{"id":19424,"date":"2022-01-22T10:10:35","date_gmt":"2022-01-22T02:10:35","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=19424"},"modified":"2022-01-15T14:18:35","modified_gmt":"2022-01-15T06:18:35","slug":"pecvd-%e7%9a%84%e5%8e%9f%e7%90%86%e4%b8%8e%e6%95%85%e9%9a%9c%e5%88%86%e6%9e%90","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=19424","title":{"rendered":"PECVD \u7684\u539f\u7406\u4e0e\u6545\u969c\u5206\u6790"},"content":{"rendered":"

1PECVD\u7684\u7c7b\u578b<\/p>\n

 <\/p>\n

1.1\u5fae\u6ce2\u5c04\u9891\u52a0\u5f3a\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\uff08RF-PECVD\uff09<\/p>\n

\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\u662f\u5728\u4f4e\u7535\u538b\u7535\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\u7684\u4e0e\u6b64\u540c\u65f6\uff0c\u884c\u9a76\u7535\u5f27\u653e\u7535\u4f4e\u6e29\u7b49\u79bb\u5b50\u5bf9\u5168\u8fc7\u7a0b\u73af\u5883\u8981\u7d20\uff0c\u5728\u886c\u5e95\u4e0a\u5236\u53d6\u51fa\u591a\u6676\u4f53\u5851\u6599\u8584\u819c\u3002\u8fd9\u7c7b\u65b9\u5f0f \u662f\u65e5\u5927\u5b66\u672c\u79d1\u5c3c\u5361\u4f01\u4e1a\u57281994\u5e74\u660e\u786e\u63d0\u51fa\u7684\uff0c\u5176\u7b49\u79bb\u5b50\u7684\u9020\u6210\u65b9\u5f0f\u591a\u9009\u7528\u5fae\u6ce2\u5c04\u9891\u6cd5\uff0c\u6545\u79f0\u4e4b\u4e3aRF-PECVD\u3002\u5176\u5fae\u6ce2\u5c04\u9891\u9759\u7535\u573a\u9009\u7528\u4e8c\u79cd\u4e0d\u4e00\u6837\u7684\u85d5\u5408\u65b9\u6cd5\uff0c\u5373\u7535\u611f\u8026\u5408\u548c\u7535\u5bb9\u8026\u5408[1]\u3002<\/p>\n

1.2VHF\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\uff08VHF-PECVD\uff09<\/p>\n

\u9009\u7528RF-PECVD\u6280\u672f\u6027\u5236\u53d6\u819c\u65f6\uff0c\u4e3a\u4e86\u66f4\u597d\u5730\u5b8c\u6210\u8d85\u4f4e\u6e29\u6dc0\u79ef\uff0c\u52a1\u5fc5\u5e94\u7528\u7a00\u91ca\u6db2\u7684\u6c2f\u7845\u70f7\u505a\u4e3a\u53cd\u6620\u6c7d\u4f53\uff0c\u56e0\u800c\u6dc0\u79ef\u901f\u7387\u6bd4\u8f83\u6709\u9650\u3002VHF-PECVD\u6280\u672f\u6027\u7531\u4e8eVHF\u6fc0\u8d77\u7684\u7b49\u79bb\u5b50\u6bd4\u57fa\u672c\u7684\u5fae\u6ce2\u5c04\u9891\u9020\u6210\u7684\u7b49\u79bb\u5b50\u7535\u5b50\u5668\u4ef6\u6eab\u5ea6\u66f4\u4f4e\u3001\u76f8\u5bf9\u5bc6\u5ea6\u66f4\u9ad8[2]\uff0c\u56e0\u6b64\u53ef\u4ee5\u5927\u5e45\u53d1\u5c55\u5851\u6599\u8584\u819c\u7684\u6dc0\u79ef\u901f\u5ea6\uff0c\u5728\u5b9e\u9645\u8fd0\u7528\u4e2d\u5f97\u5230\u4e86\u66f4\u666e\u904d\u7684\u8fd0\u7528\u3002<\/p>\n

1.3\u7269\u8d28\u5c42\u963b\u62e6\u5145\u653e\u7535\u52a0\u5f3a\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\uff08DBD-PECVD\uff09<\/p>\n

DBD-PECVD\u662f\u6709\u7edd\u7f18\u5c42\u7269\u8d28\u63d2\u8fdb\u5145\u653e\u7535\u5ba4\u5185\u7a7a\u95f4\u7684\u4e00\u79cd\u975e\u5e73\u8861\u6001\u6c7d\u4f53\u5145\u653e\u7535\uff08\u53c8\u88ab\u79f0\u4e3a\u7269\u8d28\u963b\u62e6\u7535\u5f27\u653e\u7535\u6216\u65e0\u97f3\u5145\u653e\u7535\uff09\u3002\u8fd9\u7c7b\u5145\u653e\u7535\u65b9\u6cd5\u517c\u5177\u7535\u5f27\u653e\u7535\u7684\u5927\u5bb9\u91cf\u5300\u79f0\u5145\u653e\u7535\u548c\u7535\u5f27\u653e\u7535\u7684\u9ad8\u6c14\u538b\u8fd0\u4f5c\u7279\u6027\uff0c\u6b63\u9010\u6e10\u7528\u4ee5\u5236\u53d6\u7845\u5851\u6599\u8584\u819c\u4e2d[3]\u3002<\/p>\n

