{"rendered":"Parylene\u8584\u819c\u53ca\u5176\u5728MEMS\u4e2d\u7684\u5e94\u7528"},"content":{"rendered":"

\u738b\u4e9a\u519b, \u5218\u666f\u5168, \u6768\u6625\u751f, \u6c88\u505a\u6210, \u90ed\u5fe0\u5143<\/p>\n

(\u4e0a\u6d77\u4ea4\u5927\u5fae\u7ed3\u6784\u79d1\u6280\u8fdb\u6b65\u7814\u7a76\u6240\u03bcm\/\u7eb3\u7c73\u52a0\u5de5\u6280\u672f\u6027\u56fd\u5bb6\u91cd\u70b9\u5b9e\u9a8c\u5ba4,\u5851\u6599\u8584\u819c\u4e0e\u7ec6\u5fae\u6280\u672f\u6027\u5317\u4eac\u5e02\u91cd\u70b9\u5b9e\u9a8c\u5ba4, \u4e0a\u6d77\u5e02\u3000200030)<\/p>\n

\u5f15\u8a00: \u8be6\u7ec6\u4ecb\u7ecd\u4e86\u9ad8\u805a\u7269Parylene, \u5305\u542b\u5176\u5236\u53d6\u52a0\u5de5\u5de5\u827a\u548cParylene\u5851\u6599\u8584\u819c\u7684\u56fe\u5f62\u754c\u9762\u3002\u4e3b\u8981\u8bb2\u89e3\u4e86Parylene\u5728\u5fae\u6db2\u4f53\u7cfb\u7edf\u8f6f\u4ef6\u7684\u8fd0\u7528, \u5305\u542b\u5fae\u9600\u3001\u5fae\u6cf5\u548c\u5fae\u5b89\u5168\u901a\u9053; \u5728\u53ef\u5d4c\u5165\u5fae\u7cfb\u7edf\u4e2d\u7684\u8fd0\u7528, \u5305\u542b\u4eba\u5de5\u8033\u8717\u548c\u89c6\u7f51\u819c\u9f3b\u5b50\u5047\u4f53\u3002\u8fd1\u671f\u7684\u7814\u7a76\u8868\u660e, \u6839\u636eParylene\u7684MEMS\u5fae\u5143\u5668\u4ef6\u5e7f\u6cdb\u8fd0\u7528\u5728\u5404\u79cd\u5404\u6837MEMS\u591a\u5b54\u7ed3\u6784\u3001\u5fae\u611f\u5e94\u5668\u548c\u5fae\u63a7\u5236\u5668\u4e0a, Parylene\u5728\u5404\u79cd\u5404\u6837\u5f7b\u5e95\u96c6\u6210\u5316\u5fae\u7cfb\u7edf\u8fd0\u7528\u91cc\u5c06\u5177\u5907\u66f4\u4e3a\u8bf1\u60d1\u7684\u5e02\u573a\u524d\u666f\u3002<\/p>\n

\u5173\u952e\u5b57: \u805a\u5bf9\u4e8c\u7532\u82ef; \u5fae\u9600; \u5fae\u6cf5; \u5fae\u5b89\u5168\u901a\u9053; \u4eba\u5de5\u8033\u8717; \u89c6\u7f51\u819c\u9f3b\u5b50\u5047\u4f53; \u5fae\u673a\u7535\u7cfb\u7edf<\/p>\n

\u4e2d\u56fe\u5206\u7c7b\u53f7: TM211; TH703\u3000\u6587\u732e\u6807\u8bc6\u7801: A\u3000\u6587\u7ae0\u7f16\u53f7: 1671- 4776 (2008) 07- 0403- 08<\/p>\n

 <\/p>\n

\u3000\u5f15\u3000\u8a00<\/p>\n

\u8fd1\u4e9b\u5e74, \u9ad8\u805a\u7269\u505a\u4e3a\u6784\u9020\u539f\u6750\u6599\u6216\u8005\u653e\u5f03\u5c42\u539f\u6750\u6599, \u5e7f\u6cdb\u8fd0\u7528\u5728MEMS\u5fae\u611f\u5e94\u5668\u548c\u5fae\u7535\u52a8\u6267\u884c\u5668\u4e0a\u3002\u5bf9\u6bd4\u4e8e\u7845\u3001\u591a\u6676\u7845\u7b49\u4f20\u7edf\u5f0f\u7684MEMS\u539f\u6750\u6599, \u9ad8\u805a\u7269\u4e0d\u4f46\u5177\u5907\u67d4\u97e7\u6027\u7684\u7279\u70b9, \u5e76\u4e14\u6709\u4e0d\u9519\u7684\u673a\u68b0\u8bbe\u5907\u7279\u70b9\u3001\u6210\u672c\u4f4e\u3001\u6613\u5236\u505a\u7b49\u4f18\u52bf\u3002\u5e38\u89c1\u5230\u7684\u9ad8\u805a\u7269\u539f\u6750\u6599\u6709PDMS\u3001SU28\u3001PMMA\u3001Parylene\u3001Polyimide \u7b49, \u5728\u5176\u4e2d, Parylene\u56e0\u5176\u4f18\u8d28\u7684\u7535\u6c14\u6027\u80fd\u65e9\u5df2\u5e7f\u6cdb\u8fd0\u7528\u5728\u7535\u5b50\u5149\u5b66\u4ea7\u4e1a\u94fe\u548c\u8bca\u7597\u4ea7\u4e1a\u94fe\u4e2d\u3002Parylene\u662f\u5728\u5e38\u6e29\u4e0b\u5806\u79ef\u800c\u6210, \u5168\u900f\u660e\u4e14\u5177\u5907\u8f83\u597d\u7684\u51b2\u51fb\u97e7\u6027, \u539f\u6750\u6599\u65e0\u5185\u5e94\u529b,\u4e0e\u7535\u5b50\u5668\u4ef6\u751f\u4ea7\u5236\u9020\u6280\u672f\u76f8\u517c\u5bb9, \u4e0e\u6b64\u540c\u65f6\u5177\u5907\u4e0d\u9519\u7684\u76f8\u6eb6\u6027\u3002\u4f34\u968f\u7740MEMS\u6280\u672f\u6027\u7684\u8fdb\u4e00\u6b65\u53d1\u5c55\u8d8b\u52bf,Parylene\u56e0\u5176\u72ec\u6709\u7684\u4f18\u52bf\u6108\u6765\u6108\u906d\u53d7MEMS\u884c\u4e1a\u7684\u4eb2\u7750, \u8fd0\u7528\u5230\u4ece\u591a\u5b54\u7ed3\u6784\u5230\u96c6\u6210\u5316\u5fae\u6db2\u4f53\u7cfb\u7edf\u4e2d\u3002\u540c<\/p>\n

\u65f6, B ioMEMS\u7684\u53d1\u5c55\u8d8b\u52bf\u89c4\u5b9a\u5e94\u7528\u76f8\u6eb6\u6027\u7684\u539f\u6750\u6599,\u8fd9\u66f4\u63a8\u52a8\u4e86Parylene\u5728\u53ef\u5d4c\u5165\u5fae\u7cfb\u7edf\u7b49Bio2MEMS\u4e0a\u7684\u8fd0\u7528\u3002<\/p>\n

\u6587\u4e2d\u5c31Parylene\u5728MEMS\u5c42\u9762\u7684\u8fd0\u7528\u5bf9\u8fd1\u4e9b\u5e74\u7684\u6210\u6548\u4f5c\u4e00\u7b80\u5355\u7684\u6c47\u603b, \u8be6\u7ec6\u4ecb\u7ecd\u4e86Parylene \u5851\u6599\u8584\u819c\u539f\u6750\u6599, \u5305\u542b\u5236\u53d6\u52a0\u5de5\u5de5\u827a\u548c\u56fe\u5f62\u754c\u9762\u65b9\u5f0f\u3002\u4e3b\u8981\u8bb2\u89e3\u4e86Parylene\u5728MEMS\u7684\u8fd0\u7528, \u5305\u62ec\u5fae\u9600\u3001\u5fae\u6cf5\u548c\u5fae\u5b89\u5168\u901a\u9053\u7b49\u5fae\u6db2\u4f53\u7cfb\u7edf\u8f6f\u4ef6\u53ca\u5176\u4eba\u5de5\u8033\u8717\u3001\u89c6\u7f51\u819c\u9f3b\u5b50\u5047\u4f53\u7b49\u53ef\u5d4c\u5165\u5fae\u7cfb\u7edf\u3002<\/p>\n

