{"id":16435,"date":"2022-01-20T10:38:01","date_gmt":"2022-01-20T02:38:01","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=16435"},"modified":"2022-01-17T13:39:08","modified_gmt":"2022-01-17T05:39:08","slug":"%e7%9f%a5%e8%af%86%e7%a7%91%e6%99%ae%ef%bc%9apecvd%e6%b3%95%e5%88%b6%e5%a4%87%e9%ab%98%e7%96%8f%e6%b0%b4%e6%80%a7%e6%b0%9f%e7%a2%b3%e8%81%9a%e5%90%88%e7%89%a9%e8%96%84%e8%86%9c%e7%9a%84%e7%a0%94","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=16435","title":{"rendered":"\u77e5\u8bc6\u79d1\u666e\uff1aPECVD\u6cd5\u5236\u5907\u9ad8\u758f\u6c34\u6027\u6c1f\u78b3\u805a\u5408\u7269\u8584\u819c\u7684\u7814\u7a76\u8fdb\u5c55"},"content":{"rendered":"

\u6458\u3000\u8981:<\/p>\n

\u4ee5C4 F8\u4e3a\u5145\u653e\u7535\u6c7d\u4f53,\u8fd0\u7528\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(DBD – PECVD)\u6cd5\u5236\u53d6\u4e86\u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269( a- C: F)\u5851\u6599\u8584\u819c\u3002\u5e94\u7528FTIR\u3001AFM\u3001\u63a5\u89e6\u89d2\u6d4b\u91cf\u4eea\u3001\u53f0\u9636\u4eea\u5bf9a – C: F\u5851\u6599\u8584\u819c\u5f00\u5c55\u4e86\u8868\u73b0,\u79d1\u5b66\u7814\u7a76\u4e86\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u53ca\u5806\u79ef\u6642\u95f4\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u3001\u65b9\u5747\u6839\u5916\u8868\u7c97\u7cd9\u5ea6(RMS)\u548ca – C: F\u5851\u6599\u8584\u819c\u758f\u6c34\u6027\u7684\u5371\u5bb3\u3002\u8bd5\u9a8c\u7ed3\u679c\u663e\u793a,\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u968f\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u7684\u4e0a\u5347\u800c\u6269\u5927,\u6700\u9ad8\u503c\u4e3a193 nm\u00b7min- 1 ;\u5f53\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f83\u4f4e\u65f6,\u5851\u6599\u8584\u819c\u7684RMS\u503c\u4f4e\u4e8e1. 0 nm;\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f83\u9ad8\u65f6,\u5851\u6599\u8584\u819c\u7684RMS\u503c\u8d85\u8fc7100 nm\u3002\u4e0d\u8bba\u662f\u66f4\u6539\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u6216\u662f\u5806\u79ef\u6642\u95f4, a – C: F\u5851\u6599\u8584\u819c\u5747\u4e3b\u8981\u8868\u73b0\u51fa\u8f83\u5f3a\u7684\u4eb2\u6c34\u6027\u7279\u70b9,\u8f83\u5927\u8868\u9762\u5f20\u529b(\u4ee5\u4e00\u822c\u8fc7\u6ee4\u7eb8\u4e3a\u5e95\u6750)\u53ef\u8fbe137\u00b0\u3002a – C: F\u5851\u6599\u8584\u819c\u7684\u5916\u8868\u7c97\u7cd9\u5ea6\u662f\u5371\u5bb3a – C: F\u5851\u6599\u8584\u819c\u758f\u6c34\u6027\u7684\u4e3b\u8981\u8981\u7d20\u3002<\/p>\n

\u5173\u952e\u5b57:<\/p>\n

DBD-PECVD; a – C: F; C4F8 ;\u8868\u9762\u5f20\u529b;\u4eb2\u6c34\u6027\u7279\u70b9<\/p>\n

