{"id":19564,"date":"2022-01-12T10:11:18","date_gmt":"2022-01-12T02:11:18","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=19564"},"modified":"2022-01-12T09:59:05","modified_gmt":"2022-01-12T01:59:05","slug":"%e6%b5%85%e8%b0%88%e7%ad%89%e7%a6%bb%e5%ad%90%e5%8c%96%e5%ad%a6%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af%e6%8a%80%e6%9c%af%e7%9a%84%e5%8e%9f%e7%90%86%e5%8f%8a%e5%85%b6%e6%8a%80%e6%9c%af%e5%85%b3%e9%94%ae","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=19564","title":{"rendered":"\u6d45\u8c08\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u7684\u539f\u7406\u53ca\u5176\u6280\u672f\u5173\u952e"},"content":{"rendered":"

\u4e00\u3001\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\u7684\u5167\u5bb9\u53ca\u91cd\u8981<\/p>\n

\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\u57fa\u672c\u539f\u7406\u662f\u884c\u9a76\u4f4e\u6e29\u7b49\u79bb\u5b50\u4f53(\u975e\u5747\u8861\u7b49\u79bb\u5b50)\u4f5c\u80fd\u91cf,\u4ea7\u54c1\u5de5\u4ef6\u653e\u7f6e\u6c14\u538b\u4f4e\u4e0b\u7535\u5f27\u653e\u7535\u7684\u8d1f\u6781\u4e0a,\u884c\u9a76\u7535\u5f27\u653e\u7535(\u6216\u591a\u52a0\u53d1\u70ed\u5668)\u4f7f\u4ea7\u54c1\u5de5\u4ef6\u63d0\u6e29\u5230\u9884\u671f\u7684\u6eab\u5ea6,\u968f\u540e\u8fdb\u5165\u5c11\u91cf\u7684\u53cd\u6620\u6c7d\u4f53,\u6c7d\u4f53\u7ecf\u4e00\u7cfb\u5217\u5316\u5b66\u53d8\u5316\u548c\u7b49\u79bb\u5b50\u53cd\u6620,\u5728\u4ea7\u54c1\u5de5\u4ef6\u5916\u578b\u4ea7\u751f\u56fa\u4f53\u5851\u6599\u8584\u819c\uff61\u5b83\u6d89\u53ca\u4e86\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u4e00\u6837\u5e73\u65f6\u6280\u672f\u6027,\u53c8\u6709\u7535\u5f27\u653e\u7535\u7684\u52a0\u5f3a\u529f\u6548\uff61<\/p>\n

\"\"<\/p>\n

\n

\u7531\u4e8e\u9897\u7c92\u95f4\u7684\u649e\u51fb,\u9020\u6210\u6fc0\u70c8\u7684\u6c7d\u4f53\u6c34\u89e3,\u4f7f\u53cd\u6620\u6c7d\u4f53\u906d\u53d7\u6d3b\u6027\uff61\u4e0e\u6b64\u540c\u65f6\u4ea7\u751f\u8d1f\u6781\u78c1\u63a7\u6e85\u5c04\u6548\u7528,\u4e3a\u5806\u79ef\u5851\u6599\u8584\u819c\u7ed9\u4e88\u4e86\u6e05\u7406\u7684\u6d3b\u529b\u9ad8\u7684\u5916\u578b\uff61\u56e0\u6b64\u5168\u90e8\u5806\u79ef\u5168\u8fc7\u7a0b\u4e0e\u4ec5\u6709\u70ed\u6fc0\u8bdd\u7684\u5168\u8fc7\u7a0b\u6709\u663e\u8457\u4e0d\u4e00\u6837\uff61\u8fd9\u4e24\u5c42\u9762\u7684\u529f\u6548,\u5728\u53d1\u5c55\u9540\u5c42\u7ed3\u5408\u6027,\u964d\u6d88\u5806\u79ef\u6eab\u5ea6,\u52a0\u901f\u53cd\u5e94\u901f\u7387\u8bf8\u65b9\u9762\u90fd\u9020\u5c31\u4e86\u8d44\u6e90\u4f18\u52bf\uff61<\/p>\n

