{"id":19483,"date":"2022-02-03T10:50:51","date_gmt":"2022-02-03T02:50:51","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=19483"},"modified":"2022-01-19T11:42:46","modified_gmt":"2022-01-19T03:42:46","slug":"%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e6%8a%80%e6%9c%af%e4%b8%93%e7%94%a8%e8%af%8d%e6%b1%87%e6%80%bb","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=19483","title":{"rendered":"\u771f\u7a7a\u9540\u819c\u6280\u672f\u4e13\u7528\u8bcd\u6c47\u603b"},"content":{"rendered":"

\n\t1\u4e00\u6837\u5e73\u65f6\u4e13\u4e1a\u672f\u8bed<\/p>\n<\/h2>\n

\n\t1.1\u771f\u7a7a\u9540\u819c\u673avacuum coating\uff1a\u5728\u5904\u5728\u771f\u7a7a\u6cf5\u4e0b\u7684\u7845\u7247\u4e0a\u5236\u5f97\u819c\u5c42\u7684\u4e00\u79cd\u65b9\u5f0f\u3002
\n1.2\u7845\u7247substrate\uff1a\u819c\u5c42\u627f\u62c5\u4f53\u3002
\n1.3\u5b9e\u9a8c\u7845\u7247testing substrate\uff1a\u5728\u8868\u5c42\u7684\u9540\u819c\u9010\u6e10\u3001\u8868\u5c42\u7684\u9540\u819c\u5168\u8fc7\u7a0b\u4e2d\u6216\u8868\u5c42\u7684\u9540\u819c\u5b8c\u6bd5\u540e\u4f5c\u4e3a\u7cbe\u786e\u6d4b\u91cf\u548c\uff08\u6216\uff09\u5b9e\u9a8c\u7684\u7845\u7247\u3002
\n1.4\u9540\u819c\u6750\u6599coating material\uff1a\u7528\u4e8e\u5236\u5f97\u819c\u5c42\u7684\u539f\u6599\u3002
\n1.5\u6325\u53d1\u539f\u6750\u6599evaporation material\uff1a\u5728\u771f\u7a7a\u84b8\u53d1\u4e2d\u7528\u4e8e\u6325\u53d1\u7684\u9540\u819c\u6750\u6599\u3002
\n1.6\u78c1\u63a7\u6e85\u5c04\u539f\u6750\u6599sputtering material\uff1a\u6709\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04\u4e2d\u7528\u4e8e\u78c1\u63a7\u6e85\u5c04\u7684\u9540\u819c\u6750\u6599\u3002
\n1.7\u819c\u5c42\u539f\u6750\u6599(\u819c\u5c42\u6750\u6599)film material\uff1a\u6784\u6210\u819c\u5c42\u7684\u539f\u6750\u6599\u3002
\n1.8\u6325\u53d1\u901f\u5ea6evaporation rate\uff1a\u5728\u7ed9\u51c6\u95f4\u9694\u65f6\u95f4\u5185,\u6325\u53d1\u51fa\u53bb\u7684\u539f\u6750\u6599\u91cf,\u9664\u4e8e\u8be5\u95f4\u9694\u65f6\u95f4
\n1.9\u78c1\u63a7\u6e85\u5c04\u901f\u5ea6sputtering rate\uff1a\u5728\u7ed9\u51c6\u95f4\u9694\u65f6\u95f4\u5185,\u78c1\u63a7\u6e85\u5c04\u51fa\u53bb\u7684\u539f\u6750\u6599\u91cf,\u9664\u4e8e\u8be5\u95f4\u9694\u65f6\u95f4\u3002
\n1.10\u5806\u79ef\u901f\u5ea6deposition rate\uff1a\u5728\u7ed9\u51c6\u95f4\u9694\u65f6\u95f4\u5185,\u5806\u79ef\u5728\u7845\u7247\u4e0a\u7684\u539f\u6750\u6599\u91cf,\u9664\u4e8e\u8be5\u95f4\u9694\u65f6\u95f4\u548c\u7845\u7247\u5916\u578b\u79ef\u3002
\n1.11\u8868\u5c42\u7684\u9540\u819c\u89c6\u89d2coating angle\uff1a\u51fa\u5c04\u5230\u7845\u7247\u4e0a\u7684\u9897\u7c92\u65b9\u4f4d\u4e0e\u88ab\u9540\u5916\u578b\u6cd5\u7ebf\u4e2d\u95f4\u7684\u4ea4\u89d2\u3002\n<\/p>\n<\/p>\n

