{"id":19542,"date":"2022-02-03T10:05:08","date_gmt":"2022-02-03T02:05:08","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=19542"},"modified":"2022-01-19T11:34:17","modified_gmt":"2022-01-19T03:34:17","slug":"parylene-f1785-64-4%e6%88%90%e8%86%9c%e5%b7%a5%e8%89%ba%e7%a0%94%e7%a9%b6%e5%8f%91%e5%b1%95%e8%bf%9b%e5%b1%95","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=19542","title":{"rendered":"Parylene F1785-64-4\u6210\u819c\u5de5\u827a\u7814\u7a76\u53d1\u5c55\u8fdb\u5c55"},"content":{"rendered":"

1\u5f01\u8a00 <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u7ea4\u7ef4\u6750\u6599\u5177\u5907\u51fa\u8272\u7684\u7535\u529b\u5b66\u7279\u6027\uff0c\u56e0\u6b64\u5728\u7535\u5b50\u5668\u4ef6\u3001\u7535\u5de5\u5b66\u4e0a\u53d6\u5f97\u4e86\u6781\u5176\u666e\u904d\u7684\u8fd0\u7528\u3002\u5927\u90e8\u5206\u9ad8\u805a\u7269\u539f\u6709\u7684\u7edd\u7f18\u7279\u6027\u4f1a\u62d8\u675f\u548c\u73cd\u60dc\u7535\u6d41\u91cf\uff0c\u4f7f\u5176\u987a\u7740\u9009\u4e2d\u7684\u65b9\u5f0f\u5728\u7535\u5bfc\u4f53\u91cc\u6d41\u52a8\u6027\uff0c\u4e14\u53ef\u4ee5\u652f\u6491\u70b9\u5f88\u9ad8\u7684\u9759\u7535\u573a\uff0c\u4ee5\u9632\u4ea7\u751f\u7535\u7a7f\u900f\u3002\u4e0e\u4f20\u7edf\u7684\u7684\u74f7\u5668\u7edd\u7f18\u5c42\u6750\u6599\u5ddd\u5bf9\u6bd4\uff0c\u9ad8\u805a\u7269\u7edd\u7f18\u5c42\u6750\u6599\u5177\u5907\u8f7b\u8d28\u3001\u4f7f\u7528\u671f\u9650\u957f\u3001\u6613\u751f\u4ea7\u52a0\u5de5\u3001\u7279\u6027\u7cbe\u6e5b\u7b49\u76ca\u5904\u3002\u53ef\u662f\u5e38\u89c1\u7684\u9ad8\u5206\u5b50\u6750\u6599\u7535\u6781\u5316\u539f\u6750\u6599\u4e5f\u662f\u6709\u5176\u5b58\u5728\u7684\u4e0d\u8db3\uff0c\u5982\u70ed\u7262\u56fa\u6027\u76f8\u5bf9\u6027\u8f83\u5f31\uff0c\u4e14\u53d7\u6210\u5f62\u5168\u8fc7\u7a0b\u7684\u9650\u5236\u53ea\u6709\u8fd0\u7528\u4e8e\u7279\u6b8a\u5916\u89c2\u8bbe\u8ba1\u4ea7\u54c1\u5de5\u4ef6\u7684\u8868\u800c\u9540\u5c42\uff0c\u8fd9\u5728\u6beb\u65e0\u7591\u95ee\u6c34\u5e73\u4e0a\u9650\u5236\u4e86\u5176\u8fd0\u7528\u3002 <\/p>\n