\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\u6309\u7b49\u79bb\u5b50\u80fd\u91cf\u65b9\u6cd5\u533a\u5212,\u6709\u76f4\u6d41\u7535\u7535\u5f27\u653e\u7535\uff64\u5fae\u6ce2\u5c04\u9891\u5145\u653e\u7535\u548c\u5fae\u6ce2\u52a0\u70ed\u7b49\u79bb\u5b50\u5145\u653e\u7535\u7b49\uff61\u4f34\u968f\u7740\u5de5\u4f5c\u9891\u7387\u7684\u63d0\u9ad8,\u7b49\u79bb\u5b50\u52a0\u5f3aCVD\u5168\u8fc7\u7a0b\u7684\u529f\u80fd\u8d8a\u660e\u663e,\u4ea7\u751f\u5316\u5b66\u7269\u8d28\u7684\u6c14\u6e29\u8d8a\u4f4e\uff61<\/p>\n

PCVD\u7684\u52a0\u5de5\u5de5\u827a\u5b89\u88c5\u7531\u5806\u79ef\u5ba4\uff64\u751f\u6210\u7269\u8fd0\u8f93\u7ba1\u7406\u4f53\u7cfb\uff64\u5145\u653e\u7535\u5f00\u5173\u7535\u6e90\uff64\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u53ca\u68c0\u9a8c\u7ba1\u7406\u4f53\u7cfb\u6784\u6210\uff61\u6c14\u52a8\u9600\u95e8\u8981\u7528\u6c7d\u4f53\u6cb9\u70df\u51c0\u5316\u5668\u53bb\u9664\u6c34\u4efd\u548c\u5176\u4ed6\u6b8b\u6e23,\u7ecf\u8c03\u6574\u5b89\u88c5\u83b7\u5f97\u6240\u6709\u5fc5\u8981\u7684\u603b\u6d41\u91cf,\u518d\u4e0e\u6e90\u6210\u5206\u4e0e\u6b64\u540c\u65f6\u88ab\u9001\u8fdb\u5806\u79ef\u5ba4,\u5728\u6beb\u65e0\u7591\u95ee\u6eab\u5ea6\u548c\u7b49\u79bb\u5b50\u6fc0\u8bdd\u7b49\u60c5\u51b5\u4e0b,\u83b7\u5f97\u9700\u8981\u7684\u7269\u8d28,\u5e76\u5806\u79ef\u5728\u4ea7\u54c1\u5de5\u4ef6\u6216\u7845\u7247\u5916\u578b\uff61\u56e0\u6b64,PCVD\u52a0\u5de5\u5de5\u827a\u65e2\u5305\u542b\u7b49\u79bb\u5b50\u4f53\u7269\u7406\u5168\u8fc7\u7a0b,\u53c8\u5305\u542b\u7b49\u79bb\u5b50\u5316\u5b66\u53d8\u5316\u5168\u8fc7\u7a0b\uff61<\/p>\n

PCVD\u52a0\u5de5\u5de5\u827a\u4e3b\u8981\u53c2\u6570\u5305\u542b\u5916\u90e8\u7ecf\u6d4e\u4e3b\u8981\u53c2\u6570\u548c\u5b8f\u89c2\u7ecf\u6d4e\u4e3b\u8981\u53c2\u6570\uff61\u5916\u90e8\u7ecf\u6d4e\u4e3b\u8981\u53c2\u6570\u5982\u7535\u5b50\u80fd\u91cf\uff64\u7b49\u79bb\u5b50\u76f8\u5bf9\u5bc6\u5ea6\u53ca\u5206\u5e03\u51fd\u6570\uff64\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u7535\u79bb\u5ea6\u5ea6\u7b49\uff61\u5b8f\u89c2\u7ecf\u6d4e\u4e3b\u8981\u53c2\u6570\u9488\u5bf9\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u6709,\u6c7d\u4f53\u7c7b\u578b\uff64\u914d\u5236\uff64\u603b\u6d41\u91cf\uff64\u6c14\u4f53\u538b\u5f3a\uff64\u62bd\u901f\u7b49;\u9488\u5bf9\u57fa\u6750\u800c\u8a00\u6709,\u5806\u79ef\u6eab\u5ea6\uff64\u76f8\u5bf9\u4f4d\u7f6e\uff64\u5bfc\u7535\u6027\u60c5\u51b5\u7b49;\u9488\u5bf9\u7b49\u79bb\u5b50\u6709,\u5145\u653e\u7535\u7c7b\u578b\uff64\u5de5\u4f5c\u9891\u7387\uff64\u7535\u7ea7\u6784\u9020\uff64\u8f93\u5165\u529f\u7387\uff64\u7535\u6d41\u5f3a\u5ea6\uff64\u6b63\u79bb\u5b50\u6eab\u5ea6\u7b49\uff61\u4ee5\u4e0a\u8fd9\u79cd\u4e3b\u8981\u53c2\u6570\u5168\u662f\u4e92\u76f8\u8054\u7edc\uff64\u4e92\u76f8\u5f71\u54cd\u7684\uff61<\/p>\n