\n\t2\u52a0\u5de5\u5de5\u827a\n<\/p>\n

\n\t2.1\u771f\u7a7a\u6cf5\u84b8\u819cvacuum evaporation coating\uff1a\u4f7f\u9540\u819c\u6750\u6599\u6325\u53d1\u7684\u771f\u7a7a\u9540\u819c\u673a\u5168\u8fc7\u7a0b\u3002
\n2.1.1\u4e0e\u6b64\u540c\u65f6\u6325\u53d1simultaneous evaporation\uff1a\u7528\u591a\u4e2a\u51b7\u51dd\u5668\u628a\u5404\u79cd\u5404\u6837\u6325\u53d1\u539f\u6750\u6599\u4e0e\u6b64\u540c\u65f6\u84b8\u9540\u5230\u7845\u7247\u4e0a\u7684\u771f\u7a7a\u84b8\u53d1\u3002
\n2.1.2\u6325\u53d1\u573a\u6325\u53d1evaporation field evaporation\uff1a\u7531\u6325\u53d1\u573a\u4e0e\u6b64\u540c\u65f6\u6325\u53d1\u7684\u539f\u6750\u6599\u5230\u7845\u7247\u4e0a\u5f00\u5c55\u84b8\u9540\u7684\u771f\u7a7a\u84b8\u53d1(\u6b64\u52a0\u5de5\u5de5\u827a\u8fd0\u7528\u4e8e\u5927\u89c4\u6a21\u6325\u53d1\u4ee5\u5f97\u5230\u5230\u7406\u60f3\u5316\u7684\u819c\u539a\u904d\u5e03)\u3002
\n2.1.3\u53cd\u6620\u6027\u771f\u7a7a\u84b8\u53d1reactive vacuum evaporation\uff1a\u6839\u636e\u4e0e\u6c7d\u4f53\u53cd\u6620\u83b7\u5f97\u7406\u60f3\u6210\u5206\u7684\u819c\u5c42\u539f\u6750\u6599\u7684\u771f\u7a7a\u84b8\u53d1\u3002
\n2.1.4\u51b7\u51dd\u5668\u4e2d\u7684\u53cd\u6620\u6027\u771f\u7a7a\u84b8\u53d1reactive vacuum evaporation in evaporator\uff1a\u4e0e\u51b7\u51dd\u5668\u4e2d\u5404\u79cd\u5404\u6837\u6325\u53d1\u539f\u6750\u6599\u53cd\u6620,\u800c\u83b7\u5f97\u7406\u60f3\u6210\u5206\u819c\u5c42\u539f\u6750\u6599\u7684\u771f\u7a7a\u84b8\u53d1\u3002
\n2.1.5\u7acb\u5373\u52a0\u6e29\u7684\u6325\u53d1direct heating evaporation\uff1a\u6325\u53d1\u539f\u6750\u6599\u6325\u53d1\u6240\u5fc5\u9700\u7684\u53d1\u70ed\u91cf\u662f\u5bf9\u6325\u53d1\u539f\u6750\u6599(\u5728\u94b3\u9505\u4e2d\u6216\u65e0\u9700\u94b3\u9505)\u81ea\u8eab\u84b8\u716e\u7684\u6325\u53d1\u3002
\n2.1.6\u7535\u78c1\u611f\u5e94\u52a0\u70ed\u6325\u53d1induced heating evaporation\uff1a\u6325\u53d1\u539f\u6750\u6599\u6839\u636e\u78c1\u611f\u5e94\u6da1\u65cb\u52a0\u6e29\u7684\u6325\u53d1\u3002
\n2.1.7\u7535\u5b50\u675f\u84b8\u53d1electron beam evaporation\uff1a\u6839\u636e\u7535\u5b50\u5668\u4ef6\u8d1f\u7535\u5b50\u4f7f\u6325\u53d1\u539f\u6750\u6599\u52a0\u6e29\u7684\u6325\u53d1\u3002
\n2.1.8\u6fc0\u5149\u6325\u53d1laser beam evaporation\uff1a\u6839\u636e\u6fc0\u5149\u52a0\u6e29\u6325\u53d1\u539f\u6750\u6599\u7684\u6325\u53d1\u3002