\u3000\u00a0 \u00a0 \u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269( a – C: F)\u5851\u6599\u8584\u819c\u9664\u4e86\u6709\u7740\u826f\u597d\u7684\u81ea\u6da6\u6e7f\u6027\u3001\u4f4e\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u3001\u8010\u8680\u6027,\u8fd8\u5177\u5907\u8f83\u5f3a\u7684\u4eb2\u6c34\u6027\u7279\u70b9\u3002\u8fd1\u4e9b\u5e74,\u758f\u6c34\u6027\u5851\u6599\u8584\u819c\u65e9\u5df2\u666e\u904d\u7684\u8fd0\u7528\u4e8e\u5f88\u591a\u7814\u7a76\u9886\u57df,\u5145\u5206\u53d1\u6325\u7740\u5341\u5206\u5173\u952e\u7684\u529f\u6548,\u9020\u6210\u5168\u7403\u7684\u5e7f\u6cdb\u5173\u5fc3 \u3002\u9488\u5bf9\u7528\u516d\u6c1f\u73af\u6c27\u4e19\u70f7\u505a\u4e3a\u5145\u653e\u7535\u6c14\u4f53\u5236\u5907a – C: F\u5851\u6599\u8584\u819c,\u7f8e\u56fd\u9ebb\u7701\u7406\u5de5\u5b66\u9662\u7684Gleason \u7b49[ 6 ] \u5f3a\u8c03, \u9009\u7528\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(HFCVD)\u6cd5,\u516d\u6c1f\u73af\u6c27\u4e19\u70f7\u7684\u7a7a\u6c14\u6d41\u901f\u548c\u70ed\u4e1d\u9884\u5907\u5904\u7406\u6642\u95f4\u4e25\u91cd\u5f71\u54cd\u4e86\u7528HFCVD\u65b9\u5f0f\u5806\u79ef\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u7684\u6784\u9020\u548c\u5916\u8c8c; \u82f1\u56fd\u9a6c\u8428\u8bf8\u585e\u5927\u5b66Rastogi\u7b49[ 7 ]\u89c9\u5f97,\u56e0\u88ab\u5438\u5490\u7684\u6c27\u81ea\u7531\u57fa\u548c\u5176\u5b83\u5916\u6765\u7269\u79cd\u7684\u5438\u6536\u6307\u6570\u7684\u4e0d\u4e00\u6837,\u5e95\u6750\u6eab\u5ea6\u5c06\u5371\u5bb3\u5851\u6599\u8584\u819c\u7684\u5916\u8c8c\u548c\u5206\u5b50\u5f0f\u3002\u82f1\u56fd\u79d1\u7f57\u62c9\u591a\u83b1\u65af\u5927\u5b66\u7684Fisher\u7b49[ 8 ]\u4e0b\u7ed3\u8bba,\u7528\u516d\u6c1f\u73af\u6c27\u4e19\u70f7\u7b49\u79bb\u5b50\u7535\u611f\u8026\u5408\u5355\u8109\u51b2\u5145\u653e\u7535\u6cd5\u53ef\u5806\u79ef\u51fa\u5305\u62ec\u5316\u5b66\u4ea4\u8054\u6784\u9020\u975e\u5e38\u5c11\u4e14\u76f8\u5bf9\u9ad8\u5ea6\u4e95\u7136\u6709\u5e8f\u7684a – C: F\u5851\u6599\u8584\u819c\u3002\u610f\u5927\u5229\u5df4\u91cc\u9ad8\u6821\u7684d\u2019Agostino\u7b49[ 9 – 10 ]\u53d1\u89c9,\u9009\u7528\u7535\u5bb9\u8026\u5408\u516b\u6c1f\u73af\u4e01\u70f7\u7b49\u79bb\u5b50\u5806\u79ef\u53ef\u83b7\u5f97a – C: F\u5851\u6599\u8584\u819c;\u4f4e\u7684\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387\u9020\u6210\u819c\u7684\u5316\u5b66\u4ea4\u8054\u6784\u9020\u964d\u4f4e\u548cCF2\u6210\u5206\u7684\u589e\u52a0;\u6676\u5e26\u7684\u89c4\u683c\u548c\u76f8\u5bf9\u5bc6\u5ea6\u5371\u5bb3\u4e86\u5851\u6599\u8584\u819c\u8868\u5c42\u7684\u8868\u9762\u7c97\u7cd9\u5ea6,\u4ece\u800c\u51b3\u7b56\u4e86\u5851\u6599\u8584\u819c\u7684\u758f\u6c34\u6027[ 10 ] \u3002\u4e2d\u56fd\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7684\u79d1\u5b66\u7814\u7a76\u624d\u521a\u53d1\u5c55\u3002\u5982\u4e1c\u5357\u5927\u5b66\u7684\u5218\u96c4\u98de\u7b49[ 11\uff5e12 ]\u4ee5CF4\u548cCH4\u7684\u6df7\u5408\u6c14\u4e3a\u6e90\u6c7d\u4f53, Ar\u4e3a\u5de5\u4f5c\u4e2d\u6c7d\u4f53,\u7528\u5fae\u6ce2\u5c04\u9891\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u5236\u53d6\u4e86a – C: F\u5851\u6599\u8584\u819c,\u53d1\u89c9\u4f34\u968f\u7740\u5806\u79ef\u6eab\u5ea6\u7684\u4e0a\u5347,\u5851\u6599\u8584\u819c\u8868\u5c42\u8d8a\u6765\u8d8a\u5300\u79f0,\u6dec\u706b\u540e\u7684\u5851\u6599\u8584\u819c\u8868\u5c42\u6bd4\u6c92\u6709\u6dec\u706b\u7684\u5851\u6599\u8584\u819c\u8868\u5c42\u5e73\u6574\u3002\u897f\u5b89\u7535\u5b50\u79d1\u6280\u5927\u5b66\u7684\u6768\u94f6\u5802\u7b49[ 13 ]\u9009\u7528\u7535\u5b50\u5668\u4ef6\u56de\u8f6c\u5171\u9707\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u65b9\u5f0f,\u4ee5C4 F8\u548cCH4\u4e3a\u5145\u653e\u7535\u6c14\u4f53\u5236\u5907\u4e86a – C: F\u5851\u6599\u8584\u819c,\u5f3a\u8c03\u5728\u4e00\u5b9a\u533a\u57df\u5185\u6dfb\u52a0CH4\u6216\u662f\u63d0\u5347\u5fae\u6ce2\u52a0\u70ed\u8f93\u51fa\u529f\u7387,\u4e0d\u4f46\u53ef\u4ee5\u6539\u8fdb\u5851\u6599\u8584\u819c\u7684\u8010\u70ed\u6027,\u4e0e\u6b64\u540c\u65f6\u8fd8\u80fd\u591f\u51cf\u5c11\u5851\u6599\u8584\u819c\u7684\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u3002<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u8fd0\u7528\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u5236\u53d6\u5851\u6599\u8584\u819c\u5177\u5907\u5176\u7279\u6709\u7684\u4f18\u70b9:\u5145\u653e\u7535\u65b9\u6cd5\u7b80\u6613,\u673a\u5668\u8bbe\u5907\u4f4e\u6210\u672c;\u5145\u653e\u7535\u5ba4\u6c7d\u4f53\u7a7a\u9699\u5c0f(\u901a\u5e38\u51e0\u6beb\u7c73) ,\u7bb1\u4f53\u4f53\u578b\u5c0f,\u6c14\u4f53\u538b\u529b\u4f4e;\u56e0\u4e3a\u7269\u8d28\u7684\u5b58\u6709,\u9632\u6b62\u4e86\u6c7d\u4f53\u5728\u7535\u7ea7\u4e2d\u95f4\u5f7b\u5e95\u7a7f\u900f,\u56e0\u800c\u80fd\u8017\u8f83\u4f4e\u3002\u6709\u5173\u8fd0\u7528\u6c14\u538b\u4f4e\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u5236\u53d6a – C: F\u5851\u6599\u8584\u819c\u7684\u4e86\u89e3\u5e76\u4e0d\u5e38\u89c1\u3002\u6587\u4e2d\u4ee5\u516b\u6c1f\u73af\u4e01\u70f7(C4 F8 )\u4e3a\u5145\u653e\u7535\u6c7d\u4f53,\u9009\u7528\u7269\u8d28\u963b\u788d\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(DBD – PECVD)\u6cd5\u5806\u79efa – C: F\u5851\u6599\u8584\u819c, \u5e76\u5e94\u7528FTIR (Nicolet Auatar 370 DTGS) \u3001AFM (Dimension 3100) \u3001\u7535\u5b50\u5149\u5b66\u63a5\u89e6\u89d2\u6d4b\u91cf\u4eea( Phoe2nix 300)\u5256\u6790\u4e86\u5851\u6599\u8584\u819c\u6784\u9020\u3001\u8868\u5c42\u5916\u8c8c\u4ee5\u53ca\u4eb2\u6c34\u6027\u7279\u70b9,\u8fd0\u7528\u53f0\u9636\u4eea( Surfcorder ET4000m)\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7684\u8584\u539a\u5f00\u5c55\u4e86\u7cbe\u786e\u6d4b\u91cf\u3002\u7ecf\u7814\u7a76\u53d1\u73b0,\u7528\u8be5\u529e\u6cd5\u914d\u5236\u7684a – C: F\u5851\u6599\u8584\u819c\u8868\u5c42\u6574\u5e73,\u5177\u5907\u8f83\u5f3a\u7684\u4eb2\u6c34\u6027\u7279\u70b9\u3002<\/p>\n