\u00a0\u00a0\u00a0 20\u65b0\u4e16\u7eaa60\u5e74\u82f1\u56fd\u7ed3\u5408ni\u5143\u7d20\u4f01\u4e1a\u53d1\u5e03\u4e86Parylene\u7cfb\u5217\u4ea7\u54c1\u65b0\u5f0f\u9ad8\u5206\u5b50\u6750\u6599\u6577\u578b\u9540\u5c42\u539f\u6750\u6599\uff0c\u7531\u4e8e\u5176\u51fa\u8272\u7684\u9694\u7edd\u7279\u6027\u5728\u9632\u6c34\u3001\u9664\u9709\u3001\u9632\u8010\u8150\u8680\u7684\u4e09\u9632\u9540\u5c42\u539f\u6750\u6599\u884c\u4e1a\u83b7\u5f97\u5e7f\u6cdb\u8fd0\u7528\u3002Parylene N \u3001 C\u548cD\u5747\u4e3a\u6c2f\u4ee3\u7684\u9ad8\u805a\u7269\uff0c\u6c1f\u4ee3Parylene\u662f\u8be5\u7cfb\u5217\u4ea7\u54c1\u9ad8\u805a\u7269\u7684\u65b0\u4e00\u4ee3\u5316\u5408\u7269\uff0c\u5305\u542b\u82ef\u73af\u5e96\u4ee3\u548c\u7532\u57fa\u5e96\u4ee3\u4e24\u5927\u7c7b\uff0c \u6c1f\u539f\u5b50\u7684\u52a0\u5165\u53ef\u4ee5\u6bd4\u8f83\u597d\u5730\u6539\u8fdb\u5851\u6599\u8584\u819c\u7684\u7535\u529b\u5b66\u7279\u6027\u548c\u70ed\u7262\u56fa\u6027\u3002\u6c1f\u4ee3Parylene\u7cfb\u5217\u4ea7\u54c1\u5316\u5408\u7269\u7684\u79d1\u5b66\u7814\u7a76\u5173\u952e\u96c6\u4e2d\u5316\u5728\u5355\u4e2a\u73af\u4e8c\u4f53\u7684\u751f\u6210\u65b9\u5f0f\u53ca\u5851\u6599\u8584\u819c\u7684\u8868\u800c\u7279\u70b9\u79d1\u5b66\u7814\u7a76\uff0c\u76f8\u5173\u5851\u6599\u8584\u819c\u5236\u53d6\u65b9\u5f0f\u7684\u6d88\u606f\u8f83\u5c11\uff0c\u66fe\u6709\u9009\u7528\u6db2\u4f53\u524d\u9a71\u4f53\u5f00\u5c55\u5851\u6599\u8584\u819c\u5236\u53d6\u7684\u8d44\u6599\u62a5\u5bfc\u3002 <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Parylene F\u662f\u82ef\u73af\u4e0a\u76844\u4e2a\u6c22\u539f\u5b50\u88ab\u6c1f\u5e96\u4ee3(\u4e0eParylene AF\u7532\u57fa\u4e0a4\u4e2a\u6c22\u539f\u5b50\u88ab\u6c1f\u5e96\u4ee3\u4e0d\u4e00\u6837)\u3002\u6587\u4e2d\u9009\u7528\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u65b9\u5f0f\uff0c\u4ee5\u56fa\u4f53\u73af\u4e8c\u4f53\u4e3a\u6750\u6599\u5f00\u5c55Parylene F\u5851\u6599\u8584\u819c\u7684\u5236\u53d6\uff0c\u5bf9\u5176\u529f\u80fd\u548c\u5916\u8c8c\u5f00\u5c55\u8868\u73b0\uff0c\u5e76\u5bf9\u5851\u6599\u8584\u819c\u7684\u7535\u529b\u5b66\u7279\u6027\u8fdb\u884c\u4e86\u68c0\u6d4b\u3002 <\/p>\n

2\u8bd5\u9a8c <\/p>\n

2. 1\u00a0\u00a0 Parylene F\u5851\u6599\u8584\u819c\u7684\u5236\u53d6 <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Parylene F\u73af\u4e8c\u8eab\u4f53\u7d20\u8d28\u6599\u4e3a\u4e73\u767d\u8272\u7c89\u72b6\u56fa\u6001\uff0c\u7eaf\u51c0\u5ea6\u226595%\u3002\u9009\u7528PDS2010\u9540\u5c42\u7089\u5f00\u5c55\u5851\u6599\u8584\u819c\u5236\u53d6\uff0c\u6700\u5927\u63d0\u5347\u6eab\u5ea6\u4e3a170\u2103\uff0c\u88c2\u5316\u6eab\u5ea6\u4e3a690\u2103\uff0c\u5806\u79ef\u8154\u5ba4\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf510mT\uff0c\u5806\u79ef\u5de5\u4f5c\u538b\u529b\u4e3a32mT\uff0c\u4ee5\u77f3\u82f1\u77f3\u73bb\u7483\u4e3a\u57fa\u6750\u5f00\u5c55\u5851\u6599\u8584\u819c\u5236\u53d6\u3002\u5c06\u5236\u4f5c\u7684\u5851\u6599\u8584\u819c\u4ece\u77f3\u82f1\u77f3\u73bb\u7483\u4e0a\u8131\u79bb\u51fa\u6765\uff0c\u50a8\u5907\u5907\u7528\u3002 <\/p>\n

