{"id":19620,"date":"2022-01-13T10:11:38","date_gmt":"2022-01-13T02:11:38","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=19620"},"modified":"2022-01-08T11:08:30","modified_gmt":"2022-01-08T03:08:30","slug":"%e6%b2%89%e7%a7%af%e5%8e%8b%e5%8a%9b%e5%af%b9parylene-c-%e8%86%9c%e6%80%a7%e8%83%bd%e7%9a%84%e5%bd%b1%e5%93%8d-2","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=19620","title":{"rendered":"\u6c89\u79ef\u538b\u529b\u5bf9Parylene C \u819c\u6027\u80fd\u7684\u5f71\u54cd"},"content":{"rendered":"

\u6458\u3000\u8981\u3000\u9009\u7528X X\u5c04\u7ebf\u900f\u5c04(XRD), MOCON \u900f\u6c14\u6027\u4eea\u7b49\u79d1\u5b66\u7814\u7a76\u4e86\u4e0d\u4e00\u6837\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6Pary lene C \u819c\u7684\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u6c34\u84b8\u6c14\u901a\u8fc7\u6027\u3001\u6297\u62c9\u5f3a\u5ea6\u3001\u96fe\u5ea6\u3001\u6e05\u6670\u5ea6\u968f\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u7684\u53d8\u5316\u89c4\u5f8b\u6027\u3002\u5b9e\u9645\u6548\u679c\u6ce8\u91ca, \u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, Pary lene C \u819c\u76f8\u5bf9\u6027\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u900f\u6c14\u6027\u7279\u6027\u3001\u6297\u62c9\u5f3a\u5ea6\u3001\u6e05\u6670\u5ea6\u7740\u9646, \u96fe\u5ea6\u6269\u5927\u3002<\/p>\n

\u5173\u952e\u5b57\u3000Parylene C , \u5806\u79ef\u5de5\u4f5c\u538b\u529b, \u73bb\u7483\u5316\u6e29\u5ea6<\/p>\n

<\/p>\n

\u3000\u3000Pary lene C \u5851\u6599\u8584\u819c(Poly(chlor o-p-Xylylene), \u901a\u79f0PC \u819c)\u56e0\u5177\u5907\u7cbe\u6e5b\u7684\u6c7d\u4f53\u4e0e\u6c34\u84b8\u6c14\u963b\u6321\u7279\u6027\u3001\u7269\u7406\u5b66\u7269\u7406\u6027\u80fd\u3001\u7535\u7edd\u7f18\u6027\u80fd\u3001\u76f8\u6eb6\u6027\u53ca\u5176\u8010\u8150\u8680\u7b49\u7279\u6027, \u8fdb\u800c\u5728\u534a\u5bfc\u4f53\u6750\u6599\u3001\u7535\u5b50\u5668\u4ef6\u3001\u7535\u5b50\u5149\u5b66\u673a\u68b0\u8bbe\u5907\u7ba1\u7406\u4f53\u7cfb\u3001\u611f\u5e94\u5668\u3001\u533b\u7528\u4eea\u5668\u3001\u73cd\u8d35\u6587\u7269\u73cd\u60dc\u3001\u539f\u6750\u6599\u9632\u6c34\u8986\u76d6\u7b49\u8bb8\u591a\u65b9\u9762\u83b7\u5f97\u5e7f\u6cdb\u8fd0\u7528\u3002\u5728PC \u819c\u6d82\u819c\u5168\u8fc7\u7a0b\u4e2d, \u57fa\u6750\u6eab\u5ea6\u3001\u57fa\u6750\u5916\u578b\u60c5\u51b5\u3001\u88c2\u5316\u6eab\u5ea6\u3001\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u7b49\u5bf9\u819c\u7279\u6027\u548c\u54c1\u8d28\u90fd\u662f\u6709\u6beb\u65e0\u7591\u95ee\u7684\u5371\u5bb3\u3002\u5728\u5176\u4e2d, \u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u662f\u6700\u7126\u8651\u4e0d\u5b89\u7684\u5f71\u54cd\u56e0\u7d20, \u5728\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5\u96f7\u4e0e\u6b64\u540c\u65f6, \u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u5371\u5bb3\u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c, \u800c\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c\u5371\u5bb3\u6d82
\u819c\u6c47\u805a\u5168\u8fc7\u7a0b[ 1-3] \u3002<\/p>\n

