{"id":20714,"date":"2022-01-10T10:17:58","date_gmt":"2022-01-10T02:17:58","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=20714"},"modified":"2022-01-07T14:02:07","modified_gmt":"2022-01-07T06:02:07","slug":"%e5%8f%91%e6%98%8e%e4%b8%93%e5%88%a9%e6%b0%94%e4%bd%93%e9%98%bb%e9%9a%94%e6%80%a7%e8%86%9c","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=20714","title":{"rendered":"\u53d1\u660e\u4e13\u5229\u6c14\u4f53\u963b\u9694\u6027\u819c"},"content":{"rendered":"\n\n\n\n\n\n\n\n
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\n\t\t\t\t\t\t\u505a\u4e3a\u5904\u7406\u5982\u8bb8\u7684\u9898\u578b\u7684\u65b9\u5f0f\uff0c\u660e\u786e\u63d0\u51fa\u4e86\u6839\u636e\u5bf9\u7531\u805a\u7845\u6c2e\u70f7\u9971\u548c\u6eb6\u6db2\u65bd\u80f6\u4ea7\u751f\u7684\u6d82\u5c42\u6267\u884c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u76f4\u5c04\uff0c\u8fdb\u800c\u4ea7\u751f\u6c2e\u6c27\u5316\u7845\u819c\u6216\u662f\u4e8c\u6c27\u5316\u7845\u819c\u7684\u65b9\u5f0f\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6839\u636e\u5e94\u7528\u5177\u5907\u6bd4\u805a\u7845\u6c2e\u70f7\u7684\u5404\u539f\u5b50\u95f4\u952e\u534f\u529b\u5927\u7684\u52a8\u80fd\u7684\u88ab\u79f0\u4f5c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf(\u4e0b\u5217\uff0c\u4e5f\u79f0\u4e4b\u4e3a\u201cVUV\u201d\u3001\u201cVUV\u5149\u201d)\u7684\u5149\u6ce2\u957f100\uff5e200nm\u7684\u805a\u5149\uff0c\u884c\u9a76\u88ab\u79f0\u4f5c\u5149\u91cf\u5b50\u52a0\u5de5\u5de5\u827a\u7684\u4ec5\u6709\u5149\u91cf\u5b50\u7684\u529f\u6548\uff0c\u7acb\u5373\u65ad\u5f00\u5206\u5b50\u7684\u5f15\u7ebf\u952e\u5408\uff0c\u4e0e\u6b64\u540c\u65f6\u884c\u9a76\u81ed\u6c27\u3001\u6d3b\u6027\u6c27\u5f00\u5c55\u6c27\u5316\u8fd8\u539f\u53cd\u5e94\uff0c\u4ece\u800c\u53ef\u4ee5\u5728\u8f83\u4f4e\u6c14\u6e29\u4e0b\u5f00\u5c55\u6c2e\u6c27\u5316\u7845\u819c\u6216\u662f\u4e8c\u6c27\u5316\u7845\u819c\u7684\u4ea7\u751f\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u8be6\u5c3d\u6765\u8bb2\uff0c\u901a\u5e38\uff0c\u5728\u73af\u6c27\u6811\u8102\u819c\u677f\u6750\u4e0a\u65bd\u80f6\u805a\u7845\u6c2e\u70f7\uff0c\u4e00\u6837\u5730\u5f00\u5c55\u7d2b\u5916\u7ebf\u7167\u5c04\u65f6\uff0c\u76f4\u5c04\u7684\u9762\u7684\u5916\u578b\u5468\u8fb9\u88ab\u6539\u6027\u6750\u6599\u800c\u4ea7\u751f\u9694\u7edd\u5c42(\u6d53\u5ea6\u8f83\u9ad8\u7684\u6c2e\u5c42)\u3002\u4e0e\u6b64\u540c\u65f6\u6c47\u62a5\u4e86\u63a8\u8bba\u4ece\u677f\u6750\u4fa7\u5e26\u8fdb\u7684\u6c34\u4efd\u9020\u6210\u7a7a\u6c14\u6c27\u5316\u4e2a\u4eba\u884c\u4e3a\uff0c\u4f7f\u9694\u7edd\u5c42\u4e0b\u7684\u5167\u90e8\u53d8\u6210\u7a7a\u6c14\u6c27\u5316\u819c(\u4e8c\u6c27\u5316\u7845\u5c42)\u7684\u4e2a\u4eba\u884c\u4e3a(\u6bd4\u5982\uff0c\u56fd\u9645\u6027\u516c\u5e03\u7b2c2011\/007543\u53f7)\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6b64\u5916\uff0c\u516c\u5e03\u4e86\u4ee5\u80fa\u7684\u52a0\u5165\u91cf\u64cd\u7eb5\u819c\u6784\u6210\u7684\u65b9\u5f0f(\u6bd4\u5982\uff0c\u65e5\u672c\u7279\u5f002012\uff0d16854\u53f7\u516c\u5e03)\uff0c\u5411\u805a\u7845\u6c2e\u70f7\u65bd\u80f6\u6db2\u4e2d\u4e8b\u5148\u6dfb\u52a0\u919b\u7c7b\u7b49\uff0c\u4e8b\u5148\u63a8\u52a8\u53cd\u6620\u7684\u65b9\u5f0f(\u6bd4\u5982\uff0c\u65e5\u672c\u8bb8\u53ef\u7b2c3212400\u53f7\u516c\u5e03)\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u521b\u9020\u53d1\u660e\u5167\u5bb9\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6b8a\u4e0d\u77e5\uff0c\u4ee5\u4e0a\u7684\u4e13\u5229\u6743\u53c2\u8003\u6587\u732e\u8bb0\u8ff0\u7684\u6280\u672f\u5e94\u7528\u4e2d\uff0c\u5728\u6eab\u5ea6\u4e0d\u592a\u9ad8\u7684\u6807\u51c6\u4e2d\u7684\u9ad8\u4f4e\u6e29\u4e0b\u53ef\u627f\u53d7\u957f\u671f\u7684\u50a8\u5b58\uff0c\u4f46\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u4e0d\u7ecf\u610f\u56e0\u6c34\u89e3\u53cd\u5e94\u7b49\u9020\u6210\u9694\u7edd\u5c42(\u6c7d\u4f53\u95f4\u9694\u5c42)\u9709\u53d8\uff0c\u5176\u5b9e\u9645\u6548\u679c\uff0c\u5b58\u6709\u6c7d\u4f53\u9ad8\u963b\u9694\u8fdf\u7f13\u7740\u9646\u7684\u9898\u578b\u3002\u683c\u5916\u662f\u5177\u59072\u5c42\u4ee5\u4e0a\u7684\u9694\u7edd\u5c42(\u6c7d\u4f53\u95f4\u9694\u5c42)\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff0c\u8be5\u9898\u578b\u663e\u8457\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u662f\u7531\u4e8e\u4ee5\u4e0a\u60c5\u51b5\u800c\u5b9e\u73b0\u7684\uff0c\u5176\u76ee\u6807\u53d6\u51b3\u4e8e\u7ed9\u4e88\u4e00\u79cd\u50a8\u5b58\u7262\u56fa\u6027\u3001\u7279\u522b\u662f\u5728\u5728\u4e25\u82db\u6807\u51c6(\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u6807\u51c6)\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u53d1\u660e\u8005\u7b49\u4e3a\u4e86\u66f4\u597d\u5730\u5f7b\u5e95\u89e3\u51b3\u4ee5\u4e0a\u7684\u9898\u578b\uff0c\u5f00\u5c55\u4e86\u6df1\u5165\u5206\u6790\u3002\u5176\u5b9e\u9645\u6548\u679c\uff0c\u53d1\u89c9\u884c\u9a76\u5305\u62ec\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff0c\u53ef\u4ee5\u6ee1\u8db3\u4ee5\u4e0a\u8bfe\u9898\u7814\u7a76\uff0c\u8fdb\u800c\u5b8c\u6210\u4e86\u672c\u4ea7\u54c1\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\u5e26\u6709\u65e0\u673a\u7269\uff0c\u8be5\u7b2c2\u9694\u7edd\u5c42\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u548c\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u5728\u7279\u6b8a\u8303\u7574\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5373\uff0c\u672c\u4ea7\u54c1\u6d89\u53ca\u5230\u4e00\u79cd\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff0c\u5176\u5148\u540e\u5305\u62ec\u677f\u6750\u3001\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\u5e26\u6709\u65e0\u673a\u7269\uff0c\u8be5\u7b2c2\u9694\u7edd\u5c42\u6700\u5c11\u5e26\u6709\u7845\u539f\u5b50\u548c\u6c27\u5206\u5b50\uff0c\u4e14\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(O\/Si)\u4e3a1.4\uff5e2.2\uff0c\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(N\/Si)\u4e3a0\uff5e0.4\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u56fe\u4e0b\u8868\u660e\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u56fe1\u662f\u8868\u9732\u4e3b\u8981\u8868\u73b0\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u5efa\u7acb\u4e2d\u91c7\u7528\u7684\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5b89\u88c5\u7684\u4e00\u4e2a\u4e8b\u4f8b\u7684\u5e73\u9762\u56fe\uff0c101\u4e3a\u7b49\u79bb\u5b50CVD\u5b89\u88c5\uff0c102\u4e3a\u771f\u7a7a\u6cf5\u69fd\uff0c103\u4e3a\u8d1f\u6781\u7535\u7ea7\uff0c105\u4e3a\u5e95\u5ea7\uff0c106\u4e3a\u70ed\u7269\u8d28\u5faa\u73af\u7cfb\u7edf\u7ba1\u7406\u4f53\u7cfb\uff0c107\u4e3a\u771f\u7a7a\u6cf5\u6392\u6c14\u7ba1\u7ba1\u7406\u4f53\u7cfb\uff0c108\u4e3a\u6c7d\u4f53\u5bfc\u8fdb\u7ba1\u7406\u4f53\u7cfb\uff0c109\u4e3a\u9ad8\u538b\u7535\u6e90\uff0c110\u4e3a\u677f\u6750\uff0c160\u4e3a\u52a0\u6e29\u5236\u51b7\u5b89\u88c5\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u56fe2\u662f\u8868\u9732\u4e3b\u8981\u8868\u73b0\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u5efa\u7acb\u4e2d\u91c7\u7528\u7684\u522b\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u7684\u4e00\u4e2a\u4e8b\u4f8b\u7684\u5e73\u9762\u56fe\uff0c1\u4e3a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff0c2\u4e3a\u677f\u6750\uff0c3\u4e3a\u7b2c1\u9694\u7edd\u5c42\uff0c31\u4e3a\u751f\u4ea7\u5236\u9020\u5b89\u88c5\uff0c32\u4e3a\u9001\u51fa\u53bb\u8f8a\uff0c33\u300134\u300135\u300136\u4e3a\u8fd0\u8f93\u8f8a\uff0c39\u300140\u4e3a\u6d82\u819c\u8f8a\uff0c41\u4e3a\u6c7d\u4f53\u4f9b\u8d27\u7ba1\uff0c42\u4e3a\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e90\uff0c43\u300144\u4e3a\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c5\uff0c45\u4e3a\u653e\u5377\u8f8a\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u56fe3\u662f\u8868\u9732\u4e3b\u8981\u8868\u73b0\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5b89\u88c5\u7684\u4e00\u4e2a\u4e8b\u4f8b\u7684\u5e73\u9762\u56fe\uff0c21\u4e3a\u5b89\u88c5\u8154\u5ba4\uff0c22\u4e3aXe\u51c6\u5206\u5b50\u706f\uff0c23\u4e3a\u652f\u6491\u67b6\uff0c24\u4e3a\u8bd5\u4ef6\u8f7d\u53f0\uff0c25\u4e3a\u8bd5\u4ef6\uff0c26\u4e3a\u906e\u9633\u677f\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u8be6\u5c3d\u6267\u884c\u65b9\u6cd5\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u6d89\u53ca\u5230\u4e00\u79cd\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff0c\u5176\u5148\u540e\u5305\u62ec\u677f\u6750\u3001\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\u5e26\u6709\u65e0\u673a\u7269\uff0c\u8be5\u7b2c2\u9694\u7edd\u5c42\u6700\u5c11\u5e26\u6709\u7845\u539f\u5b50\u548c\u6c27\u5206\u5b50\uff0c\u4e14\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(O\/Si)\u4e3a1.4\uff5e2.2\uff0c\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(N\/Si)\u4e3a0\uff5e0.4\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6839\u636e\u53d8\u6210\u5982\u8bb8\u7684\u7ec4\u6210\uff0c\u53ef\u5f97\u5230\u957f\u4e45\u7684\u50a8\u5b58\u7262\u56fa\u6027\u3001\u7279\u522b\u662f\u5728\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u5982\u8bb8\u4e25\u82db\u6807\u51c6\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u4e3a\u4ec0\u4e48\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u50a8\u5b58\u7262\u56fa\u6027\u3001\u7279\u522b\u662f\u5728\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\uff0c\u5176\u5177\u4f53\u7684\u539f\u56e0\u4e0d\u6e05\u695a\uff0c\u4f46\u89c9\u5f97\u662f\u5982\u4e0b\u6240\u793a\u7684\u539f\u56e0\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5bf9\u6700\u5c11\u5e26\u6709\u7845\u539f\u5b50\u548c\u6c27\u5206\u5b50\u7684\u9694\u7edd\u5c42\u3001\u5c24\u5176\u662f\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u7684\u5c42\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u800c\u5f97\u7684\u9694\u7edd\u5c42\u7684\u6709\u673a\u5316\u5b66\u6784\u6210\u4e2d\uff0c\u5728\u7845\u539f\u5b50\u4e0a\u5b58\u6709\u672a\u952e\u5408\u7ed3\u6784\u57df(\u672a\u7d50\u5408\u624b)\uff0c\u5982\u8bb8\u7684\u672a\u952e\u5408\u7ed3\u6784\u57df\u4f7f\u60ac\u5728\u7a7a\u4e2d\u952e\u3001Si\uff0dOH\u3001Si\uff0dH\u3001Si\u6c27\u81ea\u7531\u57fa\u7b49\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u53d8\u6210\u975e\u5e38\u5bb9\u6613\u53d7\u6c34\u89e3\u53cd\u5e94\u7b49\u7684\u5e72\u6270\u7684\u5f62\u72b6\u3002\u4e3a\u4e86\u66f4\u597d\u5730\u51cf\u5c11\u5982\u8bb8\u7684\u5371\u5bb3\uff0c\u7126\u8651\u4e0d\u5b89\u7684\u662f\u5c3d\u53ef\u80fd\u51cf\u5c11\u7845\u539f\u5b50\u7684\u672a\u952e\u5408\u7ed3\u6784\u57df\uff0c\u5018\u82e5\u4e3a\u672c\u7533\u8bf7\u529e\u7406\u521b\u9020\u53d1\u660e\u7684\u7b2c2\u9694\u7edd\u5c42\u7684\u6784\u6210\uff0c\u5219\u7845\u539f\u5b50\u7684\u672a\u952e\u5408\u7ed3\u6784\u57df\u51cf\u5c11\uff0c\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u50a8\u5b58\u65f6\u4e0d\u5bb9\u6613\u4ea7\u751f\u6c34\u89e3\u53cd\u5e94\u7b49\u9020\u6210\u7684\u6709\u673a\u5316\u5b66\u6784\u6210\u7684\u53d8\u5316\u3001\u819c\u76f8\u5bf9\u5bc6\u5ea6\u7684\u51cf\u5c11\u7b49\u8ff9\u8c61\uff0c\u53d8\u6210\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u662f\u5177\u5907\u6700\u5c112\u5c42\u7684\u9694\u7edd\u5c42\u7684\u7ec4\u6210\uff0c\u4f46\u5c31\u7b97\u4e3a\u5982\u8bb8\u7684\u7ec4\u6210\uff0c\u4e5f\u53ef\u4ee5\u53d8\u6210\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\u6b64\u5916\uff0c\u5f97\u77e5\u683c\u5916\u662f\u5e95\u5c42\u4e2d\u5177\u5907\u6700\u5c111\u5c42\u542b\u65e0\u673a\u7269\u7684\u9694\u7edd\u5c42\u7684\u7ec4\u6210\u4f7f\u957f\u671f\u6027\u7684\u50a8\u5b58\u7262\u56fa\u6027\u3001\u7279\u522b\u662f\u5728\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u5982\u8bb8\u4e25\u82db\u6807\u51c6\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u660e\u663e\u51cf\u5c11\uff0c\u5982\u8bb8\u7684\u7ec4\u6210\u4e2d\uff0c\u672c\u4ea7\u54c1\u83b7\u5f97\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u5982\u8bb8\u4e25\u82db\u6807\u51c6\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5e94\u4e88\u8868\u660e\uff0c\u4ee5\u4e0a\u7684\u4f53\u5236\u662f\u63a8\u65ad\u7684\uff0c\u672c\u4ea7\u54c1\u4e0d\u4f1a\u53d7\u5230\u4ee5\u4e0a\u4f53\u5236\u4e00\u5207\u9650\u5b9a\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u4e0b\u5217\uff0c\u5bf9\u672c\u4ea7\u54c1\u7684\u7504\u9009\u7684\u6267\u884c\u65b9\u6cd5\u5f00\u5c55\u8868\u660e\u3002\u5e94\u4e88\u8868\u660e\uff0c\u672c\u4ea7\u54c1\u4e0d\u4f46\u4ec5\u9650\u4e8e\u4e0b\u5217\u7684\u6267\u884c\u65b9\u6cd5\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6b64\u5916\uff0c\u672c\u4f7f\u7528\u8bf4\u660e\u4e2d\uff0c\u8868\u9732\u4e3b\u8981\u8868\u73b0\u8303\u7574\u7684\u201cX\uff5eY\u201d\u8868\u9732\u4e3b\u8981\u8868\u73b0\u201cX\u4ee5\u4e0a\u4e14Y\u4e0b\u5217\u201d\uff0c\u201c\u51c0\u91cd\u201d\u548c\u201c\u54c1\u8d28\u201d\u3001\u201c\u51c0\u91cd\uff05\u201d\u548c\u201c\u54c1\u8d28\uff05\u201d\u53ca\u5176\u201c\u51c0\u91cd\u4efd\u201d\u548c\u201c\u54c1\u8d28\u4efd\u201d\u505a\u4e3a\u8fd1\u4e49\u8bcd\u770b\u5f85\u3002\u6b64\u5916\uff0c\u53ea\u9700\u6c92\u6709\u5c24\u5176\u8868\u660e\uff0c\u5219\u5b9e\u9645\u64cd\u4f5c\u548c\u7269\u7406\u6027\u80fd\u7b49\u7684\u6d4b\u91cf\u5728\u5ba4\u5185\u6e29\u5ea6(20\uff5e25\u2103)\/\u7a7a\u6c14\u6e7f\u5ea640\uff5e50\uff05\u7684\u524d\u63d0\u4e0b\u6d4b\u91cf\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\uff1c\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff1e\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5148\u540e\u5177\u5907\u677f\u6750\u3001\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\u3002\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u8fdb\u4e00\u6b65\u5305\u62ec\u5176\u4ed6\u7684\u6784\u4ef6\u3002\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u6bd4\u5982\u5728\u677f\u6750\u4e0e\u7b2c1\u9694\u7edd\u5c42\u4e2d\u95f4\u3001\u7b2c1\u9694\u7edd\u5c42\u4e0e\u7b2c2\u9694\u7edd\u5c42\u4e2d\u95f4\u3001\u7b2c2\u9694\u7edd\u5c42\u4e0a\u3001\u6216\u662f\u6c92\u6709\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\u7684\u677f\u6750\u7684\u53e6\u4e00\u58c1\u53ef\u4ee5\u5177\u5907\u6240\u6709\u7684\u6784\u4ef6\u3002\u8fd9\u513f\uff0c\u505a\u4e3a\u5176\u4ed6\u7684\u6784\u4ef6\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u76ee\u524d\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4e2d\u91c7\u7528\u7684\u6784\u4ef6\u53ef\u4e00\u6837\u5730\u5e94\u7528\u6216\u662f\u901a\u8fc7\u9002\u5ea6\u5730\u88c5\u9970\u540e\u5e94\u7528\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u6838\u5fc3\u5c42\u3001\u73cd\u60dc\u5c42\u3001\u5149\u6ed1\u5c42\u3001\u589e\u7c98\u9540\u5c42\u3001\u9632\u6c34\u5c42\u51fa\u5c42\u3001\u5177\u5907\u6c34\u4efd\u5438\u9644\u529b\u7684\u5e72\u8e81\u5c42\u3001\u6297\u9759\u7535\u5c42\u7684\u4f5c\u7528\u5c42\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5177\u5907\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u6a21\u5757\u53ef\u4ee5\u5728\u677f\u6750\u7684\u4e00\u4e2a\u5916\u578b\u4e0a\u4ea7\u751f\uff0c\u8fd8\u53ef\u4ee5\u5728\u677f\u6750\u76842\u4e2a\u5916\u578b\u4e0a\u4ea7\u751f\u3002\u6b64\u5916\uff0c\u8be5\u6c7d\u4f53\u9ad8\u963b\u9694\u6a21\u5757\u53ef\u4ee5\u5e26\u6709\u4e0d\u6beb\u65e0\u7591\u95ee\u5177\u5907\u6c7d\u4f53\u9ad8\u963b\u9694\u7684\u5c42\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u3014\u677f\u6750\u3015\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7504\u9009\u5e94\u7528\u5851\u6599\u8584\u819c\u6216\u662f\u5851\u6599\u677f\u505a\u4e3a\u677f\u6750\uff0c\u66f4\u7504\u9009\u5e94\u7528\u6ca1\u6709\u989c\u8272\u5168\u900f\u660e\u7684\u7531\u73af\u6c27\u6811\u8102\u7ec4\u6210\u7684\u819c\u6216\u662f\u7247\u3002\u5e94\u7528\u7684\u5851\u6599\u8584\u819c\u53ea\u9700\u662f\u53ef\u4ee5\u7ef4\u6301\u7b2c1\u9694\u7edd\u5c42\u548c\u7b2c2\u9694\u7edd\u5c42\u7b49\u7684\u819c\uff0c\u5219\u6750\u6599\u3001\u8584\u539a\u7b49\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u6309\u7167\u5e94\u7528\u76ee\u5730\u7b49\u9002\u5ea6\u5730\u6311\u9009\u3002\u505a\u4e3a\u4ee5\u4e0a\u5851\u6599\u8584\u819c\uff0c\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u805a\u6c28\u916f\u6811\u8102\u3001\u7532\u57fa\u4e19\u70ef\u9178\u73af\u6c27\u6811\u8102\u3001\u7532\u57fa\u4e19\u70ef\u9178-\u5bcc\u9a6c\u9178\u805a\u5408\u7269\u3001\u805a\u82ef\u4e59\u70ef\u9897\u7c92\u3001\u5168\u900f\u660e\u6c1f\u73af\u6c27\u6811\u8102\u3001\u805a\u4e19\u70ef\u8148\u3001\u6c1f\u5316\u6c22\u805a\u9170\u4e9a\u80fa\u6811\u8102\u3001\u805a\u9170\u80fa\u6811\u8102\u3001\u4e19\u70ef\u9178\u6811\u8102\u9170\u4e9a\u80fa\u73af\u6c27\u6811\u8102\u3001\u805a\u919a\u9170\u4e9a\u80fa\u73af\u6c27\u6811\u8102\u3001\u4e59\u9170\u5316\u7532\u57fa\u7ea4\u7ef4\u7d20\u73af\u6c27\u6811\u8102\u3001\u805a\u6c28\u916f\u80f6\u7c98\u5242\u3001\u805a\u919a\u919a\u916e\u73af\u6c27\u6811\u8102\u3001\u805a\u78b3\u9178\u73af\u6c27\u6811\u8102\u3001\u8102\u73af\u5f0f\u5f02\u620a\u6a61\u80f6\u73af\u6c27\u6811\u8102\u3001\u805a\u82b3\u916f\u73af\u6c27\u6811\u8102\u3001\u805a\u919a\u781c\u73af\u6c27\u6811\u8102\u3001\u805a\u781c\u73af\u6c27\u6811\u8102\u3001\u73af\u70ef\u70c3\u805a\u5408\u7269\u3001\u82b4\u73af\u6539\u6027\u6750\u6599\u805a\u78b3\u9178\u73af\u6c27\u6811\u8102\u3001\u8102\u73af\u6539\u6027\u6750\u6599\u805a\u78b3\u9178\u73af\u6c27\u6811\u8102\u3001\u82b4\u73af\u6539\u6027\u6750\u6599\u805a\u6c28\u916f\u6811\u8102\u3001pe\u9170\u57fa\u5316\u5b66\u7269\u8d28\u7b49\u70ed\u5851\u6027\u6811\u8102\u3002\n\t\t\t\t\t<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n\n
\n\t\t\t\t\t\u3010\u4f7f\u7528\u8bf4\u660e\u3011\uff1a\n\t\t\t\t<\/td>\n<\/tr>\n
\n

\n\t\t\t\t\t\t\u5e94\u7528\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u505a\u4e3a\u6709\u673aEL\u5143\u5668\u4ef6\u7b49\u7535\u5b50\u4ea7\u54c1\u7684\u57fa\u6750\u65f6\uff0c\u7504\u9009\u4ee5\u4e0a\u677f\u6750\u7531\u5177\u5907\u8010\u6e29\u6027\u7684\u8d44\u6599\u7ec4\u6210\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u5e94\u7528\u70ed\u81a8\u80c0\u7cfb\u6570\u4e3a15ppm\/K\uff5e100ppm\/K\u4e14\u73bb\u7483\u5316\u8f6c\u53d8\u6eab\u5ea6(Tg)\u4e3a100\u2103\uff5e300\u2103\u7684\u677f\u6750\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5c06\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u6bd4\u5982\u4e0e\u504f\u632f\u7247\u7ec4\u6210\u5e94\u7528\u65f6\uff0c\u7504\u9009\u4ee5\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u9694\u7edd\u5c42\u623f\u5c4b\u671d\u5411\u6a21\u5757\u7684\u91cc\u4fa7\u7684\u65b9\u6cd5\u914d\u5907\u3002\u66f4\u7504\u9009\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u9694\u7edd\u5c42\u914d\u5907\u5728\u6253\u5f00\u7684\u6700\u91cc\u4fa7(\u4e0e\u5143\u5668\u4ef6\u4e34\u63a5)\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u7531\u4e8e\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u88ab\u4f5c\u4e3a\u6709\u673aEL\u5143\u5668\u4ef6\u7b49\u7535\u5b50\u4ea7\u54c1\uff0c\u56e0\u6b64\u7504\u9009\u677f\u6750\u5168\u900f\u660e\u3002\u5373\uff0c\u5149\u6e90\u900f\u5c04\u7cfb\u6570\u901a\u5e38\u4e3a80\uff05\u4ee5\u4e0a\uff0c\u7504\u9009\u4e3a85\uff05\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a90\uff05\u4ee5\u4e0a\u3002\u5149\u6e90\u900f\u5c04\u7cfb\u6570\u53ef\u4ee5\u884c\u9a76JIS\u00a0K7105\uff1a1981\u4e2d\u8bb0\u8ff0\u7684\u65b9\u5f0f\u6d4b\u7b97\uff0c\u5373\u5e94\u7528\u79ef\u5206\u7403\u5f0f\u5149\u6e90\u900f\u5c04\u7cfb\u6570\u6d4b\u91cf\u5b89\u88c5\u6d4b\u91cf\u603b\u5149\u6e90\u900f\u5c04\u7cfb\u6570\u548c\u6f2b\u5c04\u5149\u91cf\uff0c\u7531\u603b\u5149\u6e90\u900f\u5c04\u7cfb\u6570\u51cf\u6389\u8513\u5ef6\u900f\u5c04\u7cfb\u6570\u800c\u6d4b\u7b97\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u53ef\u662f\uff0c\u5c06\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7528\u4ee5\u4e3b\u8981\u8868\u73b0\u5668\u4e3b\u8981\u7528\u9014\u65f6\uff0c\u4e0d\u8bbe\u5b9a\u5728\u89c2\u67e5\u4fa7\u65f6\u7b49\u4e0d\u52a1\u5fc5\u89c4\u5b9a\u900f\u5149\u6027\u3002\u56e0\u800c\uff0c\u5982\u8bb8\u7684\u60c5\u5f62\u4e0b\u8fd8\u53ef\u4ee5\u5e94\u7528\u4e0d\u5168\u900f\u660e\u7684\u539f\u6750\u6599\u505a\u4e3a\u677f\u6750\u3002\u505a\u4e3a\u4e0d\u5168\u900f\u660e\u7684\u539f\u6750\u6599\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u805a\u4e19\u70ef\u8148\u3001\u805a\u567b\u5429\u3001\u516c\u77e5\u7684\u6db2\u6676\u9ad8\u805a\u7269\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4e2d\u91c7\u7528\u7684\u677f\u6750\u7684\u8584\u539a\u4f9d\u636e\u4e3b\u8981\u7528\u9014\u9002\u5ea6\u5730\u6311\u9009\uff0c\u56e0\u800c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u5178\u578b\u6027\u7684\u4e3a1\uff5e800\u03bcm\uff0c\u7504\u9009\u4e3a10\uff5e200\u03bcm\u3002\u8fd9\u79cd\u5851\u6599\u8584\u819c\u53ef\u4ee5\u5177\u5907\u5168\u900f\u660e\u5bfc\u7535\u6027\u5c42\u3001\u9762\u6f06\u5c42\u3001\u5168\u900f\u660e\u786c\u9540\u5c42\u7b49\u4f5c\u7528\u5c42\u3002\u4f5c\u7528\u5c42\u9664\u4ee5\u4e0a\u7684\u4e4b\u5916\uff0c\u8fd8\u53ef\u7504\u9009\u9009\u7528\u65e5\u672c\u7279\u5f002006-289627\u53f7\u516c\u5e03\u7684\u7b2c\u201c0036\u201d\u6bb5\uff5e\u7b2c\u201c0038\u201d\u6bb5\u4e2d\u8bb0\u8ff0\u7684\u4f5c\u7528\u5c42\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u677f\u6750\u7504\u9009\u5916\u578b\u7684\u5149\u6ed1\u9ad8\u671d\u3002\u505a\u4e3a\u5916\u578b\u7684\u5e73\u6574\u6027\uff0c\u7504\u9009\u5747\u503c\u5916\u578b\u8868\u9762\u7c97\u7cd9\u5ea6(Ra)\u4e3a2nm\u4e0b\u5217\u3002\u6700\u4f4e\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u597d\u7528\u4e0a\u4e3a0.01nm\u4ee5\u4e0a\u3002\u4f9d\u636e\u5fc5\u9700\uff0c\u53ef\u4ee5\u5bf9\u677f\u6750\u7684\u53cc\u9762\u3001\u6700\u5c11\u8bbe\u5b9a\u9694\u7edd\u5c42\u7684\u4e00\u4fa7\u5f00\u5c55\u78be\u78e8\uff0c\u4ee5\u53d1\u5c55\u5149\u6ed1\u6027\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6b64\u5916\uff0c\u4ee5\u4e0a\u4f8b\u4e3e\u7684\u677f\u6750\u53ef\u4ee5\u4e3a\u672a\u62c9\u4f38\u7f20\u7ed5\u819c\uff0c\u8fd8\u53ef\u4ee5\u4e3a\u62c9\u7533\u89e3\u51b3\u8fc7\u7684\u819c\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u4e2d\u91c7\u7528\u7684\u677f\u6750\u53ef\u4ee5\u884c\u9a76\u4e00\u5411\u81f3\u4eca\u516c\u77e5\u7684\u4e00\u6837\u5e73\u65f6\u65b9\u5f0f\u751f\u4ea7\u5236\u9020\u3002\u6bd4\u5982\uff0c\u53ef\u4ee5\u884c\u9a76\u6324\u5851\u673a\u5c06\u505a\u4e3a\u539f\u6750\u6599\u7684\u73af\u6c27\u6811\u8102\u7194\u5316\uff0c\u4ece\u73af\u5f62\u6599\u7ba1\u3001T\u578b\u6a21\u5934\u6324\u538b\u540e\u8fc5\u901f\u5236\u51b7\uff0c\u4ece\u800c\u751f\u4ea7\u5236\u9020\u672c\u8d28\u4e0a\u4e0d\u5b9a\u5f62\u3001\u672a\u8d8b\u5411\u7684\u672a\u62c9\u7533\u7684\u677f\u6750\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u53ef\u4ee5\u5bf9\u677f\u6750\u7684\u6700\u5c11\u8bbe\u5b9a\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u4e00\u4fa7\u5f00\u5c55\u7528\u4ee5\u53d1\u5c55\u5bc6\u5408\u6027\u7684\u516c\u77e5\u7684\u5404\u79cd\u5404\u6837\u89e3\u51b3\uff0c\u6bd4\u5982\u7535\u5f27\u653e\u7535\u89e3\u51b3\u3001\u706b\u7130\u5904\u7406\u3001\u7a7a\u6c14\u6c27\u5316\u89e3\u51b3\u6216\u662f\u7b49\u79bb\u5b50\u89e3\u51b3\u3001\u540e\u8ff0\u7684\u5149\u6ed1\u5c42\u7684\u91cd\u53e0\u7b49\uff0c\u7504\u9009\u4f9d\u636e\u5fc5\u9700\u7ec4\u6210\u5f00\u5c55\u4ee5\u4e0a\u89e3\u51b3\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u3014\u7b2c1\u9694\u7edd\u5c42\u3015\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u4ea7\u751f\u4e8e\u677f\u6750\u7684\u4e0a\u65b9\u7684\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u5e26\u6709\u65e0\u673a\u7269\u3002\u505a\u4e3a\u7b2c1\u9694\u7edd\u5c42\u542b\u6709\u7684\u65e0\u673a\u7269\uff0c\u6c92\u6709\u683c\u5916\u9650\u5b9a\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u6c22\u6c27\u5316\u7269\u3001\u91d1\u5c5e\u6750\u6599\u6c2e\u5316\u5408\u7269\u3001\u91d1\u5c5e\u6750\u6599\u6e17\u78b3\u4f53\u3001\u91d1\u5c5e\u6750\u6599\u6c2e\u6c27\u5316\u5408\u7269\u6216\u662f\u91d1\u5c5e\u6750\u6599\u78b3\u91d1\u5c5e\u6c27\u5316\u7269\u3002\u5728\u5176\u4e2d\uff0c\u4ece\u6c7d\u4f53\u9694\u7edd\u7279\u6027\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u53ef\u7504\u9009\u5e94\u7528\u5e26\u6709\u51fa\u81eaSi\u3001Al\u3001In\u3001Sn\u3001Zn\u3001Ti\u3001Cu\u3001Ce\u548cTa\u4e2d\u76841\u79cd\u4ee5\u4e0a\u7684\u91d1\u5c5e\u6750\u6599\u7684\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6c2e\u5316\u5408\u7269\u3001\u6e17\u78b3\u4f53\u3001\u6c2e\u6c27\u5316\u5408\u7269\u6216\u662f\u78b3\u91d1\u5c5e\u6c27\u5316\u7269\u7b49\uff0c\u66f4\u7504\u9009\u51fa\u81eaSi\u3001Al\u3001In\u3001Sn\u3001Zn\u548cTi\u4e2d\u7684\u91d1\u5c5e\u6750\u6599\u7684\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6c2e\u5316\u5408\u7269\u6216\u662f\u6c2e\u6c27\u5316\u5408\u7269\uff0c\u683c\u5916\u7504\u9009Si\u548cAl\u4e2d\u7684\u6700\u5c111\u79cd\u7684\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6c2e\u5316\u5408\u7269\u6216\u662f\u6c2e\u6c27\u5316\u5408\u7269\u3002\u505a\u4e3a\u7504\u9009\u7684\u65e0\u673a\u7269\uff0c\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u4e8c\u6c27\u5316\u7845\u3001\u6c2e\u5316\u7845\u3001\u6c2e\u6c27\u5316\u7845\u3001\u78b3\u78b3\u590d\u5408\u6750\u6599\u3001\u78b3\u4e8c\u6c27\u5316\u7845\u3001\u4e09\u6c27\u5316\u4e8c\u94dd\u3001\u6c27\u5316\u949b\u3001\u6216\u662f\u7845\u9178\u94dd\u7ea4\u7ef4\u6be1\u7b49\u5206\u5b50\u4f34\u4fa3\u3002\u53ef\u4ee5\u5e26\u6709\u5176\u4ed6\u7684\u4e8b\u7269\u505a\u4e3a\u4e3b\u8981\u7684\u6210\u4efd\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u7b2c1\u9694\u7edd\u5c42\u542b\u6709\u7684\u65e0\u673a\u7269\u7684\u6210\u5206\u6c92\u6709\u683c\u5916\u9650\u5b9a\uff0c\u5728\u7b2c1\u9694\u7edd\u5c42\u4e2d\uff0c\u7504\u9009\u4e3a50\u51c0\u91cd\uff05\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a80\u51c0\u91cd\uff05\u4ee5\u4e0a\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a95\u51c0\u91cd\uff05\u4ee5\u4e0a\uff0c\u683c\u5916\u7504\u9009\u4e3a98\u51c0\u91cd\uff05\u4ee5\u4e0a\uff0c\u6700\u7504\u9009\u4e3a100\u51c0\u91cd\uff05(\u5373\uff0c\u7b2c1\u9694\u7edd\u5c42\u7531\u65e0\u673a\u7269\u7ec4\u6210)\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u7b2c1\u9694\u7edd\u5c42\u6839\u636e\u5e26\u6709\u65e0\u673a\u7269\u800c\u5177\u5907\u6c7d\u4f53\u9ad8\u963b\u9694\u3002\u8fd9\u513f\uff0c\u7b2c1\u9694\u7edd\u5c42\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u7528\u5728\u677f\u6750\u4e0a\u4ea7\u751f\u6709\u7b2c1\u9694\u7edd\u5c42\u7684\u91cd\u53e0\u4f53\u6d4b\u7b97\u65f6\uff0c\u6c34\u84b8\u6c7d\u900f\u8fc7\u7387(WVTR)\u7504\u9009\u4e3a0.1g\/(m2<\/sup>\u00b7day)\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a0.01g\/(m2<\/sup>\u00b7day)\u4e0b\u5217\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u6cd5(PVD\u6cd5)\u3001\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5(CVD\u6cd5)\u7b49\u771f\u7a7a\u6cf5\u6d82\u819c\u6cd5\uff0c\u6216\u662f\u5bf9\u65bd\u80f6\u5e26\u6709\u65e0\u673a\u7269\u7684\u6db2\u6001\u3001\u7504\u9009\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u7684\u6db2\u6001\u800c\u4ea7\u751f\u7684\u6d82\u5c42\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u6765\u4ea7\u751f\u7684\u65b9\u5f0f(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u65bd\u80f6\u6cd5)\uff0c\u66f4\u7504\u9009\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u6cd5\u6216\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u4e0b\u5217\uff0c\u5bf9\u771f\u7a7a\u6cf5\u6d82\u819c\u6cd5\u548c\u65bd\u80f6\u6cd5\u5f00\u5c55\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\uff1c\u771f\u7a7a\u6cf5\u6d82\u819c\u6cd5\uff1e\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u6cd5(Physical\u00a0Vapor\u00a0Deposition\uff0cPVD\u6cd5)\u662f\u5728\u6c14\u76f8\u8272\u8c31\u4e2d\u884c\u9a76\u7269\u7406\u65b9\u6cd5\u5728\u6210\u5206\u7684\u5916\u578b\u6c89\u79ef\u603b\u4f53\u76ee\u6807\u6210\u5206\u3001\u6bd4\u5982\u78b3\u819c\u7b49\u5851\u6599\u8584\u819c\u7684\u65b9\u5f0f\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u78c1\u63a7\u6e85\u5c04\u6cd5(DC\u78c1\u63a7\u6e85\u5c04\u6cd5\u3001RF\u78c1\u63a7\u6e85\u5c04\u6cd5\u3001\u7535\u5b50\u675f\u78c1\u63a7\u6e85\u5c04\u6cd5\u548c\u78c1\u63a7\u6e85\u5c04\u6cd5\u7b49)\u3001\u771f\u7a7a\u6cf5\u84b8\u9540\u6cd5\u3001\u7b49\u79bb\u5b50\u55b7\u6d82\u6cd5\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u78c1\u63a7\u6e85\u5c04\u6cd5\u662f\u5728\u771f\u5185\u8154\u623f\u95f4\u5185\u8bbe\u5b9a\u9776\uff0c\u589e\u52a0\u9ad8\u7535\u538b\u4f7f\u79bb\u5b50\u5316\u7684\u4e86\u89e3\u6c7d\u4f53\u539f\u7d20(\u901a\u5e38\u4e3a\u6c29)\u8d1f\u7535\u5b50\u9776\uff0c\u4f7f\u9776\u5916\u578b\u7684\u5206\u5b50\u8ff8\u6e85\u800c\u4f9d\u9644\u4e8e\u677f\u6750\u7684\u65b9\u5f0f\u3002\u8fd9\u65f6\uff0c\u4e5f\u53ef\u9009\u7528\u53cd\u6620\u6027\u78c1\u63a7\u6e85\u5c04\u6cd5\uff0c\u5373\u5411\u623f\u95f4\u5185\u5546\u54c1\u6d41\u901aN2\u3001o2\uff0c\u4f7f\u56e0\u6c29\u6c14\u74f6\u4ece\u9776\u8ff8\u6e85\u7684\u56e0\u7d20\u4e0e\u6c2e\u3001\u6c27\u53cd\u6620\u800c\u4ea7\u751f\u6709\u673a\u7269\u5c42\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5(Chemical\u00a0Vapor\u00a0Deposition\uff0cCVD\u6cd5)\u662f\u4f9b\u8d27\u5e26\u6709\u603b\u4f53\u76ee\u6807\u5851\u6599\u8584\u819c\u7684\u6210\u4efd\u7684\u6750\u6599\u6c7d\u4f53\uff0c\u884c\u9a76\u677f\u6750\u5916\u578b\u6216\u662f\u6c14\u76f8\u8272\u8c31\u4e2d\u7684\u5316\u5b66\u53d8\u5316\u5728\u677f\u6750\u4e0a\u6c89\u79ef\u819c\u7684\u65b9\u5f0f\u3002\u6b64\u5916\uff0c\u6709\u4e3a\u4e86\u66f4\u597d\u5730\u4f7f\u5316\u5b66\u53d8\u5316\u6d3b\u6027\u800c\u9020\u6210\u7b49\u79bb\u5b50\u7b49\u7684\u65b9\u5f0f\u7b49\uff0c\u53ef\u5217\u4e3e\u70edCVD\u6cd5\u3001\u91d1\u5c5e\u50ac\u5316\u5242\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u3001\u5149CVD\u6cd5\u3001\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u6cd5\u3001\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50CVD\u6cd5\u7b49\u516c\u77e5\u7684CVD\u65b9\u6cd5\u7b49\u3002\u867d\u6c92\u6709\u683c\u5916\u9650\u5b9a\uff0c\u4f46\u4ece\u5236\u819c\u901f\u7387\u3001\u89e3\u51b3\u603b\u9762\u79ef\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u8fd0\u7528\u7b49\u79bb\u5b50CVD\u6cd5\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u884c\u9a76\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u6cd5\u3001\u5927\u6c14\u538b\u529b\u6216\u662f\u5927\u6c14\u538b\u529b\u5468\u8fb9\u7684\u5de5\u4f5c\u538b\u529b\u4e0b\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u83b7\u5f97\u7684\u7b2c1\u9694\u7edd\u5c42\u53ef\u4ee5\u6839\u636e\u6311\u9009\u505a\u4e3a\u539f\u6599(\u4e5f\u79f0\u4e4b\u4e3a\u6750\u6599)\u7684\u91d1\u5c5e\u5316\u5408\u7269\u3001\u6eb6\u89e3\u6c7d\u4f53\u3001\u6eb6\u89e3\u6eab\u5ea6\u3001\u952e\u5165\u7535\u529b\u5de5\u7a0b\u7b49\u6807\u51c6\u6765\u751f\u4ea7\u5236\u9020\u603b\u4f53\u76ee\u6807\u5316\u5b66\u7269\u8d28\uff0c\u56e0\u6b64\u7504\u9009\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6bd4\u5982\uff0c\u5018\u82e5\u5e94\u7528\u7845\u5316\u5b66\u7269\u8d28\u505a\u4e3a\u6750\u6599\u5316\u5b66\u7269\u8d28\uff0c\u6eb6\u89e3\u6c7d\u4f53\u5e94\u7528\u6c27\uff0c\u5219\u8f6c\u5316\u6210\u7845\u91d1\u5c5e\u6c27\u5316\u7269\u3002\u8fd9\u662f\u7531\u4e8e\u5728\u7b49\u79bb\u5b50\u5ba4\u5185\u7a7a\u95f4\u5185\u5c24\u5176\u5f88\u662f\u5f00\u6717\u7684\u6d53\u5dee\u6781\u5316\u9897\u7c92\u00b7\u6d3b\u529b\u6c27\u81ea\u7531\u57fa\u4ee5\u5bc6\u5ea6\u9ad8\u7684\u5b58\u6709\uff0c\u56e0\u6b64\u5728\u7b49\u79bb\u5b50\u5ba4\u5185\u7a7a\u95f4\u5185\u5c24\u5176\u5f88\u662f\u5feb\u901f\u5730\u63a8\u52a8\u591a\u6b65\u5316\u5b66\u53d8\u5316\uff0c\u4f7f\u5728\u7b49\u79bb\u5b50\u5ba4\u5185\u7a7a\u95f4\u5185\u5b58\u6709\u7684\u539f\u7d20\u4ee5\u5c24\u5176\u5f88\u662f\u77ed\u7684\u6642\u95f4\u8f6c\u5316\u6210\u70ed\u5b66\u4e0a\u7262\u56fa\u7684\u5316\u5b66\u7269\u8d28\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u505a\u4e3a\u6750\u6599\u5316\u5b66\u7269\u8d28\uff0c\u7504\u9009\u5e94\u7528\u7845\u5316\u5b66\u7269\u8d28\u3001\u949b\u5316\u5b66\u7269\u8d28\u6216\u662f\u94dd\u5316\u5b66\u7269\u8d28\u3002\u8fd9\u79cd\u6750\u6599\u5316\u5b66\u7269\u8d28\u53ef\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5728\u5176\u4e2d\uff0c\u505a\u4e3a\u7845\u5316\u5b66\u7269\u8d28\uff0c\u53ef\u5217\u4e3e\u6c2f\u7845\u70f7\u3001\u56db\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u6b63\u4e19\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u5f02\u4e19\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u6b63\u4e01\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u53d4\u4e01\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u7532\u57fa\u4e8c\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u7532\u57fa\u4e8c\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u4e59\u57fa\u4e8c\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u82ef\u57fa\u4e8c\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u7f9f\u57fa\u4e09\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u4e59\u57fa\u4e09\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u82ef\u57fa\u4e09\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u3001(3,3,3-\u4e09\u6c1f\u4e19\u57fa)\u4e09\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u516d\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3001\u53cc(\u4e8c\u7532\u57fa\u7f9f\u57fa)\u4e8c\u7532\u57fa\u6c2f\u7845\u70f7\u3001\u53cc(\u4e8c\u7532\u57fa\u7f9f\u57fa)\u7f9f\u57fa\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6c2f\u7845\u70f7\u3001\u53cc(\u4e59\u57fa\u7f9f\u57fa)\u4e8c\u7532\u57fa\u6c2f\u7845\u70f7\u3001N,O-\u53cc(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)\u4e59\u9170\u80fa\u3001\u53cc(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)\u78b3\u4e8c\u4e9a\u80fa\u3001\u4e8c\u4e59\u57fa\u7f9f\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u7532\u57fa\u7f9f\u57fa\u4e8c\u7532\u57fa\u6c2f\u7845\u70f7\u3001\u516d\u7f9f\u57fa\u4e8c\u7845\u6c2e\u70f7\u3001\u516d\u7f9f\u57fa\u73af\u4e09\u7845\u6c2e\u70f7\u3001\u4e03\u7f9f\u57fa\u4e8c\u7845\u6c2e\u70f7\u3001\u4e5d\u7f9f\u57fa\u4e09\u7845\u6c2e\u70f7\u3001\u516b\u7f9f\u57fa\u73af\u56db\u7845\u6c2e\u70f7\u3001\u56db(\u4e8c\u7532\u57fa\u7f9f\u57fa)\u6c2f\u7845\u70f7\u3001\u56db\u4e19\u70ef\u9178\u916f\u6c2f\u7845\u70f7\u3001\u56db\u7f9f\u57fa\u4e8c\u7845\u6c2e\u70f7\u3001\u4e09(\u4e8c\u7532\u57fa\u7f9f\u57fa)\u6c2f\u7845\u70f7\u3001\u4e09\u4e59\u6c27\u57fa\u6c1f\u6c2f\u7845\u70f7\u3001\u70ef\u4e19\u57fa\u4e8c\u7532\u57fa\u6c2f\u7845\u70f7\u3001\u70ef\u4e19\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u82c4\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u53cc(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)\u4e59\u7094\u6c14\u4f53\u30011,4-\u53cc(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)-1,3-\u4e01\u4e8c\u7094\u3001\u4e8c\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u30011,3-\u4e8c\u7845\u6742\u4e01\u70f7\u3001\u53cc(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u70f7\u6c14\u4f53\u3001\u73af\u620a\u4e8c\u70ef\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u82ef\u57fa\u4e8c\u7532\u57fa\u6c2f\u7845\u70f7\u3001\u82ef\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u7094\u4e19\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa\u4e59\u7094\u6c14\u4f53\u30011-(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)-1-\u4e19\u7094\u3001\u4e09(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u70f7\u6c14\u4f53\u3001\u4e09(\u4e09\u7f9f\u57fa\u7532\u7845\u70f7\u57fa)\u6c2f\u7845\u70f7\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u516d\u7f9f\u57fa\u4e8c\u6c2f\u7845\u70f7\u3001\u516b\u7f9f\u57fa\u73af\u56db\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3001\u56db\u7f9f\u57fa\u73af\u56db\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3001\u516d\u7f9f\u57fa\u73af\u56db\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3001M\u00a0Silicate51\u7b49\u3002\u6b64\u5916\uff0c\u53ef\u5217\u4e3e\u4ea7\u751f\u540e\u8ff0\u7684\u505a\u4e3a\u7504\u9009\u65b9\u6cd5\u7684\u6ee1\u8db3(i)\uff5e(iii)\u8981\u7d20\u7684\u9694\u7edd\u5c42\u65f6\u91c7\u7528\u7684\u505a\u4e3a\u6750\u6599\u5316\u5b66\u7269\u8d28\u7684\u7845\u5316\u5b66\u7269\u8d28\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u505a\u4e3a\u949b\u5316\u5b66\u7269\u8d28\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u5de5\u4e1a\u7532\u9187\u949b\u3001\u4e59\u9178\u4e59\u916f\u949b\u3001\u5f02\u4e19\u9187\u949b\u3001\u56db\u5f02\u4e19\u9187\u949b\u3001\u6b63\u4e01\u9187\u949b\u3001\u4e8c\u5f02\u4e19\u6c27\u57fa(\u53cc-2,4-\u620a\u4e8c\u916e\u9178)\u949b\u3001\u4e8c\u5f02\u4e19\u6c27\u57fa(\u53cc-2,4-\u4e59\u9170\u4e59\u9178\u4e59\u916f)\u949b\u3001\u4e8c\u6b63\u4e01\u6c27\u57fa(\u53cc-2,4-\u620a\u4e8c\u916e\u9178)\u949b\u3001\u4e59\u9170\u4e19\u916e\u949b\u3001\u949b\u9178\u4e01\u916f\u4e8c\u805a\u4f53\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u505a\u4e3a\u94dd\u5316\u5b66\u7269\u8d28\uff0c\u53ef\u5217\u4e3e\u4e59\u9178\u4e59\u916f\u94dd\u3001\u4e09\u5f02\u4e19\u9187\u94dd\u3001\u5f02\u4e19\u9187\u94dd\u3001\u6b63\u4e01\u9187\u94dd\u3001\u4ef2\u4e01\u9187\u94dd\u3001\u53d4\u4e01\u9187\u94dd\u3001\u4e59\u9170\u4e19\u916e\u94dd\u3001\u4e09\u4e59\u57fa\u4e09\u4ef2\u4e01\u9187\u4e8c\u94dd\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u7528\u4ee5\u6eb6\u89e3\u5e26\u6709\u67d0\u4e9b\u91d1\u5c5e\u6750\u6599\u7684\u6750\u6599\u6c7d\u4f53\u800c\u83b7\u5f97\u65e0\u673a\u7269\u7684\u6eb6\u89e3\u6c7d\u4f53\uff0c\u53ef\u5217\u4e3e\u6c21\u6c14\u3001\u7532\u70f7\u6c14\u4f53\u3001\u6db2\u6001\u4e8c\u6c27\u5316\u78b3\u3001\u4e00\u6c27\u5316\u78b3\u6c14\u4f53\u3001\u4e8c\u6c27\u5316\u78b3\u6c14\u4f53\u3001N2\u3001\u4e8c\u6c27\u5316\u6c2e\u3001\u4e00\u6c27\u5316\u4e8c\u6c2e\u6c7d\u4f53\u3001\u6c27\u5316\u786b\u6c7d\u4f53\u3001\u4e8c\u6c27\u5316\u6c2e\u6c7d\u4f53\u3001o2\u3001\u6c34\u84b8\u6c7d\u7b49\u3002\u6b64\u5916\uff0c\u53ef\u4ee5\u5c06\u4ee5\u4e0a\u6eb6\u89e3\u6c7d\u4f53\u4e0e\u6c29\u6c14\u74f6\u3001\u6c2e\u6c14\u7b49\u7a00\u6709\u6c14\u4f53\u6df7\u548c\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6839\u636e\u9002\u5ea6\u5730\u6311\u9009\u5e26\u6709\u6750\u6599\u5316\u5b66\u7269\u8d28\u7684\u6750\u6599\u6c7d\u4f53\u548c\u6eb6\u89e3\u6c7d\u4f53\u53ef\u4ee5\u83b7\u5f97\u6240\u671f\u5f85\u7684\u7b2c1\u9694\u7edd\u5c42\u3002\u884c\u9a76CVD\u6cd5\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c42\u662f\u5e26\u6709\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6c2e\u5316\u5408\u7269\u3001\u6c2e\u6c27\u5316\u5408\u7269\u6216\u662f\u78b3\u91d1\u5c5e\u6c27\u5316\u7269\u7684\u5c42\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u4e0b\u5217\uff0c\u5bf9CVD\u6cd5\u4e2d\u505a\u4e3a\u7504\u9009\u65b9\u6cd5\u7684\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u6cd5\u5f00\u5c55\u8be6\u7ec6\u63cf\u8ff0\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u56fe1\u662f\u8868\u9732\u4e3b\u8981\u8868\u73b0\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u5efa\u7acb\u4e2d\u91c7\u7528\u7684\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5b89\u88c5\u7684\u4e00\u4e2a\u4e8b\u4f8b\u7684\u5e73\u9762\u56fe\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u56fe1\u4e2d\uff0c\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5b89\u88c5101\u5177\u5907\u771f\u7a7a\u6cf5\u69fd102\uff0c\u5728\u771f\u7a7a\u6cf5\u69fd102\u7684\u91cc\u9762\u7684\u5e95\u8fb9\u4fa7\u914d\u5907\u6709\u5e95\u5ea7105\u3002\u6b64\u5916\uff0c\u5728\u771f\u7a7a\u6cf5\u69fd102\u7684\u91cc\u9762\u7684\u9876\u7bf7\u4fa7\uff0c\u5728\u4e0e\u5e95\u5ea7105\u5bf9\u7f6e\u7684\u90e8\u4f4d\u914d\u5907\u6709\u8d1f\u6781\u7535\u7ea7103\u3002\u5728\u771f\u7a7a\u6cf5\u69fd102\u7684\u5916\u754c\u914d\u5907\u6709\u70ed\u7269\u8d28\u5faa\u73af\u7cfb\u7edf\u7ba1\u7406\u4f53\u7cfb106\u3001\u771f\u7a7a\u6cf5\u6392\u6c14\u7ba1\u7ba1\u7406\u4f53\u7cfb107\u3001\u6c7d\u4f53\u5bfc\u8fdb\u7ba1\u7406\u4f53\u7cfb108\u548c\u9ad8\u538b\u7535\u6e90109\u3002\u5728\u70ed\u7269\u8d28\u5faa\u73af\u7cfb\u7edf\u7ba1\u7406\u4f53\u7cfb106\u5185\u914d\u5907\u6709\u70ed\u7269\u8d28\u3002\u5728\u70ed\u7269\u8d28\u5faa\u73af\u7cfb\u7edf\u7ba1\u7406\u4f53\u7cfb106\u8bbe\u5b9a\u6709\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\uff0c\u5176\u5177\u5907\u4f7f\u70ed\u7269\u8d28\u632a\u52a8\u7684\u6cf5\u3001\u52a0\u6e29\u70ed\u7269\u8d28\u7684\u52a0\u6e29\u5b89\u88c5\u3001\u5f00\u5c55\u5236\u51b7\u7684\u5236\u51b7\u5b89\u88c5\u3001\u6d4b\u91cf\u70ed\u7269\u8d28\u7684\u73af\u5883\u6e29\u5ea6\u7684\u6e29\u5ea6\u611f\u5e94\u5668\u53ca\u5176\u50a8\u5b58\u70ed\u7269\u8d28\u7684\u8bbe\u7f6e\u6eab\u5ea6\u7684\u50a8\u5b58\u5b89\u88c5\u3002\n\t\t\t\t\t<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\n\t\t\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u4ee5\u6d4b\u91cf\u70ed\u7269\u8d28\u7684\u6eab\u5ea6\uff0c\u5c06\u70ed\u7269\u8d28\u52a0\u6e29\u6216\u662f\u5236\u51b7\u81f3\u50a8\u5b58\u7684\u8bbe\u7f6e\u6eab\u5ea6\u800c\u5411\u5e95\u5ea7105\u4f9b\u8d27\u7684\u65b9\u6cd5\u7ec4\u6210\u3002\u88ab\u4f9b\u8d27\u7684\u70ed\u7269\u8d28\u5728\u5e95\u5ea7105\u7684\u5167\u90e8\u6d41\u52a8\u6027\uff0c\u52a0\u6e29\u6216\u662f\u5236\u51b7\u5e95\u5ea7105\u540e\u56de\u5230\u5230\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u3002\u8fd9\u65f6\uff0c\u70ed\u7269\u8d28\u7684\u6c14\u6e29\u6bd4\u8bbe\u7f6e\u6eab\u5ea6\u9ad8\u6216\u4f4e\uff0c\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u5c06\u70ed\u7269\u8d28\u52a0\u6e29\u6216\u662f\u5236\u51b7\u81f3\u8bbe\u7f6e\u6eab\u5ea6\uff0c\u5411\u5e95\u5ea7105\u4f9b\u8d27\u3002\u56e0\u6b64\u5236\u51b7\u7269\u8d28\u5728\u5e95\u5ea7\u4e0e\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u4e2d\u95f4\u5faa\u73af\u7cfb\u7edf\uff0c\u5e95\u5ea7105\u88ab\u4f9b\u8d27\u7684\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u52a0\u6e29\u6216\u662f\u5236\u51b7\u3002\n\t<\/p>\n

\n\t\t\u771f\u7a7a\u6cf5\u69fd102\u4e0e\u771f\u7a7a\u6cf5\u6392\u6c14\u7ba1\u7ba1\u7406\u4f53\u7cfb107\u8054\u63a5\uff0c\u5728\u884c\u9a76\u8be5\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5b89\u88c5101\u9010\u6e10\u6d82\u819c\u89e3\u51b3\u524d\uff0c\u4e8b\u5148\u5bf9\u771f\u7a7a\u6cf5\u69fd102\u7684\u5185\u90e8\u7ed3\u6784\u5f00\u5c55\u771f\u7a7a\u6cf5\u6392\u6c14\u7ba1\uff0c\u800c\u4e14\u5c06\u70ed\u7269\u8d28\u52a0\u6e29\u4f7f\u5176\u4ece\u5ba4\u5185\u6e29\u5ea6\u63d0\u6e29\u81f3\u8bbe\u7f6e\u6eab\u5ea6\uff0c\u5c06\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u5411\u5e95\u5ea7105\u4f9b\u8d27\u3002\u5e95\u5ea7105\u5728\u5e94\u7528\u9010\u6e10\u65f6\u4e3a\u5ba4\u5185\u6e29\u5ea6\uff0c\u4e00\u65e6\u88ab\u4f9b\u8d27\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\uff0c\u5219\u5e95\u5ea7105\u63d0\u6e29\u3002\n\t<\/p>\n