2. 2\u00a0\u00a0 Parylene F\u5851\u6599\u8584\u819c\u5916\u8c8c\u8868\u73b0 <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u9009\u7528\u65e5\u672c\u7cbe\u5bc6SII\u4eea\u5668\u8bbe\u5907\u682a\u5f0fSPA300HV-\u591a\u7528\u9014\u53ef\u63a7\u6027\u81ea\u7136\u73af\u5883\u626b\u63cf\u4eea\u63a2\u9488\u663e\u5fae\u955c(AFM)\u548c\u897f\u73ed\u7259FEI\u4f01\u4e1a\u7684Sirion-200\u578b\u573a\u53d1\u9001\u626b\u63cf\u4eea\u900f\u5c04\u7535\u955c(SEM)\u5bf9Parylene F\u5851\u6599\u8584\u819c\u7684\u8868\u800c\u5916\u8c8c\u5f00\u5c55\u8868\u73b0\u3002 <\/p>\n

2. 3\u5851\u6599\u8584\u819c\u7684\u7269\u7406\u5316\u5b66\u7279\u6027\u5256\u6790 <\/p>\n

2. 3. 1\u5085\u7acb\u53f6\u7ea2\u5916\u5149\u8c31\u5206\u6790(FT-IR ) <\/p>\n

\u00a0\u00a0 \u00a0 \u00a0 \u00a0 \u9009\u7528\u6cd5\u56fdBruker,EQUINOX 55\u578b\u5085\u7acb\u53f6\u7ea2\u5916\u7ebf\u6c72\u53d6\u5149\u8c31\u4eea\u5bf9\u5236\u53d6\u7684Parylene F\u5851\u6599\u8584\u819c\u5f00\u5c55\u7ea2\u5916\u5149\u8c31\u5206\u6790\u3002\u626b\u63cf\u4eea\u8303\u7574\u4e3a4000-500cm-1\u00a0 \uff0c\u626b\u63cf\u4eea\u9891\u6b21\u4e3a32\u6b21\u3002 <\/p>\n

2. 3. 2\u00a0 X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u4eea\u5256\u6790(XPS) <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u9009\u7528Micro lab MKII\u578b\u591a\u7528\u9014\u7535\u5b50\u5668\u4ef6\u80fd\u8c31\u4eea\u7cbe\u786e\u6d4b\u91cf\uff0cX\u5c04\u7ebf\u706f\u6e90\u4e3aMg Ka(hv=1253. 6eV)\uff0c\u53d1\u9001\u5de5\u4f5c\u7535\u538b\u548c\u7535\u6d41\u91cf\u5404\u81ea\u4e3a14kV\u548c 20mA\uff0c\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u503c\u4e3a1X10-7Pa,\u7ed3\u5408\u80fd\u68c0\u6d4b\u8303\u7574\u4e3a0-1200eV\u3002 <\/p>\n

2. 3. 3\u70ed\u91cd\u5206\u6790\u4eea\u68c0\u6d4b(TUA) <\/p>\n

\u00a0\u00a0\u00a0 \u9009\u7528NETZSCH STA 409C\/CD\u578b\u70ed\u91cd\u5206\u6790\u4eea\u5bf9\u5851\u6599\u8584\u819c\u5f00\u5c55\u68c0\u6d4b\uff0cAr\u6c14\u73cd\u60dc\uff0c\u63d0\u6e29\u901f\u5ea610.00K\/min\uff0c\u63d0\u6e29\u533a\u6bb5\u4e3a20-500\u2103\u3002 <\/p>\n

2. 4 \u00a0\u00a0Parylene F\u5851\u6599\u8584\u819c\u7684\u4ecb\u7535\u6c14\u6027\u80fd\u68c0\u6d4b <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u9009\u7528HP4291A\u7279\u6027\u963b\u6297\u5206\u6790\u4eea\u5668\u572810-100MHz\u5de5\u4f5c\u9891\u7387\u4e0b\u626b\u63cf\u4eea\u68c0\u6d4b\uff0c\u7eaa\u5f55\u4e0b\u4e0e\u5176\u8bf4\u76f8\u5173\u7684\u6570\u636e\u4fe1\u606f\uff0c\u4f9d\u636e\u68c0\u6d4b\u5b9e\u9645\u6548\u679c\u6d4b\u7b97\u8bd5\u4ef6\u7684\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u3002 <\/p>\n