1.4\u5fae\u6ce2\u52a0\u70ed\u7535\u5b50\u5668\u4ef6\u56de\u8f6c\u5171\u9707\u7b49\u79bb\u5b50\u52a0\u5f3a\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\uff08MWECR-PECVD\uff09<\/p>\n

MWECR-PECVD\u662f\u884c\u9a76\u7535\u5b50\u5668\u4ef6\u5728\u5fae\u6ce2\u52a0\u70ed\u548c\u7535\u78c1\u573a\u4e2d\u7684\u56de\u8f6c\u5171\u632f\u6548\u5e94\uff0c\u5728\u771f\u7a7a\u6cf5\u6807\u51c6\u4e0b\u4ea7\u751f\u57fa\u9176\u548c\u5bc6\u5ea6\u9ad8\u7684\u7684\u7b49\u79bb\u5b50\u5f00\u5c55\u6c14\u76f8\u8272\u8c31\u5316\u5b66\u53d8\u5316\u3002\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u4ea7\u751f\u9ad8\u54c1\u8d28\u5851\u6599\u8584\u819c\u7684\u6280\u672f\u6027\u3002\u8fd9\u7c7b\u529e\u6cd5\u7684\u7b49\u79bb\u5b50\u662f\u7531\u65e0\u7ebf\u7535\u6ce2\u6fc0\u8d77\u800c\u9020\u6210\uff0c\u5176\u5e38\u89c1\u5de5\u4f5c\u9891\u7387\u4e3a2450MHz\uff0c\u6839\u636e\u66f4\u6539\u65e0\u7ebf\u7535\u6ce2\u5149\u5b50\u80fd\u91cf\u53ef\u968f\u65f6\u66f4\u6539\u4f7f\u6c7d\u4f53\u8f6c\u5316\u6210\u9897\u7c92\u7684\u52a8\u80fd\u548c\u5b58\u6d3b\u4f7f\u7528\u5bff\u547d\uff0c\u8fdb\u800c\u5bf9\u5851\u6599\u8584\u819c\u7684\u8f6c\u5316\u6210\u548c\u819c\u5916\u578b\u7684\u89e3\u51b3\u4f53\u5236\u9020\u6210\u5de8\u5927\u5371\u5bb3\uff0c\u5e76\u4ece\u6e90\u5934\u4e0a\u51b3\u7b56\u8f6c\u5316\u6210\u819c\u7684\u6784\u9020\u3001\u7279\u70b9\u548c\u7262\u56fa\u6027[4]\u3002<\/p>\n

 <\/p>\n

2PECVD\u673a\u5668\u8bbe\u5907\u7684\u4e3b\u8981\u6784\u9020<\/p>\n

 <\/p>\n

2.1PECVD\u52a0\u5de5\u5de5\u827a\u7684\u57fa\u672c\u6982\u5ff5<\/p>\n

PECVD\u6280\u672f\u6027\u662f\u5728\u6c14\u538b\u4f4e\u4e0b\uff0c\u884c\u9a76\u4f4e\u6e29\u7b49\u79bb\u5b50\u4f53\u5728\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u7684\u8d1f\u6781\u4e0a\uff08\u5373\u8bd5\u54c1\u4fdd\u5b58\u7684\u62d6\u76d8\uff09\u9020\u6210\u7535\u5f27\u653e\u7535\uff0c\u884c\u9a76\u7535\u5f27\u653e\u7535\uff08\u6216\u591a\u52a0\u53d1\u70ed\u5668\uff09\u4f7f\u8bd5\u54c1\u63d0\u6e29\u5230\u9884\u671f\u7684\u6eab\u5ea6\uff0c\u968f\u540e\u8fdb\u5165\u5c11\u91cf\u7684\u52a0\u5de5\u5de5\u827a\u6c7d\u4f53\uff0c\u8fd9\u79cd\u6c7d\u4f53\u7ecf\u4e00\u7cfb\u5217\u5316\u5b66\u53d8\u5316\u548c\u7b49\u79bb\u5b50\u53cd\u6620\uff0c\u6700\u540e\u5728\u8bd5\u54c1\u5916\u578b\u4ea7\u751f\u56fa\u4f53\u5851\u6599\u8584\u819c\u3002\u5176\u52a0\u5de5\u5de5\u827a\u57fa\u672c\u539f\u7406\u5e73\u9762\u56fe\u5982\u4e0b\u56fe1\u6240\u663e\u793a\u3002<\/p>\n