\n\t\t\u4f7f\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u5faa\u73af\u7cfb\u7edf\u6beb\u65e0\u7591\u95ee\u6642\u95f4\u540e\uff0c\u8fb9\u4fdd\u6301\u771f\u7a7a\u6cf5\u69fd102\u5185\u7684\u771f\u7a7a\u6cf5\u6c1b\u56f4\u8fb9\u5411\u771f\u7a7a\u6cf5\u69fd102\u5185\u642c\u5165\u505a\u4e3a\u6d82\u819c\u76ee\u6807\u7684\u677f\u6750110\uff0c\u914d\u5907\u5728\u5e95\u5ea7105\u4e0a\u3002\n\t<\/p>\n

\n\t\t\u5728\u8d1f\u6781\u7535\u7ea7103\u7684\u4e0e\u5e95\u5ea7105\u5bf9\u7f6e\u7684\u9762\u4ea7\u751f\u6709\u597d\u51e0\u4e2a\u55b7\u5934(\u5b54)\u3002\n\t<\/p>\n

\n\t\t\u8d1f\u6781\u7535\u7ea7103\u4e0e\u6c7d\u4f53\u5bfc\u8fdb\u7ba1\u7406\u4f53\u7cfb108\u8054\u63a5\uff0c\u5018\u82e5\u4ece\u6c7d\u4f53\u5bfc\u8fdb\u7ba1\u7406\u4f53\u7cfb108\u5411\u8d1f\u6781\u7535\u7ea7103\u5bfc\u8fdbCVD\u6c7d\u4f53\uff0c\u5219\u4ece\u8d1f\u6781\u7535\u7ea7103\u7684\u55b7\u5934\u5411\u771f\u7a7a\u6cf5\u6c1b\u56f4\u7684\u771f\u7a7a\u6cf5\u69fd102\u5185\u55b7\u51fa\u6765CVD\u6c7d\u4f53\u3002\n\t<\/p>\n

\n\t\t\u8d1f\u6781\u7535\u7ea7103\u4e0e\u9ad8\u538b\u7535\u6e90109\u8054\u63a5\uff0c\u5e95\u5ea7105\u548c\u771f\u7a7a\u6cf5\u69fd102\u4e0e\u63a5\u5730\u88c5\u7f6e\u7535\u4f4d\u5dee\u8054\u63a5\u3002\n\t<\/p>\n

\n\t\t\u5018\u82e5\u4ece\u6c7d\u4f53\u5bfc\u8fdb\u7ba1\u7406\u4f53\u7cfb108\u5411\u771f\u7a7a\u6cf5\u69fd102\u5185\u4f9b\u8d27CVD\u6c7d\u4f53\uff0c\u5c06\u6beb\u65e0\u7591\u95ee\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u4ece\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u5411\u5e95\u5ea7105\u4f9b\u8d27\uff0c\u4e0e\u6b64\u540c\u65f6\u8fd0\u884c\u9ad8\u538b\u7535\u6e90109\uff0c\u5bf9\u9634\u6781\u7535\u7ea7103\u53e6\u52a0\u9ad8\u9891\u7387\u5de5\u4f5c\u7535\u538b\uff0c\u5219\u4ea7\u751f\u88ab\u5bfc\u8fdb\u7684CVD\u6c7d\u4f53\u7684\u7b49\u79bb\u5b50\u3002\u7b49\u79bb\u5b50\u4e2d\u88ab\u6d3b\u6027\u7684CVD\u6c7d\u4f53\u62b5\u8fbe\u5e95\u5ea7105\u4e0a\u7684\u677f\u6750110\u7684\u5916\u5f62\u65f6\uff0c\u505a\u4e3a\u5851\u6599\u8584\u819c\u7684\u7b2c1\u9694\u7edd\u5c42\u5728\u677f\u6750110\u7684\u5916\u578b\u751f\u957f\u53d1\u80b2\u3002\n\t<\/p>\n

\n\t\t\u9002\u5ea6\u5730\u8bbe\u7f6e\u8fd9\u65f6\u7684\u5e95\u5ea7105\u4e0e\u8d1f\u6781\u7535\u7ea7103\u7684\u95f4\u8ddd\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u6750\u6599\u6c7d\u4f53\u548c\u6eb6\u89e3\u6c7d\u4f53\u7684\u603b\u6d41\u91cf\u8003\u8651\u5230\u6750\u6599\u6c7d\u4f53\u548c\u6eb6\u89e3\u6c7d\u4f53\u7c7b\u578b\u7b49\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u505a\u4e3a\u4e00\u4e2a\u6267\u884c\u65b9\u6cd5\uff0c\u6750\u6599\u6c7d\u4f53\u7684\u603b\u6d41\u91cf\u4e3a30\uff5e300sccm\uff0c\u6eb6\u89e3\u6c7d\u4f53\u7684\u603b\u6d41\u91cf\u4e3a100\uff5e1000sccm\u3002\n\t<\/p>\n

\n\t\t\u5851\u6599\u8584\u819c\u751f\u957f\u53d1\u80b2\u4e2d\uff0c\u5c06\u6beb\u65e0\u7591\u95ee\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u4ece\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u5411\u5e95\u5ea7105\u4f9b\u8d27\uff0c\u5e95\u5ea7105\u88ab\u70ed\u7269\u8d28\u52a0\u6e29\u6216\u662f\u5236\u51b7\uff0c\u4ee5\u4fdd\u6301\u5728\u6beb\u65e0\u7591\u95ee\u6eab\u5ea6\u7684\u60c5\u51b5\u4e0b\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002\u4e00\u6837\u5e73\u65f6\u4ea7\u751f\u5851\u6599\u8584\u819c\u65f6\u7684\u751f\u957f\u53d1\u80b2\u6eab\u5ea6\u7684\u6700\u4f4e\u503c\u6eab\u5ea6\u7531\u5851\u6599\u8584\u819c\u7684\u819c\u8d28\u51b3\u7b56\uff0c\u9650\u5236\u6eab\u5ea6\u7531\u5728\u677f\u6750110\u4e0a\u65e9\u5df2\u4ea7\u751f\u7684\u5851\u6599\u8584\u819c\u7684\u635f\u5bb3\u7684\u6279\u51c6\u8303\u7574\u51b3\u7b56\u3002\u6700\u4f4e\u503c\u6eab\u5ea6\u3001\u9650\u5236\u6eab\u5ea6\u4f9d\u636e\u4ea7\u751f\u7684\u5851\u6599\u8584\u819c\u7684\u6750\u6599\u3001\u65e9\u5df2\u4ea7\u751f\u7684\u5851\u6599\u8584\u819c\u7684\u6750\u6599\u7b49\u800c\u4e0d\u4e00\u6837\uff0c\u4f46\u4e3a\u4e86\u66f4\u597d\u5730\u4fdd\u8bc1\u6c7d\u4f53\u9ad8\u963b\u9694\u9ad8\u7684\u819c\u8d28\uff0c\u7504\u9009\u6700\u4f4e\u503c\u6eab\u5ea6\u4e3a50\u2103\u4ee5\u4e0a\uff0c\u9650\u5236\u6eab\u5ea6\u4e3a\u677f\u6750\u7684\u8010\u9ad8\u6e29\u6eab\u5ea6\u4e0b\u5217\u3002\n\t<\/p>\n

\n\t\t\u4e8b\u5148\u7b97\u51fa\u7528\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\u7684\u5851\u6599\u8584\u819c\u7684\u819c\u8d28\u4e0e\u6d82\u819c\u6eab\u5ea6\u7684\u76f8\u5173\u5173\u8054\u548c\u6d82\u819c\u76ee\u6807\u7269(\u677f\u6750110)\u906d\u53d7\u7684\u635f\u5bb3\u4e0e\u6d82\u819c\u6eab\u5ea6\u7684\u76f8\u5173\u5173\u8054\uff0c\u800c\u51b3\u7b56\u6700\u4f4e\u503c\u6eab\u5ea6\u00b7\u9650\u5236\u6eab\u5ea6\u3002\u6bd4\u5982\uff0c\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5de5\u827a\u6d41\u7a0b\u4e2d\u7684\u677f\u6750110\u7684\u6eab\u5ea6\u7504\u9009\u4e3a50\uff5e250\u2103\u3002\n\t<\/p>\n

\n\t\t\u9664\u6b64\u4e4b\u5916\uff0c\u4e8b\u5148\u6d4b\u91cf\u5bf9\u9634\u6781\u7535\u7ea7103\u53e6\u52a013.56MHz\u4ee5\u4e0a\u7684\u9ad8\u9891\u7387\u5de5\u4f5c\u7535\u538b\u800c\u4ea7\u751f\u7b49\u79bb\u5b50\u65f6\u7684\u5411\u5e95\u5ea7105\u4f9b\u8d27\u7684\u70ed\u7269\u8d28\u7684\u73af\u5883\u6e29\u5ea6\u4e0e\u677f\u6750110\u7684\u73af\u5883\u6e29\u5ea6\u7684\u5173\u8054\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u5728\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5de5\u827a\u6d41\u7a0b\u91cc\u5c06\u677f\u6750110\u7684\u6eab\u5ea6\u4fdd\u6301\u5728\u6700\u4f4e\u503c\u6eab\u5ea6\uff5e\u9650\u5236\u6eab\u5ea6\uff0c\u7b97\u51fa\u5411\u5e95\u5ea7105\u4f9b\u8d27\u7684\u70ed\u7269\u8d28\u7684\u6eab\u5ea6\u3002\n\t<\/p>\n

\n\t\t\u6bd4\u5982\uff0c\u8bbe\u7f6e\u6210\u50a8\u5b58\u6700\u4f4e\u503c\u6eab\u5ea6(\u8fd9\u513f\u4e3a50\u2103)\u3001\u5c06\u6e29\u63a7\u5728\u6700\u4f4e\u503c\u6eab\u5ea6\u4ee5\u4e0a\u7684\u73af\u5883\u6e29\u5ea6\u7684\u70ed\u7269\u8d28\u5411\u5e95\u5ea7105\u4f9b\u8d27\u7684\u65b9\u6cd5\u3002\u4ece\u5e95\u5ea7105\u6d41\u56de\u7684\u70ed\u7269\u8d28\u88ab\u52a0\u6e29\u6216\u662f\u5236\u51b7\uff0c50\u2103\u7684\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u88ab\u4f9b\u8d27\u5230\u5e95\u5ea7105\u3002\u6bd4\u5982\uff0c\u505a\u4e3aCVD\u6c7d\u4f53\uff0c\u4f9b\u8d27\u6c2f\u7845\u70f7\u6c7d\u4f53\u3001\u4e8c\u6c27\u5316\u6c2e\u548cN2\u7684\u6df7\u5408\u6c14\uff0c\u5728\u677f\u6750110\u88ab\u4fdd\u6301\u5728\u6700\u4f4e\u503c\u6eab\u5ea6\uff5e\u9650\u5236\u6eab\u5ea6\u7684\u6c14\u6e29\u6807\u51c6\u7684\u60c5\u51b5\u4e0b\uff0c\u4ea7\u751fSiN\u819c\u3002\n\t<\/p>\n

\n\t\t\u5728\u771f\u7a7a\u6cf5\u7b49\u79bb\u5b50CVD\u5b89\u88c5101\u8fd0\u884c\u540e\uff0c\u5e95\u5ea7105\u4e3a\u5ba4\u5185\u6e29\u5ea6\uff0c\u4ece\u5e95\u5ea7105\u5411\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u6d41\u56de\u7684\u70ed\u7269\u8d28\u7684\u6c14\u6e29\u6bd4\u8bbe\u7f6e\u6e29\u5ea6\u4f4e\u3002\u56e0\u800c\uff0c\u8fd0\u884c\u540e\uff0c\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u5c06\u6d41\u56de\u7684\u70ed\u7269\u8d28\u52a0\u6e29\u800c\u63d0\u6e29\u81f3\u8bbe\u7f6e\u6eab\u5ea6\uff0c\u5411\u5e95\u5ea7105\u4f9b\u8d27\u3002\u8fd9\u65f6\uff0c\u5e95\u5ea7105\u548c\u677f\u6750110\u88ab\u70ed\u7269\u8d28\u52a0\u6e29\u800c\u63d0\u6e29\uff0c\u677f\u6750110\u88ab\u4fdd\u6301\u5728\u6700\u4f4e\u503c\u6eab\u5ea6\uff5e\u9650\u5236\u6eab\u5ea6\u7684\u8303\u7574\u3002\n\t<\/p>\n

\n\t\t\u5018\u82e5\u5728\u53cc\u7247\u677f\u6750110\u4e0a\u6301\u7eed\u4ea7\u751f\u5851\u6599\u8584\u819c\uff0c\u5219\u56e0\u4ece\u7b49\u79bb\u5b50\u6ce8\u5165\u7684\u70ed\u4f7f\u5e95\u5ea7105\u63d0\u6e29\u3002\u8fd9\u65f6\uff0c\u4ece\u5e95\u5ea7105\u5411\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u6d41\u56de\u7684\u70ed\u7269\u8d28\u6bd4\u6700\u4f4e\u503c\u6eab\u5ea6(50\u2103)\u9ad8\uff0c\u56e0\u6b64\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u5236\u51b7\u70ed\u7269\u8d28\uff0c\u5c06\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u5411\u5e95\u5ea7105\u4f9b\u8d27\u3002\u4ece\u800c\uff0c\u53ef\u4ee5\u8fb9\u5c06\u677f\u6750110\u4fdd\u6301\u5728\u6700\u4f4e\u503c\u6eab\u5ea6\uff5e\u9650\u5236\u6eab\u5ea6\u7684\u8303\u7574\u8fb9\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002\n\t<\/p>\n

\n\t\t\u5982\u8bb8\uff0c\u52a0\u6e29\u5236\u51b7\u5b89\u88c5160\u5728\u6d41\u56de\u7684\u70ed\u7269\u8d28\u7684\u6c14\u6e29\u6bd4\u8bbe\u7f6e\u6e29\u5ea6\u4f4e\u65f6\u5c06\u70ed\u7269\u8d28\u52a0\u6e29\uff0c\u6bd4\u8bbe\u7f6e\u6eab\u5ea6\u9ad8\u65f6\u5c06\u70ed\u7269\u8d28\u5236\u51b7\uff0c\u4efb\u4e00\u72b6\u51b5\u4e0b\u5747\u5c06\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u5411\u5e95\u5ea7\u4f9b\u8d27\uff0c\u5176\u5b9e\u9645\u6548\u679c\uff0c\u677f\u6750110\u88ab\u4fdd\u6301\u5728\u6700\u4f4e\u503c\u6eab\u5ea6\uff5e\u9650\u5236\u6eab\u5ea6\u7684\u6e29\u5ea6\u8303\u56f4\u3002\n\t<\/p>\n

\n\t\t\u4ee5\u8981\u6c42\u819c\u539a\u4ea7\u751f\u5851\u6599\u8584\u819c\u540e\uff0c\u5c06\u677f\u6750110\u642c\u79bb\u5230\u771f\u7a7a\u6cf5\u69fd102\u7684\u5916\u754c\uff0c\u5c06\u672a\u6d82\u819c\u7684\u677f\u6750110\u642c\u5165\u771f\u7a7a\u6cf5\u69fd102\u5185\uff0c\u4e0e\u4ee5\u4e0a\u4e00\u6837\u5730\u8fb9\u4f9b\u8d27\u8bbe\u7f6e\u6eab\u5ea6\u7684\u70ed\u7269\u8d28\u8fb9\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u672c\u4ea7\u54c1\u7684\u884c\u9a76CVD\u6cd5\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u7504\u9009\u7684\u4e00\u4e2a\u6267\u884c\u65b9\u6cd5\uff0c\u7504\u9009\u7b2c1\u9694\u7edd\u5c42\u7684\u7ec4\u6210\u539f\u7d20\u4e2d\u5e26\u6709\u78b3\u3001\u7845\u548c\u6c27\u3002\u66f4\u7504\u9009\u7684\u65b9\u6cd5\u662f\u6ee1\u8db3\u4e0b\u5217\u7684(i)\uff5e(iii)\u8981\u7d20\u7684\u5c42\u3002\n\t<\/p>\n

\n\t\t(i)\u5728\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u7845\u539f\u5b50\u7684\u91cf\u7684\u6bd4\u4f8b(\u7845\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u7845\u904d\u5e03\u66f2\u7ebf\u56fe\uff0c\u8868\u9732\u4e3b\u8981\u8868\u73b0\u4ee5\u4e0aL\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u6c27\u5206\u5b50\u7684\u91cf\u7684\u6bd4\u4f8b(\u6c27\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\uff0c\u53ca\u5176\u8868\u9732\u4e3b\u8981\u8868\u73b0\u4ee5\u4e0aL\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u78b3\u539f\u5b50\u7684\u91cf\u7684\u6bd4\u4f8b(\u78b3\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\uff0c\u5728\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u768490\uff05\u4ee5\u4e0a(\u9650\u5236\uff1a100\uff05)\u7684\u5730\u533a\uff0c\u6309(\u6c27\u7684\u5206\u5b50\u6bd4)\u3001(\u7845\u7684\u5206\u5b50\u6bd4)\u3001(\u78b3\u7684\u5206\u5b50\u6bd4)\u7684\u6b21\u5e8f\u9010\u6e10\u7f29\u5c0f(\u5206\u5b50\u4e4b\u6bd4O\uff1eSi\uff1eC)\uff1b\n\t<\/p>\n

\n\t\t(ii)\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u5177\u5907\u6700\u5c112\u4e2a\u6781\u5927\u503c\uff1b\n\t<\/p>\n

\n\t\t(iii)\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u78b3\u7684\u5206\u5b50\u6bd4\u7684\u6700\u9ad8\u503c\u548c\u6781\u5c0f\u503c\u7684\u5dee\u7684\u5e73\u65b9\u6839(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u201cCmax<\/sub>\uff0dCmin<\/sub>\u5dee\u201d)\u4e3a3at\uff05\u4ee5\u4e0a\u3002\n\t<\/p>\n

\n\t\t\u4e0b\u5217\uff0c\u5bf9(i)\uff5e(iii)\u8981\u7d20\u5f00\u5c55\u8868\u660e\u3002\n\t<\/p>\n

\n\t\t\u8be5\u7b2c1\u9694\u7edd\u5c42\uff0c\u7504\u9009(i)\u5728\u8868\u9732\u4e3b\u8981\u8868\u73b0\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u7845\u539f\u5b50\u7684\u91cf\u7684\u6bd4\u4f8b(\u7845\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u7845\u904d\u5e03\u66f2\u7ebf\u56fe\uff0c\u8868\u9732\u4e3b\u8981\u8868\u73b0\u4ee5\u4e0aL\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u6c27\u5206\u5b50\u7684\u91cf\u7684\u6bd4\u4f8b(\u6c27\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\uff0c\u53ca\u5176\u8868\u9732\u4e3b\u8981\u8868\u73b0\u4ee5\u4e0aL\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u78b3\u539f\u5b50\u7684\u91cf\u7684\u6bd4\u4f8b(\u78b3\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\uff0c\u5728\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u768490\uff05\u4ee5\u4e0a(\u9650\u5236\uff1a100\uff05)\u7684\u5730\u533a\uff0c\u6309(\u6c27\u7684\u5206\u5b50\u6bd4)\u3001(\u7845\u7684\u5206\u5b50\u6bd4)\u3001(\u78b3\u7684\u5206\u5b50\u6bd4)\u7684\u6b21\u5e8f\u9010\u6e10\u51cf\u5c11(\u5206\u5b50\u4e4b\u6bd4O\uff1eSi\uff1eC)\u3002\u4e0d\u6ee1\u8db3\u4ee5\u4e0a\u7684\u6807\u51c6(i)\u65f6\uff0c\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u3001\u5f2f\u6298\u6027\u4e0d\u7ecf\u610f\u4e0d\u5145\u8db3\u3002\u8fd9\u513f\uff0c\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\uff0c\u4ee5\u4e0a(\u6c27\u7684\u5206\u5b50\u6bd4)\u3001(\u7845\u7684\u5206\u5b50\u6bd4)\u548c(\u78b3\u7684\u5206\u5b50\u6bd4)\u7684\u5f71\u54cd\u66f4\u7504\u9009\u5728\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u7684\u6700\u5c1190\uff05\u4ee5\u4e0a(\u9650\u5236\uff1a100\uff05)\u7684\u5730\u533a\u6ee1\u8db3\uff0c\u8fdb\u4e00\u6b65\u7504\u9009\u5728\u6700\u5c1193\uff05\u4ee5\u4e0a(\u9650\u5236\uff1a100\uff05)\u7684\u5730\u533a\u6ee1\u8db3\u3002\u8fd9\u513f\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u7684\u6700\u5c1190\uff05\u4ee5\u4e0a\u5728\u7b2c1\u9694\u7edd\u5c42\u4e2d\u53ef\u4ee5\u4e0d\u6301\u7eed\uff0c\u4ec5\u572890\uff05\u4ee5\u4e0a\u7684\u4e00\u90e8\u5206\u6ee1\u8db3\u4ee5\u4e0a\u7684\u5173\u8054\u5c31\u53ef\u4ee5\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\uff0c\u7504\u9009(ii)\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u5177\u5907\u6700\u5c112\u4e2a\u6781\u5927\u503c\u3002\u66f4\u7504\u9009\u8be5\u7b2c1\u9694\u7edd\u5c42\u7684\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u5177\u5907\u6700\u5c113\u4e2a\u6781\u5927\u503c\uff0c\u8fdb\u4e00\u6b65\u7504\u9009\u5177\u5907\u6700\u5c114\u4e2a\u6781\u5927\u503c\uff0c\u8fd8\u53ef\u4ee5\u5177\u59075\u4e2a\u4ee5\u4e0a\u3002\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u7684\u6781\u5927\u503c\u4e3a1\u4e2a\u4e0b\u5217\u65f6\uff0c\u4f7f\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5f2f\u6298\u65f6\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u4e0d\u7ecf\u610f\u4e0d\u5145\u8db3\u3002\u5e94\u4e88\u8868\u660e\uff0c\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u7684\u6781\u5927\u503c\u7684\u9650\u5236\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u6bd4\u5982\uff0c\u7504\u9009\u4e3a30\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a25\u4e0b\u5217\uff0c\u6781\u5927\u503c\u7684\u6570\u91cf\u662f\u7531\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u51b3\u7b56\u7684\uff0c\u56e0\u800c\u4e0d\u53ef\u4ee5\u4e00\u6982\u800c\u8bba\u3002\n\t<\/p>\n

\n\t\t\u8fd9\u513f\uff0c\u5177\u5907\u6700\u5c113\u4e2a\u6781\u5927\u503c\u65f6\uff0c\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u5177\u5907\u76841\u4e2a\u6781\u5927\u503c\u548c\u4e0e\u8be5\u6781\u5927\u503c\u4e34\u63a5\u7684\u6781\u5927\u503c\u5728\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u7684\u5dee\u7684\u5e73\u65b9\u6839(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u201c\u6781\u5927\u503c\u95f4\u7684\u95f4\u8ddd\u201d)\u5747\u7504\u9009\u4e3a200nm\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a100nm\u4e0b\u5217\uff0c\u683c\u5916\u7504\u9009\u4e3a75nm\u4e0b\u5217\u3002\u5018\u82e5\u4e3a\u5982\u8bb8\u7684\u6781\u5927\u503c\u95f4\u7684\u95f4\u8ddd\uff0c\u5219\u5728\u7b2c1\u9694\u7edd\u5c42\u4e2d\u78b3\u539f\u5b50\u6bd4\u591a\u7684\u4f4d\u7f6e(\u8fde\u7eed\u51fd\u6570)\u4ee5\u5408\u7406\u7684\u5468\u671f\u65f6\u95f4\u5b58\u6709\uff0c\u56e0\u800c\u53ef\u4ee5\u5bf9\u7b2c1\u9694\u7edd\u5c42\u6388\u4e88\u9002\u5ea6\u7684\u5f2f\u6298\u6027\uff0c\u53ef\u4ee5\u66f4\u6709\u5546\u4e1a\u7528\u5730\u6291\u5236\u00b7\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u3002\u5e94\u4e88\u8868\u660e\uff0c\u672c\u4f7f\u7528\u8bf4\u660e\u4e2d\u201c\u6781\u5927\u503c\u201d\u5c31\u662f\u6307\u76f8\u5e94\u4e8e\u5728\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u7684\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u8fde\u7eed\u51fd\u6570\u6216\u662f\u6781\u5c0f\u503c\u3002\u6b64\u5916\uff0c\u672c\u4f7f\u7528\u8bf4\u660e\u4e2d\u201c\u8fde\u7eed\u51fd\u6570\u201d\u662f\u5506\u4f7f\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd\u53d8\u5316\u65f6\u539f\u7d20(\u6c27\u3001\u7845\u6216\u662f\u78b3)\u7684\u5206\u5b50\u6bd4\u7684\u503c\u4ece\u63d0\u9ad8\u5411\u51cf\u5c11\u53d8\u5316\u7684\u70b9\uff0c\u4e14\u4ece\u8be5\u70b9\u4f7f\u5728\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd\u8fdb\u4e00\u6b65\u57284\uff5e20nm\u7684\u8303\u7574\u53d8\u5316\u7684\u90e8\u4f4d\u7684\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u503c\u4e0e\u8be5\u70b9\u7684\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u503c\u5bf9\u6bd4\u51cf\u5c113at\uff05\u4ee5\u4e0a\u3002\u5373\uff0c\u57284\uff5e20nm\u7684\u8303\u7574\u53d8\u5316\u65f6\uff0c\u53ea\u9700\u5728\u4efb\u4e00\u8303\u7574\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u503c\u51cf\u5c113at\uff05\u4ee5\u4e0a\u5c31\u53ef\u4ee5\u3002\u4e00\u6837\uff0c\u672c\u4f7f\u7528\u8bf4\u660e\u4e2d\u201c\u6781\u5c0f\u503c\u201d\u662f\u5506\u4f7f\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd\u53d8\u5316\u65f6\u539f\u7d20(\u6c27\u3001\u7845\u6216\u662f\u78b3)\u7684\u5206\u5b50\u6bd4\u7684\u503c\u4ece\u51cf\u5c11\u5411\u63d0\u9ad8\u53d8\u5316\u7684\u70b9\uff0c\u4e14\u4ece\u8be5\u70b9\u4f7f\u5728\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd\u8fdb\u4e00\u6b65\u57284\uff5e20nm\u7684\u8303\u7574\u53d8\u5316\u7684\u90e8\u4f4d\u7684\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u503c\u4e0e\u8be5\u70b9\u7684\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u503c\u5bf9\u6bd4\u63d0\u9ad83at\uff05\u4ee5\u4e0a\u3002\u5373\uff0c\u57284\uff5e20nm\u7684\u8303\u7574\u53d8\u5316\u65f6\uff0c\u53ea\u9700\u5728\u4efb\u4e00\u8303\u7574\u539f\u7d20\u7684\u5206\u5b50\u6bd4\u7684\u503c\u63d0\u9ad83at\uff05\u4ee5\u4e0a\u5c31\u53ef\u4ee5\u3002\u8fd9\u513f\uff0c\u7531\u4e8e\u6781\u5927\u503c\u95f4\u7684\u95f4\u8ddd\u8d8a\u5c0f\uff0c\u6291\u5236\/\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u7684\u53d1\u5c55\u7d50\u679c\u8d8a\u9ad8\uff0c\u56e0\u6b64\u5177\u5907\u6700\u5c113\u4e2a\u6781\u5927\u503c\u65f6\u7684\u6781\u5927\u503c\u95f4\u7684\u8ddd\u96e2\u7684\u6700\u4f4e\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u82e5\u8003\u8651\u5230\u7b2c1\u9694\u7edd\u5c42\u7684\u5f2f\u6298\u6027\u3001\u7f1d\u9699\u7684\u6291\u5236\/\u907f\u514d\u7d50\u679c\u3001\u70ed\u53d8\u5f62\u6027\u7b49\uff0c\u7504\u9009\u4e3a10nm\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a30nm\u4ee5\u4e0a\u3002\n\t<\/p>\n

\n\t\t\u9664\u6b64\u4e4b\u5916\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\uff0c\u7504\u9009(iii)\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u78b3\u7684\u5206\u5b50\u6bd4\u7684\u6700\u9ad8\u503c\u548c\u6781\u5c0f\u503c\u7684\u5dee\u7684\u5e73\u65b9\u6839(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u201cCmax<\/sub>\uff0dCmin<\/sub>\u5dee\u201d)\u4e3a3at\uff05\u4ee5\u4e0a\u3002\u4ee5\u4e0a\u5e73\u65b9\u6839\u5c0f\u4e8e3at\uff05\u65f6\uff0c\u4f7f\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5f2f\u6298\u65f6\uff0c\u6c7d\u4f53\u9ad8\u963b\u9694\u4e0d\u7ecf\u610f\u4e0d\u5145\u8db3\u3002Cmax<\/sub>\uff0dCmin<\/sub>\u5dee\u7504\u9009\u4e3a5at\uff05\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a7at\uff05\u4ee5\u4e0a\uff0c\u683c\u5916\u7504\u9009\u4e3a10at\uff05\u4ee5\u4e0a\u3002\u6839\u636e\u53d8\u6210\u4ee5\u4e0aCmax<\/sub>\uff0dCmin<\/sub>\u5dee\uff0c\u53ef\u4ee5\u8fdb\u4e00\u6b65\u53d1\u5c55\u6c7d\u4f53\u9ad8\u963b\u9694\u3002\u5e94\u4e88\u8868\u660e\uff0c\u672c\u4f7f\u7528\u8bf4\u660e\u4e2d\uff0c\u201c\u6700\u9ad8\u503c\u201d\u5c31\u662f\u6307\u5728\u5404\u539f\u7d20\u7684\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u53d8\u4e3a\u8f83\u5927\u65f6\u7684\u5404\u539f\u7d20\u7684\u5206\u5b50\u6bd4\uff0c\u662f\u8fde\u7eed\u51fd\u6570\u4e2d\u6700\u591a\u7684\u503c\u3002\u4e00\u6837\uff0c\u672c\u4f7f\u7528\u8bf4\u660e\u4e2d\uff0c\u201c\u6781\u5c0f\u503c\u201d\u5c31\u662f\u6307\u5728\u5404\u539f\u7d20\u7684\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u53d8\u8eab\u6700\u949f\u5934\u7684\u5404\u539f\u7d20\u7684\u5206\u5b50\u6bd4\uff0c\u662f\u6781\u5c0f\u503c\u4e2d\u6700\u5c11\u7684\u503c\u3002\u8fd9\u513f\uff0cCmax<\/sub>\uff0dCmin<\/sub>\u5dee\u7684\u9650\u5236\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u82e5\u8003\u8651\u5230\u6291\u5236\/\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u7684\u53d1\u5c55\u7d50\u679c\u7b49\uff0c\u7504\u9009\u4e3a50at\uff05\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a40at\uff05\u4e0b\u5217\u3002\n\t<\/p>\n

\n\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u4ee5\u4e0a\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u7504\u9009\u5177\u5907\u6700\u5c111\u4e2a\u6781\u5927\u503c\uff0c\u66f4\u7504\u9009\u5177\u5907\u6700\u5c112\u4e2a\u6781\u5927\u503c\uff0c\u8fdb\u4e00\u6b65\u7504\u9009\u5177\u5907\u6700\u5c113\u4e2a\u6781\u5927\u503c\u3002\u4ee5\u4e0a\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u5177\u5907\u6700\u5c111\u4e2a\u6781\u5927\u503c\u65f6\uff0c\u4f7f\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5f2f\u6298\u65f6\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u4e0e\u4e0d\u5177\u5907\u6781\u5927\u503c\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u76f8\u8f83\u4e3a\u8fdb\u4e00\u6b65\u53d1\u5c55\u3002\u5e94\u4e88\u8868\u660e\uff0c\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u7684\u6781\u5927\u503c\u7684\u9650\u5236\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u6bd4\u5982\uff0c\u7504\u9009\u4e3a20\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a10\u4e0b\u5217\u3002\u6709\u5173\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u7684\u6781\u5927\u503c\u7684\u6570\u91cf\uff0c\u4e5f\u662f\u6709\u7531\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u51b3\u7b56\u7684\u4e00\u90e8\u5206\uff0c\u56e0\u800c\u4e0d\u53ef\u4ee5\u4e00\u6982\u800c\u8bba\u3002\u6b64\u5916\uff0c\u5177\u5907\u6700\u5c113\u4e2a\u6781\u5927\u503c\u65f6\uff0c\u4ee5\u4e0a\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u5177\u5907\u76841\u4e2a\u6781\u5927\u503c\u548c\u4e0e\u8be5\u6781\u5927\u503c\u4e34\u63a5\u7684\u6781\u5927\u503c\u5728\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u8ddd\u96e2\u7684\u5dee\u7684\u5e73\u65b9\u6839\u5747\u7504\u9009\u4e3a200nm\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a100nm\u4e0b\u5217\u3002\u5018\u82e5\u4e3a\u5982\u8bb8\u7684\u6781\u5927\u503c\u95f4\u7684\u95f4\u8ddd\uff0c\u5219\u53ef\u4ee5\u66f4\u6709\u5546\u4e1a\u7528\u5730\u6291\u5236\u00b7\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u3002\u8fd9\u513f\uff0c\u5177\u5907\u6700\u5c113\u4e2a\u6781\u5927\u503c\u65f6\u7684\u6781\u5927\u503c\u95f4\u7684\u8ddd\u96e2\u7684\u6700\u4f4e\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u82e5\u8003\u8651\u5230\u6291\u5236\/\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u7684\u53d1\u5c55\u7d50\u679c\u3001\u70ed\u53d8\u5f62\u6027\u7b49\uff0c\u7504\u9009\u4e3a10nm\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a30nm\u4ee5\u4e0a\u3002\n\t<\/p>\n

\n\t\t\u9664\u6b64\u4e4b\u5916\uff0c\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5728\u4ee5\u4e0a\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u6c27\u7684\u5206\u5b50\u6bd4\u7684\u6700\u9ad8\u503c\u548c\u6781\u5c0f\u503c\u7684\u5dee\u7684\u5e73\u65b9\u6839(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u201cOmax<\/sub>\uff0dOmin<\/sub>\u5dee\u201d)\u7504\u9009\u4e3a3at\uff05\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a6at\uff05\u4ee5\u4e0a\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a7at\uff05\u4ee5\u4e0a\u3002\u5018\u82e5\u4ee5\u4e0a\u5e73\u65b9\u6839\u4e3a3at\uff05\u4ee5\u4e0a\uff0c\u5219\u4f7f\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u819c\u5f2f\u6298\u65f6\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u8fdb\u4e00\u6b65\u53d1\u5c55\u3002\u8fd9\u513f\uff0cOmax<\/sub>\uff0dOmin<\/sub>\u5dee\u7684\u9650\u5236\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u4ece\u6291\u5236\/\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u7684\u53d1\u5c55\u7d50\u679c\u7b49\u8003\u8651\u5230\uff0c\u7504\u9009\u4e3a50at\uff05\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a40at\uff05\u4e0b\u5217\u3002\n\t<\/p>\n

\n\t\t\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5728\u4ee5\u4e0a\u7845\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u7845\u7684\u5206\u5b50\u6bd4\u7684\u6700\u9ad8\u503c\u548c\u6781\u5c0f\u503c\u7684\u5dee\u7684\u5e73\u65b9\u6839(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u201cSimax<\/sub>\uff0dSimin<\/sub>\u5dee\u201d)\u7504\u9009\u4e3a10at\uff05\u4e0b\u5217\uff0c\u66f4\u7504\u9009\u4e3a7at\uff05\u4e0b\u5217\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a3at\uff05\u4e0b\u5217\u3002\u4ee5\u4e0a\u5e73\u65b9\u6839\u4e3a10at\uff05\u4e0b\u5217\u65f6\uff0c\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u8fdb\u4e00\u6b65\u53d1\u5c55\u3002\u8fd9\u513f\uff0c\u7531\u4e8eSimax<\/sub>\uff0dSimin<\/sub>\u5dee\u8d8a\u5c0f\uff0c\u6291\u5236\/\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u7684\u53d1\u5c55\u7d50\u679c\u8d8a\u9ad8\uff0c\u56e0\u6b64Simax<\/sub>\uff0dSimin<\/sub>\u5dee\u7684\u6700\u4f4e\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u82e5\u8003\u8651\u5230\u6c7d\u4f53\u9ad8\u963b\u9694\u7b49\uff0c\u7504\u9009\u4e3a1at\uff05\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a2at\uff05\u4ee5\u4e0a\u3002\n\t<\/p>\n

\n\t\t\u7504\u9009\u5728\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u78b3\u548c\u6c27\u5206\u5b50\u7684\u7d2f\u8ba1\u91cf\u51e0\u4e4e\u5300\u901f\u8fd0\u52a8\u3002\u4ece\u800c\uff0c\u7b2c1\u9694\u7edd\u5c42\u5145\u5206\u53d1\u6325\u5408\u7406\u7684\u5f2f\u6298\u6027\uff0c\u66f4\u6709\u5546\u4e1a\u7528\u5730\u6291\u5236\u00b7\u907f\u514d\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u5f2f\u6298\u65f6\u9020\u6210\u7f1d\u9699\u3002\u66f4\u8be6\u5c3d\u6765\u8bb2\uff0c\u5728\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u8be5\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u4e0e\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u6bd4\u4f8b(\u6c27\u548c\u78b3\u7684\u5206\u5b50\u6bd4)\u7684\u76f8\u4e92\u5173\u7cfb\u7684\u6c27\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\uff0c\u4ee5\u4e0a\u6c27\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u6c27\u548c\u78b3\u7684\u5206\u5b50\u6bd4\u7684\u7d2f\u8ba1\u7684\u6700\u9ad8\u503c\u548c\u6781\u5c0f\u503c\u7684\u5dee\u7684\u5e73\u65b9\u6839(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u201cOCmax<\/sub>\uff0dOCmin<\/sub>\u5dee\u201d)\u7504\u9009\u5c0f\u4e8e5at\uff05\uff0c\u66f4\u7504\u9009\u5c0f\u4e8e4at\uff05\uff0c\u8fdb\u4e00\u6b65\u7504\u9009\u5c0f\u4e8e3at\uff05\u3002\u5018\u82e5\u4ee5\u4e0a\u5e73\u65b9\u6839\u5c0f\u4e8e5at\uff05\uff0c\u5219\u83b7\u5f97\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u8fdb\u4e00\u6b65\u53d1\u5c55\u3002\u5e94\u4e88\u8868\u660e\uff0c\u9488\u5bf9OCmax<\/sub>\uff0dOCmin<\/sub>\u5dee\u7684\u6700\u4f4e\u503c\uff0c\u7531\u4e8eOCmax<\/sub>\uff0dOCmin<\/sub>\u5dee\u8d8a\u4f4e\u8d8a\u597d\uff0c\u56e0\u6b64\u4e3a0at\uff05\uff0c\u4f46\u53ea\u9700\u4e3a0.1at\uff05\u4ee5\u4e0a\u5c31\u591f\u3002\n\t<\/p>\n

\n\t\t\u4ee5\u4e0a\u7845\u904d\u5e03\u66f2\u7ebf\u56fe\u3001\u4ee5\u4e0a\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u3001\u4ee5\u4e0a\u78b3\u904d\u5e03\u7b49\u503c\u7ebf\u548c\u4ee5\u4e0a\u6c27\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u53ef\u4ee5\u501f\u52a9\u5982\u4e0b\u6240\u793a\u65b9\u6cd5\u505a\u6210\uff0c\u5373\u6839\u636e\u5e76\u4e14\u7528X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6cd5(XPS\uff1aXray\u00a0Photoelectron\u00a0Spectroscopy)\u7684\u6d4b\u91cf\u548c\u6c29\u7b49\u4e86\u89e3\u6c7d\u4f53\u6b63\u79bb\u5b50\u78c1\u63a7\u6e85\u5c04\uff0c\u5728\u4f7f\u8bd5\u4ef6\u5167\u90e8\u5916\u9732\u7684\u4e0e\u6b64\u540c\u65f6\u5148\u540e\u5f00\u5c55\u5916\u578b\u6784\u6210\u5256\u6790\uff0c\u6839\u636e\u8bf4\u767d\u4e86\u7684XPS\u6df1\u5c42\u622a\u9762(XPS\u00a0depth\u00a0profile)\u5256\u6790\u800c\u505a\u6210\u3002\u6839\u636e\u5982\u8bb8\u7684XPS\u6df1\u5c42\u622a\u9762\u5256\u6790\u800c\u83b7\u5f97\u7684\u904d\u5e03\u66f2\u7ebf\u56fe\u6bd4\u5982\u53ef\u4ee5\u5c06\u7eb5\u5750\u6807\u8bbe\u6210\u5404\u539f\u7d20\u7684\u5206\u5b50\u6bd4(\u4f01\u4e1a\uff1aat\uff05)\u3001\u5c06\u6a2a\u5750\u6807\u8bbe\u4e3a\u8680\u523b\u52a0\u5de5\u6642\u95f4(\u78c1\u63a7\u6e85\u5c04\u6642\u95f4)\u800c\u505a\u6210\u3002\u5e94\u4e88\u8868\u660e\uff0c\u5728\u5982\u8bb8\u5c06\u6a2a\u5750\u6807\u8bbe\u4e3a\u8680\u523b\u52a0\u5de5\u6642\u95f4\u7684\u539f\u7d20\u7684\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\uff0c\u8680\u523b\u52a0\u5de5\u6642\u95f4\u4e0e\u819c\u539a\u65b9\u4f4d\u4e2d\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u5927\u6982\u76f8\u5173\uff0c\u56e0\u800c\uff0c\u505a\u4e3a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd\u201d\uff0c\u53ef\u4ee5\u9009\u7528\u7531XPS\u6df1\u5c42\u622a\u9762\u5256\u6790\u65f6\u91c7\u53d6\u7684\u8680\u523b\u52a0\u5de5\u6548\u7387\u4e0e\u8680\u523b\u52a0\u5de5\u6642\u95f4\u7684\u5173\u8054\u8ba1\u7b97\u7684\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd\u3002\u5e94\u4e88\u8868\u660e\uff0c\u7845\u904d\u5e03\u66f2\u7ebf\u56fe\u3001\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u3001\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u548c\u6c27\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u53ef\u4ee5\u9009\u7528\u4ee5\u4e0b\u6d4b\u91cf\u6807\u51c6\u505a\u6210\u3002\n\t<\/p>\n

\n\t\t(\u6d4b\u91cf\u6807\u51c6)\n\t<\/p>\n

\n\t\t\u8680\u523b\u52a0\u5de5\u6b63\u79bb\u5b50\u79cd\uff1a\u6c29(Ar <\/sup>)\n\t<\/p>\n

\n\t\t\u8680\u523b\u52a0\u5de5\u901f\u7387(SiO2<\/sub>\u82db\u5316\u819c\u8f6c\u6362\u503c)\uff1a0.05nm\/sec\n\t<\/p>\n

\n\t\t\u8680\u523b\u52a0\u5de5\u95f4\u8ddd(SiO2<\/sub>\u8f6c\u6362\u503c)\uff1a10nm\n\t<\/p>\n

\n\t\tX\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u5b89\u88c5\uff1aThermo\u00a0Fisher\u00a0Scientific\u516c\u53f8\u5236\uff0c\u8bbe\u5907\u7c7b\u578b\u540d\u5b57\u201cVG\u00a0Theta\u00a0Probe\u201d\n\t<\/p>\n

\n\t\t\u76f4\u5c04X\u5c04\u7ebf\uff1a\u5355\u6676\u4f53\u5206\u5149AlK\u03b1\n\t<\/p>\n

\n\t\tX\u5c04\u7ebf\u7684\u8272\u6591\u4ee5\u53ca\u89c4\u683c\uff1a800\u00d7400\u03bcm\u7684\u692d\u5706\u578b\u3002\n\t<\/p>\n

\n\t\t\u884c\u9a76\u4ee5\u4e0a\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a(\u5e72\u8e81\u819c\u539a)\u53ea\u9700\u6ee1\u8db3\u4ee5\u4e0a(i)\uff5e(iii)\uff0c\u5c31\u6c92\u6709\u683c\u5916\u9650\u5236\u3002\u6bd4\u5982\uff0c\u8be5\u7b2c1\u9694\u7edd\u5c42\u7684\u6bcf1\u5c42\u7684\u819c\u539a\u7504\u9009\u4e3a20\uff5e3000nm\uff0c\u66f4\u7504\u9009\u4e3a50\uff5e2500nm\uff0c\u683c\u5916\u7504\u9009\u4e3a100\uff5e1000nm\u3002\u5018\u82e5\u4e3a\u5982\u8bb8\u7684\u819c\u539a\uff0c\u5219\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5145\u5206\u53d1\u6325\u51fa\u8272\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u548c\u6291\u5236\/\u907f\u514d\u5f2f\u6298\u65f6\u7684\u7f1d\u9699\u9020\u6210\u7684\u7d50\u679c\u3002\u5e94\u4e88\u8868\u660e\uff0c\u884c\u9a76\u4ee5\u4e0a\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c42\u75312\u5c42\u4ee5\u4e0a\u7ec4\u6210\u65f6\uff0c\u7504\u9009\u5404\u7b2c1\u9694\u7edd\u5c42\u5177\u5907\u5982\u4e0a\u6240\u8ff0\u7684\u819c\u539a\u3002\n\t<\/p>\n

\n\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u4ece\u4ea7\u751f\u819c\u9762\u56e2\u961f\u5300\u79f0\u4e14\u5177\u5907\u51fa\u8272\u6c7d\u4f53\u9ad8\u963b\u9694\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u5728\u819c\u9762\u65b9\u4f4d(\u4e0e\u7b2c1\u9694\u7edd\u5c42\u7684\u5916\u578b\u5e73\u884c\u9762\u7684\u65b9\u4f4d)\u672c\u8d28\u4e0a\u4e00\u6837\u3002\u8fd9\u513f\uff0c\u7b2c1\u9694\u7edd\u5c42\u5728\u819c\u9762\u65b9\u4f4d\u672c\u8d28\u4e0a\u4e00\u6837\u5c31\u662f\u6307\u6839\u636eXPS\u6df1\u5c42\u622a\u9762\u5256\u6790\u5bf9\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u9762\u7684\u968f\u610f2\u4e2a\u90e8\u4f4d\u7684\u6d4b\u91cf\u90e8\u4f4d\u505a\u6210\u4ee5\u4e0a\u6c27\u904d\u5e03\u66f2\u7ebf\u56fe\u3001\u4ee5\u4e0a\u78b3\u904d\u5e03\u7b49\u503c\u7ebf\u548c\u4ee5\u4e0a\u6c27\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u65f6\uff0c\u5728\u8be5\u968f\u610f2\u4e2a\u90e8\u4f4d\u7684\u6d4b\u91cf\u90e8\u4f4d\u53d7\u5230\u7684\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u6240\u5177\u5907\u7684\u6781\u5927\u503c\u7684\u6570\u91cf\u7c7b\u540c\uff0c\u5404\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u78b3\u7684\u5206\u5b50\u6bd4\u7684\u6700\u9ad8\u503c\u548c\u6781\u5c0f\u503c\u7684\u5dee\u7684\u5e73\u65b9\u6839\u5f7c\u6b64\u4e4b\u95f4\u7c7b\u540c\u6216\u5dee\u4e3a5at\uff05\u4e4b\u5185\u3002\n\t<\/p>\n

\n\t\t\u9664\u6b64\u4e4b\u5916\uff0c\u672c\u4ea7\u54c1\u4e2d\uff0c\u7504\u9009\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u672c\u8d28\u4e0a\u6301\u7eed\u3002\u8fd9\u513f\uff0c\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u672c\u8d28\u4e0a\u6301\u7eed\u5c31\u662f\u6307\u4e0d\u5305\u62ec\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u78b3\u7684\u5206\u5b50\u6bd4\u4e0d\u6301\u7eed\u53d8\u5316\u7684\u4e00\u90e8\u5206\uff0c\u8be6\u5c3d\u6765\u8bb2\uff0c\u5728\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7531\u8680\u523b\u52a0\u5de5\u901f\u7387\u548c\u8680\u523b\u52a0\u5de5\u6642\u95f4\u8ba1\u7b97\u7684\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u4e2d\u6700\u5c111\u5c42\u5728\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u8be5\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(x\uff0c\u4f01\u4e1a\uff1anm)\u4e0e\u78b3\u7684\u5206\u5b50\u6bd4(C\uff0c\u4f01\u4e1a\uff1aat\uff05)\u7684\u76f8\u4e92\u5173\u7cfb\u4e2d\uff0c\u6ee1\u8db3\u7531\u4ee5\u4e0b\u6570\u5b66\u601d\u7ef4\u5f0f1\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6807\u51c6\u3002\n\t<\/p>\n

\n\t\t(dC\/dx)\u22640.5\u2026\u6570\u5b66\u601d\u7ef4\u5f0f1\n\t<\/p>\n

\n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4e2d\uff0c\u5982\u6570\u6ee1\u8db3\u4ee5\u4e0a\u6807\u51c6(i)\uff5e(iii)\u7684\u7b2c1\u9694\u7edd\u5c42\u53ef\u4ee5\u4ec5\u5177\u67091\u5c42\uff0c\u8fd8\u53ef\u4ee5\u5177\u67092\u5c42\u4ee5\u4e0a\u3002\u800c\u4e14\uff0c\u5177\u59072\u5c42\u4ee5\u4e0a\u7684\u5982\u8bb8\u7684\u7b2c1\u9694\u7edd\u5c42\u65f6\uff0c\u597d\u51e0\u4e2a\u7b2c1\u9694\u7edd\u5c42\u7684\u6750\u6599\u53ef\u4ee5\u7c7b\u540c\u8fd8\u53ef\u4ee5\u4e0d\u4e00\u6837\u3002\n\t<\/p>\n

\n\t\t\u5728\u4ee5\u4e0a\u7845\u904d\u5e03\u66f2\u7ebf\u56fe\u3001\u4ee5\u4e0a\u6c27\u904d\u5e03\u7b49\u503c\u7ebf\u548c\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\uff0c\u7845\u7684\u5206\u5b50\u6bd4\u3001\u6c27\u7684\u5206\u5b50\u6bd4\u548c\u78b3\u7684\u5206\u5b50\u6bd4\u5728\u8be5\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u768490\uff05\u4ee5\u4e0a\u7684\u5730\u533a\u6ee1\u8db3\u4ee5\u4e0a(i)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6807\u51c6\u65f6\uff0c\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u4e2d\u7684\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u7845\u539f\u5b50\u7684\u6210\u5206\u7684\u5206\u5b50\u6bd4\u4f8b\u7504\u9009\u4e3a20\uff5e45at\uff05\uff0c\u66f4\u7504\u9009\u4e3a25\uff5e40at\uff05\u3002\u6b64\u5916\uff0c\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u4e2d\u7684\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u6c27\u5206\u5b50\u7684\u6210\u5206\u7684\u5206\u5b50\u6bd4\u4f8b\u7504\u9009\u4e3a45\uff5e75at\uff05\uff0c\u66f4\u7504\u9009\u4e3a50\uff5e70at\uff05\u3002\u800c\u4e14\uff0c\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u4e2d\u7684\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u3001\u6c27\u5206\u5b50\u548c\u78b3\u539f\u5b50\u7684\u7d2f\u8ba1\u91cf\u7684\u78b3\u539f\u5b50\u7684\u6210\u5206\u7684\u5206\u5b50\u6bd4\u4f8b\u7504\u9009\u4e3a0.5\uff5e25at\uff05\uff0c\u66f4\u7504\u9009\u4e3a1\uff5e20at\uff05\u3002\n\t<\/p>\n

\n\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u4ee5\u9009\u7528\u4e0e\u8fc7\u53bb\u4e00\u6837\u7684\u65b9\u5f0f\u6216\u662f\u7ecf\u9002\u5ea6\u5730\u88c5\u9970\u540e\u5e94\u7528\u3002\u7b2c1\u9694\u7edd\u5c42\u7504\u9009\u884c\u9a76\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u6cd5\uff0c\u5c24\u5176\u662f\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5(\u7b49\u79bb\u5b50CVD\u3001PECVD(plasma-enhanced\u00a0chemical\u00a0vapor\u00a0deposition)\uff0c\u4e0b\u5217\u4e5f\u901a\u79f0\u4e3a\u201c\u7b49\u79bb\u5b50CVD\u6cd5\u201d)\u4ea7\u751f\uff0c\u66f4\u7504\u9009\u884c\u9a76\u5982\u4e0b\u6240\u793a\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\uff0c\u5c06\u8981\u677f\u6750\u914d\u5907\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a\u4e0a\uff0c\u5728\u4ee5\u4e0a\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\u800c\u9020\u6210\u7b49\u79bb\u5b50\u3002\n\t<\/p>\n

\n\t\t\u4e0b\u5217\uff0c\u5bf9\u884c\u9a76\u5c06\u677f\u6750\u914d\u5907\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a\u4e0a\u5e76\u5728\u4ee5\u4e0a\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\u800c\u9020\u6210\u7b49\u79bb\u5b50\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u5728\u677f\u6750\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u7684\u65b9\u5f0f \u5f00\u5c55\u8868\u660e\u3002\n\t<\/p>\n

\n\t\t\u300a\u884c\u4f7f\u7b49\u79bb\u5b50\u4f53CVD\u6cd5\u5f62\u6210\u7b2c1\u963b\u9694\u5c42\u7684\u65b9\u6cd5\u300b\n\t<\/p>\n

\n\t\t\u505a\u4e3a\u5728\u677f\u6750\u7684\u5916\u578b\u4e0a\u4ea7\u751f\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u65b9\u5f0f\uff0c\u4ece\u6c7d\u4f53\u9ad8\u963b\u9694\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u9009\u7528\u7b49\u79bb\u5b50CVD\u6cd5\u3002\u5e94\u4e88\u8868\u660e\uff0c\u4ee5\u4e0a\u7b49\u79bb\u5b50CVD\u6cd5\u53ef\u4ee5\u662f\u5f6d\u5b81\u5145\u653e\u7535\u7b49\u79bb\u5b50\u65b9\u6cd5\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u7b49\u79bb\u5b50CVD\u6cd5\u4e2d\u9020\u6210\u7b49\u79bb\u5b50\u65f6\uff0c\u7504\u9009\u5728\u597d\u51e0\u4e2a\u6d82\u819c\u8f8a\u4e2d\u95f4\u7684\u5ba4\u5185\u7a7a\u95f4\u9020\u6210\u7b49\u79bb\u5b50\u5145\u653e\u7535\uff0c\u66f4\u7504\u9009\u5e94\u7528\u4e00\u5bf9\u6d82\u819c\u8f8a\uff0c\u5728\u8be5\u4e00\u5bf9\u6d82\u819c\u8f8a\u4e0a\u5404\u81ea\u914d\u5907\u677f\u6750\uff0c\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\u800c\u9020\u6210\u7b49\u79bb\u5b50\u3002\u5982\u8bb8\uff0c\u6839\u636e\u5e94\u7528\u4e00\u5bf9\u6d82\u819c\u8f8a\uff0c\u5e76\u5728\u8be5\u4e00\u5bf9\u6d82\u819c\u8f8a\u4e0a\u914d\u5907\u677f\u6750\u540e\u5728\u8be5\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\uff0c\u8fdb\u800c\u5728\u6eb6\u80c0\u65f6\u53ef\u4ee5\u5c06\u5b58\u6709\u4e8e\u4e00\u4e2a\u6d82\u819c\u8f8a\u4e0a\u7684\u677f\u6750\u7684\u5916\u578b\u4e00\u90e8\u5206\u6d82\u819c\uff0c\u4e0e\u6b64\u540c\u65f6\u4e5f\u5c06\u5b58\u6709\u4e8e\u53e6\u4e00\u4e2a\u6d82\u819c\u8f8a\u4e0a\u7684\u677f\u6750\u7684\u5916\u578b\u4e00\u90e8\u5206\u6d82\u819c\uff0c\u53ef\u4ee5\u6709\u6548\u5730\u751f\u4ea7\u5236\u9020\u5851\u6599\u8584\u819c\uff0c\u5e76\u4e14\u4e0e\u901a\u5e38\u7684\u4e0d\u5e94\u7528\u8f8a\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u50cf\u8f83\u4e3a\u53ef\u4ee5\u4f7f\u6d82\u819c\u901f\u7387\u589e\u500d\uff0c\u800c\u4e14\u53ef\u4ee5\u6d82\u819c\u4e3a\u5927\u6982\u7c7b\u540c\u6784\u9020\u7684\u819c\uff0c\u56e0\u800c\u53ef\u4ee5\u4f7f\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u6781\u5927\u503c\u6700\u5c11\u589e\u500d\uff0c\u53ef\u4ee5\u6709\u6548\u5730\u4ea7\u751f\u5982\u6570\u6ee1\u8db3\u4ee5\u4e0a\u6807\u51c6(i)\uff5e(iii)\u7684\u5c42\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u5982\u8bb8\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\u65f6\uff0c\u7504\u9009\u4f7f\u4ee5\u4e0a\u4e00\u5bf9\u6d82\u819c\u8f8a\u7684\u6b63\u8d1f\u6781\u66f4\u66ff\u7ffb\u8f6c\u3002\u800c\u4e14\uff0c\u505a\u4e3a\u5982\u8bb8\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u4e2d\u91c7\u7528\u7684\u6d82\u819c\u6c7d\u4f53\uff0c\u7504\u9009\u5e26\u6709\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u548c\u6c27\uff0c\u8be5\u6d82\u819c\u6c7d\u4f53\u4e2d\u7684\u6c27\u7684\u6210\u5206\u7504\u9009\u5c0f\u4e8e\u5c06\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\u4e2d\u7684\u5982\u6570\u4ee5\u4e0a\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u5f7b\u5e95\u7a7a\u6c14\u6c27\u5316\u9700\u8981\u7684\u57fa\u7840\u7406\u8bba\u6c27\u6d53\u5ea6\u3002\u6b64\u5916\uff0c\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4e2d\uff0c\u7504\u9009\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u4e3a\u884c\u9a76\u6301\u7eed\u7684\u6d82\u819c\u52a0\u5de5\u5de5\u827a\u4ea7\u751f\u7684\u5c42\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\uff0c\u4ece\u751f\u4ea7\u6548\u7387\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u4ee5\u5377\u5bf9\u5377\u65b9\u6cd5\u5728\u4ee5\u4e0a\u677f\u6750\u7684\u5916\u578b\u4e0a\u4ea7\u751f\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u884c\u9a76\u5982\u8bb8\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u751f\u4ea7\u5236\u9020\u7b2c1\u9694\u7edd\u5c42\u65f6\u53ef\u91c7\u7528\u7684\u5b89\u88c5\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u4e3a\u5177\u6709\u6700\u5c11\u4e00\u5bf9\u6d82\u819c\u8f8a\u548c\u7b49\u79bb\u5b50\u5f00\u5173\u7535\u6e90\u4e14\u53ef\u5728\u4ee5\u4e0a\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\u7684\u7ec4\u6210\u7684\u5b89\u88c5\uff0c\u6bd4\u5982\uff0c\u5e94\u7528\u56fe2\u4e00\u6837\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u65f6\uff0c\u8fd8\u53ef\u4ee5\u884c\u9a76\u7b49\u79bb\u5b50CVD\u6cd5\u5e76\u4ee5\u5377\u5bf9\u5377\u65b9\u6cd5\u751f\u4ea7\u5236\u9020\u3002\n\t<\/p>\n