\n2.1.9\u95f4\u63a5\u6027\u52a0\u6e29\u7684\u6325\u53d1indirect heating evaporation\uff1a\u5728\u52a0\u6e29\u5b89\u88c5(\u6bd4\u5982\u504f\u821f\u5f62\u51b7\u51dd\u5668,\u94b3\u9505,\u94a8\u4e1d,\u53d1\u70ed\u677f,\u7535\u70ed\u68d2,\u87ba\u65cb\u5f0f\u7535\u78c1\u7ebf\u5708\u7b49)\u4f7f\u5f97\u6325\u53d1\u539f\u6750\u6599\u5f97\u5230\u6325\u53d1\u6240\u5fc5\u9700\u7684\u53d1\u70ed\u91cf\u5e76\u6839\u636e\u5bfc\u70ed\u6216\u8f90\u5c04\u70ed\u65b9\u6cd5\u4f20\u9001\u7ed9\u6325\u53d1\u539f\u6750\u6599\u7684\u6325\u53d1\u3002
\n2.1.10\u95ea\u84b8flash evaportion\uff1a\u5c06\u5c11\u91cf\u7684\u6325\u53d1\u539f\u6750\u6599\u4e2d\u65ad\u5730\u505a\u77ac\u95f4\u7684\u6325\u53d1\u3002
\n2.2\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04vacuum sputtering\uff1a\u5728\u771f\u7a7a\u6cf5\u4e2d\uff0c\u7a00\u6709\u6c14\u4f53\u6b63\u79bb\u5b50\u4ece\u9776\u5916\u578b\u4e0a\u8d1f\u7535\u5b50\u51fa\u5206\u5b50\uff08\u5206\u5b50\u7ed3\u6784\uff09\u6216\u539f\u5b50\u56e2\u7684\u5168\u8fc7\u7a0b\u3002\u00a0
\n2.2.1\u53cd\u6620\u6027\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04\u00a0reactive vacuum sputtering\uff1a\u6839\u636e\u4e0e\u6c7d\u4f53\u7684\u53cd\u6620\u83b7\u5f97\u7406\u60f3\u6210\u5206\u7684\u819c\u5c42\u539f\u6750\u6599\u7684\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04\u3002
\n2.2.2\u00a0\u504f\u538b\u78c1\u63a7\u6e85\u5c04bias sputtering\uff1a\u5728\u78c1\u63a7\u6e85\u5c04\u5168\u8fc7\u7a0b\u4e2d\uff0c\u5c06\u504f\u538b\u589e\u52a0\u4e8e\u7845\u7247\u53ca\u5176\u819c\u5c42\u7684\u78c1\u63a7\u6e85\u5c04\u3002
\n2.2.3\u00a0\u76f4\u6d41\u7535\u4e8c\u7ea7\u78c1\u63a7\u6e85\u5c04direct current diode sputtering\uff1a\u6839\u636e\u4e8c\u4e2a\u7535\u7ea7\u95f4\u7684\u76f4\u6d41\u7535\u538b\uff0c\u4f7f\u6c7d\u4f53\u817c\u8146\u5145\u653e\u7535\u5e76\u628a\u9776\u505a\u4e3a\u8d1f\u6781\u7684\u78c1\u63a7\u6e85\u5c04\u3002
\n2.2.4\u975e\u5bf9\u79f0\u6c9f\u901a\u4ea4\u6d41\u78c1\u63a7\u6e85\u5c04asymmtric alternate current sputtering\uff1a\u6839\u636e\u4e8c\u4e2a\u7535\u7ea7\u95f4\u7684\u975e\u5bf9\u79f0\u4ea4\u6d41\u7535\u6d41\uff0c\u4f7f\u6c7d\u4f53\u817c\u8146\u5145\u653e\u7535\u5e76\u628a\u9776\u505a\u4e3a\u6c72\u53d6\u6bd4\u8f83\u5927\u5171\u4ef7\u952e\u6d41\u7684\u7535\u7ea7\u3002
