{"id":23561,"date":"2021-12-29T10:43:57","date_gmt":"2021-12-29T02:43:57","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=23561"},"modified":"2021-12-27T14:31:04","modified_gmt":"2021-12-27T06:31:04","slug":"%e9%95%80%e8%86%9c%e5%b7%a5%e8%89%ba%e7%9a%84%e6%b5%85%e6%9e%90","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=23561","title":{"rendered":"\u9540\u819c\u5de5\u827a\u7684\u6d45\u6790"},"content":{"rendered":"

\u5f15\u8a00<\/p>\n

\u3000\u3000\u8868\u5c42\u7684\u9540\u819c\u662f\u534a\u5bfc\u4f53\u6750\u6599\u53ca\u7535\u5b50\u5149\u5b66\u5de5\u4e1a\u751f\u4ea7\u4e2d\u66f4\u4e3a\u7126\u8651\u4e0d\u5b89\u7684\u52a0\u5de5\u5de5\u827a\u4e4b\u4e00\u3002\u8fd9\u513f\u4f1a\u6574\u4f53\u68b3\u7406\u5404\u79cd\u8868\u5c42\u7684\u9540\u819c\/\u5851\u6599\u8584\u819c\u52a0\u5de5\u5de5\u827a\uff0c\u4ece\u57fa\u672c\u539f\u7406\u4e0a\u638c\u63e1\u8fd9\u79cd\u52a0\u5de5\u5de5\u827a\u7684\u4e0d\u540c\u70b9\u3002<\/p>\n

\u3000\u3000\u4ecb\u7ecd<\/p>\n

\u3000\u3000\u8868\u5c42\u7684\u9540\u819c\u6307\u5728\u677f\u6750\u4e0a\u4ea7\u751f\u4ece\u6570\u7eb3\u7c73\u6280\u672f\u5230\u6570\u03bcm\u7684\u539f\u6750\u6599\u5c42\uff0c\u539f\u6750\u6599\u53ef\u4ee5\u662f\u91d1\u5c5e\u590d\u5408\u6750\u6599\u3001\u534a\u5bfc\u4f53\u5668\u4ef6\u3001\u53ca\u5176\u91d1\u5c5e\u6c27\u5316\u7269\u6c2f\u5316\u7269\u7b49\u5316\u5b66\u7269\u8d28\u539f\u6750\u6599\u3002\u8868\u5c42\u7684\u9540\u819c\u7684\u52a0\u5de5\u5de5\u827a\u53ef\u4ee5\u6700\u7b80\u5355\u7684\u5206\u6210\u5316\u5b66\u5de5\u7a0b\u53ca\u7269\u7406\u5b66\u52a0\u5de5\u5de5\u827a\uff1a<\/p>\n

\u3000\u3000\u6709\u673a\u5316\u5b66\u65b9\u5f0f<\/p>\n

\u3000\u3000\u901a\u5e38\u662f\u6db2\u4f53\u6216\u662f\u6c7d\u6001\u7684\u78f7\u9178\u6fc0\u9176\u539f\u6750\u6599\u901a\u8fc7\u5728\u56fa\u6001\u8868\u9762\u7684\u5316\u5b66\u53d8\u5316\uff0c\u5806\u79ef\u4e00\u5c42\u56fa\u6001\u539f\u6750\u6599\u5c42\u3002\u4e0b\u5217\u666e\u904d\u7684\u8868\u5c42\u7684\u9540\u819c\u52a0\u5de5\u5de5\u827a\u5168\u662f\u5f52\u5c5e\u4e8e\u5316\u5b66\u5de5\u7a0b\uff1a<\/p>\n