1\u3000\u5b9e\u9a8c\u65b9\u6cd5<\/p>\n

1. 1\u3000\u5851\u6599\u8584\u819c\u7684\u5806\u79ef<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u8bd5\u9a8c\u8bbe\u5907\u5e73\u9762\u56fe\u5982\u4e0b\u56fe1\u3002\u5145\u653e\u7535\u5ba4\u7bb1\u4f53\u771f\u7a7a\u6cf5\u5bc6\u95ed\u5f0f,\u6c7d\u4f53\u5145\u653e\u7535\u7a7a\u9699\u57280\uff5e5 mm\u53ef\u8c03\u5f0f,\u8bd5\u9a8c\u91c7\u7528\u539a\u4e3a3. 5 mm\u7684\u4e00\u822c\u73bb\u7483\u505a\u4e3a\u7269\u8d28,\u9ad9\u538b\u7535\u7ea7\u4e0e\u5939\u5c42\u73bb\u7483\u7269\u8d28\u89e6\u78b0,\u5730\u7535\u7ea7\u4e0e\u5939\u5c42\u73bb\u7483\u7269\u8d28\u7a7a\u9699\u4e3a3 mm\u3002\u62bd<\/p>\n

\u6c14\u7cfb\u7edf\u8f6f\u4ef6\u7531\u771f\u7a7a\u6cf5( ZXZ – 4\u578b,\u4e0a\u6d77\u771f\u7a7a\u6cf5\u5382)\u548c\u78c1\u611f\u5e94\u771f\u7a7a\u6cf5\u5e26\u5145\u9600\u95e8(DDC – JQ – A,\u4e0a\u6d77\u9600\u95e8\u4e8c\u5382)\u6784\u6210\u3002\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u6839\u636e\u80af\u5b9a\u7535\u5bb9\u5668\u771f\u7a7a\u538b\u529b\u8868(626A\u578b,\u82f1\u56fdMKS\u4f01\u4e1a)\u7cbe\u786e\u6d4b\u91cf,\u5e76\u7ecf\u6c14\u4f53\u6d41\u91cf\u663e\u793a\u4eea\u8868(D08 – 4D \/ZM\u578b,\u5317\u4eac\u5e02\u4e03\u661f\u534e\u521b)\u8c03\u6574\u3002\u9009\u7528\u7269\u8d28\u963b\u788d\u7b49\u79bb\u5b50\u52a0\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(DBD -PECVD)\u6cd5\u662f\u4ee5\u5355\u6676\u7845\u7247(p – Si ( 100) ) \u3001\u5939\u5c42\u73bb\u7483\u7269\u8d28\u548c\u8fc7\u6ee4\u7eb8\u4e3a\u5e95\u6750\u5806\u79efa – C: F\u5851\u6599\u8584\u819c, C4 F8 ( 99. 99 % )\u4e3a\u5145\u653e\u7535\u6c7d\u4f53,Ar\u4e3a\u5de5\u4f5c\u4e2d\u6c7d\u4f53, C4 F8\u548cAr\u6839\u636e\u6d41\u91cf\u8ba1\u7cbe\u51c6\u64cd\u7eb5\u6df7\u548c\u540e\u9001\u8fdb\u5145\u653e\u7535\u5ba4\u3002\u5e95\u6750\u6700\u5148\u7528\u5de5\u4e1a\u4e59\u9187(99. 99 % )\u6e05\u7406,\u4ee5\u53bb\u9664\u8868\u5c42\u7684\u7a7a\u6c14\u6c27\u5316\u5c42\u548c\u6c61\u67d3\u7269\u8d28,\u968f\u540e\u8fc5\u901f\u653e\u8fdb\u5145\u653e\u7535\u5ba4\u4e2d,\u5c3d\u91cf\u907f\u514d\u6d6e\u5c18\u5bf9\u5e95\u6750\u7684\u73af\u5883\u6c61\u67d3\u3002\u5806\u79ef\u5851\u6599\u8584\u819c\u524d,\u9700\u8981\u5728Ar\u81ea\u7136\u73af\u5883\u4e2d\u5145\u653e\u753515 min,\u5bf9\u5e95\u6750\u8868\u5c42\u8fdb\u4e00\u6b65\u6e05\u7406\u3002\u5806\u79efa – C: F\u5851\u6599\u8584\u819c\u65f6,\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u64cd\u7eb5\u572825\uff5e1 000 Pa,\u5145\u653e\u7535\u6700\u9ad8\u503c\u5de5\u4f5c\u7535\u538b(Vpp )\u4e3a24 kV,\u5145\u653e\u7535\u5de5\u4f5c\u9891\u7387\u4e3a1 kHz,\u5145\u653e\u7535\u7a7a\u9699\u4e3a3 mm\u3002<\/p>\n

\"1.JPG\"<\/p>\n

\u56fe1\u3000\u8bd5\u9a8c\u8bbe\u5907\u5e73\u9762\u56fe<\/p>\n

1. 2\u3000\u5851\u6599\u8584\u819c\u7684\u8868\u73b0<\/p>\n

\u00a0 \u00a0 \u00a0 \u5e94\u7528\u5085\u91cc\u53f6\u53d8\u6362\u5149\u8c31\u5206\u6790\u4eea( FTIR, NicoletAuatar 370 DTGS)\u5bf9a – C: F\u5851\u6599\u8584\u819c\u8868\u5c42\u7684\u6210\u5206\u53ca\u6210\u952e\u6784\u9020\u5f00\u5c55\u5256\u6790\u3002\u8fd0\u7528\u7535\u5b50\u5149\u5b66\u8868\u9762\u5f20\u529b\u68c0\u6d4b\u4eea( Phoenix 300)\u7cbe\u786e\u6d4b\u91cfa – C: F\u5851\u6599\u8584\u819c\u4e0e\u53bb\u79bb\u5b50\u6c34\u4e2d\u95f4\u7684\u8868\u9762\u5f20\u529b\u3002\u628a\u6c34\u73e0\u6ef4\u8fdb\u4e00\u56fa\u6001\u5e73\u9762\u56fe\u5904\u65f6,\u5e73\u8861\u72b6\u6001\u4e0b\u6db2- \u6c14\u9875\u9762\u4e09\u89d2\u5f62\u7684\u91cd\u5fc3\u7684\u89c6\u89d2\u03b8e \u8868\u660e\u8868\u9762\u5f20\u529b,\u5982\u4e0b\u56fe2[ 14 ] \u3002\u8fd0\u7528\u626b\u63cf\u4eea\u63a2\u9488\u663e\u5fae\u955c(AFM, Dimension3100)\u7cbe\u786e\u6d4b\u91cfa – C: F\u5851\u6599\u8584\u819c(\u4ee5\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750,\u5355\u6676\u7845\u7247\u8868\u9762\u5149\u6d01\u5149\u6ed1, RMS\u6570\u503c0. 1 nm) ,\u89c2\u67e5\u4e0d\u4e00\u6837\u5145\u653e\u7535\u6807\u51c6\u4e0ba – C: F\u5851\u6599\u8584\u819c\u5916\u8c8c\u7684\u8f6c\u53d8\u3002\u8bd5\u9a8c\u5728\u73af\u5883\u7a7a\u6c14\u4e2d\u5b9e\u9645\u64cd\u4f5c,\u5e94\u7528\u63ba\u78f7\u7845\u7eb3\u7c73\u6280\u672f\u78b3\u9488\u5934,\u9488\u5934\u76f4\u5f91< 10nm,\u68c0\u6d4b\u8303\u56f4\u4e3a2 \u03bcm \u00d72 \u03bcm\u3002\u8bd5\u9a8c\u4e2d\u9009\u62e9\u8f7b\u62cd\u65b9\u5f0f(\u5373\u5728\u4e00\u4e2a\u9707\u52a8\u5468\u671f\u65f6\u95f4\u7684\u5927\u591a\u6570\u6642\u95f4\u5185\u9488\u5934\u4e0d\u89e6\u78b0a – C: F\u5851\u6599\u8584\u819c\u8868\u5c42,\u53ef\u4ee5\u5bf9\u5851\u6599\u8584\u819c\u5f00\u5c55\u65e0\u635f\u68c0\u6d4b\u6280\u672f)\u7cbe\u786e\u6d4b\u91cfa – C: F \u5851\u6599\u8584\u819c\u7684\u8868\u5c42\u5916\u8c8c\u3002\u7528\u53f0\u9636\u4eea( Surfcorder ET4000m)\u7cbe\u786e\u6d4b\u91cf\u5851\u6599\u8584\u819c\u8584\u539a,\u518d\u7528\u8584\u539a\u9664\u4e8e\u5806\u79ef\u6642\u95f4,\u83b7\u5f97\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u3002<\/p>\n