\u672c\u65b9\u5f0f\u5b9e\u73b0\u5728\u4e0d\u4e00\u6837\u5300\u901f\u8fd0\u52a8\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6\u4e86PC \u819c, \u5e76\u5bf9\u819c\u5806\u79ef\u901f\u5ea6\u3001\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u900f\u6c14\u6027\u7279\u6027\u3001\u6297\u62c9\u5f3a\u5ea6\u3001\u6e05\u6670\u5ea6\u3001\u96fe\u5ea6\u5f00\u5c55\u4e86\u5256\u6790, \u79d1\u5b66\u7814\u7a76\u4e86\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9PC \u819c\u7279\u6027\u7684\u5371\u5bb3, \u5bf9PC \u9540\u5c42\u751f\u4ea7\u5de5\u827a\u53d1\u5c55\u5177\u5907\u7126\u8651\u4e0d\u5b89\u5b9e\u9645\u610f\u4e49\u3002<\/p>\n

<\/p>\n

1 \u3000\u8bd5\u9a8c\u4e00\u90e8\u5206
1 .1 \u3000\u6d82\u5c42\u5236\u53d6
\u673a\u5668\u8bbe\u5907:PDS2060 \u9540\u5c42\u7089;\u6750\u6599:C \u578b\u73af\u4e8c\u4f53;\u653e\u6599\u91cf:200g ;\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5:15mT ;\u5806\u79ef\u5ba4\u771f\u7a7a\u503c:\u5404\u81ea\u4e3a40mT \u300150mT \u300160 m T \u300170 m T;\u88c2\u89e3\u7089\u6eab\u5ea6:690\u2103;\u6d82\u5c42\u677f\u6750:\u6253\u78e8\u629b\u5149\u77f3\u82f1\u77f3\u73bb\u7483;\u5806\u79ef\u5ba4:\u03a5460mm \u00d7330mm \u3002
1 .2 \u3000X\u5c04\u7ebf\u884d\u5c04(XRD)\u5256\u6790
\u9009\u7528Philips Analy tical X-Ray , \u52a0\u5feb\u5de5\u4f5c\u7535\u538b:40kV ;\u626b\u63cf\u4eea\u89c6\u89d2:5.05\u00b0\uff5e 34.95\u00b0;\u626b\u63cf\u65f6\u95f4:10min;\u6301\u7eed\u9010\u884c\u626b\u63cf\u3002
1 .3 \u3000\u6d82\u5c42\u6e05\u6670\u5ea6\u3001\u96fe\u5ea6\u68c0\u6d4b
\u9009\u7528\u6cd5\u56fdDiffusion \u4f01\u4e1aM57D \u578b\u96fe\u5ea6\u8ba1\u6309GB2410-80\u89c4\u8303\u5f00\u5c55\u68c0\u6d4b\u3002
1 .4 \u3000\u6d82\u5c42\u900f\u6c14\u6027\u529f\u80fd\u6d4b\u8bd5
\u9009\u7528MOCON PERMAT RAN-W 3\/33MG \u578b\u900f\u6c14\u6027\u7279\u6027\u68c0\u6d4b\u4eea, \u68c0\u6d4b\u5de5\u4f5c\u6e29\u5ea620 \u00b12 \u2103, \u68c0\u6d4b\u6eab\u5ea637.8 \u2103;N2 \u603b\u6d41\u91cf(100\u00b11)sccm ;\u5851\u6599\u8584\u819c\u4e00\u4fa7\u7a7a\u6c14\u6e7f\u5ea6\u4e3a100%, \u53e6\u4e00\u4fa7\u8d34\u8fd10%, \u6570\u636e\u4fe1\u606f\u5206\u8fa8\u65b9\u5f0f\u4e3a\u7a0b\u5e8f\u6d41\u7a0b\u79ef\u6781\u5faa\u73af\u7cfb\u7edf\u65b9\u5f0f\u3002
1 .5 \u3000\u6d82\u5c42\u62c9\u7533\u529f\u80fd\u6d4b\u8bd5
\u9009\u7528\u5170\u5149XLW(L)PC \u578b\u667a\u80fd\u8bbe\u5907\u62c9\u529b\u6d4b\u8bd5\u673a, \u6309GB13022-91 \u8bd5\u884c\u6837, \u68c0\u6d4b\u5de5\u4f5c\u6e29\u5ea6:(20 \u00b12)\u2103;\u62c9\u7533\u901f\u7387:100mm\/ min ;\u8bd5\u54c1\u603b\u5bbd:15mm \u3002
2 \u3000\u5b9e\u9645\u6548\u679c\u4e0e\u63a2\u8ba8
2 .1 \u3000\u73bb\u7483\u5316\u6e29\u5ea6\u4e0e\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u5173\u8054<\/p>\n