\u3000\u3000\u25c6 \u7535\u9540\u5de5\u827a(Electroplating)\uff1a\u884c\u9a76\u7535\u89e3\u539f\u7406\u5728\u4e00\u4e9b\u91d1\u5c5e\u6750\u6599\u5916\u578b\u4e0a\u9576\u4e0a\u4e00\u5c42\u6790\u5176\u4ed6\u91d1\u5c5e\u6750\u6599\u6216\u94dd\u5408\u91d1\u7684\u5168\u8fc7\u7a0b\uff0c\u662f\u884c\u9a76\u7535\u89e3\u6cd5\u529f\u6548\u4f7f\u91d1\u5c5e\u6750\u6599\u6216\u5176\u4ed6\u539f\u6750\u6599\u5236\u54c1\u7684\u5916\u578b\u7c98\u9644\u4e00\u5c42\u9676\u74f7\u819c\u7684\u52a0\u5de5\u5de5\u827a<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u25c6 \u5316\u5b66\u6eb6\u6db2\u5806\u79ef Chemical solution deposition (CSD)\uff1a\u662f\u884c\u9a76\u4e00\u79cd\u9002\u5408\u7684\u6c27\u5316\u5242\u4f7f\u9540\u6db2\u4e2d\u7684\u91d1\u5c5e\u79bb\u5b50\u590d\u539f\u5e76\u5806\u79ef\u5728\u57fa\u6750\u5916\u578b\u4e0a\u7684\u6709\u673a\u5316\u5b66\u590d\u539f\u5168\u8fc7\u7a0b\u3002\u4e0e\u5149\u7535\u50ac\u5316\u5806\u79ef\u4e0d\u4e00\u6837\uff0c\u6709\u673a\u5316\u5b66\u5806\u79ef\u591a\u4f59\u6574\u6d41\u7535\u6e90\u548c\u9633\u6781\u6c27\u5316\u3002Sol-Gel\u6280\u672f\u6027\u4fbf\u662f\u4e00\u79cd\u5316\u5b66\u6eb6\u6db2\u5806\u79ef\u65b9\u5f0f\u3002<\/p>\n

\u3000\u3000\u25c6 \u8f6c\u52a8\u6d82\u6577\u6cd5 Spin-coating\uff1a\u5373\u5728\u9ad8\u901f\u8fd0\u8f6c\u7684\u7845\u7247\u4e0a\uff0c\u6ef4\u6ce8\u5404\u79cd\u9ecf\u5242\uff0c\u884c\u9a76\u5411\u5fc3\u529b\u4f7f\u6ef4\u5728\u7845\u7247\u4e0a\u7684\u9ecf\u5242\u5300\u79f0\u5730\u6d82\u6577\u5728\u7845\u7247\u4e0a\uff0c\u8584\u539a\u89c6\u4e0d\u4e00\u6837\u9ecf\u5242\u548c\u7845\u7247\u95f4\u7684\u9ecf\u6ede\u6307\u6570\u800c\u4e0d\u4e00\u6837\uff0c\u4e5f\u548c\u8f6c\u52a8\u901f\u7387\u53ca\u6642\u95f4\u76f8\u5173\u3002\u901a\u5e38\u4e5f\u5fc5\u9700\u70b9\u80f6\u540e\u7684\u70ed\u5904\u7406\u5de5\u827a\u6765\u4f7f\u80f6\u72b6\u7269\u6d82\u5c42\u7ed3\u6676\u5316\u3002\u9488\u5bf9\u9ad8\u5206\u5b50\u6750\u6599\u9ad8\u805a\u7269Polymer\u7684\u5851\u6599\u8584\u819c\u6d82\u6577\u8f83\u4e3a\u6709\u6548\uff0c\u5e7f\u6cdb\u8fd0\u7528\u4e8e\u534a\u5bfc\u4f53\u6750\u6599\u7684\u5149\u6cfd\u63a9\u819c\u6d82\u6577\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u25c6 \u5316\u5b66\u6c14\u76f8\u6c89\u79ef Chemical vapor deposition(CVD)\uff1a\u628a\u4e00\u79cd\u6216\u51e0\u7c7b\u5e26\u6709\u7ec4\u6210\u5851\u6599\u8584\u819c\u539f\u7d20\u7684\u5316\u5b66\u7269\u8d28\u3001\u5355\u8d28\u6c7d\u4f53\u8fdb\u5165\u7f6e\u653e\u6709\u677f\u6750\u7684\u53cd\u6620\u5ba4\uff0c\u4f9d\u9760\u5ba4\u5185\u7a7a\u95f4\u6c14\u76f8\u8272\u8c31\u5316\u5b66\u53d8\u5316\u5728\u57fa\u6750\u5916\u578b\u4e0a\u5806\u79ef\u56fa\u4f53\u5851\u6599\u8584\u819c\u7684\u751f\u4ea7\u5de5\u827a\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u25c6 \u4f4e\u6e29\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef Plasma enhanced Chemical vapor deposition (PECVD)\uff1a\u662f\u4f9d\u9760\u5fae\u6ce2\u52a0\u70ed\u6216\u5fae\u6ce2\u5c04\u9891\u7b49\u4f7f\u5e26\u6709\u5851\u6599\u8584\u819c\u6784\u6210\u5206\u5b50\u7684\u6c7d\u4f53\u6c34\u89e3\uff0c\u5728\u90e8\u5206\u4ea7\u751f\u7b49\u79bb\u5b50\uff0c\u800c\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6d3b\u529b\u5f88\u5f3a\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u53cd\u6620\uff0c\u5728\u7845\u7247\u4e0a\u5806\u79ef\u6d3e\u51fa\u6240\u671f\u5f85\u7684\u5851\u6599\u8584\u819c\u3002\u56e0\u4e3a\u884c\u9a76\u4e86\u4f4e\u6e29\u7b49\u79bb\u5b50\u7684\u6d3b\u529b\u6765\u63a8\u52a8\u5316\u5b66\u53d8\u5316\uff0cPECVD\u53ef\u4ee5\u5728\u8f83\u4f4e\u7684\u6eab\u5ea6\u4e0b\u5b8c\u6210\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u7269\u7406\u65b9\u6cd5<\/p>\n