\"2.JPG\"<\/p>\n

\u56fe2\u3000\u56fa\u6001\u4e0e\u53bb\u79bb\u5b50\u6c34\u4e2d\u95f4\u7684\u8868\u9762\u5f20\u529b(\u03b8e )<\/p>\n

2\u3000\u7d50\u679c\u4e0e\u63a2\u8ba8<\/p>\n

2. 1\u3000\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7279\u70b9\u7684\u5371\u5bb3<\/p>\n

\u00a0 \u00a0 \u00a0\u4e0d\u4e00\u6837\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4e0b\u5236\u53d6\u7684a – C: F\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u7ebf\u6d88\u5316\u5438\u6536\u8c31\u56fe\u5982\u4e0b\u56fe3\u3002\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4ece25 Pa\u5347\u9ad8\u52301 000Pa,\u5750\u843d\u4e8e1 220 cm- 1\u5904\u7684CF2\u975e\u5bf9\u79f0\u52a0\u5bc6\u4f38\u7f29\u5f0f\u9707\u52a8\u5cf0\u6700\u660e\u663e,\u53ef\u4ee5\u63a8\u6d4b\u5851\u6599\u8584\u819c\u7684\u4e3b\u8981\u6210\u5206\u662fCF2\u5b98\u80fd\u56e2\u3002\u5728\u6c14\u538b\u4f4e\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u7b49\u79bb\u5b50\u4e2d,\u56e0\u4e3a\u5206\u5b50\u7ed3\u6784\u4e0e\u7535\u5b50\u5668\u4ef6\u7684\u649e\u51fb, C4 F8\u53ef\u4ee5\u6eb6\u89e3\u9020\u6210\u5404\u5f0f\u5404\u6837\u7684\u6c1f\u78b3\u55b7\u6d82\u9897\u7c92, \u6bd4\u5982, \u2014CF2 \u2014, \u2014CF2 CF2 \u2014, \u2014CF2 CF2CF2 \u2014\u53ca\u5176\u5176\u5b83\u7684\u94fe\u72b6\u6784\u9020\u7684\u9897\u7c92[ 15 ] \u3002\u8fd9\u79cd\u9897\u7c92\u5728\u8868\u5c42\u4ea7\u751f\u7f29\u805a\u53cd\u5e94,\u5806\u79ef\u5230\u5e95\u6750\u4e0a,\u751f\u957f\u53d1\u80b2\u6210a -C: F\u5851\u6599\u8584\u819c\u3002<\/p>\n

\"3.JPG\"<\/p>\n

\u56fe3\u3000\u4e0d\u4e00\u6837\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u5236\u53d6\u7684a – C: F\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u7ebf\u6d88\u5316\u5438\u6536\u8c31\u56fe<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u7684\u66f4\u6539\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u6709\u6bd4\u8f83\u5927\u5371\u5bb3\u3002a – C: F\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u968f\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f6c\u53d8\u7684\u66f2\u7ebf\u56fe\u5982\u4e0b\u56fe4\u3002\u7531\u56fe4\u7531\u6b64\u53ef\u89c1,\u4f34\u968f\u7740\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u7684\u4e0a\u5347, a – C: F\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u5c55\u73b0\u660e\u663e\u7684\u53d1\u5c55\u8d8b\u52bf\u3002\u5728\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529bP = 1 000 Pa\u65f6,\u5806\u79ef\u901f\u5ea6\u8fbe\u6700\u9ad8\u503c,\u4e3a193 nm\u00b7min- 1\u3002\u6c14\u538b\u4f4e\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u662f\u7531\u4e00\u4e2a\u4e2a\u5927\u89c4\u6a21\u5747\u5300\u5206\u5e03\u7684\u7535\u5f27\u653e\u7535\u5355\u8109\u51b2\u6240\u6784\u6210\u3002\u5728\u6bcf\u4e00\u4e2a\u5145\u653e\u7535\u5468\u671f\u65f6\u95f4\u5185,\u653e\u8109\u51b2\u7535\u6d41\u7684\u6570\u989d\u5173\u952e\u5728\u4e8e\u6c7d\u4f53\u5145\u653e\u7535\u7684Pd\u503c\u548c\u6240\u589e\u52a0\u7684\u6700\u9ad8\u503c\u5de5\u4f5c\u7535\u538b[ 16 ] \u3002\u6700\u9ad8\u503c\u5de5\u4f5c\u7535\u538b\u4fdd\u6301\u4e0d\u53d8, d (\u5145\u653e\u7535\u7a7a\u9699)\u4e0d\u4f1a\u6539\u53d8, \u6269\u5927P,\u5728\u4e00\u4e2a\u5145\u653e\u7535\u5468\u671f\u65f6\u95f4\u5185\u653e\u8109\u51b2\u7535\u6d41\u7684\u6570\u989d\u5c06\u63d0\u5347\u3002\u4f9d\u636e\u5e15\u90a2\u57fa\u672c\u5b9a\u5f8b, \u4f34\u968f\u7740P \u7684\u63d0\u5347, Pd \u503c\u6269\u5927, \u51fb\u7a7f\u7535\u538bVs\u51cf\u5c11[ 17 ] ,\u6c7d\u4f53\u975e\u5e38\u5bb9\u6613\u88ab\u7a7f\u900f,\u4e14\u4f34\u968f\u7740Vs\u7684\u51cf\u5c11\u7a7f\u900f\u6570\u989d\u589e\u52a0,\u6c14\u76f8\u8272\u8c31\u7f29\u805a\u53cd\u5e94\u52a0\u91cd,\u8fdb\u800c\u52a0\u901f\u4e86\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u3002<\/p>\n