\u5b9e\u9645\u6548\u679c\u548c\u63a2\u8ba8 <\/p>\n

3. 1\u00a0\u00a0 Parylene F\u7684\u589e\u7a20\u57fa\u672c\u539f\u7406 <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Parylene F\u5851\u6599\u8584\u819c\u7684\u5236\u53d6\u9700\u8981\u5728\u4e13\u7528\u578b\u7684\u771f\u7a7a\u6cf5\u6d82\u6577\u673a\u5668\u8bbe\u5907\u4e0a\u5f00\u5c55\uff0c\u56fe1\u4e3aParylene F\u5851\u6599\u8584\u819c\u5236\u53d6\u673a\u5668\u8bbe\u5907\u5e73\u9762\u56fe\uff0c\u8be5\u673a\u5668\u8bbe\u5907\u5173\u952e\u7531\u63d0\u5347\u7089\u3001\u88c2\u89e3\u7089\u3001\u5806\u79ef\u8154\u5ba4\u3001\u51b7\u9631\u548c\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u51e0\u90e8\u4efd\u6784\u6210\u3002\u6750\u6599\u5728\u63d0\u5347\u7089\u5185\u52a0\u6e29\u63d0\u5347\uff0c\u88c2\u89e3\u7089\u5185\u964d\u89e3\u6210\u6d3b\u529b\u5355\u4e2a\u6c27\u81ea\u7531\u57fa\uff0c\u5806\u79ef\u8154\u623f\u95f4\u5185\u5806\u79ef\u6d82\u819c\u3002 <\/p>\n

\"\" <\/p>\n

\u00a0\u00a0\u00a0 \u5728\u4e13\u95e8\u7684\u771f\u7a7a\u6cf5\u6d82\u8986\u673a\u5668\u8bbe\u5907\u4e0a\uff0cParylene F\u6750\u6599\u73af\u4e8c\u4f53\u88c2\u5316\u540e\u5728\u57fa\u8868\u76ae\u800c\u6c89\u5386\u4e45\u5f25\u575a\u5408\u4ea7\u751f\u5300\u79f0\u65e0\u9488\u773c\u5e76\u4e0e\u7269\u4ef6\u5916\u89c2\u8bbe\u8ba1\u540c\u6837\u7684Parylene F\u5851\u6599\u8584\u819c\u3002\u6d82\u819c\u5168\u8fc7\u7a0b\u4e0e\u5176\u4ed6Parylene\u6750\u6599\u76f8\u8fd1\uff0c\u4e5f\u5305\u542b\u4ee5\u4e0b3\u4e2a\u6d41\u7a0b\uff1a <\/p>\n

(1)\u56fa\u6001\u73af\u4e8c\u4f53\u5728\u6beb\u65e0\u7591\u95ee\u6eab\u5ea6\u4e0b\u63d0\u5347\u4e3a\u6c7d\u6001\u73af\u4e8c\u4f53; <\/p>\n

(2)\u5728\u8f83\u9ad8\u6eab\u5ea6\u4e0b\u6c7d\u6001\u73af\u4e8c\u4f53\u88c2\u5316\u4e3a\u6d3b\u529b\u5355\u4e2a\u6c27\u81ea\u7531\u57fa; <\/p>\n

(3)\u5355\u4e2a\u6c27\u81ea\u7531\u57fa\u8fdb\u5230\u5806\u79ef\u8154\u5ba4\u540e\uff0c\u5728\u57fa\u8868\u76ae\u800c\u6c89\u5386\u4e45\u5f25\u575a\u5408\u4ea7\u751f\u7ebf\u5f62\u9ad8\u5206\u5b50\u6750\u6599\u9ad8\u805a\u7269\u3002 <\/p>\n

Parylene F\u6d82\u819c\u5168\u8fc7\u7a0b\u7684\u5316\u5b66\u53d8\u5316\u8868\u8fbe\u5f0f\u5982\u4e0b\u56fe2\u6240\u663e\u793a\uff1a <\/p>\n