\n

1\u3001\u76f4\u6d41\u7535\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(DC-PCVD)<\/p>\n

DC-PCVD\u662f\u884c\u9a76\u9ad9\u538b\u76f4\u6d41\u7535\u8d1f\u504f\u538b(-1~-5kV),\u4f7f\u4f4e\u7535\u538b\u53cd\u6620\u6c7d\u4f53\u4ea7\u751f\u7535\u5f27\u653e\u7535\u9020\u6210\u7b49\u79bb\u5b50,\u7b49\u79bb\u5b50\u5728\u9759\u7535\u573a\u529f\u6548\u4e0b\u8d1f\u7535\u5b50\u4ea7\u54c1\u5de5\u4ef6,\u5e76\u5728\u4ea7\u54c1\u5de5\u4ef6\u5916\u578b\u5806\u79ef\u6d82\u819c\uff61<\/p>\n

\u76f4\u6d41\u7535\u7b49\u79bb\u5b50\u975e\u5e38\u7b80\u5355,\u4ea7\u54c1\u5de5\u4ef6\u5904\u5728\u8d1f\u6781\u7535\u4f4d\u5dee,\u53d7\u5176\u5916\u89c2\u8bbe\u8ba1\uff64\u5c3a\u5bf8\u7684\u5371\u5bb3,\u4f7f\u9759\u7535\u573a\u904d\u5e03\u4e0d\u5300\u79f0,\u5728\u8d1f\u6781\u5468\u8fb9\u635f\u8017\u8f83\u5927,\u7535\u573a\u5f3a\u5ea6\u6700\u5927,\u6b63\u56e0\u4e3a\u6709\u8fd9\u4e00\u7279\u6027,\u56e0\u6b64\u5316\u5b66\u53d8\u5316\u4e5f\u96c6\u4e2d\u5316\u5728\u8d1f\u6781\u4ea7\u54c1\u5de5\u4ef6\u5916\u578b,\u63d0\u9ad8\u4e86\u5806\u79ef\u542c\u4ece,\u9632\u6b62\u4e86\u53cd\u6620\u6210\u5206\u5728\u5668\u5185\u58c1\u7684\u4ea4\u6613\uff61\u7455\u73b7\u4e0d\u662f\u5bfc\u7535\u6027\u7684\u57fa\u6750\u6216\u5851\u6599\u8584\u819c\u4e0d\u53ef\u4ee5\u8fd0\u7528\uff61\u56e0\u4e3a\u8d1f\u6781\u4e0a\u6b63\u7535\u8377\u7684\u7d2f\u79ef\u4f1a\u62b5\u89e6\u8fdb\u4e00\u6b65\u7684\u5806\u79ef,\u5e76\u4f1a\u5bfc\u81f4\u7d2f\u79ef\u5145\u653e\u7535,\u6bc1\u574f\u4e00\u5207\u6b63\u5e38\u7684\u53cd\u6620\uff61<\/p>\n

\u8be5\u673a\u5668\u8bbe\u5907\u7531\u4e8e\u4ea7\u54c1\u5de5\u4ef6\u53ea\u9760\u6b63\u79bb\u5b50\u548c\u9ad8\u80fd\u7c92\u5b50\u8d1f\u7535\u5b50\u7ed9\u4e88\u52a8\u80fd,\u5728\u5f00\u5c55\u8bbe\u5907\u7684\u5927\u6279\u91cf\u751f\u4ea7\u65f6\u5c31\u96be\u4ee5\u907f\u514d\u7684\u663e\u73b0\u51fa\u4e00\u4e9b\u7455\u73b7:<\/p>\n

1)\u5404\u52a0\u5de5\u5de5\u827a\u4e3b\u8981\u53c2\u6570\u5728\u5806\u79ef\u65f6\u4e92\u76f8\u5f71\u54cd\uff64\u4e92\u76f8\u914d\u5408\uff64\u6ca1\u6cd5\u81ea\u529b\u64cd\u7eb5,\u4f7f\u52a0\u5de5\u5de5\u827a\u8c03\u8282\u548c\u64cd\u7eb5\u8270\u96be\uff61<\/p>\n