\"\"
\n\u5728\u53cd\u6620\u5168\u8fc7\u7a0b\u4e2d\uff0c\u53cd\u6620\u6c7d\u4f53\u4ece\u8fdb\u6c14\u7ba1\u8fdb\u5230\u7089\u8154\uff0c\u9010\u6e10\u8513\u5ef6\u81f3\u8bd5\u54c1\u5916\u578b\uff0c\u5728\u5fae\u6ce2\u5c04\u9891\u6e90\u6fc0\u8d77\u7684\u9759\u7535\u573a\u529f\u6548\u4e0b\uff0c\u53cd\u6620\u6c7d\u4f53\u8f6c\u5316\u6210\u7535\u5b50\u5668\u4ef6\u3001\u6b63\u79bb\u5b50\u548c\u6d3b\u529b\u5b98\u80fd\u56e2\u7b49\u3002\u8fd9\u79cd\u6eb6\u89e3\u7269\u4ea7\u751f\u5316\u5b66\u53d8\u5316\uff0c\u8f6c\u5316\u6210\u4ea7\u751f\u819c\u7684\u539f\u59cb\u6210\u4efd\u548c\u526f\u751f\u6210\u7269\uff0c\u8fd9\u79cd\u53cd\u5e94\u7269\u4ee5\u79bb\u5b50\u952e\u7684\u5f62\u52bf\u5438\u5490\u5230\u8bd5\u54c1\u5916\u578b\uff0c\u8f6c\u5316\u6210\u56fa\u4f53\u819c\u7684\u80fd\u91cf\u6e90\uff0c\u80fd\u91cf\u6e90\u9010\u6e10\u751f\u957f\u53d1\u80b2\u6210\u5c9b\u72b6\u7269\u8d28\uff0c\u5c9b\u72b6\u7269\u8d28\u627f\u7ee7\u751f\u957f\u53d1\u80b2\u6210\u6301\u7eed\u7684\u5851\u6599\u8584\u819c\u3002\u5728\u5851\u6599\u8584\u819c\u751f\u957f\u53d1\u80b2\u5168\u8fc7\u7a0b\u4e2d\uff0c\u5404\u79cd\u5404\u6837\u526f\u4ea7\u54c1\u4ece\u819c\u7684\u5916\u578b\u9010\u6e10\u79bb\u53bb\uff0c\u5728\u8fdb\u53e3\u771f\u7a7a\u6cf5\u7684\u6548\u679c\u4e0b\u4ece\u51fa\u5165\u53e3\u6392\u51fa\u6765\u3002<\/p>\n

2.2PECVD\u673a\u5668\u8bbe\u5907\u7684\u4e3b\u8981\u6784\u9020<\/p>\n

PECVD\u673a\u5668\u8bbe\u5907\u5173\u952e\u7531\u771f\u7a7a\u6cf5\u548c\u5de5\u4f5c\u538b\u529b\u64cd\u7eb5\u7ba1\u7406\u4f53\u7cfb\u3001\u6dc0\u79ef\u7ba1\u7406\u4f53\u7cfb\u3001\u6c7d\u4f53\u53ca\u6d41\u91cf\u76d1\u63a7\u3001\u7ba1\u7406\u4f53\u7cfb\u5b89\u5168\u6027\u73cd\u60dc\u7ba1\u7406\u4f53\u7cfb\u3001\u8ba1\u7b97\u673a\u7cfb\u7edf\u63a7\u5236\u7b49\u90e8\u4efd\u6784\u6210\u3002\u5176\u673a\u5668\u8bbe\u5907\u6784\u9020\u6846\u67b6\u56fe\u5982\u4e0b\u56fe2\u6240\u663e\u793a\u3002<\/p>\n

\"\"<\/p>\n

2.2.1\u771f\u7a7a\u6cf5\u548c\u5de5\u4f5c\u538b\u529b\u64cd\u7eb5\u7ba1\u7406\u4f53\u7cfb<\/p>\n