\"\" <\/p>\n

\u56fe1 \u4e3a\u4e0d\u4e00\u6837\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6PC \u819c\u7684XRD \u8d8b\u52bf\u56fe, PC \u819c\u5728\u7ea614\u00b0\u5904\u53d1\u751f\u4e86\u7ed3\u6676\u4f53\u5cf0, \u5cf0\u6297\u538b\u5f3a\u5ea6\u3001\u5cf0\u5bbd\u968f\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347\u800c\u51cf\u5c11, \u800c\u5cf0\u7684\u6297\u538b\u5f3a\u5ea6\u610f\u5473\u7740\u4e86\u819c\u7684\u76f8\u5bf9\u6027\u73bb\u7483\u5316\u6e29\u5ea6, \u56e0\u6b64PC \u819c\u73bb\u7483\u5316\u6e29\u5ea6\u968f\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347\u800c\u51cf\u5c11\u3002\u8fd9\u5173\u952e\u662f\u5728\u8f83\u4f4e\u5de5\u4f5c\u538b\u529b\u4e0b, \u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c\u8f83\u4f4e, \u5355\u4e2a\u6709\u5145\u8db3\u6642\u95f4\u5f00\u5c55\u6c47\u805a, \u5176\u6c47\u805a\u66f4\u8d8b\u4e8e\u4e95\u7136\u6709\u5e8f\u3001\u9ad8\u5bc6\u5ea6[ 4] , \u4ea7\u751fPC \u819c\u73bb\u7483\u5316\u6e29\u5ea6\u8f83\u9ad8;\u5f53\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u589e\u9ad8\u540e, \u5355\u4e2a\u6d53\u5ea6\u503c\u63d0\u9ad8, \u5806\u79ef\u901f\u5ea6\u6269\u5927, \u4e00\u90e8\u5206\u5355\u5206\u5b50\u7ed3\u6784\u8d76\u4e0d\u53ca\u4e95\u7136\u6709\u5e8f\u5806\u79ef, \u8fdb\u800c\u4f7f\u819c\u7684\u73bb\u7483\u5316\u6e29\u5ea6\u51cf\u5c11\u3002\u5316\u5de5\u65b0\u578b\u6750\u6599\u7b2c35 \u5377Gazicki M[5] \u7684\u79d1\u5b66\u7814\u7a76\u6ce8\u91ca, \u4f34\u968f\u7740\u73af\u4e8c\u4f53\u63d0\u5347\u901f\u5ea6\u52a0\u901f, PC\u819c\u5185\u4e8c\u805a\u7269\u548c\u4f4e\u805a\u7269\u5c06\u660e\u663e\u589e\u52a0\u3002\u5728\u8f83\u9ad8\u7684\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0b,\u63d0\u5347\u901f\u5ea6\u52a0\u901f, \u73af\u4e8c\u4f53\u63d0\u5347\u540e\u5728\u88c2\u89e3\u7089\u5185\u95f4\u65ad\u6642\u95f4\u76f8\u5bf9\u6027\u51cf\u5c11,\u4e00\u90e8\u5206\u4e8c\u805a\u7269\u8d76\u4e0d\u53ca\u88c2\u5316, \u8fdb\u5230\u5806\u79ef\u5ba4\u5806\u79ef\u4e8ePC \u819c\u5185, \u51cf\u5c11PC\u819c\u73bb\u7483\u5316\u6e29\u5ea6\u3002 <\/p>\n