1\u3000Parylene\u8be6\u7ec6\u4ecb\u7ecd<\/p>\n

Parylene\u662f\u4e00\u79cd\u5bf9\u4e8c\u7532\u82ef\u7684\u9ad8\u805a\u7269, \u6700\u5f00\u59cb\u7531MichaelMojzesz Swarc\u57281947\u5e74\u53d1\u89c9, 1965\u5e74Wil2liam F Gorham\u53d1\u5c55\u8d8b\u52bf\u4e86\u4e00\u79cd\u884c\u5f97\u901a\u7684\u9ad8\u805a\u7269\u5806\u79ef\u7cfb\u7edf\u8f6f\u4ef6\u4ee5\u540e, \u7531\u82f1\u56fdUnion Carbide\u516c\u53f8\u5546\u4e1a\u5316\u7684\u7684\u4e00\u79cd\u65b0\u7684\u6577\u5f62\u9540\u5c42\u539f\u6750\u6599[ 1 ] \u3002Parylene\u5851\u6599\u8584\u819c\u662f\u4e00\u79cd\u65e0\u78b3\u952e\u3001\u9ad8\u7ed3\u6676\u4f53\u3001\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u8d85\u51fa50 \u4e07\u7684\u9ad8\u805a\u7269\u3002\u4f9d\u636e\u5206\u5b50\u5f0f\u7684\u4e0d\u4e00\u6837, Parylene\u53ef\u5206\u6210N\u3001C\u3001D\u3001HT\u578b\u7b49\u591a\u79cd\u4e0d\u540c, \u5173\u952e\u5dee\u522b\u53d6\u51b3\u4e8e\u5206\u5b50\u7ed3\u6784\u4e0a\u5b98\u80fd\u56e2\u4e0d\u4e00\u6837, \u5316\u5b66\u5f0f\u7684\u5dee\u5f02\u4e5f\u786e\u5b9a\u4e86\u5176\u8010\u70ed\u6027\u80fd\u548c\u7edd\u7f18\u6027\u80fd\u80fd\u7b49\u5404\u6709\u4e0d\u540c, \u56fe1\u4e3aParylene\u7684\u4e09\u79cd\u5e38\u89c1\u79cd\u7c7b\u7684\u5316\u5b66\u5f0f\u3002\u5728\u5176\u4e2d, C\u578b\u805a\u5bf9\u4e8c\u7532\u82ef( Parylene C) \u5851\u6599\u8584\u819c\u9540\u5c42\u662f\u73b0\u9636\u6bb5\u91c7\u7528\u6700\u666e\u904d\u7684\u4e00\u79cd\u3002Parylene \u5851\u6599\u8584\u819c\u5177\u5907\u9632\u6c34\u3001\u7edd\u7f18\u5c42\u3001\u6297\u8150\u8680\u3001\u76f8\u6eb6\u6027\u3001\u65e0\u9488\u773c\u9540\u5c42\u3001\u4f18\u826f\u7684\u6027\u80fd\u548c\u8010\u70ed\u6027, \u5e7f\u6cdb\u8fd0\u7528\u5728\u822a\u7a7a\u516c\u53f8\u3001\u822a\u7a7a\u822a\u5929\u3001\u519b\u7528\u3001\u7535\u5b50\u5149\u5b66\u3001\u534a\u5bfc\u4f53\u6750\u6599\u3001\u8bca\u7597\u3001\u6587\u5316\u9057\u4ea7\u4fdd\u62a4\u7b49\u884c\u4e1a, \u88681\u4e3a\u4e09\u79cd\u5e38\u89c1Parylene\u79cd\u7c7b\u7684\u9996\u8981\u7279\u70b9\u3002<\/p>\n

Parylene \u7684\u6d4b\u5b9a\u9009\u7528\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u52a0\u5de5\u5de5\u827a(CVD) , \u5176\u539f\u6750\u6599\u662f\u5bf9\u4e8c\u7532\u82ef\u73af\u4e8c\u805a\u4f53(\u4e0d\u4e00\u6837\u79cd\u7c7b\u7684Parylene\u76f8\u5339\u914d\u4e0d\u4e00\u6837\u5b98\u80fd\u56e2\u7684\u5bf9\u4e8c\u7532\u82ef\u73af\u4e8c\u805a\u4f53\u539f\u6750\u6599) \u3002\u5236\u53d6\u7684\u5806\u79ef\u5168\u8fc7\u7a0b\u5927\u81f4\u53ef\u5206\u6210\u4e09\u6b65: \u6700\u5148\u5728\u771f\u7a7a\u6cf5, 150 \u2103\u4e0b\u5c06\u56fa\u4f53\u539f\u6750\u6599\u63d0\u5347\u6210\u6c7d\u6001; \u4e8c\u805a\u4f53\u6c7d\u4f53\u8fdb\u5230\u88c2\u5316\u8154, \u5728650 \u2103\u4e0b, \u4e8c\u805a\u4f53\u7684\u5206\u5b50\u952e\u88ab\u65ad\u6389, \u88c2\u5316\u6210\u5177\u5907\u53cd\u6620\u6d3b\u529b\u7684\u5355\u4e2a; \u6700\u7ec8\u5728\u5ba4\u5185\u6e29\u5ea6\u7684\u771f\u7a7a\u6cf5\u5806\u79ef\u5ba4\u91cc, Parylene\u6c7d\u6001\u5355\u4e2a\u5728\u5143\u5668\u4ef6\u7684\u5916\u8868\u4e0a\u5806\u79ef\u5e76\u6c47\u805a\u3002\u56fe2 \u662f\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u5236\u53d6Parylene N\u7684\u6d41\u7a0b\u8868, \u5176\u4ed6\u7c7b\u578b\u7684Parylene\u5236\u53d6\u5168\u8fc7\u7a0b\u76f8\u8fd1\u3002<\/p>\n

\"1.png\"<\/p>\n

\u88681\u3000Parylene N, Parylene C\u548cParylene D\u7684\u7279\u70b9<\/p>\n

Table 1 The properties of Parylene N, Parylene C and Parylene D<\/p>\n

\"2.png\"<\/p>\n

\"3.png\"<\/p>\n

\u56fe2\u3000\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u5236\u53d6Parylene\u6d41\u7a0b\u8868<\/p>\n

Fig. 2\u3000Schematic of vapor deposition of Parylene<\/p>\n

\u5728\u5806\u79ef\u5168\u8fc7\u7a0b\u4e2d, \u6c7d\u6001\u5355\u4e2a\u8fdb\u5230\u5806\u79ef\u8154\u5ba4, \u6700\u5148\u8513\u5ef6\u81f3\u5806\u79ef\u8868\u5c42\u5468\u8fb9, \u5438\u5490\u5230\u6bcf\u4e2a\u8868\u5c42\u540e, \u9010\u6e10\u6c47\u805a\u548c\u7ed3\u6676\u4f53, \u7acb\u5373\u4ea7\u751f\u56fa\u6001, \u9632\u6b62\u4e86\u9ad8\u6548\u6db2\u76f8\u7684\u53d1\u751f, \u6e05\u9664\u4e86\u9540\u5c42\u8584\u539a\u4e0d\u5300\u79f0\u548c\u8fd9\u5176\u4e2d\u7684\u7f3a\u70b9\u3002\u6839\u636e\u5806\u79ef\u53ef\u4ee5\u6e17\u5165\u548c\u6d82\u6577\u6bd4\u8f83\u590d\u6742\u7684\u51e0\u4f55\u56fe\u7684\u7269\u4ef6, \u5305\u542b\u9510\u5229\u7684\u68f1\u8fb9\u3001\u7f1d\u9699\u91cc\u548c\u5185\u8868\u5c42, \u5b8c\u6210\u5300\u79f0\u7684\u9540\u5c42\u3002Parylene\u5851\u6599\u8584\u819c\u80fd\u5728\u5e38\u6e29\u4e0b\u6d82\u6577, \u5177\u5907\u8f83\u4f4e\u7684\u5185\u5e94\u529b, \u5168\u90e8\u64cd\u4f5c\u6d41\u7a0b\u7b80\u6613, \u5806\u79ef\u8584\u539a\u7531\u5176\u8fd0\u7528\u6240\u51b3\u7b56, \u8303\u7574\u4ece\u51e0\u5341\u4e2a\u7eb3\u7c73\u6280\u672f\u5230\u6570\u5341\u03bcm\u3002<\/p>\n

Parylene\u5728MEMS\u884c\u4e1a\u7684\u8fd0\u7528, \u5927\u591a\u6570\u505a\u4e3a\u6784\u9020\u539f\u6750\u6599\u6765\u5e94\u7528\u3002\u9488\u5bf9Parylene\u7684\u56fe\u5f62\u754c\u9762, \u4e3a\u4e86\u66f4\u597d\u5730\u4e0e\u6807\u7684\u8868\u5c42\u5fae\u751f\u4ea7\u52a0\u5de5\u548c\u4f53\u5fae\u751f\u4ea7\u52a0\u5de5\u6280\u672f\u6027\u517c\u5bb9, \u4e00\u822c\u90fd\u9009\u7528\u5e72\u6cd5\u523b\u8680\u3002\u50cf\u5927\u90e8\u5206\u9ad8\u805a\u7269\u4e00\u6837, Parylene\u9009\u7528\u6c27\u7b49\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165\u3002\u7b49\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165Parylene[ 2 ] \u3001\u53cd\u6620\u7535\u5b50\u675f\u79bb\u5b50\u6ce8\u5165( R IBE ) Parylene[ 3 ] \u3001\u53cd\u6620\u6b63\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165(R IE) Parylene[ 4 ] \u3001\u6df1\u5c42\u53cd\u6620\u6b63\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165(DR IE)Parylene[ 5 ]\u90fd\u66fe\u6709\u62a5\u5bfc\u3002J. T. C. Yeh\u7b49\u4eba[ 4 ]\u62a5\u5bfc\u4e86\u5728Parylene\u548c\u89c4\u8303\u5149\u523b\u6280\u672f\u4e2d\u95f4\u53cd\u6620\u6b63\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165\u7684\u6311\u9009\u6bd4\u8d34\u8fd1\u4e8e1\u3002B. Ratier\u7b49\u4eba[ 3 ]\u9009\u7528\u53cd\u6620\u7535\u5b50\u675f\u79bb\u5b50\u6ce8\u5165Parylene, \u53ef\u4ee5\u83b7\u5f97\u4e0d\u9519\u7684\u8868\u5c42\u5916\u8c8c, \u53ef\u662f\u5176\u79bb\u5b50\u6ce8\u5165\u901f\u5ea6\u6781\u4f4e(\u7ea61. 5 \uff5e5. 5 nm \/min ) \u3002S. Sel2varasah \u7b49\u4eba[ 6 ] \u9009\u7528\u8d85\u4f4e\u6e29( 5 \u2103 ) DR IE \u79bb\u5b50\u6ce8\u5165Parylene C, \u8f83\u5927\u79bb\u5b50\u6ce8\u5165\u901f\u5ea6\u505a\u52301. 7 \u03bcm \/min, \u6df1\u5bbd\u6bd4\u505a\u52308\u22361\u3002J. D. Zahn\u7b49\u4eba[ 7 ]\u62a5\u5bfc\u4e86\u7528\u6c27\u505a\u4e3a\u79bb\u5b50\u6ce8\u5165\u6c7d\u4f53\u3001C4 F8 \u505a\u4e3a\u949d\u5316\u6c7d\u4f53\u79bb\u5b50\u6ce8\u5165PMMA\u53ef\u505a\u5230\u6df1\u5bbd\u6bd4\u4e3a20\u22361\u3002\u6839\u636e\u8fd9\u79cd\u7d50\u679c, \u53ef\u4ee5\u8fd0\u7528\u540c\u6837\u7684\u65b9\u5f0f\u5373\u9009\u7528o2\u548c\u949d\u5316\u6c7d\u4f53\u7b49\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165Parylene,\u8fdb\u800c\u5f97\u5230\u5177\u5907\u975e\u5e38\u597d\u5916\u8c8c\u7684Parylene\u7384\u5999\u5bbd\u6bd4\u6784\u9020\u3002<\/p>\n