\u771f\u7a7a\u6cf5\u548c\u5de5\u4f5c\u538b\u529b\u64cd\u7eb5\u7ba1\u7406\u4f53\u7cfb\u5305\u542b\u771f\u7a7a\u6cf5\u3001\u5206\u5b50\u6cf5\u3001\u7c97\u62bd\u9600\u3001\u524d\u9762\u9600\u3001\u63d2\u677f\u9600\u3001\u771f\u7a7a\u8ba1\u7b49\u3002\u4e3a\u4e86\u66f4\u597d\u5730\u51cf\u5c11N2\u3001o2\u53ca\u5176\u6c34\u84b8\u6c7d\u5bf9\u6dc0\u79ef\u52a0\u5de5\u5de5\u827a\u7684\u5371\u5bb3\uff0c\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u4e00\u6837\u5e73\u65f6\u9009\u7528\u5e72\u6cf5\u548c\u5206\u5b50\u6cf5\u5f00\u5c55\u62bd\u771f\u7a7a\uff0c\u5e72\u6cf5\u7528\u4ee5\u62bd\u4f4e\u771f\u7a7a\u6cf5\uff0c\u4e0e\u5e38\u89c1\u7684\u673a\u68b0\u8bbe\u5907\u6c7d\u6cb9\u6cf5\u5bf9\u6bd4\uff0c\u53ef\u4ee5\u9632\u6b62\u6c7d\u6cb9\u6cf5\u4e2d\u7684\u71c3\u6c14\u8fdb\u5230\u771f\u7a7a\u7cfb\u7edf\u73af\u5883\u6c61\u67d3\u7845\u7247\u3002\u5728\u5e72\u6cf5\u62bd\u4e2d\u6beb\u65e0\u7591\u95ee\u5de5\u4f5c\u538b\u529b\u4e0b\u5217\u540e\uff0c\u5f00\u542f\u63d2\u677f\u9600\uff0c\u7528\u5206\u5b50\u6cf5\u62bd\u9ad8\u771f\u7a7a\u6cf5\u3002\u5206\u5b50\u6cf5\u7684\u7279\u5f81\u662f\u62bd\u672c\u8eab\u771f\u7a7a\u6cf5\u5de5\u4f5c\u80fd\u529b\u5f3a\uff0c\u5c24\u5176\u662f\u9664\u6c34\u84b8\u6c14\u7684\u5de5\u4f5c\u80fd\u529b\u5c24\u5176\u5f88\u662f\u5f3a\u3002<\/p>\n

2.2.2\u6dc0\u79ef\u7ba1\u7406\u4f53\u7cfb<\/p>\n

\u6dc0\u79ef\u7ba1\u7406\u4f53\u7cfb\u7531\u5c04\u9891\u7535\u6e90\u3001\u6c34\u51b7\u6563\u70ed\u7ba1\u7406\u4f53\u7cfb\u3001\u7845\u7247\u52a0\u6e29\u5b89\u88c5\u7b49\u6784\u6210\u3002\u5b83\u662fPECVD\u7684\u5173\u952e\u4e00\u90e8\u5206\u3002\u5c04\u9891\u7535\u6e90\u7684\u529f\u6548\u662f\u4f7f\u53cd\u6620\u6c7d\u4f53\u79bb\u5b50\u5316\u3002\u6c34\u51b7\u6563\u70ed\u7ba1\u7406\u4f53\u7cfb\u5173\u952e\u4e3aPECVD\u7ba1\u7406\u4f53\u7cfb\u7684\u771f\u7a7a\u6cf5\u3001\u7f57\u8328\u771f\u7a7a\u6cf5\u3001\u5e72\u6cf5\u3001\u5206\u5b50\u6cf5\u7b49\u7ed9\u4e88\u5236\u51b7\uff0c\u5f53\u6e29\u5ea6\u8d85\u51fa\u6cf5\u58f3\u89c4\u5b9a\u7684\u6c14\u6e29\u65f6\uff0c\u5b83\u4f1a\u53d1\u51fa\u58f0\u54cd\u9526\u65d7\u53f7\u706f\u3002\u51b7\u5374\u5faa\u73af\u6c34\u7684\u7ba1\u9053\u9009\u7528\u5851\u6599\u8f6f\u7ba1\u7b49\u7edd\u7f18\u5c42\u6750\u6599\uff0c\u4e0d\u80fd\u7528\u91d1\u5c5e\u8f6f\u7ba1\u3002\u7845\u7247\u52a0\u6e29\u5b89\u88c5\u7684\u529f\u6548\u4f7f\u8bd5\u54c1\u63d0\u6e29\u5230\u52a0\u5de5\u5de5\u827a\u89c4\u5b9a\u6eab\u5ea6\uff0c\u795b\u9664\u8bd5\u54c1\u4e0a\u7684\u6c34\u84b8\u6c7d\u7b49\u6b8b\u6e23\uff0c\u4ee5\u53d1\u5c55\u5851\u6599\u8584\u819c\u4e0e\u8bd5\u54c1\u7684\u7c98\u5408\u529b\u3002<\/p>\n