\n2.2.5\u9ad8\u9891\u7387\u4e8c\u6781\u78c1\u63a7\u6e85\u5c04high frequency diode sputtering\uff1a\u6839\u636e\u4e8c\u4e2a\u7535\u7ea7\u95f4\u7684\u9ad8\u9891\u7387\u5de5\u4f5c\u7535\u538b\u5f97\u5230\u9ad8\u9891\u653e\u7535\u8fdb\u800c\u9776\u6781\u5f97\u5230\u8d1f\u7535\u8377\u4f4d\u7684\u78c1\u63a7\u6e85\u5c04\u3002
\n2.2.6\u70ed\u9634\u6781\u76f4\u6d41\u6e85\u5c04\uff08\u4e09\u6781\u578b\u78c1\u63a7\u6e85\u5c04\uff09hot cathode direct current sputtering\uff1a\u51ed\u501f\u70ed\u9634\u6781\u548c\u9633\u6781\u6c27\u5316\u5f97\u5230\u975e\u817c\u8146\u6c7d\u4f53\u5145\u653e\u7535\uff0c\u6c7d\u4f53\u5145\u653e\u7535\u6240\u5f62\u6210\u7684\u6b63\u79bb\u5b50\uff0c\u7531\u5728\u6b63\u6781\u548c\u8d1f\u6781\uff08\u9776\uff09\u4e2d\u95f4\u6240\u589e\u52a0\u7684\u5de5\u4f5c\u7535\u538b\u52a0\u5feb\u800c\u8d1f\u7535\u5b50\u9776\u7684\u78c1\u63a7\u6e85\u5c04\u3002
\n2.2.7\u00a0\u70ed\u9634\u6781\u9ad8\u9891\u7387\u78c1\u63a7\u6e85\u5c04\uff08\u4e09\u6781\u578b\u78c1\u63a7\u6e85\u5c04\uff09hot cathode high frequency sputtering\uff1a\u51ed\u501f\u70ed\u9634\u6781\u548c\u9633\u6781\u6c27\u5316\u5f97\u5230\u975e\u817c\u8146\u6c7d\u4f53\u5145\u653e\u7535\uff0c\u6c7d\u4f53\u5145\u653e\u7535\u9020\u6210\u7684\u6b63\u79bb\u5b50\uff0c\u5728\u9776\u5916\u578b\u8d1f\u7535\u8377\u4f4d\u7684\u6548\u679c\u4e0b\u52a0\u5feb\u800c\u8d1f\u7535\u5b50\u9776\u7684\u78c1\u63a7\u6e85\u5c04\u3002
\n2.2.8\u7535\u5b50\u675f\u78c1\u63a7\u6e85\u5c04ion beam sputtering\uff1a\u884c\u9a76\u5c24\u5176\u7684\u79bb\u5b50\u6e90\u5f97\u5230\u7684\u7535\u5b50\u675f\u4f7f\u9776\u7684\u78c1\u63a7\u6e85\u5c04\u3002\u00a0
\n2.2.9\u7535\u5f27\u653e\u7535\u6e05\u7406glow discharge cleaning\uff1a\u884c\u9a76\u7535\u5f27\u653e\u7535\u57fa\u672c\u539f\u7406\uff0c\u4f7f\u7845\u7247\u53ca\u5176\u819c\u5c42\u5916\u578b\u627f\u53d7\u6c7d\u4f53\u5145\u653e\u7535\u8d1f\u7535\u5b50\u7684\u6e05\u7406\u5168\u8fc7\u7a0b\u3002
\n2.3\u7269\u7406\u5b66\u6c14\u76f8\u8272\u8c31\u5806\u79ef\uff1bPVD physical vapor deposition\uff1a\u5728\u771f\u7a7a\u6cf5\u60c5\u51b5\u4e0b\uff0c\u9540\u819c\u6750\u6599\u7ecf\u6325\u53d1\u6216\u78c1\u63a7\u6e85\u5c04\u7b49\u7269\u7406\u65b9\u6cd5\u6c7d\u5316\uff0c\u5806\u79ef\u5230\u7845\u7247\u4e0a\u7684\u4e00\u79cd\u5236\u5f97\u819c\u5c42\u7684\u65b9\u5f0f\u3002