2\u3000Parylene\u5728MEMS\u7684\u8fd0\u7528<\/p>\n

Parylene\u5728MEMS\u884c\u4e1a\u7684\u5e94\u7528\u9886\u57df\u572890 \u65f6\u4ee3\u672b\u671f\u83b7\u5f97\u4e86\u8fc5\u901f\u7684\u53d1\u5c55\u8d8b\u52bf, Parylene\u56e0\u4e3a\u5176\u72ec\u7279\u7684\u4f18\u52bf,\u5728\u5fae\u5143\u5668\u4ef6\u7684\u5236\u505a\u4e2d\u505a\u4e3a\u6784\u9020\u539f\u6750\u6599\u5e94\u7528, \u5982\u6839\u636eParylene\u7684\u52a0\u901f\u5ea6\u4f20\u611f\u5668[ 8 – 9 ]\u548c\u773c\u7403\u6db2\u4f4d\u4f20\u611f\u5668[ 10 ]\u7b49,\u4e5f\u662f\u6709\u62a5\u5bfc\u5c06Parylene \u89e3\u51b3\u540e\u505a\u4e3a\u820d\u5f03\u5c42\u5e94\u7528[ 11 ] \u3002\u4e0b\u8fb9, \u5173\u952e\u5bf9Parylene\u505a\u4e3a\u6784\u9020\u539f\u6750\u6599\u5728\u5fae\u6db2\u4f53\u7cfb\u7edf\u548c\u53ef\u5d4c\u5165\u7cfb\u7edf\u8f6f\u4ef6\u4e24\u5c42\u9762\u7684\u8fd0\u7528\u4f5c\u4e00\u8be6\u7ec6\u4ecb\u7ecd\u3002<\/p>\n

2. 1\u3000\u5fae\u6db2\u4f53\u7cfb\u7edf\u8f6f\u4ef6<\/p>\n

\u5fae\u6db2\u4f53\u7cfb\u7edf\u8f6f\u4ef6\u662fMEMS\u7684\u4e00\u4e2a\u5173\u952e\u4e00\u90e8\u5206, \u8fd1\u4e9b\u5e74\u4f34\u968f\u7740\u751f\u7269\u79d1\u5b66\u7684\u53d1\u5c55\u8d8b\u52bf, \u8fdb\u4e00\u6b65\u589e\u8fdb\u4e86\u5fae\u6db2\u4f53\u7cfb\u7edf\u8f6f\u4ef6\u7684\u8fc5\u901f\u53d1\u5c55\u8d8b\u52bf, \u6839\u636e\u5fae\u751f\u4ea7\u52a0\u5de5\u5236\u4f5c\u5de5\u827a\u7684\u5fae\u6db2\u4f53\u5143\u5668\u4ef6,\u5e7f\u6cdb\u8fd0\u7528\u4e8e\u751f\u7269\u79d1\u5b66\u884c\u4e1a, \u5982\u5c11\u91cf\u914d\u53d1\u3001\u5c11\u91cf\u6ce8\u5165\u3001\u5fae\u6570\u636e\u5206\u6790\u7cfb\u7edf\u3001\u96c6\u6210ic\u8bd5\u9a8c\u5ba4\u7b49\u3002Parylene\u56e0\u4e3a\u5176\u8f83\u4f4e\u7684\u6768\u6c0f\u6a21\u91cf\u548c\u6db2\/\u6c14\u8986\u76d6\u7387\u3001\u65e0\u5185\u5e94\u529b\u5300\u79f0\u9644\u7740\u6027\u548c\u6709\u673a\u5316\u5b66\u53ef\u5851\u6027, \u5e7f\u6cdb\u8fd0\u7528\u5728\u5fae\u6db2\u4f53\u5143\u5668\u4ef6\u4e2d, \u5982Parylene \u5fae\u9600[ 12 – 13 ] \u3001\u8d28\u8c31\u5206\u6790\u7684Parylene \u5fae\u55b7\u5934[ 14 ] \u3001\u54cd\u5e94\u5f0f\u6b65\u9aa4\u64cd\u7eb5\u7684Parylene \u6251\u7ffc[ 15 ] \u3001Parylene\u7535\u6cf3\u539f\u7406\u5fae\u5b89\u5168\u901a\u9053[ 16 ] \u3001Parylene\u6c14\u76f8\u8272\u8c31\u67f1[ 17 ] \u3001Parylene\u5fae\u6cf5[ 18 ]\u7b49\u3002\u4e0b\u8fb9\u5173\u952e\u5bf9\u6839\u636eParylene\u7684\u5fae\u9600\u3001\u5fae\u6cf5\u3001\u5fae\u5b89\u5168\u901a\u9053\u5143\u5668\u4ef6\u5728\u8fd1\u4e9b\u5e74\u7684\u53d1\u5c55\u8d8b\u52bf\u4f5c\u4e00\u8be6\u7ec6\u4ecb\u7ecd\u3002<\/p>\n

2. 1. 1\u3000\u5fae\u9600<\/p>\n

\u95f8\u9600\u662f\u5b8c\u6210\u6d41\u4f53\u63a7\u5236\u7684\u57fa\u672c\u4e0a\u5143\u5668\u4ef6, \u4f20\u7edf\u5f0f\u7684\u5c0f\u578b\u9600\u53ef\u4ee5\u5206\u6210\u5904\u4e8e\u88ab\u52a8\u9600\u548c\u79ef\u6781\u9600\u4e8c\u79cd\u3002X. Yang\u7b49\u4eba[ 19 ]\u505a\u6210\u4e86\u9009\u7528\u70ed\u63a8\u52a8\u7684\u5fae\u9600, \u57fa\u672c\u4e0a\u6784\u9020\u5982\u4e0b\u56fe3\u3002\u5b83\u75314\u4e2a\u4e00\u90e8\u5206\u6784\u6210: \u9ad8\u538b\u95f8\u9600\u3001\u6709\u673a\u7845\u6811\u8102\u5851\u80f6\/Parylene\u5851\u6599\u8584\u819c\u3001\u52a0\u6e29\u96c6\u6210ic\u548c\u540e\u4fa7\u677f\u3002\u9ad8\u538b\u95f8\u9600\u7684\u5236\u5b9a\u53ef\u4ee5\u907f\u514d\u9897\u7c92\u9020\u6210\u7684\u6cc4\u9732, \u5de5\u4f5c\u4e2d\u6db2\u6001\u4e3aFluori2nertTM PF25060\u3002\u5fae\u9600\u5728\u8fdb\u53e3\u7684\u5de5\u4f5c\u538b\u529b\u4e3a165 kPa\u65f6, 61mW\u7684\u8f93\u51fa\u529f\u7387\u53ef\u4ee5\u9020\u6210N2 1. 1 L \/min\u7684\u6d41\u52a8\u901f\u5ea6\u3002\u5728\u8fdb\u53e3\u7684\u5de5\u4f5c\u538b\u529b\u4e3a483 kPa\u65f6, \u5fae\u9600\u6ca1\u6709\u7684\u6bc1\u574f\u3002\u5728\u8f93\u5165\u529f\u7387\u4e3a100 mW\u65f6, \u819c\u9020\u6210\u4e86\u8d85\u8fc7120\u03bcm\u7684\u504f\u79fb\u3002\u7531\u6709\u673a\u7845\u6811\u8102\u5851\u80f6\u548cParylene\u5851\u6599\u8584\u819c\u6784\u6210\u7684\u4e00\u6c27\u5316\u6c2e\u5408\u9176\u819c, \u5408\u7406\u5730\u907f\u514d\u4e86\u84b8\u6c7d\u7684\u6cc4\u9732, \u4e0e\u6b64\u540c\u65f6\u786e\u4fdd\u4e86\u5851\u6599\u8584\u819c\u5177\u5907\u6bd4\u8f83\u5927\u7684\u56db\u51b2\u7a0b\u3002<\/p>\n

\"4.png\"<\/p>\n

\u56fe3\u3000\u70ed\u63a8\u52a8\u5fae\u9600\u7684\u622a\u9762\u56fe<\/p>\n

Fig. 3\u3000Cross2section of the thermopneumatic microvalve<\/p>\n

\u7531\u52a0\u5dde\u7406\u5de5Y. C. Tai\u7b49\u4eba[ 20 – 21 ]\u7814\u5236\u5f00\u53d1\u4e86\u4e8c\u79cd\u6839\u636eParylene \u5851\u6599\u8584\u819c\u7684\u6027\u80fd\u5353\u8d8a\u9006\u6b62\u9600\u3002\u7b2c\u4e00\u79cd\u4e3aParylene\u6b6a\u66f2\u819c\u5c0f\u578b\u9006\u6b62\u9600(\u56fe4 ) \u3002\u5fae\u9600\u5177\u5907\u6b6a\u66f2\u578b\u7684Parylene\u819c, \u5f53\u6709\u6db2\u4f53\u987a\u6c34\u65f6, Parylene\u5851\u6599\u8584\u819c\u4f38\u51fa, \u5bb9\u8bb8\u6db2\u4f53\u6839\u636e; \u5f53\u6709\u6db2\u4f53\u5012\u6d41\u65f6,Parylene\u5851\u6599\u8584\u819c\u5c01\u6b7b\u4e86\u5b89\u5168\u901a\u9053\u963b\u62e6\u5176\u6d41\u52a8\u6027\u3002\u8be5\u6784\u9020\u7684\u5fae\u9600\u987a\u6c34\u6253\u7834\u5de5\u4f5c\u538b\u529b\u4f4e\u4e8e0. 5 kPa, \u5012\u6d41\u7684\u529d\u963b\u5de5\u4f5c\u538b\u529b\u8fbe600 kPa\u4ee5\u4e0a, \u4e0e\u6b64\u540c\u65f6\u5177\u5907\u8f83\u4f4e\u7684\u53cd\u65b9\u5411\u6cc4\u9732, \u7279\u6027\u5f88\u597d\u3002\u56e0\u4e3aParylene\u8f83\u5c0f\u7684\u6768\u6c0f\u6a21\u91cf, \u9020\u6210\u4e86\u5f88\u5927\u7684\u5f62\u53d8, \u57fa\u672c\u4e0a\u53ef\u4ee5\u5ffd\u89c6\u7531\u5851\u6599\u8584\u819c\u9020\u6210\u7684\u6db2\u4f53\u7279\u6027\u963b\u6297\u3002<\/p>\n