\n

2)\u4e0d\u4e00\u6837\u4ea7\u54c1\u5de5\u4ef6\u5728\u79bb\u5b50\u8f70\u51fb\u52a0\u6e29\u64cd\u4f5c\u8fc7\u7a0b\u4e2d,\u7531\u4e8e\u5176\u5916\u578b\u79ef\u4e0d\u4e00\u6837,\u5219\u9020\u6210\u6beb\u65e0\u7591\u95ee\u7684\u6e29\u5ea6\u5dee,\u4e0e\u6b64\u540c\u65f6,\u5806\u79ef\u623f\u95f4\u5185\u58c1\u662f\u9633\u6781\u6c27\u5316,\u6e29\u5ea6\u4f4e,\u4f7f\u5176\u5468\u8fb9\u7684\u90e8\u4ef6\u4e0e\u6b63\u4e2d\u95f4\u4e00\u90e8\u5206\u7684\u4ea7\u54c1\u5de5\u4ef6\u4e5f\u662f\u6709\u6beb\u65e0\u7591\u95ee\u7684\u6e29\u5ea6\u5dee\uff61<\/p>\n

\n

3)\u5f53\u88c5\u7089\u91cf\u5927,\u4ea7\u54c1\u5de5\u4ef6\u5bb9\u79ef\u5927\u6216\u5806\u79ef\u6eab\u5ea6\u89c4\u5b9a\u8f83\u9ad8,\u5fc5\u9700\u6b63\u79bb\u5b50\u52a8\u80fd\u6bd4\u8f83\u5927\u65f6,\u76f4\u6d41\u7535\u7535\u5f27\u653e\u7535\u7684\u8fd0\u884c\u5730\u533a\u5728\u5341\u5206\u7535\u5f27\u653e\u7535\u7684\u8f83\u5f3a\u6bb5,\u975e\u5e38\u5bb9\u6613\u8854\u63a5\u5230\u7535\u5149\u5145\u653e\u7535,\u9020\u6210\u5f00\u5173\u7535\u6e90\u6253\u5f27\uff64\u65ad\u7535\uff64\u52a0\u5de5\u5de5\u827a\u5168\u8fc7\u7a0b\u4e0d\u53ef\u4ee5\u4e00\u5207\u6b63\u5e38\u5f00\u5c55\uff61<\/p>\n

\u4e3a\u4e86\u66f4\u597d\u5730\u5904\u7406\u4ee5\u4e0a\u9898\u578b,\u6709\u7684\u4e13\u5bb6\u5b66\u8005\u9009\u7528\u53cc\u8d1f\u6781\u7535\u5f27\u653e\u7535\u5b89\u88c5,\u63d0\u9ad8\u4e00\u4e2a\u8d1f\u6781\u505a\u4e3a\u534f\u52a9\u8d1f\u6781,\u5c3d\u7ba1\u6709\u6beb\u65e0\u7591\u95ee\u7d50\u679c,\u4f46\u8fd8\u4e0d\u591f\u6781\u81f4\uff61<\/p>\n

\u73b0\u9636\u6bb5,\u4e16\u754c\u5404\u56fd\u5b66\u8005\u5927\u91cf\u7684\u662f\u9009\u7528\u534f\u52a9\u52a0\u5916\u70ed\u65b9\u6cd5\u5806\u79ef\u6280\u672f\u6027\u6765\u5904\u7406\u4ee5\u4e0a\u9898\u578b,\u66f4\u6539\u4e86\u5355\u7eaf\u6027\u5bc4\u4e88\u79bb\u5b50\u8f70\u51fb\u52a0\u6e29\u800c\u4ea7\u751f\u7684\u7f3a\u70b9,\u5c06\u53cd\u5408\u65f6\u7b49\u79bb\u5b50\u5145\u653e\u7535\u6297\u538b\u5f3a\u5ea6\u4e0e\u5145\u653e\u7535\u4ea7\u54c1\u5de5\u4ef6\u6eab\u5ea6\u65ad\u79bb,\u8fdb\u800c\u53d1\u5c55\u4e86\u6280\u672f\u7684\u7262\u56fa\u6027\u548c\u91cd\u590d<\/p>\n

\n

2\u3001\u5fae\u6ce2\u52a0\u70ed\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(MW-PCVD)<\/p>\n

\u5fae\u6ce2\u52a0\u70ed\u7b49\u79bb\u5b50\u7684\u7279\u5f81\u662f\u52a8\u80fd\u5927,\u6d3b\u529b\u5f3a\uff61\u6fc0\u8d77\u7684\u4e9a\u7a33\u6001\u5206\u5b50\u591a,\u5316\u5b66\u53d8\u5316\u975e\u5e38\u5bb9\u6613\u5f00\u5c55,\u662f\u4e00\u79cd\u5f88\u6709\u53d1\u5c55\u524d\u666f\uff64\u4e3b\u8981\u7528\u9014\u666e\u904d\u7684\u65b0\u6280\u672f\u65b0\u5de5\u827a,\u5fae\u6ce2\u52a0\u70ed\u5de5\u4f5c\u9891\u7387\u4e3a2.45GHz\uff61<\/p>\n