\n2.4\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff1bCVD chemical vapor deposition\uff1a\u6beb\u65e0\u7591\u95ee\u6709\u673a\u5316\u5b66\u914d\u5236\u7684\u53cd\u6620\u6c7d\u4f53\uff0c\u5728\u7279\u6b8a\u6fc0\u8bdd\u6807\u51c6\u4e0b\uff08\u901a\u5e38\u662f\u6beb\u65e0\u7591\u95ee\u9ad8\u7684\u6eab\u5ea6\uff09\uff0c\u6839\u636e\u6c14\u76f8\u8272\u8c31\u5316\u5b66\u53d8\u5316\u8f6c\u5316\u6210\u65b0\u7684\u819c\u5c42\u539f\u6750\u6599\u5806\u79ef\u5230\u7845\u7247\u4e0a\u5236\u5f97\u819c\u5c42\u7684\u4e00\u79cd\u65b9\u5f0f\u3002
\n2.5\u78c1\u63a7\u6e85\u5c04magnetron sputtering\uff1a\u51ed\u501f\u9776\u5916\u578b\u4e0a\u4ea7\u751f\u7684\u6b63\u4ea4\u548c\u78c1\u573a\uff0c\u628a\u4e8c\u6b21\u7535\u5b50\u7ba1\u675f\u5728\u9776\u5916\u578b\u7279\u6b8a\u5730\u533a\uff0c\u6765\u52a0\u5f3a\u6c34\u89e3\u542c\u4ece\uff0c\u63d0\u9ad8\u6b63\u79bb\u5b50\u76f8\u5bf9\u5bc6\u5ea6\u548c\u52a8\u80fd\uff0c\u56e0\u6b64\u53ef\u5728\u4f4e\u538b\uff0c\u5927\u7535\u6d41\u91cf\u4e0b\u83b7\u5f97\u5f88\u9ad8\u78c1\u63a7\u6e85\u5c04\u901f\u5ea6\u3002
\n2.6\u00a0\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff1bPCVD plasma chemistry vapor deposition\uff1a\u6839\u636e\u5145\u653e\u7535\u9020\u6210\u7684\u7b49\u79bb\u5b50\u63a8\u52a8\u6c14\u76f8\u8272\u8c31\u5316\u5b66\u53d8\u5316\uff0c\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\uff0c\u5728\u7845\u7247\u4e0a\u5236\u5f97\u819c\u5c42\u7684\u4e00\u79cd\u65b9\u5f0f\u3002
\n2.7\u4e2d\u7a7a\u8d1f\u6781\u7b49\u79bb\u5b50\u55b7\u6d82HCD hollow cathode discharge deposition\uff1a \u884c\u9a76\u4e2d\u7a7a\u8d1f\u6781\u53d1\u9001\u5f88\u591a\u7684\u79bb\u5b50\u675f\uff0c\u4f7f\u94b3\u9505\u5185\u9540\u819c\u6750\u6599\u6325\u53d1\u5e76\u6c34\u89e3\uff0c\u5728\u7845\u7247\u4e0a\u7684\u8d1f\u504f\u538b\u529f\u6548\u4e0b\uff0c\u6b63\u79bb\u5b50\u5177\u5907\u8f83\u9ad8\u52a8\u80fd\uff0c\u5806\u79ef\u5728\u7845\u7247\u5916\u578b\u4e0a\u7684\u4e00\u79cd\u8868\u5c42\u7684\u9540\u819c\u65b9\u5f0f\u3002
\n2.8\u7535\u5b64\u7b49\u79bb\u5b50\u55b7\u6d82arc discharge deposition\uff1a\u4ee5\u9540\u819c\u6750\u6599\u505a\u4e3a\u9776\u6781\uff0c\u51ed\u501f\u5f00\u542f\u5b89\u88c5\uff0c\u4f7f\u9776\u5916\u578b\u9020\u6210\u7535\u5149\u5145\u653e\u7535\uff0c\u9540\u819c\u6750\u6599\u5728\u7535\u5b64\u529f\u6548\u4e0b\uff0c\u9020\u6210\u65e0\u7194\u5408\u6325\u53d1\u5e76\u5806\u79ef\u5728\u7845\u7247\u4e0a\u7684\u4e00\u79cd\u8868\u5c42\u7684\u9540\u819c\u65b9\u5f0f\u3002\n<\/p>\n<\/p>\n