<\/p>\n

2 .2 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0e\u63d0\u5347\u901f\u5ea6\u3001\u5806\u79ef\u901f\u5ea6\u7684\u5173\u7cfb\u56fe2 \u4e3a\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9\u63d0\u5347\u901f\u5ea6\u548c\u5806\u79ef\u901f\u5ea6\u7684\u5371\u5bb3, \u5982\u4e0b\u56fe\u6240\u793a, \u5728\u6750\u6599\u91cf\u53ca\u5806\u79ef\u5ba4\u5bb9\u91cf\u6beb\u65e0\u7591\u95ee\u65f6, \u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u53d1\u5c55, \u539f\u6750\u6599\u63d0\u5347\u901f\u5ea6\u63d0\u9ad8, \u4e0e\u771f\u7a7a\u503c\u6210\u7ebf\u6027\u76f8\u5173\u3002\u7531\u4e8e\u5de5\u4f5c\u4e2d, \u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5\u540c\u6837, \u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u7acb\u5373\u4f53\u73b0\u4e86\u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c, \u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u53d1\u5c55, \u5806\u79ef\u623f\u95f4\u5185\u5355\u4e2a\u5206\u5b50\u7ed3\u6784\u6d53\u5ea6\u503c\u63d0\u9ad8, \u63d0\u5347\u901f\u5ea6\u52a0\u901f, \u5806\u79ef\u901f\u5ea6\u968f\u7740\u6269\u5927\u3002\u5728\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e3a40mT \u65f6, 200g\u6750\u6599\u5f7b\u5e95\u63d0\u5347\u7684\u65f6\u95f4\u662f70mT \u76842.7 \u500d, \u53d1\u5c55\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b, \u80fd\u663e\u8457\u51cf\u5c11\u9540\u5c42\u6642\u95f4\u3002 <\/p>\n

\"\" <\/p>\n

\u4e0e\u6b64\u540c\u65f6\u5728\u8bd5\u9a8c\u4e2d\u53d1\u89c9, \u4f34\u968f\u7740\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, PC \u819c\u5c3d\u7ba1\u5355\u4f4d\u65f6\u95f4\u5806\u79ef\u901f\u5ea6\u663e\u8457\u63d0\u9ad8, \u53ef\u662f\u603bPC \u819c\u8584\u539a\u5374\u6709\u6beb\u65e0\u7591\u95ee\u6c34\u5e73\u51cf\u5c11, \u6b64\u7ed3\u679c\u8feb\u5207\u9700\u8981\u8fdb\u4e00\u6b65\u8bd5\u9a8c\u4e86\u89e3\u3002 <\/p>\n

2 .3 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0ePC\u819c\u900f\u6c34\u7387\u5173\u8054\u900f\u6c34\u7387\u8868\u9732\u4e3b\u8981\u8868\u73b0:\u5355\u4f4d\u65f6\u95f4\u5185, \u6c34\u84b8\u6c14\u4ece\u4f01\u4e1a\u8584\u539a\u5851\u6599\u8584\u819c\u9ad8\u73af\u5883\u6e7f\u5ea6\u4fa7\u9762\u4f4e\u73af\u5883\u6e7f\u5ea6\u4fa7\u6e17\u5165\u5de5\u4f5c\u80fd\u529b, \u8ba1\u7b97\u65b9\u6cd5:<\/p>\n

\"\" <\/p>\n

\u5f0f\u4e2d:q -\u6c34\u84b8\u6c14\u8986\u76d6\u7387, g .mm\/(m2 .day);\u0394m -\u6c34\u84b8\u6c7d\u6e17\u5165\u91cf, g ;d -PC \u819c\u8584\u539a, mm ;S -\u900f\u6c14\u6027\u603b\u9762\u79ef, m2 ;t -\u6642\u95f4,day \u3002<\/p>\n