\n\t\t\u4e0b\u5217\uff0c\u53c2\u8003\u56fe2\u5bf9\u884c\u9a76\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u7684\u65b9\u5f0f \u5f00\u5c55\u66f4\u8be6\u5c3d\u7684\u8868\u660e\uff0c\u8be5\u7b49\u79bb\u5b50CVD\u6cd5\u662f\u5c06\u677f\u6750\u914d\u5907\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a\u4e0a\uff0c\u5e76\u5728\u4ee5\u4e0a\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u5145\u653e\u7535\u800c\u9020\u6210\u7b49\u79bb\u5b50\u3002\u5e94\u4e88\u8868\u660e\uff0c\u56fe2\u662f\u8868\u9732\u4e3b\u8981\u8868\u73b0\u4e3a\u4e86\u66f4\u597d\u5730\u884c\u9a76\u672c\u751f\u4ea7\u5236\u9020\u65b9\u5f0f\u751f\u4ea7\u5236\u9020\u7b2c1\u9694\u7edd\u5c42\u800c\u53ef\u4ee5\u7504\u9009\u5e94\u7528\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u7684\u4e00\u4e2a\u4e8b\u4f8b\u7684\u5e73\u9762\u56fe\u3002\u6b64\u5916\uff0c\u4e0b\u5217\u7684\u8be6\u7ec6\u8bf4\u660e\u548c\u56fe\u4e0b\u4e2d\uff0c\u5bf9\u7c7b\u540c\u6216\u662f\u76f8\u5f53\u7684\u56e0\u7d20\u6807\u660e\u7c7b\u540c\u7684\u6807\u8bb0\uff0c\u7701\u53bb\u53cd\u590d\u7684\u8868\u660e\u3002\n\t<\/p>\n

\n\t\t\u56fe2\u4e00\u6837\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\u5177\u6709\u9001\u51fa\u53bb\u8f8a32\u3001\u8fd0\u8f93\u8f8a33\u300134\u300135\u300136\u3001\u6d82\u819c\u8f8a39\u300140\u3001\u6c7d\u4f53\u4f9b\u8d27\u7ba141\u3001\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\u3001\u8bbe\u5b9a\u5728\u6d82\u819c\u8f8a39\u548c40\u7684\u91cc\u9762\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\u53ca\u5176\u653e\u5377\u8f8a45\u3002\u6b64\u5916\uff0c\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u4e2d\uff0c\u6700\u5c11\u6d82\u819c\u8f8a39\u300140\u3001\u6c7d\u4f53\u4f9b\u8d27\u7ba141\u3001\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\u3001\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\u914d\u5907\u5728\u7701\u53bb\u4e86\u56fe\u4f8b\u7684\u771f\u5185\u8154\u623f\u95f4\u5185\u3002\u800c\u4e14\uff0c\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\u4e2d\u4ee5\u4e0a\u771f\u5185\u8154\u5ba4\u4e0e\u7701\u53bb\u4e86\u56fe\u4f8b\u7684\u673a\u68b0\u6cf5\u8054\u63a5\uff0c\u884c\u9a76\u8be5\u673a\u68b0\u6cf5\u53ef\u4ee5\u9002\u5ea6\u5730\u8c03\u8282\u771f\u5185\u8154\u623f\u95f4\u5185\u7684\u5de5\u4f5c\u538b\u529b\u3002\n\t<\/p>\n

\n\t\t\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u4e2d\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u4f7f\u4e00\u5bf9\u6d82\u819c\u8f8a(\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40)\u505a\u4e3a\u4e00\u5bf9\u7684\u5bf9\u7f6e\u7535\u7ea7\u5145\u5206\u53d1\u6325\u4f5c\u7528\uff0c\u4f7f\u5404\u6d82\u819c\u8f8a\u5404\u81ea\u4e0e\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\u8054\u63a5\u3002\u56e0\u800c\uff0c\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\u4e2d\uff0c\u6839\u636e\u7531\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\u4f9b\u8d27\u7535\u529b\u5de5\u7a0b\uff0c\u53ef\u4ee5\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u7684\u5ba4\u5185\u7a7a\u95f4\u5145\u653e\u7535\uff0c\u4ece\u800c\u53ef\u4ee5\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u7684\u5ba4\u5185\u7a7a\u95f4\u9020\u6210\u7b49\u79bb\u5b50\u3002\u5e94\u4e88\u8868\u660e\uff0c\u5982\u8bb8\uff0c\u5c06\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\u4e5f\u505a\u4e3a\u7535\u7ea7\u5e94\u7528\u65f6\uff0c\u53ef\u4ee5\u5408\u7406\u5730\u53d8\u52a8\u5176\u6750\u6599\u3001\u8bbe\u8ba1\u65b9\u6848\u4ee5\u4fc3\u4f7f\u8fd8\u53ef\u4ee5\u505a\u4e3a\u7535\u7ea7\u5e94\u7528\u3002\u6b64\u5916\uff0c\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u4e2d\uff0c\u4e00\u5bf9\u6d82\u819c\u8f8a(\u6d82\u819c\u8f8a39\u548c40)\u7504\u9009\u4ee5\u5176\u4e2d\u95f4\u8f74\u5728\u7c7b\u540c\u5e73\u9762\u56fe\u4e0a\u5927\u6982\u5e73\u884c\u9762\u7684\u65b9\u6cd5\u914d\u5907\u3002\u6839\u636e\u5982\u8bb8\u914d\u5907\u4e00\u5bf9\u6d82\u819c\u8f8a(\u6d82\u819c\u8f8a39\u548c40)\uff0c\u53ef\u4ee5\u4f7f\u6d82\u819c\u901f\u7387\u589e\u500d\uff0c\u800c\u4e14\u53ef\u4ee5\u6d82\u819c\u4e3a\u7c7b\u540c\u6784\u9020\u7684\u819c\uff0c\u56e0\u800c\u4ee5\u4e0a\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u4e2d\u7684\u6781\u5927\u503c\u6700\u5c11\u53ef\u4ee5\u589e\u500d\u3002\u5e76\u4e14\uff0c\u9009\u7528\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\uff0c\u53ef\u4ee5\u884c\u9a76CVD\u6cd5\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c423\uff0c\u8fd8\u80fd\u5728\u6d82\u819c\u8f8a39\u4e0a\u4f7f\u7b2c1\u9694\u7edd\u5c42\u6210\u4efd\u5806\u79ef\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\uff0c\u4e0e\u6b64\u540c\u65f6\u5728\u6d82\u819c\u8f8a40\u4e0a\u4f7f\u7b2c1\u9694\u7edd\u5c42\u6210\u4efd\u6c89\u79ef\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\uff0c\u56e0\u800c\u53ef\u4ee5\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\u9ad8\u5730\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

\n\t\t\u5728\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\u7684\u5167\u90e8\u5404\u81ea\u914d\u6709\u56fa\u5b9a\u4e0d\u52a8\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u548c44\u4ee4\u5176\u6d82\u819c\u8f8a\u8f6c\u52a8\u6216\u4e0d\u8f6c\u52a8\u3002\n\t<\/p>\n

\n\t\t\u5404\u81ea\u5efa\u5728\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u548c44\u7504\u9009\u4ee5\u5982\u4e0b\u6240\u793a\u65b9\u6cd5\u914d\u5907\u78c1\u573a\uff0c\u5373\uff0c\u78c1\u611f\u7ebf\u4e0d\u8de8\u8fc7\u5efa\u5728\u4e00\u65b9\u7684\u6d82\u819c\u8f8a39\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u4e0e\u5efa\u5728\u53e6\u4e00\u65b9\u7684\u6d82\u819c\u8f8a40\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c544\u4e2d\u95f4\uff0c\u5404\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\u4ea7\u751f\u51e0\u4e4e\u5408\u95ed\u7684\u78c1\u63a7\u5236\u56de\u8def\u3002\u6839\u636e\u8bbe\u5b9a\u5982\u8bb8\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\uff0c\u53ef\u4ee5\u5728\u5404\u6d82\u819c\u8f8a39\u300140\u7684\u5bf9\u7f6e\u4fa7\u5916\u578b\u5468\u8fb9\u63a8\u52a8\u78c1\u611f\u7ebf\u81a8\u51f8\u7684\u7535\u78c1\u573a\u7684\u4ea7\u751f\uff0c\u5728\u8be5\u7a81\u51fa\u90e8\u975e\u5e38\u5bb9\u6613\u96c6\u805a\u7b49\u79bb\u5b50\uff0c\u5728\u53ef\u4ee5\u53d1\u5c55\u6d82\u819c\u542c\u4ece\u8fd9\u65b9\u9762\u51fa\u8272\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u5404\u81ea\u5efa\u5728\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\u5728\u5404\u538b\u8f8a\u65b9\u4f4d\u5177\u6709\u957f\u7684\u8fd0\u52a8\u573a\u72b6\u7684\u78c1\u573a\uff0c\u7504\u9009\u4ee5\u4e00\u65b9\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u4e0e\u53e6\u4e00\u65b9\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c544\u76f8\u5bf9\u6027\u7684\u78c1\u573a\u4e3a\u7c7b\u540c\u6b63\u8d1f\u6781\u7684\u65b9\u6cd5\u914d\u5907\u78c1\u573a\u3002\u6839\u636e\u8bbe\u5b9a\u5982\u8bb8\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\uff0c\u9488\u5bf9\u5404\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\uff0c\u78c1\u611f\u7ebf\u4e0d\u5bb9\u6613\u8de8\u8fc7\u5bf9\u7f6e\u7684\u8f8a\u4fa7\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c5\uff0c\u975e\u5e38\u5bb9\u6613\u6cbf\u538b\u8f8a\u7684\u957f\u77ed\u65b9\u4f4d\u5728\u671d\u5411\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4(\u5145\u653e\u7535\u5730\u533a)\u7684\u8f8a\u5916\u578b\u5468\u8fb9\u4ea7\u751f\u8fd0\u52a8\u573a\u72b6\u7684\u7535\u78c1\u573a\uff0c\u53ef\u4ee5\u5c06\u7b49\u79bb\u5b50\u96c6\u805a\u5728\u8be5\u7535\u78c1\u573a\uff0c\u56e0\u800c\u5728\u5e94\u7528\u6cbf\u8f8a\u603b\u5bbd\u65b9\u4f4d\u5012\u4e1d\u673a\u7684\u5e45\u5bbd\u7684\u677f\u67502\u53ef\u4ee5\u6709\u5546\u4e1a\u7528\u5730\u4ea7\u751f\u505a\u4e3a\u84b8\u8868\u5c42\u7684\u9540\u819c\u7684\u7b2c1\u9694\u7edd\u5c423\u8fd9\u65b9\u9762\u51fa\u8272\u3002\n\t<\/p>\n

\n\t\t\u505a\u4e3a\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u516c\u77e5\u7684\u8f8a\u3002\u505a\u4e3a\u5982\u8bb8\u7684\u6d82\u819c\u8f8a39\u548c40\uff0c\u4ece\u66f4\u9ad8\u6548\u7387\u5730\u4ea7\u751f\u5851\u6599\u8584\u819c\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u5e94\u7528\u76f4\u5f91\u7c7b\u540c\u7684\u6d82\u819c\u8f8a\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u5982\u8bb8\u7684\u6d82\u819c\u8f8a39\u548c40\u7684\u76f4\u5f91\uff0c\u4ece\u5145\u653e\u7535\u6807\u51c6\u3001\u8154\u5ba4\u7684\u5ba4\u5185\u7a7a\u95f4\u7b49\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u76f4\u5f91\u4e3a300\uff5e1000mm\u03c6\u7684\u8303\u7574\uff0c\u683c\u5916\u7504\u9009\u4e3a300\uff5e700mm\u03c6\u7684\u8303\u7574\u3002\u5018\u82e5\u6d82\u819c\u8f8a\u7684\u76f4\u5f91\u4e3a300mm\u03c6\u4ee5\u4e0a\uff0c\u5219\u7b49\u79bb\u5b50\u5145\u653e\u7535\u5ba4\u5185\u7a7a\u95f4\u4e0d\u4f1a\u6539\u53d8\u5c0f\uff0c\u56e0\u800c\u751f\u4ea7\u6548\u7387\u90fd\u4e0d\u52a3\u53d8\uff0c\u53ef\u4ee5\u9632\u6b62\u77ed\u671f\u5185\u5185\u7b49\u79bb\u5b50\u5145\u653e\u7535\u7684\u5982\u6570\u53d1\u70ed\u91cf\u589e\u52a0\u4e8e\u677f\u67502\uff0c\u53ef\u4ee5\u53ef\u4ee5\u51cf\u5c11\u5bf9\u677f\u67502\u7684\u635f\u5bb3\uff0c\u56e0\u6b64\u7504\u9009\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u5018\u82e5\u6d82\u819c\u8f8a\u7684\u76f4\u5f91\u4e3a1000mm\u03c6\u4e0b\u5217\uff0c\u5219\u5728\u4e5f\u5305\u542b\u7b49\u79bb\u5b50\u5145\u653e\u7535\u5ba4\u5185\u7a7a\u95f4\u7684\u5300\u79f0\u6027\u7b49\u4ee5\u5185\u7684\u5b89\u88c5\u8bbe\u8ba1\u65b9\u6848\u4e0a\uff0c\u53ef\u4ee5\u7ef4\u6301\u5e94\u7528\u6027\uff0c\u56e0\u6b64\u7504\u9009\u3002\n\t<\/p>\n

\n\t\t\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\u4e2d\uff0c\u4ee5\u677f\u67502\u7684\u5916\u578b\u5f7c\u6b64\u4e4b\u95f4\u5bf9\u7f6e\u7684\u65b9\u6cd5\uff0c\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a(\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40)\u4e0a\u914d\u5907\u677f\u67502\u3002\u6839\u636e\u5982\u8bb8\u914d\u5907\u677f\u67502\uff0c\u8fdb\u800c\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u7684\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4\u5f00\u5c55\u5145\u653e\u7535\u800c\u9020\u6210\u7b49\u79bb\u5b50\u65f6\uff0c\u53ef\u4ee5\u5bf9\u5b58\u6709\u4e8e\u4e00\u5bf9\u6d82\u819c\u8f8a\u95f4\u7684\u677f\u67502\u7684\u5404\u5916\u578b\u4e0e\u6b64\u540c\u65f6\u6d82\u819c\u3002\u5373\uff0c\u9009\u7528\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\uff0c\u5e76\u884c\u9a76\u7b49\u79bb\u5b50CVD\u6cd5\uff0c\u53ef\u4ee5\u5728\u6d82\u819c\u8f8a39\u4e0a\u4f7f\u7b2c1\u9694\u7edd\u5c42\u6210\u4efd\u6c89\u79ef\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\uff0c\u800c\u4e14\u5728\u6d82\u819c\u8f8a40\u4e0a\u4f7f\u7b2c1\u9694\u7edd\u5c42\u6210\u4efd\u6c89\u79ef\uff0c\u56e0\u800c\u53ef\u4ee5\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\u9ad8\u5730\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

\n\t\t\u505a\u4e3a\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u4e2d\u91c7\u7528\u7684\u9001\u51fa\u53bb\u8f8a32\u548c\u8fd0\u8f93\u8f8a33\u300134\u300135\u300136\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u516c\u77e5\u7684\u8f8a\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u653e\u5377\u8f8a45\uff0c\u53ea\u9700\u80fd\u5c06\u5728\u677f\u67502\u4e0a\u4ea7\u751f\u6709\u7b2c1\u9694\u7edd\u5c423\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1\u653e\u5377\u5c31\u53ef\u4ee5\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u516c\u77e5\u7684\u8f8a\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u6c7d\u4f53\u4f9b\u8d27\u7ba141\u548c\u673a\u68b0\u6cf5\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u53ef\u4ee5\u4ee5\u89c4\u8303\u7684\u901f\u7387\u4f9b\u8d27\u6216\u662f\u6392\u51fa\u6765\u6750\u6599\u6c7d\u4f53\u7b49\u7684\u5b89\u88c5\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u6c7d\u4f53\u4f9b\u8d27\u7ec4\u7ec7\u7684\u6c7d\u4f53\u4f9b\u8d27\u7ba141\u7504\u9009\u8bbe\u5b9a\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u7684\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4(\u5145\u653e\u7535\u5730\u533a\uff1b\u6d82\u819c\u5730\u533a)\u7684\u4e00\u65b9\uff0c\u505a\u4e3a\u771f\u7a7a\u6cf5\u6392\u6c14\u7ba1\u7ec4\u7ec7\u7684\u673a\u68b0\u6cf5(\u672a\u56fe\u4f8b)\u7504\u9009\u8bbe\u5b9a\u5728\u4ee5\u4e0a\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4\u7684\u53e6\u4e00\u65b9\u3002\u6839\u636e\u5982\u8bb8\u914d\u5907\u505a\u4e3a\u6c7d\u4f53\u4f9b\u8d27\u7ec4\u7ec7\u7684\u6c7d\u4f53\u4f9b\u8d27\u7ba141\u548c\u505a\u4e3a\u771f\u7a7a\u6cf5\u6392\u6c14\u7ba1\u7ec4\u7ec7\u7684\u673a\u68b0\u6cf5\uff0c\u53ef\u4ee5\u5411\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u7684\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4\u9ad8\u6548\u7387\u5730\u4f9b\u8d27\u6d82\u819c\u6c7d\u4f53\uff0c\u5728\u53ef\u4ee5\u53d1\u5c55\u6d82\u819c\u542c\u4ece\u8fd9\u65b9\u9762\u51fa\u8272\u3002\n\t<\/p>\n

\n\t\t\u9664\u6b64\u4e4b\u5916\uff0c\u505a\u4e3a\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u516c\u77e5\u7684\u7b49\u79bb\u5b50\u9020\u6210\u5b89\u88c5\u7684\u5f00\u5173\u7535\u6e90\u3002\u5982\u8bb8\u7684\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\u5411\u4e0e\u5176\u8bf4\u8054\u63a5\u7684\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\u4f9b\u8d27\u7535\u529b\u5de5\u7a0b\uff0c\u8fdb\u800c\u53ef\u4ee5\u5c06\u4ed6\u4eec\u505a\u4e3a\u7528\u4ee5\u5145\u653e\u7535\u7684\u5bf9\u7f6e\u7535\u7ea7\u5e94\u7528\u3002\u505a\u4e3a\u5982\u8bb8\u7684\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\uff0c\u7531\u4e8e\u53ef\u4ee5\u66f4\u9ad8\u6548\u7387\u5730\u6267\u884c\u7b49\u79bb\u5b50CVD\uff0c\u56e0\u800c\u7504\u9009\u884c\u9a76\u53ef\u4ee5\u4f7f\u4ee5\u4e0a\u4e00\u5bf9\u6d82\u819c\u8f8a\u7684\u6b63\u8d1f\u6781\u66f4\u66ff\u7ffb\u8f6c\u7684\u5f00\u5173\u7535\u6e90(\u4ea4\u6d41\u7535\u7b49)\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u5982\u8bb8\u7684\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\uff0c\u7531\u4e8e\u53ef\u4ee5\u66f4\u9ad8\u6548\u7387\u5730\u6267\u884c\u7b49\u79bb\u5b50CVD\uff0c\u56e0\u800c\u66f4\u7504\u9009\u53ef\u4ee5\u4f7f\u53e6\u52a0\u7535\u529b\u5de5\u7a0b\u4e3a100W\uff5e10kW\u4e14\u4f7f\u6c9f\u901a\u4ea4\u6d41\u7684\u5de5\u4f5c\u9891\u7387\u4e3a50Hz\uff5e500kHz\u7684\u5f00\u5173\u7535\u6e90\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c543\u300144\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u516c\u77e5\u7684\u7535\u78c1\u573a\u9020\u6210\u5b89\u88c5\u3002\u800c\u4e14\uff0c\u505a\u4e3a\u677f\u67502\uff0c\u9664\u672c\u4ea7\u54c1\u4e2d\u91c7\u7528\u7684\u677f\u6750\u4e4b\u5916\uff0c\u8fd8\u80fd\u591f\u5e94\u7528\u4e8b\u5148\u4ea7\u751f\u6709\u7b2c1\u9694\u7edd\u5c423\u7684\u677f\u6750\u3002\u5982\u8bb8\uff0c\u6839\u636e\u5e94\u7528\u4e8b\u5148\u4ea7\u751f\u6709\u7b2c1\u9694\u7edd\u5c423\u7684\u677f\u6750\u505a\u4e3a\u677f\u67502\uff0c\u8fd8\u53ef\u4ee5\u63d0\u9ad8\u7b2c1\u9694\u7edd\u5c423\u7684\u819c\u539a\u3002\n\t<\/p>\n

\n\t\t\u6839\u636e\u5e94\u7528\u5982\u8bb8\u7684\u56fe2\u4e00\u6837\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\uff0c\u6bd4\u5982\uff0c\u9002\u5ea6\u5730\u8c03\u8282\u6750\u6599\u6c7d\u4f53\u7684\u7c7b\u578b\u3001\u7b49\u79bb\u5b50\u9020\u6210\u5b89\u88c5\u7684\u7535\u7ea7\u9f13\u7684\u7535\u529b\u5de5\u7a0b\u3001\u771f\u5185\u8154\u623f\u95f4\u5185\u7684\u5de5\u4f5c\u538b\u529b\u3001\u6d82\u819c\u8f8a\u7684\u76f4\u5f91\u53ca\u5176\u819c(\u677f\u6750)\u7684\u8fd0\u8f93\u901f\u7387\uff0c\u53ef\u4ee5\u751f\u4ea7\u5236\u9020\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u3002\u5373\uff0c\u6839\u636e\u5e94\u7528\u56fe2\u4e00\u6837\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\uff0c\u5c06\u6d82\u819c\u6c7d\u4f53(\u6750\u6599\u6c7d\u4f53\u7b49)\u5411\u771f\u5185\u8154\u623f\u95f4\u5185\u4f9b\u8d27\uff0c\u4e0e\u6b64\u540c\u65f6\u5728\u4e00\u5bf9\u6d82\u819c\u8f8a(\u6d82\u819c\u8f8a39\u548c40)\u95f4\u9020\u6210\u5145\u653e\u7535\uff0c\u8fdb\u800c\u4f7f\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53(\u6750\u6599\u6c7d\u4f53\u7b49)\u88ab\u7b49\u79bb\u5b50\u6eb6\u89e3\uff0c\u5728\u6d82\u819c\u8f8a39\u4e0a\u7684\u677f\u67502\u7684\u5916\u578b\u4e0a\u548c\u6d82\u819c\u8f8a40\u4e0a\u7684\u677f\u67502\u7684\u5916\u578b\u4e0a\u884c\u9a76\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c423\u3002\u8fd9\u65f6\uff0c\u5728\u6d82\u819c\u8f8a39\u300140\u7684\u6cbf\u538b\u8f8a\u7684\u957f\u77ed\u65b9\u4f4d\u671d\u5411\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4(\u5145\u653e\u7535\u5730\u533a)\u7684\u8f8a\u5916\u578b\u5468\u8fb9\u4ea7\u751f\u8fd0\u52a8\u573a\u72b6\u7684\u7535\u78c1\u573a\uff0c\u4f7f\u7b49\u79bb\u5b50\u96c6\u805a\u5728\u7535\u78c1\u573a\u3002\u56e0\u800c\uff0c\u677f\u67502\u6839\u636e\u56fe2\u4e2d\u7684\u6d82\u819c\u8f8a39\u7684A\u5730\u5740\u548c\u6d82\u819c\u8f8a40\u7684B\u5730\u5740\u65f6\uff0c\u5728\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u7684\u8fde\u7eed\u51fd\u6570\u3002\u4e0e\u6b64\u76f8\u5bf9\u6027\uff0c\u677f\u67502\u6839\u636e\u56fe2\u4e2d\u7684\u6d82\u819c\u8f8a39\u7684C1\u548cC2\u5730\u5740\u53ca\u5176\u6d82\u819c\u8f8a40\u7684C3\u548cC4\u5730\u5740\u65f6\uff0c\u5728\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u7684\u6781\u5c0f\u503c\u3002\u56e0\u800c\uff0c\u9488\u5bf92\u4e2a\u6d82\u819c\u8f8a\uff0c\u901a\u5e38\u4ea7\u751f5\u4e2a\u6781\u5927\u503c\u3002\u6b64\u5916\uff0c\u7b2c1\u9694\u7edd\u5c42\u7684\u6781\u5927\u503c\u95f4\u7684\u95f4\u8ddd(\u78b3\u904d\u5e03\u66f2\u7ebf\u56fe\u6240\u5177\u5907\u76841\u4e2a\u6781\u5927\u503c\u548c\u4e0e\u8be5\u6781\u5927\u503c\u4e34\u63a5\u7684\u6781\u5927\u503c\u5728\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u65b9\u4f4d\u7684\u8ddd\u7b2c1\u9694\u7edd\u5c42\u5916\u578b\u7684\u95f4\u8ddd(L)\u7684\u5dee\u7684\u5e73\u65b9\u6839)\u53ef\u884c\u9a76\u6d82\u819c\u8f8a39\u300140\u7684\u8f6c\u52a8\u901f\u7387(\u677f\u6750\u7684\u8fd0\u8f93\u901f\u7387)\u8c03\u6574\u3002\u5e94\u4e88\u8868\u660e\uff0c\u5f00\u5c55\u5982\u8bb8\u7684\u6d82\u819c\u65f6\uff0c\u677f\u67502\u5404\u81ea\u88ab\u9001\u51fa\u53bb\u8f8a32\u3001\u6d82\u819c\u8f8a39\u7b49\u8fd0\u8f93\uff0c\u4ece\u800c\u884c\u9a76\u5377\u5bf9\u5377\u65b9\u6cd5\u7684\u6301\u7eed\u6d82\u819c\u52a0\u5de5\u5de5\u827a\u5728\u677f\u67502\u7684\u5916\u578b\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c423\u3002\n\t<\/p>\n

\n\t\t\u505a\u4e3a\u4ece\u4ee5\u4e0a\u6c7d\u4f53\u4f9b\u8d27\u7ba141\u5411\u5bf9\u7f6e\u5ba4\u5185\u7a7a\u95f4\u4f9b\u8d27\u7684\u6d82\u819c\u6c7d\u4f53(\u6750\u6599\u6c7d\u4f53\u7b49)\uff0c\u53ef\u72ec\u7acb\u6216\u662f\u6df7\u548c\u5e94\u75282\u79cd\u4ee5\u4e0a\u7684\u6750\u6599\u6c7d\u4f53\u3001\u53cd\u6620\u6c7d\u4f53\u3001\u8f7d\u6c14\u3001\u5145\u653e\u7535\u6c7d\u4f53\u3002\u505a\u4e3a\u7b2c1\u9694\u7edd\u5c423\u7684\u5efa\u7acb\u4e2d\u91c7\u7528\u7684\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\u4e2d\u7684\u6750\u6599\u6c7d\u4f53\uff0c\u53ef\u4f9d\u636e\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c423\u7684\u6750\u6599\u9002\u5ea6\u5730\u6311\u9009\u5e94\u7528\u3002\u505a\u4e3a\u5982\u8bb8\u7684\u6750\u6599\u6c7d\u4f53\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528\u5e26\u6709\u7845\u7684\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u3001\u5e26\u6709\u78b3\u7684\u6709\u673a\u7269\u6c7d\u4f53\u3002\u505a\u4e3a\u5982\u8bb8\u7684\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u516d\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(HMDSO)\u3001\u516d\u7f9f\u57fa\u4e8c\u6c2f\u7845\u70f7(HMDS)\u30011,1,3,3-\u56db\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u7f9f\u57fa\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u516d\u7f9f\u57fa\u4e8c\u6c2f\u7845\u70f7\u3001\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u7532\u57fa\u6c2f\u7845\u70f7\u3001\u4e09\u7f9f\u57fa\u6c2f\u7845\u70f7\u3001\u4e8c\u4e59\u57fa\u6c2f\u7845\u70f7\u3001\u4e19\u57fa\u6c2f\u7845\u70f7\u3001\u82ef\u57fa\u6c2f\u7845\u70f7\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u4e09\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u4e09\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u56db\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7(TMOS)\u3001\u56db\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7(TEOS)\u3001\u82ef\u57fa\u4e09\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7\u3001\u7f9f\u57fa\u4e09\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u3001\u516b\u7f9f\u57fa\u73af\u56db\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3002\u8fd9\u79cd\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u4e2d\uff0c\u4ece\u5316\u5b66\u7269\u8d28\u7684\u53ef\u64cd\u4f5c\u6027\u548c\u83b7\u5f97\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u7b49\u7279\u70b9\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u516d\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u30011,1,3,3-\u56db\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3002\u8fd9\u79cd\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u5e26\u6709\u78b3\u7684\u6709\u673a\u7269\u6c7d\u4f53\uff0c\u6bd4\u5982\uff0c\u53ef\u4f8b\u793a\u7532\u70f7\u6c14\u4f53\u3001\u5df1\u70f7\u3001\u4e01\u4e8c\u70ef\u3001\u4e59\u7094\u6c14\u4f53\u3002\u8fd9\u79cd\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u6c7d\u4f53\u3001\u6709\u673a\u7269\u6c7d\u4f53\u4f9d\u636e\u7b2c1\u9694\u7edd\u5c423\u7684\u7c7b\u578b\u6311\u9009\u5408\u7406\u7684\u6750\u6599\u6c7d\u4f53\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\uff0c\u9664\u4ee5\u4e0a\u6750\u6599\u6c7d\u4f53\u4e4b\u5916\uff0c\u8fd8\u53ef\u5e94\u7528\u53cd\u6620\u6c7d\u4f53\u3002\u505a\u4e3a\u5982\u8bb8\u7684\u53cd\u6620\u6c7d\u4f53\uff0c\u53ef\u9002\u5ea6\u5730\u6311\u9009\u5e94\u7528\u4e0e\u4ee5\u4e0a\u6750\u6599\u6c7d\u4f53\u53cd\u6620\u800c\u53d8\u6210\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6c2e\u5316\u5408\u7269\u7b49\u65e0\u673a\u7269\u7684\u6c7d\u4f53\u3002\u505a\u4e3a\u7528\u4ee5\u4ea7\u751f\u91d1\u5c5e\u6c27\u5316\u7269\u7684\u53cd\u6620\u6c7d\u4f53\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528\u6c27\u3001\u6d3b\u6027\u6c27\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u7528\u4ee5\u4ea7\u751f\u6c2e\u5316\u5408\u7269\u7684\u53cd\u6620\u6c7d\u4f53\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528\u6c2e\u3001\u6c28\u3002\u8fd9\u79cd\u53cd\u6620\u6c7d\u4f53\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\uff0c\u6bd4\u5982\u4ea7\u751f\u6c2e\u6c27\u5316\u5408\u7269\u65f6\uff0c\u53ef\u4ee5\u7ec4\u6210\u5e94\u7528\u7528\u4ee5\u4ea7\u751f\u91d1\u5c5e\u6c27\u5316\u7269\u7684\u53cd\u6620\u6c7d\u4f53\u548c\u7528\u4ee5\u4ea7\u751f\u6c2e\u5316\u5408\u7269\u7684\u53cd\u6620\u6c7d\u4f53\u3002\n\t<\/p>\n

\n\t\t\u505a\u4e3a\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u5c06\u4ee5\u4e0a\u6750\u6599\u6c7d\u4f53\u5411\u771f\u5185\u8154\u623f\u95f4\u5185\u4f9b\u8d27\uff0c\u4f9d\u636e\u5fc5\u9700\uff0c\u53ef\u4ee5\u5e94\u7528\u8f7d\u6c14\u3002\u800c\u4e14\uff0c\u505a\u4e3a\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u9020\u6210\u7b49\u79bb\u5b50\u5145\u653e\u7535\uff0c\u4f9d\u636e\u5fc5\u9700\uff0c\u53ef\u4ee5\u5e94\u7528\u5145\u653e\u7535\u7528\u6c7d\u4f53\u3002\u505a\u4e3a\u5982\u8bb8\u7684\u8f7d\u6c14\u548c\u5145\u653e\u7535\u7528\u6c7d\u4f53\uff0c\u53ef\u9002\u5ea6\u5730\u5e94\u7528\u516c\u77e5\u7684\u6c7d\u4f53\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528\u6c26\u3001\u6c29\u3001\u6c16\u3001\u6c19\u7b49\u4e86\u89e3\u6c7d\u4f53\uff1b\u6c22\u3002\n\t<\/p>\n

\n\t\t\u5982\u8bb8\u7684\u6d82\u819c\u6c7d\u4f53\u5e26\u6709\u6750\u6599\u6c7d\u4f53\u548c\u53cd\u6620\u6c7d\u4f53\u65f6\uff0c\u505a\u4e3a\u6750\u6599\u6c7d\u4f53\u4e0e\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u6bd4\u4f8b\uff0c\u7504\u9009\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u6bd4\u4f8b\u4e0e\u4e3a\u4e86\u66f4\u597d\u5730\u4f7f\u6750\u6599\u6c7d\u4f53\u4e0e\u53cd\u6620\u6c7d\u4f53\u5b8c\u5168\u53cd\u5e94\u800c\u7406\u8bba\u4e0a\u9700\u8981\u7684\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u91cf\u7684\u6bd4\u4f8b\u5bf9\u6bd4\uff0c\u4f46\u662f\u91cf\u8fc7\u591a\u3002\u6839\u636e\u4f7f\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u6bd4\u4f8b\u4f46\u662f\u91cf\u8fc7\u591a\uff0c\u8fdb\u800c\u5728\u884c\u9a76\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c423\u53ef\u4ee5\u83b7\u5f97\u51fa\u8272\u7684\u9ad8\u963b\u9694\u3001\u8010\u5f2f\u6298\u6027\u8fd9\u65b9\u9762\u51fa\u8272\u3002\u6b64\u5916\uff0c\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\u5e26\u6709\u4ee5\u4e0a\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u548c\u6c27\u65f6\uff0c\u7504\u9009\u4e3a\u5c06\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\u4e2d\u7684\u5982\u6570\u4ee5\u4e0a\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u5f7b\u5e95\u7a7a\u6c14\u6c27\u5316\u9700\u8981\u7684\u57fa\u7840\u7406\u8bba\u6c27\u6d53\u5ea6\u4e0b\u5217\u3002\n\t<\/p>\n

\n\t\t\u4e0b\u5217\uff0c\u505a\u4e3a\u4ee5\u4e0a\u6d82\u819c\u6c7d\u4f53\uff0c\u5e94\u7528\u5e26\u6709\u505a\u4e3a\u6750\u6599\u6c7d\u4f53\u7684\u516d\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(\u6709\u673a\u7845\u6750\u6599\u5316\u5b66\u7269\u8d28\u3001HMDSO\u3001(CH3<\/sub>)6<\/sub>Si2<\/sub>O)\u548c\u505a\u4e3a\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u6c27(O2<\/sub>)\u7684\u6c7d\u4f53\uff0c\u4f8b\u4e3e\u751f\u4ea7\u5236\u9020\u7845-\u6c27\u7cfb\u7684\u5851\u6599\u8584\u819c\u7684\u72b6\u51b5\u4e3a\u4f8b\u5b50\uff0c\u5bf9\u6d82\u819c\u6c7d\u4f53\u4e2d\u7684\u6750\u6599\u6c7d\u4f53\u4e0e\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u7504\u9009\u6bd4\u4f8b\u7b49\u5f00\u5c55\u66f4\u8be6\u5c3d\u7684\u8868\u660e\u3002\n\t<\/p>\n

\n\t\t\u884c\u9a76\u7b49\u79bb\u5b50CVD\u4f7f\u5e26\u6709\u505a\u4e3a\u6750\u6599\u6c7d\u4f53\u7684\u516d\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(HMDSO\u3001(CH3<\/sub>)6<\/sub>Si2<\/sub>O)\u548c\u505a\u4e3a\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u6c27(O2<\/sub>)\u7684\u6d82\u819c\u6c7d\u4f53\u53cd\u6620\u800c\u751f\u4ea7\u5236\u9020\u7845-\u6c27\u7cfb\u7684\u5851\u6599\u8584\u819c\u65f6\uff0c\u7531\u8be5\u6d82\u819c\u6c7d\u4f53\u9020\u6210\u4ee5\u4e0b\u53cd\u5e94\u65b9\u7a0b1\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u53cd\u6620\uff0c\u8f6c\u5316\u6210\u4e8c\u6c27\u5316\u7845\u3002\n\t<\/p>\n

\n\t\t\uff08CH3<\/sub>\uff096<\/sub>Si2<\/sub>O 12O2<\/sub>\u21926CO2<\/sub> 9H2<\/sub>O 2SiO2<\/sub>\u2026\u53cd\u5e94\u65b9\u7a0b1\n\t<\/p>\n

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\n\t\t\u6b64\u5916\uff0c\u771f\u5185\u8154\u623f\u95f4\u5185\u7684\u5de5\u4f5c\u538b\u529b(\u771f\u7a7a\u503c)\u53ef\u4f9d\u636e\u6750\u6599\u6c7d\u4f53\u7684\u7c7b\u578b\u7b49\u9002\u5ea6\u5730\u8c03\u8282\uff0c\u7504\u9009\u4e3a0.5Pa\uff5e50Pa\u7684\u8303\u7574\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u5982\u8bb8\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u4e2d\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u5145\u653e\u7535\u800c\u5bf9\u4e0e\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e9042\u8054\u63a5\u7684\u7535\u7ea7\u9f13(\u672c\u6267\u884c\u65b9\u6cd5\u4e2d\uff0c\u8bbe\u5b9a\u4e8e\u6d82\u819c\u8f8a39\u548c40)\u53e6\u52a0\u7684\u7535\u529b\u5de5\u7a0b\u53ef\u4f9d\u636e\u6750\u6599\u6c7d\u4f53\u7684\u7c7b\u578b\u3001\u771f\u5185\u8154\u623f\u95f4\u5185\u7684\u5de5\u4f5c\u538b\u529b\u7b49\u9002\u5ea6\u5730\u8c03\u8282\uff0c\u56e0\u800c\u4e0d\u53ef\u4ee5\u4e00\u6982\u800c\u8bba\uff0c\u4f46\u7504\u9009\u4e3a0.1\uff5e10kW\u7684\u8303\u7574\u3002\u5018\u82e5\u5982\u8bb8\u7684\u53e6\u52a0\u7535\u529b\u5de5\u7a0b\u4e3a100W\u4ee5\u4e0a\uff0c\u5219\u53ef\u4ee5\u5145\u8db3\u6291\u5236\u9897\u7c92\u7269\u9020\u6210\uff0c\u53e6\u4e00\u65b9\u9762\uff0c\u5018\u82e5\u4e3a10kW\u4e0b\u5217\uff0c\u5219\u53ef\u4ee5\u6291\u5236\u6d82\u819c\u65f6\u53d1\u751f\u7684\u53d1\u70ed\u91cf\uff0c\u53ef\u4ee5\u6291\u5236\u6d82\u819c\u65f6\u7684\u677f\u6750\u5916\u578b\u7684\u6eab\u5ea6\u5347\u9ad8\u3002\u56e0\u800c\u53ef\u4ee5\u5728\u677f\u6750\u4e0d\u9020\u6210\u70ed\u635f\u5bb3\u7684\u60c5\u5f62\u4e0b\u907f\u514d\u6d82\u819c\u65f6\u9020\u6210\u8936\u5b50\uff0c\u5728\u8fd9\u65b9\u9762\u662f\u51fa\u8272\u7684\u3002\n\t<\/p>\n

\n\t\t\u677f\u67502\u7684\u8fd0\u8f93\u901f\u7387(\u751f\u4ea7\u6d41\u6c34\u7ebf\u901f\u7387)\u53ef\u4f9d\u636e\u6750\u6599\u6c7d\u4f53\u7684\u7c7b\u578b\u3001\u771f\u5185\u8154\u623f\u95f4\u5185\u7684\u5de5\u4f5c\u538b\u529b\u7b49\u9002\u5ea6\u5730\u8c03\u8282\uff0c\u7504\u9009\u4e3a0.25\uff5e100m\/min\u7684\u8303\u7574\uff0c\u66f4\u7504\u9009\u4e3a0.5\uff5e20m\/min\u7684\u8303\u7574\u3002\u5018\u82e5\u751f\u4ea7\u6d41\u6c34\u7ebf\u901f\u7387\u4e3a0.25m\/min\u4ee5\u4e0a\uff0c\u5219\u53ef\u4ee5\u6709\u6548\u6291\u5236\u677f\u6750\u9020\u6210\u7531\u70ed\u9020\u6210\u7684\u8936\u5b50\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u5018\u82e5\u4e3a100m\/min\u4e0b\u5217\uff0c\u5219\u53ef\u4ee5\u5728\u4e0d\u5371\u5bb3\u751f\u4ea7\u6548\u7387\u7684\u60c5\u5f62\u4e0b\u4fdd\u8bc1\u505a\u4e3a\u7b2c1\u9694\u7edd\u5c42\u7684\u5145\u8db3\u7684\u819c\u539a\uff0c\u5728\u8fd9\u65b9\u9762\u662f\u51fa\u8272\u7684\u3002\n\t<\/p>\n

\n\t\t\u5982\u4e0a\u6240\u8ff0\uff0c\u505a\u4e3a\u672c\u6267\u884c\u65b9\u6cd5\u7684\u66f4\u7504\u9009\u7684\u65b9\u6cd5\uff0c\u5176\u7279\u70b9\u53d6\u51b3\u4e8e\uff0c\u5c06\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u884c\u9a76\u5e94\u7528\u4e86\u56fe2\u4e00\u6837\u7684\u5177\u5907\u5bf9\u7f6e\u8f8a\u7535\u7ea7\u7684\u7b49\u79bb\u5b50CVD\u5b89\u88c5(\u5377\u5bf9\u5377\u65b9\u6cd5)\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u5f00\u5c55\u6d82\u819c\u3002\u8fd9\u662f\u7531\u4e8e\u5728\u5e94\u7528\u5177\u5907\u5bf9\u7f6e\u8f8a\u7535\u7ea7\u7684\u7b49\u79bb\u5b50CVD\u5b89\u88c5(\u5377\u5bf9\u5377\u65b9\u6cd5)\u5f00\u5c55\u5927\u6279\u91cf\u751f\u4ea7\u65f6\uff0c\u53ef\u4ee5\u6709\u6548\u5730\u751f\u4ea7\u5236\u9020\u6320\u6027(\u5f2f\u6298\u6027)\u51fa\u8272\u4e14\u517c\u987e\u51b2\u51fb\u97e7\u6027\u3001\u5c24\u5176\u662f\u5377\u5bf9\u5377\u65b9\u6cd5\u8fd0\u8f93\u65f6\u7684\u4f7f\u7528\u6027\u80fd\u548c\u9694\u7edd\u7279\u6027\u7684\u7b2c1\u9694\u7edd\u5c42\u3002\u5982\u8bb8\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c5\u5728\u53ef\u4ee5\u4fbf\u5b9c\u4e14\u975e\u5e38\u5bb9\u6613\u5730\u5927\u6279\u91cf\u751f\u4ea7\u592a\u9633\u80fd\u7535\u6c60\u677f\u3001\u7535\u5b50\u5668\u4ef6\u6784\u4ef6\u7b49\u4e2d\u91c7\u7528\u7684\u89c4\u5b9a\u5bf9\u6eab\u5ea6\u53d8\u5316\u5177\u5907\u7a33\u5b9a\u6027\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u8fd9\u65b9\u9762\u4e5f\u51fa\u8272\u3002\n\t<\/p>\n

\n\t\t\uff1c\u65bd\u80f6\u6cd5\uff1e\n\t<\/p>\n

\n\t\t\u672c\u4ea7\u54c1\u7684\u7b2c1\u9694\u7edd\u5c42\u53ef\u4ee5\u7528\u5982\u4e0b\u6240\u793a\u65b9\u5f0f\u4ea7\u751f\uff0c\u5373\u5bf9\u65bd\u80f6\u5e26\u6709\u65e0\u673a\u7269\u7684\u6db2\u6001\u3001\u7504\u9009\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u7684\u6db2\u6001\u4ea7\u751f\u7684\u6d82\u5c42\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u800c\u4ea7\u751f\u7684\u65b9\u5f0f(\u65bd\u80f6\u6cd5)\u3002\u4e0b\u5217\uff0c\u4f8b\u4e3e\u5c06\u7845\u5316\u5b66\u7269\u8d28\u505a\u4e3a\u65e0\u673a\u7269\u7684\u4e8b\u4f8b\u5f00\u5c55\u8868\u660e\uff0c\u4f46\u4ee5\u4e0a\u65e0\u673a\u7269\u4e0d\u9650\u4e8e\u7845\u5316\u5b66\u7269\u8d28\u3002\n\t<\/p>\n

\n\t\t(\u7845\u5316\u5b66\u7269\u8d28)\n\t<\/p>\n

\n\t\t\u505a\u4e3a\u4ee5\u4e0a\u7845\u5316\u5b66\u7269\u8d28\uff0c\u53ea\u9700\u53ef\u4ee5\u5236\u53d6\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u7684\u65bd\u80f6\u6db2\u5c31\u6c92\u6709\u683c\u5916\u9650\u5b9a\u3002\n\t<\/p>\n

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\n\t\t\u505a\u4e3a\u4ee5\u4e0a\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\uff0c\u6bd4\u5982\u53ef\u5217\u4e3eMayaterials\u5236Q8\u7cfb\u5217\u4ea7\u54c1\u548c\u4e0d\u5e26\u6709\u673a\u5b98\u80fd\u56e2\u7684\u916f\u5316\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u7b49\u3002\n\t<\/p>\n

\n\t\t\u5728\u5176\u4e2d\uff0c\u4ece\u6d82\u819c\u6027\u3001\u7f1d\u9699\u7b49\u7f3a\u70b9\u5c11\u3001\u6b8b\u4f59\u6709\u673a\u5316\u5408\u7269\u5c11\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u3001\u6709\u673a\u5316\u5b66\u805a\u7845\u6c2e\u70f7\u7b49\u805a\u7845\u6c2e\u70f7\uff1b\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u7b49\u7845\u6c27\u70f7\u7b49\uff0c\u7531\u4e8e\u6c7d\u4f53\u9694\u7edd\u7279\u6027\u9ad8\u3001\u5728\u5f2f\u6298\u65f6\u548c\u4f4e\u6e29\u9ad8\u4f4e\u6e29\u6807\u51c6\u4e0b\u4e5f\u53ef\u4ee5\u4fdd\u6301\u9694\u7edd\u7279\u6027\uff0c\u56e0\u800c\u66f4\u7504\u9009\u805a\u7845\u6c2e\u70f7\uff0c\u683c\u5916\u7504\u9009\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u3002\n\t<\/p>\n

\n\t\t\u805a\u7845\u6c2e\u70f7\u5c31\u662f\u6307\u5177\u5907\u7845-\u6c2e\u952e\u7684\u9ad8\u805a\u7269\uff0c\u662f\u5177\u5907Si-N\u3001Si-H\u3001N-H\u7b49\u952e\u7684SiO2<\/sub>\u3001Si3<\/sub>N4<\/sub>\u548c\u4e8c\u8005\u7684\u6838\u5fc3\u79bb\u5b50\u6676\u4f53SiOx<\/sub>Ny<\/sub>\u7b49\u74f7\u5668\u78f7\u9178\u6fc0\u9176\u6709\u673a\u7269\u9ad8\u805a\u7269\u3002\n\t<\/p>\n

\n\t\t\u8be6\u5c3d\u6765\u8bb2\uff0c\u805a\u7845\u6c2e\u70f7\u7504\u9009\u5177\u5907\u4ee5\u4e0b\u7684\u6784\u9020\u3002\n\t<\/p>\n

\n\t\t\u7ed3\u6784\u5f0f(I)\uff1a\n\t<\/p>\n

\n\t\t-[Si(R1<\/sub>)(R2<\/sub>)-N(R3<\/sub>)]n<\/sub>–\n\t<\/p>\n

\n\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(I)\u4e2d\uff0cR1<\/sub>\u3001R2<\/sub>\u548cR3<\/sub>\u5206\u522b\u81ea\u529b\u5730\u4e3a\u6c22\u539f\u5b50\u3001\u5e96\u4ee3\u6216\u8005\u975e\u5e96\u4ee3\u7684\u7532\u57fa\u3001\u82b3\u9999\u65cf\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6216\u662f(\u4e09\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u57fa\u3002\u8fd9\u65f6\uff0cR1<\/sub>\u3001R2<\/sub>\u548cR3<\/sub>\u5206\u522b\u53ef\u4ee5\u7c7b\u540c\u6216\u662f\u4e0d\u4e00\u6837\u3002\u8fd9\u513f\uff0c\u505a\u4e3a\u7532\u57fa\uff0c\u53ef\u5217\u4e3e\u78b3\u539f\u5b50\u65701\uff5e8\u7684\u7f51\u76d8\u76f4\u94fe\u3001\u78b3\u952e\u6216\u662f\u73af\u5f62\u7684\u7532\u57fa\u3002\u66f4\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u7f9f\u57fa\u3001\u4e59\u57fa\u3001\u6b63\u4e19\u57fa\u3001\u5f02\u4e19\u57fa\u3001\u6b63\u4e01\u57fa\u3001\u5f02\u4e01\u57fa\u3001\u4ef2\u4e01\u57fa\u3001\u53d4\u4e01\u57fa\u3001\u6b63\u620a\u57fa\u3001\u5f02\u620a\u57fa\u3001\u65b0\u620a\u57fa\u3001\u4fee\u5fb7\u57fa\u3001\u6b63\u5e9a\u57fa\u3001\u6b63\u8f9b\u57fa\u30012-\u4e59\u57fa\u5df1\u57fa\u3001\u73af\u4e19\u57fa\u3001\u73af\u620a\u57fa\u3001\u73af\u5df1\u57fa\u7b49\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u82b3\u9999\u65cf\uff0c\u53ef\u5217\u4e3e\u78b3\u539f\u5b50\u65706\uff5e30\u7684\u82b3\u9999\u65cf\u3002\u66f4\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u82ef\u57fa\u3001\u8054\u82ef\u57fa\u3001\u4e09\u8054\u82ef\u57fa\u7b49\u975e\u7a20\u5408\u70c3\u57fa\uff1b\u620a\u642d\u70ef\u57fa(pentalenyl\u00a0group)\u3001\u831a\u57fa\u3001\u8418\u57fa\u3001\u8581\u57fa\u3001\u5e9a\u642d\u70ef\u57fa(heptalenyl\u00a0group)\u3001\u4e9a\u8054\u82ef\u57fa\u3001\u82b4\u57fa\u3001\u82ca\u70ef\u57fa\u3001\u4e03\u66dc\u70ef\u57fa\u3001\u82ca\u57fa\u3001\u975e\u90a3\u70ef\u57fa\u3001\u83f2\u57fa\u3001\u84bd\u57fa\u3001\u8367\u84bd\u57fa\u3001\u918b\u83f2\u70ef\u57fa(acephenanthrylenyl\u00a0group)\u3001\u918b\u84bd\u70ef\u57fa(aceanthrylenyl\u00a0group)\u3001\u82ef\u5e76[9,10]\u83f2\u57fa\u3001\u8298\u57fa\u3001\u57fa\u3001\u5e76\u56db\u82ef\u57fa\u7b49\u7a20\u5408\u591a\u73af\u70c3\u57fa\u3002\u505a\u4e3a(\u4e09\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u57fa\uff0c\u53ef\u5217\u4e3e\u5177\u5907\u88ab\u78b3\u539f\u5b50\u65701\uff5e8\u7684\u70f7\u6c27\u57fa\u5e96\u4ee3\u7684\u7532\u7845\u70f7\u57fa\u7684\u78b3\u539f\u5b50\u65701\uff5e8\u7684\u7532\u57fa\u3002\u66f4\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e3-(\u4e09\u4e59\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u4e19\u57fa\u30013-(\u4e09\u53d4\u4e01\u57fa\u7532\u7845\u70f7\u57fa)\u4e19\u57fa\u7b49\u3002\u4f9d\u636e\u72b6\u51b5\u800c\u51fa\u73b0\u4e8e\u4ee5\u4e0aR1<\/sub>\uff5eR3<\/sub>\u7684\u5e96\u4ee3\u57fa\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u6bd4\u5982\uff0c\u6709\u7532\u57fa\u3001\u5364\u7d20\u539f\u5b50\u3001\u7532\u57fa(-OH)\u3001\u5def\u57fa(-SH)\u3001\u78fa\u9178\u57fa(-CN)\u3001\u78fa\u57fa(-SO3<\/sub>H)\u3001\u7fa7\u57fa(-COOH)\u3001\u6c1f\u82ef(-NO2<\/sub>)\u7b49\u3002\u5e94\u4e88\u8868\u660e\uff0c\u4f9d\u636e\u72b6\u51b5\u51fa\u73b0\u7684\u5e96\u4ee3\u57fa\u4e0e\u5e96\u4ee3\u7684R1<\/sub>\uff5eR3<\/sub>\u5e76\u4e0d\u7c7b\u540c\u3002\u6bd4\u5982\uff0cR1<\/sub>\uff5eR3<\/sub>\u4e3a\u7532\u57fa\u65f6\uff0c\u4e0d\u5bb9\u6613\u8fdb\u4e00\u6b65\u88ab\u7532\u57fa\u5e96\u4ee3\u3002\u5728\u5176\u4e2d\uff0c\u7504\u9009R1<\/sub>\u3001R2<\/sub>\u548cR3<\/sub>\u4e3a\u6c22\u539f\u5b50\u3001\u7f9f\u57fa\u3001\u4e59\u57fa\u3001\u4e19\u57fa\u3001\u5f02\u4e19\u57fa\u3001\u4e01\u57fa\u3001\u5f02\u4e01\u57fa\u3001\u53d4\u4e01\u57fa\u3001\u82ef\u57fa\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u30013-(\u4e09\u4e59\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u4e19\u57fa\u6216\u662f3-(\u4e09\u53d4\u4e01\u57fa\u7532\u7845\u70f7\u57fa)\u4e19\u57fa\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u4ee5\u4e0a\u7ed3\u6784\u5f0f(I)\u4e2d\uff0cn\u4e3a\u6574\u6570\u91d1\u989d\uff0cn\u7504\u9009\u4ee5\u5177\u5907\u7ed3\u6784\u5f0f(I)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u7ed3\u6784\u7279\u5f81\u7684\u805a\u7845\u6c2e\u70f7\u5177\u5907150\uff5e150000g\/\u514b\u5206\u5b50\u7684\u6570\u5747\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u7684\u65b9\u6cd5\u660e\u786e\u3002\n\t<\/p>\n

\n\t\t\u5177\u5907\u4ee5\u4e0a\u7ed3\u6784\u5f0f(I)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u7ed3\u6784\u7279\u5f81\u7684\u5316\u5b66\u7269\u8d28\u4e2d\uff0c\u7504\u9009\u7684\u5f62\u5f0f\u4e4b\u4e00\u662fR1<\/sub>\u3001R2<\/sub>\u548cR3<\/sub>\u5982\u6570\u4e3a\u6c22\u539f\u5b50\u7684\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u3002\n\t<\/p>\n

\n\t\t\u6216\u662f\uff0c\u505a\u4e3a\u805a\u7845\u6c2e\u70f7\uff0c\u5177\u5907\u4ee5\u4e0b\u7ed3\u6784\u5f0f(II)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6784\u9020\u3002\n\t<\/p>\n

\n\t\t\u7ed3\u6784\u5f0f(II)\uff1a\n\t<\/p>\n

\n\t\t-[Si(R1\u2019<\/sub>)(R2\u2019<\/sub>)-N(R3\u2019<\/sub>)]n\u2019<\/sub>-[Si(R4\u2019<\/sub>)(R5\u2019<\/sub>)-N(R6\u2019<\/sub>)]p<\/sub>–\n\t<\/p>\n

\n\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(II)\u4e2d\uff0cR1\u2019<\/sub>\u3001R2\u2019<\/sub>\u3001R3\u2019<\/sub>\u3001R4\u2019<\/sub>\u3001R5\u2019<\/sub>\u548cR6\u2019<\/sub>\u5206\u522b\u81ea\u529b\u5730\u4e3a\u6c22\u539f\u5b50\u3001\u5e96\u4ee3\u6216\u8005\u975e\u5e96\u4ee3\u7684\u7532\u57fa\u3001\u82b3\u9999\u65cf\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6216\u662f(\u4e09\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u57fa\u3002\u8fd9\u65f6\uff0cR1\u2019<\/sub>\u3001R2\u2019<\/sub>\u3001R3\u2019<\/sub>\u3001R4\u2019<\/sub>\u3001R5\u2019<\/sub>\u548cR6\u2019<\/sub>\u5206\u522b\u53ef\u4ee5\u7c7b\u540c\u6216\u662f\u4e0d\u4e00\u6837\u3002\u4ee5\u4e0a\u7684\u5e96\u4ee3\u6216\u8005\u975e\u5e96\u4ee3\u7684\u7532\u57fa\u3001\u82b3\u9999\u65cf\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6216\u662f(\u4e09\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u57fa\u4e0e\u4ee5\u4e0a\u7ed3\u6784\u5f0f(I)\u7684\u754c\u5b9a\u7c7b\u540c\uff0c\u7701\u53bb\u8868\u660e\u3002\n\t<\/p>\n

\n\t\t\u6b64\u5916\uff0c\u4ee5\u4e0a\u7ed3\u6784\u5f0f(II)\u4e2d\uff0cn\u2019\u548cp\u4e3a\u6574\u6570\u91d1\u989d\uff0cn\u2019\u548cp\u7504\u9009\u4ee5\u5177\u5907\u7ed3\u6784\u5f0f(II)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u7ed3\u6784\u7279\u5f81\u7684\u805a\u7845\u6c2e\u70f7\u5177\u5907150\uff5e150000g\/\u514b\u5206\u5b50\u7684\u6570\u5747\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u7684\u65b9\u6cd5\u660e\u786e\u3002\u5e94\u4e88\u8868\u660e\uff0cn\u2019\u548cp\u53ef\u4ee5\u7c7b\u540c\u6216\u662f\u4e0d\u4e00\u6837\u3002\n\t<\/p>\n

\n\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(II)\u7684\u805a\u7845\u6c2e\u70f7\u4e2d\uff0c\u7504\u9009R1\u2019<\/sub>\u3001R3\u2019<\/sub>\u548cR6\u2019<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u6c22\u539f\u5b50\u3001R2\u2019<\/sub>\u3001R4\u2019<\/sub>\u548cR5\u2019<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7f9f\u57fa\u7684\u5316\u5b66\u7269\u8d28\uff1bR1\u2019<\/sub>\u3001R3\u2019<\/sub>\u548cR6\u2019<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u6c22\u539f\u5b50\u3001R2\u2019<\/sub>\u3001R4\u2019<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7f9f\u57fa\u3001R5\u2019<\/sub>\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7532\u57fa\u4e19\u70ef\u9178\u916f\u7684\u5316\u5b66\u7269\u8d28\uff1bR1\u2019<\/sub>\u3001R3\u2019<\/sub>\u3001R4\u2019<\/sub>\u548cR6\u2019<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u6c22\u539f\u5b50\u3001R2\u2019<\/sub>\u548cR5\u2019<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7f9f\u57fa\u7684\u5316\u5b66\u7269\u8d28\u3002\n\t<\/p>\n

\n\t\t\u6216\u662f\uff0c\u505a\u4e3a\u805a\u7845\u6c2e\u70f7\uff0c\u5177\u5907\u4ee5\u4e0b\u7ed3\u6784\u5f0f(III)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6784\u9020\u3002\n\t<\/p>\n

\n\t\t\u7ed3\u6784\u5f0f(III)\uff1a\n\t<\/p>\n

\n\t\t-[Si(R1\u201d<\/sub>)(R2\u201d<\/sub>)-N(R3\u201d<\/sub>)]n\u201d<\/sub>-[Si(R4\u201d<\/sub>)(R5\u201d<\/sub>)-N(R6\u201d<\/sub>)]p-[Si(R7\u201d<\/sub>)(R8\u201d<\/sub>)-N(R9\u201d<\/sub>)]q-\n\t<\/p>\n\n\n\n\n
\n