\u5fae\u6ce2\u52a0\u70ed\u5145\u653e\u7535\u4e0e\u76f4\u6d41\u7535\u7535\u5f27\u653e\u7535\u5bf9\u6bd4\u5177\u5907\u673a\u5668\u8bbe\u5907\u6784\u9020\u7b80\u6613,\u975e\u5e38\u5bb9\u6613\u8d77\u8f89,\u85d5\u5408\u542c\u4ece\u9ad8,\u5de5\u4f5c\u4e2d\u7262\u56fa,\u65e0\u6c7d\u4f53\u73af\u5883\u6c61\u67d3\u53ca\u7535\u7ea7\u6d78\u8680,\u5de5\u4f5c\u4e2d\u9891\u6bb5\u5bbd\u7b49\u76ca\u5904,\u5b89\u88c5\u5173\u952e\u7531\u5fae\u6ce2\u53d1\u751f\u5668\uff64\u73af\u5f62\u5668\uff64\u5b9a\u5411\u8026\u5408\u5668\uff64\u5916\u578b\u5149\u6ce2\u5bfc\u5165\u7684\u5145\u653e\u7535\u4e00\u90e8\u5206\u53ca\u5806\u79ef\u5ba4\u6784\u6210\uff61<\/p>\n

\n

3\u3001\u5fae\u6ce2\u5c04\u9891\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(RF-PCVD)<\/p>\n

\u5728\u4f4e\u7535\u538b\u5668\u76bf\u7684\u4e24\u65b9\u9762\u4e0a\u6dfb\u9ad8\u9891\u7387\u5de5\u4f5c\u7535\u538b\u5219\u9020\u6210\u5fae\u6ce2\u5c04\u9891\u5145\u653e\u7535\u4ea7\u751f\u7b49\u79bb\u5b50,\u5c04\u9891\u7535\u6e90\u901a\u5e38\u9009\u7528\u7535\u5bb9\u8026\u5408\u6216\u7535\u611f\u8026\u5408\u65b9\u6cd5,\u5728\u5176\u4e2d\u53c8\u53ef\u5206\u6210\u7535\u4f4d\u5f0f\u548c\u65e0\u7535\u7ea7\u5f0f\u6784\u9020,\u7535\u7ea7\u5f0f\u4e00\u6837\u5e73\u65f6\u9009\u7528\u5e73\u53f0\u5f0f\u6216\u70ed\u5217\u7ba1\u5f0f\u6784\u9020,\u76ca\u5904\u662f\u53ef\u5bb9\u4e0b\u8f83\u591a\u4ea7\u54c1\u5de5\u4ef6,\u4f46\u8fd9\u7c7b\u5b89\u88c5\u4e2d\u7684\u6eb6\u89e3\u7387\u8fdc\u5c0f\u4e8e1%,\u5373\u7b49\u79bb\u5b50\u7684\u53ef\u4ee5\u4e0d\u9ad8\uff61\u7535\u7ea7\u5f0f\u5b89\u88c5\u5efa\u5728\u53cd\u5e94\u5bb9\u5668\u5916\u65f6,\u5173\u952e\u4e3a\u7535\u78c1\u7ebf\u5708,\u4e5f\u53eb\u65e0\u7ea7\u5706\u5f62\u5145\u653e\u7535,\u5c04\u4e00\u518d\u7387\u662f13.56MHz\uff61<\/p>\n

\u7531\u4e8e\u9ad8\u9891\u7387\u9759\u7535\u573a\u4e2d\u81ea\u7531\u7535\u5b50\u548c\u6c7d\u4f53\u975e\u5f39\u6027\u78b0\u649e\u51e0\u7387\u6bd4\u76f4\u6d41\u7535\u7535\u5f27\u653e\u7535\u5927,\u6545\u6c7d\u4f53\u5f15\u71c3\u7684\u6807\u51c6\u6c14\u538b\u8f83\u4e3a\u4f4e,\u76f4\u6d41\u7535\u7535\u5f27\u653e\u7535\u4e3a13.3~1.33Pa,\u5fae\u6ce2\u5c04\u9891\u7535\u5f27\u653e\u7535\u4e3a1.33\u00d710-1~1.33\u00d710-3Pa\uff61\u73b0\u9636\u6bb5,\u4e2d\u56fd\u5df2\u8bbe\u8ba1\u65b9\u6848\u751f\u4ea7\u5236\u9020\u4e86\u76f4\u5f91\u4e3a420mm\u949f\u7f69\u5f0f(\u70ed\u58c1\uff64\u53cc\u5355\u7089)\u5fae\u6ce2\u5c04\u9891\u5145\u653e\u7535PCVD\u5b89\u88c5\uff61<\/p>\n