\"\" <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u4eceParylene F\u5851\u6599\u8584\u819c\u7684\u589e\u7a20\u57fa\u672c\u539f\u7406\u53ef\u4ee5\u770b\u5f97\u51fa\u8be5\u5236\u53d6\u5168\u8fc7\u7a0b\u4e3a\u771f\u7a7a\u6cf5\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u5168\u8fc7\u7a0b\uff0c\u4e0d\u5fc5\u5e94\u7528\u6709\u673a\u6eb6\u5242\uff0c\u4e0d\u5bb9\u6613\u9020\u6210\u8f83\u5927\u7684\u7a7a\u6c14\u6c61\u67d3\uff0c\u5e76\u4e14\u53ef\u8ba9\u88ab\u6d82\u8986\u7684\u76ee\u6807\u5f97\u5230\u6301\u7eed\u3001\u5300\u79f0\u3001\u9ad8\u5bc6\u5ea6\u7684\u819c\u5c42\u3002\u6d82\u819c\u5168\u8fc7\u7a0b\u4e3a\u6c7d\u6001\u5355\u5206\u5b50\u7ed3\u6784\u6c27\u81ea\u7531\u57fa\u7684\u6c47\u805a\u6210\u5f62\uff0c\u6240\u4ee5\u8fd0\u7528\u4e0d\u4f1a\u53d7\u5230\u4ea7\u54c1\u5de5\u4ef6\u5916\u89c2\u8bbe\u8ba1\u591a\u5143\u6027\u7684\u9650\u5236\uff0c\u53ef\u9002\u7528\u5404\u79cd\u5404\u6837\u5916\u89c2\u8bbe\u8ba1\u7684\u4ea7\u54c1\u5de5\u4ef6\u3002 <\/p>\n

3. 2\u00a0\u00a0 Parylene F\u5851\u6599\u8584\u819c\u7684\u5236\u53d6\u52a0\u5de5\u5de5\u827a <\/p>\n

\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u6709\u673a\u5316\u5b66\u771f\u7a7a\u6cf5\u6c14\u76f8\u8272\u8c31\u5806\u79ef\u5236\u53d6Parylene F\u5851\u6599\u8584\u819c\u7684\u73af\u8282\u4e2d\uff0c\u57fa\u6750\u6eab\u5ea6\u3001\u57fa\u8868\u76ae\u800c\u60c5\u51b5\u3001\u63d0\u5347\u6eab\u5ea6\u3001\u88c2\u5316\u6eab\u5ea6\u3001\u5806\u79ef\u5ba4\u5de5\u4f5c\u538b\u529b\u7b49\u539f\u56e0\u5bf9\u819c\u7279\u6027\u548c\u54c1\u8d28\u90fd\u662f\u6709\u6beb\u65e0\u7591\u95ee\u5371\u5bb3\u3002\u5806\u79ef\u5ba4\u672c\u5e95\u8f90\u5c04\u5de5\u4f5c\u538b\u529b\u9ad8\u6b8b\u6e23\u6c7d\u4f53\u6210\u5206\u9ad8\uff0c\u6c27\u81ea\u7531\u57fa\u975e\u5e38\u5bb9\u6613\u4e27\u5931\u6d3b\u529b\uff0c\u4ea7\u751f\u630e\u5305\u9ad8\u805a\u7269\u7684\u6c89\u79ef;\u63d0\u5347\u6eab\u5ea6\u8fc7\u8fc7\u9ad8\u63d0\u9ad8\u6c7d\u4f53\u8fdb\u5230\u5806\u79ef\u8154\u5ba4\u7684\u538b\u5dee\uff0c\u4fc3\u4f7f\u5851\u6599\u8584\u819c\u5806\u79ef\u901f\u5ea6\u8fc7\u5feb\u6d82\u819c\u54c1\u8d28\u5dee;\u88c2\u5316\u6eab\u5ea6(\u8fc7\u8fc7\u9ad8\u5bfc\u81f4\u73af\u4e8c\u8eab\u4f53\u7d20\u8d28\u6599\u7684\u8fc7\u88c2\u5316\uff0c\u8fc7\u4f4e\u5219\u4f1a\u9020\u6210\u73af\u4e8c\u4f53\u88c2\u5316\u4e0d\u5f7b\u5e95)\u4e5f\u4f1a\u9020\u6210\u5851\u6599\u8584\u819c\u54c1\u8d28\u7684\u7740\u9646\u3002\u7531\u6b64\u901a\u8fc7\u5f88\u591a\u5b9e\u9a8c\uff0c\u660e\u786e\u4e86\u5851\u6599\u8584\u819c\u7684\u5236\u53d6\u52a0\u5de5\u5de5\u827a\u6807\u51c6\u4e3a\u6700\u5927\u63d0\u5347\u6eab\u5ea6170\u2103\uff0c\u88c2\u5316\u6eab\u5ea6690\u2103\uff0c\u5806\u79ef\u8154\u5ba4\u672c\u5e95\u8f90\u5c04\u771f\u7a7a\u6cf510mT\uff0c\u5806\u79ef\u5de5\u4f5c\u538b\u529b32mT\u3002 <\/p>\n

