![](\"\/wp-content\/uploads\/2021\/12\/20211215131210-61b9e9aa329ef.jpg\")
\n\t\t<\/p>\n<\/p>\n\n\t\t\u4e8c\u6c27\u5316\u7845\u539f\u6750\u6599\u5173\u952e\u4ee5\u7c89\u4f53\u8bbe\u5907\u539f\u6750\u6599\u7684\u5f62\u52bf\u51fa\u73b0\u5982\u4eca\u5de5\u4e1a\u751f\u4ea7\u4f7f\u7528\u7684\u5404\u884c\u5404\u4e1a\uff0c\u5982\u7845\u5fae\u7c89\u3001\u51f9\u51f8\u68d2\u571f\u7c89\u4f53\u8bbe\u5907\u3001\u767d\u78b3\u9ed1\uff08\u6c14\u76f8\u8272\u8c31\u6cd5\u4e8c\u6c27\u5316\u7845\uff09\u7b49\u3002\u6587\u4e2d\u5c06\u5448\u73b0\u4e8c\u6c27\u5316\u7845\u7684\u6b64\u5916\u4e00\u79cd\u5f62\u72b6\u7684\u8fd0\u7528\uff0c\u90a3\u4fbf\u662f\u4e8c\u6c27\u5316\u7845\u5851\u6599\u8584\u819c\u7684\u5e94\u7528\u9886\u57df\u3002<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u7535\u5b50\u5149\u5b66\u884c\u4e1a\uff1a\u5728\u7535\u5b50\u5149\u5b66\u52a0\u5de5\u5de5\u827a\u4e2d\uff0cSiO2\u5851\u6599\u8584\u819c\u56e0\u5176\u4f18\u5f02\u7684\u7535\u7edd\u7f18\u6027\u80fd\u548c\u52a0\u5de5\u5de5\u827a\u7684\u53ef\u884c\u6027\u5206\u6790\u800c\u88ab\u666e\u904d\u9009\u7528\u3002\u5728\u534a\u5bfc\u4f53\u5143\u5668\u4ef6\u4e2d\uff0c\u884c\u9a76SiO2\u7981\u5e26\u5bbd\u5ea6\u53ef\u53d8\u7684\u7279\u70b9\uff0c\u53ef\u505a\u4e3a\u975e\u6676\u7845\u592a\u9633\u80fd\u7535\u6c60\u7684\u5851\u6599\u8584\u819c\u5149\u6c72\u53d6\u5c42\uff0c\u4ee5\u53d1\u5c55\u5149\u6c72\u53d6\u542c\u4ece\uff1b\u8fd8\u53ef\u505a\u4e3a\u91d1\u5c5e\u6750\u65992\u6c2e\u5316\u5408\u72692\u91d1\u5c5e\u6c27\u5316\u72692\u534a\u5bfc\u4f53\u6750\u6599(MNSO\uff09\u50a8\u5b58\u5668\u4ef6\u4e2d\u7684\u6b63\u7535\u8377\u50a8\u5b58\u5c42\uff0c\u7535\u5b50\u5668\u4ef6\u4e2dCMOS\u5143\u5668\u4ef6\u548ciGeMOS\u5143\u5668\u4ef6\u53ca\u5176\u5851\u6599\u8584\u819c\u6676\u4f53\u4e09\u6781\u7ba1(TFT)\u4e2d\u7684\u6805\u7269\u8d28\u5c42\u7b49\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u9664\u6b64\u4e4b\u5916\uff0c\u4f34\u968f\u7740\u89c4\u6a21\u6027\u7535\u5b50\u5668\u4ef6\u5143\u5668\u4ef6\u5904\u7406\u901f\u5ea6\u7684\u53d1\u5c55\uff0c\u53cc\u5c42\u8d70\u7ebf\u6280\u672f\u6027\u8d8a\u6765\u8d8a\u66f4\u52a0\u7126\u8651\u4e0d\u5b89\uff0c\u5982\u903b\u8f91\u6027\u5143\u5668\u4ef6\u7684\u6838\u5fc3\u7269\u8d28\u5c42\u5c06\u63d0\u9ad8\u52304\uff5e5\u5c42,\u8fd9\u5c31\u89c4\u5b9a\u51cf\u5c11\u7269\u8d28\u5c42\u4ea7\u751f\u7684\u5206\u5e03\u7535\u5bb9\u3002\u73b0\u9636\u6bb5\u5e7f\u6cdb\u91c7\u53d6\u7684\u5236\u53d6\u7269\u8d28\u5c42\u7684SiO 