\"\" <\/p>\n

\u56fe3 \u4e3a\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9PC \u819c\u900f\u6c14\u6027\u7279\u6027\u7684\u5371\u5bb3, \u5982\u4e0b\u56fe\u6240\u793a, \u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u503c\u53d1\u5c55, PC \u819c\u6c34\u84b8\u6c14\u901a\u8fc7\u6307\u6570\u6269\u5927\u3002\u6c34\u5206\u901a\u8fc7PC \u819c\u7b49\u805a\u5408\u7269\u662f\u6839\u636e\u6d88\u6eb6-\u8513\u5ef6\u5168\u8fc7\u7a0b\u6765\u8fdb\u884c\u7684[ 6] , \u6c34\u5206\u5728\u805a\u5408\u7269\u819c\u5185\u7684\u6d88\u6eb6\u5173\u952e\u4ea7\u751f\u5728\u975e\u6676\u533a, \u975e\u6676\u533a\u5360\u6bd4\u8d8a\u5927, \u6eb6\u89e3\u6027\u8d8a\u5927;\u6c34\u5206\u5728PC \u819c\u5185\u7684\u8513\u5ef6\u4e5f\u5173\u952e\u4ea7\u751f\u5728\u975e\u6676\u533a, \u5373\u9ad8\u5206\u5b50\u6750\u6599\u94fe\u95f4\u7684\u4e3b\u8981\u4e00\u90e8\u5206, \u8fd9\u79cd\u7a7a\u9699\u7684\u5916\u89c2\u8bbe\u8ba1\u3001\u5c3a\u5bf8\u3001\u904d\u5e03\u60c5\u51b5\u90fd\u5371\u5bb3\u6c34\u5206\u5b50\u6269\u6563\u901f\u5ea6\u3002\u6269\u6563\u7cfb\u6570\u4e0e\u73bb\u7483\u5316\u6e29\u5ea6\u5173\u8054\u5173\u8054\u4e3a:D =Da\/\u03c4, Da \u4e3a\u6c7d\u4f53\u5728\u9ad8\u805a\u7269\u975e\u6676\u533a\u7684\u6269\u6563\u7cfb\u6570, \u03c4\u4e3a\u901a\u8fc7\u6c7d\u4f53\u5206\u5b50\u7ed3\u6784\u907f\u8fc7\u6676\u533a\u7684\u9014\u5f84\u5f2f\u6298\u5ea6\u3002\u56e0\u800c, \u73bb\u7483\u5316\u6e29\u5ea6\u8d8a\u9ad8, \u819c\u7684\u6709\u6548\u6e17\u5165\u603b\u9762\u79ef\u8d8a\u5c0f, \u5b9e\u9645\u6548\u679c\u9020\u6210\u6c34\u84b8\u6c14\u901a\u8fc7\u6027\u51cf\u5c11\u3002 <\/p>\n

2 .4 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0e\u819c\u6297\u62c9\u5f3a\u5ea6\u5173\u7cfb\u56fe3 \u4e3b\u8981\u8868\u73b0, \u4f34\u968f\u7740\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, \u5851\u6599\u8584\u819c\u6297\u62c9\u5f3a\u5ea6\u7740\u9646\u3002\u7531\u4e8e\u4f34\u968f\u7740\u5806\u79ef\u623f\u95f4\u5185\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, PC \u819c\u5806\u79ef\u6709\u5e8f\u5316\u51cf\u5c11, \u672a\u88c2\u5316\u73af\u4e8c\u4f53\u53ca\u4f4e\u805a\u7269\u589e\u52a0, \u8fdb\u800c\u9020\u6210\u5851\u6599\u8584\u819c\u4e2d\u7684\u65e0\u5b9a\u5f62\u533a\u5360\u6bd4\u63d0\u9ad8,\u51cf\u5c11\u4e86\u5176\u7269\u7406\u6027\u80fd, \u5bfc\u81f4PC \u819c\u6297\u62c9\u5f3a\u5ea6\u7740\u9646\u3002<\/p>\n