\n\t3\u4e13\u7528\u578b\u6784\u4ef6\n<\/p>\n

\n\t3.1\u8868\u5c42\u7684\u9540\u819c\u5ba4coating chamber\uff1a\u771f\u7a7a\u9540\u819c\u8bbe\u5907\u4e2d\u6267\u884c\u5b9e\u9645\u8868\u5c42\u7684\u9540\u819c\u5168\u8fc7\u7a0b\u7684\u6784\u4ef6
\n3.2\u51b7\u51dd\u5668\u5b89\u88c5evaporator device\uff1a\u771f\u7a7a\u9540\u819c\u8bbe\u5907\u4e2d\u5305\u542b\u51b7\u51dd\u5668\u548c\u5982\u6570\u4e3a\u5176\u5de5\u4f5c\u4e2d\u6240\u6709\u5fc5\u8981\u7684\u5b89\u88c5(\u6bd4\u5982\u7535\u78c1\u80fd\u4f9b\u8d27\u3001\u9001\u6599\u548c\u5236\u51b7\u5b89\u88c5\u7b49)\u4ee5\u5185\u7684\u6784\u4ef6\u3002
\n3.3\u51b7\u51dd\u5668evaporator\uff1a\u6325\u53d1\u7acb\u5373\u5728\u5185\u90e8\u5f00\u5c55\u6325\u53d1\u7684\u5b89\u88c5,\u6bd4\u5982\u504f\u821f\u5f62\u51b7\u51dd\u5668,\u94b3\u9505,\u94a8\u4e1d,\u53d1\u70ed\u677f,\u7535\u70ed\u68d2,\u87ba\u65cb\u5f0f\u7535\u78c1\u7ebf\u5708\u8fd9\u4e9b,\u5fc5\u987b\u65f6\u8fd8\u5305\u542b\u6325\u53d1\u539f\u6750\u6599\u81ea\u8eab\u3002
\n3.4\u7acb\u5373\u52a0\u70ed\u578b\u51b7\u51dd\u5668evaporator by direct heat\uff1a\u6325\u53d1\u539f\u6750\u6599\u81ea\u8eab\u88ab\u52a0\u6e29\u7684\u51b7\u51dd\u5668\u3002
\n3.5\u95f4\u63a5\u6027\u52a0\u70ed\u578b\u51b7\u51dd\u5668evaporator by indirect heat\uff1a\u6325\u53d1\u539f\u6750\u6599\u6839\u636e\u5bfc\u70ed\u6216\u8f90\u5c04\u70ed\u88ab\u52a0\u6e29\u7684\u51b7\u51dd\u5668\u3002
\n3.6\u6325\u53d1\u573aevaporation field\uff1a\u7531\u591a\u4e2a\u6392\u5e8f\u7684\u51b7\u51dd\u5668\u52a0\u6e29\u7c7b\u540c\u6325\u53d1\u539f\u6750\u6599\u4ea7\u751f\u7684\u573a\u3002
\n3.7\u78c1\u63a7\u6e85\u5c04\u5b89\u88c5sputtering device\uff1a\u5305\u542b\u9776\u548c\u78c1\u63a7\u6e85\u5c04\u6240\u987b\u8981\u7684\u534f\u52a9\u5b89\u88c5(\u6bd4\u5982\u914d\u7535\u5b89\u88c5,\u6c7d\u4f53\u5bfc\u8fdb\u5b89\u88c5\u7b49)\u4ee5\u5185\u7684\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04\u673a\u5668\u8bbe\u5907\u7684\u6784\u4ef6\u3002
\n3.8\u9776target\uff1a\u7528\u9897\u7c92\u8d1f\u7535\u5b50\u7684\u9762\u3002\u672c\u89c4\u8303\u4e2d\u9776\u7684\u542b\u4e49\u4fbf\u662f\u78c1\u63a7\u6e85\u5c04\u5b89\u88c5\u4e2d\u7531\u78c1\u63a7\u6e85\u5c04\u539f\u6750\u6599\u6240\u6784\u6210\u7684\u7535\u7ea7\u3002
\n3.9\u9694\u677fshutter\uff1a\u7528\u4e8e\u5728\u6642\u95f4\u4e0a\u548c(\u6216)\u5ba4\u5185\u7a7a\u95f4\u4e0a\u9650\u5236\u8868\u5c42\u7684\u9540\u819c\u5e76\u501f\u6b64\u673a\u4f1a\u80fd\u505a\u5230\u6beb\u65e0\u7591\u95ee\u819c\u539a\u904d\u5e03\u7684\u5b89\u88c5\u3002\u9694\u677f\u53ef\u4ee5\u662f\u786e\u5b9a\u7684\u8fd8\u53ef\u4ee5\u662f\u5065\u8eab\u8fd0\u52a8\u7684\u3002\u00a0