2.2.3\u6c7d\u4f53\u53ca\u6d41\u91cf\u76d1\u63a7\u7ba1\u7406\u4f53\u7cfb<\/p>\n

PECVD\u7ba1\u7406\u4f53\u7cfb\u7684\u6c14\u52a8\u9600\u95e8\u51e0\u4e4e\u662f\u7531\u6c7d\u4f53\u6c14\u74f6\u6c14\u8def\uff0c\u8fd9\u79cd\u6c14\u74f6\u88ab\u7f6e\u653e\u5728\u6709\u5f88\u591a\u5b89\u5168\u6027\u73cd\u60dc\u5b89\u88c5\u7684\u6c14\u67dc\u4e2d\uff0c\u6839\u636e\u6c14\u67dc\u4e0a\u7684\u64cd\u4f5c\u9762\u677f\u3001\u7ba1\u8def\u4f20\u81f3PECVD\u7684\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u4e2d\u3002<\/p>\n

\u5728\u6dc0\u79ef\u65f6\uff0c\u53cd\u6620\u6df7\u5408\u6c14\u4f53\u7684\u662f\u591a\u5c11\u4f1a\u5371\u5bb3\u6dc0\u79ef\u7684\u901f\u5ea6\u4ee5\u53ca\u5747\u8861\u6027\u7b49\uff0c\u56e0\u800c\u5fc5\u9700\u4e25\u82db\u64cd\u7eb5\u6c14\u4f53\u538b\u529b\uff0c\u901a\u5e38\u9009\u7528\u6d41\u91cf\u8ba1\u6765\u5b8c\u6210\u6070\u5f53\u64cd\u7eb5\u3002<\/p>\n

 <\/p>\n

3\u666e\u904d\u9898\u578b\u53ca\u5371\u5bb3\u52a0\u5de5\u5de5\u827a\u5173\u952e\u8981\u7d20<\/p>\n

 <\/p>\n

3.1\u673a\u5668\u8bbe\u5907\u666e\u904d\u9898\u578b\u53ca\u89e3\u51b3\u5bf9\u7b56<\/p>\n

3.1.1\u6ca1\u6cd5\u8d77\u8f89<\/p>\n

\u6ca1\u6cd5\u8d77\u8f89\u539f\u56e0\u7f18\u7531\u548c\u89e3\u51b3\u5bf9\u7b56\uff1a<\/p>\n

\uff081\uff09\u5c04\u9891\u7535\u6e90\u5e38\u89c1\u6545\u969c\uff0c\u67e5\u9a8c\u5fae\u6ce2\u5c04\u9891\u6e90\u7535\u6e90\u989d\u5b9a\u529f\u7387\u5bfc\u51fa\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

\uff082\uff09\u53cd\u6620\u6c7d\u4f53\u8fdb\u4f9b\u6c14\u91cf\u5c0f\uff0c\u67e5\u9a8c\u6c7d\u4f53\u6d41\u91cf\u8ba1\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\uff0c\u82e5\u4e00\u5207\u6b63\u5e38\uff0c\u5219\u589e\u52a0\u8fdb\u4f9b\u6c14\u91cf\u5f00\u5c55\u5b9e\u9a8c\u3002<\/p>\n

\uff083\uff09\u7bb1\u4f53\u6781\u7247\u6d01\u51c0\u5ea6\u4e0d\u8db3\uff0c\u7528\u4e07\u7528\u8868\u6d4b\u91cf\u7bb1\u4f53\u5de6\u53f3\u6781\u7247\u7684\u5bf9\u5730\u7535\u963b\u5668\uff0c\u6807\u51c6\u503c\u5e94\u5728\u6570\u5341\u5146\u6b27\u4ee5\u4e0a\uff0c\u82e5\u5341\u5206\uff0c\u5219\u6e05\u7406\u7bb1\u4f53\u6781\u7247\u3002<\/p>\n

\uff084\uff09\u5fae\u6ce2\u5c04\u9891\u914d\u5bf9\u7535\u8def\u6545\u969c\uff0c\u67e5\u9a8c\u5fae\u6ce2\u5c04\u9891\u6e90\u53cd\u5c04\u9762\u8f93\u51fa\u529f\u7387\u662f\u4e0d\u662f\u5728\u6807\u51c6\u503c\u8303\u7574\u5185\uff0c\u82e5\u5341\u5206\uff0c\u5219\u67e5\u9a8c\u914d\u5bf9\u7535\u6e90\u7535\u8def\u4e2d\u7684\u7535\u5bb9\u5668\u548c\u7535\u611f\u5668\u662f\u4e0d\u662f\u6bc1\u574f\u3002<\/p>\n

\uff085\uff09\u771f\u7a7a\u503c\u5f88\u5dee\uff0c\u67e5\u9a8c\u7bb1\u4f53\u771f\u7a7a\u503c\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

3.1.2\u8f89\u5149\u4e0d\u7a33<\/p>\n

\uff081\uff09\u5f00\u5173\u7535\u6e90\u7535\u6d41\u91cf\u4e0d\u7a33\uff0c\u7cbe\u786e\u6d4b\u91cf\u5f00\u5173\u7535\u6e90\u914d\u7535\u662f\u4e0d\u662f\u7262\u56fa\u3002<\/p>\n

