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\n\u5f15\u8a00<\/strong><\/legend>\n

\u8d35\u5dde\u7535\u7f51\u8d23\u4efb\u6709\u9650\u516c\u53f8\u7535\u529b\u5de5\u7a0b\u79d1\u5b66\u9662\u3001\u8f93\u53d8\u7535\u6b66\u5668\u88c5\u5907\u53ca\u7cfb\u7edf\u4f18\u5316\u4e0e\u65b0\u6280\u672f\u5e94\u7528\u6211\u56fd\u91cd\u70b9\u5b9e\u9a8c\u5ba4\uff08\u6e56\u5357\u5927\u5b66\uff09\u7684\u79d1\u5b66\u7814\u7a76\u5de5\u4f5c\u4eba\u5458\u5f20\u8fc5\u3001\u66fe\u534e\u8363\u3001\u7530\u627f\u8d8a\u3001\u9a6c\u6653\u7ea2\u3001\u718a\u9752\uff0c\u57282019\u5e74\u7b2c24\u671f\u300a\u7535\u5de5\u6280\u672f\u5b66\u62a5\u300b\u4e0a\u53d1\u6587\u5f3a\u8c03\uff0c\u8fd0\u7528\u5927\u6c14\u538b\u529b\u4e0b\u7b49\u79bb\u5b50\u5145\u653e\u7535\u5728\u5939\u5c42\u73bb\u7483\u5e95\u6750\u4e0a\u5806\u79ef\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\uff0c\u5145\u653e\u7535\u9009\u7528\u81ea\u8bbe\u8ba1\u65b9\u6848\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u6784\u9020\u5b8c\u6210\u5927\u89c4\u6a21\u5806\u79ef\uff0c\u4e0e\u6b64\u540c\u65f6\u9009\u7528\u6c29\u6c14\u74f6\u505a\u4e3a\u5de5\u4f5c\u4e2d\u6c7d\u4f53\uff0c\u516d\u7f9f\u57fa\u4e8c\u7845\u6c2e\u70f7\uff08HMDSN\uff09\u505a\u4e3a\u524d\u8f6e\u9a71\u52a8\u5355\u4e2a\uff0c\u572813.56MHz\u5c04\u9891\u7535\u6e90\u7684\u63a8\u52a8\u4e0b\u53d6\u5f97\u6210\u529f\u5236\u4f5c\u51fa\u8d85\u758f\u6c34\u8868\u5c42\uff0c\u9759\u6001\u6570\u636e\u8868\u9762\u5f20\u529b\u8fbe\u5230171.4\u00b0\uff0c\u7ffb\u8f6c\u89d2\u4f4e\u4e8e2\u00b0\u3002<\/p>\n

\n

\u5149\u8c31\u5206\u6790\u6cd5\uff08OES\uff09\u4e0b\u53d1\u89c9\u5355\u4e2a\u5728\u5145\u653e\u7535\u7a7a\u9699\u4e2d\u88c2\u5316\uff0c\u9020\u6210\u5f88\u591a\u758f\u6c34\u6027\u5b98\u80fd\u56e2\u3002\u4e0e\u6b64\u540c\u65f6\u7a7a\u6c14\u4e2d\u7684\u6c2e\u6c14\u548c\u6c27\u6c14\u4e5f\u53c2\u52a0\u4e86\u53cd\u6620\uff0c\u4f46\u4e0d\u5e72\u6270\u5176\u758f\u6c34\u6027\u3002\u539f\u5b50\u529b\u663e\u5fae\u955c\uff08AFM\uff09\u548c\u626b\u63cf\u4eea\u900f\u5c04\u7535\u955c\uff08SEM\uff09\u6d4b\u8bd5\u8868\u660e\u8d85\u758f\u6c34\u8868\u5c42\u62e5\u6709\u5300\u79f0\u7684\u5fae\u7eb3\u7c73\u4e0d\u5149\u6ed1\u6784\u9020\uff0c\u8868\u5c42\u7684\u5747\u503c\u8868\u9762\u7c97\u7cd9\u5ea6\u505a\u5230200nm\u4e0a\u4e0b\u3002<\/p>\n

\n

\u5728\u81ea\u505a\u7535\u5b50\u5236\u51b7\u8154\u4e2d\u5f00\u5c55\u4e86\u4e00\u7cfb\u5217\u8d85\u4f4e\u6e29\u5b9e\u9a8c\uff0c\u7ed3\u679c\u663e\u793a\u8d85\u758f\u6c34\u8868\u5c42\u62e5\u6709\u4f18\u826f\u7684\u51cf\u7f13\u7ed3\u51bb\u548c\u6291\u6b62\u8d77\u971c\u7684\u5de5\u4f5c\u80fd\u529b\u3002<\/p>\n<\/fieldset>\n