\n3.10\u65f6\u63a7\u9694\u677ftiming shutter\uff1a\u5728\u6642\u95f4\u53ef\u4ee5\u7528\u4e8e\u9650\u5236\u8868\u5c42\u7684\u9540\u819c,\u56e0\u800c\u4ece\u8868\u5c42\u7684\u9540\u819c\u7684\u9010\u6e10\u3001\u7ec8\u6b62\u5230\u7ec8\u6b62\u90fd\u80fd\u6309\u89c4\u51c6\u65f6\u65f6\u523b\u523b\u5f00\u5c55\u7684\u5b89\u88c5\u3002
\n3.11\u63a9\u819cmask\uff1a\u7528\u4e8e\u7792\u62a5\u4e00\u90e8\u5206\u7845\u7247,\u5728\u5ba4\u5185\u7a7a\u95f4\u53ef\u4ee5\u9650\u5236\u8868\u5c42\u7684\u9540\u819c\u7684\u5b89\u88c5\u3002
\n3.12\u7845\u7247\u652f\u6491\u67b6substrate holder\uff1a\u53ef\u7acb\u5373\u5939\u7d27\u7845\u7247\u7684\u5b89\u88c5,\u6bd4\u5982\u5939\u7d27\u5b89\u88c5,\u67b6\u6784\u548c\u76f8\u8fd1\u7684\u5939\u7d27\u5668\u6750\u3002
\n3.13\u5939\u6301\u5b89\u88c5clamp\uff1a\u5728\u9540\u819c\u8bbe\u5907\u9009\u7528\u6216\u65e0\u9700\u7845\u7247\u652f\u6491\u67b6\u652f\u6491\u4e00\u4e2a\u7845\u7247\u6216\u597d\u591a\u4e2a\u7845\u7247\u7684\u5b89\u88c5,\u6bd4\u5982\u5939\u76d8,\u5939\u9f13,\u7403\u578b\u5939\u7f69,\u5939\u7bee\u7b49\u3002\u5939\u6301\u5b89\u88c5\u53ef\u4ee5\u662f\u786e\u5b9a\u7684\u6216\u5065\u8eab\u8fd0\u52a8\u7684(\u8f6c\u52a8\u67b6,\u884c\u661f\u9f7f\u8f6e\u7cfb\u7b49)\u3002
\n3.14\u6362\u76f8\u5b89\u88c5reversing device\uff1a\u5728\u771f\u7a7a\u9540\u819c\u8bbe\u5907\u4e2d,\u4e0d\u5f00\u542f\u673a\u5668\u8bbe\u5907\u80fd\u5c06\u7845\u7247\u3001\u5b9e\u9a8c\u5939\u5c42\u73bb\u7483\u6216\u63a9\u819c\u653e\u8fdb\u7406\u60f3\u5316\u90e8\u4f4d\u4e0a\u7684\u5b89\u88c5(\u7845\u7247\u7535\u673a\u6362\u5411\u5668,\u5b9e\u9a8c\u5939\u5c42\u73bb\u7483\u7535\u673a\u6362\u5411\u5668,\u63a9\u819c\u7535\u673a\u6362\u5411\u5668)\u3002
\n3.15\u7845\u7247\u52a0\u6e29\u5b89\u88c5substrate heating device\uff1a\u5728\u771f\u7a7a\u9540\u819c\u8bbe\u5907\u4e2d,\u6839\u636e\u52a0\u6e29\u80fd\u4f7f\u4e00\u4e2a\u7845\u7247\u6216\u597d\u591a\u4e2a\u7845\u7247\u505a\u5230\u7406\u60f3\u5316\u6eab\u5ea6\u7684\u5b89\u88c5\u3002
\n3.16\u7845\u7247\u5236\u51b7\u5b89\u88c5substrate colding device\uff1a\u5728\u771f\u7a7a\u9540\u819c\u8bbe\u5907\u4e2d,\u6839\u636e\u5236\u51b7\u80fd\u4f7f\u4e00\u4e2a\u7845\u7247\u6216\u597d\u591a\u4e2a\u7845\u7247\u505a\u5230\u7406\u60f3\u5316\u6eab\u5ea6\u7684\u5b89\u88c5\u3002\n<\/p>\n<\/p>\n