\n\t\t\t\t\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(III)\u4e2d\uff0cR1\u201d<\/sub>\u3001R2\u201d<\/sub>\u3001R3\u201d<\/sub>\u3001R4\u201d<\/sub>\u3001R5\u201d<\/sub>\u3001R6\u201d<\/sub>\u3001R7\u201d<\/sub>\u3001R8\u201d<\/sub>\u548cR9\u201d<\/sub>\u5206\u522b\u81ea\u529b\u5730\u4e3a\u6c22\u539f\u5b50\u3001\u5e96\u4ee3\u6216\u8005\u975e\u5e96\u4ee3\u7684\u7532\u57fa\u3001\u82b3\u9999\u65cf\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6216\u662f(\u4e09\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u57fa\u3002\u8fd9\u65f6\uff0cR1\u201d<\/sub>\u3001R2\u201d<\/sub>\u3001R3\u201d<\/sub>\u3001R4\u201d<\/sub>\u3001R5\u201d<\/sub>\u3001R6\u201d<\/sub>\u3001R7\u201d<\/sub>\u3001R8\u201d<\/sub>\u548cR9\u201d<\/sub>\u5206\u522b\u53ef\u4ee5\u7c7b\u540c\u6216\u662f\u4e0d\u4e00\u6837\u3002\u4ee5\u4e0a\u7684\u5e96\u4ee3\u6216\u8005\u975e\u5e96\u4ee3\u7684\u7532\u57fa\u3001\u82b3\u9999\u65cf\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6216\u662f(\u4e09\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u7532\u57fa\u4e0e\u4ee5\u4e0a\u7ed3\u6784\u5f0f(I)\u7684\u754c\u5b9a\u7c7b\u540c\uff0c\u56e0\u800c\u7701\u53bb\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u6b64\u5916\uff0c\u4ee5\u4e0a\u7ed3\u6784\u5f0f(III)\u4e2d\uff0cn\u201d\u3001p\u201d\u548cq\u4e3a\u6574\u6570\u91d1\u989d\uff0cn\u201d\u3001p\u201d\u548cq\u7504\u9009\u4ee5\u5177\u5907\u7ed3\u6784\u5f0f(III)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u7ed3\u6784\u7279\u5f81\u7684\u805a\u7845\u6c2e\u70f7\u5177\u5907150\uff5e150000g\/\u514b\u5206\u5b50\u7684\u6570\u5747\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u7684\u65b9\u6cd5\u660e\u786e\u3002\u5e94\u4e88\u8868\u660e\uff0cn\u201d\u3001p\u201d\u548cq\u53ef\u4ee5\u7c7b\u540c\u6216\u662f\u4e0d\u4e00\u6837\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(III)\u7684\u805a\u7845\u6c2e\u70f7\u4e2d\uff0c\u7504\u9009R1\u201d<\/sub>\u3001R3\u201d<\/sub>\u548cR6\u201d<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u6c22\u539f\u5b50\u3001R2\u201d<\/sub>\u3001R4\u201d<\/sub>\u3001R5\u201d<\/sub>\u548cR8\u201d<\/sub>\u5404\u81ea\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7f9f\u57fa\u3001R9\u201d<\/sub>\u8868\u9732\u4e3b\u8981\u8868\u73b0(\u4e09\u4e59\u6c27\u57fa\u7532\u7845\u70f7\u57fa)\u4e19\u57fa\u3001R7\u201d<\/sub>\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7532\u57fa\u6216\u662f\u6c22\u539f\u5b50\u7684\u5316\u5b66\u7269\u8d28\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u53e6\u4e00\u65b9\u9762\uff0c\u4e0e\u8be5Si\u5f15\u7ebf\u952e\u5408\u7684\u6c22\u539f\u5b50\u4e00\u90e8\u5206\u7684\u4e00\u90e8\u5206\u88ab\u7532\u57fa\u7b49\u5e96\u4ee3\u7684\u6709\u673a\u5316\u5b66\u805a\u7845\u6c2e\u70f7\u6839\u636e\u5177\u5907\u7f9f\u57fa\u7b49\u7532\u57fa\u800c\u5177\u5907\u5982\u4e0b\u6240\u793a\u76ca\u5904\uff1a\u6539\u8fdb\u4e0e\u505a\u4e3a\u5e95\u6750\u7684\u677f\u6750\u7684\u7c98\u63a5\u6027\uff0c\u4e14\u53ef\u4ee5\u4f7f\u786c\u4e14\u8106\u7684\u7531\u805a\u7845\u6c2e\u70f7\u7ec4\u6210\u7684\u5fae\u6ee4\u5177\u5907\u5ef6\u5c55\u6027\uff0c\u5c31\u7b97\u8fdb\u4e00\u6b65\u63d0\u9ad8(\u5747\u503c)\u819c\u539a\u65f6\u4e5f\u53ef\u4ee5\u6291\u5236\u7f1d\u9699\u7684\u9020\u6210\u3002\u56e0\u800c\uff0c\u53ef\u4f9d\u636e\u4e3b\u8981\u7528\u9014\u9002\u5ea6\u5730\u6311\u9009\u8fd9\u79cd\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u548c\u6709\u673a\u5316\u5b66\u805a\u7845\u6c2e\u70f7\uff0c\u8fd8\u53ef\u4ee5\u6df7\u548c\u5e94\u7528\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u63a8\u65ad\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a\u5b58\u6709\u7f51\u76d8\u76f4\u94fe\u6784\u9020\u548c\u4ee56\u548c8\u5143\u73af\u4e3a\u6b63\u4e2d\u95f4\u7684\u73af\u6784\u9020\u7684\u6784\u9020\u3002\u5176\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u4ee5\u6570\u5747\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf(Mn)\u8ba1\u7ea6\u4e3a600\uff5e2000\u4e0a\u4e0b(\u805a\u4e59\u70ef\u8f6c\u6362)\uff0c\u6709\u6db2\u6001\u6216\u662f\u56fa\u6001\u7684\u6210\u5206\uff0c\u5176\u60c5\u51b5\u4f9d\u636e\u76f8\u5bf9\u5206\u5b50\u8d28\u91cf\u800c\u4e0d\u4e00\u6837\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u805a\u7845\u6c2e\u70f7\u4ee5\u6d88\u6eb6\u4e8e\u6709\u673a\u6eb6\u6db2\u7684\u9971\u548c\u6eb6\u6db2\u60c5\u51b5\u552e\u5356\uff0c\u53ef\u4ee5\u5c06\u5e02\u552e\u54c1\u7acb\u5373\u4f5c\u4e3a\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u3002\u505a\u4e3a\u805a\u7845\u6c2e\u70f7\u9971\u548c\u6eb6\u6db2\u7684\u5e02\u552e\u54c1\uff0c\u53ef\u5217\u4e3eAZ\u00a0Electronic\u00a0Materials\u682a\u5f0f\u5236\u7684AQUAMICA(\u5546\u6807\u6ce8\u518c)NN120-10\u3001NN120-20\u3001NAX120-20\u3001NN110\u3001NN310\u3001NN320\u3001NL110A\u3001NL120A\u3001NL120-20\u3001NL150A\u3001NP110\u3001NP140\u3001SP140\u7b49\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u505a\u4e3a\u672c\u4ea7\u54c1\u4e2d\u53ef\u91c7\u7528\u7684\u805a\u7845\u6c2e\u70f7\u7684\u5176\u4ed6\u4e8b\u4f8b\uff0c\u4e0d\u9650\u4e8e\u4e0b\u5217\u4e8b\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u4f7f\u4ee5\u4e0a\u805a\u7845\u6c2e\u70f7\u4e0e\u70f7\u6c27\u57fa\u7845\u53cd\u6620\u800c\u5f97\u7684\u70f7\u6c27\u57fa\u7845\u52a0\u6301\u805a\u7845\u6c2e\u70f7(\u65e5\u672c\u7279\u5f00\u5e735-238827\u53f7\u516c\u5e03)\u3001\u4e0e\u7f29\u6c34\u7518\u6cb9\u53cd\u6620\u800c\u5f97\u7684\u7f29\u6c34\u7518\u6cb9\u52a0\u6301\u805a\u7845\u6c2e\u70f7(\u65e5\u672c\u7279\u5f00\u5e736-122852\u53f7\u516c\u5e03)\u3001\u4e0e\u9187\u53cd\u6620\u800c\u5f97\u7684\u9187\u52a0\u6301\u805a\u7845\u6c2e\u70f7(\u65e5\u672c\u7279\u5f00\u5e736-240208\u53f7\u516c\u5e03)\u3001\u4e0e\u91d1\u5c5e\u6750\u6599\u7fa7\u9178\u76d0\u53cd\u6620\u800c\u5f97\u7684\u91d1\u5c5e\u6750\u6599\u7fa7\u9178\u76d0\u52a0\u6301\u805a\u7845\u6c2e\u70f7(\u65e5\u672c\u7279\u5f00\u5e736-299118\u53f7\u516c\u5e03)\u3001\u4e0e\u5e26\u6709\u91d1\u5c5e\u6750\u6599\u7684\u4e59\u9170\u4e19\u916e\u914d\u5408\u7269\u53cd\u6620\u800c\u5f97\u7684\u4e59\u9170\u4e19\u916e\u914d\u5408\u7269\u52a0\u6301\u805a\u7845\u6c2e\u70f7(\u65e5\u672c\u7279\u5f00\u5e736-306329\u53f7\u516c\u5e03)\u3001\u52a0\u4e0a\u91d1\u5c5e\u6750\u6599\u9897\u7c92\u800c\u5f97\u7684\u91d1\u5c5e\u6750\u6599\u9897\u7c92\u52a0\u4e0a\u805a\u7845\u6c2e\u70f7(\u65e5\u672c\u7279\u5f00\u5e737-196986\u53f7\u516c\u5e03)\u7b49\u5728\u8d85\u4f4e\u6e29\u4ea7\u751f\u74f7\u5668\u5316\u7684\u805a\u7845\u6c2e\u70f7\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5e94\u7528\u805a\u7845\u6c2e\u70f7\u65f6\uff0c\u505a\u4e3a\u6539\u6027\u6750\u6599\u89e3\u51b3\u524d\u7684\u7b2c1\u9694\u7edd\u5c42\u4e2d\u7684\u805a\u7845\u6c2e\u70f7\u7684\u5e26\u6709\u7387\uff0c\u5c06\u7b2c1\u9694\u7edd\u5c42\u7684\u603b\u91cd\u8bbe\u6210100\u51c0\u91cd\uff05\u65f6\uff0c\u80fd\u4e3a100\u51c0\u91cd\uff05\u3002\u6b64\u5916\uff0c\u7b2c1\u9694\u7edd\u5c42\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u4e4b\u5916\u7684\u5316\u5b66\u7269\u8d28\u65f6\uff0c\u5c42\u4e2d\u7684\u805a\u7845\u6c2e\u70f7\u7684\u5e26\u6709\u7387\u7504\u9009\u4e3a10\u51c0\u91cd\uff05\uff5e99\u51c0\u91cd\uff05\uff0c\u66f4\u7504\u9009\u4e3a40\u51c0\u91cd\uff05\uff5e95\u51c0\u91cd\uff05\uff0c\u683c\u5916\u7504\u9009\u4e3a70\u51c0\u91cd\uff05\uff5e95\u51c0\u91cd\uff05\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u5982\u4e0a\u6240\u8ff0\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u884c\u9a76\u65bd\u80f6\u6cd5\u7684\u4ea7\u751f\u65b9\u5f0f\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u9009\u7528\u516c\u77e5\u7684\u65b9\u5f0f\uff0c\u4f46\u7504\u9009\u5982\u4e0b\u6240\u793a\u65b9\u5f0f\uff0c\u5373\u884c\u9a76\u516c\u77e5\u7684\u6e7f\u8bd5\u65bd\u80f6\u65b9\u5f0f\u65bd\u80f6\u5728\u6709\u673a\u6eb6\u6db2\u4e2d\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u548c\u4f9d\u636e\u5fc5\u9700\u7684\u91d1\u5c5e\u50ac\u5316\u5242\u7684\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\uff0c\u4f7f\u8be5\u6709\u673a\u6eb6\u5242\u6325\u53d1\u53bb\u9664\uff0c\u7136\u540e\uff0c\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t(\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2)\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u505a\u4e3a\u7528\u4ee5\u5236\u53d6\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u6709\u673a\u6eb6\u5242\uff0c\u53ea\u9700\u53ef\u4ee5\u6d88\u6eb6\u7845\u5316\u5b66\u7269\u8d28\u5c31\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u6ca1\u6709\u975e\u5e38\u5bb9\u6613\u4e0e\u7845\u5316\u5b66\u7269\u8d28\u53cd\u6620\u7684\u6c34\u548c\u53cd\u6620\u6027\u5b98\u80fd\u56e2(\u6bd4\u5982\uff0c\u7532\u57fa\u6216\u662f\u7f9f\u57fa\u7b49)\u3001\u5bf9\u7845\u5316\u5b66\u7269\u8d28\u4e3b\u8981\u8868\u73b0\u53ef\u5851\u6027\u7684\u6709\u673a\u6eb6\u6db2\uff0c\u66f4\u7504\u9009\u975e\u53cd\u8d28\u5b50\u6027\u7684\u6709\u673a\u6eb6\u6db2\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u505a\u4e3a\u6709\u673a\u6eb6\u5242\uff0c\u53ef\u5217\u4e3e\u975e\u53cd\u8d28\u5b50\u6027\u6709\u673a\u6eb6\u5242\uff1b\u6bd4\u5982\uff0c\u620a\u70f7\u3001\u5df1\u70f7\u3001\u73af\u5df1\u70f7\u3001\u4e8c\u7532\u82ef\u3001\u4e8c\u7532\u82ef\u3001Solvesso\u3001\u841c\u70ef\u7b49\u8102\u73af\u65cf\u70c3\u3001\u8102\u73af\u5f0f\u70c3\u3001\u82b3\u9999\u65cf\u70c3\u7b49\u70c3\u6709\u673a\u6eb6\u5242\uff1b\u4e8c\u6c2f\u7532\u70f7\u3001\u4e09\u6c2f\u4e59\u70f7\u7b49\u5364\u4ee3\u7269\u6709\u673a\u6eb6\u5242\uff1b\u4e59\u9178\u4e01\u916f\u3001\u7532\u57fa\u53d4\u4e01\u57fa\u919a\u7b49\u8102\u7c7b\uff1b\u7532\u82ef\u3001\u7532\u57fa\u4e59\u57fa\u916e\u7b49\u5429\u567b\u55ea\uff1b\u4e8c\u4e01\u919a\u3001\u4e8c\u70f7\u3001\u56db\u6c22\u544b\u5583\u7b49\u8102\u73af\u65cf\u919a\u3001\u8102\u73af\u5f0f\u919a\u7b49\u919a\u7c7b\uff1a\u6bd4\u5982\uff0c\u56db\u6c22\u544b\u5583\u3001\u4e8c\u4e01\u919a\u3001\u5355-\u548c\u805a\u70f7\u6491\u4e8c\u9187\u4e8c\u7532\u57fa\u919a(\u4e8c\u7518\u9187\u4e8c\u7532\u919a\u7c7b)\u7b49\u3002\u4ee5\u4e0a\u6709\u673a\u6eb6\u5242\u4f9d\u636e\u7845\u5316\u5b66\u7269\u8d28\u7684\u6d88\u6eb6\u5ea6\u3001\u6709\u673a\u6eb6\u5242\u7684\u6325\u53d1\u901f\u7387\u7b49\u76ee\u5730\u6311\u9009\uff0c\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u4ee52\u79cd\u4ee5\u4e0a\u7684\u6df7\u5408\u7269\u8d28\u7684\u5f62\u72b6\u5e94\u7528\u3002\n\t\t\t\t\t<\/p>\n

\n\t\t\t\t\t\t\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4e2d\u7684\u7845\u5316\u5b66\u7269\u8d28\u7684\u6d53\u5ea6\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u4f9d\u636e\u5c42\u7684\u819c\u539a\u3001\u65bd\u80f6\u6db2\u7684\u53ef\u7528\u671f\u800c\u4e0d\u4e00\u6837\uff0c\u7504\u9009\u4e3a1\uff5e80\u51c0\u91cd\uff05\uff0c\u66f4\u7504\u9009\u4e3a5\uff5e50\u51c0\u91cd\uff05\uff0c\u683c\u5916\u7504\u9009\u4e3a10\uff5e40\u51c0\u91cd\uff05\u3002\n\t\t\t\t\t<\/p>\n

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\n\t\t\t\t\t\t\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4f9d\u636e\u5fc5\u9700\u53ef\u4ee5\u5e94\u7528\u4ee5\u4e0b\u4f8b\u4e3e\u7684\u6dfb\u52a0\u7269\u3002\u6bd4\u5982\uff0c\u7ea4\u7ef4\u7d20\u919a\u7c7b\u3001\u7ea4\u7ef4\u7d20\u916f\u7c7b\uff1a\u6bd4\u5982\u4e59\u57fa\u7ea4\u7ef4\u7d20\u3001\u6c1f\u82ef\u7532\u57fa\u7ea4\u7ef4\u7d20\u3001\u7532\u9178\u7532\u57fa\u7ea4\u7ef4\u7d20\u3001\u7532\u9178\u4e01\u9178\u7532\u57fa\u7ea4\u7ef4\u7d20\u7b49\uff1b\u5f53\u7136\u73af\u6c27\u6811\u8102\uff1a\u6bd4\u5982\u5851\u80f6\u3001\u677e\u9999\u6811\u8102\u7b49\uff1b\u9632\u8150\u8680\u6d82\u6599\uff1a\u6bd4\u5982\u6c47\u805a\u73af\u6c27\u6811\u8102\u7b49\uff1b\u7f29\u5408\u53cd\u5e94\u73af\u6c27\u6811\u8102\uff1a\u6bd4\u5982\u6c28\u57fa\u5851\u6599\u3001\u683c\u5916\u662f\u5c3f\u7d20\u6eb6\u6db2\u73af\u6c27\u6811\u8102\u3001\u4e09\u805a\u6c30\u80fa\u7532\u919b\u6811\u8102\u3001\u9187\u9178\u6811\u8102\u3001\u4e19\u70ef\u9178\u4e73\u6db2\u3001\u805a\u8102\u6216\u6539\u6027\u6750\u6599\u805a\u8102\u3001\u73af\u6c27\u5316\u7269\u3001\u805a\u4e19\u70ef\u9178\u916f\u6216\u5c01\u95ed\u6027\u805a\u4e19\u70ef\u9178\u916f\u3001\u6216\u662f\u7845\u6c27\u70f7\u7b49\u3002\n\t\t\t\t\t<\/p>\n<\/td>\n<\/tr>\n

\n
    \n\t\t\t\t\t\t<\/ul>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \n\t\t\u6b64\u5916\uff0c\u5982\u65e5\u672c\u7279\u5f002005-231039\u53f7\u516c\u5e03\u6240\u8bb0\u8ff0\uff0c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u53ef\u9009\u7528\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u3002\u884c\u9a76\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u65f6\u91c7\u7528\u7684\u65bd\u80f6\u6db2\u7504\u9009\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u53ca\u5176\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\u548c\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u805a\u5408\u7269\u4e2d\u7684\u6700\u5c111\u79cd\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u7504\u9009\u65bd\u80f6\u6db2\u5e26\u6709\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u91d1\u5c5e\u50ac\u5316\u5242\u3001\u9178\u3001\u6c34\u548c\u6709\u673a\u6eb6\u6db2\u3002\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u4e2d\uff0c\u6839\u636e\u5e94\u7528\u5982\u8bb8\u7684\u65bd\u80f6\u6db2\u5f00\u5c55\u7f29\u805a\u800c\u83b7\u5f97\u7b2c1\u9694\u7edd\u5c42\u3002\u505a\u4e3a\u7845\u5316\u5b66\u7269\u8d28\uff0c\u7504\u9009\u5e94\u7528\u7ed3\u6784\u5f0fRA<\/sup>O<\/sub>Si(ORB<\/sup>)p<\/sub>\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u9187\u76d0\u3002\u8fd9\u513f\uff0cRA<\/sup>\u548cRB<\/sup>\u5206\u522b\u81ea\u529b\u5730\u8868\u9732\u4e3b\u8981\u8868\u73b0\u78b3\u539f\u5b50\u65701\uff5e20\u7684\u7532\u57fa\uff0cO\u8868\u9732\u4e3b\u8981\u8868\u73b00\u4ee5\u4e0a\u7684\u6574\u6570\u91d1\u989d\uff0cp\u8868\u9732\u4e3b\u8981\u8868\u73b01\u4ee5\u4e0a\u7684\u6574\u6570\u91d1\u989d\u3002\u505a\u4e3a\u4ee5\u4e0a\u7684\u70f7\u6c27\u57fa\u6c2f\u7845\u70f7\u7684\u8be6\u5c3d\u4f8b\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528\u56db\u53d4\u4e01\u57fa\u6c2f\u7845\u70f7(Si(OCH3<\/sub>)4<\/sub>)\u3001\u56db\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7(Si(OC2<\/sub>H5<\/sub>)4<\/sub>)\u3001\u56db\u4e19\u6c27\u57fa\u6c2f\u7845\u70f7(Si(OC3<\/sub>H7<\/sub>)4<\/sub>)\u3001\u56db\u4e01\u6c27\u57fa\u6c2f\u7845\u70f7(Si(OC4<\/sub>H9<\/sub>)4<\/sub>)\u7b49\u3002\u65bd\u80f6\u6db2\u4e2d\uff0c\u7ec4\u6210\u5e94\u7528\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\u548c\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u805a\u5408\u7269\u65f6\uff0c\u505a\u4e3a\u5206\u522b\u7684\u76f8\u4e92\u914d\u5408\u5360\u6bd4\uff0c\u4ee5\u51c0\u91cd\u6bd4\u8ba1\uff0c\u7504\u9009\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102:\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u805a\u5408\u7269\uff1d10:0.05\uff5e10:6\u3002\u6b64\u5916\uff0c\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\u548c\/\u6216\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u805a\u5408\u7269\u7684\u65bd\u80f6\u6db2\u4e2d\u7684\u6210\u5206\u76f8\u6bd4\u4e8e\u4ee5\u4e0a\u7684\u7845\u5316\u5b66\u7269\u8d28\u7684\u7d2f\u8ba1\u91cf100\u51c0\u91cd\u4efd\u7504\u9009\u4e3a5\uff5e500\u51c0\u91cd\u4efd\u7684\u8303\u7574\uff0c\u66f4\u7504\u9009\u4e3a20\uff5e200\u51c0\u91cd\u4efd\u3002\u505a\u4e3a\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\uff0c\u4e00\u6837\u5e73\u65f6\u53ef\u5e94\u7528\u5c06\u805a\u4e59\u9178\u4e59\u70ef\u916f\u7682\u811a\u800c\u5f97\u7684\u6210\u5206\u3002\u505a\u4e3a\u4ee5\u4e0a\u7684\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\uff0c\u7532\u9178\u57fa\u6b8b\u4f59\u6570\u5341\uff05\u7684\u4e00\u90e8\u5206\u7682\u811a\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\u3001\u7532\u9178\u57fa\u4e0d\u6b8b\u4f59\u7684\u5f7b\u5e95\u7682\u811a\u4e19\u70ef\u9178\u4e73\u6db2\u3001\u6216\u662fOH\u57fa\u88ab\u6539\u6027\u6750\u6599\u7684\u6539\u6027\u6750\u6599\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\u5747\u53ef\u3002\u505a\u4e3a\u4e19\u70ef\u9178\u4e73\u6db2\u7cfb\u73af\u6c27\u6811\u8102\u7684\u8be6\u5c3d\u4f8b\uff0c\u53ef\u5e94\u7528KURARAY\u682a\u5f0f\u5236\u7684KURARAY\u00a0POVAL(\u5546\u6807\u6ce8\u518c)\u3001\u65e5\u672c\u751f\u6210\u5316\u5de5\u682a\u5f0f\u5236\u7684GOHSENOL(\u5546\u6807\u6ce8\u518c)\u7b49\u3002\u6b64\u5916\uff0c\u672c\u4ea7\u54c1\u4e2d\uff0c\u505a\u4e3a\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u805a\u5408\u7269\uff0c\u53ef\u5e94\u7528\u4e01\u4e8c\u70ef\u548c\u4e59\u9178\u4e59\u70ef\u916f\u7684\u805a\u5408\u7269\u7684\u7682\u811a\u7269\uff0c\u5c06\u8981\u4e01\u4e8c\u70ef-\u4e59\u9178\u4e59\u70ef\u916f\u65e0\u89c4\u77e9\u805a\u5408\u7269\u7682\u811a\u800c\u5f97\u7684\u6210\u5206\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u4ece\u7532\u9178\u57fa\u6b8b\u4f59\u6570\u5341\u514b\u5206\u5b50\uff05\u7684\u4e00\u90e8\u5206\u7682\u811a\u7269\u5230\u7532\u9178\u57fa\u4ec5\u6b8b\u4f59\u6570\u514b\u5206\u5b50\uff05\u6216\u662f\u7532\u9178\u57fa\u4e0d\u6b8b\u4f59\u7684\u5f7b\u5e95\u7682\u811a\u7269\u5747\u5305\u542b\uff0c\u6c92\u6709\u683c\u5916\u9650\u5b9a\uff0c\u4f46\u4ece\u6c7d\u4f53\u9ad8\u963b\u9694\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u7684\u7682\u811a\u5ea6\u7504\u9009\u4e3a80\u514b\u5206\u5b50\uff05\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a90\u514b\u5206\u5b50\uff05\u4ee5\u4e0a\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a95\u514b\u5206\u5b50\uff05\u4ee5\u4e0a\u3002\u6b64\u5916\uff0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    \n\t\t\u505a\u4e3a\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u7684\u65bd\u80f6\u6db2\u6240\u5e94\u7528\u7684\u6709\u673a\u6eb6\u6db2\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528\u5de5\u4e1a\u7532\u9187\u3001\u4e59\u9178\u4e59\u916f\u3001\u6b63\u4e19\u9187\u3001\u4e19\u916e\u3001\u6b63\u4e01\u9187\u7b49\u3002\u6b64\u5916\uff0c\u53ef\u6eb6\u89e3\u6709\u673a\u6eb6\u5242\u4e2d\u7684\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u805a\u5408\u7269\u6bd4\u5982\u53ef\u5e94\u7528\u4ee5SOARNOL(\u5546\u6807\u6ce8\u518c\uff0c\u65e5\u672c\u751f\u6210\u5316\u5de5\u682a\u5f0f\u5236)\u7684\u5546\u54c1\u540d\u5e02\u9762\u4e0a\u7684\u6210\u5206\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u8fd8\u80fd\u591f\u5411\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u7684\u65bd\u80f6\u6db2\u4e2d\u52a0\u4e0a\u6bd4\u5982\u5076\u8054\u5242\u7b49\u3002\n\t<\/p>\n

    \n\t\t(\u65bd\u80f6\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u65b9\u5f0f)\n\t<\/p>\n

    \n\t\t\u505a\u4e3a\u65bd\u80f6\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u65b9\u5f0f\uff0c\u53ef\u9009\u7528\u4e00\u5411\u81f3\u4eca\u516c\u77e5\u7684\u9002\u5ea6\u7684\u6e7f\u8bd5\u65bd\u80f6\u65b9\u5f0f\u3002\u505a\u4e3a\u8be6\u5c3d\u4f8b\uff0c\u53ef\u5217\u4e3e\u65cb\u6d82\u6cd5\u3001\u8f8a\u6d82\u6cd5\u3001\u6d41\u6d82\u6cd5\u3001\u55b7\u58a8\u6253\u5370\u673a\u6cd5\u3001\u55b7\u6f06\u6cd5\u3001\u5305\u88c5\u5370\u5237\u6cd5\u3001\u6d78\u6d82\u6cd5\u3001\u6d41\u5ef6\u6d82\u819c\u6cd5\u3001\u68d2\u6d82\u6cd5\u3001\u80f6\u7248\u5370\u5237\u6cd5\u7b49\u3002\n\t<\/p>\n

    \n\t\t\u65bd\u80f6\u8584\u539a\u53ef\u4f9d\u636e\u76ee\u5730\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u6bd4\u5982\uff0c\u7b2c1\u9694\u7edd\u5c42\u6bcf1\u5c42\u7684\u65bd\u80f6\u8584\u539a\uff0c\u7504\u9009\u5e72\u8e81\u540e\u7684\u8584\u539a\u4e3a10nm\uff5e10\u03bcm\u4e0a\u4e0b\uff0c\u66f4\u7504\u9009\u4e3a15nm\uff5e1\u03bcm\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a20\uff5e500nm\u3002\u5018\u82e5\u819c\u539a\u4e3a10nm\u4ee5\u4e0a\u5219\u53ef\u4ee5\u83b7\u5f97\u5145\u8db3\u7684\u9ad8\u963b\u9694\uff0c\u5018\u82e5\u4e3a10\u03bcm\u4e0b\u5217\uff0c\u5219\u5c42\u4ea7\u751f\u65f6\u53ef\u4ee5\u83b7\u5f97\u7a33\u5b9a\u7684\u65bd\u80f6\u6027\uff0c\u800c\u4e14\u53ef\u4ee5\u8fdb\u884c\u9ad8\u7684\u5149\u6e90\u7535\u5b50\u6563\u5c04\u6027\u3002\n\t<\/p>\n

    \n\t\t\u5c06\u65bd\u80f6\u6db2\u65bd\u80f6\u540e\uff0c\u7504\u9009\u4f7f\u6d82\u5c42\u5e72\u8e81\u3002\u6839\u636e\u5c06\u6d82\u5c42\u5e72\u8e81\uff0c\u53ef\u4ee5\u53bb\u9664\u6d82\u5c42\u4e2d\u5305\u542b\u7684\u6709\u673a\u6eb6\u6db2\u3002\u8fd9\u65f6\uff0c\u53ef\u4ee5\u5c06\u6d82\u5c42\u4e2d\u5305\u542b\u7684\u6709\u673a\u6eb6\u6db2\u5982\u6570\u5e72\u8e81\uff0c\u8fd8\u53ef\u4ee5\u6b8b\u4f59\u4e00\u90e8\u5206\u3002\u5c31\u7b97\u6b8b\u4f59\u4e00\u90e8\u5206\u7684\u6709\u673a\u6eb6\u6db2\u65f6\uff0c\u4e5f\u53ef\u83b7\u5f97\u9002\u5408\u7684\u7b2c1\u9694\u7edd\u5c42\u3002\u5e94\u4e88\u8868\u660e\uff0c\u6b8b\u4f59\u7684\u6709\u673a\u6eb6\u5242\u53ef\u5728\u4ee5\u540e\u88ab\u53bb\u9664\u3002\n\t<\/p>\n

    \n\t\t\u6d82\u5c42\u7684\u5e72\u8e81\u6eab\u5ea6\u4f9d\u636e\u91c7\u7528\u7684\u677f\u6750\u800c\u4e0d\u4e00\u6837\uff0c\u7504\u9009\u4e3a50\uff5e200\u2103\u3002\u6bd4\u5982\uff0c\u5e94\u7528\u73bb\u7483\u5316\u8f6c\u53d8\u6eab\u5ea6(Tg)\u4e3a70\u2103\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f\u677f\u6750\u505a\u4e3a\u6750\u6599\u65f6\uff0c\u7504\u9009\u5e72\u8e81\u6eab\u5ea6\u8003\u8651\u5230\u70ed\u9020\u6210\u7684\u677f\u6750\u7684\u5f62\u53d8\u7b49\u800c\u8bbe\u7f6e\u5728150\u2103\u4e0b\u5217\u3002\u4ee5\u4e0a\u6eab\u5ea6\u53ef\u6839\u636e\u5e94\u7528\u53d1\u70ed\u677f\u3001\u70d8\u5e72\u7bb1\u3001\u7089\u7b49\u8bbe\u7f6e\u3002\u5e72\u8e81\u6642\u95f4\u7504\u9009\u8bbe\u7f6e\u6210\u77ed\u671f\u5185\uff0c\u6bd4\u5982\uff0c\u5e72\u8e81\u6eab\u5ea6\u4e3a150\u2103\u65f6\u7504\u9009\u8bbe\u7f6e\u572830\u5206\u9418\u4e4b\u5185\u3002\u6b64\u5916\uff0c\u5e72\u8e81\u6c1b\u56f4\u53ef\u4ee5\u662f\u7a7a\u6c14\u6c1b\u56f4\u4e0b\u3001\u6c2e\u6c1b\u56f4\u4e0b\u3001\u6c29\u6c1b\u56f4\u4e0b\u3001\u771f\u7a7a\u6cf5\u6c1b\u56f4\u4e0b\u3001\u64cd\u7eb5\u5438\u6c27\u6d53\u5ea6\u7684\u7f13\u89e3\u538b\u529b\u6c1b\u56f4\u4f4e\u52a3\u968f\u610f\u7684\u6807\u51c6\u3002\n\t<\/p>\n

    \n\t\t\u9488\u5bf9\u65bd\u80f6\u7b2c1\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u800c\u5f97\u7684\u6d82\u5c42\uff0c\u5728\u6539\u6027\u6750\u6599\u89e3\u51b3\u524d\u6216\u662f\u6539\u6027\u6750\u6599\u89e3\u51b3\u4e2d\u53ef\u5305\u542b\u53bb\u9664\u6c34\u4efd\u7684\u5de5\u827a\u6d41\u7a0b\u3002\u505a\u4e3a\u53bb\u9664\u6c34\u4efd\u7684\u65b9\u5f0f\uff0c\u7504\u9009\u4fdd\u6301\u4f4e\u73af\u5883\u6e7f\u5ea6\u81ea\u7136\u73af\u5883\u800c\u53bb\u6e7f\u7684\u65b9\u6cd5\u3002\u4f4e\u73af\u5883\u6e7f\u5ea6\u81ea\u7136\u73af\u5883\u7684\u73af\u5883\u6e7f\u5ea6\u4f9d\u636e\u6eab\u5ea6\u800c\u53d8\u5316\uff0c\u56e0\u800c\u6eab\u5ea6\u548c\u76f8\u5bf9\u6e7f\u5ea6\u7684\u5173\u8054\u6839\u636e\u542b\u6e7f\u91cf\u7684\u8981\u6c42\u800c\u793a\u51fa\u7504\u9009\u7684\u65b9\u6cd5\u3002\u7504\u9009\u7684\u542b\u6e7f\u91cf\u4e3a4\u2103\u4e0b\u5217(\u6eab\u5ea625\u2103\/\u73af\u5883\u6e7f\u5ea625\uff05)\uff0c\u66f4\u7504\u9009\u7684\u542b\u6e7f\u91cf\u4e3a-5\u2103(\u6eab\u5ea625\u2103\/\u73af\u5883\u6e7f\u5ea610\uff05)\u4e0b\u5217\uff0c\u4fdd\u6301\u7684\u6642\u95f4\u7504\u9009\u4f9d\u636e\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u539a\u4e3a1.0\u03bcm\u4ee5\u5185\u7684\u524d\u63d0\u4e0b\uff0c\u7504\u9009\u542b\u6e7f\u91cf\u4e3a-5\u2103\u4e0b\u5217\uff0c\u4fdd\u6301\u7684\u65f6\u957f\u4e3a1\u5206\u9418\u4ee5\u4e0a\u3002\u5e94\u4e88\u8868\u660e\uff0c\u542b\u6e7f\u91cf\u7684\u6700\u4f4e\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u901a\u5e38\u4e3a-50\u2103\u4ee5\u4e0a\uff0c\u7504\u9009\u4e3a-40\u2103\u4ee5\u4e0a\u3002\u4ece\u63a8\u52a8\u5411\u6c2f\u7845\u70f7\u9187\u8f6c\u6362\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u8131\u6c34\u53cd\u5e94\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u5728\u6539\u6027\u6750\u6599\u89e3\u51b3\u524d\u6216\u662f\u6539\u6027\u6750\u6599\u89e3\u51b3\u4e2d\u8fdb\u884c\u53bb\u9664\u6c34\u4efd\u7684\u5de5\u827a\u6d41\u7a0b\u3002\n\t<\/p>\n

    \n\t\t\uff1c\u884c\u9a76\u65bd\u80f6\u6cd5\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u6539\u6027\u6750\u6599\u89e3\u51b3\uff1e\n\t<\/p>\n

    \n\t\t\u672c\u4ea7\u54c1\u4e2d\u7684\u884c\u9a76\u65bd\u80f6\u6cd5\u4ea7\u751f\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u6539\u6027\u6750\u6599\u89e3\u51b3\u5c31\u662f\u6307\u7845\u5316\u5b66\u7269\u8d28\u5411\u4e8c\u6c27\u5316\u7845\u6216\u662f\u5411\u6c2e\u6c27\u5316\u7845\u7b49\u7684\u8f6c\u6362\u53cd\u6620\uff0c\u8be6\u5c3d\u6765\u8bb2\u5c31\u662f\u6307\u4ea7\u751f\u5bf9\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u56e2\u961f\u5c55\u73b0\u6c7d\u4f53\u9ad8\u963b\u9694\u6709\u5e6b\u52a9\u7684\u6c34\u5e73\u7684\u6709\u673a\u7269\u5851\u6599\u8584\u819c\u7684\u89e3\u51b3\u3002\n\t<\/p>\n

    \n\t\t\u7845\u5316\u5b66\u7269\u8d28\u5411\u4e8c\u6c27\u5316\u7845\u6216\u662f\u5411\u6c2e\u6c27\u5316\u7845\u7b49\u7684\u8f6c\u6362\u53cd\u6620\u53ef\u9002\u5ea6\u5730\u6311\u9009\u5e94\u7528\u516c\u77e5\u7684\u65b9\u5f0f\u3002\u505a\u4e3a\u6539\u6027\u6750\u6599\u89e3\u51b3\uff0c\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u7b49\u79bb\u5b50\u89e3\u51b3\u3001\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\u3001\u52a0\u6e29\u89e3\u51b3\u3002\u53ef\u662f\uff0c\u884c\u9a76\u52a0\u6e29\u89e3\u51b3\u5f00\u5c55\u6539\u6027\u6750\u6599\u65f6\uff0c\u7531\u4e8e\u6839\u636e\u7845\u5316\u5b66\u7269\u8d28\u7684\u5e96\u4ee3\u53cd\u6620\u4ea7\u751f\u4e8c\u6c27\u5316\u7845\u819c\u6216\u662f\u6c2e\u6c27\u5316\u7845\u5c42\u5fc5\u9700450\u2103\u4ee5\u4e0a\u7684\u9ad8\u6eab\uff0c\u56e0\u6b64\u5851\u80f6\u7b49\u6320\u6027\u57fa\u6750\u65e0\u6cd5\u878d\u5165\u3002\u56e0\u800c\uff0c\u7504\u9009\u70ed\u5904\u7406\u5de5\u827a\u4e0e\u5176\u4f59\u7684\u6539\u6027\u6750\u6599\u89e3\u51b3\u7ec4\u6210\u5f00\u5c55\u3002\n\t<\/p>\n

    \n\t\t\u56e0\u800c\uff0c\u505a\u4e3a\u6539\u6027\u6750\u6599\u89e3\u51b3\uff0c\u4ece\u878d\u5165\u5851\u80f6\u57fa\u6750\u5982\u8bb8\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u884c\u9a76\u5728\u66f4\u4f4e\u6eab\u5ea6\u4e0b\u53ef\u5f00\u5c55\u8f6c\u6362\u53cd\u6620\u7684\u7b49\u79bb\u5b50\u89e3\u51b3\u3001\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\u7684\u8f6c\u6362\u53cd\u6620\u3002\n\t<\/p>\n

    \n\t\t(\u7b49\u79bb\u5b50\u89e3\u51b3)\n\t<\/p>\n

    \n\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u53ef\u505a\u4e3a\u6539\u6027\u6750\u6599\u89e3\u51b3\u5e94\u7528\u7684\u7b49\u79bb\u5b50\u89e3\u51b3\u53ef\u9009\u7528\u516c\u77e5\u7684\u65b9\u5f0f\uff0c\u53ef\u4f18\u4e3e\u8350\u51fa\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50\u89e3\u51b3\u7b49\u3002\u5728\u5927\u6c14\u538b\u529b\u5468\u8fb9\u5f00\u5c55\u7b49\u79bb\u5b50CVD\u89e3\u51b3\u7684\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50CVD\u6cd5\u4e0e\u771f\u7a7a\u6cf5\u4e0b\u7684\u7b49\u79bb\u5b50CVD\u6cd5\u5bf9\u6bd4\uff0c\u591a\u4f59\u64cd\u7eb5\u5728\u7f13\u89e3\u538b\u529b\u4e0b\uff0c\u4e0d\u4f46\u751f\u4ea7\u6548\u7387\u9ad8\uff0c\u5e76\u4e14\u7b49\u79bb\u5b50\u76f8\u5bf9\u5bc6\u5ea6\u4e3a\u5bc6\u5ea6\u9ad8\u7684\uff0c\u56e0\u800c\u6d82\u819c\u901f\u5ea6\u66f4\u5feb\uff0c\u800c\u4e14\u4e0e\u901a\u5e38\u7684CVD\u6cd5\u7684\u6807\u51c6\u76f8\u8f83\u4e3a\uff0c\u5728\u5927\u6c14\u538b\u529b\u4e0b\u5982\u8bb8\u7684\u9ad8\u5de5\u4f5c\u538b\u529b\u60c5\u51b5\u4e0b\uff0c\u6c7d\u4f53\u7684\u5747\u503c\u968f\u610f\u5de5\u827a\u6d41\u7a0b\u5c24\u5176\u5f88\u662f\u77ed\uff0c\u56e0\u800c\u53ef\u83b7\u5f97\u6781\u5176\u5300\u8d28\u7684\u819c\u3002\n\t<\/p>\n

    \n\t\t\u5f00\u5c55\u5927\u6c14\u538b\u529b\u7b49\u79bb\u5b50\u89e3\u51b3\u65f6\uff0c\u505a\u4e3a\u5145\u653e\u7535\u6c7d\u4f53\uff0c\u5e94\u7528N2\u6216\u662f\u5e26\u6709\u957f\u5468\u671f\u578b\u5316\u5b66\u5143\u7d20\u8868\u7684\u7b2c18\u65cf\u5206\u5b50\u7684\u6c7d\u4f53\uff0c\u8be6\u5c3d\u6765\u8bb2\uff0c\u5e94\u7528\u6c26\u3001\u6c16\u3001\u6c29\u3001\u6c2a\u3001\u6c19\u3001\u6c21\u7b49\u3002\u5728\u5176\u4e2d\u7504\u9009\u5e94\u7528\u6c2e\u3001\u6c26\u3001\u6c29\uff0c\u683c\u5916\u662f\u6c2e\u4f4e\u6210\u672c\uff0c\u56e0\u6b64\u7504\u9009\u3002\n\t<\/p>\n

    \n\t\t(\u52a0\u6e29\u89e3\u51b3)\n\t<\/p>\n

    \n\t\t\u6839\u636e\u4e0e\u5176\u4f59\u7684\u6539\u6027\u6750\u6599\u89e3\u51b3\u3001\u7504\u9009\u540e\u8ff0\u7684\u51c6\u5206\u5b50\u76f4\u5c04\u89e3\u51b3\u7b49\u642d\u914d\u800c\u5bf9\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u7684\u6d82\u5c42\u5f00\u5c55\u52a0\u6e29\u89e3\u51b3\uff0c\u53ef\u4ee5\u6709\u6548\u5730\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u3002\n\t<\/p>\n

    \n\t\t\u6b64\u5916\uff0c\u5e94\u7528\u80f6\u4f53\u6eb6\u6db2-\u7591\u80f6\u6cd5\u5f62\u6210\u5c42\u65f6\uff0c\u7504\u9009\u9009\u7528\u52a0\u6e29\u89e3\u51b3\u3002\u505a\u4e3a\u52a0\u6e29\u6807\u51c6\uff0c\u7504\u9009\u4e3a50\uff5e300\u2103\uff0c\u66f4\u7504\u9009\u4e3a70\uff5e200\u2103\u7684\u6eab\u5ea6\uff0c\u7504\u9009\u4e3a0.005\uff5e60\u5206\u9418\uff0c\u66f4\u7504\u9009\u4e3a0.01\uff5e10\u5206\u9418\uff0c\u6839\u636e\u5f00\u5c55\u52a0\u6e29\u00b7\u5e72\u8e81\uff0c\u5f00\u5c55\u7f29\u5408\u53cd\u5e94\u800c\u53ef\u4ee5\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

    \n\t\t\u505a\u4e3a\u52a0\u6e29\u89e3\u51b3\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u4f7f\u677f\u6750\u4e0e\u52a0\u6e29\u5757\u7b49\u53d1\u70ed\u5668\u89e6\u78b0\uff0c\u6839\u636e\u5bfc\u70ed\u800c\u52a0\u6e29\u6d82\u5c42\u7684\u65b9\u5f0f\uff1b\u884c\u9a76\u7535\u963b\u4e1d\u7b49\u5916\u754c\u7535\u52a0\u70ed\u5668\u52a0\u6e29\u6c1b\u56f4\u7684\u65b9\u5f0f\uff1bIR\u7535\u52a0\u70ed\u5668\u5982\u8bb8\u7684\u884c\u9a76\u7ea2\u5916\u7ebf\u5730\u533a\u7684\u5149\u7684\u65b9\u5f0f\u7b49\uff0c\u6c92\u6709\u683c\u5916\u9650\u5b9a\u3002\u6b64\u5916\uff0c\u53ef\u9002\u5ea6\u5730\u9009\u53ef\u4ee5\u4fdd\u6301\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u7684\u6d82\u5c42\u7684\u5149\u6ed1\u6027\u7684\u65b9\u6cd5\u3002\n\t<\/p>\n

    \n\t\t\u505a\u4e3a\u52a0\u6e29\u89e3\u51b3\u65f6\u7684\u6d82\u5c42\u7684\u6eab\u5ea6\uff0c\u7504\u9009\u9002\u5ea6\u5730\u8c03\u8282\u572850\uff5e250\u2103\u7684\u8303\u7574\uff0c\u66f4\u7504\u9009\u4e3a50\uff5e120\u2103\u7684\u8303\u7574\u3002\n\t<\/p>\n

    \n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u52a0\u6e29\u6642\u95f4\uff0c\u7504\u90091\u79d2\uff5e10\u949f\u5934\u7684\u8303\u7574\uff0c\u66f4\u7504\u900910\u79d2\uff5e1\u949f\u5934\u7684\u8303\u7574\u3002\n\t<\/p>\n

    \n\t\t(\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3)\n\t<\/p>\n

    \n\t\t\u505a\u4e3a\u6539\u6027\u6750\u6599\u89e3\u51b3\u7684\u65b9\u5f0f\u4e4b\u4e00\uff0c\u7504\u9009\u884c\u9a76\u7d2b\u5916\u7ebf\u7167\u5c04\u7684\u89e3\u51b3\u3002\u884c\u9a76\u7d2b\u5916\u5149(\u4e0e\u7d2b\u5916\u7ebf\u542b\u610f\u7c7b\u540c)\u8f6c\u5316\u6210\u7684\u6d3b\u6027\u6c27\u3001\u6d3b\u529b\u6c27\u5206\u5b50\u5177\u5907\u9ad8\u7684\u7a7a\u6c14\u6c27\u5316\u5de5\u4f5c\u80fd\u529b\uff0c\u53ef\u4ee5\u4ee5\u8d85\u4f4e\u6e29\u4ea7\u751f\u5177\u5907\u9ad8\u9ad8\u5bc6\u5ea6\u6027\u548c\u7edd\u7f18\u6027\u80fd\u7684\u4e8c\u6c27\u5316\u7845\u819c\u6216\u662f\u6c2e\u6c27\u5316\u7845\u819c\u3002\n\t<\/p>\n

    \n\t\t\u884c\u9a76\u8be5\u7d2b\u5916\u7ebf\u7167\u5c04\uff0c\u677f\u6750\u88ab\u52a0\u6e29\uff0c\u6709\u5229\u4e8e\u74f7\u5668\u5316(\u4e8c\u6c27\u5316\u7845\u8f6c\u6362)\u7684O2<\/sub>\u548cH2<\/sub>O\u3001\u7d2b\u5916\u5149\u6c72\u53d6\u5242\u3001\u805a\u7845\u6c2e\u70f7\u672c\u8eab\u88ab\u6291\u5236\u800c\u6d3b\u6027\uff0c\u56e0\u800c\u6fc0\u8d77\u805a\u7845\u6c2e\u70f7\uff0c\u63a8\u52a8\u805a\u7845\u6c2e\u70f7\u7684\u74f7\u5668\u5316\uff0c\u6b64\u5916\u83b7\u5f97\u7684\u7b2c1\u9694\u7edd\u5c42\u66f4\u4e3a\u9ad8\u5bc6\u5ea6\u3002\u7d2b\u5916\u7ebf\u7167\u5c04\u53ea\u9700\u5728\u6d82\u5c42\u4ea7\u751f\u540e\uff0c\u5219\u5728\u4efb\u4f55\u65f6\u5019\u6267\u884c\u90fd\u6709\u6548\u3002\n\t<\/p>\n

    \n\t\t\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\u4e2d\uff0c\u8fd8\u53ef\u4ee5\u5e94\u7528\u5e38\u89c1\u7684\u968f\u610f\u7684\u7d2b\u5916\u5149\u9020\u6210\u5b89\u88c5\u3002\n\t<\/p>\n

    \n\t\t\u5e94\u4e88\u8868\u660e\uff0c\u672c\u4ea7\u54c1\u4e2d\u8c08\u53ca\u7684\u7d2b\u5916\u5149\u4e00\u6837\u5e73\u65f6\u5c31\u662f\u6307\u5177\u590710\uff5e400nm\u7684\u5149\u6ce2\u957f\u7684\u65e0\u7ebf\u7535\u6ce2\uff0c\u4f46\u5f00\u5c55\u540e\u8ff0\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149(10\uff5e200nm)\u89e3\u51b3\u4e4b\u5916\u7684\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\u65f6\uff0c\u7504\u9009\u5e94\u7528210\uff5e375nm\u7684\u7d2b\u5916\u5149\u3002\n\t<\/p>\n

    \n\t\t\u7d2b\u5916\u5149\u7684\u76f4\u5c04\u7504\u9009\u5728\u62c5\u8f7d\u88ab\u9633\u5149\u7167\u5c04\u7684\u7b2c1\u9694\u7edd\u5c42\u7684\u677f\u6750\u4e0d\u635f\u4f24\u7684\u8303\u7574\u5185\u8bbe\u7f6e\u76f4\u5c04\u6297\u538b\u5f3a\u5ea6\u3001\u76f4\u5c04\u6642\u95f4\u3002\n\t<\/p>\n

    \n\t\t\u4ee5\u5e94\u7528\u5851\u6599\u8584\u819c\u505a\u4e3a\u677f\u6750\u7684\u72b6\u51b5\u4e3a\u4f8b\u5b50\uff0c\u6bd4\u5982\uff0c\u53ef\u4ee5\u5e94\u75282kW(80W\/cm\u00d725cm)\u7684\u706f\uff0c\u4ee5\u677f\u6750\u5916\u578b\u7684\u6297\u538b\u5f3a\u5ea6\u53d8\u621020\uff5e300mW\/cm2<\/sup>\u3001\u7504\u9009\u53d8\u621050\uff5e200mW\/cm2<\/sup>\u7684\u65b9\u6cd5\u8bbe\u7f6e\u677f\u6750-\u7d2b\u5916\u7ebf\u7167\u5c04\u706f\u95f4\u7684\u95f4\u8ddd\uff0c\u5f00\u5c550.1\u79d2\uff5e10\u5206\u9418\u7684\u76f4\u5c04\u3002\n\t<\/p>\n

    \n\t\t\u4e00\u6837\u5e73\u65f6\u6765\u8bb2\uff0c\u5018\u82e5\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\u65f6\u7684\u677f\u6750\u6eab\u5ea6\u53d8\u4e3a150\u2103\u4ee5\u4e0a\uff0c\u5219\u4e3a\u5851\u6599\u8584\u819c\u7b49\u65f6\uff0c\u677f\u6750\u5f62\u53d8\u6216\u662f\u5176\u6297\u538b\u5f3a\u5ea6\u52a3\u53d8\u7b49\u6750\u6599\u7684\u7279\u70b9\u635f\u4f24\u3002\u6b8a\u4e0d\u77e5\uff0c\u4e3a\u805a\u4e19\u70ef\u8148\u7b49\u8010\u6e29\u6027\u9ad8\u7684\u819c\u65f6\uff0c\u53ef\u4ee5\u5728\u66f4\u9ad8\u4e00\u4e9b\u6eab\u5ea6\u4e0b\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u3002\u56e0\u800c\uff0c\u505a\u4e3a\u8be5\u7d2b\u5916\u7ebf\u7167\u5c04\u65f6\u7684\u677f\u6750\u6eab\u5ea6\uff0c\u4e00\u6837\u5e73\u65f6\u6c92\u6709\u9650\u5236\uff0c\u672c\u884c\u4e1a\u4e13\u4e1a\u6280\u672f\u4eba\u5458\u53ef\u4f9d\u636e\u677f\u6750\u7684\u7c7b\u578b\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u6b64\u5916\uff0c\u7d2b\u5916\u7ebf\u7167\u5c04\u6c1b\u56f4\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u4ee5\u5728\u7a7a\u6c14\u4e2d\u6267\u884c\u3002\n\t<\/p>\n

    \n\t\t\u505a\u4e3a\u5982\u8bb8\u7684\u7d2b\u5916\u5149\u7684\u9020\u6210\u7ec4\u7ec7\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u91d1\u5c5e\u5364\u5316\u7269\u706f\u3001\u9ad8\u538b\u94a0\u706f\u3001\u4f4e\u7535\u538b\u6c5e\u706f\u3001\u6c19\u5f27\u706f\u3001\u78b3\u5f27\u706f\u3001\u51c6\u5206\u5b50\u706f(172nm\u3001222nm\u3001308nm\u7684\u5355\u4e00\u5149\u6ce2\u957f\uff0c\u6bd4\u5982USHIO\u682a\u5f0f\u5236\u3001M.D.COM\u682a\u5f0f\u5236\u7b49)\u3001UV\u5149\u6fc0\u5149\u5668\u7b49\uff0c\u6c92\u6709\u683c\u5916\u9650\u5b9a\u3002\u6b64\u5916\uff0c\u5bf9\u7b2c1\u9694\u7edd\u5c42\u76f4\u5c04\u6240\u5f62\u6210\u7684\u7d2b\u5916\u5149\u65f6\uff0c\u4ece\u53d1\u5c55\u542c\u4ece\u548c\u5b8c\u6210\u5300\u79f0\u7684\u76f4\u5c04\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u4f7f\u6765\u6e90\u4e8e\u9020\u6210\u6e90\u7684\u7d2b\u5916\u5149\u88ab\u53cd\u5c04\u9762\u53cd\u5c04\u9762\u540e\u7167\u5c04\u7b2c1\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

    \n\t\t\u7d2b\u5916\u7ebf\u7167\u5c04\u9009\u7528\u5206\u6b21\u89e3\u51b3\u6216\u6301\u7eed\u89e3\u51b3\u5747\u9002\u5408\uff0c\u53ef\u6309\u7167\u91c7\u7528\u7684\u677f\u6750\u7684\u5916\u89c2\u8bbe\u8ba1\u9002\u5ea6\u5730\u9009\u4e2d\u3002\u6bd4\u5982\uff0c\u5206\u6b21\u89e3\u51b3\u65f6\uff0c\u53ef\u4ee5\u5c06\u5916\u578b\u5177\u5907\u7b2c1\u9694\u7edd\u5c42\u7684\u91cd\u53e0\u4f53\u7528\u5177\u6709\u5982\u4e0a\u6240\u8ff0\u7684\u7d2b\u5916\u5149\u9020\u6210\u6e90\u7684\u7d2b\u5916\u5149\u70e7\u9020\u7089\u89e3\u51b3\u3002\u7d2b\u5916\u5149\u70e7\u9020\u7089\u81ea\u8eab\u901a\u5e38\u662f\u5df2\u7ecf\u77e5\u9053\u7684\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528Eyegraphics\u682a\u5f0f\u5236\u7684\u7d2b\u5916\u5149\u70e7\u9020\u7089\u3002\u6b64\u5916\uff0c\u5916\u578b\u5177\u5907\u7b2c1\u9694\u7edd\u5c42\u7684\u91cd\u53e0\u4f53\u4e3a\u6761\u5f62\u8584\u819c\u72b6\u65f6\uff0c\u53ef\u4ee5\u8fb9\u8fd0\u8f93\u5b83\u8fb9\u5728\u5177\u6709\u5982\u4e0a\u6240\u8ff0\u7684\u7d2b\u5916\u5149\u9020\u6210\u6e90\u7684\u667e\u5e72\u5730\u533a\u6301\u7eed\u76f4\u5c04\u7d2b\u5916\u5149\u6765\u4f7f\u5176\u74f7\u5668\u5316\u3002\u7d2b\u5916\u7ebf\u7167\u5c04\u9700\u8981\u7684\u6642\u95f4\u4f9d\u636e\u91c7\u7528\u7684\u677f\u6750\u3001\u7b2c1\u9694\u7edd\u5c42\u7684\u6784\u6210\u3001\u6d53\u5ea6\u503c\u800c\u5b9a\uff0c\u4e00\u6837\u5e73\u65f6\u4e3a0.1\u79d2\uff5e10\u5206\u9418\uff0c\u7504\u9009\u4e3a0.5\u79d2\uff5e3\u5206\u9418\u3002\n\t<\/p>\n

    \n\t\t(\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\uff1a\u51c6\u5206\u5b50\u76f4\u5c04\u89e3\u51b3)\n\t<\/p>\n

    \n\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u6700\u7504\u9009\u7684\u6539\u6027\u6750\u6599\u89e3\u51b3\u529e\u6cd5\u662f\u884c\u9a76\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u7684\u89e3\u51b3(\u51c6\u5206\u5b50\u76f4\u5c04\u89e3\u51b3)\u3002\u884c\u9a76\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u7684\u89e3\u51b3\u5c31\u662f\u6307\u5982\u4e0b\u6240\u793a\u7684\u65b9\u5f0f\uff0c\u5373\u5e94\u7528\u6bd4\u805a\u7845\u6c2e\u70f7\u5316\u5b66\u7269\u8d28\u5185\u7684\u539f\u5b50\u95f4\u952e\u534f\u529b\u5927\u7684100\uff5e200nm\u7684\u805a\u5149\uff0c\u7504\u9009\u5e94\u7528100\uff5e180nm\u5149\u6ce2\u957f\u7684\u805a\u5149\uff0c\u884c\u9a76\u88ab\u79f0\u4f5c\u5149\u91cf\u5b50\u5de5\u827a\u6d41\u7a0b\u7684\u4ec5\u6709\u5149\u91cf\u5b50\u7684\u529f\u6548\uff0c\u7acb\u5373\u65ad\u5f00\u5206\u5b50\u7684\u952e\u5408\u540c\u4e66\u65f6\u884c\u9a76\u81ed\u6c27\u3001\u6d3b\u6027\u6c27\u5f00\u5c55\u6c27\u5316\u8fd8\u539f\u53cd\u5e94\uff0c\u4ece\u800c\u5728\u8f83\u8d85\u4f4e\u6e29(\u7ea6200\u2103\u4e0b\u5217)\u4e0b\uff0c\u5f00\u5c55\u4e8c\u6c27\u5316\u7845\u819c\u7684\u4ea7\u751f\u3002\u5e94\u4e88\u8868\u660e\uff0c\u5f00\u5c55\u51c6\u5206\u5b50\u76f4\u5c04\u89e3\u51b3\u65f6\uff0c\u7504\u9009\u5982\u4e0a\u6240\u8ff0\u5e76\u4e14\u7528\u70ed\u5904\u7406\u5de5\u827a\uff0c\u8fd9\u65f6\u7684\u70ed\u5904\u7406\u5de5\u827a\u6807\u51c6\u7684\u8be6\u5c3d\u5167\u5bb9\u5982\u4e0a\u6240\u8ff0\u3002\n\t<\/p>\n

    \n\t\t\u672c\u4ea7\u54c1\u4e2d\u7684\u5c04\u7ebf\u6e90\u53ea\u9700\u9020\u6210100\uff5e180nm\u5149\u6ce2\u957f\u7684\u5149\u5c31\u53ef\u4ee5\uff0c\u7504\u9009\u5728\u7ea6172nm\u5177\u5907\u8f83\u5927\u653e\u5c04\u6027\u7684\u51c6\u5206\u5b50\u8f90\u5c04\u5668(\u6bd4\u5982\uff0cXe\u51c6\u5206\u5b50\u706f)\u3001\u5728\u7ea6185nm\u5177\u5907\u4eae\u7ebf\u7684\u4f4e\u7535\u538b\u6c5e\u84b8\u6c14\u706f\u548c\u5177\u5907230nm\u4e4b\u4e0b\u7684\u5149\u6ce2\u957f\u6210\u4efd\u7684\u4e2d\u538b\u548c\u9ad9\u538b\u6c5e\u84b8\u6c14\u706f\u3001\u53ca\u5176\u5728\u7ea6222nm\u5177\u5907\u8f83\u5927\u653e\u5c04\u6027\u7684\u51c6\u5206\u5b50\u706f\u3002\n\t<\/p>\n

