{"id":19711,"date":"2022-01-27T10:31:06","date_gmt":"2022-01-27T02:31:06","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=19711"},"modified":"2022-01-18T15:05:35","modified_gmt":"2022-01-18T07:05:35","slug":"hmdso-cvd%e6%b3%95%e9%95%80%e9%ab%98%e9%98%bb%e9%9a%94%e8%86%9c%e6%9c%89%e9%82%a3%e4%ba%9b%e5%90%88%e9%80%82%e7%9a%84%e7%ba%b3%e7%b1%b3%e6%b6%82%e5%b1%82%e8%86%9c%e6%9d%90%e6%96%99","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=19711","title":{"rendered":"HMDSO CVD\u6cd5\u9540\u9ad8\u963b\u9694\u819c\u6709\u90a3\u4e9b\u5408\u9002\u7684\u7eb3\u7c73\u6d82\u5c42\u819c\u6750\u6599"},"content":{"rendered":"<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131203-61b9e9a3bc4d9.png\" alt=\"\" \/>\n\t<\/p>\n<p style=\"text-align: center\">\u6700\u5148\uff0c\u4ec0\u4e48\u662fCVD\u8868\u5c42\u7684\u9540\u819c\u6cd5\uff1f\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u8bf4\u767d\u4e86CVD\uff08\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff09\uff0c\u4fbf\u662f\u5bf9\u539f\u6750\u6599\u6c7d\u4f53\u5f00\u5c55\u52a0\u6e29\uff0c\u4f4e\u6e29\u7b49\u79bb\u5b50\u6eb6\u89e3\uff0c\u518d\u4f7f\u5176\u5806\u79ef\u5230\u677f\u6750\u5916\u578b\u7684\u8868\u5c42\u7684\u9540\u819c\u65b9\u5f0f\u3002\u53ef\u4ea7\u751f\u9644\u7740\u6027\u51fa\u8272\u7684\u5851\u6599\u8584\u819c\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> CVD\u52a0\u5de5\u5de5\u827a\uff0c\u662f\u5c06\u5177\u5907\u84b8\u6c14\u5de5\u4f5c\u538b\u529b\u7684\u539f\u6599\u5f00\u5c55\u6c7d\u5316\uff0c\u4ee5\u6c7d\u4f53\u60c5\u51b5\u63d0\u4f9b\u5230\u53cd\u6620\u69fd\uff0c\u7ed9\u4e0e\u5176\u6beb\u65e0\u7591\u95ee\u7684\u52a8\u80fd\u4f7f\u5176\u5f00\u5c55\u6eb6\u89e3\u30fb\u53cd\u6620\uff0c\u5e76\u5728\u677f\u6750\u7684\u5916\u578b\u5806\u79ef\u4ea7\u751f\u5851\u6599\u8584\u819c\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u4f9b\u70edCVD\u52a0\u5de5\u5de5\u827a\uff0c\u662f\u6839\u636e\u70ed\u539f\u5c06\u6750\u6599\u6c7d\u4f53\u5f00\u5c55\u6eb6\u89e3\u5f00\u5c55\u6d82\u819c\u7684\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u4f8b\u5982:\u5bf9\u6c2f\u7845\u70f7\uff08SiH4\uff09\u5f00\u5c55\u5206\u89e3\u53cd\u5e94\uff0c\u53ef\u4ea7\u751f\u591a\u7ed3\u6676\u7845Si\u3002\u8fd9\u65f6\u5018\u82e5\u5728o2\u6c1b\u56f4\u4e0b\u6765\u6eb6\u89e3\u5f97\u8bdd\uff0c\u53ef\u4ee5\u4ea7\u751fSiO2\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u7b80\u5355\u7684\u4f9b\u70edCVD\uff0c\u56e0\u6750\u6599\u6c7d\u4f53\u7684\u63d0\u4f9b\u56e0\u4f4d\u7f6e\u7684\u5dee\u5f02\u800c\u5b58\u6709\u662f\u591a\u5c11\u4e4b\u5206\uff0c\u4f1a\u51fa\u73b0\u8584\u539a\u4e0d\u5300\u79f0\u7684\u72b6\u51b5\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u5018\u82e5\u5e94\u7528\u7f13\u89e3\u538b\u529bCVD\uff08LPCVD\uff09\u8fd9\u4e00\u65b9\u5f0f\uff0c\u53ef\u62d3\u5bbd\u5206\u5b50\u7ed3\u6784\u7684\u5747\u503c\u968f\u610f\u884c\u7a0b\u5b89\u6392\uff0c\u4fc3\u4f7f\u5206\u5b50\u7ed3\u6784\u66f4\u4fbf\u4e8e\u8513\u5ef6\uff0c\u83b7\u5f97\u53d1\u5c55\u819c\u539a\u5747\u4e00\u6027\u7684\u7d50\u679c\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u5018\u82e5\u5e94\u7528\u9ad8\u9891\u7387\u52a8\u80fd\u66ff\u4ee3\u9ad8\u4f9b\u70ed\u52a8\u80fd\u5f97\u8bdd\uff0c\u53ef\u5b8c\u6210\u8d85\u4f4e\u6e29\u60c5\u51b5\u4e0b\u8868\u5c42\u7684\u9540\u819c\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u6b64\u5236\u53d6\u65b9\u5f0f\u88ab\u79f0\u4f5cPlasmaCVD\uff08\u4f4e\u6e29\u7b49\u79bb\u5b50CVD\uff09\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u7535\u7ea7\u4e0e\u677f\u6750\u76f8\u5bf9\u6027\uff0c\u6839\u636e\u9ad8\u9891\u653e\u7535\uff0c\u5c06\u539f\u6599\u5f00\u5c55\u6eb6\u89e3\u8868\u5c42\u7684\u9540\u819c\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131203-61b9e9a3ddf8b.png\" alt=\"\" \/>\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> PlasmaCVD \u8868\u5c42\u7684\u9540\u819c\u7684\u53d8\u5316\u5b9e\u4f8b\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u4f4e\u6e29\u7b49\u79bb\u5b50CVD\u53ef\u5bf9\u5404\u79cd\u5404\u6837\u6750\u6599\u6c7d\u4f53\u30fb\u4f4e\u6e29\u7b49\u79bb\u5b50\u6c7d\u4f53\u76f8\u7ec4\u6210\u5e94\u7528\u3002\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131204-61b9e9a408ee4.png\" alt=\"\" \/>\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u6750\u6599\u6c7d\u4f53\u7c7b\u578b\u6df1\u539a\u4e94\u5f69\u7f24\u7eb7\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131204-61b9e9a427b38.png\" alt=\"\" \/>\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u4e3a\u4e86\u66f4\u597d\u5730\u5e94\u7528\u6c2f\u7845\u70f7\u52a1\u5fc5\u5177\u5907\u5b89\u5168\u7ba1\u7406\u4f53\u7cfb\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> Bulk Silane Installation (CGA)\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u5927\u5b97\u5546\u54c1\u6c2f\u7845\u70f7\u7ba1\u7406\u4f53\u7cfb\u5b89\u88dd(\u82f1\u56fd\u538b\u7f29\u7a7a\u6c14\u7814\u7a76\u4f1a)\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u4e3a\u4e86\u66f4\u597d\u5730\u5e94\u7528\u6c2f\u7845\u70f7\u52a1\u5fc5\u5b8c\u5168\u4fdd\u8bc1\u5b89\u5168\u7ba1\u7406\u4f53\u7cfb\u7684\u8003\u8651\u3002\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131204-61b9e9a44c1d9.png\" alt=\"\" \/>\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u4e3a\u4e86\u66f4\u597d\u5730\u5e94\u7528\u6c2f\u7845\u70f7\u52a1\u5fc5\u5177\u6709\u5de5\u4f5c\u4eba\u5458\u5b89\u5168\u9632\u62a4\u7ba1\u7406\u4f53\u7cfb\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> Personal Protective Equipment (PPE)\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u81ea\u6211\u5b89\u5168\u9632\u62a4\u5668\u6750\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u52a1\u5fc5\u6709\u8db3\u591f\u7684\u8003\u8651\u7528\u4e8e\u73cd\u60dc\u5de5\u4f5c\u4eba\u5458\u3002\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022General Cylinder Handling \u4e00\u6837\u5e73\u65f6\u6c14\u74f6\u5b9e\u9645\u64cd\u4f5c\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -safety glasses \u5b89\u5168\u6027\u8fd1\u89c6\u773c\u955c\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -leather gloves \u80f6\u76ae\u624b\u5957\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -safety shoes \u9632\u62a4\u978b\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022System Operations \u7ba1\u7406\u4f53\u7cfb\u5b9e\u9645\u64cd\u4f5c\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -Faceshield in addition to safety glasses \u5b89\u5168\u6027\u8fd1\u89c6\u773c\u955c\u53e6\u52a0\u60ac\u67b6\u9762\u5177\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -Nomex or equivalent full body protection with hood Nomex \u6216\u662f\u5212\u4e00\u7ea7\u7684\u5168\u8eab\u4e0a\u4e0b\u6234\u5e3d\u9632\u62a4\u8863\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -leather gloves or equivalent flame resistant hand protection \u80f6\u76ae\u624b\u5957\u6216\u5212\u4e00\u7ea7\u9632\u706b\u5b89\u5168\u624b\u81c2\u5b89\u5168\u9632\u62a4\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022Emergency