2 .5 \u3000\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0e\u819c\u6e05\u6670\u5ea6\u3001\u96fe\u5ea6\u5173\u8054\u6e05\u6670\u5ea6\u548c\u96fe\u5ea6\u662f\u8868\u73b0\u5851\u6599\u8584\u819c\u8868\u5c42\u8d28\u91cf\u7684\u7126\u8651\u4e0d\u5b89\u6307\u6807\u503c\u3002\u96fe\u5ea6\u8868\u660e\u901a\u8fc7\u8bd5\u4ef6\u800c\u504f\u79fb\u5165\u5c04\u89d2\u65b9\u4f4d\u7684\u900f\u5c04\u6d41\u660e\u503c\u4e0e\u7535\u5b50\u6563\u5c04\u6d41\u660e\u503c\u4e4b\u6bd4, \u7528\u767e\u5206\u6bd4\u8868\u9732\u4e3b\u8981\u8868\u73b0, \u901a\u5e38\u5c06\u504f\u79fb\u5165\u5c04\u89d2\u65b9\u4f4d2.5\u00b0\u4ee5\u4e0a\u7684\u900f\u5c04\u6d41\u660e\u503c\u7528\u4ee5\u6d4b\u7b97\u96fe\u5ea6\u3002\u56fe4 \u662f\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u5bf9PC \u819c\u6e05\u6670\u5ea6\u548c\u96fe\u5ea6\u7684\u5371\u5bb3, \u5982\u4e0b\u56fe\u6240\u793a, \u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, PC \u819c\u6e05\u6670\u5ea6\u51cf\u5c11,\u96fe\u5ea6\u589e\u52a0\u3002 <\/p>\n

\"\" <\/p>\n

\u7531\u4e8e\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u589e\u9ad8\u540e, \u672a\u88c2\u5316\u7684\u73af\u4e8c\u4f53\u548cPC \u819c\u5185\u4f4e\u805a\u7269\u589e\u52a0, \u76f8\u5f53\u4e8e\u5728PC \u819c\u4e2d\u5bfc\u5165\u4e86\u6b8b\u6e23, \u5371\u5bb3\u5149\u6e90\u5728PC \u819c\u4e2d\u7684\u900f\u8fc7\u7387(\u6e05\u6670\u5ea6), \u6b8b\u6e23\u589e\u52a0\u540e\u5149\u6e90\u8d8a\u8fc7PC \u819c\u65f6\u4ea7\u751f\u53cd\u5c04\u9762\u6216\u6620\u5c04\u673a\u9047\u6269\u5927, \u9020\u6210PC \u819c\u96fe\u5ea6\u4e0a\u5347\u3002
3 \u3000\u7ed3\u3000\u8bba
\u5728\u673a\u5668\u8bbe\u5907\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf5\u3001\u6750\u6599\u91cf\u3001\u5806\u79ef\u5ba4\u5bb9\u91cf\u540c\u6837\u72b6\u51b5\u4e0b, \u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4ece40mT \u5347\u523070m T :\u4f34\u968f\u7740\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u4e0a\u5347, \u6750\u6599\u63d0\u5347\u901f\u5ea6\u3001\u5851\u6599\u8584\u819c\u5806\u79ef\u901f\u5ea6\u63d0\u9ad8, \u5851\u6599\u8584\u819c\u73bb\u7483\u5316\u6e29\u5ea6\u3001\u9632\u7a7a\u6c14\u6e17\u5165\u3001\u6297\u62c9\u5f3a\u5ea6\u7b49\u7279\u6027\u51cf\u5c11\u3002\u800c\u4e14\u968f\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e0a\u5347\u5851\u6599\u8584\u819c\u96fe\u5ea6\u6269\u5927\u3001\u6e05\u6670\u5ea6\u51cf\u5c11\u3002
\u8bba\u6587\u53c2\u8003\u6587\u732e
[ 1 ] \u3000\u80e1\u56fd\u8d1e, \u9648\u68a6\u96ea.\u5851\u6599\u8584\u819c\u9540\u5c42\u539f\u6750\u6599\u2014\u2014\u2014\u805a\u5bf9\u4e8c\u7532\u82ef[ J] .\u6210\u90fd\u6559\u80b2\u5b66\u9662\u5b66\u520a, 2005 , 1 :43-44 .
[ 2 ] \u3000\u5f20\u5360\u6587, \u5218\u6587.\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u6cd5\u5236\u53d6\u805a\u5bf9\u4e8c\u7532\u82ef\u5851\u6599\u8584\u819c[ J] .\u6750\u6599\u5bfc\u62a5,2003 , 6 :83-86 .
[ 3 ] \u3000\u5434\u793c\u7fa4.Parylene \u6577\u5f62\u9540\u5c42[ J] .Elect ro-Mechanical Engineering, 2004 , 20 :51-61 .
[ 4 ] \u3000Zhang X, Dab ral S .Crys tallini ty propert ies of paryl ene-n af fecting it s use as an ILD in submi cron int eg rat ed ci rcui t t echnology[ J] .Thin S olid Films , 1995 (270):508-511 .
[ 5 ] \u3000Gazicki M .Polymerizati on of Para-xyl ene Derivatives .V .Eff ect s of Sublimation Rat e of Di-p-xylylene on the Cryst allini tyof Parylene C Deposit ed at Dif feren t Temperatu res[ J] .Polym erC hemi st ry , 1987 , 25 :2089-2106 .
[ 6 ] \u3000\u5f20\u9896,\u738b\u5fd7.\u9ad8\u5206\u5b50\u6750\u6599\u819c\u7ed3\u6784\u5de5\u7a0b\u5bf9\u6c7d\u4f53\u4f20\u9001\u7684\u5371\u5bb3[ J] .\u9ad8\u5206\u5b50\u6750\u6599\u7ba1\u7406\u79d1\u5b66\u4e0e\u5de5\u7a0b\u9879\u76ee, 2004 , 4 :24-27 .\u6536\u7a3f\u65e5\u671f:2007-06-22\u4fee\u7a3f\u65e5\u671f:2007-07-23\u00b7 48 \u00b7<\/p>\n