\"4.JPG\"<\/p>\n

\u56fe4\u3000a – C: F\u5851\u6599\u8584\u819c(\u4ee5\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750)\u7684\u5806\u79ef\u901f\u5ea6\u968f\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f6c\u53d8\u7684\u66f2\u7ebf\u56fe<\/p>\n

\u00a0 \u00a0 \u00a0 \u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u7684\u66f4\u6539\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7684\u65b9\u5747\u6839\u5916\u8868\u7c97\u7cd9\u5ea6(RMS)\u7684\u5371\u5bb3\u4e5f\u6bd4\u8f83\u5927,\u5982\u4e0b\u56fe5\u3002\u7531\u56fe5\u7531\u6b64\u53ef\u89c1,\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f83\u4f4e\u65f6, a – C: F\u5851\u6599\u8584\u819c\u7684RMS\u503c\u8f83\u4f4e,\u4f4e\u4e8e1. 0 nm;\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f83\u9ad8\u65f6, a – C: F\u5851\u6599\u8584\u819c\u7684RMS\u503c\u8f83\u9ad8,\u8d85\u8fc7100 nm\u3002\u5728\u8f83\u9ad8\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4e0b,\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u901a\u5e38\u5c55\u73b0\u7ebf\u72b6\u5145\u653e\u7535\u65b9\u5f0f,\u6839\u636e\u5145\u653e\u7535\u7a7a\u9699\u7684\u7535\u6d41\u91cf\u7531\u5f88\u591a\u77ed\u6d6a\u6d8c\u7535\u6d41\u7ec6\u6761\u6784\u6210,\u7535\u6d41\u91cf\u7ec6\u6761\u5728\u5145\u653e\u7535\u5ba4\u5185\u7a7a\u95f4\u548c\u5145\u653e\u7535\u6642\u95f4\u4e0a\u5168\u662f\u65e0\u89c4\u5f8b\u904d\u5e03\u7684,\u8fd9\u7c7b\u5fae\u5145\u653e\u7535\u7535\u6d41\u91cf\u7ec6\u6761\u7684\u4ea7\u751f\u901a\u5e38\u79f0\u4e4b\u4e3a\u5fae\u5145\u653e\u7535\u3002\u5fae\u5145\u653e\u7535\u662f\u5728\u6c7d\u4f53\u7a7a\u9699\u91cc\u67d0\u4e00\u4e2a\u90e8\u4f4d\u4e0a\u4ea7\u751f\u7684,\u4e0e\u6b64\u540c\u65f6\u5728\u522b\u7684\u90e8\u4f4d\u4e0a\u4e5f\u4f1a\u9020\u6210\u6b64\u5916\u7684\u5fae\u5145\u653e\u7535,\u9ad8\u6c14\u538b\u4e0b\u4e0d\u5300\u79f0\u7684\u5851\u6599\u8584\u819c\u8868\u5c42\u6784\u9020\u4e0e\u9ad8\u6c14\u538b\u4e0b\u7684\u5145\u653e\u7535\u4e0d\u5747\u8861\u6027\u7acb\u5373\u6709\u5173\u3002\u5fae\u5145\u653e\u7535\u7684\u751f\u6210\u548c\u5fae\u5145\u653e\u7535\u4e1d\u4e2d\u4ea7\u751f\u7684\u77ac\u95f4\u7684\u9ad8\u7535\u6d41\u5f3a\u5ea6\u5173\u952e\u4e0e\u9ad8\u5de5\u4f5c\u538b\u529b\u4e0b\u8f83\u9ad8\u7684\u6c14\u4f53\u5bc6\u5ea6\u76f8\u5173\u3002\u82e5\u51cf\u5c11\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b,\u5fae\u5145\u653e\u7535\u5b89\u5168\u901a\u9053\u7684\u534a\u5f84\u5c06\u6210\u53cd\u6bd4\u4f8b\u6269\u5927,\u8fdb\u4e00\u6b65\u51cf\u5c11\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b,\u53ef\u4ee5\u4f7f\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535\u53d8\u4e3a\u5927\u89c4\u6a21\u5747\u5300\u5206\u5e03\u7684\u7535\u5f27\u653e\u7535\u65b9\u5f0f[ 16 ] \u3002\u5f53\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4ece25 Pa\u63d0\u5347\u52301 000 Pa\u65f6,\u5145\u653e\u7535\u65b9\u5f0f\u7531\u5300\u79f0\u7684\u7535\u5f27\u653e\u7535\u65b9\u5f0f\u8854\u63a5\u5230\u4e86\u4e0d\u5300\u79f0\u7684\u7ebf\u72b6\u5145\u653e\u7535\u65b9\u5f0f,\u8fdb\u800c\u4f1a\u9020\u6210a – C: F \u5851\u6599\u8584\u819c\u7684RMS\u503c\u75310. 45 nm \u8fc5\u901f\u63d0\u5347\u5230141 nm\u3002<\/p>\n