\n

4\u3001\u4ea7\u54c1\u68c0\u6d4b<\/p>\n

1)\u5851\u6599\u8584\u819c\u539f\u6750\u6599\u5f3a\u5ea6\u7528\u7ef4\u6c0f\u663e\u5fae\u955c\u538b\u5370\u6d4b\u5b9a\u65b9\u6cd5\uff61<\/p>\n

2)\u5851\u6599\u8584\u819c\u4e0e\u57fa\u6750\u95f4\u7ed3\u5408\u6027\u7528\u79ef\u6781\u522e\u75d5\u4eea\u6d4b\u91cf,\u4e0e\u6b64\u540c\u65f6\u878d\u5408\u663e\u5fae\u955c\u89c2\u5bdf\u522e\u75d5\u7684\u635f\u574f\u60c5\u51b5\uff61\u4e5f\u53ef\u4ee5\u7528\u6d1b\u6c0f\u786c\u5ea6\u538b\u5370\u6cd5\u9274\u5b9a,\u7528\u8d1f\u8f7d\u5728\u8bd5\u4ef6\u5916\u578b\u6253\u6d1b\u6c0f\u786c\u5ea6\u538b\u5370,\u89c2\u67e5\u538b\u5370\u9644\u8fd1\u5851\u6599\u8584\u819c\u8131\u843d\u7684\u603b\u9762\u79ef,\u5224\u5b9a\u5730\u70b9\u8bc4\u5851\u6599\u8584\u819c\u7684\u7ed3\u5408\u6027,\u8131\u843d\u603b\u9762\u79ef\u8d8a\u5c0f,\u7ed3\u5408\u6027\u8d8a\u9ad8\uff61<\/p>\n

\n

3)\u5851\u6599\u8584\u819c\u7684\u7ed3\u6784\u5916\u8c8c\u7528\u7535\u955c\u5256\u6790\uff61<\/p>\n

\n

4)\u7528X-X\u5c04\u7ebf\u5149\u7535\u6750\u6599\u8c31\u4eea(XPS)\u5bf9\u5851\u6599\u8584\u819c\u6709\u6548\u6210\u5206\u5f00\u5c55\u5b9a\u6027\u5206\u6790\uff61<\/p>\n

\n

5)\u5851\u6599\u8584\u819c\u8584\u539a\u7528\u7535\u5b50\u5668\u4ef6\u6d82\u5c42\u6d4b\u539a\u4eea\u6216\u6a2a\u65ad\u9762\u7535\u955c\u53d8\u5927\u6d4b\u91cf\uff61<\/p>\n

\n

\u4e8c.\u4f18\u7455\u73b7\u53ca\u5e94\u7528\u8303\u7574<\/p>\n

1\u3001PCVD\u7684\u4f18\u7455\u73b7<\/p>\n

PCVD\u6280\u672f\u6027\u5177\u5907\u5806\u79ef\u6e29\u5ea6\u4f4e,\u5806\u79ef\u901f\u5ea6\u5feb,\u7ed5\u9540\u6027\u597d,\u5851\u6599\u8584\u819c\u4e0e\u57fa\u6750\u8054\u7cfb\u6297\u538b\u5f3a\u5ea6\u597d,\u673a\u5668\u8bbe\u5907\u5b9e\u9645\u64cd\u4f5c\u7ef4\u62a4\u4fdd\u517b\u7b80\u6613\u7b49\u76ca\u5904,\u7528PCVD\u6cd5\u8c03\u6574\u6280\u672f\u4e3b\u8981\u53c2\u6570\u4fbf\u6377\u7eaf\u771f,\u975e\u5e38\u5bb9\u6613\u8c03\u8282\u548c\u64cd\u7eb5\u5851\u6599\u8584\u819c\u8584\u539a\u548c\u6709\u6548\u6210\u5206\u6784\u6210\u6784\u9020,\u5806\u79ef\u51fa\u53cc\u5c42\u590d\u5408\u888b\u53ca\u53cc\u5c42\u68af\u5ea6\u65b9\u5411\u590d\u5408\u888b\u7b49\u9ad8\u54c1\u8d28\u819c,\u4e0e\u6b64\u540c\u65f6,PCVD\u6cd5\u8fd8\u6269\u5c55\u4e86\u65b0\u7684\u8d85\u4f4e\u6e29\u5806\u79ef\u884c\u4e1a,\u6bd4\u5982,\u7528PCVD\u6cd5\u53ef\u5c06TiN\u7684\u5316\u5b66\u53cd\u5e94\u6eab\u5ea6\u7531CVD\u6cd5\u76841000\u2103\u964d\u81f3200~500\u2103,\u7528PCVD\u6cd5\u5236\u53d6\u7eb3\u7c73\u9676\u74f7\u5851\u6599\u8584\u819c\u7684\u7279\u5f81\u662f:\u5546\u54c1\u7684\u6768\u6c0f\u6a21\u91cf\uff64\u6297\u62c9\u5f3a\u5ea6\u548c\u5f3a\u5ea6\u90fd\u5f88\u9ad8,\u8010\u78e8\u6027\u80fd\u597d,\u6709\u673a\u5316\u5b66\u7279\u6027\u7262\u56fa,\u6297\u6c27\u5316\u548c\u8150\u8680\u597d,\u6709\u8f83\u9ad8\u7684\u9ad8\u6eab\u6297\u538b\u5f3a\u5ea6\uff61<\/p>\n