    \n\t\t\u5728\u5176\u4e2d\uff0c\u7531\u4e8eXe\u51c6\u5206\u5b50\u706f\u4ee5\u5355\u4e00\u5149\u6ce2\u957f\u653e\u5c04\u6027\u5149\u6ce2\u957f\u77ed\u7684172nm\u7684\u7d2b\u5916\u5149\uff0c\u56e0\u6b64\u95ea\u5149\u542c\u4ece\u51fa\u8272\u3002\u7531\u4e8e\u8be5\u5149\u7684\u6c27\u7684\u6c72\u53d6\u6307\u6570\u5927\uff0c\u56e0\u6b64\u7528\u5c11\u91cf\u7684\u6c27\u5c31\u53ef\u4ee5\u9020\u6210\u6d53\u5ea6\u8f83\u9ad8\u7684\u7684\u6c27\u81ea\u7531\u57fa\u6c27\u5206\u5b50\u79cd\u3001\u6d3b\u6027\u6c27\u3002\n\t<\/p>\n

    \n\t\t\u6b64\u5916\uff0c\u5df2\u7ecf\u77e5\u9053\u5149\u6ce2\u957f\u77ed\u7684172nm\u7684\u805a\u5149\u4f7f\u7269\u8d28\u7684\u952e\u79bb\u89e3\u7684\u5de5\u4f5c\u80fd\u529b\u9ad8\u3002\u884c\u9a76\u8be5\u81ed\u6c27\u3001\u6d3b\u6027\u6c27\u548c\u7d2b\u5916\u5149\u653e\u5c04\u6027\u6240\u5177\u5907\u7684\u9ad8\u6548\u7387\u80fd\u91cf\uff0c\u53ef\u4ee5\u5728\u77ed\u671f\u5185\u5b8c\u6210\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u7684\u6539\u6027\u6750\u6599\u3002\n\t<\/p>\n

    \n\t\t\u7531\u4e8e\u51c6\u5206\u5b50\u706f\u7684\u5149\u9020\u6210\u542c\u4ece\u9ad8\uff0c\u56e0\u6b64\u4ee5\u4f4e\u7684\u7535\u529b\u5de5\u7a0b\u8d44\u91d1\u6295\u5165\u5c31\u53ef\u4ee5\u7167\u4eae\u3002\u6b64\u5916\uff0c\u5177\u5907\u5982\u4e0b\u6240\u793a\u7279\u70b9\uff1a\u4e0d\u4f20\u51fa\u53d8\u6210\u56e0\u5149\u9020\u6210\u7684\u6eab\u5ea6\u5347\u9ad8\u7684\u7126\u8651\u8981\u7d20\u7684\u957f\u5149\u6ce2\u957f\u7684\u5149\uff0c\u7531\u4e8e\u5728\u7d2b\u5916\u5149\u5730\u533a\u5c31\u662f\u4ee5\u77ed\u5149\u6ce2\u957f\u76f4\u5c04\u52a8\u80fd\uff0c\u56e0\u6b64\u53ef\u4ee5\u6291\u5236\u76f4\u5c04\u76ee\u6807\u7269\u7684\u5916\u578b\u6eab\u5ea6\u7684\u5347\u9ad8\u3002\u56e0\u800c\uff0c\u5408\u9002\u975e\u5e38\u5bb9\u6613\u9047\u70ed\u7684\u5e72\u6270\u7684PET\u7b49\u6320\u6027\u819c\u539f\u6750\u6599\u3002\n\t<\/p>\n

    \n\t\t\u7d2b\u5916\u7ebf\u7167\u5c04\u65f6\u7684\u53cd\u6620\u5fc5\u9700\u6c27\uff0c\u7531\u4e8e\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u6709\u6c27\u8fd0\u52a8\u7684\u6c72\u53d6\uff0c\u56e0\u6b64\u7d2b\u5916\u7ebf\u7167\u5c04\u5de5\u827a\u6d41\u7a0b\u7684\u542c\u4ece\u975e\u5e38\u5bb9\u6613\u51cf\u5c11\uff0c\u7504\u9009\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u76f4\u5c04\u5728\u5438\u6c27\u6d53\u5ea6\u548c\u6c34\u84b8\u6c7d\u6d53\u5ea6\u503c\u5c3d\u53ef\u80fd\u4f4e\u7684\u60c5\u51b5\u4e0b\u5f00\u5c55\u3002\u5373\uff0c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u65f6\u7684\u5438\u6c27\u6d53\u5ea6\u7504\u9009\u4e3a10\uff5e20000\u5bb9\u79efppm\uff0c\u66f4\u7504\u9009\u4e3a50\uff5e10000\u5bb9\u79efppm\u3002\u6b64\u5916\uff0c\u8f6c\u6362\u5de5\u827a\u6d41\u7a0b\u95f4\u7684\u6c34\u84b8\u6c7d\u6d53\u5ea6\u503c\u7504\u9009\u4e3a1000\uff5e4000\u5bb9\u79efppm\u7684\u8303\u7574\u3002\n\t<\/p>\n

    \n\t\t\u505a\u4e3a\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u65f6\u91c7\u7528\u7684\u6ee1\u8db3\u76f4\u5c04\u6c1b\u56f4\u7684\u6c7d\u4f53\uff0c\u7504\u9009\u5e72\u8e81\u7a00\u6709\u6c14\u4f53\uff0c\u4ece\u8d39\u7528\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u683c\u5916\u7504\u9009\u4e3a\u5e72\u8e81N2\u3002\u5438\u6c27\u6d53\u5ea6\u7684\u8c03\u8282\u53ef\u6839\u636e\u7cbe\u786e\u6d4b\u91cf\u5411\u76f4\u5c04\u5e93\u4f4d\u5bfc\u8fdb\u7684o2\u3001\u7a00\u6709\u6c14\u4f53\u7684\u603b\u6d41\u91cf\uff0c\u66f4\u6539\u603b\u6d41\u91cf\u6bd4\u4ee5\u8c03\u8282\u3002\n\t<\/p>\n

    \n\t\t\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5de5\u827a\u6d41\u7a0b\u4e2d\uff0c\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u6240\u5f97\u5230\u7684\u6539\u5584\u9762\u7684\u8be5\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u5149\u7167\u5f3a\u5ea6\u7504\u9009\u4e3a1mW\/cm2<\/sup>\uff5e10W\/cm2<\/sup>\uff0c\u66f4\u7504\u9009\u4e3a30mW\/cm2<\/sup>\uff5e200mW\/cm2<\/sup>\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a50mW\/cm2<\/sup>\uff5e160mW\/cm2<\/sup>\u3002\u5c0f\u4e8e1mW\/cm2<\/sup>\u65f6\uff0c\u6539\u6027\u6750\u6599\u542c\u4ece\u5f88\u6709\u53ef\u80fd\u5927\u5e45\u5ea6\u51cf\u5c11\uff0c\u5018\u82e5\u8d85\u51fa10W\/cm2<\/sup>\uff0c\u5219\u6d82\u5c42\u5f88\u6709\u53ef\u80fd\u9020\u6210\u70e7\u8680\u3001\u6216\u662f\u5bf9\u677f\u6750\u5bfc\u81f4\u635f\u5bb3\u3002\n\t<\/p>\n

    \n\t\t\u6d82\u5c42\u9762\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u76f4\u5c04\u52a8\u80fd\u7684\u91cf(\u76f4\u5c04\u91cf)\u7504\u9009\u4e3a10\uff5e10000mJ\/cm2<\/sup>\uff0c\u66f4\u7504\u9009\u4e3a100\uff5e8000mJ\/cm2<\/sup>\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a200\uff5e6000mJ\/cm2<\/sup>\u3002\u5c0f\u4e8e10mJ\/cm2<\/sup>\u65f6\uff0c\u6539\u6027\u6750\u6599\u5f88\u6709\u53ef\u80fd\u4e0d\u5145\u8db3\uff0c\u5018\u82e5\u8d85\u51fa10000mJ\/cm2<\/sup>\uff0c\u5219\u7126\u8651\u56e0\u8fc7\u591a\u6539\u6027\u6750\u6599\u9020\u6210\u7684\u7f1d\u9699\u9020\u6210\u3001\u4ea7\u751f\u677f\u6750\u7684\u70ed\u5f62\u53d8\u3002\n\t<\/p>\n

    \n\t\t\u6b64\u5916\uff0c\u6539\u6027\u6750\u6599\u6240\u8fd0\u7528\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u53ef\u4ee5\u884c\u9a76\u7531\u5e26\u6709CO\u3001CO2<\/sub>\u548cCH4<\/sub>\u7684\u6700\u8d77\u7801\u4e00\u79cd\u7684\u6c7d\u4f53(\u4e0b\u5217\uff0c\u4e5f\u79f0\u4e4b\u4e3a\u542b\u78b3\u91cf\u6c7d\u4f53)\u4ea7\u751f\u7684\u7b49\u79bb\u5b50\u9020\u6210\u3002\u800c\u4e14\uff0c\u542b\u78b3\u91cf\u6c7d\u4f53\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\uff0c\u4f46\u7504\u9009\u505a\u4e3a\u4ee5\u4e86\u89e3\u6c7d\u4f53\u6216\u662fH2<\/sub>\u4e3a\u4e3b\u5bfc\u6c7d\u4f53\u3001\u5c0f\u91cf\u52a0\u4e0a\u542b\u78b3\u91cf\u6c7d\u4f53\u800c\u5f97\u7684\u6df7\u5408\u6c14\u5e94\u7528\u3002\u505a\u4e3a\u7b49\u79bb\u5b50\u7684\u751f\u6210\u65b9\u5f0f\uff0c\u53ef\u5217\u4e3e\u7535\u5bb9\u8026\u5408\u7b49\u79bb\u5b50\u7b49\u3002\n\t<\/p>\n

    \n\t\t\u4e0b\u9762\uff0c\u505a\u4e3a\u7504\u9009\u65b9\u6cd5\u7684\u7845\u5316\u5b66\u7269\u8d28\u4e3a\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u65f6\uff0c\u9488\u5bf9\u63a8\u65ad\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5de5\u827a\u6d41\u7a0b\u4e2d\u7531\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u9020\u6210\u6c2e\u6c27\u5316\u7845\u3001\u8fdb\u4e00\u6b65\u9020\u6210\u4e8c\u6c27\u5316\u7845\u7684\u5316\u5b66\u53cd\u5e94\u4f53\u5236\uff0c\u4e0b\u5217\u5f00\u5c55\u8868\u660e\u3002\n\t<\/p>\n

    \n\t\t(I)\u8131\u6c22\u3001\u4e0e\u5176\u8bf4\u76f8\u968f\u7684Si-N\u952e\u7684\u4ea7\u751f\n\t<\/p>\n

    \n\t\t\u89c9\u5f97\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e2d\u7684Si-H\u952e\u3001N-H\u952e\u56e0\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u9020\u6210\u7684\u6fc0\u8d77\u7b49\u800c\u8f83\u975e\u5e38\u5bb9\u6613\u7834\u88c2\uff0c\u5728\u53ef\u5851\u6027\u6c1b\u56f4\u4e0b\u518d\u952e\u751f\u6210Si-N(\u4e0d\u7ecf\u610f\u4e5f\u4ea7\u751fSi\u7684\u672a\u952e\u5408\u7ed3\u6784\u57df)\u3002\u5373\uff0c\u4e0d\u4ea7\u751f\u7a7a\u6c14\u6c27\u5316\u800cSiNy<\/sub>\u6784\u6210\u7684\u5f62\u52bf\u5e72\u56fa\u3002\u8fd9\u65f6\u4e0d\u4ea7\u751f\u9ad8\u805a\u7269\u78b3\u94fe\u7684\u7834\u88c2\u3002Si-H\u952e\u3001N-H\u952e\u7684\u7834\u88c2\u56e0\u91d1\u5c5e\u50ac\u5316\u5242\u7684\u5b58\u6709\u3001\u52a0\u6e29\u800c\u88ab\u63a8\u52a8\u3002\u7834\u88c2\u7684H\u4ee5H2<\/sub>\u7684\u5f62\u52bf\u88ab\u91ca\u653e\u51fa\u6765\u5230\u819c\u5916\u3002\n\t<\/p>\n

    \n\t\t(II)\u7531\u6c34\u89e3\u53cd\u5e94\u00b7\u8131\u6c34\u7f29\u5408\u9020\u6210\u7684Si-O-Si\u952e\u7684\u4ea7\u751f\n\t<\/p>\n

    \n\t\t\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e2d\u7684Si-N\u952e\u88ab\u6c34\u6c34\u89e3\u53cd\u5e94\uff0c\u9ad8\u805a\u7269\u4e3b\u89e3\u94fe\u800c\u4ea7\u751fSi-OH\u30022\u4e2aSi-OH\u8131\u6c34\u7f29\u5408\u800c\u4ea7\u751fSi-O-Si\u952e\u5e76\u5e72\u56fa\u3002\u8fd9\u4e5f\u662f\u5728\u7a7a\u6c14\u4e2d\u4e5f\u4f1a\u51fa\u73b0\u7684\u53cd\u6620\uff0c\u4f46\u5728\u53ef\u5851\u6027\u6c1b\u56f4\u4e0b\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u4e2d\uff0c\u89c9\u5f97\u56e0\u76f4\u5c04\u7684\u70ed\u4ece\u677f\u6750\u505a\u4e3a\u6392\u51fa\u6765\u6c7d\u4f53\u9020\u6210\u7684\u6c34\u84b8\u6c7d\u53d8\u6210\u5173\u952e\u7684\u6c34\u4efd\u6e90\u3002\u5018\u82e5\u6c34\u4efd\u8fc7\u591a\uff0c\u5219\u672a\u5f7b\u5e95\u8131\u6c34\u7f29\u5408\u7684Si-OH\u6b8b\u4f59\uff0c\u53d8\u6210\u7531SiO2.1<\/sub>\uff5eSiO2.3<\/sub>\u7684\u6784\u6210\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u4f4e\u7684\u5e72\u56fa\u819c\u3002\n\t<\/p>\n

    \n\t\t(III)\u7531\u5355\u7ebf\u6001\u6c27\u9020\u6210\u7684\u7acb\u5373\u7a7a\u6c14\u6c27\u5316\u3001Si-O-Si\u952e\u7684\u4ea7\u751f\n\t<\/p>\n

    \n\t\t\u5728\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u4e2d\uff0c\u5018\u82e5\u6c1b\u56f4\u4e0b\u5b58\u6709\u9002\u5f53\u7684\u6c27\uff0c\u5219\u4ea7\u751f\u7a7a\u6c14\u6c27\u5316\u529b\u5c24\u5176\u5f88\u662f\u5f3a\u7684\u5355\u7ebf\u6001\u6c27\u3002\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e2d\u7684H\u3001N\u4e0eO\u4e92\u6362\u800c\u4ea7\u751fSi-O-Si\u952e\u5e76\u5e72\u56fa\u3002\u89c9\u5f97\u4e0d\u7ecf\u610f\u4e5f\u4f1a\u56e0\u9ad8\u805a\u7269\u78b3\u94fe\u7684\u7834\u88c2\u800c\u4ea7\u751f\u952e\u7684\u8d44\u4ea7\u91cd\u7ec4\u3002\n\t<\/p>\n

    \n\t\t(IV)\u4f34\u968f\u7531\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u00b7\u6fc0\u8d77\u9020\u6210\u7684Si-N\u952e\u7834\u88c2\u7684\u7a7a\u6c14\u6c27\u5316\n\t<\/p>\n

    \n\t\t\u7531\u4e8e\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u52a8\u80fd\u6bd4\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e2d\u7684Si-N\u952e\u52a8\u80fd\u9ad8\uff0c\u56e0\u6b64Si-N\u952e\u4ea7\u751f\u7834\u88c2\uff0c\u89c9\u5f97\u5018\u82e5\u5728\u56db\u5468\u5b58\u6709\u6c27\u3001\u6d3b\u6027\u6c27\u3001\u6c34\u7b49\u6c27\u6c14\u6e90\uff0c\u5219\u88ab\u6c27\u5316\u800c\u9020\u6210Si-O-Si\u952e\u3001Si-O-N\u952e\u3002\u89c9\u5f97\u4e0d\u7ecf\u610f\u4e5f\u4f1a\u56e0\u9ad8\u805a\u7269\u78b3\u94fe\u7684\u7834\u88c2\u800c\u4ea7\u751f\u952e\u7684\u8d44\u4ea7\u91cd\u7ec4\u3002\n\t<\/p>\n

    \n\t\t\u5bf9\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u7684\u5c42\u6267\u884c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u800c\u5f97\u7684\u5c42\u7684\u6c2e\u6c27\u5316\u7845\u7684\u6784\u6210\u7684\u8c03\u8282\u53ef\u4ee5\u6839\u636e\u9002\u5ea6\u5730\u7ec4\u6210\u4ee5\u4e0a\u7684(I)\uff5e(IV)\u7684\u7a7a\u6c14\u6c27\u5316\u4f53\u5236\u64cd\u7eb5\u7a7a\u6c14\u6c27\u5316\u60c5\u51b5\u6765\u5f00\u5c55\u3002\n\t<\/p>\n

    \n\t\t\u8fd9\u513f\uff0c\u505a\u4e3a\u7845\u5316\u5b66\u7269\u8d28\uff0c\u4e3a\u9996\u9009\u7684\u805a\u7845\u6c2e\u70f7\u65f6\uff0c\u5728\u4e8c\u6c27\u5316\u7845\u8f6c\u6362(\u6539\u6027\u6750\u6599\u89e3\u51b3)\u4e2d\uff0c\u4ea7\u751fSi-H\u3001N-H\u952e\u7684\u7834\u88c2\u548cSi-O\u952e\u7684\u8f6c\u5316\u6210\uff0c\u8f6c\u6362\u6210\u4e8c\u6c27\u5316\u7845\u7b49\u74f7\u5668\uff0c\u8be5\u8f6c\u6362\u7684\u6c34\u5e73\u53ef\u4ee5\u6839\u636eIR\u6d4b\u91cf\uff0c\u884c\u9a76\u4e0b\u5217\u754c\u5b9a\u7684\u5f0f(1)\uff0c\u4ee5SiO\/SiN\u6bd4\u5f00\u5c55\u534a\u5b9a\u91cf\u70b9\u8bc4\u3002\n\t<\/p>\n

    \n\t\t\u5f0f(1)\n\t<\/p>\n

    \n\t\tSiO\/SiN\u6bd4\uff1d(\u8f6c\u6362\u540e\u7684SiOOD\u503c)\/(\u8f6c\u6362\u540e\u7684SiNOD\u503c)\n\t<\/p>\n

    \n\t\t\u8fd9\u513f\uff0cSiOOD\u503c\u6839\u636e\u5728\u7ea61160cm-1<\/sup>\u7684\u6c72\u53d6(OD\u503c)\u7b97\u51fa\uff0cSiNOD\u503c\u6839\u636e\u5728\u7ea6840cm-1<\/sup>\u7684\u6c72\u53d6(OD\u503c)\u7b97\u51fa\u3002SiO\/SiN\u6bd4\u8d8a\u5927\uff0c\u8868\u9732\u4e3b\u8981\u8868\u73b0\u8d8a\u5411\u8d34\u8fd1\u4e8c\u6c27\u5316\u7845\u6784\u6210\u7684\u74f7\u5668\u8f6c\u6362\u3002\n\t<\/p>\n

    \n\t\t\u8fd9\u513f\uff0c\u505a\u4e3a\u5411\u74f7\u5668\u8f6c\u6362\u7684\u6c34\u5e73\u7684\u6307\u6807\u503c\u7684SiO\/SiN\u6bd4\u7504\u9009\u4e3a0.3\u4ee5\u4e0a\uff0c\u66f4\u7504\u9009\u4e3a0.5\u4ee5\u4e0a\u3002\u5c0f\u4e8e0.3\u65f6\uff0c\u4e0d\u7ecf\u610f\u65e0\u6cd5\u5f97\u5230\u671f\u671b\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u4e8c\u6c27\u5316\u7845\u8f6c\u6362\u7387(SiOx<\/sub>\u4e2d\u7684x)\u7684\u6d4b\u5b9a\u6cd5\uff0c\u6bd4\u5982\uff0c\u53ef\u5e94\u7528XPS\u6d4b\u5b9a\u65b9\u6cd5\u3002\n\t<\/p>\n

    \n\t\t\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u6784\u6210\u53ef\u4ee5\u5e94\u7528XPS\u5916\u578b\u5256\u6790\u5b89\u88c5\u6d4b\u91cf\u539f\u5b50\u7ec4\u6210\u6bd4\u4ee5\n\t<\/p>\n

    \n\t\t\u6d4b\u91cf\u3002\u6b64\u5916\uff0c\u8fd8\u53ef\u4ee5\u6839\u636e\u65ad\u5f00\u7b2c1\u9694\u7edd\u5c42\uff0c\u7528XPS\u5916\u578b\u5256\u6790\u5b89\u88c5\u5bf9\u65ad\u5f00\u9762\u6d4b\u91cf\u539f\u5b50\u7ec4\u6210\u6bd4\u4ee5\u6d4b\u91cf\u819c\u6784\u6210\u3002\n\t<\/p>\n\n\n\n\n
    \n

    \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u76f8\u5bf9\u5bc6\u5ea6\u53ef\u4f9d\u636e\u76ee\u5730\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u6bd4\u5982\uff0c\u7b2c1\u9694\u7edd\u5c42\u7684\u819c\u76f8\u5bf9\u5bc6\u5ea6\u7504\u9009\u57281.5\uff5e2.6g\/cm3<\/sup>\u7684\u8303\u7574\u3002\u5018\u82e5\u79bb\u53bb\u8be5\u8303\u7574\uff0c\u5219\u4e0d\u7ecf\u610f\u4ea7\u751f\u819c\u7684\u9ad8\u5bc6\u5ea6\u6027\u51cf\u5c11\u3001\u9ad8\u963b\u9694\u52a3\u53d8\u3001\u73af\u5883\u6e7f\u5ea6\u9020\u6210\u7684\u819c\u7684\u7a7a\u6c14\u6c27\u5316\u52a3\u53d8\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u8be5\u7b2c1\u9694\u7edd\u5c42\u53ef\u4ee5\u4e3a\u5355\u9762\u8fd8\u53ef\u4ee5\u4e3a2\u5c42\u4ee5\u4e0a\u7684\u91cd\u53e0\u6784\u9020\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u8be5\u7b2c1\u9694\u7edd\u5c42\u4e3a2\u5c42\u4ee5\u4e0a\u7684\u91cd\u53e0\u6784\u9020\u65f6\uff0c\u5404\u7b2c1\u9694\u7edd\u5c42\u53ef\u4ee5\u4e3a\u7c7b\u540c\u7684\u6784\u6210\u8fd8\u53ef\u4ee5\u4e3a\u4e0d\u4e00\u6837\u7684\u6784\u6210\u3002\u6b64\u5916\uff0c\u7b2c1\u9694\u7edd\u5c42\u4e3a2\u5c42\u4ee5\u4e0a\u7684\u91cd\u53e0\u6784\u9020\u65f6\uff0c\u7b2c1\u9694\u7edd\u5c42\u53ef\u4ee5\u4ec5\u7531\u884c\u9a76\u771f\u7a7a\u6cf5\u6d82\u819c\u6cd5\u4ea7\u751f\u7684\u5c42\u7ec4\u6210\uff0c\u8fd8\u53ef\u4ee5\u4ec5\u7531\u884c\u9a76\u65bd\u80f6\u6cd5\u4ea7\u751f\u7684\u5c42\u7ec4\u6210\uff0c\u8fd8\u53ef\u4ee5\u662f\u884c\u9a76\u771f\u7a7a\u6cf5\u6d82\u819c\u6cd5\u4ea7\u751f\u7684\u5c42\u548c\u884c\u9a76\u65bd\u80f6\u6cd5\u4ea7\u751f\u7684\u5c42\u7684\u7ec4\u6210\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u4ece\u5185\u5e94\u529b\u7f13\u89e3\u6027\u3001\u6c72\u53d6\u540e\u8ff0\u7684\u7b2c2\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u6240\u8fd0\u7528\u7684\u7d2b\u5916\u5149\u7b49\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7504\u9009\u8fd8\u5e26\u6709\u6c2e\u5143\u7d20\u6216\u662f\u662f\u78b3\u5143\u7d20\u3002\u6839\u636e\u5e26\u6709\u8fd9\u79cd\u539f\u7d20\uff0c\u8fdb\u800c\u5177\u5907\u7f13\u89e3\u5185\u5e94\u529b\u3001\u6c72\u53d6\u7d2b\u5916\u5149\u7b49\u813e\u6c14\uff0c\u6839\u636e\u53d1\u5c55\u7b2c1\u9694\u7edd\u5c42\u4e0e\u7b2c2\u9694\u7edd\u5c42\u7684\u5bc6\u5408\u6027\u800c\u83b7\u5f97\u53d1\u5c55\u6c7d\u4f53\u9ad8\u963b\u9694\u7b49\u7d50\u679c\uff0c\u56e0\u6b64\u7504\u9009\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u7b2c1\u9694\u7edd\u5c42\u4e2d\u7684\u6709\u673a\u5316\u5b66\u6784\u6210\u53ef\u4ee5\u884c\u9a76\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u65f6\u7845\u5316\u5b66\u7269\u8d28\u7b49\u7684\u7c7b\u578b\u4e0e\u91cf\u53ca\u5176\u5bf9\u5e26\u6709\u7845\u5316\u5b66\u7269\u8d28\u7684\u5c42\u5f00\u5c55\u6539\u6027\u6750\u6599\u65f6\u7684\u6807\u51c6\u7b49\u6765\u64cd\u7eb5\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u3014\u7b2c2\u9694\u7edd\u5c42\u3015\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5efa\u5728\u7b2c1\u9694\u7edd\u5c42\u7684\u4e0a\u65b9\u7684\u672c\u4ea7\u54c1\u7684\u7b2c2\u9694\u7edd\u5c42\u6700\u5c11\u5e26\u6709\u7845\u539f\u5b50\u548c\u6c27\u5206\u5b50\uff0c\u4e14\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(O\/Si)\u4e3a1.4\uff5e2.2\uff0c\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(N\/Si)\u4e3a0\uff5e0.4\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u201c\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(O\/Si)\u4e3a1.4\uff5e2.2\u201d\u5c31\u662f\u6307\u5728\u4f7f\u7528\u540e\u8ff0\u7684\u5b89\u88c5\u548c\u65b9\u5f0f\u6d4b\u91cf\u7684\u7b2c2\u9694\u7edd\u5c42\u7684\u968f\u610f\u957f\u5ea6\u7684\u70b9\u4e5f\u4e0d\u5b58\u6709\u4e3b\u8981\u8868\u73b0O\/Si\u5c0f\u4e8e1.4\u6216\u662f\u8d85\u51fa2.2\u7684\u503c\u7684\u4e00\u90e8\u5206\u3002\u4e00\u6837\uff0c\u201c\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(N\/Si)\u4e3a0\uff5e0.4\u201d\u5c31\u662f\u6307\u5728\u4f7f\u7528\u540e\u8ff0\u7684\u5b89\u88c5\u548c\u65b9\u5f0f\u6d4b\u91cf\u7684\u7b2c2\u9694\u7edd\u5c42\u7684\u968f\u610f\u957f\u5ea6\u7684\u70b9\u4e5f\u4e0d\u5b58\u6709\u4e3b\u8981\u8868\u73b0N\/Si\u8d85\u51fa0.4\u7684\u503c\u7684\u4e00\u90e8\u5206\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5018\u82e5\u7b2c2\u9694\u7edd\u5c42\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(O\/Si)\u4e3a1.4\u4ee5\u4e0a\uff0c\u5219\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7b2c2\u9694\u7edd\u5c42\u4e0d\u5bb9\u6613\u4e0e\u6c34\u4efd\u53cd\u6620\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u9ad8\u963b\u9694\u53d1\u5c55\u7684\u819c\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u5018\u82e5\u4e3a2.2\u4e0b\u5217\uff0c\u5219\u7531\u4e8e\u5728\u5206\u5b50\u7ed3\u6784\u5185\u6c2f\u7845\u70f7\u9187\u6cb9(Si-OH)\u51cf\u5c11\uff0c\u56e0\u6b64\u65e0\u6cd5\u4ea7\u751f\u6c34\u4efd\u7684\u5b89\u5168\u901a\u9053\u800c\u6ca1\u6709\u591a\u65b9\u9762\u7684\u9ad8\u963b\u9694\u3002\u8be5O\/Si\u7504\u9009\u4e3a1.5\uff5e2.1\uff0c\u66f4\u7504\u9009\u4e3a1.7\uff5e2.0\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5018\u82e5\u7b2c2\u9694\u7edd\u5c42\u4e2d\u7684\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4(N\/Si)\u4e3a0.4\u4e0b\u5217\uff0c\u5219\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7b2c2\u9694\u7edd\u5c42\u4e0d\u5bb9\u6613\u4e0e\u6c34\u4efd\u53cd\u6620\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u9ad8\u963b\u9694\u53d1\u5c55\u7684\u819c\u3002\u8be5N\/Si\u7504\u9009\u4e3a0\uff5e0.3\uff0c\u66f4\u7504\u9009\u4e3a0\uff5e0.2\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u8be5O\/Si\u548c\u8be5N\/Si\u53ef\u4ee5\u884c\u9a76\u540e\u8ff0\u7684\u6c34\u3001\u9187\u5316\u5b66\u7269\u8d28\u3001\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u7b49\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u52a0\u5165\u91cf\u3001\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u76f4\u5c04\u52a8\u80fd\u7684\u91cf\u3001\u76f4\u5c04\u65f6\u7684\u6eab\u5ea6\u7b49\u6765\u64cd\u7eb5\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u8be5O\/Si\u548c\u8be5N\/Si\u53ef\u4ee5\u7528\u4ee5\u4e0b\u7684\u65b9\u5f0f\u6d4b\u91cf\u3002\u5373\uff0c\u7b2c2\u9694\u7edd\u5c42\u7684\u6784\u6210\u66f2\u7ebf\u56fe(composition\u00a0profile)\u53ef\u4ee5\u6839\u636e\u7ec4\u6210Ar\u78c1\u63a7\u6e85\u5c04\u8680\u523b\u52a0\u5de5\u5b89\u88c5\u548cX\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6cd5(XPS)\u53bb\u6c42\u51fa\u3002\u6b64\u5916\uff0c\u6df1\u5c42\u65b9\u4f4d\u7684\u66f2\u7ebf\u56fe\u904d\u5e03\u53ef\u4ee5\u6839\u636e\u884c\u9a76FIB(\u5bf9\u7126\u7535\u5b50\u675f)\u751f\u4ea7\u52a0\u5de5\u5b89\u88c5\u7684\u819c\u751f\u4ea7\u52a0\u5de5\u548cTEM(\u7535\u5b50\u6563\u5c04\u5f0f\u900f\u5c04\u7535\u955c)\u6c42\u51fa\u5b9e\u9645\u819c\u539a\uff0c\u4e0eXPS\u7684\u5b9e\u9645\u6548\u679c\u76f8\u5339\u914d\u800c\u8ba1\u7b97\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u672c\u4ea7\u54c1\u4e2d\uff0c\u5e94\u7528\u4e0b\u5217\u6240\u663e\u793a\u7684\u5b89\u88c5\u548c\u65b9\u5f0f\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t(\u78c1\u63a7\u6e85\u5c04\u6807\u51c6)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u6b63\u79bb\u5b50\u79cd\uff1aAr\u6b63\u79bb\u5b50\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u52a0\u5feb\u5de5\u4f5c\u7535\u538b\uff1a1kV\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t(X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6d4b\u91cf\u6807\u51c6)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5b89\u88c5\uff1aVG\u00a0Scientific\u516c\u53f8\u5236ESCALAB-200R\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\tX\u5c04\u7ebf\u9633\u6781\u6c27\u5316\u539f\u6750\u6599\uff1aMg\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u529f\u7387\uff1a600W(\u52a0\u5feb\u5de5\u4f5c\u7535\u538b15kV\uff0c\u53d1\u5c04\u6781\u7535\u6d41\u91cf40mA)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5e94\u4e88\u8868\u660e\uff0c\u6d4b\u91cf\u7684\u5c4f\u5e55\u5206\u8fa8\u7387\u4e3a0.5nm\uff0c\u6839\u636e\u5728\u4e0e\u5176\u8bf4\u76f8\u5e94\u7684\u5404\u62bd\u6837\u70b9\u5bf9\u5404\u539f\u7d20\u6bd4\u6210\u56fe\u800c\u5f97\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t(FIB\u751f\u4ea7\u52a0\u5de5)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5b89\u88c5\uff1aSII\u5236SMI2050\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u751f\u4ea7\u52a0\u5de5\u6b63\u79bb\u5b50\uff1a(Ga\u00a030kV)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t(TEM\u89c2\u67e5)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5b89\u88c5\uff1a\u65e5\u672c\u7535\u5b50\u5668\u4ef6\u5236JEM2000FX(\u52a0\u5feb\u5de5\u4f5c\u7535\u538b\uff1a200kV)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u79bb\u5b50\u675f\u76f4\u5c04\u6642\u95f4\uff1a5\u79d2\uff5e60\u79d2\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t(\u8ddd\u7b2c2\u9694\u7edd\u5c42\u5916\u578b\u7684\u819c\u539a\u7684\u6df1\u5c42\u65b9\u4f4d\u7684\u539f\u7d20\u6bd4)\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u5bf9\u6bd4\u8ddd\u4ee5\u4e0a\u7684\u7b2c2\u9694\u7edd\u5c42\u5916\u578b\u7684\u6839\u636e\u78c1\u63a7\u6e85\u5c04\u83b7\u5f97\u7684\u5404\u6df1\u5c42\u7684XPS\u6d4b\u91cf(\u7d27\u7d27\u56f4\u7ed5Si\u3001O\u3001N)\u548c\u884c\u9a76TEM\u89c2\u67e5\u65ad\u5757\u9762\u800c\u5f97\u7684\u5b9e\u9645\u6548\u679c\uff0c\u6d4b\u7b97O\/Si\u548cN\/Si\u7684\u5747\u503c\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u7b2c2\u9694\u7edd\u5c42\u4e2d\uff0c\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u4e0e\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u8d85\u51fa10nm\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u7684\u5dee\u7504\u9009\u4e3a0.4\u4e0b\u5217\u3002\u5018\u82e5\u4e3a\u5982\u8bb8\u7684\u7ec4\u6210\uff0c\u5219\u5728\u7b2c2\u9694\u7edd\u5c42\u7684\u5916\u578b\u4e00\u90e8\u5206\u548c\u5167\u90e8\u6784\u6210\u53d8\u5316\u5c11\uff0c\u53d8\u6210\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u66f4\u6770\u51fa\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\u8be5\u5747\u503c\u7684\u5dee\u66f4\u7504\u9009\u4e3a0.3\u4e0b\u5217\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a0.2\u4e0b\u5217\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u7b2c2\u9694\u7edd\u5c42\u4e2d\u7684\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u53ef\u4ee5\u884c\u9a76X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6cd5(XPS)\u660e\u786e\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u4ee5\u4e0a\u7684\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u4e0e\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u8d85\u51fa10nm\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u53ef\u4ee5\u884c\u9a76\u7ec4\u6210\u4e86\u4ee5\u4e0a\u8868\u660e\u7684Ar\u78c1\u63a7\u6e85\u5c04\u8680\u523b\u52a0\u5de5\u5b89\u88c5\u548cX\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6cd5(XPS)\u7684\u65b9\u5f0f\u6765\u8ba1\u7b97\u51fa\u3002\n\t\t\t\t\t<\/p>\n

    \u7528\u4ee5\u83b7\u5f97\u5982\u4e0a\u6240\u8ff0\u7684\u7b2c2\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u4ece\u751f\u4ea7\u6548\u7387\u3001\u7b80\u4fbf\u6027\u7b49\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u5bf9\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u548c\u805a\u7845\u6c2e\u70f7\u4e4b\u5916\u7684\u5316\u5b66\u7269\u8d28(\u4e0b\u5217\uff0c\u4e5f\u901a\u79f0\u4e3a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28)\u7684\u5c42\u76f4\u5c04\u6d3b\u529b\u52a8\u80fdX\u5c04\u7ebf\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u7684\u65b9\u5f0f\u3002\u4e0b\u5217\uff0c\u5bf9\u5982\u8bb8\u7684\u7b2c2\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\u5f00\u5c55\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\uff1c\u7b2c2\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\uff1e\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u7b2c2\u9694\u7edd\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u4f46\u7504\u9009\u5982\u4e0b\u6240\u793a\u65b9\u5f0f\uff0c\u5373\u884c\u9a76\u516c\u77e5\u7684\u6e7f\u8bd5\u65bd\u80f6\u65b9\u5f0f\u65bd\u80f6\u5728\u6709\u673a\u6eb6\u6db2\u4e2d\u5e26\u6709\u65e0\u673a\u7269\u3001\u7504\u9009\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u3001\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u548c\u4f9d\u636e\u5fc5\u9700\u7684\u91d1\u5c5e\u50ac\u5316\u5242\u7684\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\uff0c\u5e76\u6325\u53d1\u53bb\u9664\u8be5\u6709\u673a\u6eb6\u5242\uff0c\u7136\u540e\uff0c\u76f4\u5c04\u7d2b\u5916\u5149\u3001\u79bb\u5b50\u675f\u3001X\u5c04\u7ebf\u3001\u03b1X\u5c04\u7ebf\u3001\u03b2X\u5c04\u7ebf\u3001\u03b3X\u5c04\u7ebf\u3001\u4e2d\u5b50X\u5c04\u7ebf\u7b49\u6d3b\u529b\u52a8\u80fdX\u5c04\u7ebf\u5f00\u5c55\u6539\u6027\u6750\u6599\u89e3\u51b3\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u805a\u7845\u6c2e\u70f7\u7684\u8be6\u5c3d\u4f8b\u4e0e\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u201d\u9879\u4e2d\u8868\u660e\u7684\u9879\u76ee\u7c7b\u540c\uff0c\u56e0\u800c\u8fd9\u513f\u7701\u53bb\u8868\u660e\u3002\u5728\u5176\u4e2d\uff0c\u4ece\u6d82\u819c\u6027\u3001\u7f1d\u9699\u7b49\u7f3a\u70b9\u5c11\u3001\u6b8b\u4f59\u6709\u673a\u5316\u5408\u7269\u5c11\u3001\u5728\u5f2f\u6298\u65f6\u548c\u4f4e\u6e29\u9ad8\u4f4e\u6e29\u6807\u51c6\u4e0b\u4e5f\u53ef\u4ee5\u4fdd\u6301\u9694\u7edd\u7279\u6027\u7b49\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u683c\u5916\u7504\u9009\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u505a\u4e3a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u4e8b\u4f8b\uff0c\u53ef\u5217\u4e3e\u51fa\u81ea\u6c34\u3001\u9187\u5316\u5b66\u7269\u8d28\u3001\u915a\u5316\u5b66\u7269\u8d28\u3001\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u3001\u7532\u57fa\u80fa\u5316\u5b66\u7269\u8d28\u3001\u9187\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u3001\u70f7\u6c27\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u3001\u53ca\u5176\u7532\u57fa\u7f9f\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u4e2d\u7684\u6700\u5c111\u79cd\u5316\u5b66\u7269\u8d28\u3002\u5728\u5176\u4e2d\uff0c\u66f4\u7504\u9009\u51fa\u81ea\u9187\u5316\u5b66\u7269\u8d28\u3001\u915a\u5316\u5b66\u7269\u8d28\u3001\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u3001\u7532\u57fa\u80fa\u5316\u5b66\u7269\u8d28\u3001\u9187\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u3001\u70f7\u6c27\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u53ca\u5176\u7532\u57fa\u7f9f\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u4e2d\u7684\u6700\u5c111\u79cd\u5316\u5b66\u7269\u8d28\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u505a\u4e3a\u4f5c\u4e3a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u4ee5\u4e0a\u9187\u5316\u5b66\u7269\u8d28\u7684\u8be6\u5c3d\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u5de5\u4e1a\u7532\u9187\u3001\u4e59\u9178\u4e59\u916f\u3001\u4e19\u9187\u3001\u4e19\u916e\u3001\u4e01\u9187\u3001\u5f02\u4e01\u9187\u3001\u620a\u9187\u3001\u5f02\u620a\u9187\u3001\u5df1\u9187\u3001\u5f02\u5df1\u9187\u3001\u73af\u5df1\u9187\u3001\u8f9b\u9187\u3001\u5f02\u8f9b\u9187\u30012-\u4e59\u57fa\u5df1\u9187\u3001\u58ec\u9187\u3001\u5f02\u58ec\u9187\u3001\u53d4\u58ec\u9187\u3001\u7678\u9187\u3001\u5341\u4e8c\u70f7\u9187\u3001\u5341\u516d\u70f7\u9187(dodecahexanol)\u3001\u5341\u516b\u70f7\u9187(dodecaoctanol)\u3001\u70ef\u4e19\u9187\u3001\u6cb9\u9187\u7b49\u3002\u9187\u5316\u5b66\u7269\u8d28\u5728\u6539\u6027\u6750\u6599\u89e3\u51b3\u65f6\uff0c\u5728\u805a\u7845\u6c2e\u70f7\u7684\u6846\u67b6\u53ef\u5e26\u6709\u7684Si-H\u57fa\u4e0e\u9187\u5316\u5b66\u7269\u8d28\u4e2d\u7684OH\u57fa\u4e2d\u95f4\u4ea7\u751f\u8131\u6c22\u7f9f\u919b\u7f29\u5408\uff0c\u4ea7\u751fSi-O-R\u952e\uff0c\u56e0\u800c\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u8fdb\u4e00\u6b65\u53d1\u5c55\u3002\u8fd9\u79cd\u9187\u5316\u5b66\u7269\u8d28\u4e2d\uff0c\u66f4\u7504\u9009\u78b3\u539f\u5b50\u6570\u5c0f\u4e14\u7194\u70b9\u4e3a100\u2103\u4ee5\u5185\u7684\u5de5\u4e1a\u7532\u9187\u3001\u4e59\u9178\u4e59\u916f\u30011-\u4e19\u9187\u3001\u6216\u662f2-\u4e19\u9187\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u505a\u4e3a\u4f5c\u4e3a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u4ee5\u4e0a\u915a\u5316\u5b66\u7269\u8d28\u7684\u8be6\u5c3d\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u7532\u9178\u3001\u90bb\u7532\u915a\u3001\u95f4\u7532\u915a\u3001\u5bf9\u7532\u915a\u3001\u90bb\u4e59\u57fa\u7532\u9178\u3001\u95f4\u4e59\u57fa\u7532\u9178\u3001\u5bf9\u4e59\u57fa\u7532\u9178\u3001\u90bb\u4e01\u57fa\u7532\u9178\u3001\u95f4\u4e01\u57fa\u7532\u9178\u3001\u5bf9\u4e01\u57fa\u7532\u9178\u30012,3-\u4e8c\u7532\u82ef\u915a\u30012,4-\u4e8c\u7532\u82ef\u915a\u30012,5-\u4e8c\u7532\u82ef\u915a\u30012,6-\u4e8c\u7532\u82ef\u915a\u30013,4-\u4e8c\u7532\u82ef\u915a\u30013,5-\u4e8c\u7532\u82ef\u915a\u30012,3,5-\u4e09\u7532\u57fa\u82ef\u915a\u30013,4,5-\u4e09\u7532\u57fa\u82ef\u915a\u3001\u90bb\u82ef\u4e8c\u915a\u3001\u95f4\u82ef\u4e8c\u915a\u3001\u90bb\u82ef\u4e09\u915a\u3001\u03b1-\u8418\u915a\u3001\u03b2-\u8418\u915a\u7b49\u3002\u915a\u5316\u5b66\u7269\u8d28\u4e5f\u4e0e\u4ee5\u4e0a\u7684\u9187\u5316\u5b66\u7269\u8d28\u7c7b\u540c\uff0c\u5728\u6539\u6027\u6750\u6599\u89e3\u51b3\u65f6\uff0c\u5728\u805a\u7845\u6c2e\u70f7\u7684\u6846\u67b6\u53ef\u5e26\u6709\u7684Si-H\u57fa\u4e0e\u915a\u5316\u5b66\u7269\u8d28\u4e2d\u7684OH\u57fa\u4e2d\u95f4\u4ea7\u751f\u8131\u6c22\u7f9f\u919b\u7f29\u5408\uff0c\u4ea7\u751fSi-O-R\u952e\uff0c\u56e0\u800c\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u8fdb\u4e00\u6b65\u53d1\u5c55\u3002\n\t\t\t\t\t<\/p>\n

    \n\t\t\t\t\t\t\u505a\u4e3a\u4f5c\u4e3a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\uff0c\u53ef\u5217\u4e3e\u94cd(Be)\u3001\u787c(B)\u3001\u9541(Mg)\u3001\u94dd(Al)\u3001\u7845(Si)\u3001\u9499(Ca)\u3001\u94aa(Sc)\u3001\u949b(Ti)\u3001\u9492(V)\u3001\u94ec(Cr)\u3001\u9530(Mn)\u3001\u94c1(Fe)\u3001\u94b4(Co)\u3001\u954d(Ni)\u3001\u94dc(Cu)\u3001\u950c(Zn)\u3001\u9553(Ga)\u3001\u9517(Ge)\u3001\u9536(Sr)\u3001\u9487(Y)\u3001\u9506(Zr)\u3001\u94cc(Nb)\u3001\u94bc(Mo)\u3001\u951d(Tc)\u3001\u948c(Ru)\u3001\u94d1(Rh)\u3001\u94af(Pd)\u3001\u94f6(Ag)\u3001\u9549(Cd)\u3001\u94df(In)\u3001\u9521(Sn)\u3001\u94a1(Ba)\u3001\u9567(La)\u3001\u94c8(Ce)\u3001\u9568(Pr)\u3001\u9495(Nd)\u3001\u94b7(Pm)\u3001\u9490(Sm)\u3001\u94d5(Eu)\u3001\u9486(Gd)\u3001\u94fd(Tb)\u3001\u955d(Dy)\u3001\u94ac(Ho)\u3001\u94d2(Er)\u3001\u94e5(Tm)\u3001\u9571(Yb)\u3001\u954f(Lu)\u3001\u94ea(Hf)\u3001\u94bd(Ta)\u3001\u94a8(W)\u3001\u94fc(Re)\u3001\u9507(Os)\u3001\u94f1(Ir)\u3001\u94c2(Pt)\u3001\u91d1(Au)\u3001\u6c5e(Hg)\u3001\u94ca(Tl)\u3001\u94c5(Pb)\u3001\u956d(Ra)\u7b49\u957f\u5468\u671f\u578b\u5316\u5b66\u5143\u7d20\u8868\u7684\u7b2c2\uff5e14\u65cf\u539f\u7d20\u7684\u9187\u76d0\u3002\n\t\t\t\t\t<\/p>\n<\/td>\n<\/tr>\n

    \n
      \n\t\t\t\t\t\t<\/ul>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      \n\t\t\u505a\u4e3a\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u7684\u66f4\u8be6\u5c3d\u7684\u4e8b\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u4e59\u9170\u4e19\u916e\u94cd\u3001\u787c\u9178\u4e09\u7532\u916f\u3001\u787c\u9178\u4e09\u4e59\u916f\u3001\u787c\u9178\u4e09\u6b63\u4e19\u916f\u3001\u787c\u9178\u4e09\u5f02\u4e19\u916f\u3001\u787c\u9178\u4e09\u6b63\u4e01\u916f\u3001\u787c\u9178\u4e09\u53d4\u4e01\u916f\u3001\u4e59\u9178\u4e59\u916f\u9541\u3001\u4e59\u57fa\u82ef\u4e59\u9178\u4e59\u916f\u9541\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u9541\u3001\u4e59\u9170\u4e19\u916e\u9541\u3001\u4e09\u5de5\u4e1a\u7532\u9187\u94dd\u3001\u4e09\u4e59\u9178\u4e59\u916f\u94dd\u3001\u4e09\u6b63\u9187\u94dd\u3001\u4e09\u5f02\u4e19\u9187\u94dd\u3001\u4e09\u6b63\u4e01\u9187\u94dd\u3001\u4e09\u4ef2\u4e01\u9187\u94dd\u3001\u4e09\u53d4\u4e01\u9187\u94dd\u3001\u4e59\u9170\u4e19\u916e\u94dd\u3001\u4e59\u9170\u70f7\u6c27\u57fa\u4e8c\u5f02\u4e19\u9187\u94dd\u3001\u4e59\u9170\u4e59\u9178\u4e59\u916f\u00b7\u4e8c\u5f02\u4e19\u9187\u94dd\u3001\u4e59\u9170\u4e59\u9178\u4e59\u916f\u4e8c\u6b63\u4e01\u9187\u94dd\u3001\u4e8c\u4e59\u9170\u4e59\u9178\u4e59\u916f\u5355\u6b63\u4e01\u9187\u94dd\u3001\u5355\u4ef2\u4e01\u9187\u4e8c\u5f02\u4e19\u9187\u94dd\u3001\u4e09\u4e59\u9170\u4e19\u916e\u94dd\u3001\u4e09\u4e59\u9170\u4e59\u9178\u4e59\u916f\u94dd\u3001\u53cc(\u4e59\u9170\u4e59\u9178\u4e59\u916f)(2,4-\u620a\u4e8c\u916e)\u94dd\u3001\u4e59\u9170\u4e59\u9178\u7532\u57fa\u916f\u4e8c\u5f02\u4e19\u9187\u94dd\u3001\u4e19\u916e\u6c27\u94dd\u4e09\u805a\u4f53(aluminium\u00a0oxide\u00a0isopropoxide\u00a0trimer)\u3001\u8f9b\u9187\u6c27\u94dd\u4e09\u805a\u4f53(aluminium\u00a0oxide\u00a0octylate\u00a0trimer)\u3001\u5de5\u4e1a\u7532\u9187\u9499\u3001\u4e59\u9178\u4e59\u916f\u9499\u3001\u4e19\u916e\u9499\u3001\u4e59\u9170\u4e19\u916e\u9499\u3001\u4e59\u9170\u4e19\u916e\u94aa\u3001\u56db\u5de5\u4e1a\u7532\u9187\u949b\u3001\u56db\u4e59\u9178\u4e59\u916f\u949b\u3001\u56db\u6b63\u4e19\u9187\u949b\u3001\u56db\u5f02\u4e19\u9187\u949b\u3001\u56db\u6b63\u4e01\u9187\u949b\u3001\u56db\u5f02\u4e01\u9187\u949b\u3001\u4e8c\u4e19\u916e\u4e8c\u6b63\u4e01\u9187\u949b\u3001\u4e8c\u53d4\u4e01\u9187\u4e8c\u5f02\u4e19\u9187\u949b\u3001\u56db\u53d4\u4e01\u9187\u949b\u3001\u56db\u5f02\u8f9b\u9187\u949b\u3001\u56db\u786c\u8102\u9187\u949b\u3001\u4e09\u5f02\u4e01\u9187\u6c27\u9492\u3001\u4e09(2,4-\u620a\u4e8c\u916e)\u94ec\u3001\u6b63\u4e19\u9187\u94ec\u3001\u4e19\u916e\u94ec\u3001\u5de5\u4e1a\u7532\u9187\u9530\u3001\u4e09(2,4-\u620a\u4e8c\u916e)\u9530\u3001\u5de5\u4e1a\u7532\u9187\u94c1\u3001\u4e59\u9178\u4e59\u916f\u94c1\u3001\u6b63\u4e19\u9187\u94c1\u3001\u4e19\u916e\u94c1\u3001\u4e09(2,4-\u620a\u4e8c\u916e)\u94c1\u3001\u4e19\u916e\u94b4\u3001\u4e09(2,4-\u620a\u4e8c\u916e)\u94b4\u3001\u4e59\u9170\u4e19\u916e\u954d\u3001\u5de5\u4e1a\u7532\u9187\u94dc\u3001\u4e59\u9178\u4e59\u916f\u94dc\u3001\u4e19\u916e\u94dc\u3001\u4e59\u9170\u4e19\u916e\u94dc\u3001\u4e59\u9178\u4e59\u916f\u950c\u3001\u4e59\u57fa\u82ef\u4e59\u9178\u4e59\u916f\u950c\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u950c\u3001\u5de5\u4e1a\u7532\u9187\u9553\u3001\u4e59\u9178\u4e59\u916f\u9553\u3001\u4e19\u916e\u9553\u3001\u4e59\u9170\u4e19\u916e\u9553\u3001\u5de5\u4e1a\u7532\u9187\u9517\u3001\u4e59\u9178\u4e59\u916f\u9517\u3001\u4e19\u916e\u9517\u3001\u6b63\u4e01\u9187\u9517\u3001\u53d4\u4e01\u9187\u9517\u3001\u4e59\u57fa\u4e09\u4e59\u6c27\u57fa\u9517\u3001\u4e19\u916e\u9536\u3001\u6b63\u4e19\u9187\u9487\u3001\u4e19\u916e\u9487\u3001\u4e59\u9170\u4e19\u916e\u9487\u3001\u4e59\u9178\u4e59\u916f\u9506\u3001\u6b63\u4e19\u9187\u9506\u3001\u4e19\u916e\u9506\u3001\u4e01\u9187\u9506\u3001\u53d4\u4e01\u9187\u9506\u3001\u56db(2,4-\u620a\u4e8c\u916e)\u9506\u3001\u4e59\u9178\u4e59\u916f\u94cc\u3001\u6b63\u4e01\u9187\u94cc\u3001\u53d4\u4e01\u9187\u94cc\u3001\u4e59\u9178\u4e59\u916f\u94bc\u3001\u4e59\u9170\u4e19\u916e\u94bc\u3001\u4e59\u9170\u4e19\u916e\u94af\u3001\u4e59\u9170\u4e19\u916e\u94f6\u3001\u4e59\u9170\u4e19\u916e\u9549\u3001\u4e09(2,4-\u620a\u4e8c\u916e)\u94df\u3001\u4e19\u916e\u94df\u3001\u4e19\u916e\u94df\u3001\u6b63\u4e01\u9187\u94df\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u94df\u3001\u6b63\u4e01\u9187\u9521\u3001\u53d4\u4e01\u9187\u9521\u3001\u4e59\u9170\u4e19\u916e\u9521\u3001\u4e8c\u4e19\u916e\u94a1\u3001\u53d4\u4e01\u9187\u94a1\u3001\u4e59\u9170\u4e19\u916e\u94a1\u3001\u4e19\u916e\u9567\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u9567\u3001\u4e59\u9170\u4e19\u916e\u9567\u3001\u6b63\u4e01\u9187\u94c8\u3001\u53d4\u4e01\u9187\u94c8\u3001\u4e59\u9170\u4e19\u916e\u94c8\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u9568\u3001\u4e59\u9170\u4e19\u916e\u9568\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u9495\u3001\u4e59\u9170\u4e19\u916e\u9495\u3001\u53d4\u4e01\u57fa\u4e59\u9178\u4e59\u916f\u9495\u3001\u4e19\u916e\u9490\u3001\u4e59\u9170\u4e19\u916e\u9490\u3001\u4e59\u9170\u4e19\u916e\u94d5\u3001\u4e59\u9170\u4e19\u916e\u9486\u3001\u4e59\u9170\u4e19\u916e\u94fd\u3001\u4e59\u9170\u4e19\u916e\u94ac\u3001\u4e59\u9170\u4e19\u916e\u9571\u3001\u4e59\u9170\u4e19\u916e\u954f\u3001\u4e59\u9178\u4e59\u916f\u94ea\u3001\u6b63\u4e01\u9187\u94ea\u3001\u53d4\u4e01\u9187\u94ea\u3001\u4e59\u9170\u4e19\u916e\u94ea\u3001\u5de5\u4e1a\u7532\u9187\u94bd\u3001\u4e59\u9178\u4e59\u916f\u94bd\u3001\u6b63\u4e01\u9187\u94bd\u3001\u4e01\u9187\u94bd\u3001\u56db\u53d4\u4e01\u57fa\u4e59\u9170\u4e19\u916e\u94bd\u3001\u4e59\u9178\u4e59\u916f\u94a8\u3001\u4e59\u9170\u4e19\u916e\u94f1\u3001\u4e8c\u7fb0\u57fa\u4e59\u9170\u4e19\u916e\u94f1\u3001\u4e59\u9178\u4e59\u916f\u94ca\u3001\u4e59\u9170\u4e19\u916e\u94ca\u3001\u4e59\u9170\u4e19\u916e\u94c5\u53ca\u5176\u5177\u5907\u4ee5\u4e0b\u6784\u9020\u7684\u6c27\u5316\u7269\u7b49\u3002\n\t<\/p>\n

      \n\t\t\n\t<\/p>\n

      \n\t\t\u5728\u5176\u4e2d\uff0cn\uff1d1\uff5e10\u7684\u6574\u6570\u91d1\u989d\n\t<\/p>\n

      \n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\uff0c\u4e5f\u53ef\u5e94\u7528\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3002\n\t<\/p>\n

      \n\t\t\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(Silsesquioxane)\u662f\u78b3\u94fe\u6846\u67b6\u7531Si-O\u952e\u4ea7\u751f\u7684\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u7cfb\u7684\u5316\u5b66\u7269\u8d28\uff0c\u4e5f\u88ab\u79f0\u4f5cT\u73af\u6c27\u6811\u8102\uff0c\u901a\u5e38\u7684\u4e8c\u6c27\u5316\u7845\u7531\u7ed3\u6784\u5f0f\u3014SiO2<\/sub>\u3015\u8868\u9732\u4e3b\u8981\u8868\u73b0\uff0c\u800c\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(\u4e5f\u79f0\u4e4b\u4e3a\u805a\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7)\u4e3a\u7531\u7ed3\u6784\u5f0f\u3014RSiO1.5<\/sub>\u3015\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u5316\u5b66\u7269\u8d28\u3002\u901a\u5e38\u662f\u4ee5\u56db\u4e59\u6c27\u57fa\u6c2f\u7845\u70f7\u4e3a\u8c61\u5f81\u7684\u56db\u70f7\u6c27\u57fa\u6c2f\u7845\u70f7(Si(OR\u2019)4<\/sub>)\u76841\u4e2a\u70f7\u6c27\u57fa\u88ab\u7532\u57fa\u6216\u662f\u82b3\u9999\u65cf\u5e96\u4ee3\u800c\u5f97\u7684(RSi(OR\u2019)3<\/sub>)\u5316\u5b66\u7269\u8d28\u6839\u636e\u6c34\u89e3\u53cd\u5e94-\u7f29\u805a\u800c\u751f\u6210\u7684\u7845\u6c27\u70f7\uff0c\u505a\u4e3a\u5206\u5b50\u7ed3\u6784\u6392\u5e8f\u7684\u5916\u89c2\u8bbe\u8ba1\uff0c\u8c61\u5f81\u6027\u7684\u6709\u4e0d\u5b9a\u5f62\u3001\u68af\u72b6\u3001\u7b3c\u5f62(\u5f7b\u5e95\u7f29\u5408\u53cd\u5e94\u7b3c\u5f62)\u3002\n\t<\/p>\n

      \n\t\t\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u53ef\u4ee5\u88ab\u751f\u6210\u6216\u662f\u53ef\u4ee5\u662f\u5e02\u552e\u54c1\u3002\u505a\u4e3a\u540e\u8005\u7684\u8be6\u5c3d\u4f8b\uff0c\u53ef\u5217\u4e3eX-40-2308\u3001X-40-9238\u3001X-40-9225\u3001X-40-9227\u3001x-40-9246\u3001KR-500\u3001KR-510(\u5747\u4e3a\u4fe1\u8d8a\u5316\u5b66\u5de5\u4e1a\u751f\u4ea7\u682a\u5f0f\u5236)\u3001SR2400\u3001SR2402\u3001SR2405\u3001FOX14(\u5168\u6c22\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7)(\u5747\u4e3aDow\u00a0Corning\u00a0Toray\u682a\u5f0f\u5236)\u3001SST-H8H01(\u5168\u6c22\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7)(Gelest\u516c\u53f8\u5236)\u7b49\u3002\n\t<\/p>\n