Operations \u5e94\u6025\u5e94\u53d8\u529b\u5b9e\u9645\u64cd\u4f5c\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -Self Contained Breathing Apparatus \u72c2\u5984\u81ea\u5927\u5f0f\u5438\u6c14\u5668\u6750\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -Full body Nomex with hood \u5168\u8eab\u4e0a\u4e0b\u8fde\u5e3dNomex\u9632\u62a4\u8863\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> -Optional &#8211; proximity or entry suit \u91c7\u7528\u2013\u6d88\u9632\u5b89\u5168\u7528\u9632\u706b\u5b89\u5168\u8863\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> Silane Incidents \u6c2f\u7845\u70f7\u76f8\u5173\u5b89\u5168\u4e8b\u6545\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022Accidental backflow of Nitrous Oxide into Silane Cylinder \u2013 System Design Issue \u4e00\u6c27\u5316\u4e8c\u6c2e \u96be\u6d4b\u9006\u6d41\u6ce8\u5165\u6c2f\u7845\u70f7\u6c14\u74f6\u2013\u7ba1\u7406\u4f53\u7cfb\u8bbe\u8ba1\u65b9\u6848\u9898\u578b\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022Cylinder Connection Leak Incident, US 2004 \u2013 Improper cylinder connection 2004\u5e74,\u82f1\u56fd\u6c14\u74f6\u5bf9\u63a5\u70b9\u6cc4\u9732\u5b89\u5168\u4e8b\u6545- \u8fde\u63a5\u5934\u6b20\u4f73\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022Taiwan, Silane Explosion, Nov. 23, 2005 \u2013 Operation Issue 2005 \u5e7411 \u670823\u65e5, \u4e2d\u56fd\u53f0\u6e7e\u6c2f\u7845\u70f7\u53d1\u751f\u7206\u70b8\u2013\u5b9e\u9645\u64cd\u4f5c\u539f\u56e0\u7f18\u7531\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022Silane Leak &amp; Explosion Changsha, China Aug 17, 2009 \u2013Operation Issue 2009 \u5e748\u670817\u65e5, \u6211\u56fd\u957f\u6c99\u5e02\u6c2f\u7845\u70f7\u6cc4\u9732\u53ca\u53d1\u751f\u7206\u70b8\u2013\u5b9e\u9645\u64cd\u4f5c\u8981\u7d20\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u2022Silane fire in South China, Jul. 20 2011 \u2013 System Design Issue 2011 \u5e747\u6708\u6c2f\u7845\u70f7\u706b\u707e\u4e8b\u6545\uff0c\u6211\u56fd\u5357\u65b9\u2013 \u7ba1\u7406\u4f53\u7cfb\u8bbe\u8ba1\u65b9\u6848\u9898\u578b\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> The Silane Explosion Incident(\u6c2f\u7845\u70f7\u7206\u70b8\u4e8b\u4ef6)\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<p>\t<img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131204-61b9e9a47419b.png\" alt=\"\" \/><\/p>\n<p> The Silane Explosion Incident(\u6c2f\u7845\u70f7\u7206\u70b8\u4e8b\u4ef6)\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> \u795e\u94a2KOBELCO \u7684PlasmaCVD \u5e94\u7528\u53ef\u9760\u7684HMDSO\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> HMDSO\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> HEXAMETHYLDISILOXANE\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> C6H18OSi2\n\t<\/p>\n<p style=\"color:#3E3E3E;font-family:\"> Vapor pressure 55mmHg(30\u2103\uff09\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131204-61b9e9a494f3a.png\" alt=\"\" \/>\n<\/p>\n<p style=\"color:#3E3E3E;font-family:\">\n\t<\/p>\n<p style=\"text-align: center\"> <img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/20211215131204-61b9e9a4b55ef.png\" alt=\"\" \/>\n<\/p>\n<p style=\"text-align: center\">\u5b89\u5168\u6027\uff0c\u7ecf\u6d4e\u53d1\u5c55\uff0c\u987a\u624b\u53ef\u83b7\u5f97\u7684HMDSO\u88ab\u8fd0\u7528\u4e8e\u795e\u94a2KOBELCO 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