\u4f46PCVD\u6280\u672f\u6027\u672c\u8eab\u8fd8\u51fa\u73b0\u4e00\u4e9b\u9898\u578b:<\/p>\n

1)\u6eab\u5ea6\u7684\u6070\u5f53\u7cbe\u786e\u6d4b\u91cf\u548c\u73af\u5883\u6e29\u5ea6\u7684\u5300\u79f0\u6027\u9898\u578b\uff61<\/p>\n

\n

2)\u6d78\u8680\u73af\u5883\u6c61\u67d3\u9898\u578b\uff61\u56e0\u4e3a\u6839\u636e\u5316\u5b66\u53d8\u5316,\u6709\u53cd\u6620\u7269\u8d28\u53ca\u526f\u4ea7\u54c1,\u5bf9\u8150\u8680\u7269\u8d28\u8981\u5904\u7406\u673a\u68b0\u6cf5\u7684\u6d78\u8680\u9898\u578b,\u8fd8\u9700\u8981\u5904\u7406\u6392\u6c14\u7ba1\u7684\u73af\u5883\u6c61\u67d3\u64cd\u7eb5\u53ca\u89e3\u51b3\u9898\u578b\uff61<\/p>\n

\n

3)\u5806\u79ef\u819c\u4e2d\u7684\u6b8b\u4f59\u6c7d\u4f53\u9898\u578b\uff61\u7528PCVD\u6cd5\u6240\u5f97\u7684TiN\u5851\u6599\u8584\u819c\u4e2d\u7684\u6c22\u6c14\u6210\u5206\u968f\u5806\u79ef\u6eab\u5ea6\u7684\u4e0a\u5347\u800c\u51cf\u5c11,\u4e00\u6837\u5e73\u65f6\u800c\u8a00,\u5806\u79ef\u6eab\u5ea6\u9ad8,\u901f\u5ea6\u6bd4\u8f83\u6162,\u53ef\u51cf\u5c11\u6b8b\u7559\u6c7d\u4f53\u91cf,\u5728Si3N4\u819c\u4e2d,\u82e5\u8fc7\u6c27\u5316\u7269\u91cf\u591a,\u4f1a\u5371\u5bb3\u819c\u7684\u4ecb\u7535\u6c14\u6027\u80fd\uff61<\/p>\n

\n

2\u3001PCVD\u7684\u8fd0\u7528\u8303\u7574<\/p>\n

PCVD\u52a0\u5de5\u5de5\u827a\u5177\u5907\u666e\u904d\u7684\u4e3b\u8981\u7528\u9014\uff61<\/p>\n

(1)\u8d85\u786c\u819c\u7684\u8fd0\u7528(TiN\uff64TiC\uff64TiCN\uff64(TiAl)N\uff64C-BN\u7b49) PCVD\u6cd5\u5b9c\u5728\u5728\u5916\u89c2\u8bbe\u8ba1\u7e41\u6742\uff64\u603b\u9762\u79ef\u5927\u7684\u4ea7\u54c1\u5de5\u4ef6\u4e0a\u5f97\u5230\u8d85\u786c\u819c,\u5806\u79ef\u901f\u5ea6\u53ef\u8fbe4~10\u03bcm\/h,\u5f3a\u5ea6\u8d85\u8fc72000HV,\u7ed5\u9540\u6027\u597d,\u4ea7\u54c1\u5de5\u4ef6\u4e0d\u9700\u8f6c\u52a8\u5c31\u53ef\u83b7\u5f97\u5300\u79f0\u7684\u6d82\u5c42\uff61\u5f88\u591a\u8fd0\u7528\u4e8e\u5207\u524a\u5de5\u5177\uff64\u6a21\u5177\u548c\u8010\u78e8\u635f\u96f6\u4ef6\uff61<\/p>\n