\"5.png\"<\/p>\n

\u56fe4\u3000\u65b0\u5f0fParylene\u6b6a\u66f2\u819c\u5c0f\u578b\u6b62\u56de\u9600\u539f\u7406\u56fe<\/p>\n

Fig. 4\u3000Schematics of a twist2up Parylene membrane micro check valve<\/p>\n

\u7b2c\u4e8c\u79cd\u4e3a\u5355\u8def\u5e38\u5f00\u5e38\u95ed\u5fae\u9006\u6b62\u9600(\u56fe5 ) , \u5168\u90e8\u5fae\u9600\u548c\u5fae\u5b89\u5168\u901a\u9053\u5168\u662f\u7531Parylene C\u505a\u6210\u7684, \u5176\u6784\u9020\u4e3a\u5728\u73af\u5f62\u9ad8\u538b\u95f8\u9600\u4e0a\u7684\u4e00\u4e2a\u5706\u5f62\u7684\u5bc6\u5c01\u6027\u677f\u3002\u5bc6\u5c01\u6027\u677f\u662f\u786e\u5b9a\u5728\u5b50\u8154\u5851\u6599\u8584\u819c\u7684\u9876\u7aef\u6838\u5fc3, \u56e0\u4e3a\u5927\u6c14\u538b\u5f3a\u4f7f\u5b50\u8154\u7f29\u5c0f\u5230\u5e95\u7aef, \u8fdb\u800c\u5f97\u5230\u5fae\u9600\u7684\u5408\u95ed\u65b9\u5f0f\u3002\u8fd9\u7c7b\u65b0\u5f0f\u7684\u5b50\u8154\u6784\u9020\u662f\u6839\u636e\u653e\u5f03\u5c42\u6784\u9020\u7684\u91ca\u653e\u51fa\u6765\u4e0e\u5728\u771f\u7a7a\u6cf5\u6807\u51c6\u4e0bParylene\u5851\u6599\u8584\u819c\u7684\u6db2\u76f8\u5806\u79ef\u6765\u5b8c\u6210\u7684\u3002\u6839\u636e\u51cf\u5c11\u5bc6\u5c01\u6027\u677f\u548c\u9ad8\u538b\u95f8\u9600\u7684\u76f8\u4ea4\u603b\u9762\u79ef\u548c\u78c1\u63a7\u6e85\u5c04\u91d1\u5c5e\u6750\u6599\u91d1\u6765\u51cf\u5c11\u6eda\u52a8\u6469\u64e6\u529b, \u8fdb\u800c\u51cf\u5c11\u987a\u6c34\u6253\u7834\u5de5\u4f5c\u538b\u529b\u3002\u636e\u62a5\u9053, \u6b64\u7c7b\u6784\u9020\u7684\u5fae\u9600\u7684\u987a\u6c34\u6253\u7834\u5de5\u4f5c\u538b\u529b\u4e3a20\uff5e40 kPa, \u5728\u5012\u6d41\u5de5\u4f5c\u538b\u529b\u4e3a270 kPa\u4e5f\u4e0d\u4f1a\u53d1\u751f\u7531\u6b64\u53ef\u89c1\u7684\u6cc4\u6f0f\u72b6\u51b5\u3002<\/p>\n

\"6.png\"<\/p>\n

\u56fe5\u3000\u5355\u8def\u5e38\u5f00\u5e38\u95ed\u5fae\u9006\u6b62\u9600\u5e73\u9762\u56fe<\/p>\n

Fig. 5\u3000Schematic of normally closed in2channel,Parylene check valve<\/p>\n

K. S. Ryu\u7b49\u4eba[ 22 ]\u53d1\u5c55\u8d8b\u52bf\u4e86\u4e00\u79cd\u53ef\u7528\u6c34\u84b8\u6c7d\u63a8\u52a8\u548c\u9759\u7535\u611f\u5e94\u63a8\u52a8\u7684\u5fae\u9600, \u5fae\u9600\u5851\u6599\u8584\u819c\u9009\u7528Parylene\u505a\u6210, \u76f8\u5bf9\u6027\u4e8e\u4ec5\u6709\u9759\u7535\u611f\u5e94\u63a8\u52a8\u7684\u5fae\u9600, \u63a8\u52a8\u5de5\u4f5c\u7535\u538b\u4ece\u5e45\u5ea6\u503c180 V\u964d\u81f345 V, \u6839\u636e\u63d0\u5347\u5de5\u4f5c\u7535\u538b\u548c\u51cf\u5c11\u7535\u7ea7\u4e2d\u7684\u95f4\u9694\u53ef\u4ee5\u5408\u7406\u5730\u51cf\u5c11\u53cd\u65b9\u5411\u6cc4\u9732\u3002\u56fe6\u4e3a\u5236\u505a\u7684\u5fae\u9600\u6846\u67b6\u56fe\u3002<\/p>\n

\"7.png\"<\/p>\n

\u56fe6\u3000\u6c34\u84b8\u6c7d\u548c\u9759\u7535\u611f\u5e94\u63a8\u52a8\u5fae\u9600\u6846\u67b6\u56fe<\/p>\n

Fig. 6\u3000Schematic of the microvalve with thermopneumaticand electrostatic actuation<\/p>\n

2. 1. 2\u3000\u5fae\u6cf5<\/p>\n

\u5fae\u578b\u6cf5\u662f\u5fae\u6d41\u52a8\u6027\u7cfb\u7edf\u8f6f\u4ef6\u7684\u4e00\u4e2a\u5173\u952e\u5b9e\u884c\u5143\u5668\u4ef6\u3002\u4f9d\u636e\u5176\u6709\u6ca1\u6cd5\u52a8\u9600\u7247, \u5fae\u578b\u6cf5\u53ef\u5206\u6210\u6709\u9600\u5fae\u578b\u6cf5\u548c\u65e0\u9600\u5fae\u578b\u6cf5\u3002<\/p>\n

G. H. Feng\u7b49\u4eba[ 23 ]\u5236\u505a\u4e86\u4e00\u79cd\u8282\u6d41\u9600\u578b\u538b\u7535\u5f0f\u63a8\u52a8\u5fae\u6cf5, \u6839\u636e\u77f3\u8721\u6210\u5f62\u6280\u672f\u6027\u5c06\u8188\u819c\u8bbe\u8ba1\u65b9\u6848\u4e3a\u5f27\u5f62, \u4e0e\u6b64\u540c\u65f6\u5fae\u9600\u548c\u8188\u819c\u7531\u9ad8\u805a\u7269Parylene\u505a\u6210, \u786e\u4fdd\u4e86\u8188\u819c\u6bd4\u8f83\u5927\u7684\u53d8\u5f62\u4ee5\u9020\u6210\u5f88\u5927\u7684\u6c34\u4e0b\u6df7\u51dd\u571f\u9ad8\u6548\u7387, \u5176\u6784\u9020\u5982\u4e0b\u56fe7\u3002\u5fae\u6cf5\u9009\u7528\u538b\u7535\u5f0fZnO\u5851\u6599\u8584\u819c\u6765\u63a8\u52a8Parylene\u5f27\u5f62\u8188\u819c, \u4e3a\u6b64\u63a8\u52a82\u4e2aParylene\u5fae\u9006\u6b62\u9600\u6765\u5b8c\u6210\u6c34\u4e0b\u6df7\u51dd\u571f\u6db2\u4f53\u3002\u8bd5\u9a8c\u8868\u660e, \u8be5\u6cf5\u5177\u5907\u8f93\u51fa\u529f\u7387\u4f4e(\u5982\u9488\u5bf95. 5 mm<\/p>\n

\u76f4\u5f91\u7684\u8188\u819c, \u8f93\u51fa\u529f\u7387\u572830 kHz, \u6c34\u4e0b\u6df7\u51dd\u571f\u6c34\u901f\u7387\u4e3a1\u03bcL \/min, \u8f93\u51fa\u529f\u7387\u4ec5\u4e3a1 mW) \u548c\u5927\u6279\u91cf\u751f\u4ea7\u52a0\u5de5\u7684\u4f18\u52bf, \u9488\u5bf9\u56fa\u652f\u6881\u5f52\u56ed\u7530\u5c45\u5176\u4e00\u9600\u7684\u5fae\u6cf5, \u5728400 Pa\u65f6, \u6709\u8f83\u5c0f\u7684\u6cc4\u9732\u9020\u6210, \u800c\u9488\u5bf9\u6865\u5f52\u56ed\u7530\u5c45\u5176\u4e00\u9600\u7684\u5fae\u6cf5, \u5728\u53cd\u65b9\u5411\u5de5\u4f5c\u538b\u529b\u4e3a800 Pa\u65f6, \u51e0\u4e4e\u6c92\u6709\u6cc4\u9732\u9020\u6210\u3002<\/p>\n

\"8.png\"<\/p>\n

\u56fe7\u3000\u8282\u6d41\u9600\u578b\u538b\u7535\u5f0f\u63a8\u52a8\u5fae\u6cf5\u5256\u89c6\u56fe<\/p>\n

Fig. 7\u3000Cross2sectional view of a p iezoelectric micropumpwith one2way Parylene valves<\/p>\n

C. L. Chen\u7b49\u4eba[ 24 ]\u5728Parylene\u886c\u5e95\u4e0a\u5236\u505a\u7684\u6db2\u538b\u63a8\u6746\u9a71\u52a8\u529b( EHD) \u5fae\u6cf5, \u7535\u7ea7\u9009\u7528\u952f\u9f7f\u72b6, \u95f4\u9694\u4e3a20\u03bcm, \u7535\u7ea7\u603b\u5bbd\u4e3a10 \u03bcm, \u5fae\u5b89\u5168\u901a\u9053\u9009\u7528SU28 \u5236\u505a, \u6784\u9020\u59828\u3002\u8bd5\u9a8c\u8868\u660e, \u4ee5\u4e19\u916e\u4e3a\u5de5\u4f5c\u4e2d\u6db2\u6001, \u5f53\u589e\u52a0\u5de5\u4f5c\u7535\u538b\u4e3a20 V\u65f6, \u6db2\u6001\u6d41\u52a8\u901f\u5ea6\u4e3a190 mm \/min, \u5728\u589e\u52a0\u5de5\u4f5c\u7535\u538b\u4e3a30 V\u65f6, \u6c34\u4e0b\u6df7\u51dd\u571f\u5de5\u4f5c\u538b\u529b\u4e3a490 Pa,\u4e0e\u6b64\u540c\u65f6\u5177\u5907\u8f83\u4f4e\u7684\u8f93\u51fa\u529f\u7387\u3002<\/p>\n