\u00a0\u00a0\u00a0 \u5bf9\u8be5\u6807\u51c6\u4e0b\u5236\u53d6\u7684\u5851\u6599\u8584\u819c\u5f00\u5c55\u4e86\u5916\u8c8c\u8868\u73b0\uff0c\u5982\u4e0b\u56fe3\u6240\u663e\u793a\u3002\u4ece\u56fe3\u4e2d\u5e38\u5236\u53d6\u590d\u5408\u819c\u7684\u7535\u955c\u4e8c\u7ef4\u7167\u7247\u53ef\u4ee5\u770b\u5f97\u51faParylene F\u5851\u6599\u8584\u819c\u9ad8\u5bc6\u5ea6\u65e0\u9488\u773c\uff0c\u5177\u5907\u5c24\u5176\u5f88\u662f\u5300\u79f0\u7684\u663e\u5fae\u7ed3\u6784\u3002\u539f\u5b50\u529b\u663e\u5fae\u955c\u4e09\u7ef4\u5916\u8c8c\u7167\u7247\u6ce8\u91ca\u5851\u6599\u8584\u819c\u51f8\u51f9\u89c4\u683c\u5728\u7eb3\u7c73\u8303\u7574\uff0c\u4e14\u5851\u6599\u8584\u819c\u7531\u9525\u72b6\u7ed3\u6676\u9897\u7c92\u7269\u5bc6\u6392\u6c89\u79ef\u800c\u6210\u3002\u5916\u90e8\u7ecf\u6d4e\u5916\u8c8c\u5256\u6790\u5b9e\u9645\u6548\u679c\u6ce8\u91ca\u8be5\u6807\u51c6\u4e0b\u6240\u5236\u53d6\u5851\u6599\u8584\u819c\u9ad8\u5bc6\u5ea6\u5300\u79f0\uff0c\u8fd9\u5bf9\u5176\u9ad8\u963b\u9694\u7279\u6027\u5341\u5206\u6709\u76ca\u3002 <\/p>\n

\"\" <\/p>\n

3 .3 Parylene F\u5851\u6599\u8584\u819c\u7684\u5256\u6790\u8868\u73b0 <\/p>\n

\u9009\u7528\u5085\u7acb\u53f6\u7ea2\u5916\u5149\u8c31(IR),X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31(XPS)\u53ca\u70ed\u91cd\u5206\u6790\u4eea(TGA)\u5bf9\u7ecf\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u65b9\u5f0f\u914d\u5236\u7684\u5851\u6599\u8584\u819c\u5f00\u5c55\u6784\u9020\u5316\u5b66\u6210\u5206\u5206\u6790\uff0c\u5e76\u68c0\u6d4b\u4e86\u5176\u56de\u5e94\u7684\u5206\u89e3\u53cd\u5e94\u6eab\u5ea6\uff0c\u68c0\u6d4b\u5b9e\u9645\u6548\u679c\u5982\u4e0b\u56fe4-6\u6240\u663e\u793a\u3002 <\/p>\n

\u00a0\u00a0\u00a0 \u56fe4\u4e3aParylene F\u5851\u6599\u8584\u819c\u7684FT-IR\u8c31\u56fe\uff0c\u4ece\u56fe4\u4e2d\u53ef\u4ee5\u770b\u5f97\u51fa\u5cf0\u4f4d\u57281491.58\u7684\u5f3a\u6c72\u53d6\u5cf0\u4e3aC-F\u952e\u7684\u6c72\u53d6\u5cf0\uff0c\u786e\u8ba4\u5851\u6599\u8584\u819c\u4e2d\u6709C-F\u952e\u7684\u5b58\u6709\u3002\u5cf0\u4f4d\u57281200-1300\u7684\u4e09\u91cd\u5cf0\u4e3a\u82ef\u73af\u7684\u78b3\u78b3\u952e\u6c72\u53d6\u5cf0\uff0c\u5728944.18\u5904\u7684\u6c72\u53d6\u5cf0\u5c5e\u4e8e1,4\u5e96\u4ee3\u82ef\u73af\u7684\u5cf0\u3002\u5cf0\u4f4d\u4e3a2958.24\u4e0e2881.95\u7684\u5cf0\u4e3a\u7532\u57fa\u7684\u5cf0\uff0c\u786e\u8ba4\u8be5\u5851\u6599\u8584\u819c\u4e2d\u5e26\u6709\u7532\u57fa\u3002\u7ea2\u5916\u5149\u8c31\u5206\u6790\u5b9e\u9645\u6548\u679c\u6ce8\u91ca\uff0c\u9009\u7528\u771f\u7a7a\u6cf5\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u5236\u53d6\u7684Parylene F\u5851\u6599\u8584\u819c\u7531F\u3001C\u5143\u7d20\u7ec4\u6210\uff0c\u6ca1\u6709\u5176\u4ed6\u6b8b\u6e23\u6210\u4efd\u3002 <\/p>\n