\u3000\u3000\u5e94\u7528\u673a\u68b0\u8bbe\u5907\u7684\u3001\u673a\u7535\u5de5\u7a0b\u7684\u3001\u4f9b\u70ed\u7684\u529e\u6cd5\u6765\u9020\u6210\u4ea7\u751f\u56fa\u4f53\u5851\u6599\u8584\u819c\u3002\u901a\u5e38\u662f\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u7684\u65b9\u5f0fPhysical vapor deposition(PVD)\u3002\u4e0b\u5217\u662f\u5e38\u7528\u7684\u7269\u7406\u5b66\u8868\u5c42\u7684\u9540\u819c\u52a0\u5de5\u5de5\u827a\uff1a<\/p>\n

\u3000\u3000\u25c6 \u70ed\u6325\u53d1\u8868\u5c42\u7684\u9540\u819c(Thermal evaporation)\uff1a\u5c06\u5851\u6599\u8584\u819c\u6210\u5206\u52a0\u6e29\u6325\u53d1\uff0c\u5728\u6bd4\u6325\u53d1\u6e29\u5ea6\u4f4e\u7684\u57fa\u672c\u4e0a\u5916\u578b\u4e0a\u51dd\u56fa\u6210\u56fa\u6001\u4ea7\u751f\u5851\u6599\u8584\u819c\u7684\u65b9\u5f0f\u3002<\/p>\n