\"9.png\"<\/p>\n

\u56fe8\u3000\u6db2\u538b\u63a8\u6746\u9a71\u52a8\u529b\u5fae\u6cf5\u6846\u67b6\u56fe<\/p>\n

Fig. 8\u30003D schematic of the flexible electrohydrodynamic micropump<\/p>\n

2. 1. 3\u5fae\u5b89\u5168\u901a\u9053<\/p>\n

H. S. Noh\u7b49\u4eba[ 25 ]\u9009\u7528Parylene\u7684\u70ed\u952e\u5408\u52a0\u5de5\u5de5\u827a\u6765\u5236\u505aParylene\u5fae\u5b89\u5168\u901a\u9053, \u6700\u5148\u9009\u7528\u6df1\u53cd\u6620\u6b63\u79bb\u5b50\u79bb\u5b50\u6ce8\u5165\u5236\u505a\u7845\u5fae\u5b89\u5168\u901a\u9053, \u968f\u540e\u5806\u79efParylene C\u5728\u7845\u5fae\u5b89\u5168\u901a\u9053\u4e0a, \u4e0e\u6b64\u540c\u65f6Parylene\u5806\u79ef\u5728\u7eaf\u94a2\u7247\u4e0a, \u5728\u5176\u4e0a\u5236\u505a\u91d1\u7535\u7ea7, \u6700\u7ec8\u5728200 \u2103\u771f\u7a7a\u5e72\u71e5\u5668\u5185\u5c06Parylene\u5f15\u7ebf\u952e\u5408, \u5265\u5f00\u7eaf\u94a2\u7247\u53ca\u5176\u9009\u7528lift2off\u52a0\u5de5\u5de5\u827a\u91ca\u653e\u51fa\u6765Parylene \u5fae\u5b89\u5168\u901a\u9053\u3002\u7528\u8fd9\u7c7b\u65b9\u5f0f, \u6839\u636e\u64cd\u7eb5Parylene\u5806\u79ef\u7684\u8584\u539a,\u53ef\u4ee5\u5728\u540c\u6837\u7684\u7845\u6a21\u5fae\u5b89\u5168\u901a\u9053\u4e0a\u5236\u505a\u4e0d\u4e00\u6837\u6df1\u5bbd\u6bd4\u7684Parylene\u5fae\u5b89\u5168\u901a\u9053, \u4e0e\u6b64\u540c\u65f6\u4e5f\u80fd\u5236\u505a\u53cc\u5c42\u6784\u9020\u5fae\u5b89\u5168\u901a\u9053(\u56fe9 ) \u3002\u56fe10 \u662f\u8fd0\u7528\u6b64\u6280\u672f\u5236\u505a\u7684\u5404\u79cd\u5404\u6837\u5fae\u5b89\u5168\u901a\u9053(\u5168\u90e8\u5fae\u5b89\u5168\u901a\u9053\u7684\u516c\u79f0\u76f4\u5f84\u4e3a8 0 \u03bcm \u5bbd\u30015 0 \u03bcm \u6df1\u3001\u58c1\u539a\u4e3a1 0 \u03bcm) \u3002\u6839\u636e\u6b64\u65b9\u5f0f, \u53ef\u4ee5\u8fc5\u901f\u6210\u672c\u4f4e\u5730\u5236\u505aParylene\u5fae\u5b89\u5168\u901a\u9053, \u5e76\u6839\u636e\u91ca\u653e\u51fa\u6765\u52a0\u5de5\u5de5\u827a\u53ef\u4ee5\u5f97\u5230\u6709\u6548\u7684Parylene\u5fae\u5b89\u5168\u901a\u9053, \u4e0e\u6b64\u540c\u65f6\u53ef\u4ee5\u591a\u6b21\u91cd\u590d\u4f7f\u7528\u7845\u6a21,\u666e\u904d\u7528\u4ee5\u6c14\u76f8\u8272\u8c31\u5206\u6790\u7b49\u5fae\u6db2\u4f53\u7ed3\u6784\u5316\u5206\u6790\u4e2d\u3002<\/p>\n

\"10.png\"<\/p>\n

\n

2. 2\u3000\u53ef\u5d4c\u5165\u5fae\u7cfb\u7edf<\/p>\n

Parylene\u505a\u4e3a\u53ef\u5d4c\u5165\u539f\u6750\u6599, \u4e3b\u8981\u662f\u56e0\u4e3a\u539f\u6750\u6599\u81ea\u8eab\u4f18\u826f\u7684\u76f8\u6eb6\u6027\u3002\u751f\u7269\u5185\u7e41\u6742\u7684\u8840\u6db2\u81ea\u7136\u73af\u5883,\u4f1a\u6d78\u8680\u5927\u90e8\u5206\u7684MEMS\u548c\u7535\u5b50\u5149\u5b66\u539f\u6750\u6599, \u6b8a\u4e0d\u77e5\u5374\u4e0d\u5bb9\u6613\u5371\u5bb3Parylene, \u8fd9\u4e5f\u662f\u56e0\u4e3aParylene\u4e0d\u5bb9\u6613\u5728\u8840\u6db2\u81ea\u7136\u73af\u5883\u4e0b\u88ab\u6c34\u6eb6\u89e3\u3002Parylene\u505a\u4e3a\u5d4c\u5165\u5fae\u7535\u6781\u5217\u9635\u548c\u5fae\u5143\u5668\u4ef6\u7684\u5305\u88c5\u5236\u54c1, \u8bd5\u9a8c\u62a5\u5bfc\u5177\u5907\u4e0d\u9519\u7684\u6f5c\u5728\u6027\u8d1f\u8f7d\u548c\u751f\u7269\u4f53\u53ef\u9760\u6027, \u53ef\u4ee5\u957f\u671f\u6027\u5d4c\u5165\u751f\u7269\u4e2d, \u9664\u6b64\u4e4b\u5916, \u56e0\u4e3a\u5176\u4f18\u826f\u7684\u9632\u900f\u6c34\u6027, \u53ef\u4ee5\u6709\u6548\u5730\u7ef4\u62a4\u5fae\u5143\u5668\u4ef6\u4e0d\u88ab\u6d78\u8680[ 26 – 29 ] \u3002\u4e0e\u6b64\u540c\u65f6, Parylene\u5bf9\u4f53\u7ec6\u80de\u6709\u8f83\u5c0f\u7684\u6bd2\u526f\u4f5c\u7528,\u8fd9\u4f7f\u5b83\u6709\u53ef\u80fd\u53d8\u6210\u7ec6\u80de\u751f\u957f\u7684\u670d\u52a1\u5e73\u53f0[ 30 – 31 ] \u3002Parylene\u56e0\u5176\u51fa\u8272\u7684\u76f8\u6eb6\u6027(\u82f1\u56fdFDA V I\u7ea7\u9a8c\u8bc1) \u548c\u751f\u7269\u4f53\u53ef\u9760\u6027, \u505a\u4e3a\u8eab\u4f53\u5185\u957f\u671f\u6027\u5d4c\u5165\u5e94\u7528\u7684\u751f\u7269\u4f53\u533b\u7528\u6750\u6599, \u65e9\u5df2\u88ab\u7528\u4ee5\u5fc3\u8840\u7ba1\u652f\u67b6\u3001\u8111\u7535\u7ea7\u3001\u690d\u5165\u5f0f\u611f\u5e94\u5668\u548c\u9ad8\u9891\u7387\u624b\u672f\u5200\u7247\u7b49\u5c0f\u578b\u7535\u5b50\u5668\u4ef6\u533b\u7597\u8bbe\u5907\u548c\u53ef\u5d4c\u5165\u5fae\u7cfb\u7edf\u4e2d\u3002<\/p>\n

2. 2. 1\u3000\u4eba\u5de5\u8033\u8717<\/p>\n

\u4eba\u5de5\u8033\u8717\u662f\u7531\u5d4c\u5165\u8eab\u4f53\u7684\u7535\u7ea7\u3001\u4fe1\u53f7\u63a5\u6536\u5668\u53ca\u5176\u5e26\u4e0a\u5728\u8eab\u4f53\u5916\u7684\u8bed\u8a00CPU\u3001\u8bdd\u7b52\u53ca\u65e0\u7ebf\u7535\u53d1\u5c04\u5668\u7b49\u6784\u6210\u3002\u5916\u90e8\u54cd\u58f0\u7531\u8bdd\u7b52\u63a5\u53d7\u8f6c\u5316\u6210\u7535\u5b50\u4fe1\u53f7\u540e\u4f20\u8f93\u81f3\u8bed\u8a00CPU\u5c06\u6570\u636e\u4fe1\u53f7\u53d8\u5927\u3001\u8fc7\u8651, \u5e76\u7531\u65e0\u7ebf\u7535\u53d1\u5c04\u5668\u4f20\u8f93\u5230\u4fe1\u53f7\u63a5\u6536\u5668, \u518d\u9020\u6210\u8109\u51b2\u7535\u6d41\u4f20\u8f93\u5230\u76f8\u5bf9\u5e94\u5d4c\u5165\u5fae\u7535\u6781, \u8fdb\u800c\u9020\u6210\u542c\u4ea4\u611f\u795e\u7ecf\u6fc0\u52a8\u5e76\u5c06\u54cd\u58f0\u4fe1\u606f\u5185\u5bb9\u4f20\u627f\u4eba\u8111, \u4f7f\u5931\u806a\u75c5\u4eba\u518d\u6b21\u5f97\u5230\u542c\u89c9\u7cfb\u7edf\u3002\u4eba\u5de5\u8033\u8717\u662f\u6700\u5f00\u59cb\u8fd0\u7528\u53d6\u5f97\u6210\u529f\u7684\u53ef\u5d4c\u5165\u5143\u5668\u4ef6\u3002\u636e\u8c03\u67e5, \u5168\u4e16\u754c\u5982\u4eca\u7ea6\u67093\u4e07\u591a\u5143\u5931\u806a\u75c5\u4eba\u5e94\u7528\u4e86\u4eba\u5de5\u8033\u8717, \u4e0e\u6b64\u540c\u65f6, \u4eba\u5de5\u8033\u8717\u6280\u672f\u6027\u4e5f\u5728\u4e0d\u65ad\u53d1\u5c55\u8d8b\u52bf\u548c\u5065\u5168\u3002<\/p>\n