2\uff0c\u5176\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u7ea6\u4e3a4.0\uff0c\u5e76\u5177\u5907\u51fa\u8272\u7684\u7269\u7406\u6027\u80fd\u3002\u5982\u7528\u4ee5\u7845\u529f\u7387\u5927\u7684\u53cc\u6781\u6676\u4f53\u4e09\u6781\u7ba1\u7ba1\u82af\u5e73\u9762\u56fe\u548c\u6a71\u67dc\u53f0\u9762\u949d\u5316\uff0c\u53d1\u5c55\u6216\u7ef4\u6301\u4e86\u7ba1\u82af\u7684\u51fb\u7a7f\u7535\u538b\uff0c\u5e76\u53d1\u5c55\u4e86\u6676\u4f53\u4e09\u6781\u7ba1\u7684\u7262\u56fa\u6027\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u7535\u5b50\u5149\u5b66\u884c\u4e1a\uff1a\u5f53\u4ecaSi\u57faSiO2\u5149\u6ce2\u5bfc\u5fae\u6ce2\u611f\u5e94\u5668\u548c\u6709\u6e90\u5668\u4ef6\u7684\u5e94\u7528\u6280\u672f\u65e9\u5df2\u975e\u5e38\u5f88\u662f\u5b8c\u5584\uff0c\u8fd9\u7c7b\u5143\u5668\u4ef6\u4e0d\u4f46\u5177\u5907\u7cbe\u6e5b\u7684\u4f20\u8f93\u7279\u70b9\uff0c \u8fd8\u5177\u6709\u5149\u53d8\u5927\u3001\u95ea\u5149\u548c\u5149\u7535\u8c03\u914d\u7b49\u57fa\u672c\u8981\u7d20\uff0c \u5728\u7535\u5b50\u5149\u5b66\u96c6\u6210\u5316\u548c\u5149\u5b66\u96c6\u6210\u5316\u5143\u5668\u4ef6\u5c42\u9762\u5f88\u6709\u5e94\u7528\u524d\u666f\u3002\u4e2d\u56fd\u5de5\u7a0b\u7269\u7406\u7814\u7a76\u9662\u4e0e\u6709\u673a\u5316\u5b66\u5e38\u7528\u6eb6\u80f6\u51dd\u80f6\u6cd5\u53d6\u5f97\u6210\u529f\u5730\u7814\u5236\u5f00\u53d1\u51fa\u7d2b\u5916\u5149\u6fc0\u5149\u5668SiO 2 \u51cf\u53cd\u819c\u3002\u5b9e\u9645\u6548\u679c\u6ce8\u91ca\uff0c \u6e17\u5165\u6d82\u5c42\u6cd5\u5236\u53d6\u7684\u591a\u5b54\u7ed3\u6784SiO2 \u5851\u6599\u8584\u819c\u6bd4\u521d\u671f\u7684\u771f\u7a7a\u84b8\u53d1\u548c\u8f6c\u52a8\u6d82\u5c42\u6cd5\u5236\u53d6\u7684SiO 2 \u5851\u6599\u8584\u819c\u6709\u66f4\u5feb\u7684\u51cf\u53cd\u5c04\u9762\u7d50\u679c\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u522b\u7684\u5c42\u9762\uff1a\u975e\u6676\u6001SiO2\u5851\u6599\u8584\u819c\u7531\u4e8e\u5177\u5907\u5341\u5206\u7cbe\u6e5b\u7684\u8d1f\u7535\u7535\u6c60\u5145\u7535\u548c\u50a8\u5b58\u5de5\u4f5c\u80fd\u529b\uff0c \u53d8\u6210\u6709\u673a\u7269\u9a7b\u6781\u4f53\u7684\u7279\u70b9\u539f\u6750\u6599\uff0c\u4e0e\u65e9\u5df2\u83b7\u5f97\u5e7f\u6cdb\u8fd0\u7528\u7684\u4f20\u7edf\u5f0f\u6709\u673a\u9ad8\u5206\u5b50\u9ad8\u805a\u7269\u9a7b\u6781\u4f53\u5bf9\u6bd4\uff0c\u4ee5\u5149\u4f0f\u7535\u6c60\u4e3a\u7845\u7247\u7684SiO2\u5851\u6599\u8584\u819c\u9a7b\u6781\u4f53\u6beb\u65e0\u7591\u95ee\u5177\u5907\u4e0d\u80fd\u6bd4\u8f83\u7684\u5f15\u98ce\u3002\u9664\u5f00\u6b63\u7535\u8377\u5b58\u50a8\u4f7f\u7528\u5bff\u547d\u957f(\u53ef\u8fbe200\uff5e 500 \u5e74)\u3001\u6297\u9ad8\u6eab\u6781\u7aef\u81ea\u7136\u73af\u5883\u5de5\u4f5c\u80fd\u529b\u5f3a(\u53ef\u5728\u8fd1200\u2103\u6eab\u5ea6\u533a\u57df\u5185\u5de5\u4f5c\u4e2d)\u5916\uff0c\u8fd8\u80fd\u591f\u548c\u5f53\u4eca\u7845\u534a\u5bfc\u4f53\u6750\u6599\u52a0\u5de5\u5de5\u827a\u7d27\u5bc6\u7ed3\u5408\uff0c\u5b8c\u6210\u5c0f\u578b\u5316\u4e43\u81f3\u7535\u5b50\u5668\u4ef6\u5316\u3002\u5728\u9a7b\u6781\u4f53\u7535\u58f0\u5143\u5668\u4ef6\u4e0e\u611f\u5e94\u5668\u4ef6\u3001\u9a7b\u6781\u4f53\u592a\u9633\u80fd\u53d1\u7535\u677f\u3001\u9a7b\u6781\u4f53\u7535\u673a\u4e0e\u7535\u673a\u7b49\u5c42\u9762\u5f97\u5230\u66f4\u666e\u904d\u7684\u8fd0\u7528\u3002\u5728ITO\u5168\u900f\u660e\u5bfc\u7535\u6027\u5939\u5c42\u73bb\u7483\u4e2d\uff0cSiO2\u53ef\u505a\u4e3a\u94be\u79bb\u5b50\u963b\u6321\u5c42\u3002\u8fd1\u4e9b\u5e74\uff0c\u4f34\u968f\u7740\u80f6\u4f53\u6eb6\u6db2\u7591\u80f6\u6280\u672f\u6027\u7684\u98de\u901f\u53d1\u5c55\uff0c\u9009\u7528\u8fd9\u7c7b\u52a0\u5de5\u5de5\u827a\u5728\u5939\u5c42\u73bb\u7483\u5916\u578b\u6d78\u9576\u4e0a\u4e00\u5c42\u4e8c\u6c27\u5316\u7845\u5851\u6599\u8584\u819c\u5df2\u53d8\u4e3a\u4e00\u79cd\u6bd4\u8f83\u597d\u7684\u539f\u6750\u6599\u6297\u538b\u5f3a\u5ea6\u6539\u6027\u6750\u6599\u65b9\u5f0f\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u975e\u6676SiO2\u8fd8\u80fd\u591f\u7528\u4ee5\u9ad8\u963b\u9694\u98df\u54c1\u5305\u88c5\u7eb8\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\uff08CVD\uff09\uff1aCVD\u6cd5\u5236\u53d6SiO2\u53ef\u4ee5\u7528\u4e0b\u5217\u51e0\u7c7b\u53cd\u6620\u7cfb\u7edf\u8f6f\u4ef6:SiH4-O2\u3001SiH4-N2O\u3001SiH2Cl2-N2O\u3001Si(OC2H5)4\u7b49\u3002\u5404\u79cd\u5404\u6837\u4e0d\u4e00\u6837\u7684\u5236\u53d6\u65b9\u5f0f \u548c\u4e0d\u4e00\u6837\u7684\u53cd\u6620\u7cfb\u7edf\u8f6f\u4ef6\u751f\u957f\u53d1\u80b2SiO2\u6240\u89c4\u5b9a\u7684\u673a\u5668\u8bbe\u5907\u548c\u6280\u672f\u6807\u51c6\u4e5f\u4e0d\u7c7b\u540c\uff0c\u4e14\u5206\u522b\u6709\u7740\u4e0d\u4e00\u6837\u7684\u7528\u5904\u548c\u4f18\u7455\u73b7\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef(PVD)\uff1a\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u5173\u952e\u5206\u6210\u6325\u53d1\u8868\u5c42\u7684\u9540\u819c\u3001\u6b63\u79bb\u5b50\u8868\u5c42\u7684\u9540\u819c\u548c\u78c1\u63a7\u6e85\u5c04\u8868\u5c42\u7684\u9540\u819c\u4e09\u5927\u7c7b\u3002\u5728\u5176\u4e2d\u771f\u7a7a\u84b8\u53d1\u8868\u5c42\u7684\u9540\u819c \u6280\u672f\u6027\u53d1\u751f\u8f83\u65e9\uff0c\u4f46\u6b64\u65b9\u6cd5\u5806\u79ef\u7684\u819c\u4e0e\u57fa\u6750\u7684\u7ed3\u5408\u6027\u4e0d\u5f3a\u3002\u82f1\u56fdIBM\u4f01\u4e1a\u7814\u5236\u5f00\u53d1\u51fa\u5c04\u9891\u6e85\u5c04\u6cd5\uff0c\u8fdb\u800c\u7ec4\u6210\u4e86PVD\u6280\u672f\u6027\u7684\u4e09\u5927\u7cfb\u5217\u4ea7\u54c1\u2014\u2014\u6325\u53d1\u9540\uff0c\u78c1\u63a7\u6e85\u5c04\u9540\u548c\u7b49\u79bb\u5b50\u55b7\u6d82\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\n\t\t\u82db\u5316\u6cd5\uff1a\u82db\u5316\u52a0\u5de5\u5de5\u827a\u662f\u5728\u9ad8\u6eab\u4e0b(900\uff5e1200\u2103)\u4f7f\u5355\u6676\u7845\u7247\u5916\u578b\u7a7a\u6c14\u6c27\u5316\u4ea7\u751fSiO 2 \u819c\u7684\u65b9\u5f0f\uff0c\u5305\u542b\u5e72\u6c27\u6c27\u5316\u3001\u6e7f\u6c27\u6c27\u5316\u53ca\u5176\u6c34\u6c7d\u6c27\u5316\u3002\n\t<\/p>\n
\n\t\t\u6eb6\u80f6\u51dd\u80f6\u6cd5\uff1a\u6eb6\u80f6\u51dd\u80f6\u6cd5\u662f\u4e00\u79cd\u8d85\u4f4e\u6e29\u590d\u5408\u6750\u6599\u7684\u65b9\u5f0f\uff0c\u662f\u539f\u6750\u6599\u7814\u7a76\u9886\u57df\u7684\u7f51\u7edc\u70ed\u70b9\u3002\u73b0\u9636\u6bb5\u5728\u8fd9\u91cc\u5c42\u9762\u5df2\u83b7\u5f97\u4e86\u6bd4\u8f83\u5927\u8fdb\u5ea6\u3002\u901a\u5e38\uff0c\u591a\u5b54\u7ed3\u6784SiO2\u5851\u6599\u8584\u819c\u7684\u7279\u70b9\u501f\u52a9\u80f6\u4f53\u6eb6\u6db2\u3001\u7591\u80f6\u7684\u5236\u53d6\u6807\u51c6\u3001\u64cd\u7eb5\u8bd5\u9a8c\u6807\u51c6(\u5982\u80f6\u4f53\u6eb6\u6db2\u6210\u5206\u3001pH\u503c\u3001\u8870\u8001\u6eab\u5ea6\u53ca\u6642\u95f4\u3001\u6d41\u56de\u7b49)\uff0c\u53ef\u5f97\u5230\u6298\u5149\u7387\u57281.009\uff5e1.440\u3001\u6301\u7eed\u53ef\u8c03\u5f0f\u3001\u6784\u9020\u53ef\u63a7\u6027\u7684SiO2\u7eb3\u7c73\u6280\u672f\u4e92\u8054\u7f51\u3002\n\t<\/p>\n
\n\t\t\n\t<\/p>\n
\t\t\u603b\u7ed3\uff1a<\/p>\n
\n\t\t SiO2\u5851\u6599\u8584\u819c\u505a\u4e3a\u4e8c\u6c27\u5316\u7845\u539f\u6750\u6599\u5927\u5bb6\u65cf\u4e2d\u7684\u7126\u8651\u4e0d\u5b89\u7ec4\u5458\uff0c\u5bf9\u5176\u5f00\u53d1\u8bbe\u8ba1\u5177\u5907\u5f88\u7126\u8651\u4e0d\u5b89\u7684\u5b9e\u9645\u610f\u4e49\u3002\u4fe1\u4efb\u4f34\u968f\u7740\u7ba1\u7406\u79d1\u5b66\u7684\u63d0\u5347\uff0c\u7eb3\u7c73\u6280\u672fSiO2\u5851\u6599\u8584\u819c\u4f1a\u8fdb\u4e00\u6b65\u73b0\u4ee3\u5316\uff0c\u5e76\u5e7f\u6cdb\u8fd0\u7528\u4e8e\u5404\u884c\u5404\u4e1a\u3002\n\t<\/p>\n
\n\t\t\t\u7eb3\u7c73\u9632\u6c34\u7f51\uff1a\/\n\t\t<\/p>\n
\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u7eb3\u7c73\u9632\u6c34\u5fae\u4fe1\u53f7\u7801: nanowp\n\t\t\t<\/p>\n
\n\t\t<\/p>\n<\/p>\n
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