\u00a0 <\/p>\n

\u00a0\u00a0 <\/p>\n

\"\" <\/p>\n

\u56fe5\u4e3aParylene F\u5851\u6599\u8584\u819c\u7684XPS\u5168\u8c31\uff0c\u4ece\u8c31\u56fe\u5185\u53ef\u4ee5\u770b\u5f97\u51fa\u7ed3\u5408\u80fd\u4e3a282.5eV\u7684\u5f3a\u6c72\u53d6\u5cf0\u4e3aCls\u7684\u5cf0\uff0c\u7ed3\u5408\u80fd\u4e3a685.0eV\u7684\u5cf0\u4e3aFls\u7684\u5cf0\uff0c\u7ed3\u5408\u80fd\u4e3a828\u548c856eV\u7684\u5cf0\u5206\u522b\u662fFKL1\u548cFKL2\u4fc4\u6b47\u5cf0\uff0c30eV\u662fF2s\u5cf0\u3002\u56fe\u666e\u5256\u6790\u5b9e\u9645\u6548\u679c\u6ce8\u91ca\u5851\u6599\u8584\u819c\u4e2d\u5e26\u6709F\u3001C\u539f\u7d20\uff0c\u786e\u8ba4\u8be5\u5851\u6599\u8584\u819c\u662f\u7531F\u3001C\u5143\u7d20\u7ec4\u6210\u3002 <\/p>\n

\"\" <\/p>\n

\u00a0\u00a0\u00a0 \u4f4e\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u7edd\u7f18\u5c42\u6750\u6599\u9ad8\u6eab\u65f6\u7684\u70ed\u7262\u56fa\u6027\u5c24\u5176\u5f88\u662f\u91cd\u8981\uff0c\u70ed\u7262\u56fa\u6027\u597d\u4ee3\u8868\u7740\u5728\u8f83\u9ad8\u6eab\u5ea6\u4e0b\u5176\u6709\u673a\u5316\u5b66\u548c\u7269\u7406\u5b66\u813e\u6c14\u5747\u8f83\u7262\u56fa\u3002\u56fe6\u4e3aParylene\u00a0 F\u5851\u6599\u8584\u819c\u5728\u603b\u6d41\u91cf\u4e3a30mI\/min\uff0c\u63d0\u6e29\u901f\u5ea6\u4e3a10\u2103\/min\u7684\u9ad8\u7eafAr\u4e2d\u7684\u70ed\u91cd\u6d4b\u91cf\u5b9e\u9645\u6548\u679c\u3002\u7531\u56fe6\u5f97\u77e5\u66f2\u7ebf\u56fe\u53ea\u6709\u4e00\u4e2a\u65e0\u91cd\u529b\u9636\u68af\u6ce8\u91ca\u4e3a\u4e00\u9636\u65e0\u91cd\u529b\u3002\u7528\u5916\u63a8\u6cd5\u6c42\u53d6\u8087\u7aef\u65e0\u91cd\u529b\u6eab\u5ea6\u4e3a470.5\u2103\u3002\u5728\u9ad8\u7eaf\u7a00\u6709\u6c14\u4f53Ar\u6c14\u6807\u51c6\u4e0b\u6d4b\u91cf\u7684\u5b9e\u9645\u6548\u679c\u53ef\u505a\u4e3aParylene F\u5851\u6599\u8584\u819c\u70ed\u7262\u56fa\u6027\u7684\u8868\u73b0\uff0c\u8868\u660e\u8be5\u5851\u6599\u8584\u819c\u5728470.5\u2103\u4e0b\u672a\u4ea7\u751f\u65ad\u7ebf\u88c2\u5316\u53cd\u6620\uff0c\u65e0\u6eb6\u89e3\u65e0\u91cd\u529b\uff0c\u5373\u5851\u6599\u8584\u819c\u5728\u8be5\u6eab\u5ea6\u4e0b\u662f\u7a33\u5b9a\u7684\u3002 <\/p>\n