 <\/p>\n

\n

\u8d85\u758f\u6c34\u8868\u5c42\u5177\u5907\u666e\u904d\u7684\u57fa\u7840\u7814\u7a76\u548c\u884c\u4e1a\u8fd0\u7528\u53d1\u5c55\u6f5c\u529b\u3002\u4e00\u79cd\u7ecf\u5178\u7684\u8fd0\u7528\u662f\u5e94\u7528\u8d85\u758f\u6c34\u9540\u5c42\u7684\u81ea\u6e05\u7406\u4f5c\u7528\u6765\u5b8c\u6210\u8010\u6c61\u76ee\u5730\uff0c\u8fd0\u7528\u4e86\u8d85\u758f\u6c34\u754c\u9762\u4e0a\u6c34\u73e0\u7ffb\u8f6c\u89d2\u8f83\u5c0f\uff0c\u5728\u96e8\u5929\u65f6\u5c18\u571f\u9897\u7c92\u7269\u975e\u5e38\u5bb9\u6613\u88ab\u5e26\u53bb\uff0c\u5173\u952e\u8fd0\u7528\u4e8e\u592a\u9633\u80fd\u53d1\u7535\u3001\u6c7d\u8f66\u5236\u9020\uff08\u8868\u5c42\u548c\u73bb\u7483\u7a97\uff09\u548c\u5de5\u7a0b\u5efa\u7b51\u884c\u4e1a\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\u4e0a\u51fa\u6db2\u8868\u9762\u5f20\u529b\u5927\uff0c\u89e6\u78b0\u8303\u56f4\u5c0f\uff0c\u56e0\u800c\u901a\u5e38\u4e5f\u5177\u5907\u8010\u8150\u8680\u5de5\u4f5c\u80fd\u529b\uff0c\u53ef\u4ee5\u9884\u9632\u6216\u663e\u8457\u964d\u4f4e\u9178\u78b1\u6027\u6216\u504f\u78b1\u6db2\u6001\u7684\u6d78\u8680\uff0c\u8fdb\u800c\u589e\u52a0\u673a\u5668\u8bbe\u5907\u7684\u4f7f\u7528\u671f\u9650\u3002<\/p>\n

\n

\u6839\u636e\u5176\u7279\u6709\u7684\u9632\u6f6e\u7279\u6027\uff0c\u8d85\u758f\u6c34\u8868\u5c42\u7684\u53e6\u4e00\u4e2a\u672a\u77e5\u5e94\u7528\u662f\u8fd0\u7528\u4ed6\u4eec\u6765\u964d\u4f4e\u8868\u5c42\u7684\u964d\u96ea\u6216\u79ef\u96ea\uff0c\u4e43\u81f3\u5f7b\u5e95\u907f\u514d\u56fa\u6001\u754c\u9762\u4e0a\u7684\u8986\u51b0\u3002\u7535\u529b\u4f01\u4e1a\u4e2d\u6bcf\u4e00\u5e74\u90fd\u662f\u6709\u56e0\u7535\u529b\u7ebf\u8def\u7684\u590d\u5408\u7edd\u7f18\u5b50\u5728\u73af\u5883\u7a7a\u6c14\u4e0b\u7684\u8986\u51b0\u9020\u6210\u7edd\u7f18\u6027\u80fd\u80fd\u88ab\u5e72\u6270\u7684\u62a5\u5bfc\uff0c\u9020\u6210\u65e0\u6cd5\u4f30\u91cf\u7684\u8d22\u4ea7\u635f\u5931\u3002<\/p>\n

\n

\u5f88\u591a\u79d1\u5b66\u7814\u7a76\u62a5\u5bfc\uff0c\u5728\u8d85\u758f\u6c34\u8868\u5c42\u53ef\u4ee5\u5b8c\u6210\u51b0\u9ecf\u9644\u7684\u663e\u8457\u964d\u4f4e\uff0c\u6709\u5229\u4e8e\u51b0\u7684\u6389\u4e0b\u6765\u3002\u8fd1\u51e0\u5341\u5e74\u6765\uff0c\u6839\u636eCassie-Baxter\u548cWenzel\u57fa\u7840\u7406\u8bba\u5f00\u53d1\u8bbe\u8ba1\u51fa\u4e86\u4f18\u79c0\u7684\u758f\u6c34\u6027\u8868\u5c42\uff0c\u5305\u542b\u6709\u673a\u5316\u5b66\u8680\u523b\u52a0\u5de5\u3001\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6280\u672f\u6027\u3001\u55b7\u6f06\u548c\u7b49\u79bb\u5b50\u89e3\u51b3\u3002<\/p>\n