\uff082\uff09\u771f\u7a7a\u7cfb\u7edf\u5de5\u4f5c\u538b\u529b\u4e0d\u7262\u56fa\uff0c\u67e5\u9a8c\u7bb1\u4f53\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u6f0f\u7387\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\uff0c\u67e5\u9a8c\u7bb1\u4f53\u8fdb\u4f9b\u6c14\u91cf\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

\uff083\uff09\u7535\u7f06\u6545\u969c\u6d4b\u8bd5\uff0c\u67e5\u9a8c\u7535\u7f06\u7ebf\u89e6\u78b0\u662f\u4e0d\u662f\u51fa\u8272\u3002<\/p>\n

3.1.3\u6d82\u819c\u54c1\u8d28\u5dee<\/p>\n

\uff081\uff09\u6837\u7167\u5916\u578b\u6d01\u51c0\u5ea6\u5dee\uff0c\u67e5\u9a8c\u8bd5\u54c1\u5916\u578b\u662f\u4e0d\u662f\u6e05\u7406\u3002<\/p>\n

\uff082\uff09\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u6d01\u51c0\u5ea6\u5dee\uff0c\u6e05\u7406\u52a0\u5de5\u5de5\u827a\u7bb1\u4f53\u3002<\/p>\n

\uff083\uff09\u8bd5\u54c1\u6eab\u5ea6\u5341\u5206\uff0c\u67e5\u9a8c\u6e29\u5ea6\u63a7\u5236\u7ba1\u7406\u4f53\u7cfb\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\uff0c\u6821\u6b63\u6e29\u5ea6\u6d4b\u91cf\u70ed\u7535\u963b\u3002<\/p>\n

\uff084\uff09\u819c\u6dc0\u79ef\u5168\u8fc7\u7a0b\u4e2d\u5de5\u4f5c\u538b\u529b\u5341\u5206\uff0c\u67e5\u9a8c\u7bb1\u4f53\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u6f0f\u7387\u3002<\/p>\n

\uff085\uff09\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387\u8bbe\u5b9a\u4e0d\u79d1\u5b66\uff0c\u67e5\u9a8c\u5c04\u9891\u7535\u6e90\uff0c\u8c03\u8282\u8bbe\u5b9a\u8f93\u51fa\u529f\u7387\u3002<\/p>\n

3.1.4\u6dc0\u79ef\u901f\u5ea6\u4f4e<\/p>\n

\uff081\uff09\u5fae\u6ce2\u5c04\u9891\u8f93\u5165\u529f\u7387\u4e0d\u9002\u5408\uff0c\u8c03\u8282\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387\u3002<\/p>\n

\uff082\uff09\u8bd5\u54c1\u6eab\u5ea6\u5341\u5206\uff0c\u67e5\u9a8c\u5236\u51b7\u51fa\u6c34\u91cf\u53ca\u6eab\u5ea6\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

\uff083\uff09\u771f\u7a7a\u6cf5\u7bb1\u4f53\u5de5\u4f5c\u538b\u529b\u4f4e\uff0c\u8c03\u8282\u52a0\u5de5\u5de5\u827a\u6c14\u4f53\u538b\u529b\u3002<\/p>\n

3.1.5\u53cd\u6620\u7bb1\u4f53\u5de5\u4f5c\u538b\u529b\u4e0d\u7262\u56fa<\/p>\n

\uff081\uff09\u68c0\u67e5\u8bbe\u5907\u771f\u7a7a\u6cf5\u7ba1\u7406\u4f53\u7cfb\u7684\u7ba1\u4ef6\u662f\u4e0d\u662f\u6709\u88c2\u75d5\u3002<\/p>\n

\uff082\uff09\u67e5\u9a8c\u6d41\u91cf\u8ba1\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

\uff083\uff09\u624b\u52a8\u5f0f\u67e5\u9a8c\u789f\u9600\u7535\u6e90\u5f00\u5173\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

\uff084\uff09\u673a\u68b0\u6cf5\u5341\u5206\uff0c\u7528\u771f\u7a7a\u8ba1\u7cbe\u786e\u6d4b\u91cf\u673a\u68b0\u6cf5\u7684\u62bd\u901f\u662f\u4e0d\u662f\u4e00\u5207\u6b63\u5e38\u3002<\/p>\n

3.2\u5371\u5bb3\u52a0\u5de5\u5de5\u827a\u7684\u8981\u7d20<\/p>\n

\u5371\u5bb3PECVD\u52a0\u5de5\u5de5\u827a\u54c1\u8d28\u7684\u8981\u7d20\u5173\u952e\u6709\u4e0b\u9762\u4e00\u4e9b\u5c42\u9762\uff1a<\/p>\n