      \n\t\t\u8fd9\u79cd\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u4e2d\uff0c\u4ece\u53cd\u6620\u6027\u3001\u6d88\u6eb6\u6027\u7b49\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u5177\u5907\u78b3\u952e\u72b6\u7684\u70f7\u6c27\u57fa\u7684\u5316\u5b66\u7269\u8d28\uff0c\u66f4\u7504\u9009\u5177\u59072-\u4e19\u6c27\u57fa\u6216\u662f\u4ef2\u4e01\u6c27\u57fa\u7684\u5316\u5b66\u7269\u8d28\u3002\n\t<\/p>\n

      \n\t\t\u6b64\u5916\uff0c\u8fd8\u7504\u9009\u5177\u5907\u4e59\u9170\u4e19\u916e\u57fa\u7684\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u3002\u4e59\u9170\u4e19\u916edna\u7fb0\u57fa\u6784\u9020\u4e0e\u9187\u76d0\u5316\u5b66\u7269\u8d28\u7684\u6b63\u4e2d\u95f4\u539f\u7d20\u76f8\u4e92\u5f71\u54cd\uff0c\u56e0\u6b64\u53ef\u64cd\u4f5c\u6027\u8d8a\u6765\u8d8a\u975e\u5e38\u5bb9\u6613\uff0c\u56e0\u6b64\u7504\u9009\u3002\u4ece\u53cd\u6620\u6027\u3001\u819c\u6784\u6210\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u66f4\u7504\u9009\u5177\u5907\u591a\u79cd\u591a\u6837\u4ee5\u4e0a\u7684\u9187\u76d0\u57fa\u6216\u662f\u4e59\u9170\u4e19\u916e\u57fa\u7684\u5316\u5b66\u7269\u8d28\u3002\n\t<\/p>\n

      \n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u7684\u6b63\u4e2d\u95f4\u539f\u7d20\uff0c\u7504\u9009\u975e\u5e38\u5bb9\u6613\u4e0e\u805a\u7845\u6c2e\u70f7\u4e2d\u7684\u6c2e\u539f\u5b50\u4ea7\u751f\u914d\u4f4d\u952e\u7684\u539f\u7d20\uff0c\u66f4\u7504\u9009\u8def\u6613\u65af\u9178\u9ad8\u671d\u7684Al\u3001Fe\u6216\u662fB\u3002\n\t<\/p>\n

      \n\t\t\u66f4\u7504\u9009\u7684\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\uff0c\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5217\u4e3e\u787c\u9178\u4e09\u5f02\u4e19\u916f\u3001\u4e09\u4ef2\u4e01\u9187\u94dd\u3001\u4e59\u9170\u4e59\u9178\u4e59\u916f\u00b7\u4e8c\u5f02\u4e19\u9187\u94dd\u3001\u4e19\u916e\u9499\u3001\u56db\u5f02\u4e19\u9187\u949b\u3001\u4e19\u916e\u9553\u3001\u5355\u4ef2\u4e01\u9187\u4e8c\u5f02\u4e19\u9187\u94dd\u3001\u4e59\u9170\u4e59\u9178\u4e59\u916f\u4e8c\u6b63\u4e01\u9187\u94dd\u3001\u6216\u662f\u4e8c\u4e59\u9170\u4e59\u9178\u4e59\u916f\u5355\u6b63\u4e01\u9187\u94dd\u3002\n\t<\/p>\n

      \n\t\t\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u53ef\u4ee5\u5e94\u7528\u5e02\u552e\u54c1\u8fd8\u53ef\u4ee5\u5e94\u7528\u5408\u4ea7\u54c1\u3002\u505a\u4e3a\u5e02\u552e\u54c1\u7684\u8be6\u5c3d\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3eAMD(\u5355\u4ef2\u4e01\u9187\u4e8c\u5f02\u4e19\u9187\u94dd)\u3001ASBD(\u4ef2\u4e01\u9187\u94dd)\u3001ALCH(\u4e59\u9170\u4e59\u9178\u4e59\u916f\u00b7\u4e8c\u5f02\u4e19\u9187\u94dd)\u3001ALCH-TR(\u4e09\u4e59\u9170\u4e59\u9178\u4e59\u916f\u94dd)\u3001Alumichelate\u00a0M(\u4e59\u9170\u4e59\u9178\u7532\u57fa\u916f\u00b7\u4e8c\u5f02\u4e19\u9187\u94dd)\u3001Alumichelate\u00a0D(\u53cc\u4e59\u9170\u4e59\u9178\u4e59\u916f\u00b7\u5355\u4e59\u9170\u4e19\u916e\u94dd)\u3001Alumichelate\u00a0A(W)(\u4e09\u4e59\u9170\u4e19\u916e\u94dd)(\u4ee5\u4e0a\u4e3aKawaken\u00a0Fine\u00a0Chemicals\u682a\u5f0f\u5236)\u3001PLENACT(\u5546\u6807\u6ce8\u518c)AL-M(\u4e59\u9170\u70f7\u6c27\u57fa\u4e8c\u5f02\u4e19\u9187\u94dd\uff0cAjinomoto\u00a0Fine\u00a0Chemical\u682a\u5f0f\u5236)\u3001Olga\u00a0Chicks\u7cfb\u5217(Matsumoto\u00a0Fine\u00a0Chemical\u682a\u5f0f\u5236)\u7b49\u3002\n\t<\/p>\n

      \n\t\t\u5e94\u4e88\u8868\u660e\uff0c\u5e94\u7528\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u65f6\uff0c\u7504\u9009\u5728\u7a00\u6709\u6c14\u4f53\u6c14\u6c1b\u4e0b\u4e0e\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u7684\u9971\u548c\u6eb6\u6db2\u6df7\u548c\u3002\u8fd9\u4e5f\u662f\u4e3a\u4e86\u66f4\u597d\u5730\u6291\u5236\u91d1\u5c5e\u6750\u6599\u9187\u76d0\u5316\u5b66\u7269\u8d28\u4e0e\u7a7a\u6c14\u4e2d\u7684\u6c34\u4efd\u3001\u6c27\u53cd\u6620\uff0c\u7a7a\u6c14\u6c27\u5316\u731b\u70c8\u5f00\u5c55\u3002\n\t<\/p>\n

      \n\t\t\u505a\u4e3a\u4ee5\u4e0a\u7532\u57fa\u80fa\u5316\u5b66\u7269\u8d28\u7684\u8be6\u5c3d\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u7532\u80fa\u3001\u4e59\u80fa\u3001\u4e19\u80fa\u3001\u6b63\u4e01\u80fa\u3001\u4ef2\u4e01\u80fa\u3001\u53d4\u4e01\u80fa\u30013-\u5417\u5549\u57fa\u4e19\u80fa\u7b49\u4f2f\u80fa\u5316\u5b66\u7269\u8d28\uff1b\u4e8c\u7532\u80fa\u3001\u4e8c\u4e59\u80fa\u3001\u7f9f\u57fa\u4e59\u57fa\u80fa\u3001\u4e8c\u4e19\u80fa\u3001\u4e8c(\u6b63\u4e01\u57fa)\u80fa\u3001\u4e8c(\u4ef2\u4e01\u57fa)\u80fa\u3001\u4e8c(\u53d4\u4e01\u57fa)\u80fa\u7b49\u4ef2\u80fa\u5316\u5b66\u7269\u8d28\uff1b\u4e09\u7532\u80fa\u3001\u4e09\u4e59\u80fa\u3001\u4e8c\u7532\u57fa\u4e59\u57fa\u80fa\u3001\u7f9f\u57fa\u4e8c\u4e59\u57fa\u80fa\u3001\u4e09\u4e19\u80fa\u3001\u4e09(\u6b63\u4e01\u57fa)\u80fa\u3001\u4e09(\u4ef2\u4e01\u57fa)\u80fa\u3001\u4e09(\u53d4\u4e01\u57fa)\u80fa\u3001N,N-\u4e8c\u7532\u57fa\u4e59\u9187\u80fa\u3001N,N-\u4e8c\u4e59\u57fa\u4e59\u9187\u80fa\u3001\u4e09\u4e59\u9187\u80fa\u7b49\u53d4\u80fa\u5316\u5b66\u7269\u8d28\u7b49\u3002\n\t<\/p>\n

      \n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u4ee5\u4e0a\u7532\u57fa\u80fa\u5316\u5b66\u7269\u8d28\uff0c\u53ef\u5e94\u7528\u4e8c\u80fa\u5316\u5b66\u7269\u8d28\u3002\u505a\u4e3a\u4e8c\u80fa\u5316\u5b66\u7269\u8d28\u7684\u8be6\u5c3d\u4f8b\uff0c\u53ef\u5217\u4e3e\u56db\u7f9f\u57fa\u7532\u70f7\u6c14\u4f53\u4e8c\u80fa\u3001\u56db\u7f9f\u57fa\u5df1\u70f7\u4e8c\u80fa\u3001\u56db\u7f9f\u57fa\u4e01\u70f7\u4e8c\u80fa(\u56db\u7f9f\u57fa\u4e8c\u7f9f\u57fa\u4e01\u70f7)\u3001\u56db\u7f9f\u57fa\u4e01\u70f7\u4e8c\u80fa\u3001\u56db\u7f9f\u57fa\u620a\u70f7\u4e8c\u80fa\u3001\u56db\u7f9f\u57fa\u5df1\u70f7\u4e8c\u80fa\u3001\u56db\u4e59\u57fa\u7532\u70f7\u6c14\u4f53\u4e8c\u80fa\u3001\u56db\u4e59\u57fa\u5df1\u70f7\u4e8c\u80fa\u3001\u56db\u4e59\u57fa\u4e01\u70f7\u4e8c\u80fa\u3001\u56db\u4e59\u57fa\u4e01\u70f7\u4e8c\u80fa\u3001\u56db\u4e59\u57fa\u620a\u70f7\u4e8c\u80fa\u3001\u56db\u4e59\u57fa\u5df1\u4e8c\u80fa\u3001N,N,N\u2019,N\u2019-\u56db\u7f9f\u57fa-1,6-\u4e8c\u7f9f\u57fa\u5df1\u70f7(TMDAH)\u3001\u56db\u7532\u57fa\u80cd\u7b49\u3002\n\t<\/p>\n

      \n\t\t\u6b64\u5916\uff0c\u5177\u5907\u7532\u57fa\u7684\u7532\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u3001\u5177\u5907\u70f7\u6c27\u57fa\u7684\u70f7\u6c27\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u548c\u5177\u5907\u7532\u57fa\u7f9f\u57fa\u7684\u7532\u57fa\u7f9f\u57fa\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u7b49\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u4e5f\u53ef\u7504\u9009\u4f5c\u4e3a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u3002\n\t<\/p>\n

      \n\t\t\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u53ef\u7504\u9009\u5e94\u7528\u4ee5\u4e0b\u7ed3\u6784\u5f0f(4)\u6216\u662f\u7ed3\u6784\u5f0f(5)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u7845\u6c27\u70f7\u7c7b\u3002\n\t<\/p>\n

      \n\t\t\n\t<\/p>\n

      \n\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(4)\u548c\u7ed3\u6784\u5f0f(5)\u4e2d\uff0cR4<\/sup>\uff5eR7<\/sup>\u5206\u522b\u81ea\u529b\u5730\u4e3a\u6c22\u539f\u5b50\u3001\u7532\u57fa\u3001\u7532\u57fa\u3001\u70ef\u57fa\u3001\u7094\u57fa\u3001\u70f7\u6c27\u57fa\u3001\u7532\u57fa\u7f9f\u57fa\u3001\u6216\u662f\u5e96\u4ee3\u6216\u65e0\u5e96\u4ee3\u7684\u82b3\u9999\u65cf\uff0c\u8fd9\u65f6\uff0cR4<\/sup>\u548cR5<\/sup>\u4e2d\u7684\u6700\u5c111\u4e2a\u53ca\u5176R6<\/sup>\u548cR7<\/sup>\u4e2d\u7684\u6700\u5c111\u4e2a\u4e3a\u7532\u57fa\u3001\u70f7\u6c27\u57fa\u3001\u6216\u662f\u7532\u57fa\u7f9f\u57fa\uff0c\n\t<\/p>\n

      \n\t\tp\u548cq\u5206\u522b\u81ea\u529b\u5730\u4e3a1\u4ee5\u4e0a\u7684\u6574\u6570\u91d1\u989d\u3002\n\t<\/p>\n

      \n\t\t\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u53ef\u4ee5\u5e94\u7528\u5e02\u552e\u54c1\u8fd8\u53ef\u4ee5\u5e94\u7528\u5408\u4ea7\u54c1\u3002\u505a\u4e3a\u5e02\u552e\u54c1\u7684\u4e8b\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3eX-40-2651\u3001X-40-2655A\u3001KR-513\u3001KC-89S\u3001KR-500\u3001X-40-9225\u3001X-40-9246\u3001X-40-9250\u3001KR-401N\u3001X-40-9227\u3001X-40-9247\u3001KR-510\u3001KR9218\u3001KR-213\u3001X-40-2308\u3001X-40-9238(\u4ee5\u4e0a\u4e3a\u4fe1\u8d8a\u5316\u5b66\u5de5\u4e1a\u751f\u4ea7\u682a\u5f0f\u5236)\u7b49\u3002\n\t<\/p>\n

      \n\t\t\u4ee5\u4e0a\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u4e2d\u7684\u7532\u57fa\u3001\u70f7\u6c27\u57fa\u6216\u662f\u7532\u57fa\u7f9f\u57fa\u7684\u6539\u6027\u6750\u6599\u5ea6\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u6469\u5c14\u6570\uff0c\u7504\u9009\u4e3a5\u514b\u5206\u5b50\uff05\uff5e50\u514b\u5206\u5b50\uff05\uff0c\u66f4\u7504\u9009\u4e3a7\u514b\u5206\u5b50\uff05\uff5e20\u514b\u5206\u5b50\uff05\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a8\u514b\u5206\u5b50\uff05\uff5e12\u514b\u5206\u5b50\uff05\u3002\n\t<\/p>\n

      \n\t\t\u6539\u6027\u6750\u6599\u7845\u6c27\u70f7\u7684\u805a\u4e59\u70ef\u8f6c\u6362\u7684\u91cd\u5747\u5206\u5b50\u91cf\u7504\u9009\u4e3a1000\uff5e100000\u4e0a\u4e0b\uff0c\u66f4\u7504\u9009\u4e3a2000\uff5e50000\u3002\n\t<\/p>\n

      \n\t\t(\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2)\n\t<\/p>\n

      \n\t\t\u505a\u4e3a\u7528\u4ee5\u5236\u53d6\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u6709\u673a\u6eb6\u5242\uff0c\u53ea\u9700\u53ef\u6d88\u6eb6\u4ee5\u4e0a\u805a\u7845\u6c2e\u70f7\u548c\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u5c31\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u6ca1\u6709\u975e\u5e38\u5bb9\u6613\u4e0e\u805a\u7845\u6c2e\u70f7\u53cd\u6620\u7684\u6c34\u548c\u53cd\u6620\u6027\u5b98\u80fd\u56e2(\u6bd4\u5982\uff0c\u7532\u57fa\u6216\u662f\u80fa\u57fa\u7b49)\u4e14\u5bf9\u805a\u7845\u6c2e\u70f7\u4e3b\u8981\u8868\u73b0\u53ef\u5851\u6027\u7684\u6709\u673a\u6eb6\u6db2\uff0c\u66f4\u7504\u9009\u975e\u53cd\u8d28\u5b50\u6027\u7684\u6709\u673a\u6eb6\u6db2\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u505a\u4e3a\u6709\u673a\u6eb6\u5242\uff0c\u53ef\u5217\u4e3e\u975e\u53cd\u8d28\u5b50\u6027\u6709\u673a\u6eb6\u6db2\uff1a\u6bd4\u5982\uff0c\u620a\u70f7\u3001\u5df1\u70f7\u3001\u73af\u5df1\u70f7\u3001\u4e8c\u7532\u82ef\u3001\u4e8c\u7532\u82ef\u3001Solvesso\u3001\u841c\u70ef\u7b49\u8102\u73af\u65cf\u70c3\u3001\u8102\u73af\u5f0f\u70c3\u3001\u82b3\u9999\u65cf\u70c3\u7b49\u70c3\u6709\u673a\u6eb6\u5242\uff1b\u4e8c\u6c2f\u7532\u70f7\u3001\u4e09\u6c2f\u4e59\u70f7\u7b49\u5e26\u6709\u5364\u7d20\u706f\u6ce1\u7684\u70c3\u6709\u673a\u6eb6\u5242\uff1b\u4e59\u9178\u4e01\u916f\u3001\u7532\u57fa\u53d4\u4e01\u57fa\u919a\u7b49\u8102\u7c7b\uff1b\u7532\u82ef\u3001\u7532\u57fa\u4e59\u57fa\u916e\u7b49\u5429\u567b\u55ea\uff1b\u4e8c\u4e01\u919a\u3001\u4e8c\u70f7\u3001\u56db\u6c22\u544b\u5583\u7b49\u8102\u73af\u65cf\u919a\u3001\u8102\u73af\u5f0f\u919a\u7b49\u919a\u7c7b\uff1a\u6bd4\u5982\u56db\u6c22\u544b\u5583\u3001\u4e8c\u4e01\u919a\u3001\u5355-\u548c\u805a\u70f7\u6491\u4e8c\u9187\u4e8c\u7532\u57fa\u919a(\u4e8c\u7518\u9187\u4e8c\u7532\u919a\u7c7b)\u7b49\u3002\u4ee5\u4e0a\u6709\u673a\u6eb6\u5242\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u4ee52\u79cd\u4ee5\u4e0a\u7684\u6df7\u5408\u7269\u8d28\u7684\u5f62\u72b6\u5e94\u7528\u3002\n\t<\/p>\n

      \n\t\t\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4e2d\u7684\u805a\u7845\u6c2e\u70f7\u7684\u6d53\u5ea6\u503c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u4f9d\u636e\u5c42\u7684\u819c\u539a\u3001\u65bd\u80f6\u6db2\u7684\u53ef\u7528\u671f\u800c\u4e0d\u4e00\u6837\uff0c\u7504\u9009\u4e3a1\uff5e80\u51c0\u91cd\uff05\uff0c\u66f4\u7504\u9009\u4e3a5\uff5e50\u51c0\u91cd\uff05\uff0c\u683c\u5916\u7504\u9009\u4e3a10\uff5e40\u51c0\u91cd\uff05\u3002\n\t<\/p>\n

      \n\t\t\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4e2d\u7684\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u9700\u6c42\u91cf\u76f8\u5bf9\u6027\u4e8e\u805a\u7845\u6c2e\u70f7\u7504\u9009\u4e3a1\uff5e50\u51c0\u91cd\uff05\uff0c\u66f4\u7504\u9009\u4e3a1\uff5e15\u51c0\u91cd\uff05\u3002\u5018\u82e5\u4e3a\u8be5\u8303\u7574\uff0c\u5219\u53ef\u4ee5\u6709\u6548\u5730\u83b7\u5f97\u672c\u4ea7\u54c1\u7684\u7b2c2\u9694\u7edd\u5c42\u3002\n\t<\/p>\n\n\n\n\n
      \n

      \n\t\t\t\t\t\t\u4e3a\u4e86\u66f4\u597d\u5730\u63a8\u52a8\u6539\u6027\u6750\u6599\uff0c\u7504\u9009\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u5e26\u6709\u91d1\u5c5e\u50ac\u5316\u5242\u3002\u505a\u4e3a\u53ef\u7528\u4ee5\u672c\u4ea7\u54c1\u7684\u91d1\u5c5e\u50ac\u5316\u5242\uff0c\u7504\u9009\u504f\u78b1\u91d1\u5c5e\u50ac\u5316\u5242\uff0c\u683c\u5916\u662f\u53ef\u5217\u4e3eN,N-\u4e8c\u4e59\u57fa\u4e59\u9187\u80fa\u3001N,N-\u4e8c\u7532\u57fa\u4e59\u9187\u80fa\u3001\u4e09\u4e59\u9187\u80fa\u3001\u4e09\u4e59\u80fa\u30013-\u5417\u5549\u57fa\u4e19\u80fa\u3001N,N,N\u2019,N\u2019-\u56db\u7f9f\u57fa-1,3-\u4e8c\u7f9f\u57fa\u4e01\u70f7\u3001N,N,N\u2019,N\u2019-\u56db\u7f9f\u57fa-1,6-\u4e8c\u7f9f\u57fa\u5df1\u70f7\u7b49\u80fa\u91d1\u5c5e\u50ac\u5316\u5242\uff0c\u4e59\u9170\u4e19\u916e\u94c2\u7b49\u94c2\u5316\u5b66\u7269\u8d28\u3001\u5df1\u9178\u94af\u7b49\u94af\u5316\u5b66\u7269\u8d28\u3001\u4e59\u9170\u4e19\u916e\u94d1\u7b49\u94d1\u5316\u5b66\u7269\u8d28\u7b49\u91d1\u5c5e\u786b\u5316\u7269\uff0cN-\u6742\u73af\u5316\u5408\u7269\u5f0f\u5316\u5b66\u7269\u8d28\u3002\u5728\u5176\u4e2d\uff0c\u7504\u9009\u5e94\u7528\u80fa\u91d1\u5c5e\u50ac\u5316\u5242\u3002\u505a\u4e3a\u8fd9\u65f6\u52a0\u4e0a\u7684\u91d1\u5c5e\u50ac\u5316\u5242\u7684\u6d53\u5ea6\u503c\uff0c\u4ee5\u7845\u5316\u5b66\u7269\u8d28\u4e3a\u57fa\u6309\u65f6\uff0c\u7504\u9009\u4e3a0.1\uff5e10\u51c0\u91cd\uff05\uff0c\u66f4\u7504\u9009\u4e3a0.5\uff5e7\u51c0\u91cd\uff05\u7684\u8303\u7574\u3002\u6839\u636e\u4f7f\u91d1\u5c5e\u50ac\u5316\u5242\u52a0\u4e0a\u91cf\u4e3a\u8be5\u8303\u7574\uff0c\u53ef\u4ee5\u9632\u6b62\u53cd\u6620\u7684\u731b\u70c8\u5f00\u5c55\u800c\u5bfc\u81f4\u7684\u8fc7\u591a\u7684\u6c2f\u7845\u70f7\u9187\u4ea7\u751f\u548c\u819c\u76f8\u5bf9\u5bc6\u5ea6\u7684\u51cf\u5c11\u3001\u819c\u7f3a\u70b9\u7684\u6269\u5927\u7b49\u3002\u5e94\u4e88\u8868\u660e\uff0c\u8fd9\u79cd\u7269\u8d28\u4e2d\uff0c\u80fa\u91d1\u5c5e\u50ac\u5316\u5242\u8fd8\u53ef\u62c5\u8d1f\u7740\u505a\u4e3a\u4ee5\u4e0a\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u529f\u6548\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u4f9d\u636e\u5fc5\u9700\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4e2d\u53ef\u5e94\u7528\u4ee5\u4e0b\u4f8b\u4e3e\u7684\u6dfb\u52a0\u7269\u3002\u6bd4\u5982\uff0c\u7ea4\u7ef4\u7d20\u919a\u7c7b\u3001\u7ea4\u7ef4\u7d20\u916f\u7c7b\uff1a\u6bd4\u5982\u4e59\u57fa\u7ea4\u7ef4\u7d20\u3001\u6c1f\u82ef\u7532\u57fa\u7ea4\u7ef4\u7d20\u3001\u7532\u9178\u7532\u57fa\u7ea4\u7ef4\u7d20\u3001\u7532\u9178\u4e01\u9178\u7532\u57fa\u7ea4\u7ef4\u7d20\u7b49\uff1b\u5f53\u7136\u73af\u6c27\u6811\u8102\uff1a\u6bd4\u5982\u5851\u80f6\u3001\u677e\u9999\u6811\u8102\u7b49\uff1b\u9632\u8150\u8680\u6d82\u6599\uff1a\u6bd4\u5982\u6c47\u805a\u73af\u6c27\u6811\u8102\u7b49\uff1b\u7f29\u5408\u53cd\u5e94\u73af\u6c27\u6811\u8102\uff1a\u6bd4\u5982\u6c28\u57fa\u5851\u6599\u3001\u683c\u5916\u662f\u5c3f\u7d20\u6eb6\u6db2\u73af\u6c27\u6811\u8102\u3001\u4e09\u805a\u6c30\u80fa\u7532\u919b\u6811\u8102\u3001\u9187\u9178\u6811\u8102\u3001\u4e19\u70ef\u9178\u4e73\u6db2\u3001\u805a\u8102\u6216\u6539\u6027\u6750\u6599\u805a\u8102\u3001\u73af\u6c27\u5316\u7269\u3001\u805a\u4e19\u70ef\u9178\u916f\u6216\u5c01\u95ed\u6027\u805a\u4e19\u70ef\u9178\u916f\u3001\u7845\u6c27\u70f7\u7b49\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t(\u65bd\u80f6\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u65b9\u5f0f)\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u505a\u4e3a\u65bd\u80f6\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u65b9\u5f0f\uff0c\u53ef\u9009\u7528\u4e00\u5411\u81f3\u4eca\u516c\u77e5\u7684\u9002\u5ea6\u7684\u6e7f\u8bd5\u65bd\u80f6\u65b9\u5f0f\u3002\u505a\u4e3a\u8be6\u5c3d\u4f8b\uff0c\u53ef\u5217\u4e3e\u65cb\u6d82\u6cd5\u3001\u8f8a\u6d82\u6cd5\u3001\u6d41\u6d82\u6cd5\u3001\u55b7\u58a8\u6253\u5370\u673a\u6cd5\u3001\u55b7\u6f06\u6cd5\u3001\u5305\u88c5\u5370\u5237\u6cd5\u3001\u6d78\u6d82\u6cd5\u3001\u6d41\u5ef6\u6d82\u819c\u6cd5\u3001\u68d2\u6d82\u6cd5\u3001\u80f6\u7248\u5370\u5237\u6cd5\u7b49\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u65bd\u80f6\u8584\u539a\u53ef\u4f9d\u636e\u76ee\u5730\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u6bd4\u5982\uff0c\u7b2c2\u9694\u7edd\u5c42\u6bcf1\u5c42\u7684\u65bd\u80f6\u8584\u539a\uff0c\u7504\u9009\u5e72\u8e81\u540e\u7684\u8584\u539a\u4e3a10nm\uff5e10\u03bcm\u4e0a\u4e0b\uff0c\u66f4\u7504\u9009\u4e3a15nm\uff5e1\u03bcm\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a20\uff5e500nm\u3002\u5018\u82e5\u819c\u539a\u4e3a10nm\u4ee5\u4e0a\u5219\u53ef\u4ee5\u83b7\u5f97\u5145\u8db3\u7684\u9ad8\u963b\u9694\uff0c\u5018\u82e5\u4e3a10\u03bcm\u4e0b\u5217\uff0c\u5219\u5728\u5c42\u4ea7\u751f\u65f6\u53ef\u4ee5\u83b7\u5f97\u7a33\u5b9a\u7684\u65bd\u80f6\u6027\uff0c\u4e14\u53ef\u4ee5\u8fdb\u884c\u9ad8\u7684\u5149\u6e90\u7535\u5b50\u6563\u5c04\u6027\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u5c06\u65bd\u80f6\u6db2\u65bd\u80f6\u540e\u7684\u6d82\u5c42\u7684\u5e72\u8e81\u65b9\u5f0f\u3001\u5e72\u8e81\u6eab\u5ea6\u3001\u5e72\u8e81\u6642\u95f4\u548c\u5e72\u8e81\u6c1b\u56f4\u4e0e\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u201d\u9879\u4e2d\u8868\u660e\u7684\u9879\u76ee\u7c7b\u540c\uff0c\u56e0\u800c\u8fd9\u513f\u7701\u53bb\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u5c06\u65bd\u80f6\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u800c\u5f97\u7684\u6d82\u5c42\u7684\u6c34\u4efd\u53bb\u9664\u7684\u529e\u6cd5\u4e5f\u4e0e\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u201d\u9879\u4e2d\u8868\u660e\u7684\u9879\u76ee\u7c7b\u540c\uff0c\u56e0\u800c\u8fd9\u513f\u7701\u53bb\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u83b7\u5f97\u7684\u6d82\u5c42\u7684\u6539\u6027\u6750\u6599\u89e3\u51b3\u7684\u7504\u9009\u7684\u65b9\u5f0f\u4e0e\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u201d\u9879\u7684(\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3)\u548c(\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\uff1a\u51c6\u5206\u5b50\u76f4\u5c04\u89e3\u51b3)\u4e2d\u8868\u660e\u7684\u9879\u76ee\u7c7b\u540c\uff0c\u56e0\u800c\u8fd9\u513f\u7701\u53bb\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u5e94\u4e88\u8868\u660e\uff0c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5de5\u827a\u6d41\u7a0b\u4e2d\uff0c\u5728\u7531\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ea7\u751f\u7684\u6539\u5584\u9762\u7684\u8be5\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u5149\u7167\u5f3a\u5ea6\u7504\u9009\u4e3a1mW\/cm2<\/sup>\uff5e10W\/cm2<\/sup>\uff0c\u66f4\u7504\u9009\u4e3a30mW\/cm2<\/sup>\uff5e200mW\/cm2<\/sup>\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a50mW\/cm2<\/sup>\uff5e160mW\/cm2<\/sup>\u3002\u5c0f\u4e8e1mW\/cm2<\/sup>\u65f6\uff0c\u6539\u6027\u6750\u6599\u542c\u4ece\u5f88\u6709\u53ef\u80fd\u5927\u5e45\u5ea6\u51cf\u5c11\uff0c\u5018\u82e5\u8d85\u51fa10W\/cm2<\/sup>\uff0c\u5219\u5f88\u6709\u53ef\u80fd\u5728\u6d82\u5c42\u9020\u6210\u70e7\u8680\uff0c\u6216\u662f\u5bf9\u677f\u6750\u5bfc\u81f4\u635f\u5bb3\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u5728\u7531\u7b2c2\u9694\u7edd\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ea7\u751f\u7684\u6539\u5584\u9762\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u76f4\u5c04\u52a8\u80fd(\u76f4\u5c04\u91cf)\u7504\u9009\u4e3a10\uff5e10000mJ\/cm2<\/sup>\uff0c\u66f4\u7504\u9009\u4e3a100\uff5e8000mJ\/cm2<\/sup>\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a200\uff5e6000mJ\/cm2<\/sup>\u3002\u5c0f\u4e8e10mJ\/cm2<\/sup>\u65f6\uff0c\u6539\u6027\u6750\u6599\u5f88\u6709\u53ef\u80fd\u4e0d\u5145\u8db3\uff0c\u5018\u82e5\u8d85\u51fa10000mJ\/cm2<\/sup>\u5219\u5f88\u6709\u53ef\u80fd\u4ea7\u751f\u56e0\u8fc7\u591a\u6539\u6027\u6750\u6599\u800c\u5bfc\u81f4\u7684\u7f1d\u9699\u9020\u6210\u3001\u677f\u6750\u7684\u70ed\u5f62\u53d8\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u7b2c2\u9694\u7edd\u5c42\u7684\u819c\u76f8\u5bf9\u5bc6\u5ea6\u53ef\u4f9d\u636e\u76ee\u5730\u9002\u5ea6\u5730\u8bbe\u7f6e\u3002\u6bd4\u5982\uff0c\u7b2c2\u9694\u7edd\u5c42\u7684\u819c\u76f8\u5bf9\u5bc6\u5ea6\u7504\u9009\u57281.5\uff5e2.6g\/cm3<\/sup>\u7684\u8303\u7574\u3002\u5018\u82e5\u79bb\u53bb\u8be5\u8303\u7574\uff0c\u5219\u4e0d\u7ecf\u610f\u4ea7\u751f\u819c\u7684\u9ad8\u5bc6\u5ea6\u6027\u51cf\u5c11\u3001\u9ad8\u963b\u9694\u7684\u52a3\u53d8\u3001\u73af\u5883\u6e7f\u5ea6\u9020\u6210\u7684\u819c\u7684\u7a7a\u6c14\u6c27\u5316\u52a3\u53d8\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u8be5\u7b2c2\u9694\u7edd\u5c42\u53ef\u4ee5\u4e3a\u5355\u9762\u8fd8\u53ef\u4ee5\u4e3a2\u5c42\u4ee5\u4e0a\u7684\u91cd\u53e0\u6784\u9020\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u8be5\u7b2c2\u9694\u7edd\u5c42\u4e3a2\u5c42\u4ee5\u4e0a\u7684\u91cd\u53e0\u6784\u9020\u65f6\uff0c\u5404\u7b2c2\u9694\u7edd\u5c42\u53ea\u9700\u6ee1\u8db3\u4ee5\u4e0a\u56e0\u7d20\uff0c\u5219\u53ef\u4ee5\u4e3a\u7c7b\u540c\u7684\u6784\u6210\u8fd8\u53ef\u4ee5\u4e3a\u4e0d\u4e00\u6837\u7684\u6784\u6210\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u7b2c2\u9694\u7edd\u5c42\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u3001\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u3001\u53ca\u5176\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u4e0e\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u8d85\u51fa10nm\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u7684\u5dee\u53ef\u4ee5\u6839\u636e\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\u65f6\u91c7\u7528\u7684\u805a\u7845\u6c2e\u70f7\u548c\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u7c7b\u578b\u4e0e\u91cf\u53ca\u5176\u5bf9\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u548c\u52a0\u4e0a\u5316\u5b66\u7269\u8d28\u7684\u5c42\u5f00\u5c55\u6539\u6027\u6750\u6599\u65f6\u7684\u6807\u51c6\u7b49\u6765\u64cd\u7eb5\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u3014\u6838\u5fc3\u5c42\u3015\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u51fa\u81ea\u4e8e\u7f13\u89e3\u5185\u5e94\u529b\u7b49\u76ee\u5730\uff0c\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0e\u7b2c2\u9694\u7edd\u5c42\u4e2d\u95f4\u5177\u5907\u6838\u5fc3\u5c42\u3002\u505a\u4e3a\u4ea7\u751f\u8be5\u6838\u5fc3\u5c42\u7684\u65b9\u5f0f\uff0c\u53ef\u4ee5\u9009\u7528\u4ea7\u751f\u7845\u6c27\u70f7\u6539\u6027\u6750\u6599\u5c42\u7684\u65b9\u5f0f\u3002\u8be5\u65b9\u5f0f\u662f\u5229\u7528\u5c06\u5e26\u6709\u7845\u6c27\u70f7\u7684\u65bd\u80f6\u6db2\u884c\u9a76\u6e7f\u8bd5\u65bd\u80f6\u6cd5\u65bd\u80f6\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0a\u5e76\u70d8\u5e72\u540e\uff0c\u5bf9\u8be5\u5e72\u8e81\u800c\u5f97\u7684\u6d82\u5c42\u76f4\u5c04\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\uff0c\u8fdb\u800c\u4ea7\u751f\u6838\u5fc3\u5c42\u7684\u65b9\u5f0f\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u4e3a\u4e86\u66f4\u597d\u5730\u4ea7\u751f\u6838\u5fc3\u5c42\u800c\u5e94\u7528\u7684\u65bd\u80f6\u6db2\u7504\u9009\u5e26\u6709\u7845\u6c27\u70f7\u548c\u6709\u673a\u6eb6\u6db2\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u505a\u4e3a\u53ef\u7528\u4ee5\u4ea7\u751f\u6838\u5fc3\u5c42\u7684\u7845\u6c27\u70f7\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u683c\u5916\u7504\u9009\u4ee5\u4e0b\u7ed3\u6784\u5f0f(6)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6709\u673a\u5316\u5b66\u7845\u6c27\u70f7\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u5728\u672c\u6267\u884c\u65b9\u6cd5\u4e2d\uff0c\u505a\u4e3a\u7845\u6c27\u70f7\uff0c\u4ee5\u4ee5\u4e0b\u7ed3\u6784\u5f0f(6)\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u6709\u673a\u5316\u5b66\u7845\u6c27\u70f7\u4e3a\u4f8b\u5b50\u5f00\u5c55\u8868\u660e\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(6)\u4e2d\uff0cR8<\/sup>\uff5eR13<\/sup>\u5206\u522b\u81ea\u529b\u5730\u8868\u9732\u4e3b\u8981\u8868\u73b0\u78b3\u539f\u5b50\u65701\uff5e8\u7684\u6709\u673a\u5316\u5b66\u5b98\u80fd\u56e2\uff0c\u8fd9\u65f6\uff0cR8<\/sup>\uff5eR13<\/sup>\u4e2d\u7684\u6700\u5c111\u4e2a\u4e3a\u70f7\u6c27\u57fa\u6216\u662f\u7532\u57fa\uff0cm\u4e3a1\u4ee5\u4e0a\u7684\u6574\u6570\u91d1\u989d\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u505a\u4e3aR8<\/sup>\uff5eR13<\/sup>\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u78b3\u539f\u5b50\u65701\uff5e8\u7684\u6709\u673a\u5316\u5b66\u5b98\u80fd\u56e2\uff0c\u6bd4\u5982\uff0c\u53ef\u5217\u4e3e\u03b3-\u6c2f\u4e19\u57fa\u30013,3,3-\u4e09\u6c1f\u7532\u57fa\u7b49\u5364\u4ee3\u70f7\u57fa\uff0c\u7532\u57fa\u4e19\u70ef\u9178\u916f\u3001\u82ef\u57fa\u3001\u03b3-\u7f9f\u57fape\u9170\u6c27\u57fa\u4e19\u57fa\u7b49(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u57fa\u3001\u03b3-\u73af\u6c27\u6811\u8102\u4e19\u6c27\u57fa\u4e19\u57fa\u7b49\u542b\u73af\u6c27\u6811\u8102\u57fa\u7684\u7532\u57fa\u3001\u03b3-\u5def\u57fa\u4e19\u57fa\u7b49\u542b\u5def\u57fa\u7684\u7532\u57fa\u3001\u03b3-\u7f9f\u57fa\u4e19\u57fa\u7b49\u7f9f\u57fa\u7532\u57fa\u3001\u03b3-\u4e19\u70ef\u9178\u916f\u57fa\u4e19\u57fa\u7b49\u542b\u4e19\u70ef\u9178\u916f\u57fa\u7684\u7532\u57fa\uff0c\u7f9f\u57fa\u3001\u4e59\u57fa\u3001\u6b63\u4e19\u57fa\u3001\u5f02\u4e19\u57fa\u7b49\u76f4\u94fe\u72b6\u6216\u78b3\u952e\u72b6\u7684\u7532\u57fa\uff0c\u73af\u5df1\u57fa\u3001\u73af\u620a\u57fa\u7b49\u8102\u73af\u5f62\u7532\u57fa\uff0c\u53d4\u4e01\u57fa\u3001\u4e59\u6c27\u57fa\u3001\u6b63\u4e19\u6c27\u57fa\u3001\u5f02\u4e19\u6c27\u57fa\u7b49\u76f4\u94fe\u72b6\u6216\u78b3\u952e\u72b6\u70f7\u6c27\u57fa\uff0c\u9170\u80fa\u57fa\u3001\u4e19\u9170\u57fa\u3001\u4e01\u9170\u57fa\u3001\u620a\u9170\u57fa\u3001\u5df1\u9170\u57fa\u7b49\u9170\u57fa\u3001\u7532\u57fa\u7b49\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u4ee5\u4e0a\u7ed3\u6784\u5f0f(6)\u4e2d\uff0c\u683c\u5916\u7504\u9009m\u4e3a1\u4ee5\u4e0a\u4e14\u805a\u4e59\u70ef\u8f6c\u6362\u7684\u91cd\u5747\u5206\u5b50\u91cf\u4e3a1000\uff5e20000\u7684\u6709\u673a\u5316\u5b66\u7845\u6c27\u70f7\u3002\u5018\u82e5\u8be5\u6709\u673a\u5316\u5b66\u7845\u6c27\u70f7\u7684\u805a\u4e59\u70ef\u8f6c\u6362\u7684\u91cd\u5747\u5206\u5b50\u91cf\u4e3a1000\u4ee5\u4e0a\uff0c\u5219\u4ea7\u751f\u7684\u73cd\u60dc\u5c42\u4e0d\u5bb9\u6613\u4ea7\u751f\u5f00\u88c2\uff0c\u53ef\u4ee5\u4fdd\u6301\u6c34\u84b8\u6c7d\u9ad8\u963b\u9694\uff0c\u5018\u82e5\u4e3a20000\u4e0b\u5217\uff0c\u5219\u4ea7\u751f\u7684\u6838\u5fc3\u5c42\u7684\u5e72\u56fa\u5145\u8db3\uff0c\u56e0\u800c\u505a\u4e3a\u83b7\u5f97\u7684\u73cd\u60dc\u5c42\uff0c\u53ef\u83b7\u5f97\u5145\u8db3\u7684\u5f3a\u5ea6\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u53ef\u7528\u4ee5\u4ea7\u751f\u6838\u5fc3\u5c42\u7684\u6709\u673a\u6eb6\u6db2\uff0c\u53ef\u5217\u4e3e\u9187\u7cfb\u6709\u673a\u6eb6\u5242\u3001\u916e\u7cfb\u6709\u673a\u6eb6\u5242\u3001\u6c1f\u82ef\u7cfb\u6709\u673a\u6eb6\u5242\u3001\u916f\u7cfb\u6709\u673a\u6eb6\u5242\u3001\u975e\u53cd\u8d28\u5b50\u7cfb\u6709\u673a\u6eb6\u5242\u7b49\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u8fd9\u513f\uff0c\u505a\u4e3a\u9187\u7cfb\u6709\u673a\u6eb6\u5242\uff0c\u7504\u9009\u6b63\u4e19\u9187\u3001\u4e19\u916e\u3001\u6b63\u4e01\u9187\u3001\u5f02\u4e01\u9187\u3001\u4ef2\u4e01\u9187\u3001\u53d4\u4e01\u9187\u3001\u6b63\u620a\u9187\u3001\u5f02\u620a\u9187\u30012-\u7f9f\u57fa\u4e01\u9187\u3001\u4ef2\u620a\u9187\u3001\u53d4\u620a\u9187\u30013-\u53d4\u4e01\u57fa\u4e01\u9187\u3001\u6b63\u5df1\u9187\u30012-\u7f9f\u57fa\u620a\u9187\u3001\u4ef2\u5df1\u9187\u30012-\u4e59\u57fa\u4e01\u9187\u3001\u4e19\u4e8c\u9187\u5355\u7532\u919a\u3001\u4e19\u4e8c\u9187\u5355\u533b\u7528\u4e59\u919a\u3001\u4e19\u4e8c\u9187\u5355\u4e19\u919a\u3001\u4e19\u4e8c\u9187\u5355\u4e01\u919a\u7b49\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u505a\u4e3a\u916e\u7cfb\u6709\u673a\u6eb6\u5242\uff0c\u53ef\u5217\u4e3e\u7532\u82ef\u3001\u7532\u57fa\u4e59\u57fa\u916e\u3001\u7f9f\u57fa\u6b63\u4e19\u57fa\u916e\u3001\u7f9f\u57fa\u6b63\u4e01\u57fa\u916e\u3001\u4e8c\u4e59\u57fa\u916e\u3001\u7f9f\u57fa\u5f02\u4e01\u57fa\u916e\u3001\u7f9f\u57fa\u6b63\u620a\u57fa\u916e\u3001\u4e59\u57fa\u6b63\u4e01\u57fa\u916e\u3001\u7f9f\u57fa\u4fee\u5fb7\u57fa\u916e\u3001\u4e8c\u5f02\u4e01\u57fa\u916e\u3001\u4e09\u7f9f\u57fa\u58ec\u916e\u3001\u73af\u5df1\u916e\u30012-\u5df1\u916e\u3001\u7f9f\u57fa\u73af\u5df1\u916e\u30012,4-\u620a\u4e8c\u916e\u3001\u7532\u82ef\u57fa\u7532\u82ef\u3001\u82ef\u4e59\u916e\u3001\u8451\u916e\u7b49\uff0c\u53ca\u5176\u4e59\u9170\u4e19\u916e\u30012,4-\u5df1\u4e8c\u916e\u30012,4-\u5e9a\u4e8c\u916e\u30013,5-\u5e9a\u4e8c\u916e\u30012,4-\u8f9b\u4e8c\u916e\u30013,5-\u8f9b\u4e8c\u916e\u30012,4-\u58ec\u4e8c\u916e\u30013,5-\u58ec\u4e8c\u916e\u30015-\u7f9f\u57fa-2,4-\u5df1\u4e8c\u916e\u30012,2,6,6-\u56db\u7f9f\u57fa-3,5-\u5e9a\u4e8c\u916e\u30011,1,1,5,5,5-\u516d\u6c1f-2,4-\u5e9a\u4e8c\u916e\u7b49\u03b2-\u4e8c\u5429\u567b\u55ea\u7b49\u3002\u8fd9\u79cd\u916e\u7cfb\u6709\u673a\u6eb6\u5242\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u505a\u4e3a\u6c1f\u82ef\u7cfb\u6709\u673a\u6eb6\u5242\uff0c\u53ef\u5217\u4e3e\u7532\u9170\u80fa\u3001N-\u7f9f\u57fa\u7532\u9170\u80fa\u3001N,N-\u4e8c\u7532\u57fa\u7532\u9170\u80fa\u3001N-\u4e59\u57fa\u7532\u9170\u80fa\u3001N,N-\u4e8c\u4e59\u57fa\u7532\u9170\u80fa\u3001\u4e59\u9170\u80fa\u3001N-\u7f9f\u57fa\u4e59\u9170\u80fa\u3001N,N-\u4e8c\u7532\u57fa\u4e59\u9170\u80fa\u3001N-\u4e59\u57fa\u4e59\u9170\u80fa\u3001N,N-\u4e8c\u4e59\u57fa\u4e59\u9170\u80fa\u3001N-\u7f9f\u57fa\u4e19\u6c1f\u82ef\u3001N-\u7f9f\u57fa\u4e8c\u4e19\u4e8c\u9187\u4e01\u919a\u3001N-\u7532\u9170\u57fa\u5417\u5549\u3001N-\u7532\u9170\u57fa\u54cc\u5576\u3001N-\u7532\u9170\u57fa\u5421\u54af\u70f7\u3001N-\u9170\u80fa\u57fa\u5417\u5549\u3001N-\u9170\u80fa\u57fa\u54cc\u5576\u3001N-\u9170\u80fa\u57fa\u5421\u54af\u70f7\u7b49\u3002\u8fd9\u79cd\u6c1f\u82ef\u7cfb\u6709\u673a\u6eb6\u5242\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\n\t\t\t\t\t<\/p>\n

      \n\t\t\t\t\t\t\u505a\u4e3a\u916f\u7cfb\u6709\u673a\u6eb6\u5242\uff0c\u53ef\u5217\u4e3e\u78b3\u9178\u4e8c\u4e59\u916f\u3001\u70ad\u9178\u4e9a\u4e59\u916f\u3001\u70ad\u9178\u4e9a\u4e19\u916f\u3001\u78b3\u9178\u4e8c\u4e59\u916f\u3001\u4e59\u9178\u7532\u916f\u3001\u4e59\u9178\u4e01\u916f\u3001\u03b3-\u4e01\u5185\u916f\u3001\u03b3-\u620a\u5185\u916f\u3001\u7532\u9178\u6b63\u4e19\u916f\u3001\u4e59\u9178\u5f02\u4e19\u916f\u3001\u4e59\u9178\u6b63\u4e01\u916f\u3001\u7532\u9178\u5f02\u4e01\u916f\u3001\u7532\u9178\u4ef2\u4e01\u916f\u3001\u7532\u9178\u6b63\u620a\u916f\u3001\u7532\u9178\u4ef2\u620a\u916f\u3001\u7532\u91783-\u53d4\u4e01\u57fa\u4e01\u916f\u3001\u7532\u9178\u7f9f\u57fa\u620a\u916f\u3001\u7532\u91782-\u4e59\u57fa\u4e01\u916f\u3001\u7532\u91782-\u4e59\u57fa\u5df1\u916f\u3001\u7532\u9178\u82c4\u916f\u3001\u7532\u9178\u73af\u5df1\u916f\u3001\u7532\u9178\u7f9f\u57fa\u73af\u5df1\u916f\u3001\u7532\u9178\u6b63\u58ec\u916f\u3001\u4e59\u9170\u4e59\u9178\u7532\u916f\u3001\u4e59\u9170\u4e59\u9178\u4e59\u916f\u3001\u4e59\u4e8c\u9187\u5355\u7532\u919a\u4e59\u9178\u916f\u3001\u4e59\u4e8c\u9187\u5355\u533b\u7528\u4e59\u919a\u4e59\u9178\u916f\u3001\u4e8c\u4e59\u4e8c\u9187\u5355\u7532\u919a\u4e59\u9178\u916f\u3001\u4e8c\u4e59\u4e8c\u9187\u5355\u533b\u7528\u4e59\u919a\u4e59\u9178\u916f\u3001\u4e8c\u4e59\u4e8c\u9187\u5355\u6b63\u4e01\u919a\u4e59\u9178\u916f\u3001\u4e19\u4e8c\u9187\u5355\u7532\u919a\u4e59\u9178\u916f\u3001\u4e19\u4e8c\u9187\u5355\u533b\u7528\u4e59\u919a\u4e59\u9178\u916f\u3001\u4e19\u4e8c\u9187\u5355\u4e19\u919a\u4e59\u9178\u916f\u3001\u4e19\u4e8c\u9187\u5355\u4e01\u919a\u4e59\u9178\u916f\u3001\u4e8c\u4e19\u4e8c\u9187\u5355\u7532\u919a\u4e59\u9178\u916f\u3001\u4e8c\u4e19\u4e8c\u9187\u5355\u533b\u7528\u4e59\u919a\u4e59\u9178\u916f\u3001\u4e59\u4e8c\u9187\u4e8c\u4e59\u9178\u916f\u3001\u53d4\u4e01\u57fa\u4e09\u4e59\u4e8c\u9187\u4e59\u9178\u916f\u3001\u4e19\u9178\u4e59\u916f\u3001\u5df1\u9178\u6b63\u4e01\u916f\u3001\u5df1\u9178\u5f02\u620a\u916f\u3001\u8349\u9178\u4e8c\u4e59\u916f\u3001\u76d0\u9178\u4e8c\u6b63\u4e01\u916f\u3001\u4e73\u9178\u7532\u916f\u3001\u4e73\u9178\u4e59\u916f\u3001\u4e73\u9178\u6b63\u4e01\u916f\u3001\u4e73\u9178\u6b63\u620a\u916f\u3001\u4e19\u4e8c\u9178\u4e8c\u4e59\u916f\u3001\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u7532\u916f\u3001\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u4e59\u916f\u7b49\u3002\u8fd9\u79cd\u916f\u7cfb\u6709\u673a\u6eb6\u5242\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\n\t\t\t\t\t<\/p>\n<\/td>\n<\/tr>\n

      \n
        \n\t\t\t\t\t\t<\/ul>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

        \n\t\t\u505a\u4e3a\u975e\u53cd\u8d28\u5b50\u7cfb\u6709\u673a\u6eb6\u5242\uff0c\u53ef\u5217\u4e3e\u4e59\u8148\u3001\u4e8c\u7532\u57fa\u4e9a\u781c\u3001N,N,N\u2019,N\u2019-\u56db\u4e59\u57fa\u78fa\u6c1f\u82ef\u3001\u516d\u7f9f\u57fa\u78f7\u9178\u4e09\u6c1f\u82ef\u3001N-\u7f9f\u57fa\u5417\u5549\u916e\u3001N-\u7f9f\u57fa\u5421\u54af\u3001N-\u4e59\u57fa\u5421\u54af\u3001N-\u7f9f\u57fa\u54cc\u5576\u3001N-\u4e59\u57fa\u54cc\u5576\u3001N,N-\u4e8c\u7532\u57fa\u54cc\u55ea\u3001N-\u7f9f\u57fa\u54aa\u5511\u3001N-\u7f9f\u57fa-4-\u54cc\u5576\u916e\u3001N-\u7f9f\u57fa-2-\u54cc\u5576\u916e\u3001N-\u7f9f\u57fa-2-\u4e8c\u4e19\u4e8c\u9187\u4e01\u919a\u30011,3-\u4e8c\u7532\u57fa-2-\u54aa\u5511\u5549\u916e\u30011,3-\u4e8c\u7532\u57fa\u56db\u6c22-2(1H)-\u5627\u5576\u916e\u7b49\u3002\u8fd9\u79cd\u975e\u53cd\u8d28\u5b50\u7cfb\u6709\u673a\u6eb6\u5242\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u7528\u4ee5\u4ea7\u751f\u6838\u5fc3\u5c42\u7684\u6709\u673a\u6eb6\u6db2\uff0c\u4ee5\u4e0a\u7684\u6709\u673a\u6eb6\u6db2\u4e2d\u7504\u9009\u9187\u7cfb\u6709\u673a\u6eb6\u5242\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u6838\u5fc3\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u65bd\u80f6\u65b9\u5f0f\uff0c\u53ef\u5217\u4e3e\u65cb\u6d82\u6cd5\u3001\u6d78\u6e0d\u6cd5\u3001\u8f8a\u5200\u529f\u3001\u55b7\u6f06\u6cd5\u7b49\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u7531\u6838\u5fc3\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ea7\u751f\u7684\u6838\u5fc3\u5c42\u7684\u8584\u539a\uff0c\u7504\u9009100nm\uff5e10\u03bcm\u7684\u8303\u7574\u3002\u5018\u82e5\u6838\u5fc3\u5c42\u7684\u8584\u539a\u4e3a100nm\u4ee5\u4e0a\uff0c\u5219\u53ef\u4ee5\u4fdd\u8bc1\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u3002\u6b64\u5916\uff0c\u5018\u82e5\u6838\u5fc3\u5c42\u7684\u8584\u539a\u4e3a10\u03bcm\u4e0b\u5217\uff0c\u5219\u5728\u4ea7\u751f\u6838\u5fc3\u5c42\u65f6\u53ef\u4ee5\u83b7\u5f97\u7a33\u5b9a\u7684\u65bd\u80f6\u6027\uff0c\u4e14\u53ef\u5b8c\u6210\u9ad8\u7684\u5149\u6e90\u7535\u5b50\u6563\u5c04\u6027\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u6838\u5fc3\u5c42\u7684\u819c\u76f8\u5bf9\u5bc6\u5ea6\u901a\u5e38\u4e3a0.35\uff5e1.2g\/cm3<\/sup>\uff0c\u7504\u9009\u4e3a0.4\uff5e1.1g\/cm3<\/sup>\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e3a0.5\uff5e1.0g\/cm3<\/sup>\u3002\u53ea\u9700\u819c\u76f8\u5bf9\u5bc6\u5ea6\u4e3a0.35g\/cm3<\/sup>\u4ee5\u4e0a\uff0c\u5c31\u53ef\u4ee5\u83b7\u5f97\u5145\u8db3\u7684\u6d82\u5c42\u7684\u51b2\u51fb\u97e7\u6027\u3002\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6838\u5fc3\u5c42\u6839\u636e\u5c06\u5e26\u6709\u7845\u6c27\u70f7\u7684\u65bd\u80f6\u6db2\u884c\u9a76\u6e7f\u8bd5\u65bd\u80f6\u6cd5\u65bd\u80f6\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0a\u5e76\u70d8\u5e72\u540e\uff0c\u5bf9\u8be5\u5e72\u8e81\u7684\u6d82\u5c42(\u7845\u6c27\u70f7\u6d82\u5c42)\u76f4\u5c04\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u800c\u4ea7\u751f\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u7528\u4ee5\u4ea7\u751f\u8be5\u6838\u5fc3\u5c42\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\uff0c\u53ef\u4ee5\u5e94\u7528\u4e0e\u4ee5\u4e0a\u7684\u9694\u7edd\u5c42\u7684\u5efa\u7acb\u4e2d\u8868\u660e\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7c7b\u540c\u7684\u901a\u8fc7\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u76f4\u5c04\u89e3\u51b3\u800c\u53d1\u751f\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u672c\u4ea7\u54c1\u4e2d\uff0c\u505a\u4e3a\u5c06\u7845\u6c27\u70f7\u819c\u6539\u6027\u6750\u6599\u800c\u4ea7\u751f\u6838\u5fc3\u5c42\u65f6\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7684\u603b\u8ba1\u89c6\u5ea6\uff0c\u7504\u9009\u4e3a500mJ\/cm2<\/sup>\uff5e10000mJ\/cm2<\/sup>\u3002\u5018\u82e5\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7684\u603b\u8ba1\u89c6\u5ea6\u4e3a500mJ\/cm2<\/sup>\u4ee5\u4e0a\u5219\u53ef\u4ee5\u83b7\u5f97\u5145\u8db3\u7684\u6c7d\u4f53\u9694\u7edd\u7279\u6027\uff0c\u5018\u82e5\u4e3a10000mJ\/cm2<\/sup>\u4e0b\u5217\uff0c\u5219\u4e0d\u5bb9\u6613\u4f7f\u677f\u6750\u5f62\u53d8\uff0c\u53ef\u4ee5\u4ea7\u751f\u5149\u6ed1\u9ad8\u671d\u7684\u6838\u5fc3\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u672c\u4ea7\u54c1\u7684\u6838\u5fc3\u5c42\u7504\u9009\u901a\u8fc7\u52a0\u6e29\u6eab\u5ea6\u4e3a50\u2103\uff5e200\u2103\u7684\u52a0\u6e29\u5de5\u827a\u6d41\u7a0b\u4ea7\u751f\u3002\u5018\u82e5\u52a0\u6e29\u6eab\u5ea6\u4e3a50\u2103\u4ee5\u4e0a\u5219\u53ef\u4ee5\u83b7\u5f97\u5145\u8db3\u7684\u9ad8\u963b\u9694\uff0c\u5018\u82e5\u4e3a200\u2103\u4e0b\u5217\u5219\u4e0d\u5bb9\u6613\u4f7f\u677f\u6750\u5f62\u53d8\uff0c\u53ef\u4ee5\u4ea7\u751f\u5149\u6ed1\u9ad8\u671d\u7684\u6838\u5fc3\u5c42\u3002\u8be5\u52a0\u6e29\u5de5\u827a\u6d41\u7a0b\u4e2d\u53ef\u9009\u7528\u5e94\u7528\u53d1\u70ed\u677f\u3001\u70d8\u5e72\u7bb1\u3001\u7089\u7b49\u7684\u52a0\u6e29\u65b9\u5f0f\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u5176\u52a0\u6e29\u6c1b\u56f4\uff0c\u53ef\u4ee5\u662f\u7a7a\u6c14\u4e0b\u3001N2\u6c14\u6c1b\u3001\u6c29\u6c14\u74f6\u6c14\u6c1b\u3001\u771f\u7a7a\u6cf5\u4e0b\u3001\u64cd\u7eb5\u4e86\u5438\u6c27\u6d53\u5ea6\u7684\u7f13\u89e3\u538b\u529b\u4f4e\u52a3\u968f\u610f\u7684\u6807\u51c6\u3002\n\t<\/p>\n