\n\t4\u771f\u7a7a\u9540\u819c\u8bbe\u5907\n<\/p>\n

\n\t4.1\u771f\u7a7a\u9540\u819c\u8bbe\u5907vacuum coating plant\uff1a\u5728\u771f\u7a7a\u6cf5\u60c5\u51b5\u4e0b\u5236\u5f97\u819c\u5c42\u7684\u673a\u5668\u8bbe\u5907\u3002
\n4.1.1\u771f\u7a7a\u84b8\u53d1\u9540\u819c\u8bbe\u5907vacuum evaporation coating plant\uff1a\u51ed\u501f\u6325\u53d1\u5f00\u5c55\u771f\u7a7a\u9540\u819c\u673a\u7684\u673a\u5668\u8bbe\u5907\u3002
\n4.1.2\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u8bbe\u5907vacuum sputtering coating plant\uff1a\u51ed\u501f\u771f\u7a7a\u6cf5\u78c1\u63a7\u6e85\u5c04\u5f00\u5c55\u771f\u7a7a\u9540\u819c\u673a\u7684\u673a\u5668\u8bbe\u5907\u3002
\n4.2\u6301\u7eed\u9540\u819c\u8bbe\u5907continuous coating plant\uff1a\u88ab\u8868\u5c42\u7684\u9540\u819c\u4e1c\u897f\uff08\u6563\u4ef6\u6216\u975e\u6676\u5e26\u6750\uff09\u6301\u7eed\u5730\u4ece\u5927\u6c14\u538b\u529b\u901a\u8fc7\u5de5\u4f5c\u538b\u529b\u68af\u6bb5\u8fdb\u5230\u5230\u4e00\u4e2a\u6216\u591a\u4e2a\u8868\u5c42\u7684\u9540\u819c\u5ba4\uff0c\u518d\u901a\u8fc7\u56de\u5e94\u7684\u5de5\u4f5c\u538b\u529b\u68af\u6bb5\uff0c\u627f\u7ee7\u6446\u8131\u673a\u5668\u8bbe\u5907\u7684\u6301\u7eed\u5f0f\u9540\u819c\u8bbe\u5907\u3002
\n4.3\u534a\u6301\u7eed\u9540\u819c\u8bbe\u5907semi- continuous coating plant\uff1a\u88ab\u9540\u4e1c\u897f\u6839\u636e\u6c34\u5229\u95f8\u95e8\u9001\u8fdb\u8868\u5c42\u7684\u9540\u819c\u5ba4\u5e76\u4ece\u8868\u5c42\u7684\u9540\u819c\u5ba4\u53d6\u51fa\u7684\u771f\u7a7a\u9540\u819c\u8bbe\u5907\u3002\n<\/p>\n

\n\t\t\u7eb3\u7c73\u9632\u6c34\u7f51\uff1a\/\n\t<\/p>\n

\u5927\u91cf\u7eb3\u7c73\u9632\u6c34\u65b0\u95fb\u8d44\u8baf\u8bf7\u5173\u5fc3\u7eb3\u7c73\u9632\u6c34\u5fae\u4fe1\u53f7\u7801: nanowp\n<\/p>\n

\n\t<\/p>\n

<\/p>\n

 <\/p>\n

\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

1\u4e00\u822c\u672f\u8bed1.1\u771f\u7a7a\u9540\u819cvacuum coating\uff1a\u5728\u5904\u4e8e\u771f\u7a7a\u4e0b\u7684\u57fa\u7247\u4e0a\u5236\u53d6\u819c\u5c42\u7684\u4e00\u79cd\u65b9\u6cd5\u30021.2\u57fa\u7247substrate\uff1a\u819c\u5c42\u627f\u53d7\u4f53\u30021.3\u8bd5\u9a8c\u57fa\u7247testing substrate\uff1a\u5728\u9540\u819c\u5f00\u59cb\u3001\u9540\u819c\u8fc7\u7a0b\u4e2d\u6216\u9540\u819c\u7ed3\u675f\u540e\u7528\u4f5c\u6d4b\u91cf\u548c\uff08\u6216\uff09\u8bd5\u9a8c\u7684\u57fa\u7247\u30021.4\u9540\u819c\u6750\u6599coating material\uff1a\u7528\u6765\u5236\u53d6\u819c\u5c42\u7684\u539f\u6750\u6599\u30021.5\u84b8\u53d1\u6750\u6599evaporation material\uff1a\u5728\u771f\u7a7a\u84b8\u53d1\u4e2d\u7528\u6765\u84b8\u53d1\u7684\u9540\u819c\u6750\u6599\u30021.6\u6e85\u5c04\u6750\u6599sputtering 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