3.2.1\u6781\u7247\u95f4\u9694\u548c\u53cd\u6620\u5ba4\u89c4\u683c<\/p>\n

PECVD\u7bb1\u4f53\u6781\u7247\u95f4\u9694\u7684\u9009\u5f15\u8a00\u8003\u8651\u5230\u4fe9\u4e2a\u8981\u7d20\uff1a<\/p>\n

\uff081\uff09\u8d77\u8f89\u5de5\u4f5c\u7535\u538b\uff1a\u95f4\u9694\u7684\u9009\u7528\u5e94\u4f7f\u8d77\u8f89\u5de5\u4f5c\u7535\u538b\u5c3d\u53ef\u80fd\u4f4e\uff0c\u4ee5\u51cf\u5c11\u4f4e\u6e29\u7b49\u79bb\u5b50\u7535\u4f4d\u5dee\uff0c\u51cf\u5c11\u5bf9\u886c\u5e95\u7684\u635f\u5bb3\u3002<\/p>\n

\uff082\uff09\u6781\u7247\u95f4\u9694\u548c\u7bb1\u4f53\u6807\u51c6\u6c14\u538b\uff1a\u6781\u7247\u95f4\u9694\u6bd4\u8f83\u5927\u65f6\uff0c\u5bf9\u886c\u5e95\u7684\u635f\u5bb3\u8f83\u5c0f\uff0c\u4f46\u95f4\u9694\u4e0d\u9002\u5408\u8fc7\u5927\uff0c\u4e0d\u7136\u4f1a\u52a0\u5267\u9759\u7535\u573a\u7684\u8fb9\u7f18\u6548\u5e94\uff0c\u5371\u5bb3\u6dc0\u79ef\u7684\u5300\u79f0\u6027\u3002\u53cd\u6620\u7bb1\u4f53\u7684\u89c4\u683c\u53ef\u4ee5\u63d0\u9ad8\u751f\u4ea7\u6548\u7387\uff0c\u53ef\u662f\u4e5f\u4f1a\u5bf9\u8584\u539a\u7684\u5300\u79f0\u6027\u9020\u6210\u5371\u5bb3\u3002<\/p>\n

3.2.2\u5c04\u9891\u7535\u6e90\u7684\u8f93\u51fa\u529f\u7387<\/p>\n

\u5fae\u6ce2\u5c04\u9891PECVD\u901a\u5e38\u9009\u62e950kHz~13.56MHz\u9891\u7387\u6bb5\u5c04\u9891\u7535\u6e90\uff0c\u5de5\u4f5c\u9891\u7387\u9ad8\uff0c\u7b49\u79bb\u5b50\u4e2d\u6b63\u79bb\u5b50\u7684\u8d1f\u7535\u5b50\u529f\u6548\u5f3a\uff0c\u6dc0\u79ef\u7684\u5851\u6599\u8584\u819c\u66f4\u4e3a\u9ad8\u5bc6\u5ea6\uff0c\u4f46\u5bf9\u886c\u5e95\u7684\u4f24\u5bb3\u4e5f\u975e\u5e38\u5927\u3002\u9ad8\u9891\u7387\u6dc0\u79ef\u7684\u5851\u6599\u8584\u819c\uff0c\u5176\u5300\u79f0\u6027\u660e\u663e\u597d\u4e8e\u4f4e\u9891\u7387\uff0c\u8fd9\u65f6\u56e0\u4e3a\u5f53\u5c04\u9891\u7535\u6e90\u5de5\u4f5c\u9891\u7387\u8f83\u4f4e\u65f6\uff0c\u6328\u8fd1\u6781\u7247\u8fb9\u6cbf\u7684\u9759\u7535\u573a\u8f83\u5dee\uff0c\u5176\u6dc0\u79ef\u901f\u7387\u4f1a\u5c0f\u4e8e\u6781\u7247\u6b63\u4e2d\u95f4\u5730\u533a\uff0c\u800c\u5de5\u4f5c\u9891\u7387\u9ad8\u65f6\u5219\u8fb9\u6cbf\u548c\u6b63\u4e2d\u95f4\u5730\u533a\u7684\u533a\u522b\u4f1a\u7f29\u5c0f\u3002<\/p>\n