 <\/p>\n

\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

\u6458\u3000\u8981\u3000\u91c7\u7528X \u5c04\u7ebf\u884d\u5c04(XRD), MOCON \u900f\u6e7f\u4eea\u7b49\u7814\u7a76\u4e86\u4e0d\u540c\u6c89\u79ef\u538b\u529b\u4e0b\u5236\u5907Pary lene C \u819c\u7684\u7ed3\u6676\u5ea6\u3001\u6c34\u84b8\u6c7d\u900f\u8fc7\u6027\u3001\u62c9\u4f38\u5f3a\u5ea6\u3001\u96fe\u5ea6\u3001\u900f\u660e\u5ea6\u968f\u6c89\u79ef\u538b\u529b\u7684\u53d8\u5316\u89c4\u5f8b\u3002\u7ed3\u679c\u8868\u660e, \u968f\u7740\u6c89\u79ef\u5ba4\u538b\u529b\u5347\u9ad8, Pary lene C \u819c\u76f8\u5bf9\u7ed3\u6676\u5ea6\u3001\u900f\u6e7f\u6027\u80fd\u3001\u62c9\u4f38\u5f3a\u5ea6\u3001\u900f\u660e\u5ea6\u4e0b\u964d, \u96fe\u5ea6\u589e\u5927\u3002\u5173\u952e\u8bcd\u3000Parylene C , \u6c89\u79ef\u538b\u529b, \u7ed3\u6676\u5ea6 \u3000\u3000Pary lene C \u8584\u819c(Poly(chlor o-p-Xylylene), \u7b80\u79f0PC \u819c)\u56e0\u5177\u6709\u4f18\u826f\u7684\u6c14\u4f53\u4e0e\u6c34\u6c7d\u963b<\/p>\n","protected":false},"author":1,"featured_media":19619,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[59],"tags":[2753,2754,1544,2755],"class_list":["post-19620","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-information","tag-parylene-c","tag-2754","tag-1544","tag-2755"],"jetpack_featured_media_url":"\/wp-content\/uploads\/2021\/12\/20211215131137-61b9e989444bd.png","jetpack-related-posts":[{"id":24097,"url":"https:\/\/www.paiqinano.com\/?p=24097","url_meta":{"origin":19620,"position":0},"title":"\u6c89\u79ef\u538b\u529b\u5bf9Parylene 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