\n

\u5728\u8fd9\u79cd\u65b9\u5f0f\u4e2d\uff0c\u7b49\u79bb\u5b50\u6280\u672f\u6027\u5df2\u88ab\u8bc1\u5b9e\u662f\u4e00\u79cd\u7279\u522b\u6709\u53d1\u5c55\u524d\u666f\u7684\u5904\u7f6e\u65b9\u5f0f\uff0c\u5176\u8fd0\u7528\u6df7\u5408\u6c14\u4f53\u5145\u653e\u7535\u9020\u6210\u9ad8\u5f71\u54cd\u6027\u7b49\u79bb\u5b50\u6210\u5206\u6765\u66f4\u6539\u5404\u79cd\u5404\u6837\u683d\u57f9\u57fa\u8d28\u7684\u6709\u673a\u5316\u5b66\u6784\u6210\u548c\u5f62\u72b6\u3002\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50\u505a\u4e3a\u7528\u4ee5\u5236\u53d6\u8d85\u758f\u6c34\u8868\u5c42\u7684\u591a\u79cd\u591a\u6837\u7b49\u79bb\u5b50\u6e90\u4e4b\u4e00\uff0c\u56e0\u4e3a\u5176\u4e0d\u7528\u4f4e\u7535\u538b\u7b49\u79bb\u5b50\u4ef7\u683c\u6602\u8d35\u7684\u8d85\u6ee4\u88c5\u7f6e\uff0c\u5b9e\u9645\u64cd\u4f5c\u4fbf\u6377\uff0c\u89e3\u51b3\u8fc5\u901f\uff0c\u6709\u76ca\u4e8e\u89c4\u6a21\u6027\u5177\u4f53\u751f\u4ea7\u5236\u9020\u800c\u88ab\u666e\u904d\u79d1\u5b66\u7814\u7a76\u3002<\/p>\n

\n

\u73b0\u9636\u6bb5\u65e9\u5df2\u6709\u79d1\u5b66\u7814\u7a76\u5e94\u7528\u4e0d\u4e00\u6837\u7684\u6210\u672c\u4f4e\u4f4e\u6e29\u7b49\u79bb\u5b50\u673a\u5668\u8bbe\u5907\u7528\u4ee5\u8868\u5c42\u6539\u6027\u6750\u6599\uff0c\u8fd9\u79cd\u673a\u5668\u8bbe\u5907\u7531\u5404\u79cd\u5404\u6837\u5f00\u5173\u7535\u6e90\u63a8\u52a8\uff0c\u5305\u542bkHz\u4ea4\u6d41\uff08AC\uff09\u5f00\u5173\u7535\u6e90\u6216\u5355\u8109\u51b2\u76f4\u6d41\u7535\u6e90\uff08DC\uff09\uff0c\u53ca\u5176MHz\u5fae\u6ce2\u5c04\u9891\uff08RF\uff09\u548cGHz\u5fae\u6ce2\u52a0\u70ed\u6e90\uff0c\u591a\u9009\u7528\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u6784\u9020\uff08Dielectric Barrier Discharge, DBD\uff09\u3002<\/p>\n

\n

Ma W. \u548cYang S. H. \u7b49\u8fd0\u7528\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50\u6c47\u805a\u7b49\u65b9\u5f0f\u5728\u8bd5\u54c1\u8868\u5c42\u5806\u79ef\u4f4e\u8868\u9762\u7684CFx\u548cCHx\u5b98\u80fd\u56e2\u6216\u8868\u9762\u7c97\u7cd9\u5ea6\u9ad8\u7684\u6709\u673a\u7845\u6750\u6599\u9ad8\u805a\u7269\uff0c\u53d6\u5f97\u6210\u529f\u5236\u53d6\u51fa\u6c34\u91cf\u8868\u9762\u5f20\u529b\u8d85\u51fa150\u00b0\uff0c\u4e0e\u6b64\u540c\u65f6\u5177\u5907\u8f83\u4f4e\u7684\u7ffb\u8f6c\u89d2\u7684\u8d85\u758f\u6c34\u8868\u5c42\u3002\u5c3d\u7ba1\u5df2\u7ecf\u6709\u7b49\u79bb\u5b50\u6c47\u805a\u5806\u79ef\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\u7684\u5f88\u591a\u79d1\u5b66\u7814\u7a76\uff0c\u53ef\u662f\u5c06\u5176\u4f7f\u7528\u5728\u51cf\u7f13\u7ed3\u51bb\u4ee5\u53ca\u9632\u51b0\u5b9e\u9645\u6548\u679c\u5c42\u9762\u7684\u8bd5\u9a8c\u5de5\u4f5c\u4e2d\u8f83\u5c11\u3002<\/p>\n