\u3000\u3000\u2192\u7535\u5b50\u675f\u84b8\u53d1\u8868\u5c42\u7684\u9540\u819c (Electron beam evaporation);\u00a0\u6839\u636e\u79bb\u5b50\u675f\u8d1f\u7535\u5b50\u9540\u819c\u6750\u6599\u52a0\u6e29\u5e76\u4f7f\u539f\u6750\u6599\u6325\u53d1\uff0c\u5e76\u5806\u79ef\u5728\u57fa\u6750\u4e0a\u3002\u76ca\u5904\u662f\u52a0\u6e29\u96c6\u4e2d\u5316\uff0c\u5e76\u80fd\u505a\u5230\u5f88\u9ad8\u7684\u6eab\u5ea6\u6765\u89e3\u51b3\u9ad8\u6eb6\u70b9\u7684\u539f\u6750\u6599\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u2192\u7535\u5b50\u675f\u534f\u52a9\u5806\u79ef (Ion assisted deposition IAD);\u00a0\u7c7b\u4f3cE-beam evaporation\u52a0\u5de5\u5de5\u827a\uff0c\u6539\u8fdb\u7684\u5730\u70b9\u662f\u7528\u7535\u5b50\u675f\u6765\u5bfc\u5411\u6027\u53ca\u52a0\u5feb\u6c7d\u5316\u7684\u9540\u819c\u6750\u6599\uff0c\u800c\u4e14\u7535\u5b50\u675f\u5728\u539f\u6750\u6599\u5806\u79ef\u7684\u73af\u8282\u4e2d\u534f\u52a9\u5806\u79ef\u53ca\u5176\u4f7f\u5806\u79ef\u819c\u5bc6\u5207\u5316\uff0c\u5982\u540c\u5c0f\u5c0f\u9524\u5934\u4e00\u6837\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u2192\u7535\u963b\u4e1d\u52a0\u70ed\u6325\u53d1\u8868\u5c42\u7684\u9540\u819c(Resistive heating evaporation)\uff1b\u6839\u636e\u9ad8\u7535\u6d41\u91cf\u7535\u963b\u4e1d\u52a0\u70ed\u4f7f\u9540\u819c\u6750\u6599\u6c7d\u5316\uff0c\u4e0d\u9002\u611f\u7528\u4ee5\u9ad8\u8fc71600\u5ea6\u6eb6\u70b9\u7684\u539f\u6750\u6599<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u2192\u5206\u5b50\u7ed3\u6784\u675f\u5916\u5ef6\u6027Molecular beam epitaxy (MBE)<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u25c6 \u78c1\u63a7\u6e85\u5c04\u8868\u5c42\u7684\u9540\u819c(Sputtering)\uff1a\u9ad8\u6548\u7387\u80fd\u91cf\u7684\u5206\u5b50\u3001\u5206\u5b50\u7ed3\u6784\u4e0e\u56fa\u6001\u5728\u649e\u51fb\u540e\uff0c\u5206\u5b50\u4f1a\u88ab\u9010\u51fa\u56fa\u6001\u5916\u578b\u3002\u8fd9\u7c7b\u8ff9\u8c61\u79f0\u4e4b\u4e3a\u78c1\u63a7\u6e85\u5c04( Sputter )\u6216\u662f\u662f\u6e85\u9540( Sputtering )\uff0c\u88ab\u649e\u51fb\u7684\u56fa\u6001\u79f0\u4e4b\u4e3a\u9776\u6750( Target )\u3002\u6839\u636e\u9ad8\u6548\u7387\u80fd\u91cf\u7684\u5206\u5b50\u3001\u5206\u5b50\u7ed3\u6784\u4f1a\u4e0d\u65ad\u649e\u51fb\uff0c\u9776\u6750\u4f1a\u88ab\u52a0\u6e29\uff0c\u4e3a\u4e86\u907f\u514d\u6d88\u6eb6\uff0c\u4f1a\u4ece\u53cd\u9762\u5f00\u5c55\u6c34\u51b7\u6563\u70ed\u3002<\/p>\n