J. B. Wang\u7b49\u4eba[ 32 ]\u5236\u505a\u4e86\u9009\u7528Parylene C\u5c01\u88c5\u5f62\u5f0f\u7684\u7528\u4ee5\u4eba\u5de5\u8033\u8717\u5d4c\u5165\u7684\u7535\u7ea7\u5217\u9635, \u56e0\u4e3aParylene C\u8f83\u4f4e\u7684\u6768\u6c0f\u6a21\u91cf, \u4fc3\u4f7f\u7535\u7ea7\u63a2\u5934\u5177\u5907\u4e0d\u9519\u7684\u5f3a\u5ea6\u548c\u5ef6\u5c55\u6027, \u4e0e\u6b64\u540c\u65f6\u53ef\u6839\u636e\u8c03\u8282\u7845\u886c\u5e95\u7684\u8584\u539a\u6765\u8c03\u6574\u7535\u7ea7\u7684\u67d4\u97e7\u5ea6, \u56fe11 \u4e3a\u5236\u53d6\u7684Parylene\u5305\u56ca\u7684\u7845\u5fae\u7535\u6781\u5217\u9635(\u63a2\u5934\u81c2\u4e3a8 mm\u4e14\u5206\u62108\u4e2a\u4e00\u90e8\u5206, \u6bcf\u4e00\u4e2a\u90e8\u4f4d\u67091\u4e2a\u7535\u7ea7\u70b9) \u3002Parylene\u6240\u5177\u5907\u7684\u900f\u5149\u6027, \u4fc3\u4f7f\u5728\u5d4c\u5165\u5b9e\u9a8c\u91cc\u80fd\u975e\u5e38\u597d\u5730\u68c0\u6d4b\u63a2\u5934\u5d4c\u5165\u6df1\u5c42, \u4e0e\u6b64\u540c\u65f6,\u7535\u7ea7\u88abParylene \u5305\u56ca, \u5373\u4f7f\u7535\u7ea7\u7c89\u788e, \u8868\u5c42Parylene\u4e5f\u5c06\u6b8b\u7247\u8fde\u5728\u4e00\u8d77, \u8fdb\u800c\u964d\u4f4e\u624b\u672f\u6cbb\u7597\u635f\u5bb3\u548c\u5d4c\u5165\u635f\u5bb3\u3002\u5168\u90e8\u8bbe\u5907\u96c6\u6210\u5316\u4e86\u76f8\u4f4d\u4f20\u611f\u5668\u548cParylene\u5305\u56ca\u7684\u540c\u8f74\u7535\u7f06, \u8bd5\u9a8c\u8868\u660e, \u8be5\u8bbe\u5907\u53ef\u4ee5\u63d0\u5347\u4eba\u5de5\u8033\u8717\u58f0\u97f3\u8bc6\u522b\u5de5\u4f5c\u80fd\u529b\u548c\u90e8\u4f4d\u7684\u7cbe\u786e\u6027\u3002J. Wu\u7b49\u4eba[ 33 ]\u5728\u5236\u505a\u591a\u8def\u542c\u89c9\u7cfb\u7edf\u9f3b\u5b50\u5047\u4f53\u65f6, \u53d8\u539a\u5ea6\u7684\u795e\u7ecf\u7cfb\u7edf\u523a\u6fc0\u6027\u7535\u7ea7\u5217\u9635\u4e5f\u9009\u7528Parylene\u505a\u4e3a\u523a\u6fc0\u6027\u7535\u7ea7\u7684\u5305\u56ca\u539f\u6750\u6599, \u8fdb\u800c\u63d0\u5347\u5d4c\u5165\u5143\u5668\u4ef6\u7684\u76f8\u6eb6\u6027\u3002<\/p>\n

\"13.png\"<\/p>\n

\u56fe11\u3000\u4ee5Parylene\u5305\u56ca\u7684\u7845\u7535\u7ea7\u5217\u9635<\/p>\n

Fig. 11\u3000The front and back sides of a Parylene2coveredsilicon electrode array<\/p>\n

2. 2. 2\u3000\u89c6\u7f51\u819c\u9f3b\u5b50\u5047\u4f53<\/p>\n

\u5168\u4e16\u754c\u89c6\u89c9\u6548\u679c\u6b8b\u75be\u8005\u67091. 4\u4ebf\u4eba, \u5728\u5176\u4e2d4 500\u4e07\u4e3a\u89c6\u969c, \u5168\u7403\u5747\u503c\u6bcf5 s\u53d1\u751f\u4e00\u4e2a\u89c6\u969c, \u53cc\u76ee\u5931\u660e\u65e9\u5df2\u662f\u5371\u5bb3\u4eba\u4eec\u751f\u6d3b\u54c1\u8d28\u6700\u660e\u663e\u7684\u4e00\u79cd\u6b8b\u5e9f\u3002\u539f\u53d1\u89c6\u7f51\u819c\u9ed1\u8272\u7d20\u8f6c\u6027( retinitis p igmentosa, RP) \u53ca\u8001\u5e74\u9ec4\u6591\u75c5\u53d8( age2related macular degeneration,ARMD) \u56e0\u4e3a\u89c6\u7f51\u819c\u8868\u5c42\u6e10\u884c\u6027\u8f6c\u6027, \u9020\u6210\u5149\u611f\u53d7\u5668\u8870\u9000, \u662f\u9020\u6210\u53cc\u76ee\u5931\u660e\u7684\u9996\u8981\u7f18\u6545\u3002\u8bd5\u9a8c\u8868\u660e, \u5373\u4f7f\u539f\u53d1\u89c6\u7f51\u819c\u9ed1\u8272\u7d20\u8f6c\u6027\u548c\u8001\u5e74\u9ec4\u6591\u75c5\u53d8\u9020\u6210\u7684\u5149\u611f\u53d7\u5668\u5f7b\u5e95\u8f6c\u6027, \u7edd\u5927\u591a\u6570\u7684\u89c6\u7f51\u819c\u795e\u7ecf\u5143\u7ec6\u80de\u662f\u7ef4\u6301\u5b8c\u597d\u65e0\u635f\u7684, \u6839\u636e\u7535\u523a\u6fc0\u6027\u795e\u7ecf\u5143\u7ec6\u80de\u7684\u65b9\u5f0f\u53ef\u4ee5\u5f97\u5230\u89c6\u89c9\u6548\u679c[ 34 – 35 ] \u3002\u8fd9\u7ed9\u4e88\u4e86\u4e00\u79cd\u65b9\u5f0f\u5373\u7ed5\u5f00\u635f\u4f24\u7684\u5149\u611f\u53d7\u5668\u7acb\u5373\u523a\u6fc0\u6027\u89c6\u7f51\u819c\u8fdb\u800c\u63d0\u5347\u611f\u89c9\u4fe1\u606f\u5185\u5bb9\u3002\u73b0\u9636\u6bb5, \u7528\u523a\u6fc0\u6027\u89c6\u7f51\u819c\u65b9\u5f0f\u5f97\u5230\u89c6\u89c9\u6548\u679c\u7684\u79d1\u5b66\u7814\u7a76\u53ef\u5206\u6210\u4e24\u5927\u7c7b: \u89c6\u7f51\u819c\u4e0b\u5d4c\u5165( subretinal imp lants) \u6280\u672f\u6027\u548c\u89c6\u7f51\u819c\u8868\u5c42\u5d4c\u5165( ep iretinal imp lants) \u6280\u672f\u6027\u3002<\/p>\n

\u89c6\u7f51\u819c\u4e0a\u578b\u662f\u7531\u56fe\u8c61\u5904\u7406\u96c6\u6210ic\u5c06\u76d1\u63a7\u6444\u50cf\u5934\u5f97\u5230\u7684\u56fe\u8c61\u8f6c\u6362\u4e3a\u6709\u5173\u4fe1\u606f, \u6839\u636e\u7f16\u53f7\u4fe1\u53f7\u53d1\u5c04\u5668\u53d1\u9001\u5230\u773c\u7403\u7f16\u53f7\u4fe1\u53f7\u63a5\u6536\u5668\u5e76\u5c06\u56fe\u8c61\u6570\u636e\u4fe1\u606f\u8f6c\u6362\u4e3a\u7ec6\u5fae\u7535\u6d41\u91cf, \u6839\u636e\u89c6\u7f51\u819c\u8868\u5c42\u96c6\u6210ic\u7535\u7ea7\u523a\u6fc0\u6027\u795e\u7ecf\u7ea4\u7ef4\u4f53\u7ec6\u80de\u3002\u800c\u89c6\u7f51\u819c\u4e0b\u578b\u662f\u6839\u636e\u96c6\u6210ic\u7acb\u5373\u4ece\u5916\u90e8\u81ea\u7136\u73af\u5883\u4e2d\u63a5\u53d7\u5149\u4fe1\u53f7, \u5e76\u5c06\u5149\u4fe1\u53f7\u53d8\u6362\u4e3a\u7535\u5b50\u4fe1\u53f7, \u7acb\u5373\u523a\u6fc0\u6027\u6b8b\u7559\u7684\u89c6\u4f53\u7ec6\u80de, \u9020\u6210\u4e0d\u4e00\u6837\u6c34\u5e73\u7684\u89c6\u89c9\u51b2\u51fb\u3002D. C. Rodger\u7b49\u4eba[ 36 ]\u9009\u7528\u9ad8\u805a\u7269Parylene\u5236\u505a\u4e86\u7528\u4ee5\u89c6\u7f51\u819c\u4e0a\u578b\u5d4c\u5165\u7684\u8f6f\u6027\u5fae\u7535\u6781\u5217\u9635\u3002\u9009\u7528\u5355<\/p>\n