\n

\u6839\u636e\u4ee5\u4e0a\u95ee\u9898\uff0c\u6587\u4e2d\u8fd0\u7528\u5927\u6c14\u538b\u529b\u4e0b\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u5236\u53d6\u8d85\u758f\u6c34\u8868\u5c42\uff0c\u5e76\u68c0\u6d4b\u5176\u5728\u8d85\u4f4e\u6e29\u4f4e\u73af\u5883\u6e7f\u5ea6\u6761\u4ef6\u4e0b\u7684\u9632\u51b0\u548c\u6291\u971c\u5de5\u4f5c\u80fd\u529b\u3002<\/p>\n

\n

\"1.jpg\"<\/p>\n

\u56fe1\u00a0 \u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50\u5236\u53d6\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\u8bbe\u5907\u56fe<\/p>\n

\n

\"2.jpg\"<\/p>\n

\u56fe2\u00a0 \u5145\u653e\u7535\u5b9e\u4f53\u56fe<\/p>\n

\n

\"3.jpg\"<\/p>\n

\u56fe3\u00a0 \u7535\u5b50\u5236\u51b7\u8bbe\u5907<\/p>\n<\/section>\n

 <\/p>\n

\n\u7ed3\u679c<\/strong><\/legend>\n

1\uff09\u8bbe\u8ba1\u65b9\u6848\u4e86\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u8bbe\u5907\uff0c\u9009\u7528\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u6784\u9020\uff0c\u53ef\u4ee5\u6210\u672c\u4f4e\u7701\u65f6\u7701\u529b\u5730\u5236\u53d6\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\uff1b\u5728\u5939\u5c42\u73bb\u7483\u5e95\u6750\u4e0a\u53d6\u5f97\u6210\u529f\u5236\u53d6\u51fa\u4e86\u8d85\u758f\u6c34\u8868\u5c42\uff0c\u5355\u4e2a\u603b\u6d41\u91cf\u4e3a20sccm\u65f6\uff0c\u9759\u6001\u6570\u636e\u8868\u9762\u5f20\u529b\u505a\u5230171.4\u00b0\uff0c\u7ffb\u8f6c\u89d2\u5c0f\u4e8e2\u00b0\uff1b\u5728\u8f93\u51fa\u529f\u7387\u4e0d\u4f1a\u6539\u53d8\u7684\u60c5\u5f62\u4e0b\uff0c\u589e\u52a0\u5355\u4e2a\u6210\u5206\u4f1a\u9020\u6210\u8868\u5c42\u6784\u9020\u4e0d\u5300\u79f0\uff0c\u6d82\u819c\u54c1\u8d28\u4e0b\u964d\uff0c\u4ee5\u81f3\u7ffb\u8f6c\u89d2\u6269\u5927\u76f4\u5230\u4e27\u5931\u8d85\u758f\u6c34\u6027\u3002<\/p>\n

\n

2\uff09\u5728-2\u2103\u7684\u8d85\u4f4e\u6e29\u73af\u955c\u4e2d\uff0c\u4e0e\u540a\u9500\u7684\u88f8\u73bb\u7483\u5bf9\u6bd4\uff0c\u5236\u53d6\u7684\u8d85\u758f\u6c34\u5939\u5c42\u73bb\u7483\u8868\u5c42\u53ef\u4ee5\u660e\u663e\u589e\u52a0\u9759\u6001\u6570\u636e\u5236\u51b7\u4ea7\u751f\u7684\u51b7\u85cf\u5168\u8fc7\u7a0b\uff0c\u7ed3\u51bb\u6642\u95f4\u589e\u52a0\u81f33\u500d\u4ee5\u4e0a\uff1b\u5f53\u670d\u52a1\u5e73\u53f0\u5177\u5907\u5761\u5ea6\u65f6\uff0c\u6c34\u73e0\u6eda\u8d70\u8fdb\u800c\u4e0d\u5bb9\u6613\u5728\u8bd5\u54c1\u9762\u6709\u5927\u89c4\u6a21\u8986\u51b0\uff1b\u4e0e\u6b64\u540c\u65f6\u8d85\u4f4e\u6e29\u4e0b\u8d77\u971c\u5b9e\u9a8c\u8868\u660e\uff0c\u5236\u53d6\u7684\u8d85\u758f\u6c34\u5851\u6599\u8584\u819c\u56e0\u4e3a\u03bcm\uff5enm\u7ea7\u7684\u8868\u5c42\u4e0d\u5149\u6ed1\u6784\u9020\uff0c\u8d85\u4f4e\u6e29\u6807\u51c6\u4e0b\u5448\u73b0\u4e86\u8f83\u597d\u7684\u6291\u6b62\u8d77\u971c\u7279\u6027\u3002<\/p>\n<\/fieldset>\n

 <\/p>\n

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