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style=\"color: #3e3e3e;\">\u3000\u30002.2PECVD\u673a\u5668\u8bbe\u5907\u7684\u4e3b\u8981\u6784\u9020<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000PECVD\u673a\u5668\u8bbe\u5907\u5173\u952e\u7531\u771f\u7a7a\u6cf5\u548c\u5de5\u4f5c\u538b\u529b\u64cd\u7eb5\u7ba1\u7406\u4f53\u7cfb\u3001\u6dc0\u79ef\u7ba1\u7406\u4f53\u7cfb\u3001\u6c7d\u4f53\u53ca\u6d41\u91cf\u76d1\u63a7\u3001\u7ba1\u7406\u4f53\u7cfb\u5b89\u5168\u6027\u73cd\u60dc\u7ba1\u7406\u4f53\u7cfb\u3001\u8ba1\u7b97\u673a\u7cfb\u7edf\u63a7\u5236\u7b49\u90e8\u4efd\u6784\u6210\u3002\u5176\u673a\u5668\u8bbe\u5907\u6784\u9020\u6846\u67b6\u56fe\u5982\u4e0b\u56fe2\u6240\u663e\u793a\u3002<\/p>\n<p style=\"text-align: center; color: #3e3e3e;\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131235-61b9e9c37b507.png\" alt=\"\" \/><\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u30002.2.1\u771f\u7a7a\u6cf5\u548c\u5de5\u4f5c\u538b\u529b\u64cd\u7eb5\u7ba1\u7406\u4f53\u7cfb<\/p>\n<p style=\"color: 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style=\"color: #3e3e3e;\">\u3000\u30002.2.2\u6dc0\u79ef\u7ba1\u7406\u4f53\u7cfb<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\u6dc0\u79ef\u7ba1\u7406\u4f53\u7cfb\u7531\u5c04\u9891\u7535\u6e90\u3001\u6c34\u51b7\u6563\u70ed\u7ba1\u7406\u4f53\u7cfb\u3001\u7845\u7247\u52a0\u6e29\u5b89\u88c5\u7b49\u6784\u6210\u3002\u5b83\u662fPECVD\u7684\u5173\u952e\u4e00\u90e8\u5206\u3002\u5c04\u9891\u7535\u6e90\u7684\u529f\u6548\u662f\u4f7f\u53cd\u6620\u6c7d\u4f53\u79bb\u5b50\u5316\u3002\u6c34\u51b7\u6563\u70ed\u7ba1\u7406\u4f53\u7cfb\u5173\u952e\u4e3aPECVD\u7ba1\u7406\u4f53\u7cfb\u7684\u771f\u7a7a\u6cf5\u3001\u7f57\u8328\u771f\u7a7a\u6cf5\u3001\u5e72\u6cf5\u3001\u5206\u5b50\u6cf5\u7b49\u7ed9\u4e88\u5236\u51b7\uff0c\u5f53\u6e29\u5ea6\u8d85\u51fa\u6cf5\u58f3\u89c4\u5b9a\u7684\u6c14\u6e29\u65f6\uff0c\u5b83\u4f1a\u53d1\u51fa\u58f0\u54cd\u9526\u65d7\u53f7\u706f\u3002\u51b7\u5374\u5faa\u73af\u6c34\u7684\u7ba1\u9053\u9009\u7528\u5851\u6599\u8f6f\u7ba1\u7b49\u7edd\u7f18\u5c42\u6750\u6599\uff0c\u4e0d\u80fd\u7528\u91d1\u5c5e\u8f6f\u7ba1\u3002\u7845\u7247\u52a0\u6e29\u5b89\u88c5\u7684\u529f\u6548\u4f7f\u8bd5\u54c1\u63d0\u6e29\u5230\u52a0\u5de5\u5de5\u827a\u89c4\u5b9a\u6eab\u5ea6\uff0c\u795b\u9664\u8bd5\u54c1\u4e0a\u7684\u6c34\u84b8\u6c7d\u7b49\u6b8b\u6e23\uff0c\u4ee5\u53d1\u5c55\u5851\u6599\u8584\u819c\u4e0e\u8bd5\u54c1\u7684\u7c98\u5408\u529b\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u30002.2.3\u6c7d\u4f53\u53ca\u6d41\u91cf\u76d1\u63a7\u7ba1\u7406\u4f53\u7cfb<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000PECVD\u7ba1\u7406\u4f53\u7cfb\u7684\u6c14\u52a8\u9600\u95e8\u51e0\u4e4e\u662f\u7531\u6c7d\u4f53\u6c14\u74f6\u6c14\u8def\uff0c\u8fd9\u79cd\u6c14\u74f6\u88ab\u7f6e\u653e\u5728\u6709\u5f88\u591a\u5b89\u5168\u6027\u73cd\u60dc\u5b89\u88c5\u7684\u6c14\u67dc\u4e2d\uff0c\u6839\u636e\u6c14\u67dc\u4e0a\u7684\u64cd\u4f5c\u9762\u677f\u3001\u7ba1\u8def\u4f20\u81f3PECVD\u7684\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u4e2d\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\u5728\u6dc0\u79ef\u65f6\uff0c\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u662f\u591a\u5c11\u4f1a\u5371\u5bb3\u6dc0\u79ef\u7684\u901f\u5ea6\u4ee5\u53ca\u5747\u8861\u6027\u7b49\uff0c\u56e0\u800c\u5fc5\u9700\u4e25\u82db\u64cd\u7eb5\u6c14\u4f53\u538b\u529b\uff0c\u901a\u5e38\u9009\u7528\u6d41\u91cf\u8ba1\u6765\u5b8c\u6210\u6070\u5f53\u64cd\u7eb5\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\n<p