\u5c42\u5236\u4f5c\u5de5\u827a\u4e86\u76f8\u5bf9\u5bc6\u5ea6\u4e3a256\u7684\u89c6\u7f51\u819c\u949b\/\u94c2\u7535\u7ea7\u5217\u9635,\u7535\u7ea7\u76f4\u5f91\u4e3a125 \u03bcm, \u7ebf\u8ddd\u4e3a12 \u03bcm (\u56fe12 ) \u3002\u4e3a\u4e86\u66f4\u597d\u5730\u6269\u5927\u7535\u7ea7\u76f8\u5bf9\u5bc6\u5ea6, \u53d1\u5c55\u8d8b\u52bf\u4e86\u4e00\u79cd\u65b0\u7684\u4e24\u5c42\u52a0\u5de5\u5de5\u827a, \u7535\u7ea7\u6570\u91cf\u4e3a1 024, \u95f4\u9694\u4e3a60 \u03bcm (\u56fe13 ) \u3002\u6839\u636eParylene2Parylene\u7684\u9000\u706b\u5de5\u827a, \u907f\u514d\u4e86\u53cc\u5c42Parylene\u5851\u6599\u8584\u819c\u4e2d\u95f4\u7684\u5206\u5c42\u6b21, \u5728\u52a0\u5feb\u5b9e\u9a8c\u4e2d\u8bc1\u5b9e\u4e86\u7535\u7ea7\u4f7f\u7528\u5bff\u547d\u5c06\u8d85\u51fa\u4e00\u5e74\u3002\u7528\u540c\u6837\u5236\u4f5c\u5de5\u827a\u7684\u68c0\u6d4b\u7535\u7ea7\u751f\u7269\u4f53\u5b9e\u9a8c\u8868\u660e, \u6839\u636eParylene\u7684\u5fae\u7535\u6781\u5217\u9635\u5bf9\u673a\u6784\u6216\u8005\u751f\u7269\u90fd\u662f\u6709\u4e0d\u5927\u7684\u4e0d\u5b89\u5168\u884c\u4e3a, \u5728\u7ec6\u80de\u6a21\u578b\u7684\u810a\u690e\u523a\u6fc0\u6027\u5b9e\u9a8c\u4e2d\u8bc1\u5b9e\u4e86\u523a\u6fc0\u6027\u7535\u7ea7\u7684\u5b9e\u6548\u6027\u3002<\/p>\n

\"14.png\"<\/p>\n

\"15.png\"<\/p>\n

\u9664\u6b64\u4e4b\u5916,W. L i\u7b49\u4eba[ 37 ]\u8fd8\u8fdb\u6b65\u4e86\u4e00\u79cd\u7528\u4ee5\u89c6\u7f51\u819c\u4e0a\u578b\u5d4c\u5165\u7684\u52a8\u80fd\u548c\u4f20\u8f93\u6570\u636e\u7684\u5f7b\u5e95\u690d\u5165\u5f0f\u7535\u78c1\u7ebf\u5708, \u9009\u7528Parylene\u505a\u4e3a\u5305\u56ca\u539f\u6750\u6599\u3002\u56fe14 \u662f\u5236\u505a\u7684\u7528\u4ee5\u5d4c\u5165\u773c\u7403\u7684\u5fae\u7535\u78c1\u7ebf\u5708, \u7535\u78c1\u7ebf\u5708\u670910 \u531d, \u6700\u8868\u5c42\u7535\u78c1\u7ebf\u5708\u76f4\u5f91\u4e3a9. 5 mm, \u5168\u90e8\u7535\u78c1\u7ebf\u5708\u8584\u539a\u4f4e\u4e8e11 \u03bcm\u3002\u5bf9\u6bd4\u4e8e\u4f20\u7edf\u5f0f\u7684\u773c\u7403\u690d\u5165\u5f0f\u7535\u78c1\u7ebf\u5708, \u9009\u7528Parylene\u5305\u56ca\u7684\u8fd9\u7c7b\u65b9\u5f0f\u5236\u505a\u7684\u7535\u78c1\u7ebf\u5708\u662f\u5341\u5206\u8f6f\u6027\u7684\u548c\u6298\u53e0\u5f0f\u6027\u7684, \u56fe15\u8bc1\u5b9e\u4e86\u6b64\u5b9a\u5b50\u7684\u67d4\u97e7\u5ea6\u3002\u8bd5\u9a8c\u8bc1\u5b9e\u4e86\u7535\u78c1\u7ebf\u5708\u52a8\u80fd\u4f20\u9001\u7684\u5b9e\u6548\u6027, \u6839\u636e\u70ed\u5904\u7406\u5de5\u827a\u7684\u529e\u6cd5\u6765\u63d0\u5347\u7535\u78c1\u7ebf\u5708\u7684\u4f7f\u7528\u5bff\u547d, \u52a0\u5feb\u5b9e\u9a8c\u8868\u660e\u5728\u4eba\u4f53\u5185\u81ea\u7136\u73af\u5883\u4e0b\u7535\u611f\u7684\u4f7f\u7528\u5bff\u547d\u80fd\u957f\u8fbe20\u5e74\u3002<\/p>\n

S. R. Montezuma\u7b49\u4eba[ 38 ]\u62a5\u5bfc\u4e86\u4ee5\u4e0d\u4e00\u6837\u539f\u6750\u6599\u505a\u4e3a\u89c6\u7f51\u819c\u4e0b\u578b\u690d\u4f53\u7684\u5305\u56ca\u539f\u6750\u6599\u7684\u76f8\u6eb6\u6027\u79d1\u5b66\u7814\u7a76\u3002\u7814\u7a76\u53d1\u73b0, \u9488\u5bf9\u4e0d\u4e00\u6837\u7684\u5d4c\u5165\u539f\u6750\u6599, \u90fd\u662f\u4f1a\u5bf9\u89c6\u7f51\u819c\u9020\u6210\u4e00\u5b9a\u7684\u8f6c\u6027\u529f\u6548, \u800c\u9488\u5bf9\u5e38\u89c1\u7684Parylene\u548cPolyimide, Parylene\u76f8\u5bf9\u6027\u4e8ePolyimide\u6709\u66f4\u5feb\u7684\u76f8\u6eb6\u6027, \u5b83\u505a\u4e3a\u5305\u56ca\u539f\u6750\u6599\u76f8\u5bf9\u6027\u4e8ePolyimide\u80fd\u9020\u6210\u66f4\u5c0f\u75c5\u7406\u5b66\u6bc1\u574f\u53ca\u5176\u66f4\u5c0f\u7684\u690d\u4f53\u5468\u8fb9\u7684\u4f53\u7ec6\u80de\u53cd\u6620\u3002<\/p>\n

\"16.png\"<\/p>\n

\"17.png\"<\/p>\n

3\u3000\u7ed3\u3000\u8bed<\/p>\n

Parylene\u56e0\u4e3a\u5176\u4f18\u826f\u7684\u7279\u6027, \u6162\u6162\u53d8\u6210MEMS\u884c\u4e1a\u4eb2\u7750\u7684\u9ad8\u805a\u7269\u539f\u6750\u6599\u3002Parylene\u901a\u8fc7CVD\u5728\u5e38\u6e29\u4e0b\u5236\u53d6, \u539f\u6750\u6599\u5177\u5907\u65e0\u5185\u5e94\u529b\u3001\u65e0\u9488\u773c\u906e\u76d6\u548c\u4fdd\u6301\u826f\u597d\u7684\u76f8\u6eb6\u6027\u7b49\u51fa\u8272\u7684\u7279\u70b9\u3002\u6587\u4e2d\u5173\u952e\u8be6\u7ec6\u4ecb\u7ecd\u4e86Parylene\u5728\u5fae\u6db2\u4f53\u7cfb\u7edf\u8f6f\u4ef6, \u5305\u542b\u5fae\u9600\u3001\u5fae\u6cf5\u548c\u5fae\u5b89\u5168\u901a\u9053, \u53ef\u5d4c\u5165\u7cfb\u7edf\u8f6f\u4ef6\u5305\u542b\u4eba\u5de5\u8033\u8717\u548c\u89c6\u7f51\u819c\u9f3b\u5b50\u5047\u4f53\u7684\u8fd0\u7528\u3002\u8fd1\u671f\u7684\u7814\u7a76\u8868\u660e\u4e86Parylene MEMS\u5e7f\u6cdb\u8fd0\u7528\u5728\u5404\u79cd\u5404\u6837MEMS\u591a\u5b54\u7ed3\u6784\u3001\u5fae\u611f\u5e94\u5668\u548c\u5fae\u63a7\u5236\u5668\u4e0a, \u575a\u4fe1\u672a\u6765Parylene\u5c06\u8d8a\u6765\u8d8a\u591a\u5730\u4f7f\u7528\u5230\u5f7b\u5e95\u96c6\u6210\u5316\u5fae\u7cfb\u7edf\u4e2d\u3002<\/p>\n

\u8bba\u6587\u53c2\u8003\u6587\u732e:<\/p>\n

[ 1 ] \u3000Specialty Coating Systems. Parylene knowledge, discovery\/his2tory [ EB \/OL ]. http: \/ \/www. scscoatings. com \/parylene _knowledge \/history. aspx.<\/p>\n

[ 2 ] \u3000CALLAHAN R R A, PRUDEN K G, RAUPP G B, et al.Downstream oxygen etching characteristics of polymers from theparylene family [ J ]. Journal of Vacuum Science & Technolo2gy: B, 2003, 21 (4) : 1496 – 1500.<\/p>\n

[ 3 ] \u3000RATIER B, JEONG Y S, MOL ITON A, et al. Vapor deposi2tion polymerization and reactive ion beam etching of poly ( p2xy2lylene) films forwaveguide app lications [ J ]. OpticalMaterials,1999, 12 (2) : 229 – 233.<\/p>\n

[ 4 ] \u3000YEH J T C, GREBE K R. Patterning of poly2paraxylylenes byreactive ion etching [ J ]. Journal of Vacuum Science & Tech2nology: A, 1983, 1 (2) : 604 – 608.<\/p>\n

[ 5 ] \u3000MENG E, AOYAGI S, TA I Y C. High aspect ratio paryleneetching for microfluidics and bioMEMS [ C ] \/ \/ Proceedings of2004 Micro Total Analysis System (\u03bcTAS 2004). Malmo, Swe2den, 2004, 2: 401 – 403.<\/p>\n