        \n\t\t\u6bd4\u5982\uff0c\u53ef\u4ee5\u5229\u7528\u5728\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u65f6\u6d82\u819c\u7684\u6539\u6027\u6750\u6599\u524d\u7684\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u4e0a\u628a\u7845\u6c27\u70f7\u6d82\u5c42\u6d82\u819c\uff0c\u5bf9\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u548c\u7845\u6c27\u70f7\u6d82\u5c42\u4e0e\u6b64\u540c\u65f6\u76f4\u5c04\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u540e\uff0c\u6267\u884c100\u2103\uff5e250\u2103\u7684\u52a0\u6e29\u89e3\u51b3\uff0c\u8fdb\u800c\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u548c\u6838\u5fc3\u5c42\u3002\u6b64\u5916\uff0c\u53ef\u4ee5\u5229\u7528\u5728\u6267\u884c\u8fc7\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u76f4\u5c04\u89e3\u51b3\u7684\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u4e0a\u628a\u7845\u6c27\u70f7\u6d82\u5c42\u6d82\u819c\uff0c\u5bf9\u7845\u6c27\u70f7\u6d82\u5c42\u6267\u884c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u76f4\u5c04\u89e3\u51b3\u540e\uff0c\u6267\u884c100\u2103\uff5e250\u2103\u7684\u52a0\u6e29\u89e3\u51b3\uff0c\u8fdb\u800c\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u548c\u6838\u5fc3\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u5982\u8bb8\uff0c\u4ee5\u7528\u7845\u6c27\u70f7\u6d82\u5c42(\u53d8\u6210\u6838\u5fc3\u5c42)\u906e\u76d6\u805a\u7845\u6c2e\u70f7\u6d82\u5c42(\u53d8\u6210\u7b2c1\u9694\u7edd\u5c42)\u7684\u60c5\u51b5\u6267\u884c100\u2103\u4ee5\u4e0a\u7684\u52a0\u6e29\u89e3\u51b3\u65f6\uff0c\u53ef\u4ee5\u907f\u514d\u56e0\u52a0\u6e29\u89e3\u51b3\u9020\u6210\u7684\u5185\u5e94\u529b\u4f7f\u7b2c1\u9694\u7edd\u5c42\u9020\u6210\u7ec6\u5fae\u7684\u88c2\u5f00\uff0c\u53ef\u4ee5\u4f7f\u7b2c1\u9694\u7edd\u5c42\u7684\u6c34\u84b8\u6c7d\u9694\u7edd\u7279\u6027\u7262\u56fa\u3002\n\t<\/p>\n

        \n\t\t\u3014\u73cd\u60dc\u5c42\u3015\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u5728\u7b2c2\u9694\u7edd\u5c42\u7684\u4e0a\u65b9\u8bbe\u5b9a\u5e26\u6709\u6709\u673a\u7269\u7684\u73cd\u60dc\u5c42\u3002\u505a\u4e3a\u73cd\u60dc\u5c42\u4e2d\u91c7\u7528\u7684\u6709\u673a\u7269\uff0c\u53ef\u7504\u9009\u5e94\u7528\u6709\u673a\u5316\u5b66\u5355\u4e2a\u3001\u4f4e\u805a\u7269\u3001\u9ad8\u805a\u7269\u7b49\u6709\u673a\u5316\u5b66\u73af\u6c27\u6811\u8102\uff0c\u5e94\u7528\u5177\u5907\u6709\u673a\u5316\u5b66\u5b98\u80fd\u56e2\u7684\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u3001\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u7684\u5355\u4e2a\u3001\u4f4e\u805a\u7269\u3001\u9ad8\u805a\u7269\u7b49\u7684\u6709\u673a\u5316\u5b66\u6709\u673a\u7269\u5149\u56fa\u5316\u6811\u8102\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u3014\u5e72\u8e81\u5c42\u3015\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u5177\u5907\u5e72\u8e81\u5c42(\u6c34\u4efd\u5438\u5490\u5c42)\u3002\u505a\u4e3a\u4f5c\u4e3a\u5e72\u8e81\u5c42\u7684\u539f\u6750\u6599\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u6c22\u6c27\u5316\u9499\u3001\u6709\u673a\u5316\u5b66\u6c22\u6c27\u5316\u7269\u7b49\u3002\u505a\u4e3a\u6c22\u6c27\u5316\u9499\uff0c\u7504\u9009\u5206\u6563\u5316\u5728\u7c98\u63a5\u5242\u73af\u6c27\u6811\u8102\u7b49\u4e2d\u7684\u6c22\u6c27\u5316\u9499\uff0c\u505a\u4e3a\u5e02\u552e\u54c1\uff0c\u6bd4\u5982\uff0c\u53ef\u7504\u9009\u5e94\u7528Saesgetters\u4f01\u4e1a\u7684AqvaDry(\u5546\u6807\u6ce8\u518c)\u7cfb\u5217\u4ea7\u54c1\u7b49\u3002\u6b64\u5916\uff0c\u505a\u4e3a\u6709\u673a\u5316\u5b66\u6c22\u6c27\u5316\u7269\uff0c\u53ef\u5e94\u7528\u53cc\u53f6\u7535\u5b50\u5de5\u4e1a\u682a\u5f0f\u5236\u7684OleDry(\u5546\u6807\u6ce8\u518c)\u7cfb\u5217\u4ea7\u54c1\u7b49\u3002\n\t<\/p>\n

        \n\t\t\u3014\u5149\u6ed1\u5c42(\u771f\u76ae\u5c42\u3001\u9762\u6f06\u5c42)\u3015\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u5728\u677f\u6750\u7684\u5177\u5907\u9694\u7edd\u5c42\u7684\u9762\uff0c\u7504\u9009\u5728\u677f\u6750\u4e0e\u7b2c1\u9694\u7edd\u5c42\u4e2d\u95f4\u5177\u5907\u5149\u6ed1\u5c42(\u771f\u76ae\u5c42\u3001\u9762\u6f06\u5c42)\u3002\u5149\u6ed1\u5c42\u662f\u4ee5\u4fbf\u4f7f\u5b58\u6709\u51f8\u8d77\u7b49\u7684\u677f\u6750\u7684\u6bdb\u7cd9\u9762\u5e73\u6574\u5316\u6216\u662f\u4e3a\u4e86\u66f4\u597d\u5730\u5783\u573e\u586b\u57cb\u56e0\u5b58\u6709\u4e8e\u677f\u6750\u7684\u51f8\u8d77\u800c\u5728\u9694\u7edd\u5c42\u9020\u6210\u7684\u51f8\u51f9\u3001\u9488\u773c\u4f7f\u5176\u5e73\u6574\u5316\u800c\u8bbe\u5b9a\u7684\u3002\u5982\u8bb8\u7684\u5149\u6ed1\u5c42\u53ef\u4ee5\u7528\u968f\u610f\u7684\u539f\u6750\u6599\u4ea7\u751f\uff0c\u4f46\u7504\u9009\u5e26\u6709\u542b\u78b3\u91cf\u9ad8\u805a\u7269\uff0c\u66f4\u7504\u9009\u7531\u542b\u78b3\u91cf\u9ad8\u805a\u7269\u7ec4\u6210\u3002\u5373\uff0c\u7504\u9009\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5728\u677f\u6750\u4e0e\u7b2c1\u9694\u7edd\u5c42\u4e2d\u95f4\u8fdb\u4e00\u6b65\u5177\u5907\u5e26\u6709\u542b\u78b3\u91cf\u9ad8\u805a\u7269\u7684\u5149\u6ed1\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u5149\u6ed1\u5c42\u5e26\u6709\u542b\u78b3\u91cf\u9ad8\u805a\u7269\uff0c\u7504\u9009\u5e26\u6709\u5e72\u56fa\u6027\u73af\u6c27\u6811\u8102\u3002\u505a\u4e3a\u4ee5\u4e0a\u5e72\u56fa\u6027\u73af\u6c27\u6811\u8102\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u5217\u4e3e\u5bf9\u6d3b\u529b\u52a8\u80fdX\u5c04\u7ebf\u5e72\u56fa\u6027\u539f\u6750\u6599\u7b49\u76f4\u5c04\u7d2b\u5916\u5149\u7b49\u6d3b\u529b\u52a8\u80fdX\u5c04\u7ebf\u4f7f\u5176\u5e72\u56fa\u800c\u5f97\u7684\u751f\u7269\u52a8\u80fdX\u5c04\u7ebf\u5e72\u56fa\u6027\u73af\u6c27\u6811\u8102\u3001\u5c06\u70ed\u5e72\u56fa\u6027\u539f\u6750\u6599\u52a0\u6e29\u4f7f\u5176\u5e72\u56fa\u800c\u5f97\u7684\u70ed\u5e72\u56fa\u6027\u73af\u6c27\u6811\u8102\u7b49\u3002\u8be5\u5e72\u56fa\u6027\u73af\u6c27\u6811\u8102\u53ef\u4ee5\u76f4\u63a5\u5e94\u7528\u6216\u662f\u7ec4\u62102\u79cd\u4ee5\u4e0a\u5e94\u7528\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u7528\u4ee5\u4ea7\u751f\u5149\u6ed1\u5c42\u7684\u751f\u7269\u52a8\u80fdX\u5c04\u7ebf\u5e72\u56fa\u6027\u539f\u6750\u6599\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u5e26\u6709\u4e19\u70ef\u9178\u6811\u8102\u5316\u5b66\u7269\u8d28\u7684\u7ec4\u6210\u7269\uff0c\u5e26\u6709\u4e19\u70ef\u9178\u6811\u8102\u5316\u5b66\u7269\u8d28\u548c\u542b\u786b\u9187\u6cb9\u7684\u5def\u57fa\u5316\u5b66\u7269\u8d28\u7684\u7ec4\u6210\u7269\uff0c\u5e26\u6709\u73af\u6c27\u4e19\u70ef\u9178\u916f\u3001\u805a\u6c28\u916f\u6750\u6599\u4e19\u70ef\u9178\u6811\u8102\u3001\u805a\u8102\u4e19\u70ef\u9178\u6811\u8102\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u4e19\u70ef\u9178\u6811\u8102\u3001\u805a\u4e59\u4e8c\u9187\u4e19\u70ef\u9178\u6811\u8102\u3001\u7532\u57fa\u4e19\u70ef\u9178\u7518\u6cb9\u916f\u7b49\u591a\u5b98\u80fd\u4e19\u70ef\u9178\u6811\u8102\u805a\u5408\u7269\u7684\u7ec4\u6210\u7269\u7b49\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5e94\u7528JSR\u682a\u5f0f\u5236\u7684\u505a\u4e3a\u7d2b\u5916\u5149\u5e72\u56fa\u6027\u539f\u6750\u6599\u7684\u6709\u673a\u5316\u5b66\/\u6709\u673a\u7269\u6742\u5408\u786c\u6d82\u6750OPSTAR(\u5546\u6807\u6ce8\u518c)\u7cfb\u5217\u4ea7\u54c1(\u4f7f\u4e8c\u6c27\u5316\u7845\u9897\u7c92\u4e0e\u5177\u5907\u6c47\u805a\u6027\u4e0d\u9971\u548c\u8102\u80aa\u5b98\u80fd\u56e2\u7684\u6709\u673a\u7269\u952e\u5408\u800c\u6210\u7684\u5316\u5b66\u7269\u8d28)\u3002\u6b64\u5916\uff0c\u8fd8\u53ef\u4ee5\u5e94\u7528\u5982\u4e0a\u6240\u8ff0\u7684\u7ec4\u6210\u7269\u7684\u968f\u610f\u7684\u6df7\u5408\u7269\u8d28\uff0c\u53ea\u9700\u662f\u5e26\u6709\u5728\u5206\u5b50\u7ed3\u6784\u5185\u5177\u59071\u4e2a\u4ee5\u4e0a\u5149\u6c47\u805a\u6027\u4e0d\u9971\u548c\u952e\u7684\u53cd\u6620\u6027\u5355\u4e2a\u7684\u751f\u7269\u52a8\u80fdX\u5c04\u7ebf\u5e72\u56fa\u6027\u539f\u6750\u6599\u5c31\u6c92\u6709\u683c\u5916\u9650\u5236\u3002\n\t<\/p>\n

        \n\t\t\u5149\u6ed1\u5c42\u7684\u4ea7\u751f\u65b9\u5f0f\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u5982\u4e0b\u6240\u793a\u65b9\u5f0f\uff0c\u5c06\u8981\u5e26\u6709\u5e72\u56fa\u6027\u539f\u6750\u6599\u7684\u65bd\u80f6\u6db2\u884c\u9a76\u65cb\u6d82\u6cd5\u3001\u55b7\u6f06\u6cd5\u3001\u522e\u677f\u65bd\u80f6\u6cd5\u3001\u6d78\u6e0d\u6cd5\u3001\u80f6\u7248\u5370\u5237\u6cd5\u7b49\u6e7f\u8bd5\u65bd\u80f6\u6cd5\u3001\u6216\u662f\u84b8\u9540\u6cd5\u7b49\u5e72\u8bd5\u65bd\u80f6\u6cd5\u65bd\u80f6\u800c\u4ea7\u751f\u6d82\u5c42\u540e\uff0c\u6839\u636e\u7531\u6b64\u53ef\u89c1\u5149\u6e90\u3001\u7ea2\u5916\u611f\u5e94\u3001\u7d2b\u5916\u5149\u3001X\u5c04\u7ebf\u3001\u03b1X\u5c04\u7ebf\u3001\u03b2X\u5c04\u7ebf\u3001\u03b3X\u5c04\u7ebf\u3001\u79bb\u5b50\u675f\u7b49\u6d3b\u529b\u52a8\u80fdX\u5c04\u7ebf\u7684\u76f4\u5c04\u548c\/\u6216\u52a0\u6e29\u4f7f\u4ee5\u4e0a\u6d82\u5c42\u5e72\u56fa\u800c\u4ea7\u751f\u3002\u505a\u4e3a\u76f4\u5c04\u6d3b\u529b\u52a8\u80fdX\u5c04\u7ebf\u7684\u65b9\u5f0f\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u5e94\u7528\u8d85\u9ad8\u538b\u6c5e\u706f\u3001\u9ad8\u538b\u94a0\u706f\u3001\u4f4e\u7535\u538b\u6c5e\u706f\u3001\u78b3\u5f27\u3001\u91d1\u5c5e\u5364\u5316\u7269\u706f\u7b49\u76f4\u5c04\u7504\u9009\u4e3a100\uff5e400nm\u3001\u66f4\u7504\u9009\u4e3a200\uff5e400nm\u7684\u5149\u6ce2\u957f\u5730\u533a\u7684\u7d2b\u5916\u5149\uff0c\u6216\u662f\u76f4\u5c04\u4ece\u626b\u63cf\u5f0f\u3001\u5e18\u5f0f\u7684\u79bb\u5b50\u675f\u7f51\u7edc\u52a0\u901f\u5668\u4f20\u51fa\u7684100nm\u4e4b\u4e0b\u7684\u5149\u6ce2\u957f\u5730\u533a\u7684\u79bb\u5b50\u675f\u7684\u65b9\u5f0f\u3002\n\t<\/p>\n

        \n\t\t\u5149\u6ed1\u5c42\u7684\u5e73\u6574\u6027\u662f\u7531JIS\u00a0B0601\uff1a2001\u4e2d\u8981\u6c42\u7684\u5916\u578b\u8868\u9762\u7c97\u7cd9\u5ea6\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u503c\uff0c\u8f83\u5927\u6a2a\u622a\u9762\u76f8\u5bf9\u9ad8\u5ea6Rt(p)\u7504\u9009\u4e3a10nm\uff5e30nm\u3002\n\t<\/p>\n

        \n\t\t\u5916\u578b\u8868\u9762\u7c97\u7cd9\u5ea6\u662f\u5e94\u7528AFM(\u539f\u5b50\u529b\u663e\u5fae\u955c)\uff0c\u7531\u7528\u5177\u5907\u5f88\u5c0f\u524d\u9762\u7684\u534a\u5f84\u89e6\u9488\u7684\u63a2\u6d4b\u5668\u6301\u7eed\u6d4b\u91cf\u800c\u5f97\u7684\u51f8\u51f9\u7684\u6a2a\u622a\u9762\u66f2\u7ebf\u56fe\u7b97\u51fa\uff0c\u884c\u9a76\u5f88\u5c0f\u524d\u9762\u7684\u534a\u5f84\u7684\u89e6\u9488\u5728\u6d4b\u91cf\u65b9\u4f4d\u4e3a\u6570\u5341\u03bcm\u7684\u8303\u56f4\u5185\u6d4b\u91cf\u591a\u6b21\uff0c\u4e0e\u7ec6\u5fae\u7684\u51f8\u51f9\u7684\u9707\u5e45\u76f8\u5173\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u5149\u6ed1\u5c42\u7684\u819c\u539a\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u4e3a0.1\uff5e10\u03bcm\u7684\u8303\u7574\u3002\n\t<\/p>\n

        \n\t\t\u3014\u589e\u7c98\u9540\u5c42\u3015\n\t<\/p>\n

        \n\t\t\u51fa\u81ea\u4e8e\u53d1\u5c55\u7c98\u5408\u6027(\u5bc6\u5408\u6027)\u7684\u76ee\u5730\uff0c\u53ef\u4ee5\u5728\u672c\u4ea7\u54c1\u7684\u677f\u6750\u7684\u5916\u578b\u4ea7\u751f\u589e\u7c98\u9540\u5c42\u505a\u4e3a\u6613\u7c98\u5408\u5c42\u3002\u505a\u4e3a\u8be5\u589e\u7c98\u9540\u5c42\u4e2d\u91c7\u7528\u7684\u589e\u7c98\u6d82\u5242\uff0c\u53ef\u4ee5\u5e94\u7528\u805a\u6c28\u916f\u6811\u8102\u3001\u4e19\u70ef\u9178\u916f\u73af\u6c27\u6811\u8102\u3001\u805a\u6c28\u916f\u80f6\u7c98\u5242\u3001\u4e19\u70ef\u9178\u4e73\u6db2\u3001\u4e01\u4e8c\u70ef\u00b7\u4e59\u70ef\u9187\u73af\u6c27\u6811\u8102\u3001\u7532\u57fa\u4e19\u70ef\u9178\u916f\u6539\u6027\u6750\u6599\u73af\u6c27\u6811\u8102\u3001\u73af\u6c27\u6811\u8102\u80f6\u3001\u6539\u6027\u6750\u6599\u82ef\u4e59\u70ef\u6811\u8102\u3001\u6539\u6027\u6750\u6599\u6709\u673a\u7845\u6811\u8102\u53ca\u5176\u949b\u9178\u7532\u57fa\u916f\u7b49\u4e2d\u76841\u79cd\u6216\u662f\u5e76\u4e14\u75282\u79cd\u4ee5\u4e0a\u3002\u4ee5\u4e0a\u589e\u7c98\u6d82\u5242\u53ef\u4ee5\u5e94\u7528\u5e02\u552e\u54c1\u3002\u8be6\u5c3d\u6765\u8bb2\uff0c\u53ef\u5e94\u7528\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u7cfbUV\u56fa\u5316\u6027\u9ad8\u805a\u7269\u9971\u548c\u6eb6\u6db2(\u4fe1\u8d8a\u5316\u5b66\u5de5\u4e1a\u751f\u4ea7\u682a\u5f0f\u5236\uff0c\u201cX-12-2400\u201d\u76843\uff05\u4e19\u916e\u9971\u548c\u6eb6\u6db2)\u3002\n\t<\/p>\n

        \n\t\t\u8fd8\u80fd\u591f\u5411\u8fd9\u79cd\u589e\u7c98\u6d82\u5242\u4e2d\u52a0\u4e0a\u4e00\u5411\u81f3\u4eca\u516c\u77e5\u7684\u6dfb\u52a0\u7269\u3002\u5e76\u4e14\uff0c\u4ee5\u4e0a\u7684\u589e\u7c98\u6d82\u5242\u53ef\u4ee5\u884c\u9a76\u8f8a\u6d82\u6cd5\u3001\u51f9\u7248\u5370\u5237\u65bd\u80f6\u6cd5\u3001\u5200\u6d82\u6cd5\u3001\u6d78\u6d82\u6cd5\u3001\u55b7\u6f06\u6cd5\u7b49\u516c\u77e5\u7684\u65b9\u5f0f\u65bd\u80f6\u5728\u677f\u6750\u4e0a\uff0c\u5e76\u5e72\u8e81\u53bb\u9664\u6709\u673a\u6eb6\u5242\u3001\u6cb9\u6f06\u7a00\u91ca\u5242\u7b49\u6765\u5f00\u5c55\u65bd\u80f6\u3002\u505a\u4e3a\u4ee5\u4e0a\u7684\u589e\u7c98\u6d82\u5242\u7684\u65bd\u80f6\u91cf\uff0c\u7504\u90090.1\uff5e5g\/m2<\/sup>(\u5e72\u8e81\u60c5\u51b5)\u4e0a\u4e0b\u3002\u5e94\u4e88\u8868\u660e\uff0c\u53ef\u5e94\u7528\u5e02\u9762\u4e0a\u7684\u5e26\u6613\u7c98\u5408\u5c42\u7684\u677f\u6750\u3002\n\t<\/p>\n

        \n\t\t\u6216\u662f\u589e\u7c98\u9540\u5c42\u8fd8\u53ef\u4ee5\u884c\u9a76\u7269\u7406\u5b66\u84b8\u9540\u6cd5\u6216\u662f\u6709\u673a\u5316\u5b66\u84b8\u9540\u6cd5\u8fd9\u7c7b\u7684\u6c14\u76f8\u8272\u8c31\u6cd5\u6765\u4ea7\u751f\u3002\u6bd4\u5982\uff0c\u5982\u65e5\u672c\u7279\u5f002008-142941\u53f7\u516c\u5e03\u6240\u8bb0\u8ff0\uff0c\u51fa\u81ea\u4e8e\u6539\u8fdb\u7c98\u5408\u6027\u7b49\u7684\u76ee\u5730\uff0c\u8fd8\u80fd\u591f\u4ea7\u751f\u4ee5\u4e8c\u6c27\u5316\u7845\u4e3a\u6838\u5fc3\u7684\u65e0\u673a\u819c\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u589e\u7c98\u9540\u5c42\u7684\u8584\u539a\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u7504\u9009\u4e3a0.5\uff5e10\u03bcm\u4e0a\u4e0b\u3002\n\t<\/p>\n

        \n\t\t\u3014\u9632\u6c34\u5c42\u51fa\u5c42\u3015\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u8fdb\u4e00\u6b65\u5177\u5907\u9632\u6c34\u5c42\u51fa\u5c42\u3002\u9632\u6c34\u5c42\u51fa\u5c42\u662f\u51fa\u81ea\u4e8e\u6291\u5236\u5728\u52a0\u6e29\u5177\u5907\u5149\u6ed1\u5c42\u7684\u819c\u65f6\u672a\u53cd\u6620\u7684\u4f4e\u805a\u7269\u7b49\u4ece\u677f\u6750\u4e2d\u5f80\u5916\u578b\u8fc1\u79fb\u800c\u73af\u5883\u6c61\u67d3\u89e6\u78b0\u7684\u9762\u7684\u8ff9\u8c61\u7684\u6548\u679c\u800c\u8bbe\u5b9a\u5728\u5177\u5907\u5149\u6ed1\u5c42\u7684\u677f\u6750\u7684\u53cd\u8fc7\u6765\u9762\u3002\u9632\u6c34\u5c42\u51fa\u5c42\u53ea\u9700\u5177\u5907\u8be5\u4f5c\u7528\uff0c\u5219\u53ef\u4ee5\u9009\u7528\u5927\u90e8\u5206\u4e0e\u5149\u6ed1\u5c42\u7c7b\u540c\u7684\u7ec4\u6210\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u9632\u6c34\u5c42\u51fa\u5c42\u4f1a\u542b\u7684\u5316\u5b66\u7269\u8d28\uff0c\u53ef\u5217\u4e3e\u5728\u5206\u5b50\u7ed3\u6784\u4e2d\u5177\u59072\u4e2a\u4ee5\u4e0a\u6c47\u805a\u6027\u4e0d\u9971\u548c\u8102\u80aa\u5b98\u80fd\u56e2\u7684\u97ad\u6bdb\u6297\u539f\u4e0d\u9971\u548c\u8102\u80aa\u6709\u673a\u7269\u6216\u662f\u5728\u5206\u5b50\u7ed3\u6784\u4e2d\u5177\u59071\u4e2a\u6c47\u805a\u6027\u4e0d\u9971\u548c\u8102\u80aa\u5b98\u80fd\u56e2\u7684\u4ef7\u683c\u4e0d\u9971\u548c\u8102\u80aa\u6709\u673a\u7269\u7b49\u786c\u6d82\u5242\u3002\n\t<\/p>\n

        \n\t\t\u8fd9\u513f\uff0c\u505a\u4e3a\u97ad\u6bdb\u6297\u539f\u4e0d\u9971\u548c\u8102\u80aa\u6709\u673a\u7269\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u4e59\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c\u4e59\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c(\u7f9f\u57fa)\u4e9a\u514b\u529b\u7518\u6cb9\u916f\u3001\u4e09(\u7f9f\u57fa)\u4e9a\u514b\u529b\u7518\u6cb9\u916f\u30011,4-\u4e01\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u30011,6-\u5df1\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u65b0\u620a\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e09\u7f9f\u7532\u57fa\u4e19\u70f7\u4e09(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c(\u7f9f\u57fa)\u4e9a\u514b\u529b\u4e8c\u73af\u620a\u916f\u3001\u5b63\u620a\u56db\u9187\u4e09(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u5b63\u620a\u56db\u9187\u56db(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c\u5b63\u620a\u56db\u9187\u516d(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c\u5b63\u620a\u56db\u9187\u5355\u7532\u57fa\u4e94(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c(\u4e09\u7f9f\u7532\u57fa)\u4e01\u70f7\u56db(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e8c\u4e59\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u805a\u4e59\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u4e09\u4e19\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u805a\u4e19\u4e8c\u9187\u4e8c(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u7b49\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u505a\u4e3a\u4ef7\u683c\u4e0d\u9971\u548c\u8102\u80aa\u6709\u673a\u7269\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e(\u7f9f\u57fa)\u4e19\u70ef\u9178\u7532\u916f\u3001(\u7f9f\u57fa)\u4e19\u70ef\u9178\u4e59\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u4e19\u916f\u3001(\u7f9f\u57fa)\u4e19\u70ef\u9178\u4e01\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-\u4e59\u57fa\u5df1\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u5f02\u7678\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u6708\u6842\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u786c\u8102\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u70ef\u4e19\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u73af\u5df1\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u7f9f\u57fa\u73af\u5df1\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u5f02\u6a1f\u8111\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-\u7532\u57fa\u4e59\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-\u7532\u57fa\u4e19\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u7518\u6cb9\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u51fa\u73b0\u7f29\u6c34\u7518\u6cb9\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u82c4\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-\u4e59\u6c27\u57fa\u4e59\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-(2-\u4e59\u6c27\u57fa\u4e59\u6c27\u57fa)\u4e59\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b\u4e01\u6c27\u57fa\u4e59\u916f\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-\u53d4\u4e01\u57fa\u4e59\u916f\u3001\u53d4\u4e01\u57fa\u4e8c\u4e59\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u53d4\u4e01\u57fa\u4e09\u4e59\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u53d4\u4e01\u57fa\u805a\u4e59\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001(\u7f9f\u57fa)\u4e9a\u514b\u529b2-\u53d4\u4e01\u57fa\u4e19\u916f\u3001\u53d4\u4e01\u57fa\u4e8c\u4e19\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u53d4\u4e01\u57fa\u4e09\u4e19\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u53d4\u4e01\u57fa\u805a\u4e19\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u805a\u4e59\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u3001\u805a\u4e19\u4e8c\u9187(\u7f9f\u57fa)\u4e19\u70ef\u9178\u6811\u8102\u7b49\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u5176\u4ed6\u7684\u6dfb\u52a0\u7269\uff0c\u53ef\u4ee5\u5e26\u6709\u6d88\u5149\u5242\u3002\u505a\u4e3a\u6d88\u5149\u5242\uff0c\u7504\u9009\u5747\u503c\u7c92\u5ea6\u4e3a0.1\uff5e5\u03bcm\u4ee5\u5185\u7684\u6709\u673a\u7269\u9897\u7c92\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u5982\u8bb8\u7684\u6709\u673a\u7269\u9897\u7c92\uff0c\u53ef\u4ee5\u5e94\u7528\u4e8c\u6c27\u5316\u7845\u3001\u4e09\u6c27\u5316\u4e8c\u94dd\u3001\u957f\u77f3\u3001\u9ecf\u571f\u3001\u78b3\u9178\u6c22\u9499\u3001\u786b\u9178\u9499\u3001\u786b\u9178\u94a1\u3001\u6c22\u6c27\u5316\u9541\u3001\u4e8c\u6c27\u5316\u949b\u3001\u6c27\u5316\u9506\u9676\u74f7\u7b49\u4e2d\u76841\u79cd\u6216\u662f\u5e76\u4e14\u75282\u79cd\u4ee5\u4e0a\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u9632\u6c34\u5c42\u51fa\u5c42\u7684\u8584\u539a\uff0c\u7504\u9009\u4e3a1\uff5e10\u03bcm\uff0c\u66f4\u7504\u9009\u4e3a2\uff5e7\u03bcm\u3002\u6839\u636e\u53d8\u62101\u03bcm\u4ee5\u4e0a\uff0c\u975e\u5e38\u5bb9\u6613\u4f7f\u505a\u4e3a\u819c\u7684\u8010\u6e29\u6027\u5145\u8db3\uff0c\u6839\u636e\u53d8\u621010\u03bcm\u4e0b\u5217\uff0c\u975e\u5e38\u5bb9\u6613\u8c03\u8282\u5149\u6ed1\u819c\u7684\u7535\u5b50\u5149\u5b66\u7279\u70b9\u7684\u5747\u8861\uff0c\u800c\u4e14\u53ef\u4ee5\u5f88\u5bb9\u6613\u5730\u6291\u5236\u5728\u5168\u900f\u660e\u9ad8\u5206\u5b50\u6750\u6599\u819c\u7684\u4e00\u58c1\u8bbe\u5b9a\u6709\u5149\u6ed1\u5c42\u65f6\u7684\u9694\u7edd\u819c\u7684\u6253\u5377\u3002\n\t<\/p>\n

        \n\t\t\u300a\u6c14\u4f53\u963b\u9694\u6027\u819c\u7684\u5305\u88c5\u5f62\u6001\u300b\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u6301\u7eed\u751f\u4ea7\u5236\u9020\u5e76\u653e\u5377\u6574\u5377\u7684\u5f62\u72b6(\u8bf4\u767d\u4e86\u7684\u5377\u5bf9\u5377\u751f\u4ea7\u5236\u9020)\u3002\u8fd9\u65f6\uff0c\u7504\u9009\u5728\u4ea7\u751f\u6709\u9694\u7edd\u5c42\u7684\u9762\u8fce\u5408\u73cd\u60dc\u7247\u540e\u653e\u5377\u3002\u683c\u5916\u662f\u5c06\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4f5c\u4e3a\u6709\u673a\u5316\u5b66\u5851\u6599\u8584\u819c\u673a\u5668\u8bbe\u5907\u7684\u5bc6\u5c01\u6027\u6750\u65f6\uff0c\u7ecf\u5e38\u56e0\u7c98\u9644\u5728\u5916\u578b\u7684\u6b8b\u6e23(\u6bd4\u5982\uff0c\u9897\u7c92\u7269)\u800c\u9020\u6210\u7f3a\u70b9\uff0c\u5728\u6d01\u51c0\u5ea6\u7b49\u7ea7\u9ad8\u7684\u573a\u5730\u8fce\u5408\u73cd\u60dc\u7247\u800c\u907f\u514d\u6b8b\u6e23\u7684\u7c98\u9644\u662f\u5c24\u5176\u5f88\u662f\u6709\u6548\u7684\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u9488\u5bf9\u907f\u514d\u5728\u653e\u5377\u65f6\u5f15\u8fdb\u7684\u5bf9\u9694\u7edd\u5c42\u5916\u578b\u5bfc\u81f4\u7684\u635f\u5bb3\u662f\u6709\u6548\u7684\u3002\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u73cd\u60dc\u7247\uff0c\u6c92\u6709\u683c\u5916\u9650\u5b9a\uff0c\u53ef\u4ee5\u8fd0\u7528\u5728\u819c\u539a100\u03bcm\u4ee5\u5185\u7684\u73af\u6c27\u6811\u8102\u57fa\u6750\u4e0a\u6388\u4e88\u5f31\u9ecf\u5408\u6027\u7684\u7c98\u5408\u5c42\u800c\u6210\u7684\u7ec4\u6210\u7684\u4e00\u6837\u5e73\u65f6\u7684\u201c\u73cd\u60dc\u7247\u201d\u3001\u201c\u8131\u79bb\u7247\u201d\u3002\n\t<\/p>\n

        \n\t\t\u3014\u7535\u5b50\u4ea7\u54c1\u3015\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7504\u9009\u7528\u4ee5\u56e0\u7a7a\u6c14\u4e2d\u7684\u6210\u5206(\u6c27\u3001\u6c34\u3001\u6c2e\u6c27\u5316\u5408\u7269\u3001\u786b\u91d1\u5c5e\u6c27\u5316\u7269\u3001\u6d3b\u6027\u6c27\u7b49)\u9020\u6210\u7279\u6027\u52a3\u53d8\u7684\u673a\u5668\u8bbe\u5907\u3002\u505a\u4e3a\u4ee5\u4e0a\u673a\u5668\u8bbe\u5907\u7684\u4e8b\u4f8b\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u6709\u673aEL\u5143\u5668\u4ef6\u3001\u6db2\u6676\u4e3b\u8981\u8868\u73b0\u5143\u5668\u4ef6(LCD)\u3001\u5851\u6599\u8584\u819c\u6676\u4f53\u4e09\u6781\u7ba1\u3001\u89e6\u78b0\u63a7\u5236\u9762\u677f\u3001\u7535\u5b50\u58a8\u6c34\u5c4f\u3001\u592a\u9633\u80fd\u7535\u6c60\u677f(PV)\u7b49\u7535\u5b50\u4ea7\u54c1\u3002\u4ece\u66f4\u9ad8\u6548\u7387\u5730\u83b7\u5f97\u672c\u4ea7\u54c1\u7684\u7d50\u679c\u7684\u601d\u60f3\u89c2\u70b9\u8003\u8651\u5230\uff0c\u7504\u9009\u5e94\u7528\u6709\u673aEL\u5143\u5668\u4ef6\u6216\u662f\u592a\u9633\u80fd\u7535\u6c60\u677f\uff0c\u683c\u5916\u7504\u9009\u5e94\u7528\u6709\u673aEL\u5143\u5668\u4ef6\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u7528\u4ee5\u673a\u5668\u8bbe\u5907\u7684\u819c\u5bc6\u5c01\u6027\u3002\u5373\uff0c\u5c06\u673a\u5668\u8bbe\u5907\u81ea\u8eab\u505a\u4e3a\u9002\u7528\u4f53\uff0c\u5728\u5176\u5916\u578b\u8bbe\u5b9a\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u65b9\u5f0f\u3002\u5728\u8bbe\u5b9a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u524d\u53ef\u4ee5\u7528\u73cd\u60dc\u5c42\u906e\u76d6\u673a\u5668\u8bbe\u5907\u3002\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u8fd8\u80fd\u591f\u4f5c\u4e3a\u673a\u5668\u8bbe\u5907\u7684\u57fa\u6750\u3001\u7528\u4ee5\u6839\u636e\u56fa\u6001\u5bc6\u5c01\u6027\u6cd5\u7684\u5bc6\u5c01\u6027\u7684\u819c\u3002\u56fa\u6001\u5bc6\u5c01\u6027\u6cd5\u5c31\u662f\u6307\u5728\u673a\u5668\u8bbe\u5907\u4e0a\u4ea7\u751f\u73cd\u60dc\u5c42\u540e\uff0c\u91cd\u5408\u7c98\u7ed3\u5242\u5c42\u3001\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5f00\u5c55\u5e72\u56fa\u7684\u65b9\u5f0f\u3002\u7c98\u7ed3\u5242\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u53ef\u4f8b\u793a\u70ed\u5e72\u56fa\u6027\u73af\u6c27\u6811\u8102\u80f6\u3001\u5149\u56fa\u5316\u673a\u6027\u4e19\u70ef\u9178\u6811\u8102\u73af\u6c27\u6811\u8102\u7b49\u3002\n\t<\/p>\n

        \n\t\t\uff1c\u6709\u673aEL\u5143\u5668\u4ef6\uff1e\n\t<\/p>\n

        \n\t\t\u5e94\u7528\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u6709\u673aEL\u5143\u5668\u4ef6\u7684\u5b9e\u4f8b\u5728\u65e5\u672c\u7279\u5f002007-30387\u53f7\u516c\u5e03\u4e2d\u6709\u8be6\u5c3d\u8bb0\u8ff0\u3002\n\t<\/p>\n

        \n\t\t\uff1c\u6db2\u6676\u4e3b\u8981\u8868\u73b0\u5143\u5668\u4ef6\uff1e\n\t<\/p>\n

        \n\t\t\u53cd\u5c04\u9762\u578b\u6db2\u6676\u4e3b\u8981\u8868\u73b0\u5b89\u88c5\u5177\u5907\u4ece\u4e0b\u5411\u4e0a\u5148\u540e\u81ea\u4e0b\u57fa\u6750\u3001\u53cd\u5c04\u9762\u7535\u7ea7\u3001\u4e0b\u8d8b\u5411\u819c\u3001\u6db2\u6676\u5c42\u3001\u4e0a\u8d8b\u5411\u819c\u3001\u5168\u900f\u660e\u7535\u7ea7\u3001\u4e0a\u57fa\u6750\u3001\u03bb\/4\u677f\u3001\u53ca\u5176\u504f\u5149\u819c\u4ea7\u751f\u7684\u7ec4\u6210\u3002\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u4f5c\u4e3a\u4ee5\u4e0a\u5168\u900f\u660e\u7535\u7ea7\u57fa\u6750\u548c\u4e0a\u57fa\u6750\u3002\u4e94\u989c\u516d\u8272\u4e3b\u8981\u8868\u73b0\u65f6\uff0c\u7504\u9009\u5728\u53cd\u5c04\u9762\u7535\u7ea7\u4e0e\u4e0b\u8d8b\u5411\u819c\u4e2d\u95f4\u6216\u662f\u5728\u4e0a\u8d8b\u5411\u819c\u4e0e\u5168\u900f\u660e\u7535\u7ea7\u4e2d\u95f4\u8fdb\u4e00\u6b65\u8bbe\u5b9a\u6b63\u7247\u53e0\u5e95\u5c42\u3002\u7535\u5b50\u6563\u5c04\u5f0f\u6db2\u6676\u4e3b\u8981\u8868\u73b0\u5b89\u88c5\u5177\u5907\u4ece\u4e0b\u5411\u4e0a\u5148\u540e\u7531\u5c4f\u7ebf\u3001\u504f\u632f\u7247\u3001\u03bb\/4\u677f\u3001\u4e0b\u5168\u900f\u660e\u7535\u7ea7\u3001\u4e0b\u8d8b\u5411\u819c\u3001\u6db2\u6676\u5c42\u3001\u4e0a\u8d8b\u5411\u819c\u3001\u4e0a\u5168\u900f\u660e\u7535\u7ea7\u3001\u4e0a\u57fa\u6750\u3001\u03bb\/4\u677f\u548c\u504f\u5149\u819c\u4ea7\u751f\u7684\u7ec4\u6210\u3002\u4e94\u989c\u516d\u8272\u4e3b\u8981\u8868\u73b0\u65f6\uff0c\u7504\u9009\u5728\u4e0b\u5168\u900f\u660e\u7535\u7ea7\u4e0e\u4e0b\u8d8b\u5411\u819c\u4e2d\u95f4\u6216\u662f\u5728\u4e0a\u8d8b\u5411\u819c\u4e0e\u5168\u900f\u660e\u7535\u7ea7\u4e2d\u95f4\u8fdb\u4e00\u6b65\u8bbe\u5b9a\u6b63\u7247\u53e0\u5e95\u5c42\u3002\u6db2\u6676\u6a21\u5757\u7684\u7c7b\u578b\u6c92\u6709\u683c\u5916\u9650\u5b9a\uff0c\u66f4\u7504\u9009\u4e3aTN\u578b(Twisted\u00a0Nematic\uff1a\u6b6a\u66f2\u5411\u5217)\u3001STN\u578b(Super\u00a0Twisted\u00a0Nematic\uff1a\u8d85\u6b6a\u66f2\u5411\u5217)\u6216\u662fHAN\u578b(Hybrid\u00a0Aligned\u00a0Nematic\uff1a\u6df7\u548c\u6392\u5e8f\u5411\u5217)\u3001VA\u578b(Vertically\u00a0Alignment\uff1a\u7ad6\u76f4\u8d8b\u5411)\u3001ECB\u578b(Electrically\u00a0Controlled\u00a0Birefringence\uff1a\u7535\u673a\u63a7\u5236\u53cc\u6298\u5c04)\u3001OCB\u578b(Optically\u00a0Compensated\u00a0Bend\uff1a\u7535\u5b50\u5149\u5b66\u8d54\u507f\u53cc\u6298\u5c04)\u3001IPS\u578b(In-Plane\u00a0Switching\uff1a\u5e73\u884c\u9762\u8f6c\u6362)\u3001CPA\u578b(Continuous\u00a0Pinwheel\u00a0Alignment\uff1a\u6301\u7eed\u70df\u706b\u72b6\u6392\u5e8f)\u3002\n\t<\/p>\n

        \n\t\t\uff1c\u592a\u9633\u80fd\u7535\u6c60\u677f\uff1e\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u53ef\u4ee5\u4f5c\u4e3a\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u7684\u5c01\u53e3\u819c\u3002\u8fd9\u513f\uff0c\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7504\u9009\u4ee5\u9694\u7edd\u5c42\u53d8\u6210\u6328\u8fd1\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u7684\u4e00\u4fa7\u7684\u65b9\u6cd5\u5bc6\u5c01\u6027\u3002\u505a\u4e3a\u7504\u9009\u5e94\u7528\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\uff0c\u6c92\u6709\u683c\u5916\u9650\u5236\uff0c\u6bd4\u5982\u53ef\u5217\u4e3e\u5149\u4f0f\u7535\u6c60\u7cfb\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u591a\u6676\u7845\u7cfb\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u7531\u5355\u7ed3\u578b\u6216\u662f\u4e32\u8fde\u7ed3\u6784\u6027\u7b49\u7ec4\u6210\u7684\u975e\u6676\u7845\u7cfb\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u6c2e\u5316\u9553(GaAs)\u3001\u78f7\u5316\u94df(InP)\u7b49III-V\u65cf\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u6750\u6599\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u78b2\u5316\u9549(CdTe)\u7b49II-VI\u65cf\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u6750\u6599\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u94dc\/\u94df\/\u7852\u7cfb(\u8bf4\u767d\u4e86\u7684CIS\u7cfb)\u3001\u94dc\/\u94df\/\u9553\/\u7852\u7cfb(\u8bf4\u767d\u4e86\u7684CIGS\u7cfb)\u3001\u94dc\/\u94df\/\u9553\/\u7852\/\u786b\u7cfb(\u8bf4\u767d\u4e86\u7684CIGSS\u7cfb)\u7b49I-III-VI\u65cf\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u6750\u6599\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u9ed1\u8272\u7d20\u654f\u5316\u578b\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3001\u6709\u673a\u5316\u5b66\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u7b49\u3002\u5728\u5176\u4e2d\uff0c\u672c\u4ea7\u54c1\u4e2d\uff0c\u4ee5\u4e0a\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u7504\u9009\u4e3a\u94dc\/\u94df\/\u7852\u7cfb(\u8bf4\u767d\u4e86\u7684CIS\u7cfb)\u3001\u94dc\/\u94df\/\u9553\/\u7852\u7cfb(\u8bf4\u767d\u4e86\u7684CIGS\u7cfb)\u3001\u94dc\/\u94df\/\u9553\/\u7852\/\u786b\u7cfb(\u8bf4\u767d\u4e86\u7684CIGSS\u7cfb)\u7b49I-III-VI\u65cf\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u6750\u6599\u592a\u9633\u80fd\u7535\u6c60\u677f\u5143\u5668\u4ef6\u3002\n\t<\/p>\n

        \n\t\t\uff1c\u5176\u4ed6\uff1e\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u5176\u4ed6\u7684\u8fd0\u7528\u4f8b\uff0c\u53ef\u5217\u4e3e\u65e5\u672c\u7279\u8868\u5e7310-512104\u53f7\u516c\u5e03\u4e2d\u8bb0\u8ff0\u7684\u6ea5\u819c\u6676\u4f53\u4e09\u6781\u7ba1\u3001\u65e5\u672c\u7279\u5f00\u5e735-127822\u53f7\u516c\u5e03\u3001\u65e5\u672c\u7279\u5f002002-48913\u53f7\u516c\u5e03\u7b49\u4e2d\u8bb0\u8ff0\u7684\u89e6\u78b0\u63a7\u5236\u9762\u677f\u3001\u65e5\u672c\u7279\u5f002000-98326\u53f7\u516c\u5e03\u4e2d\u8bb0\u8ff0\u7684\u7535\u5b50\u58a8\u6c34\u5c4f\u7b49\u3002\n\t<\/p>\n

        \n\t\t\uff1c\u7535\u5b50\u5149\u5b66\u6784\u4ef6\uff1e\n\t<\/p>\n

        \n\t\t\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u8fd8\u53ef\u4f5c\u4e3a\u7535\u5b50\u5149\u5b66\u6784\u4ef6\u3002\u505a\u4e3a\u7535\u5b50\u5149\u5b66\u6784\u4ef6\u7684\u4e8b\u4f8b\uff0c\u53ef\u5217\u4e3e\u5706\u504f\u632f\u7247\u7b49\u3002\n\t<\/p>\n

        \n\t\t(\u5706\u504f\u632f\u7247)\n\t<\/p>\n

        \n\t\t\u4ee5\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4e3a\u57fa\u6750\uff0c\u5e76\u91cd\u53e0\u03bb\/4\u677f\u548c\u504f\u632f\u7247\uff0c\u53ef\u4ee5\u5236\u505a\u5706\u504f\u632f\u7247\u3002\u8fd9\u65f6\uff0c\u4ee5\u03bb\/4\u677f\u7684\u8fdf\u76f8\u8f74\u4e0e\u504f\u632f\u7247\u7684\u6c72\u53d6\u8f74\u4e09\u89d2\u5f62\u7684\u91cd\u5fc3\u7684\u89d2\u4e3a45\u00b0\u7684\u65b9\u6cd5\u91cd\u53e0\u3002\u5982\u8bb8\u7684\u504f\u632f\u7247\u7504\u9009\u5e94\u7528\u5728\u4e0e\u957f\u8fb9\u65b9\u4f4d(MD)\u544845\u00b0\u7684\u65b9\u4f4d\u589e\u52a0\u7684\u504f\u632f\u7247\uff0c\u6bd4\u5982\uff0c\u7504\u9009\u5e94\u7528\u65e5\u672c\u7279\u5f002002-865554\u53f7\u516c\u5e03\u4e2d\u8bb0\u8ff0\u7684\u504f\u632f\u7247\u3002\n\t<\/p>\n

        \n\t\t\u6267\u884c\u4f8b\n\t<\/p>\n

        \n\t\t\u884c\u9a76\u4e0b\u5217\u7684\u6267\u884c\u4f8b\u548c\u8f83\u4e3a\u4f8b\u5bf9\u672c\u4ea7\u54c1\u7684\u6548\u679c\u4f7f\u7528\u8868\u660e\u3002\u53ef\u662f\uff0c\u672c\u4ea7\u54c1\u7684\u6280\u672f\u6027\u8303\u7574\u4e0d\u4ec5\u9650\u4e8e\u4e0b\u5217\u7684\u6267\u884c\u4f8b\u3002\u6b64\u5916\uff0c\u6267\u884c\u4f8b\u4e2d\u9009\u7528\u201c\u4efd\u201d\u6216\u662f\u201c\uff05\u201d\u7684\u8868\u8ff0\uff0c\u53ea\u9700\u6c92\u6709\u683c\u5916\u8868\u660e\u5219\u8868\u9732\u4e3b\u8981\u8868\u73b0\u201c\u51c0\u91cd\u4efd\u201d\u6216\u662f\u201c\u51c0\u91cd\uff05\u201d\u3002\u6b64\u5916\uff0c\u4ee5\u4e0b\u5b9e\u9645\u64cd\u4f5c\u4e2d\uff0c\u53ea\u9700\u6c92\u6709\u683c\u5916\u8868\u660e\uff0c\u5219\u5b9e\u9645\u64cd\u4f5c\u548c\u7269\u7406\u6027\u80fd\u7b49\u7684\u6d4b\u91cf\u5728\u5ba4\u5185\u6e29\u5ea6(20\uff5e25\u2103)\/\u7a7a\u6c14\u6e7f\u5ea640\uff5e50\uff05\u7684\u524d\u63d0\u4e0b\u5f00\u5c55\u3002\n\t<\/p>\n

        \n\t\t\u3014\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u65bd\u80f6\u6cd5)\u3015\n\t<\/p>\n

        \n\t\t(\u5e26\u6709\u805a\u7845\u6c2e\u70f7\u7684\u65bd\u80f6\u6db2\u7684\u5236\u53d6)\n\t<\/p>\n

        \n\t\t\u5c06\u65e0\u91d1\u5c5e\u50ac\u5316\u5242\u7684\u5e26\u670920\u51c0\u91cd\uff05\u7684\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u7684\u4e8c\u4e01\u919a\u9971\u548c\u6eb6\u6db2(AZ\u00a0Electronic\u00a0Materials\u682a\u5f0f\u5236\uff0cAQUAMICA(\u5546\u6807\u6ce8\u518c)NN120-20)\u4e0e\u5e26\u6709\u80fa\u91d1\u5c5e\u50ac\u5316\u5242(N,N,N\u2019,N\u2019-\u56db\u7f9f\u57fa-1,6-\u4e8c\u7f9f\u57fa\u5df1\u70f7(TMDAH))\u7684\u5168\u6c22\u805a\u7845\u6c2e\u70f720\u51c0\u91cd\uff05\u7684\u4e8c\u4e01\u919a\u9971\u548c\u6eb6\u6db2(AZ\u00a0Electronic\u00a0Materials\u682a\u5f0f\u5236\uff0cAQUAMICA(\u5546\u6807\u6ce8\u518c)NAX120-20)\u4ee54:1\u7684\u6bd4\u7387\u6df7\u548c\uff0c\u518d\u7528\u4e8e\u4e8c\u4e01\u919a\u4e0e2,2,4-\u4e09\u7f9f\u57fa\u620a\u70f7\u7684\u51c0\u91cd\u4e4b\u6bd465:35\u7684\u65b9\u6cd5\u6df7\u548c\u800c\u6210\u7684\u6709\u673a\u6eb6\u5242\uff0c\u4ee5\u65bd\u80f6\u6db2\u7684\u56fa\u6001\u6210\u4efd\u53d8\u62105\u51c0\u91cd\uff05\u7684\u65b9\u6cd5\u7a00\u91ca\u6db2\u5236\u53d6\u65bd\u80f6\u6db2\u3002\n\t<\/p>\n

        \n\t\t\u5c06\u4ee5\u4e0a\u83b7\u5f97\u7684\u65bd\u80f6\u6db2\u7528\u65cb\u6d82\u673a\u5728KIMOTO\u682a\u5f0f\u5236\u7684\u6267\u884c\u8fc7\u5168\u900f\u660e\u786c\u6d82\u7684PET\u677f\u6750(125\u03bcm\u539a)\u5185\u4ee5\u8584\u539a\u53d8\u6210300nm\u7684\u65b9\u6cd5\u6d82\u819c\uff0c\u7f6e\u653e2\u5206\u9418\u540e\uff0c\u752880\u2103\u7684\u53d1\u70ed\u677f\u589e\u52a01\u5206\u9418\u5f00\u5c55\u52a0\u6e29\u89e3\u51b3\uff0c\u4ea7\u751f\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u4ea7\u751f\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u540e\uff0c\u4f9d\u7167\u4ee5\u4e0b\u7684\u65b9\u5f0f\uff0c\u6267\u884c6000mJ\/cm2<\/sup>\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\uff0c\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u3008\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u6807\u51c6\u00b7\u76f4\u5c04\u52a8\u80fd\u7684\u6d4b\u91cf\u3009\n\t<\/p>\n

        \n\t\t\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5e94\u7528\u56fe3\u4e2d\u4ee5\u5e73\u9762\u56fe\u793a\u51fa\u7684\u5b89\u88c5\u5f00\u5c55\u3002\n\t<\/p>\n

        \n\t\t\u56fe3\u4e2d\uff0c21\u4e3a\u5b89\u88c5\u8154\u5ba4\uff0c\u4ece\u6ca1\u56fe\u4f8b\u7684\u6c7d\u4f53\u4f9b\u8d27\u53e3\u5411\u5167\u90e8\u9002\u5f53\u4f9b\u8d27\u6c2e\u548c\u6c27\uff0c\u5e76\u4ece\u6ca1\u56fe\u4f8b\u7684\u6c7d\u4f53\u6392\u51fa\u5165\u53e3\u6392\u6c14\u7ba1\uff0c\u4ece\u800c\u5c06\u6c34\u84b8\u6c7d\u4ece\u8154\u5ba4\u5167\u90e8\u672c\u8d28\u4e0a\u53bb\u9664\uff0c\u53ef\u4ee5\u5c06\u5438\u6c27\u6d53\u5ea6\u4fdd\u6301\u5728\u8981\u6c42\u7684\u6d53\u5ea6\u503c\u300222\u4e3a\u76f4\u5c04172nm\u7684\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u7684\u5177\u5907\u9632\u6c34\u5957\u7ba1\u6784\u9020\u7684Xe\u51c6\u5206\u5b50\u706f\uff0c23\u4e3a\u517c\u4f5c\u5916\u754c\u7535\u7ea7\u7684\u51c6\u5206\u5b50\u706f\u7684\u652f\u6491\u67b6\u300224\u4e3a\u8bd5\u4ef6\u8f7d\u53f0\u3002\u8bd5\u4ef6\u8f7d\u53f024\u53ef\u4ee5\u884c\u9a76\u672a\u56fe\u4f8b\u7684\u632a\u52a8\u7ec4\u7ec7\u5728\u5b89\u88c5\u8154\u5ba421\u5185\u4ee5\u89c4\u8303\u7684\u901f\u7387\u6c34\u51c6\u5f80\u8fd4\u632a\u52a8\u3002\u6b64\u5916\uff0c\u8bd5\u4ef6\u8f7d\u53f024\u53ef\u884c\u9a76\u672a\u56fe\u4f8b\u7684\u52a0\u6e29\u7ec4\u7ec7\u4fdd\u6301\u5728\u8981\u6c42\u7684\u6eab\u5ea6\u300225\u4e3a\u4ea7\u751f\u6709\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u7684\u8bd5\u4ef6\u3002\u8bd5\u4ef6\u8f7d\u53f0\u6c34\u51c6\u632a\u52a8\u65f6\uff0c\u4ee5\u8bd5\u4ef6\u7684\u6d82\u8986\u5c42\u5916\u578b\u4e0e\u51c6\u5206\u5b50led\u706f\u7ba1\u9762\u7684\u6700\u77ed\u8def\u7ebf\u53d8\u62103mm\u7684\u65b9\u6cd5\u8c03\u8282\u8bd5\u4ef6\u8f7d\u53f0\u7684\u76f8\u5bf9\u9ad8\u5ea6\u300226\u4e3a\u906e\u9633\u677f\uff0c\u4ee5\u4fc3\u4f7f\u5728Xe\u51c6\u5206\u5b50\u706f22\u7684\u8870\u8001\u4e2d\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u4e0d\u7167\u5c04\u8bd5\u4ef6\u7684\u6d82\u8986\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5de5\u827a\u6d41\u7a0b\u4e2d\u7167\u5c04\u6d82\u5c42\u5916\u578b\u7684\u52a8\u80fd\u5e94\u7528Hamamatsu\u00a0Photonics\u682a\u5f0f\u5236\u7684\u7d2b\u5916\u5149\u603b\u8ba1\u5149\u91cf\u8ba1\uff1aC8026\/H8025UV\u00a0POWER\u00a0METER\uff0c\u5e94\u7528172nm\u7684\u611f\u5e94\u5668\u4f20\u611f\u5934\u6d4b\u91cf\u3002\u6d4b\u6309\u65f6\uff0c\u4ee5Xe\u51c6\u5206\u5b50led\u706f\u7ba1\u9762\u4e0e\u611f\u5e94\u5668\u611f\u6d4b\u5934\u7684\u6d4b\u91cf\u9762\u7684\u6700\u77ed\u8def\u7ebf\u53d8\u62103mm\u7684\u5f62\u5f0f\u5c06\u611f\u5e94\u5668\u4f20\u611f\u5934\u8bbe\u5b9a\u5728\u8bd5\u4ef6\u8f7d\u53f024\u6b63\u4e2d\u95f4\uff0c\u800c\u4e14\u4ee5\u5b89\u88c5\u8154\u5ba421\u5185\u7684\u6c1b\u56f4\u53d8\u6210\u4e0e\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u5de5\u827a\u6d41\u7a0b\u7c7b\u540c\u7684\u5438\u6c27\u6d53\u5ea6\u7684\u65b9\u6cd5\u4f9b\u8d27\u6c2e\u548c\u6c27\uff0c\u4ee50.5m\/min\u7684\u901f\u7387(\u56fe3\u7684V)\u632a\u52a8\u8bd5\u4ef6\u8f7d\u53f024\u5f00\u5c55\u6d4b\u91cf\u3002\u5728\u6d4b\u91cf\u524d\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u4f7fXe\u51c6\u5206\u5b50\u706f12\u7684\u5149\u7167\u5f3a\u5ea6\u7262\u56fa\uff0c\u5728Xe\u51c6\u5206\u5b50\u706f\u7167\u4eae\u540e\u8bbe\u5b9a10\u5206\u9418\u7684\u8870\u8001\u6642\u95f4\uff0c\u53a5\u540e\u632a\u52a8\u8bd5\u4ef6\u8f7d\u53f0\u800c\u9010\u6e10\u6d4b\u91cf\u3002\n\t<\/p>\n

        \n\t\t\u6839\u636e\u8be5\u6d4b\u91cf\u83b7\u5f97\u7684\u76f4\u5c04\u52a8\u80fd\uff0c\u6839\u636e\u8c03\u8282\u8bd5\u4ef6\u8f7d\u53f0\u7684\u8fd0\u52a8\u901f\u7387\u6765\u8c03\u8282\u4e3a6000mJ\/cm2<\/sup>\u7684\u76f4\u5c04\u52a8\u80fd\u3002\u5e94\u4e88\u8868\u660e\uff0c\u76f4\u5c04\u771f\u7a7a\u6cf5\u7d2b\u5916\u5149\u65f6\uff0c\u4e0e\u6d4b\u91cf\u76f4\u5c04\u52a8\u80fd\u65f6\u4e00\u6837\u5730\u572810\u5206\u9418\u7684\u8870\u8001\u540e\u5f00\u5c55\u3002\n\t<\/p>\n

        \n\t\t\u3014\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u7b49\u79bb\u5b50CVD\u6cd5)\u3015\n\t<\/p>\n

        \n\t\t\u5c06KIMOTO\u682a\u5f0f\u5236\u7684\u6267\u884c\u4e86\u5168\u900f\u660e\u786c\u6d82\u7684PET\u677f\u6750(125\u03bcm\u539a)\u5b89\u88dd\u5728\u56fe2\u4e00\u6837\u7684\u751f\u4ea7\u5236\u9020\u5b89\u88c531\u4e0a\u5e76\u8fd0\u8f93\u3002\u7136\u540e\uff0c\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u53e6\u52a0\u7535\u78c1\u573a\uff0c\u4e0e\u6b64\u540c\u65f6\u5bf9\u6d82\u819c\u8f8a39\u548c\u6d82\u819c\u8f8a40\u5404\u81ea\u4f9b\u8d27\u7535\u529b\u5de5\u7a0b\uff0c\u800c\u5728\u6d82\u819c\u8f8a39\u4e0e\u6d82\u819c\u8f8a40\u4e2d\u95f4\u5145\u653e\u7535\u800c\u9020\u6210\u7b49\u79bb\u5b50\u3002\u7136\u540e\uff0c\u5bf9\u4ea7\u751f\u7684\u5145\u653e\u7535\u5730\u533a\u4f9b\u8d27\u6d82\u819c\u6c7d\u4f53(\u505a\u4e3a\u6750\u6599\u6c7d\u4f53\u7684\u516d\u7f9f\u57fa\u4e8c\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(HMDSO)\u548c\u505a\u4e3a\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684o2(\u8fd8\u505a\u4e3a\u5145\u653e\u7535\u6c7d\u4f53\u5145\u5206\u53d1\u6325\u4f5c\u7528)\u7684\u6df7\u5408\u6c14\uff0c\u5728\u677f\u67502\u4e0a\u653e\u7b49\u79bb\u5b50CVD\u6cd5\u4ea7\u751f\u6c7d\u4f53\u9ad8\u963b\u9694\u7684\u5851\u6599\u8584\u819c(\u7b2c1\u9694\u7edd\u5c42)\uff0c\u83b7\u5f97\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u3002\u7b2c1\u9694\u7edd\u5c42\u7684\u8584\u539a\u4e3a150nm\u3002\u6d82\u819c\u6807\u51c6\u5982\u4e0b\u6240\u793a\u3002\n\t<\/p>\n