\"5.JPG\"<\/p>\n

\u56fe5\u3000a – C: F\u5851\u6599\u8584\u819c(\u4ee5\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750)\u7684RMS\u503c\u968f\u6807\u51c6\u6c14\u538b\u8f6c\u53d8\u66f2\u7ebf\u56fe<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0a – C: F\u5851\u6599\u8584\u819c\u7684AFM\u56fe(\u8868\u5c42\u5916\u8c8c\u56fe) \u5982\u4e0b\u56fe6\u3002\u5728\u5176\u4e2d,\u56fe6a\u662f\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4e3a25 Pa\u3001\u626b\u63cf\u4eea\u8303\u7574\u4e3a2\u03bcm \u00d72\u03bcm\u3001\u5851\u6599\u8584\u819c\u8868\u5c42\u6ce2\u52a8\u8303\u7574\u4e3a10 nm\u7684AFM\u56fe; \u56fe6 b\u662f\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4e3a1 0 0 0 Pa\u3001\u626b\u63cf\u4eea\u8303\u7574\u4e3a80\u03bcm \u00d780\u03bcm\u3001\u5851\u6599\u8584\u819c\u8868\u5c42\u6ce2\u52a8\u8303\u7574\u4e3a500 nm\u7684AFM\u56fe\u3002\u5f53P\u8f83\u9ad8\u65f6,\u5851\u6599\u8584\u819c\u8868\u5c42\u5f88\u4e0d\u5149\u6ed1,\u56e0\u6b64\u9009\u62e9\u53ef\u4ee5\u5927\u8303\u7574\u626b\u63cf\u4eea\u7684\u89e6\u78b0\u65b9\u5f0f\u5bf9\u5851\u6599\u8584\u819c\u5f00\u5c55\u626b\u63cf\u4eea,\u626b\u63cf\u4eea\u8303\u7574\u9009\u4e2d\u572880\u03bcm \u00d780\u03bcm\u3002\u6c34\u73e0\u6ef4\u5230\u8fc7\u6ee4\u7eb8\u4e0a\u901a\u8fc75 s\u7684\u7167\u7247\u5982\u4e0b\u56fe7, ( a)\u4e3a\u6c34\u73e0\u5728\u9540\u6709a – C: F\u5851\u6599\u8584\u819c\u7684\u8fc7\u6ee4\u7eb8\u4e0a\u7684\u76f8\u7247,( b)\u4e3a\u6c34\u73e0\u5728\u672a\u9540a – C: F\u5851\u6599\u8584\u819c\u7684\u8fc7\u6ee4\u7eb8\u4e0a\u7684\u76f8\u7247( P = 100 Pa, f = 1 kHz, d = 3 mm) \u3002\u4ece\u56fe7\u4e2d\u53ef\u4ee5\u770b\u5f97\u51fa,\u672a\u8868\u5c42\u7684\u9540\u819c\u7684\u8fc7\u6ee4\u7eb8\u5c06\u6c34\u5f7b\u5e95\u6d88\u5316\u5438\u6536\u4e86,\u800c\u8868\u5c42\u7684\u9540\u819c\u7684\u8fc7\u6ee4\u7eb8\u5219\u4e3b\u8981\u8868\u73b0\u51fa\u8f83\u5f3a\u7684\u4eb2\u6c34\u6027\u7279\u70b9,\u6c34\u73e0\u6837\u5b50\u57fa\u672c\u4e0a\u4fdd\u6301\u4e0d\u53d8\u3002<\/p>\n

\"6.JPG\"<\/p>\n

\u56fe6\u3000\u4ee5\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750\u7684a – C: F\u5851\u6599\u8584\u819cAFM\u56fe<\/p>\n

\"7.JPG\"<\/p>\n

\u56fe7\u3000\u6c34\u73e0\u6ef4\u5728\u8fc7\u6ee4\u7eb8\u4e0a\u7684\u7167\u7247<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u5bf9a – C: F\u5851\u6599\u8584\u819c\u4e0e\u53bb\u79bb\u5b50\u6c34\u4e2d\u95f4\u8868\u9762\u5f20\u529b\u7684\u5371\u5bb3\u89c1\u88681\u3002\u4f34\u968f\u7740\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u7684\u4e0a\u5347,\u4e0d\u8bba\u662f\u4ee5\u5355\u6676\u7845\u7247\u3001\u5939\u5c42\u73bb\u7483\u7269\u8d28\u6216\u662f\u4ee5\u8fc7\u6ee4\u7eb8\u4e3a\u5e95\u6750, a – C: F\u5851\u6599\u8584\u819c\u7684\u8868\u9762\u5f20\u529b\u5747\u5448\u63d0\u5347\u7684\u53d1\u5c55\u8d8b\u52bf,\u800c\u4e14\u03b81 >\u03b82 >\u03b83 (\u03b81\u3001\u03b82 \u3001\u03b83<\/p>\n

\u5206\u522b\u662f\u4ee5\u8fc7\u6ee4\u7eb8\u3001\u5939\u5c42\u73bb\u7483\u3001\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750\u5236\u53d6\u7684\u5851\u6599\u8584\u819c\u7684\u8868\u9762\u5f20\u529b) \u3002\u03b83\u4f34\u968f\u7740a – C: F\u5851\u6599\u8584\u819c\u7684RMS\u503c\u7684\u63d0\u9ad8\u800c\u63d0\u5347\u3002\u8868\u5c42\u7684\u9540\u819c\u524d\u3001\u540e\u8fc7\u6ee4\u7eb8\u7684SEM\u56fe\u5982\u4e0b\u56fe8\u3002<\/p>\n

\"8.JPG\"<\/p>\n

\u56fe8\u3000SEM\u8868\u5c42\u5916\u8c8c\u56fe<\/p>\n

\u4ece\u56fe8\u4e2d\u6c92\u6709\u770b\u5f97\u51fa\u663e\u8457\u8f6c\u53d8,\u8fd9\u662f\u7531\u4e8e\u5236\u53d6\u7684a – C: F\u5851\u6599\u8584\u819c\u975e\u5e38\u8584,\u6c92\u6709\u5bf9\u6ee4\u819c\u7684\u8868\u5c42\u5916\u8c8c\u9020\u6210\u5371\u5bb3\u3002\u4ece\u56fe8b\u53ef\u4ee5\u770b\u5f97\u51fa,\u8fc7\u6ee4\u7eb8\u7684\u8868\u5c42\u5f88\u4e0d\u5149\u6ed1,\u56e0\u6b64\u751f\u957f\u53d1\u80b2\u51fa\u7684\u5851\u6599\u8584\u819c\u8868\u5c42\u4e5f\u76f8\u5e94\u8f83\u4e0d\u5149\u6ed1,\u4e0e\u6b64\u540c\u65f6\u8fd8\u53ef\u4ee5\u663e\u8457\u770b\u5f97\u51fa\u5939\u5c42\u73bb\u7483\u8868\u5c42\u8981\u6bd4\u5355\u6676\u7845\u7247\u8868\u5c42\u4e0d\u5149\u6ed1\u8bb8\u591a\u3002\u4ece\u7ea2\u5916\u7ebf\u5256\u6790\u8c31\u56fe(\u5982\u4e0b\u56fe9)\u53ef\u4ee5\u5f97\u5230\u5851\u6599\u8584\u819c\u7684\u4e3b\u8981\u6210\u5206\u662fCF2 \u5b98\u80fd\u56e2, \u5851\u6599\u8584\u819c\u4e2d\u5e26\u6709\u758f\u6c34\u6027\u5b98\u80fd\u56e2CF2 \u548cCF3 [ 18 ] ,\u56e0\u6b64\u5851\u6599\u8584\u819c\u53ef\u4ee5\u5448\u73b0\u51fa\u8f83\u5f3a\u7684\u4eb2\u6c34\u6027\u7279\u70b9\u3002\u4ece\u4e0a\u8fb9\u7684\u8c03\u67e5\u53ef\u4ee5\u770b\u5f97\u51fa,\u5851\u6599\u8584\u819c\u7684\u8868\u9762\u5f20\u529b\u4f34\u968f\u7740\u5851\u6599\u8584\u819c\u7684RMS\u503c\u7684\u63d0\u9ad8\u800c\u63d0\u5347,\u4ece\u800c\u4e0b\u7ed3\u8bba,\u5851\u6599\u8584\u819c\u7684\u5916\u8868\u7c97\u7cd9\u5ea6\u662f\u5371\u5bb3\u5851\u6599\u8584\u819c\u4eb2\u6c34\u6027\u7279\u70b9\u7684\u4e3b\u8981\u8981\u7d20\u3002<\/p>\n