[ 6 ] \u3000SELVARASAH S, CHAO S H, CHEN C L, et al. A high as2pect ratio, flexible, transparent and low2cost parylene2C shadowmask technology for micro patterning app lications [ C ] \/ \/The14 th International Conference on Solid2State Sensors, ActuatorsandMicrosystems ( Transducers 2007 ) . Lyon, France, 2007:533 – 536.<\/p>\n

7 ] \u3000ZAHN J D, GABR IEL K J, FEDDER G K. A direct p lasmaetch app roach to high aspect ratio polymer micromachi2ning withapp lications in bioMEMS and CMOS2MEMS [ C ] \/ \/The 15 thIEEE International Conference onMicro ElectroMechanical Sys2tems 2002 (MEMS 2002) . LasVegas, Nevada, 2002: 137 -140.<\/p>\n

[ 8 ] \u3000AYOGI S, TA I Y C. Development of surface micromachi2nablecapacitive accelerometer using fringe electrical field [ C ] \/ \/The12 th IEEE International Conference on Solid2State Sensors, Ac2tuators and Microsystems ( Transducers 2003 ) . Boston, USA,2003: 1383 – 1386.<\/p>\n

[ 9 ] SUZUKI Y, TA I Y C. Micromachined high2aspect2ratio parylenesp ring and its app lication to low2frequency accelero2meters [ J ].Journal ofMicroelectromechanical Systems, 2006, 15 (5) : 1364- 1370.<\/p>\n

[ 10 ] CHEN P J, RODGER D C, AGRAWAL R, et al. Imp lantablemicromechanical parylene2based p ressure sensors for unpoweredintraocular p ressure sensing [ J ]. Journal ofMicromechanics andMicroengineering, 2007, 17 (10) : 1931 – 1938.<\/p>\n

[ 11 ] HU I E E, KELLER C G, HOWE R T. Carbonized parylene asa conformal sacrificial layer [ C ] \/ \/Proceedings of the IEEESolid2state Sensor and ActuatorWorkshop. Hilton Head Island,South Carolina, 1998: 256 – 260.<\/p>\n

[ 12 ] \u3000XIE J, YANG X, WANG X Q, et al. Surface micromachinedleakage p roof parylene check valve [ C ] \/ \/The 14 th IEEE In2ternational Conference on MicroElectroMechanical Systems(MEMS 2001) . Interlaken, Switzerland, 2001: 539 – 542.<\/p>\n

[ 13 ] \u3000CHEN P J, RODGER D C, MENG E, et al. Surface2micromachined in2channel parylene dual valves for unpo2weredmicroflow regulation [ C ] \/ \/The 12 th Solid State Sen2sors, Actuators, and Microsystem s Workshop. H iltonHead Island, South Carolina, USA, 2006: 205 – 208.<\/p>\n

\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

Parylene\u8584\u819c\u53ca\u5176\u5728MEMS\u4e2d\u7684\u5e94\u7528\u738b\u4e9a\u519b,\u5218\u666f\u5168,\u6768\u6625\u751f,\u6c88\u4fee\u6210,\u90ed\u5fe0\u5143(\u4e0a\u6d77\u4ea4\u901a\u5927\u5b66\u5fae\u7eb3\u79d1\u5b66\u6280\u672f\u7814\u7a76\u9662\u5fae\u7c73\/\u7eb3\u7c73\u52a0\u5de5\u6280\u672f\u56fd\u5bb6\u7ea7\u91cd\u70b9\u5b9e\u9a8c\u5ba4,\u8584\u819c\u4e0e\u5fae\u7ec6\u6280\u672f\u6559\u80b2\u90e8\u91cd\u70b9\u5b9e\u9a8c\u5ba4,\u4e0a\u6d77\u3000200030)\u6458\u8981:\u4ecb\u7ecd\u4e86\u805a\u5408\u7269Parylene,\u5305<\/p>\n","protected":false},"author":10,"featured_media":23989,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[59],"tags":[2136,1545,1544],"class_list":["post-23990","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-information","tag-mems","tag-parylene","tag-1544"],"jetpack_featured_media_url":"\/wp-content\/uploads\/2021\/12\/20211215135211-61b9f30b9eee0.png","jetpack-related-posts":[{"id":25564,"url":"https:\/\/www.paiqinano.com\/?p=25564","url_meta":{"origin":23990,"position":0},"title":"\u805a\u5bf9\u4e8c\u7532\u82ef\u53ef\u4ee5\u6d82\u8986\u54ea\u4e9b\u7c7b\u578b\u7684\u6750\u6599\uff1f","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2021\u5e7412\u670819\u65e5","format":false,"excerpt":"\u5728\u7eb3\u7c73\u9632\u6c34\u7f51\uff0c\u6211\u4eec\u7ecf\u5e38\u4f1a\u9047\u5230\u4e00\u4e2a\u95ee\u9898\uff1a\u201c\u6211\u7684xxx\u53ef\u4ee5\u88ab\u805a\u5bf9\u4e8c\u7532\u82ef\u6d82\u5c42\u5417\uff1f\u201d\u53ef\u4ee5\u7528\u805a\u5bf9\u4e8c\u7532\u82ef\u6d82\u8986\u7684\u57fa\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"","width":0,"height":0},"classes":[]},{"id":26005,"url":"https:\/\/www.paiqinano.com\/?p=26005","url_meta":{"origin":23990,"position":1},"title":"\u805a\u5bf9\u4e8c\u7532\u82ef\u53ef\u4ee5\u6d82\u8986\u54ea\u4e9b\u7c7b\u578b\u7684\u6750\u6599\uff1f","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2021\u5e7412\u670818\u65e5","format":false,"excerpt":"\u5728\u7eb3\u7c73\u9632\u6c34\u7f51\uff0c\u6211\u4eec\u7ecf\u5e38\u4f1a\u9047\u5230\u4e00\u4e2a\u95ee\u9898\uff1a\u201c\u6211\u7684xxx\u53ef\u4ee5\u88ab\u805a\u5bf9\u4e8c\u7532\u82ef\u6d82\u5c42\u5417\uff1f\u201d\u53ef\u4ee5\u7528\u805a\u5bf9\u4e8c\u7532\u82ef\u6d82\u8986\u7684\u57fa\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"","width":0,"height":0},"classes":[]},{"id":24478,"url":"https:\/\/www.paiqinano.com\/?p=24478","url_meta":{"origin":23990,"position":2},"title":"Parylene\u5e94\u7528\u8303\u56f4","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2021\u5e7412\u670826\u65e5","format":false,"excerpt":"\u7535\u8def\u677f \u9002\u7528\u65bc\u5404\u79cd\u4e25\u82db\u7684\u73af\u5883\u6761\u4ef6\u4e0b\uff0c\u5e76\u901a\u8fc7\u7f8e\u56fd\u519b\u89c4MIL-I-46058C\u4e4b\u8ba4\u8bc1\u5408\u683c \u91c7\u7528Paryl\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215140044-61b9f50c5c43d.jpg","width":350,"height":200},"classes":[]},{"id":24050,"url":"https:\/\/www.paiqinano.com\/?p=24050","url_meta":{"origin":23990,"position":3},"title":"Parylene\u6d82\u5c42\u4e3a\u4f55\u6ca1\u6709\u5784\u65ad\u6d82\u6599\u754c\uff1f","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2021\u5e7412\u670827\u65e5","format":false,"excerpt":"\u6d3e\u745e\u6797\uff08Parylene\uff09\u662f20\u4e16\u7eaa60\u5e74\u4ee3\u4e2d\u671f\u7f8e\u56fd\u8054\u5408\u78b3\u5316\u7269\u516c\u53f8\u5f00\u53d1\u7684\u4e00\u79cd\u4fdd\u62a4\u6027\u9ad8\u5206\u5b50\u6750\u6599\uff0c\u4f7f\u7528\u771f\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215135240-61b9f32865253.jpg","width":350,"height":200,"srcset":"\/wp-content\/uploads\/2021\/12\/20211215135240-61b9f32865253.jpg 1x, \/wp-content\/uploads\/2021\/12\/20211215135240-61b9f32865253.jpg 1.5x, \/wp-content\/uploads\/2021\/12\/20211215135240-61b9f32865253.jpg 2x"},"classes":[]},{"id":24042,"url":"https:\/\/www.paiqinano.com\/?p=24042","url_meta":{"origin":23990,"position":4},"title":"\u8010\u9ad8\u6e29\u6297\u7d2b\u5916\u8584\u819c","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2021\u5e7412\u670823\u65e5","format":false,"excerpt":"20\u4e16\u7eaa60\u5e74\u4ee3\uff0c\u7f8e\u56fd\u8054\u5408\u78b3\u5316\u7269\u516c\u53f8\u63a8\u51fa\u4e86Parylene\u7cfb\u5217\u9ad8\u5206\u5b50\u6577\u578b\u6d82\u5c42\u6750\u6599\uff0c\u7531\u4e8e\u4f18\u5f02\u7684\u963b\u9694\u6027\u80fd\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215135235-61b9f32352870.jpg","width":350,"height":200},"classes":[]},{"id":19542,"url":"https:\/\/www.paiqinano.com\/?p=19542","url_meta":{"origin":23990,"position":5},"title":"Parylene F1785-64-4\u6210\u819c\u5de5\u827a\u7814\u7a76\u53d1\u5c55\u8fdb\u5c55","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2022\u5e742\u67083\u65e5","format":false,"excerpt":"1\u5f15\u8a00 \u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u9ad8\u5206\u5b50\u6750\u6599\u5177\u6709\u4f18\u5f02\u7684\u7535\u5b66\u6027\u80fd\uff0c\u56e0\u800c\u5728\u7535\u5b50\u3001\u7535\u5de5\u6280\u672f\u4e0a\u5f97\u5230\u4e86\u6781\u4e3a\u5e7f\u6cdb\u7684\u5e94\u7528\u3002\u5927\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"","width":0,"height":0},"classes":[]}],"jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts\/23990","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/users\/10"}],"replies":[{"embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=23990"}],"version-history":[{"count":1,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts\/23990\/revisions"}],"predecessor-version":[{"id":26940,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts\/23990\/revisions\/26940"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/media\/23989"}],"wp:attachment":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=23990"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=23990"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=23990"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}