\u3000\u3000\u2192\u4f20\u7edf\u5f0f\u78c1\u63a7\u6e85\u5c04\uff0c\u6839\u636e\u9ad8\u7535\u538b\u4f7f\u9776\u6750\u56db\u5468\u7684\u6c29\u6c14\u74f6\u79bb\u5b50\u5316\uff0c\u5e76\u6839\u636e\u9ad8\u7535\u4f4d\u5dee\u5f97\u5230\u52a0\u5feb\uff0c\u5e76\u8d1f\u7535\u5b50\u9776\u6750\u5916\u578b\uff0c\u4e1a\u6e1a\u5916\u578b\u7684\u9776\u6750\u5206\u5b50\u5386\u4e45\u5f25\u575a\u5728\u57fa\u6750\u4e0a\uff0c\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u2192\u5c04\u9891\u6e85\u5c04 RF sputtering\uff0c\u5c04\u9891\u6e85\u5c04\u662f\u884c\u9a76\u5fae\u6ce2\u5c04\u9891\u5145\u653e\u7535\u7b49\u79bb\u5b50\u4e2d\u7684\u5171\u4ef7\u952e\u6216\u7535\u5b50\u5668\u4ef6\u8d1f\u7535\u5b50\u9776\u6750\u3001\u78c1\u63a7\u6e85\u5c04\u51fa\u9776\u6750\u5206\u5b50\u8fdb\u800c\u5806\u79ef\u5728\u91c7\u53d6\u7684\u57fa\u6750\u5916\u578b\u7684\u6280\u672f\u6027\u3002\u5bf9\u6bd4\u4f20\u7edf\u5f0f\u78c1\u63a7\u6e85\u5c04\u7684\u76ca\u5904\u662f\u4e0d\u5bb9\u6613\u9020\u6210\u6b63\u7535\u5386\u4e45\u5f25\u575a\uff0c\u51cf\u5c11\u7535\u4f4d\u5dee\uff0c\u8fdb\u800c\u7ec8\u6b62\u78c1\u63a7\u6e85\u5c04\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u2192\u7535\u5b50\u675f\u78c1\u63a7\u6e85\u5c04 Ion beam sputtering (IBS)\uff0c\u6765\u81ea\u4e8e\u81ea\u529b\u6b63\u79bb\u5b50\u67aa\u7684\u9ad8\u6548\u7387\u80fd\u91cf\u7535\u5b50\u675f\u8d1f\u7535\u5b50\u9776\u6750\u5916\u578b\uff0c\u6e85\u9540\u597d\u7684\u539f\u6750\u6599\u5806\u79ef\u5728\u57fa\u6750\u4e0a\u3002\u671f\u95f4\u4ea7\u751f\u7740\u7684\u8868\u5c42\u7684\u9540\u819c\u6709\u673a\u5316\u5b66\u8ba1\u91cf\u68c0\u5b9a\u548c\u9776\u6750\u5343\u7bc7\u4e00\u5f8b\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u25c6 \u8109\u51b2\u5149\u5806\u79ef (Pulsed laser deposition PLD)\uff1a\u662f\u4e00\u79cd\u884c\u9a76\u5bf9\u7126\u540e\u5927\u529f\u7387\u8109\u51b2\u5149\u5bf9\u771f\u7a7a\u6cf5\u4e2d\u9776\u6750\u5f00\u5c55\u8d1f\u7535\u5b50\uff0c\u7531\u4e8e\u6fc0\u5149\u5668\u52a8\u80fd\u6781\u9ad8\uff0c\u4f7f\u9776\u6750\u6c7d\u5316\u4ea7\u751f\u7b49\u79bb\u5b50Plasma plume\uff0c\u968f\u540e\u6c7d\u5316\u7684\u6742\u8d28\u6c89\u79ef\u5728\u886c\u5e95\u4e0a\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002<\/p>\n

\u3000\u3000\"\"<\/p>\n

\u3000\u3000\u603b\u7ed3<\/p>\n

\u3000\u3000\u8fd9\u513f\u5f97\u51fa\u534a\u5bfc\u4f53\u6750\u6599\u53ca\u5149\u5b66\u9540\u819c\u52a0\u5de5\u5de5\u827a\u7684\u4e00\u4e2a\u6700\u666e\u904d\u7684\u5f52\u7c7b\u8be6\u7ec6\u4ecb\u7ecd\uff0c\u800c\u4e4b\u540e\u7684\u5b66\u4e60\u7b14\u8bb0\u4e2d\u4f1a\u5305\u62ec\u9488\u5bf9\u5149\u5b66\u9540\u819c\u6700\u666e\u904d\u52a0\u5de5\u5de5\u827a\u7684\u8f83\u4e3a\u4e0e\u5256\u6790\uff0c\u8fd9\u79cd\u65b9\u6cd5\u5305\u542bE-beam, IAD, IBS\u3002<\/p>\n

 <\/p>\n

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