\"11.JPG\"<\/p>\n

2. 2\u3000\u5806\u79ef\u6642\u95f4\u66f4\u6539\u5bf9a – C: F\u5851\u6599\u8584\u819c\u7279\u70b9\u7684\u5371\u5bb3<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u5728C4 F8\u6d53\u5ea6\u503c\u8f83\u9ad8\u65f6,\u8fdb\u5165Ar\u6709\u5229\u4e8eC4 F8\u7684\u6c34\u89e3,\u53ef\u4ee5\u63d0\u5347\u7b49\u79bb\u5b50\u4e2dCFX \u7684\u6d53\u5ea6\u503c,\u52a0\u901f\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u3002\u4ece\u5806\u79ef\u6642\u95f4\u4e3a30 min\u5236\u53d6\u7684a -C: F\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u7ebf\u6d88\u5316\u5438\u6536\u8c31\u56fe(\u5982\u4e0b\u56fe9)\u4e2d\u80fd\u591f\u770b\u89c1,\u5cf0\u4f4d\u57281 000\uff5e1 900 cm- 1\u6709\u6d88\u5316\u5438\u6536\u5e26,\u4ed6\u4eec\u5404\u81ea\u76f8\u5339\u914d\u4e8eCFx ( x = 1, 2, 3)\u548cC – C\u952e\u7684\u9707\u52a8\u7535\u5b50\u80fd\u7ea7[ 17 ] \u3002\u4ece\u800c\u53ef\u4ee5\u63a8\u8bba\u5851\u6599\u8584\u819c\u7684\u4e3b\u8981\u6210\u5206\u4e3aCFx ( x = 1, 2, 3)\u5b98\u80fd\u56e2\u3002<\/p>\n

\"9.JPG\"<\/p>\n

\u56fe9\u3000\u5806\u79ef\u6642\u95f4\u4e3a30 min\u5236\u53d6\u7684a – C: F\u5851\u6599\u8584\u819c\u7684\u7ea2\u5916\u7ebf\u6d88\u5316\u5438\u6536\u8c31\u56fe<\/p>\n

\u00a0 \u00a0 \u00a0 \u66f4\u6539\u5806\u79ef\u6642\u95f4,\u7528\u53f0\u9636\u4eea\u5bf9\u5806\u79ef\u6642\u95f4\u5404\u81ea\u4e3a3, 5, 7, 10, 20 min\u7684a – C: F\u5851\u6599\u8584\u819c(\u4ee5\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750)\u5f00\u5c55\u539a\u5ea6\u6d4b\u91cf,\u6bcf\u4e00\u4e2a\u8bd5\u54c1\u7cbe\u786e\u6d4b\u91cf3\u6b21,\u53d6\u7b97\u672f\u5e73\u5747\u505a\u4e3a\u6700\u540e\u7684\u7d50\u679c\u3002\u4e0d\u4e00\u6837\u5806\u79ef\u6642\u95f4a – C: F\u5851\u6599\u8584\u819c\u7684\u8584\u539a\u8f6c\u53d8\u5982\u4e0b\u56fe10\u3002\u901a\u8fc7\u7ebf\u6027\u62df\u5408,\u53ef\u4ee5\u53d1\u89c9a -C: F\u5851\u6599\u8584\u819c\u7684\u8584\u539a\u4e0e\u5806\u79ef\u6642\u95f4\u57fa\u672c\u4e0a\u5448\u7ebf\u6027\u76f8\u5173,\u7528\u5851\u6599\u8584\u819c\u7684\u8584\u539a\u9664\u4e8e\u5806\u79ef\u6642\u95f4\u83b7\u5f97\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u7ea6\u4e3a78 nm\u00b7min- 1\u3002<\/p>\n

\"10.JPG\"<\/p>\n

\u56fe10\u3000a – C: F\u5851\u6599\u8584\u819c(\u4ee5\u5355\u6676\u7845\u7247\u4e3a\u5e95\u6750)\u7684\u8584\u539a\u968f\u5806\u79ef\u6642\u95f4\u7684\u8f6c\u53d8\u66f2\u7ebf\u56fe<\/p>\n

\u00a0 \u00a0 \u00a0\u5806\u79ef\u6642\u95f4\u4ece10 s\u523020 min\u7684\u8868\u9762\u5f20\u529b(\u4ee5\u4e00\u822c\u8fc7\u6ee4\u7eb8\u4e3a\u5e95\u6750)\u5c3a\u5bf8\u7684\u8f6c\u53d8\u5982\u4e0b\u56fe11\u3002\u5806\u79ef\u6642\u95f4\u5404\u81ea\u4e3a10, 30 s, 1, 2 min\u7684\u5851\u6599\u8584\u819c\u8f83\u8584,\u6ca1\u6cd5\u7528\u53f0\u9636\u4eea\u5f00\u5c55\u7cbe\u786e\u6d4b\u91cf,\u4f46\u4f9d\u636e\u5806\u79ef\u901f\u5ea6\u53ef\u4ee5\u4f30\u8ba1\u51fa\u5851\u6599\u8584\u819c\u7684\u8584\u539a\u5206\u5225\u4e3a0. 013, 0. 039, 0. 078, 0. 16 \u03bcm\u3002\u4ece\u56fe11\u4e2d\u80fd\u591f\u770b\u89c1,\u9664\u5f00\u5806\u79ef\u6642\u95f4\u4f4e\u4e8e1 min\u7684\u5851\u6599\u8584\u819c\u4e0e\u53bb\u79bb\u5b50\u6c34\u4e2d\u95f4\u7684\u8868\u9762\u5f20\u529b\u4f34\u968f\u7740\u6642\u95f4\u7684\u63d0\u5347\u8fc5\u901f\u51cf\u5c11\u5916,\u522b\u7684\u5806\u79ef\u6642\u95f4\u7684\u5851\u6599\u8584\u819c\u8868\u9762\u5f20\u529b\u5747\u8d85\u8fc790\u00b0,\u4e3b\u8981\u8868\u73b0\u51fa\u8f83\u5f3a\u7684\u4eb2\u6c34\u6027\u7279\u70b9\u3002\u5806\u79ef\u6642\u95f4\u4f4e\u4e8e1 min \u7684\u5851\u6599\u8584\u819c,\u56e0\u4e3a\u5806\u79ef\u6642\u95f4\u8fc7\u77ed\u3001\u5806\u79ef\u7684\u5851\u6599\u8584\u819c\u8f83\u8584\u4e14\u4e0d\u8db3\u5300\u79f0\u800c\u9020\u6210\u6c34\u73e0\u6ef4\u5728a – C: F\u5851\u6599\u8584\u819c\u4e0a,\u4f34\u968f\u7740\u6642\u95f4\u7684\u53d8\u5316\u8868\u9762\u5f20\u529b\u8fc5\u901f\u51cf\u5c11\u3002\u6362\u53e5\u8bdd\u8bf4,\u5f53a – C: F\u5851\u6599\u8584\u819c\u505a\u5230\u4e00\u5b9a\u8584\u539a(\u7ea6\u4e3a160 nm)\u65f6, a – C: F\u5851\u6599\u8584\u819c\u7684\u8868\u9762\u5f20\u529b\u57fa\u672c\u4e0a\u4fdd\u6301\u4e0d\u53d8\u3002<\/p>\n