\n

(2)\u534a\u5bfc\u4f53\u6750\u6599\u5668\u4ef6\u4e0a\u7edd\u7f18\u5c42\u819c\u7684\u4ea7\u751f \u66e9\u6614\u534a\u5bfc\u4f53\u6750\u6599\u5668\u4ef6\u4e0a\u7684\u7edd\u7f18\u5c42\u819c\u5927\u591a\u6570\u7528SiO2,\u73b0\u5982\u4eca\u7528SiN4 H2\u7528PCVD\u6cd5\u6765\u4ea7\u751fSi3N4,Si3N4\u7684\u7edd\u7f18\u6027\u80fd\uff64\u6297\u6c27\u5316\uff64\u8010\u78b1\u6027\uff64\u8010\u8150\u8680\u6027,\u6bd4SiO2\u5f3a,\u4ece\u7535\u6c14\u6027\u80fd\u4ee5\u53ca\u5939\u6742\u542c\u4ece\u800c\u8a00\u5168\u662f\u6700\u597d\u662f\u7684,\u683c\u5916\u662f\u5f53\u4eca\u7684\u5feb\u901f\u5143\u5668\u4ef6GaAs\u7edd\u7f18\u5c42\u819c\u7684\u4ea7\u751f,\u9ad8\u6eab\u89e3\u51b3\u662f\u4e0d\u592a\u53ef\u80fd\u7684,\u53ea\u6709\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u8981\u4f4e\u6e29\u7b49\u79bb\u5b50\u6cd5\u5f00\u5c55\u5806\u79ef\uff61<\/p>\n

\n

(3)\u91d1\u94a2\u77f3\uff64\u786c\u78b3\u819c\u53ca\u6c2e\u5316\u787c\u7684\u5806\u79ef<\/p>\n

\u9488\u5bf9\u4f4e\u7535\u538b\u751f\u6210\u91d1\u94a2\u77f3\uff64\u786c\u78b3\u819c\u53ca\u6c2e\u5316\u787c\u7684\u79d1\u7814\u5de5\u4f5c\u4e2d,\u4e16\u754c\u5404\u56fd\u4e13\u5bb6\u5b66\u8005\u53ca\u79d1\u5b66\u7814\u7a76\u7ec4\u7ec7\u90fd\u505a\u5f88\u591a\u7684\u5de5\u4f5c\u4e2d,\u7528DC\uff64RF\uff64MW-PCVD\u6cd5\u90fd\u53ef\u4ee5\u83b7\u5f97\u8fd9\u79cd\u539f\u6750\u6599,\u4f46\u8fd0\u7528\u8f83\u591a\u7684\u662fMW-PCVD\u91d1\u94a2\u77f3\u819c\u5728\u534a\u5bfc\u4f53\u6750\u6599\u548c\u7535\u5b50\u5149\u5b66\u5143\u4ef6\u4e0a\u7684\u8fd0\u7528\u5df2\u8f83\u6210\u5b8c\u5584,\u4f46\u5728\u5207\u524a\u5de5\u5177\uff64\u6a21\u8c9d\u4e0a\u7684\u8fd0\u7528\u8fd8\u6709\u5f88\u591a\u7684\u5de5\u4f5c\u8981\u505a\uff61<\/p>\n

\n

(4)\u5bfc\u5149\u948e\u7ef4<\/p>\n

\u9009\u7528\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u6027\u53ef\u4ee5\u4e0d\u9519\u7684\u64cd\u7eb5\u5bfc\u5149\u948e\u7ef4\u7684\u5207\u5411\u6298\u5149\u7387\u7684\u904d\u5e03,\u8fd9\u7c7b\u6280\u672f\u5bf9\u4f7f\u5bfc\u5149\u948e\u7ef4\u5177\u5907\u62b5\u6563\u5c04\u6027\u800c\u8a00\u662f\u5f88\u7406\u60f3\u5316\u7684\uff61<\/p>\n

\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\u6d3e\u65d7\u7eb3\u7c73\u5b98\u7f51\uff1ahppt:\/\/paiqinano.com<\/p>\n

\"\"<\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

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