style=\"font-size: 14px; color: inherit;\">3\u666e\u904d\u9898\u578b\u53ca\u5371\u5bb3\u52a0\u5de5\u5de5\u827a\u5173\u952e\u8981\u7d20<\/p>\n<p style=\"color: #3e3e3e;\">\n<p style=\"color: #3e3e3e;\">\u3000\u30003.1\u673a\u5668\u8bbe\u5907\u666e\u904d\u9898\u578b\u53ca\u89e3\u51b3\u5bf9\u7b56<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u30003.1.1\u6ca1\u6cd5\u8d77\u8f89<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\u6ca1\u6cd5\u8d77\u8f89\u539f\u56e0\u7f18\u7531\u548c\u89e3\u51b3\u5bf9\u7b56\uff1a<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff081\uff09\u5c04\u9891\u7535\u6e90\u5e38\u89c1\u6545\u969c\uff0c\u67e5\u9a8c\u5fae\u6ce2\u5c04\u9891\u6e90\u7535\u6e90\u989d\u5b9a\u529f\u7387\u5bfc\u51fa\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n<p style=\"color: 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#3e3e3e;\">\u3000\u3000\uff082\uff09\u771f\u7a7a\u7cfb\u7edf\u5de5\u4f5c\u538b\u529b\u4e0d\u7262\u56fa\uff0c\u67e5\u9a8c\u7bb1\u4f53\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u6f0f\u7387\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\uff0c\u67e5\u9a8c\u7bb1\u4f53\u8fdb\u4f9b\u6c14\u91cf\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff083\uff09\u7535\u7f06\u6545\u969c\u6d4b\u8bd5\uff0c\u67e5\u9a8c\u7535\u7f06\u7ebf\u89e6\u78b0\u662f\u4e0d\u662f\u51fa\u8272\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u30003.1.3\u6d82\u819c\u54c1\u8d28\u5dee<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff081\uff09\u6837\u7167\u5916\u578b\u6d01\u51c0\u5ea6\u5dee\uff0c\u67e5\u9a8c\u8bd5\u54c1\u5916\u578b\u662f\u4e0d\u662f\u6e05\u7406\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff082\uff09\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u6d01\u51c0\u5ea6\u5dee\uff0c\u6e05\u7406\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u3002<\/p>\n<p style=\"color: 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#3e3e3e;\">\u3000\u3000\uff081\uff09\u5fae\u6ce2\u5c04\u9891\u8f93\u5165\u529f\u7387\u4e0d\u9002\u5408\uff0c\u8c03\u8282\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff082\uff09\u8bd5\u54c1\u6eab\u5ea6\u5341\u5206\uff0c\u67e5\u9a8c\u5236\u51b7\u51fa\u6c34\u91cf\u53ca\u6eab\u5ea6\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff083\uff09\u771f\u7a7a\u6cf5\u7bb1\u4f53\u5de5\u4f5c\u538b\u529b\u4f4e\uff0c\u8c03\u8282\u52a0\u5de5\u5de5\u827a\u6c14\u4f53\u538b\u529b\u3002<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u30003.1.5\u53cd\u6620\u7bb1\u4f53\u5de5\u4f5c\u538b\u529b\u4e0d\u7262\u56fa<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\uff081\uff09\u68c0\u67e5\u8bbe\u5907\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u7684\u7ba1\u4ef6\u662f\u4e0d\u662f\u6709\u88c2\u75d5\u3002<\/p>\n<p style=\"color: 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#3e3e3e;\">\u3000\u30003.2.5\u886c\u5e95\u6eab\u5ea6<\/p>\n<p style=\"color: #3e3e3e;\">\u3000\u3000\u886c\u5e95\u6eab\u5ea6\u5bf9\u5851\u6599\u8584\u819c\u54c1\u8d28\u7684\u5371\u5bb3\u5173\u952e\u53d6\u51b3\u4e8e\u5c40\u57df\u7f51\u6001\u5bc6\u5ea6\u3001\u7535\u5b50\u5668\u4ef6\u8fc1\u79fb\u7387\u53ca\u5176\u819c\u7684\u7535\u5b50\u5149\u5b66\u7279\u6027\uff0c\u886c\u5e95\u6eab\u5ea6\u7684\u53d1\u5c55\u6709\u76ca\u4e8e\u5851\u6599\u8584\u819c\u5916\u578b\u60ac\u67b6\u952e\u7684\u8d54\u507f\uff0c\u4f7f\u5851\u6599\u8584\u819c\u7684\u677f\u6750\u76f8\u5bf9\u5bc6\u5ea6\u7740\u9646\u3002<\/p>\n<p style=\"color: 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