3.2.3\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387<\/p>\n

\u5fae\u6ce2\u5c04\u9891\u7684\u6548\u7387\u8d8a\u5927\u6b63\u79bb\u5b50\u7684\u8d1f\u7535\u5b50\u52a8\u80fd\u5c31\u8d8a\u5927\uff0c\u6709\u76ca\u4e8e\u6dc0\u79ef\u819c\u54c1\u8d28\u7684\u6539\u8fdb\u3002\u56e0\u4e3a\u8f93\u51fa\u529f\u7387\u7684\u63d0\u9ad8\u4f1a\u52a0\u5f3a\u6c7d\u4f53\u4e2d\u6c27\u81ea\u7531\u57fa\u7684\u6d53\u5ea6\u503c\uff0c\u4f7f\u6dc0\u79ef\u901f\u5ea6\u968f\u8f93\u51fa\u529f\u7387\u5e73\u884c\u7ebf\u5347\u9ad8\uff0c\u5f53\u8f93\u51fa\u529f\u7387\u63d0\u9ad8\u5230\u6beb\u65e0\u7591\u95ee\u6c34\u5e73\uff0c\u53cd\u6620\u6c7d\u4f53\u5f7b\u5e95\u6c34\u89e3\uff0c\u6c27\u81ea\u7531\u57fa\u505a\u5230\u9971\u548c\u72b6\u6001\uff0c\u6dc0\u79ef\u901f\u5ea6\u5219\u8d8b\u5411\u7262\u56fa\u3002<\/p>\n

3.2.4\u6807\u51c6\u6c14\u538b<\/p>\n

\u4ea7\u751f\u7b49\u79bb\u5b50\u65f6\uff0c\u7a7a\u6c14\u538b\u529b\u8fc7\u5927\uff0c\u4f01\u4e1a\u5185\u7684\u53cd\u6620\u6c7d\u4f53\u63d0\u9ad8\uff0c\u56e0\u800c\u901f\u5ea6\u6269\u5927\uff0c\u4f46\u4e0e\u6b64\u540c\u65f6\u6807\u51c6\u6c14\u538b\u8fc7\u9ad8\uff0c\u771f\u7a7a\u78c1\u5bfc\u7387\u51cf\u5c11\uff0c\u4e0d\u5229\u6dc0\u79ef\u819c\u5bf9\u9636\u68af\u7684\u906e\u76d6\u3002\u6807\u51c6\u6c14\u538b\u592a\u4f4e\u4f1a\u5371\u5bb3\u5851\u6599\u8584\u819c\u7684\u6dc0\u79ef\u539f\u7406\uff0c\u9020\u6210\u819c\u7684\u81f4\u76f8\u5bf9\u5bc6\u5ea6\u7740\u9646\uff0c\u975e\u5e38\u5bb9\u6613\u4ea7\u751f\u9488\u60c5\u51b5\u7f3a\u70b9\uff1b\u6807\u51c6\u6c14\u538b\u8fc7\u9ad8\u65f6\uff0c\u7b49\u79bb\u5b50\u7684\u7f29\u805a\u53cd\u5e94\u660e\u663e\u52a0\u5f3a\uff0c\u9020\u6210\u751f\u957f\u53d1\u80b2\u4e92\u8054\u7f51\u6807\u51c6\u5ea6\u7740\u9646\uff0c\u7f3a\u70b9\u4e5f\u4f1a\u63d0\u9ad8\u3002<\/p>\n

3.2.5\u886c\u5e95\u6eab\u5ea6<\/p>\n

\u886c\u5e95\u6eab\u5ea6\u5bf9\u5851\u6599\u8584\u819c\u54c1\u8d28\u7684\u5371\u5bb3\u5173\u952e\u53d6\u51b3\u4e8e\u5c40\u57df\u7f51\u6001\u5bc6\u5ea6\u3001\u7535\u5b50\u5668\u4ef6\u8fc1\u79fb\u7387\u53ca\u5176\u819c\u7684\u7535\u5b50\u5149\u5b66\u7279\u6027\uff0c\u886c\u5e95\u6eab\u5ea6\u7684\u53d1\u5c55\u6709\u76ca\u4e8e\u5851\u6599\u8584\u819c\u5916\u578b\u60ac\u67b6\u952e\u7684\u8d54\u507f\uff0c\u4f7f\u5851\u6599\u8584\u819c\u7684\u677f\u6750\u76f8\u5bf9\u5bc6\u5ea6\u7740\u9646\u3002<\/p>\n

\u886c\u5e95\u6eab\u5ea6\u5bf9\u6dc0\u79ef\u901f\u5ea6\u7684\u5371\u5bb3\u5c0f\uff0c\u4f46\u5bf9\u5851\u6599\u8584\u819c\u7684\u54c1\u8d28\u5371\u5bb3\u975e\u5e38\u5927\u3002\u6eab\u5ea6\u8d8a\u9ad8\uff0c\u6dc0\u79ef\u819c\u7684\u9ad8\u5bc6\u5ea6\u6027\u8d8a\u5927\uff0c\u9ad8\u6eab\u52a0\u5f3a\u4e86\u5916\u578b\u53cd\u6620\uff0c\u6539\u8fdb\u4e86\u819c\u7684\u6210\u4efd\u3002<\/p>\n

 <\/p>\n

4\u7ed3\u8bed<\/p>\n

 <\/p>\n

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