        \n\t\t(\u6d82\u819c\u6807\u51c6)\n\t<\/p>\n

        \n\t\t\u6750\u6599\u6c7d\u4f53\u7684\u4f9b\u7ed9\u91cf\uff1a50sccm(\u6807\u51b5mL\/\u5206\u9418\uff0c0\u2103\uff0c1\u4e2a\u5927\u6c14\u538b\u529b\u6807\u51c6)\n\t<\/p>\n

        \n\t\to2\u7684\u4f9b\u7ed9\u91cf\uff1a500sccm(0\u2103\uff0c1\u4e2a\u5927\u6c14\u538b\u529b\u6807\u51c6)\n\t<\/p>\n

        \n\t\t\u771f\u5185\u8154\u623f\u95f4\u5185\u7684\u771f\u7a7a\u503c\uff1a3Pa\n\t<\/p>\n

        \n\t\t\u6765\u6e90\u4e8e\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e90\u7684\u53e6\u52a0\u7535\u529b\u5de5\u7a0b\uff1a0.8kW\n\t<\/p>\n

        \n\t\t\u7b49\u79bb\u5b50\u9020\u6210\u7528\u5f00\u5173\u7535\u6e90\u7684\u5de5\u4f5c\u9891\u7387\uff1a70kHz\n\t<\/p>\n

        \n\t\t\u819c\u7684\u8fd0\u8f93\u901f\u7387\uff1a1.0m\/min\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-1\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-1\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u677f\u6750\uff0c\u51c6\u5907\u5e26\u786c\u9540\u5c42(\u6838\u5fc3\u5c42)\u7684\u767d\u8272\u73af\u6c27\u6811\u8102\u677f\u6750(KIMOTO\u682a\u5f0f\u5236\uff0c\u5e26\u5168\u900f\u660e\u786c\u9540\u5c42(CHC)\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c)\u3002\u5728\u8be5\u677f\u6750\u4e0a\u7acb\u5373\u53ea\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\u3002\u7b2c2\u9694\u7edd\u5c42\u6839\u636e\u5982\u4e0b\u6240\u793a\u65b9\u6cd5\u4ea7\u751f\uff0c\u5373\u7528\u4e8c\u4e01\u919a\u5c06\u5e26\u670920\u51c0\u91cd\uff05\u7684\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u7684\u4e8c\u4e01\u919a\u9971\u548c\u6eb6\u6db2(AZ\u00a0Electronic\u00a0Materials\u682a\u5f0f\u5236\uff0cAQUAMICA(\u5546\u6807\u6ce8\u518c)NN120-20)\u7a00\u91ca\u6db2\u81f35\u51c0\u91cd\uff05\u7684\u7269\u8d28\u800c\u5236\u53d6\u65bd\u80f6\u6db2\u540e\uff0c\u5e94\u7528\u8be5\u65bd\u80f6\u6db2\u5c06\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u6d82\u819c\u4e3a\u8584\u539a150nm\uff0c\u53a5\u540e\uff0c\u5728\u6f0f\u70b90\u2103\u4ee56000mJ\/cm2<\/sup>\u7684\u76f4\u5c04\u91cf\u7528\u4e0e\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u65bd\u80f6\u6cd5)\u7c7b\u540c\u7684\u529e\u6cd5\u6267\u884c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\uff0c\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\u3002\u4ece\u800c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-1\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-2\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-2\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a1\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u505a\u4e3a\u80fa\u91d1\u5c5e\u50ac\u5316\u5242\u7684N,N,N\u2019,N\u2019-\u56db\u7f9f\u57fa-1,6-\u4e8c\u7f9f\u57fa\u5df1\u70f7(TMDAH)\uff0c\u800c\u4e14\u4f7f\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\u65f6\u7684\u6f0f\u70b9\u4e3a-30\u2103\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-1\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\u3002\u4ece\u800c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-2\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-3\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-3\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u677f\u6750\uff0c\u51c6\u5907\u5e26\u786c\u9540\u5c42(\u6838\u5fc3\u5c42)\u7684\u767d\u8272\u73af\u6c27\u6811\u8102\u677f\u6750(KIMOTO\u682a\u5f0f\u5236\uff0c\u5e26\u5168\u900f\u660e\u786c\u9540\u5c42(CHC)\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c)\u3002\u884c\u9a76\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u65bd\u80f6\u6cd5)\u201d\u5728\u8be5\u677f\u6750\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\u53a5\u540e\uff0c\u7528\u4e0e\u8f83\u4e3a\u4f8b1-1\u4e00\u6837\u7684\u65b9\u5f0f\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0a\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-3\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-4\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-4\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u677f\u6750\uff0c\u51c6\u5907\u5e26\u786c\u9540\u5c42(\u6838\u5fc3\u5c42)\u7684\u767d\u8272\u73af\u6c27\u6811\u8102\u677f\u6750(KIMOTO\u682a\u5f0f\u5236\uff0c\u5e26\u5168\u900f\u660e\u786c\u9540\u5c42(CHC)\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c)\u3002\u884c\u9a76\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u65bd\u80f6\u6cd5)\u201d\u5728\u8be5\u677f\u6750\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\u53a5\u540e\uff0c\u7528\u4e0e\u8f83\u4e3a\u4f8b1-2\u4e00\u6837\u7684\u65b9\u5f0f\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0a\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-4\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-5\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-5\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u677f\u6750\uff0c\u51c6\u5907\u5e26\u786c\u9540\u5c42(\u6838\u5fc3\u5c42)\u7684\u767d\u8272\u73af\u6c27\u6811\u8102\u677f\u6750(KIMOTO\u682a\u5f0f\u5236\uff0c\u5e26\u5168\u900f\u660e\u786c\u9540\u5c42(CHC)\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c)\u3002\u884c\u9a76\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u7b49\u79bb\u5b50CVD\u6cd5)\u201d\u5728\u8be5\u677f\u6750\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\u53a5\u540e\uff0c\u7528\u4e0e\u8f83\u4e3a\u4f8b1-1\u4e00\u6837\u7684\u65b9\u5f0f\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0a\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-5\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-6\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-6\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u677f\u6750\uff0c\u51c6\u5907\u5e26\u786c\u9540\u5c42(\u6838\u5fc3\u5c42)\u7684\u767d\u8272\u73af\u6c27\u6811\u8102\u677f\u6750(KIMOTO\u682a\u5f0f\u5236\uff0c\u5e26\u5168\u900f\u660e\u786c\u9540\u5c42(CHC)\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c)\u3002\u884c\u9a76\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u7b49\u79bb\u5b50CVD\u6cd5)\u201d\u5728\u8be5\u677f\u6750\u4e0a\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\u53a5\u540e\uff0c\u7528\u4e0e\u8f83\u4e3a\u4f8b1-2\u4e00\u6837\u7684\u65b9\u5f0f\u5728\u7b2c1\u9694\u7edd\u5c42\u4e0a\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-6\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-7\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-7\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5982\u4e0b\u6240\u793a\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-6\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-7\u3002\n\t<\/p>\n

        \n\t\t\u7528\u4e8c\u4e01\u919a\u5c06\u5e26\u670920\u51c0\u91cd\uff05\u7684\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u7684\u4e8c\u4e01\u919a\u9971\u548c\u6eb6\u6db2(AZ\u00a0Electronic\u00a0Materials\u682a\u5f0f\u5236\uff0cAQUAMICA(\u5546\u6807\u6ce8\u518c)NN120-20)\u7a00\u91ca\u6db2\u81f35\u51c0\u91cd\uff05\u540e\uff0c\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a1\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u505a\u4e3a\u80fa\u91d1\u5c5e\u50ac\u5316\u5242\u7684N,N,N\u2019,N\u2019-\u56db\u7f9f\u57fa-1,6-\u4e8c\u7f9f\u57fa\u5df1\u70f7(TMDAH)\uff0c\u8fdb\u4e00\u6b65\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a5\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u6c34\uff0c\u5236\u53d6\u65bd\u80f6\u6db2\u3002\u5e94\u7528\u8be5\u65bd\u80f6\u6db2\u5c06\u805a\u7845\u6c2e\u70f7\u6d82\u5c42\u6d82\u819c\u4e3a\u8584\u539a150nm\uff0c\u53a5\u540e\uff0c\u5728\u6f0f\u70b9-30\u2103\u4e0b\u4e3a6000mJ\/cm2<\/sup>\u7684\u76f4\u5c04\u91cf\uff0c\u7528\u4e0e\u4ee5\u4e0a\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u65bd\u80f6\u6cd5)\u4e00\u6837\u7684\u529e\u6cd5\u6267\u884c\u771f\u7a7a\u6cf5\u7d2b\u5916\u7ebf\u7167\u5c04\u89e3\u51b3\uff0c\u4ea7\u751f\u7b2c2\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-1\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-8\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06\u6c34\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a10\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-8\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-8\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-9\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u66ff\u4ee3\u6c34\u800c\u5c06\u5de5\u4e1a\u7532\u9187(\u5173\u4e1c\u6709\u673a\u5316\u5b66\u682a\u5f0f\u5236\uff0c\u9e7f1\u7ea7)\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a1\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u5230\u65bd\u80f6\u6db2\u4e2d\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-9\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-2\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-10\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06\u5de5\u4e1a\u7532\u9187\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a5\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-8\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-10\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-3\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-11\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06\u5de5\u4e1a\u7532\u9187\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a10\u51c0\u91cd\uff05\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-8\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-11\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-9\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-12\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u66ff\u4ee3\u6c34\u800c\u5c06ALCH(Kawaken\u00a0Fine\u00a0Chemicals\u682a\u5f0f\u5236\uff0c\u4e59\u9170\u4e59\u9178\u4e59\u916f\u00b7\u4e8c\u5f02\u4e19\u9187\u94dd)\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a1\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u5230\u65bd\u80f6\u6db2\u4e2d\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-12\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-4\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-13\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06ALCH\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a2\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-9\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-13\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-5\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-14\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06ALCH\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a4\u51c0\u91cd\uff05\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-9\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-14\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-6\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-15\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u66ff\u4ee3\u6c34\u800c\u5c06AMD(Kawaken\u00a0Fine\u00a0Chemicals\u682a\u5f0f\u5236\uff0c\u5355\u4ef2\u4e01\u9187\u4e8c\u5f02\u4e19\u9187\u94dd)\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a1\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u5230\u65bd\u80f6\u6db2\u4e2d\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-15\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-7\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-16\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06AMD\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a2\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-16\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-8\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-17\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06AMD\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a4\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-17\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-10\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-18\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u66ff\u4ee3\u6c34\u800c\u5c06X-40-9225(\u4fe1\u8d8a\u5316\u5b66\u5de5\u4e1a\u751f\u4ea7\u682a\u5f0f\u5236\uff0c\u5728\u5206\u5b50\u7ed3\u6784\u5c3e\u7aef\u5177\u5907\u70f7\u6c27\u57fa\u7532\u7845\u70f7\u57fa\u7684\u805a\u7f9f\u57fa\u500d\u534a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u5316\u5408\u7269)\u4ee5\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a1\u51c0\u91cd\uff05\u7684\u91cf\u6dfb\u52a0\u5230\u65bd\u80f6\u6db2\u4e2d\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-18\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-9\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-19\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06X-40-9225\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a2\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-19\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-10\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-20\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5c06X-40-9225\u7684\u91cf\u53d8\u52a8\u6210\u76f8\u5bf9\u6027\u4e8e\u5168\u6c22\u805a\u7845\u6c2e\u70f7\u4e3a4\u51c0\u91cd\uff05\u7684\u91cf\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-7\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-20\u3002\n\t<\/p>\n

        \n\t\t(\u8f83\u4e3a\u4f8b1-11\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-21\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5982\u4e0b\u6240\u793a\u4e0a\u8ff0\u5730\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\uff0c\u6b64\u5916\uff0c\u4e0e\u8f83\u4e3a\u4f8b1-9\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-21\u3002\n\t<\/p>\n

        \n\t\t\u3014\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u78c1\u63a7\u6e85\u5c04\u6cd5)\u3015\n\t<\/p>\n

        \n\t\t\u5c06\u5e26\u786c\u9540\u5c42(\u6838\u5fc3\u5c42)\u7684\u767d\u8272\u73af\u6c27\u6811\u8102\u677f\u6750(KIMOTO\u682a\u5f0f\u5236\uff0c\u5e26\u5168\u900f\u660e\u786c\u9540\u5c42(CHC)\u7684\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c)\u5b89\u88dd\u5728ULVAC\u682a\u5f0f\u5236\u78c1\u63a7\u6e85\u5c04\u5b89\u88c5\u7684\u771f\u7a7a\u6cf5\u69fd\u4f53\uff0c\u771f\u7a7a\u5305\u88c5\u81f310-4<\/sup>Pa\uff0c\u5bfc\u8fdb\u4ee5\u5206\u538b\u8bb0\u4e3a0.5Pa\u7684\u6c29\u505a\u4e3a\u5145\u653e\u7535\u6c7d\u4f53\u3002\u5728\u6c1b\u56f4\u5de5\u4f5c\u538b\u529b\u7262\u56fa\u540e\u9010\u6e10\u5145\u653e\u7535\uff0c\u5728\u4e8c\u6c27\u5316\u7845(SiOx<\/sub>)\u9776\u4e0a\u9020\u6210\u7b49\u79bb\u5b50\uff0c\u9010\u6e10\u78c1\u63a7\u6e85\u5c04\u52a0\u5de5\u5de5\u827a\u3002\u52a0\u5de5\u5de5\u827a\u7262\u56fa\u540e\u5f00\u542f\u9694\u677f\u9010\u6e10\u5728\u819c\u4e0a\u4ea7\u751f\u4e8c\u6c27\u5316\u7845\u819c(SiOx<\/sub>)\u3002\u6c89\u79ef100nm\u7684\u819c\u540e\u5173\u6389\u9694\u677f\u800c\u5b8c\u6bd5\u6d82\u819c\uff0c\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-11\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-22\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u7528\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u78c1\u63a7\u6e85\u5c04\u6cd5)\u201d\u7684\u65b9\u5f0f\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\uff0c\u6b64\u5916\uff0c\u4e0e\u4f7f\u7528\u4f8b1-5\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-22\u3002\n\t<\/p>\n

        \n\t\t(\u6267\u884c\u4f8b1-12\uff1a\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-23\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u7528\u4ee5\u4e0a\u201c\u7b2c1\u9694\u7edd\u5c42\u7684\u4ea7\u751f(\u78c1\u63a7\u6e85\u5c04\u6cd5)\u201d\u7684\u65b9\u5f0f\u4ea7\u751f\u7b2c1\u9694\u7edd\u5c42\uff0c\u6b64\u5916\uff0c\u4e0e\u4f7f\u7528\u4f8b1-6\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u505a\u6210\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-23\u3002\n\t<\/p>\n

        \n\t\t\u300a\u819c\u7ec4\u6210\u5143\u7d20\u6bd4\u7684\u8bc4\u4ef7(O\/Si\u548cN\/Si\u7684\u6df1\u5ea6\u65b9\u5411\u7684\u66f2\u7ebf\u300b\n\t<\/p>\n

        \n\t\t\u884c\u9a76\u4e0b\u5217\u7684\u5b89\u88c5\u548c\u6807\u51c6\uff0c\u5bf9\u4ee5\u4e0a\u505a\u6210\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u7b2c2\u9694\u7edd\u5c42\u7531\u6df1\u5c42\u65b9\u4f4d\u7684\u66f2\u7ebf\u56fe\u7684\u5747\u503c\u7b97\u51faO\/Si\u548cN\/Si\uff0c\u5e76\u793a\u4e8e\u88681\u3002\n\t<\/p>\n

        \n\t\t(\u78c1\u63a7\u6e85\u5c04\u6807\u51c6)\n\t<\/p>\n

        \n\t\t\u6b63\u79bb\u5b50\u79cd\uff1aAr\u6b63\u79bb\u5b50\n\t<\/p>\n

        \n\t\t\u52a0\u5feb\u5de5\u4f5c\u7535\u538b\uff1a1kV\n\t<\/p>\n

        \n\t\t(X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6d4b\u91cf\u6807\u51c6)\n\t<\/p>\n

        \n\t\t\u5b89\u88c5\uff1aVG\u00a0Scientific\u516c\u53f8\u5236ESCALAB-200R\n\t<\/p>\n

        \n\t\tX\u5c04\u7ebf\u9633\u6781\u6c27\u5316\u539f\u6750\u6599\uff1aMg\n\t<\/p>\n

        \n\t\t\u529f\u7387\uff1a600W(\u52a0\u5feb\u5de5\u4f5c\u7535\u538b15kV\uff0c\u53d1\u5c04\u6781\u7535\u6d41\u91cf40mA)\u3002\n\t<\/p>\n

        \n\t\t\u5e94\u4e88\u8868\u660e\uff0c\u6d4b\u91cf\u7684\u5c4f\u5e55\u5206\u8fa8\u7387\u4e3a0.5nm\uff0c\u5728\u4e0e\u5176\u8bf4\u76f8\u5e94\u7684\u5404\u62bd\u6837\u70b9\uff0c\u5c06\u5404\u539f\u7d20\u6bd4\u6210\u56fe\u800c\u5f97\u3002\n\t<\/p>\n

        \n\t\t(FIB\u751f\u4ea7\u52a0\u5de5)\n\t<\/p>\n

        \n\t\t\u5b89\u88c5\uff1aSII\u5236SMI2050\n\t<\/p>\n

        \n\t\t\u751f\u4ea7\u52a0\u5de5\u6b63\u79bb\u5b50\uff1a(Ga\u00a030kV)\n\t<\/p>\n

        \n\t\t(TEM\u89c2\u67e5)\n\t<\/p>\n

        \n\t\t\u5b89\u88c5\uff1a\u65e5\u672c\u7535\u5b50\u5668\u4ef6\u5236JEM2000FX(\u52a0\u5feb\u5de5\u4f5c\u7535\u538b\uff1a200kV)\n\t<\/p>\n

        \n\t\t\u79bb\u5b50\u675f\u76f4\u5c04\u6642\u95f4\uff1a5\u79d2\uff5e60\u79d2\n\t<\/p>\n

        \n\t\t(\u8ddd\u7b2c2\u9694\u7edd\u5c42\u5916\u578b\u7684\u819c\u539a\u7684\u6df1\u5c42\u65b9\u4f4d\u7684\u539f\u7d20\u6bd4)\n\t<\/p>\n

        \n\t\t\u5bf9\u6bd4\u8ddd\u4ee5\u4e0a\u7684\u7b2c2\u9694\u7edd\u5c42\u5916\u578b\u7684\u6839\u636e\u78c1\u63a7\u6e85\u5c04\u800c\u5f97\u7684\u5404\u6df1\u5c42\u7684XPS\u6d4b\u91cf(\u7d27\u7d27\u56f4\u7ed5Si\u3001O\u3001N)\u548c\u884c\u9a76TEM\u89c2\u67e5\u65ad\u5757\u9762\u800c\u5f97\u7684\u5b9e\u9645\u6548\u679c\uff0c\u6d4b\u7b97O\/Si\u548cN\/Si\u7684\u5747\u503c\u3002\n\t<\/p>\n

        \n\t\t\u6b64\u5916\uff0c\u4e0e\u4ee5\u4e0a\u4e00\u6837\u5730\u5f00\u5c55\uff0c\u6d4b\u91cf\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c(\u88681\u4e2d\u7684\u201c\u5916\u578bO\/Si\u201d\u7684\u680f)\u3001\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u8d85\u51fa10nm\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c(\u88681\u4e2d\u7684\u201c\u5167\u90e8O\/Si\u201d\u7684\u680f)\u3001\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u4e2d\u7684\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c(\u88681\u4e2d\u7684\u201c\u5916\u578bN\/Si\u201d\u7684\u680f)\u53ca\u5176\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u8d85\u51fa10nm\u7684\u5730\u533a\u4e2d\u7684\u6c2e\u539f\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c(\u88681\u4e2d\u7684\u201c\u5167\u90e8N\/Si\u201d\u7684\u680f)\u3002\u6b64\u5916\uff0c\u6d4b\u7b97\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u4e3a10nm\u4e4b\u5185\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u4e0e\u5728\u8ddd\u6700\u5916\u578b\u7684\u6df1\u5c42\u8d85\u51fa10nm\u7684\u5730\u533a\u4e2d\u7684\u6c27\u5206\u5b50\u76f8\u5bf9\u6027\u4e8e\u7845\u539f\u5b50\u7684\u5b58\u6709\u6bd4\u7684\u5747\u503c\u7684\u5dee(\u88681\u4e2d\u7684\u201c\u5916\u578b\u5167\u90e8O\/Si\u5dee\u201d\u7684\u680f)\u3002\n\t<\/p>\n

        \n\t\t\u300a\u6c34\u84b8\u6c14\u963b\u9694\u6027\u7684\u8bc4\u4ef7\u300b\n\t<\/p>\n

        \n\t\t\u5404\u81ea\u51c6\u5907\u5c06\u4ee5\u4e0a\u5236\u505a\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u572885\u2103\u300185\uff05RH\u7684\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u66dd\u97321000hr\u540e\u7684\u8bd5\u54c1(\u52a3\u53d8\u5b9e\u9a8c\u540e\u8bd5\u54c1)\u3002\n\t<\/p>\n

        \n\t\t\u6c34\u84b8\u6c7d\u9ad8\u963b\u9694\u7684\u70b9\u8bc4\u5982\u4e0b\u6240\u793a\u5f00\u5c55\uff0c\u5c06\u898180nm\u539a\u7684\u91d1\u5c5e\u9499\u5728\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4e0a\u84b8\u9540\u5236\u819c\uff0c\u5c06\u5236\u819c\u7684\u9499\u505a\u523050\uff05\u7684\u603b\u9762\u79ef\u7684\u6642\u95f4\u505a\u4e3a50\uff05\u603b\u9762\u79ef\u6642\u95f4\u6765\u5f00\u5c55\u70b9\u8bc4(\u53c2\u8003\u4ee5\u4e0b)\u3002\u70b9\u8bc4\u52a3\u53d8\u5b9e\u9a8c\u524d\u540e\u5de6\u53f3\u768450\uff05\u603b\u9762\u79ef\u6642\u95f4\uff0c\u5c06\u52a3\u5316\u5b9e\u9a8c\u540e\u768450\uff05\u603b\u9762\u79ef\u6642\u95f4\/\u52a3\u53d8\u5b9e\u9a8c\u524d\u768450\uff05\u603b\u9762\u79ef\u6642\u95f4\u505a\u4e3a\u7ef4\u6301\u7387(\uff05)\u7b97\u51fa\uff0c\u793a\u4e8e\u88681\u3002\u505a\u4e3a\u7ef4\u6301\u7387\u7684\u6307\u6807\u503c\uff0c\u53ea\u9700\u4e3a70\uff05\u4ee5\u4e0a\u5c31\u6279\u51c6\uff0c\u5c0f\u4e8e70\uff05\u5219\u5206\u8fa8\u4e3a\u4e0d\u9002\u5b9c\u3002\n\t<\/p>\n

        \n\t\t(\u91d1\u5c5e\u9499\u5236\u819c\u5b89\u88c5)\n\t<\/p>\n

        \n\t\t\u84b8\u9540\u5b89\u88c5\uff1a\u65e5\u672c\u7535\u5b50\u5668\u4ef6\u682a\u5f0f\u5236\uff0c\u771f\u7a7a\u6cf5\u84b8\u9540\u5b89\u88c5JEE-400\n\t<\/p>\n

        \n\t\t\u6052\u6e29\u6052\u6e7f\u8bbe\u5907\u70d8\u5e72\u7bb1\uff1aYamato\u00a0Humidic\u00a0ChamberIG47M\n\t<\/p>\n

        \n\t\t(\u539f\u6599)\n\t<\/p>\n

        \n\t\t\u4e0e\u6c34\u4efd\u53cd\u6620\u800c\u6d78\u8680\u7684\u91d1\u5c5e\u6750\u6599\uff1a\u9499(\u9897\u7c92\u72b6)\n\t<\/p>\n

        \n\t\t\u6c34\u84b8\u6c7d\u4e0d\u901a\u8fc7\u6027\u7684\u91d1\u5c5e\u6750\u6599\uff1a\u94dd(\u03c63\uff5e5mm\uff0c\u9897\u7c92\u72b6)\n\t<\/p>\n

        \n\t\t(\u6c34\u84b8\u6c7d\u9ad8\u963b\u9694\u70b9\u8bc4\u8bd5\u4ef6\u7684\u5236\u505a)\n\t<\/p>\n

        \n\t\t\u5e94\u7528\u771f\u7a7a\u6cf5\u84b8\u9540\u5b89\u88c5(\u65e5\u672c\u7535\u5b50\u5668\u4ef6\u5236\u771f\u7a7a\u6cf5\u84b8\u9540\u5b89\u88c5JEE-400)\uff0c\u5728\u5236\u9020\u7684\u6c7d\u4f53\u9694\u7edd\u819c\u7684\u7b2c2\u9694\u7edd\u5c42\u5916\u578b\u6839\u636e\u63a9\u819c\u4ee512mm\u00d712mm\u7684\u89c4\u683c\u84b8\u9540\u91d1\u5c5e\u9499\u3002\u8fd9\u65f6\uff0c\u4f7f\u84b8\u8868\u5c42\u7684\u9540\u819c\u539a\u53d8\u621080nm\u3002\n\t<\/p>\n

        \n\t\t\u53a5\u540e\uff0c\u5728\u771f\u7a7a\u6cf5\u60c5\u51b5\u4e0b\u53bb\u9664\u63a9\u819c\uff0c\u5728\u7247\u4e00\u4fa7\u6574\u5757\u84b8\u9540\u94dd\u819c\u5e76\u4e34\u65f6\u6027\u5bc6\u5c01\u6027\u3002\u7136\u540e\uff0c\u6d88\u9664\u771f\u7a7a\u6cf5\u60c5\u51b5\uff0c\u7075\u5de7\u632a\u5230\u5e72\u8e81N2\u6c1b\u56f4\u4e0b\uff0c\u5728\u94dd\u84b8\u9540\u9762\u4ecb\u7531\u5bc6\u5c01\u6027\u7528\u7d2b\u5916\u5149\u5e72\u56fa\u73af\u6c27\u6811\u8102(Nagase\u00a0Chemtex\u682a\u5f0f\u5236)\u8fce\u5408\u8584\u539a0.2mm\u7684\u77f3\u82f1\u73bb\u7483\u7ba1\uff0c\u76f4\u5c04\u7d2b\u5916\u5149\u4f7f\u73af\u6c27\u6811\u8102\u5e72\u56fa\u7c98\u5408\u540e\u5ba3\u5e03\u5bc6\u5c01\u6027\uff0c\u505a\u6210\u6c34\u84b8\u6c7d\u9ad8\u963b\u9694\u70b9\u8bc4\u8bd5\u4ef6\u3002\n\t<\/p>\n

        \n\t\t\u5c06\u83b7\u5f97\u7684\u8bd5\u4ef6\u572885\u2103\u300185\uff05RH\u7684\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u50a8\u5b58\uff0c\u89c2\u67e5\u91d1\u5c5e\u9499\u76f8\u5bf9\u6027\u4e8e\u50a8\u5b58\u6642\u95f4\u5f00\u5c55\u6d78\u8680\u7684\u6a21\u6837\u3002\u4f9d\u636e\u89c2\u67e5\u5b9e\u9645\u6548\u679c\u6839\u636e\u5e73\u884c\u7ebf\u5185\u63d2\u6c42\u51fa\u76f8\u5bf9\u6027\u4e8e12mm\u00d712mm\u7684\u91d1\u5c5e\u9499\u84b8\u9540\u603b\u9762\u79ef\u7684\u91d1\u5c5e\u9499\u6d78\u8680\u7684\u603b\u9762\u79ef\u505a\u523050\uff05\u7684\u6642\u95f4\uff0c\u5c06\u52a3\u5316\u5b9e\u9a8c\u524d\u540e\u5de6\u53f3\u5b9e\u9645\u6548\u679c\u793a\u4e8e\u88681\u3002\n\t<\/p>\n

        \n\t\t\u5c06\u5404\u6267\u884c\u4f8b\u548c\u5404\u8f83\u4e3a\u4f8b\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u70b9\u8bc4\u5b9e\u9645\u6548\u679c\u793a\u4e8e\u4ee5\u4e0b\u88681\u3002\n\t<\/p>\n

        \n\t\t\n\t<\/p>\n

        \n\t\t\u7531\u4ee5\u4e0a\u88681\u5f97\u77e5\u884c\u9a76\u672c\u4ea7\u54c1\u7684\u6267\u884c\u4f8b\u5236\u505a\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u5c31\u7b97\u5728\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u4e0b\u66dd\u9732\u957f\u671f\u4e5f\u51e0\u4e4e\u4e0d\u4ea7\u751f\u6784\u6210\u53d8\u5316\u5f15\u53d1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u7684\u51cf\u5c11\u3002\n\t<\/p>\n

        \n\t\t\u56e0\u800c\uff0c\u7531\u4ee5\u4e0a\u88681\u5f97\u77e5\u672c\u4ea7\u54c1\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u50a8\u5b58\u7262\u56fa\u6027\u3001\u7279\u522b\u662f\u5728\u5728\u4e25\u82db\u6807\u51c6(\u9ad8\u6eab\u9ad8\u4f4e\u6e29\u6807\u51c6)\u4e0b\u7684\u50a8\u5b58\u7262\u56fa\u6027\u51fa\u8272\u3002\n\t<\/p>\n

        \n\t\t\u5e94\u4e88\u8868\u660e\uff0c\u672c\u4ea7\u54c1\u7684\u7b2c2\u9694\u7edd\u5c42\u4e2d\uff0c\u6d4b\u91cf\u8ddd\u7b2c2\u9694\u7edd\u5c42\u5916\u578b\u7684\u6839\u636e\u78c1\u63a7\u6e85\u5c04(XPS)\u800c\u5f97\u7684\u5404\u6df1\u5c42\u65b9\u4f4d\u7684\u968f\u610f\u70b9\uff0cO\/Si\u5747\u4e3a1.4\uff5e2.2\uff0cN\/Si\u5747\u4e3a0\uff5e0.4\u3002\n\t<\/p>\n

        \n\t\t\u300a\u6709\u673a\u8584\u819c\u7535\u5b50\u8bbe\u5907\u7684\u5236\u4f5c\u300b\n\t<\/p>\n

        \n\t\t\u5e94\u7528\u6c7d\u4f53\u9ad8\u963b\u9694\u819c1-1\uff5e1-23\u505a\u4e3a\u5bc6\u5c01\u6027\u819c\uff0c\u505a\u6210\u505a\u4e3a\u6709\u673a\u5316\u5b66\u5851\u6599\u8584\u819c\u7535\u5b50\u4ea7\u54c1\u7684\u6709\u673aEL\u5143\u5668\u4ef6\u3002\n\t<\/p>\n

        \n\t\t\u3014\u6709\u673aEL\u5143\u5668\u4ef6\u7684\u5236\u505a\u3015\n\t<\/p>\n

        \n\t\t(\u7b2c1\u7535\u7ea7\u5c42\u7684\u4ea7\u751f)\n\t<\/p>\n

        \n\t\t\u5728\u5404\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u7b2c2\u9694\u7edd\u5c42\u4e0a\uff0c\u884c\u9a76\u78c1\u63a7\u6e85\u5c04\u6cd5\u5c06\u8584\u539a150nm\u7684ITO(\u6c27\u5316\u94df\u9521)\u6d82\u819c\uff0c\u884c\u9a76\u5149\u523b\u6cd5\u5f00\u5c55\u56fe\u6848\u5316\uff0c\u4ea7\u751f\u7b2c1\u7535\u7ea7\u5c42\u3002\u5e94\u4e88\u8868\u660e\uff0c\u56fe\u6848\u8bbe\u8ba1\u662f\u95ea\u5149\u603b\u9762\u79ef\u4e3a50mm\u5e73\u65b9\u7c73\u7684\u56fe\u6848\u8bbe\u8ba1\u3002\n\t<\/p>\n

        \n\t\t(\u7a7a\u7a74\u8fd0\u8f93\u5c42\u7684\u4ea7\u751f)\n\t<\/p>\n

        \n\t\t\u7528\u6324\u538b\u4e1d\u7f51\u5370\u5237\u673a\u572825\u2103\u3001\u7a7a\u6c14\u6e7f\u5ea650\uff05RH\u7684\u6761\u4ef6\u4e0b\uff0c\u5728\u4ea7\u751f\u6709\u7b2c1\u7535\u7ea7\u5c42\u7684\u5404\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u7684\u7b2c1\u7535\u7ea7\u5c42\u4e0a\u65bd\u80f6\u4e0b\u5217\u6240\u663e\u793a\u7684\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u540e\uff0c\u4f9d\u7167\u4ee5\u4e0b\u7684\u6807\u51c6\u5f00\u5c55\u5e72\u8e81\u548c\u52a0\u6e29\u89e3\u51b3\uff0c\u4ea7\u751f\u7a7a\u7a74\u8fd0\u8f93\u5c42\u3002\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ee5\u5e72\u8e81\u540e\u7684\u8584\u539a\u53d8\u621050nm\u7684\u65b9\u6cd5\u65bd\u80f6\u3002\n\t<\/p>\n

        \n\t\t\u5728\u65bd\u80f6\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ee5\u524d\uff0c\u5e94\u7528\u5149\u6ce2\u957f184.9nm\u7684\u4f4e\u7535\u538b\u6c5e\u706f\u4ee5\u76f4\u5c04\u6297\u538b\u5f3a\u5ea615mW\/cm2<\/sup>\u3001\u95f4\u8ddd10mm\u6267\u884c\u9ad8\u963b\u9694\u819c\u7684\u6e05\u7406\u5916\u578b\u6539\u6027\u6750\u6599\u89e3\u51b3\u3002\u6d88\u9664\u9759\u7535\u89e3\u51b3\u5e94\u7528\u884c\u9a76\u6b20\u7f3aX\u5c04\u7ebf\u7684\u9664\u5bb6\u7528\u7535\u5668\u5f00\u5c55\u3002\n\t<\/p>\n

        \n\t\t\u3008\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u51c6\u5907\u3009\n\t<\/p>\n

        \n\t\t\u51c6\u5907\u5c06\u805a\u4e9a\u4e59\u57fa\u4e8c\u6c27\u57fa\u567b\u5429\u00b7\u805a\u4e59\u70ef\u78fa\u9178\u76d0(PEDOT\/PSS\uff0cBayer\u516c\u53f8\u5316Bytron\u00a0P\u00a0AI\u00a04083)\u7528\u7eaf\u51c0\u6c3465\uff05\u3001\u5de5\u4e1a\u7532\u91875\uff05\u7a00\u91ca\u6db2\u800c\u5f97\u7684\u9971\u548c\u6eb6\u6db2\u505a\u4e3a\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u3002\n\t<\/p>\n

        \n\t\t\u3008\u5e72\u8e81\u548c\u52a0\u6e29\u89e3\u51b3\u6807\u51c6\u3009\n\t<\/p>\n

        \n\t\t\u65bd\u80f6\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u540e\uff0c\u623f\u5c4b\u671d\u5411\u6d82\u819c\u9762\u4ee5\u76f8\u5bf9\u9ad8\u5ea6100mm\u3001\u55b7\u51fa\u6765\u98ce\u529b1m\/s\u3001\u603b\u5bbd\u7684\u98ce\u529b\u904d\u5e035\uff05\u3001\u6eab\u5ea6100\u2103\u53bb\u9664\u6709\u673a\u6eb6\u5242\u540e\uff0c\u627f\u7ee7\u5e94\u7528\u52a0\u6e29\u89e3\u51b3\u5b89\u88c5\u4ee5\u6eab\u5ea6150\u2103\u5f00\u5c55\u53cd\u9762\u4f20\u70ed\u65b9\u6cd5\u7684\u70ed\u5904\u7406\u5de5\u827a\uff0c\u4ea7\u751f\u7a7a\u7a74\u8fd0\u8f93\u5c42\u3002\n\t<\/p>\n

        \n\t\t(\u95ea\u5149\u5c42\u7684\u4ea7\u751f)\n\t<\/p>\n

        \n\t\t\u7528\u6324\u538b\u4e1d\u7f51\u5370\u5237\u673a\u5728\u4ee5\u4e0a\u4ea7\u751f\u7684\u7a7a\u7a74\u8fd0\u8f93\u5c42\u4e0a\u4ee5\u4ee5\u4e0b\u7684\u6807\u51c6\u65bd\u80f6\u4e0b\u5217\u6240\u663e\u793a\u7684\u4e73\u767d\u8272\u95ea\u5149\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u540e\uff0c\u4ee5\u4ee5\u4e0b\u7684\u6807\u51c6\u5f00\u5c55\u5e72\u8e81\u548c\u52a0\u6e29\u89e3\u51b3\uff0c\u4ea7\u751f\u95ea\u5149\u5c42\u3002\u4e73\u767d\u8272\u95ea\u5149\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ee5\u5e72\u8e81\u540e\u7684\u8584\u539a\u53d8\u621040nm\u7684\u65b9\u6cd5\u65bd\u80f6\u3002\n\t<\/p>\n

        \n\t\t\u3008\u4e73\u767d\u8272\u95ea\u5149\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u3009\n\t<\/p>\n

        \n\t\t\u4f7f\u505a\u4e3a\u4e3b\u8981\u539f\u6750\u6599\u7684\u4ee5\u4e0b\u5316\u5b66\u65b9\u7a0b\u5f0fH-A\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u5316\u5b66\u7269\u8d281.0g\u548c\u505a\u4e3a\u63ba\u6742\u5242\u539f\u6750\u6599\u7684\u4ee5\u4e0b\u5316\u5b66\u65b9\u7a0b\u5f0fD-A\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u5316\u5b66\u7269\u8d28100mg\u3001\u505a\u4e3a\u63ba\u6742\u5242\u539f\u6750\u6599\u7684\u4ee5\u4e0b\u5316\u5b66\u65b9\u7a0b\u5f0fD-B\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u5316\u5b66\u7269\u8d280.2mg\u53ca\u5176\u505a\u4e3a\u63ba\u6742\u5242\u539f\u6750\u6599\u7684\u4ee5\u4e0b\u5316\u5b66\u65b9\u7a0b\u5f0fD-C\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u5316\u5b66\u7269\u8d280.2mg\u6d88\u6eb6\u4e8e100g\u7684\u4e8c\u7532\u82ef\u800c\u505a\u4e3a\u4e73\u767d\u8272\u95ea\u5149\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u51c6\u5907\u3002\n\t<\/p>\n

        \n\t\t\n\t<\/p>\n

        \n\t\t\u3008\u65bd\u80f6\u6807\u51c6\u3009\n\t<\/p>\n

        \n\t\t\u5728N2\u6d53\u5ea6\u503c99\uff05\u4ee5\u4e0a\u7684\u6c1b\u56f4\u4e0b\uff0c\u4f7f\u65bd\u80f6\u6eab\u5ea6\u4e3a25\u2103\uff0c\u4ee5\u65bd\u80f6\u901f\u73871m\/min\u5f00\u5c55\u65bd\u80f6\u5de5\u827a\u6d41\u7a0b\u3002\n\t<\/p>\n

        \n\t\t\u3008\u5e72\u8e81\u548c\u52a0\u6e29\u89e3\u51b3\u6807\u51c6\u3009\n\t<\/p>\n

        \n\t\t\u65bd\u80f6\u4e73\u767d\u8272\u95ea\u5149\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u540e\uff0c\u623f\u5c4b\u671d\u5411\u6d82\u819c\u9762\u4ee5\u76f8\u5bf9\u9ad8\u5ea6100mm\u3001\u55b7\u51fa\u6765\u98ce\u529b1m\/s\u3001\u603b\u5bbd\u7684\u98ce\u529b\u904d\u5e035\uff05\u3001\u6eab\u5ea660\u2103\u53bb\u9664\u6709\u673a\u6eb6\u5242\u540e\uff0c\u627f\u7ee7\u4ee5\u6eab\u5ea6130\u2103\u5f00\u5c55\u52a0\u6e29\u89e3\u51b3\uff0c\u4ea7\u751f\u95ea\u5149\u5c42\u3002\n\t<\/p>\n

        \n\t\t(\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u7684\u4ea7\u751f)\n\t<\/p>\n

        \n\t\t\u7528\u6324\u538b\u4e1d\u7f51\u5370\u5237\u673a\u5728\u4ee5\u4e0a\u4ea7\u751f\u7684\u95ea\u5149\u5c42\u4e0a\u4ee5\u4ee5\u4e0b\u7684\u6807\u51c6\u65bd\u80f6\u4e0b\u5217\u6240\u663e\u793a\u7684\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u540e\uff0c\u4ee5\u4ee5\u4e0b\u7684\u6807\u51c6\u5f00\u5c55\u5e72\u8e81\u548c\u52a0\u6e29\u89e3\u51b3\uff0c\u4ea7\u751f\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u3002\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u4ee5\u5e72\u8e81\u540e\u7684\u8584\u539a\u53d8\u621030nm\u7684\u65b9\u6cd5\u65bd\u80f6\u3002\n\t<\/p>\n

        \n\t\t\u3008\u65bd\u80f6\u6807\u51c6\u3009\n\t<\/p>\n

        \n\t\t\u65bd\u80f6\u5de5\u827a\u6d41\u7a0b\u662f\u5728N2\u6d53\u5ea6\u503c99\uff05\u4ee5\u4e0a\u7684\u6c1b\u56f4\u4e0b\uff0c\u4f7f\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u7684\u65bd\u80f6\u6eab\u5ea6\u4e3a25\u2103\uff0c\u4ee5\u65bd\u80f6\u901f\u73871m\/min\u5f00\u5c55\u7684\u3002\n\t<\/p>\n

        \n\t\t\u3008\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u3009\n\t<\/p>\n

        \n\t\t\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u662f\u5c06\u4ee5\u4e0b\u5316\u5b66\u65b9\u7a0b\u5f0fE-A\u8868\u9732\u4e3b\u8981\u8868\u73b0\u7684\u5316\u5b66\u7269\u8d28\u6d88\u6eb6\u4e8e2,2,3,3-\u56db\u6c1f-1-\u4e19\u9187\u4e2d\u800c\u505a\u62100.5\u51c0\u91cd\uff05\u9971\u548c\u6eb6\u6db2\uff0c\u505a\u4e3a\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u3002\n\t<\/p>\n

        \n\t\t\n\t<\/p>\n

        \n\t\t\u3008\u5e72\u8e81\u548c\u52a0\u6e29\u89e3\u51b3\u6807\u51c6\u3009\n\t<\/p>\n

        \n\t\t\u65bd\u80f6\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4ea7\u751f\u7528\u65bd\u80f6\u6db2\u540e\uff0c\u623f\u5c4b\u671d\u5411\u6d82\u819c\u9762\u4ee5\u76f8\u5bf9\u9ad8\u5ea6100mm\u3001\u55b7\u51fa\u6765\u98ce\u529b1m\/s\u3001\u603b\u5bbd\u7684\u98ce\u529b\u904d\u5e035\uff05\u3001\u6eab\u5ea660\u2103\u53bb\u9664\u6709\u673a\u6eb6\u5242\u540e\uff0c\u627f\u7ee7\u5728\u52a0\u6e29\u89e3\u51b3\u90e8\u4ee5\u6eab\u5ea6200\u2103\u5f00\u5c55\u52a0\u6e29\u89e3\u51b3\uff0c\u4ea7\u751f\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u3002\n\t<\/p>\n

        \n\t\t(\u7535\u5b50\u5668\u4ef6\u5f15\u5165\u5c42\u7684\u4ea7\u751f)\n\t<\/p>\n

        \n\t\t\u5728\u4ee5\u4e0a\u4ea7\u751f\u7684\u7535\u5b50\u5668\u4ef6\u8fd0\u8f93\u5c42\u4e0a\u4ea7\u751f\u7535\u5b50\u5668\u4ef6\u5f15\u5165\u5c42\u3002\u6700\u5148\uff0c\u5c06\u57fa\u6750\u8d44\u91d1\u6295\u5165\u7f13\u89e3\u538b\u529b\u8154\u5ba4\uff0c\u7f13\u89e3\u538b\u529b\u81f35\u00d710-4<\/sup>Pa\u3002\u4e8b\u5148\u5728\u771f\u5185\u8154\u5ba4\u91cc\u5c06\u4e8b\u5148\u5728\u94bd\u5236\u84b8\u9540\u821f\u76bf\u4e2d\u51c6\u5907\u7684\u6c1f\u5316\u94ef\u52a0\u6e29\uff0c\u4ea7\u751f\u8584\u539a3nm\u7684\u7535\u5b50\u5668\u4ef6\u5f15\u5165\u5c42\u3002\n\t<\/p>\n

        \n\t\t(\u7b2c2\u7535\u7ea7\u7684\u4ea7\u751f)\n\t<\/p>\n

        \n\t\t\u5728\u4ee5\u4e0a\u4ea7\u751f\u7684\u7535\u5b50\u5668\u4ef6\u5f15\u5165\u5c42\u4e0a\u4f46\u4e0d\u5305\u62ec\u7b2c1\u7535\u7ea722\u7684\u53d8\u6210\u5f15\u51fa\u6765\u7535\u7ea7\u7684\u4e00\u90e8\u5206\u7684\u4e00\u90e8\u5206\uff0c\u57285\u00d710-4<\/sup>Pa\u7684\u771f\u7a7a\u6cf5\u4e0b\uff0c\u5e94\u7528\u94dd\u505a\u4e3a\u7b2c2\u7535\u7ea7\u4ea7\u751f\u539f\u6750\u6599\uff0c\u4ee5\u5177\u5907\u53d6\u51fa\u7535\u7ea7\u7684\u65b9\u6cd5\u7528\u84b8\u9540\u6cd5\u4ee5\u95ea\u5149\u603b\u9762\u79ef\u53d8\u621050mm\u5e73\u65b9\u7c73\u7684\u5f62\u5f0f\u5f00\u5c55\u63a9\u819c\u56fe\u6848\u8bbe\u8ba1\u6d82\u819c\uff0c\u91cd\u53e0\u8584\u539a100nm\u7684\u7b2c2\u7535\u7ea7\u3002\n\t<\/p>\n

        \n\t\t(\u526a\u88c1)\n\t<\/p>\n

        \n\t\t\u5c06\u5982\u4e0b\u6240\u793a\u4ea7\u751f\u5230\u7b2c2\u7535\u7ea7\u624d\u884c\u7684\u5404\u91cd\u53e0\u4f53\u518d\u5ea6\u632a\u5230N2\u6c14\u6c1b\u4e0b\uff0c\u5e94\u7528\u7d2b\u5916\u5149\u6fc0\u5149\u5668\u526a\u88c1\u6210\u8981\u6c42\u7684\u5c3a\u5bf8\uff0c\u505a\u6210\u6709\u673aEL\u5143\u5668\u4ef6\u3002\n\t<\/p>\n

        \n\t\t(\u7535\u7ea7\u5bfc\u7ebf\u8054\u63a5)\n\t<\/p>\n

        \n\t\t\u5e94\u7528Sony\u00a0Chemical&Information\u00a0Device\u682a\u5f0f\u5236\u7684\u5404\u79cd\u5404\u6837\u5bfc\u7535\u819cDP3232S9\uff0c\u5c06\u5236\u505a\u7684\u6709\u673aEL\u5143\u5668\u4ef6\u4e0e\u6320\u6027\u5305\u88c5\u5370\u5237\u57fa\u6750(\u57fa\u819c\uff1a\u805a\u4e19\u70ef\u814812.5\u03bcm\uff0c\u51b7\u8f67\u94dc\u6cca18\u03bcm\uff0c\u8986\u76d6\uff1a\u805a\u4e19\u70ef\u814812.5\u03bcm\uff0c\u5916\u578b\u89e3\u51b3\uff1a\u9540NiAu)\u8054\u63a5\u3002\n\t<\/p>\n

        \n\t\t\u94c6\u538b\u6807\u51c6\uff1a\u4ee5\u6eab\u5ea6170\u2103(\u5e94\u7528\u6b64\u5916\u7684\u70ed\u7535\u963b\u6d4b\u91cf\u7684ACF\u6eab\u5ea6140\u2103)\u3001\u5de5\u4f5c\u538b\u529b2MPa\uff0c\u5f00\u5c5510\u79d2\u538b\u63a5\u3002\n\t<\/p>\n

        \n\t\t(\u5bc6\u5c01\u6027)\n\t<\/p>\n

        \n\t\t\u505a\u4e3a\u5bc6\u5c01\u6027\u6784\u4ef6\uff0c\u51c6\u5907\u5982\u4e0b\u6240\u793a\u5236\u505a\u7684\u5bc6\u5c01\u6027\u6784\u4ef6\uff0c\u5373\uff0c\u5e94\u7528\u5e72\u8bd5\u538b\u5c42\u7528\u7684\u7c98\u7ed3\u5242(\u4e8c\u6db2\u53cd\u6620\u578b\u7684\u805a\u6c28\u916f\u6750\u6599\u7cfb\u7c98\u7ed3\u5242)\u572830\u03bcm\u539a\u7684\u94dd\u94c2(\u4e1c\u65b9\u94dd\u682a\u5f0f\u5236)\u9876\u5c42\u538b(\u7c98\u7ed3\u5242\u5c42\u7684\u8584\u539a1.5\u03bcm)\u805a\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f(PET)\u819c(12\u03bcm\u539a)\u3002\n\t<\/p>\n

        \n\t\t\u5728\u51c6\u5907\u7684\u5bc6\u5c01\u6027\u6784\u4ef6\u7684\u94dd\u9762\u5e94\u7528\u8c03\u8282\u5668\u6cbf\u94dd\u94c2\u7684\u7c98\u5408\u9762(\u5149\u6cfd\u5ea6\u9762)\u4ee5\u8584\u539a20\u03bcm\u5300\u79f0\u5730\u65bd\u80f6\u70ed\u5e72\u56fa\u6027\u7c98\u7ed3\u5242\uff0c\u4ea7\u751f\u7c98\u7ed3\u5242\u5c42\u3002\n\t<\/p>\n

        \n\t\t\u8fd9\u65f6\uff0c\u505a\u4e3a\u70ed\u5e72\u56fa\u6027\u7c98\u7ed3\u5242\uff0c\u5e94\u7528\u5e26\u6709\u4e0b\u5217\u6210\u4efd\u7684\u73af\u6c27\u6811\u8102\u7cfb\u7c98\u7ed3\u5242\u3002\n\t<\/p>\n

        \n\t\t\u53cc\u915aA\u4e8c\u51fa\u73b0\u7f29\u6c34\u7518\u6cb9\u919a(DGEBA)\u3001\u53cc\u6c30\u80fa(DICY)\u3001\u73af\u6c27\u6811\u8102\u52a0\u6301\u7269\u7cfb\u5e72\u56fa\u786b\u5316\u4fc3\u8fdb\u5242\u3002\n\t<\/p>\n

        \n\t\t\u5c06\u5bc6\u5c01\u6027\u6784\u4ef6\u4ee5\u906e\u76d6\u5f15\u51fa\u6765\u7535\u7ea7\u548c\u7535\u7ea7\u5bfc\u7ebf\u7684\u7ed3\u5408\u90e8\u7684\u5f62\u5f0f\u5f00\u5c55\u5bc6\u5408\u00b7\u914d\u5907\uff0c\u5e94\u7528\u538b\u63a5\u8f8a\u4ee5\u94c6\u538b\u6807\u51c6\u3001\u538b\u63a5\u8f8a\u6eab\u5ea6120\u2103\u3001\u5de5\u4f5c\u538b\u529b0.5MPa\u3001\u5b89\u88c5\u901f\u73870.3m\/min\u5f00\u5c55\u5bc6\u5408\u5bc6\u5c01\u6027\u3002\n\t<\/p>\n

        \n\t\t\u300a\u6709\u673aEL\u5143\u4ef6\u7684\u8bc4\u4ef7\u300b\n\t<\/p>\n

        \n\t\t\u4f9d\u7167\u4ee5\u4e0b\u7684\u65b9\u5f0f\uff0c\u5bf9\u4ee5\u4e0a\u5236\u505a\u7684\u6709\u673aEL\u5143\u5668\u4ef6\u5f00\u5c55\u8010\u7528\u6027\u7684\u70b9\u8bc4\u3002\n\t<\/p>\n

        \n\t\t\u3014\u8010\u7528\u6027\u7684\u70b9\u8bc4\u3015\n\t<\/p>\n

        \n\t\t(\u52a0\u5feb\u52a3\u53d8\u89e3\u51b3)\n\t<\/p>\n

        \n\t\t\u5c06\u4ee5\u4e0a\u5236\u505a\u7684\u5404\u6709\u673aEL\u5143\u5668\u4ef6\u572885\u2103\u300185\uff05RH\u7684\u6761\u4ef6\u4e0b\u6267\u884c500\u5206\u949f\u7684\u52a0\u5feb\u52a3\u53d8\u89e3\u51b3\u540e\uff0c\u5f00\u5c55\u4ee5\u4e0b\u7684\u6709\u5173\u6697\u6591\u7684\u70b9\u8bc4\u3002\n\t<\/p>\n

        \n\t\t(\u6697\u6591(DS\u3001\u5c0f\u9ed1\u70b9)\u7684\u70b9\u8bc4)\n\t<\/p>\n

        \n\t\t\u5bf9\u6267\u884c\u4e86\u52a0\u5feb\u52a3\u53d8\u89e3\u51b3\u7684\u6709\u673aEL\u5143\u5668\u4ef6\u53e6\u52a01mA\/cm2<\/sup>\u7684\u7535\u6d41\u91cf\uff0c\u4f7f\u5176\u6301\u7eed\u95ea\u514924\u5c0f\u65f6\u540e\uff0c\u7528100\u500d\u7684\u5149\u5b66\u663e\u5fae\u955c(MORITEX\u682a\u5f0f\u5236MS-804\uff0c\u955c\u7247MP-ZE25-200)\u5c06\u63a7\u5236\u9762\u677f\u7684\u4e00\u90e8\u5206\u53d8\u5927\uff0c\u5f00\u5c55\u62cd\u7167\u3002\u5c06\u62cd\u7167\u56fe\u8c61\u5207\u5272\u6210\u76f8\u5f53\u4e8e2mm\u539a\u4e3a\u7684\u89c4\u683c\uff0c\u6c42\u51fa\u6697\u6591\u7684\u9020\u6210\u603b\u9762\u79ef\u6bd4\u4f8b\uff0c\u4f9d\u7167\u4ee5\u4e0b\u7684\u6807\u51c6\u70b9\u8bc4\u8010\u7528\u6027\u3002\u5018\u82e5\u70b9\u8bc4\u7ea7\u522b\u4e3a\u25b3\u5219\u5224\u65ad\u4e3a\u98df\u7528\u7684\u7279\u70b9\uff0c\u5018\u82e5\u4e3a\u25cb\u5219\u5224\u65ad\u4e3a\u66f4\u9002\u7528\u7684\u7279\u70b9\uff0c\u5018\u82e5\u4e3a\u25ce\u5219\u5224\u65ad\u4e3a\u538b\u6839\u6c92\u6709\u9898\u578b\u7684\u7504\u9009\u7684\u7279\u70b9\u3002\n\t<\/p>\n

        \n\t\t\u25ce\uff1a\u6697\u6591\u9020\u6210\u7387\u5c0f\u4e8e0.3\uff05\n\t<\/p>\n

        \n\t\t\u25cb\uff1a\u6697\u6591\u9020\u6210\u7387\u662f0.3\uff05\u4ee5\u4e0a\u4e14\u5c0f\u4e8e1.0\uff05\n\t<\/p>\n

        \n\t\t\u25b3\uff1a\u6697\u6591\u9020\u6210\u7387\u662f1.0\uff05\u4ee5\u4e0a\u4e14\u5c0f\u4e8e2.0\uff05\n\t<\/p>\n

        \n\t\t\u00d7\uff1a\u6697\u6591\u9020\u6210\u7387\u662f2.0\uff05\u4ee5\u4e0a\u4e14\u5c0f\u4e8e5.0\uff05\n\t<\/p>\n

        \n\t\t\u00d7\u00d7\uff1a\u6697\u6591\u9020\u6210\u7387\u662f5.0\uff05\u4ee5\u4e0a\u3002\n\t<\/p>\n

        \n\t\t\u5c06\u6697\u6591\u7684\u70b9\u8bc4\u5b9e\u9645\u6548\u679c\u793a\u4e8e\u4ee5\u4e0b\u88682\u3002\n\t<\/p>\n

        \n\t\t[\u88682]\n\t<\/p>\n

        \n\t\t\n\t<\/p>\n

        \u00a0\u6709\u673aEL\u5143\u5668\u4ef6\u819cNo.DS\u70b9\u8bc4\u8f83\u4e3a\u4f8b1-12-11-1\u00d7\u00d7\u8f83\u4e3a\u4f8b1-22-21-2\u00d7\u00d7\u8f83\u4e3a\u4f8b1-32-31-3\u00d7\u00d7\u8f83\u4e3a\u4f8b1-42-41-4\u00d7\u00d7\u8f83\u4e3a\u4f8b1-52-51-5\u00d7\u00d7\u8f83\u4e3a\u4f8b1-62-61-6\u00d7\u8f83\u4e3a\u4f8b1-72-71-7\u00d7\u6267\u884c\u4f8b1-12-81-8\u25b3\u8f83\u4e3a\u4f8b1-82-91-9\u00d7\u6267\u884c\u4f8b1-22-101-10\u25b3\u6267\u884c\u4f8b1-32-111-11\u25b3\u8f83\u4e3a\u4f8b1-92-121-12\u00d7\u6267\u884c\u4f8b1-42-131-13\u25cb\u6267\u884c\u4f8b1-52-141-14\u25ce\u6267\u884c\u4f8b1-62-151-15\u25cb\u6267\u884c\u4f8b1-72-161-16\u25ce\u6267\u884c\u4f8b1-82-171-17\u25cb\u8f83\u4e3a\u4f8b1-102-181-18\u00d7\u6267\u884c\u4f8b1-92-191-19\u25b3\u6267\u884c\u4f8b1-102-201-20\u25b3\u8f83\u4e3a\u4f8b1-112-211-21\u00d7\u6267\u884c\u4f8b1-112-221-22\u25cb\u6267\u884c\u4f8b1-122-231-23\u25ce<\/p>\n\n\t<\/table>\n

        \n\t\t\u7531\u4ee5\u4e0a\u88682\u5f97\u77e5\uff0c\u6839\u636e\u5c06\u884c\u9a76\u672c\u4ea7\u54c1\u7684\u6267\u884c\u4f8b\u5236\u505a\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u819c\u4f5c\u4e3a\u6709\u673aEL\u5143\u5668\u4ef6\u7684\u5c01\u53e3\u819c\uff0c\u8fdb\u800c\u5177\u5907\u51cf\u5c11\u6697\u6591\u9020\u6210\u7684\u7d50\u679c\uff0c\u5177\u5907\u5c24\u5176\u5f88\u662f\u9ad8\u7684\u6c7d\u4f53\u9ad8\u963b\u9694\u3002\n\t<\/p>\n

        \n\t\t\u5e94\u4e88\u8868\u660e\uff0c\u672c\u7533\u8bf7\u529e\u7406\u6839\u636e2013\u5e741\u670831\u65e5\u7533\u8bf7\u529e\u7406\u7684\u65e5\u672c\u56fd\u7533\u8bf7\u4e13\u5229\u7b2c2013-017257\u53f7\uff0c\u53c2\u8003\u5176\u516c\u5e03\u5167\u5bb9\u5e76\u56e2\u961f\u5f15\u5165\u3002\n\t<\/p>\n

        <\/p>\n

         <\/p>\n

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