\"\" <\/p>\n

\u00a0\u00a0\u00a0 \u7ea2\u5916\u5149\u8c31,X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u53ca\u70ed\u91cd\u5206\u6790\u4eea\u5256\u6790\u5b9e\u9645\u6548\u679c\u6ce8\u91ca\uff0c\u5236\u53d6\u7684Parylene F\u5851\u6599\u8584\u819c\u7684\u5173\u952e\u7ec4\u5408\u800c\u6210\u6210\u4efd\u4e3aF\u548cC\u539f\u7d20\uff0c\u6ca1\u6709\u5176\u4ed6\u6b8b\u6e23\u6210\u4efd\uff0c\u4e14\u70ed\u7262\u56fa\u6027\u4e0d\u9519\u3002 <\/p>\n

3. 4\u00a0\u00a0 Parylene F\u5851\u6599\u8584\u819c\u4ecb\u7535\u6c14\u6027\u80fd\u68c0\u6d4b <\/p>\n

\u00a0\u00a0\u00a0 \u4ecb\u7535\u6c14\u6027\u80fd\u662f\u79d1\u5b66\u7814\u7a76\u9ad8\u805a\u7269\u5728\u53e6\u52a0\u4ea4\u6d41\u7535\u6d41\u65f6\u7535\u78c1\u80fd\u7684\u5b58\u653e\u548c\u8017\u635f\u8ff9\u8c61\u3002\u9ad8\u5206\u5b50\u6750\u6599\u7684\u4ecb\u7535\u6c14\u6027\u80fd\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u52a8\u6001\u6027\u7ed3\u6784\u529b\u5b66\u884c\u4e3a\u5f88\u7c7b\u4f3c\uff0c\u5b83\u8868\u660e\u4e86\u5728\u6b63\u5f26\u51fd\u6570\u4ea4\u53d8\u7535\u573a\u529f\u6548\u4e0b\u5076\u6781\u5b50\u7684\u4e3b\u9898\u6d3b\u52a8\u3002\u5728\u8bb8\u591a\u72b6\u51b5\u4e0b\uff0c\u5b83\u4e5f\u662f\u4e0e\u751f\u7269\u5927\u5206\u5b50\u5f00\u94fe\u4e3b\u9898\u6d3b\u52a8\u76f8\u5173\u7684\u4e00\u4e2a\u677e\u6563\u5168\u8fc7\u7a0b\u3002\u5f53\u6b63\u8d1f\u6781\u9ad8\u5206\u5b50\u6750\u6599\u7535\u89e3\u8d28\u6eb6\u6db2\u653e\u7f6e2\u4e2a\u7535\u7ea7\u7684\u6781\u7247\u4e2d\u95f4\u65f6\uff0c\u5728\u5916\u9762\u9759\u7535\u573a\u529f\u6548\u4e0b\uff0c\u6781\u6027\u5206\u5b50\u4e2d\u7684\u5076\u6781\u5b50\u5411\u53cd\u8fc7\u6765\u7684\u7535\u7ea7\u65b9\u4f4d\u6392\u5e8f\uff0c\u9020\u6210\u53d6\u5411\u6781\u5316\u6216\u5076\u6781\u7535\u6781\u6781\u5316\u3002\u4ece\u5b8f\u89c2\u7ecf\u6d4e\u89c6\u89d2\u6765\u63a2\u8ba8\u5371\u5bb3\u7535\u6781\u6781\u5316\u7684\u8981\u7d20\uff0c\u5e76\u4e14\u7528\u4e00\u5b8f\u89c2\u7ecf\u6d4e\u7684\u6807\u91cf\u5373\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570(\u3002)\u6765\u8003\u91cf\u7535\u6781\u6781\u5316\u7684\u6c34\u5e73\uff0c\u7535\u6781\u6781\u5316\u8d8a\u5927\uff0c\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u8d8a\u9ad8\u3002 <\/p>\n

\u00a0\u00a0\u00a0 \u88681\u4e3aParylene F\u5851\u6599\u8584\u819c\u7684\u4ecb\u7535\u6c14\u6027\u80fd\u68c0\u6d4b\u5b9e\u9645\u6548\u679c\u3002\u4ece\u88681\u4e2d\u7684\u68c0\u6d4b\u5b9e\u9645\u6548\u679c\u53ef\u4ee5\u770b\u5f97\u51fa\u5851\u6599\u8584\u819c\u7684\u4f53\u79ef\u7535\u963b\u7387\u9ad8\u3001\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u4f4e\uff0c\u8fd9\u6ce8\u91ca\u8be5Parylene F\u662f\u4e00\u79cd\u7279\u6027\u7cbe\u6e5b\u7684\u5851\u6599\u8584\u819c\u7535\u6781\u5316\u539f\u6750\u6599\u3002 <\/p>\n

\"\" <\/p>\n

4\u7ed3\u679c <\/p>\n

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