\"12.JPG\"<\/p>\n

\u56fe11\u3000\u4e0d\u4e00\u6837\u5806\u79ef\u6642\u95f4\u5236\u53d6\u7684a – C: F\u5851\u6599\u8584\u819c\u8868\u9762\u5f20\u529b(p = 100 Pa, R = 0. 3)<\/p>\n

3\u3000\u7ed3\u3000\u8bba<\/p>\n

\u8fd0\u7528C4 F8\u4e3a\u5145\u653e\u7535\u6c14\u4f53\u5236\u5907\u4e86\u4e00\u7cfb\u5217a – C: F\u5851\u6599\u8584\u819c,\u5bf9\u4ed6\u4eec\u5f00\u5c55\u8868\u73b0\u548c\u5256\u6790\u540e,\u5f97\u5230\u4e0b\u5217\u7ed3\u679c:<\/p>\n

(1) C4 F8\u505a\u4e3a\u5145\u653e\u7535\u6c7d\u4f53,\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4ece25 Pa\u63d0\u5347\u52301 000 Pa, a – C: F\u5851\u6599\u8584\u819c\u5806\u79ef\u901f\u5ea6\u63d0\u5347,\u6700\u9ad8\u503c\u53ef\u8fbe193 nm \u00b7min- 1 ;\u5f53\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f83\u4f4e\u65f6, a- C: F\u5851\u6599\u8584\u819c\u7684RMS\u503c\u4f4e\u4e8e1. 0 nm,\u5f53\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u8f83\u9ad8\u65f6, a – C: F\u5851\u6599\u8584\u819c\u7684RMS\u503c\u8d85\u8fc7100 nm\u3002<\/p>\n

(2) C4 F8\u4e3a\u5145\u653e\u7535\u6c7d\u4f53,Ar\u4e3a\u5de5\u4f5c\u4e2d\u6c7d\u4f53,\u6c14\u4f53\u538b\u529b\u6bd4R = 0. 3,\u5145\u653e\u7535\u5de5\u4f5c\u538b\u529b\u4e3a100 Pa,\u5145\u653e\u7535\u7a7a\u9699\u4e3a3 mm\u65f6, a – C: F\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6\u7ea6\u4e3a78 nm\u00b7min- 1\u3002<\/p>\n

(3 ) \u8868\u9762\u5f20\u529b\u7cbe\u786e\u6d4b\u91cf\u7ed3\u679c\u663e\u793a, \u9009\u7528DBD -PECVD\u6cd5\u5236\u53d6\u7684a – C: F\u5851\u6599\u8584\u819c\u5747\u6709\u7740\u8f83\u597d\u7684\u4eb2\u6c34\u6027\u7279\u70b9\u3002a – C: F\u5851\u6599\u8584\u819c\u7684\u5916\u8868\u7c97\u7cd9\u5ea6\u662f\u5371\u5bb3a – C: F\u5851\u6599\u8584\u819c\u4eb2\u6c34\u6027\u7279\u70b9\u7684\u4e3b\u8981\u8981\u7d20\u3002<\/p>\n

 <\/p>\n

\n

\u6d3e\u65d7\u7eb3\u7c73\u5b98\u7f51\uff1ahttps:\/\/www.paiqinano.com<\/p>\n

\u5927\u91cf\u7535\u5b50\u7eb3\u7c73\u9632\u62a4\u6d82\u5c42\u5242\u3001\u914d\u5957\u55b7\u9540\u8bbe\u5907\u3001OEM\u4ee3\u5de5\u670d\u52a1\u7b49\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\u7eb3\u7c73\u6d82\u5c42\u5242\u7406\u5316\u6027\u80fd\u8be6\u7ec6\u53c2\u6570\u76f4\u63a5\u70b9\u51fb\uff1a\u7eb3\u7c73\u7535\u5b50\u9632\u62a4\u6d82\u5c42\u5242\u53c2\u6570<\/a><\/p>\n

\u6280\u672f\u54a8\u8be2\uff1a\u8d75\u5148\u751f\uff1a13048960888<\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

\u6458\u3000\u8981:\u4ee5C4F8\u4e3a\u653e\u7535\u6c14\u4f53,\u5229\u7528\u4ecb\u8d28\u963b\u6321\u653e\u7535\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(DBD-PECVD)\u6cd5\u5236\u5907\u4e86\u6c1f\u78b3\u805a\u5408\u7269(a-C:F)\u8584\u819c\u3002\u4f7f\u7528FTIR\u3001AFM\u3001\u63a5\u89e6\u89d2\u6d4b\u91cf\u4eea\u3001\u53f0\u9636\u4eea\u5bf9a-C:F\u8584\u819c\u8fdb\u884c\u4e86\u8868\u5f81,\u7814\u7a76\u4e86\u653e\u7535\u538b\u529b\u53ca\u6c89\u79ef\u65f6\u95f4\u5bf9a-C:F\u8584\u819c\u7684\u6c89\u79ef\u901f\u7387\u3001\u5747<\/p>\n","protected":false},"author":1,"featured_media":16424,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[59],"tags":[1514,1506,1513,1512],"class_list":["post-16435","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-information","tag-a-c-f","tag-pecvd","tag-1513","tag-1512"],"jetpack_featured_media_url":"\/wp-content\/uploads\/2021\/12\/20211215125659-61b9e61b64c74.jpg","jetpack-related-posts":[{"id":16419,"url":"https:\/\/www.paiqinano.com\/?p=16419","url_meta":{"origin":16435,"position":0},"title":"\u6280\u672f\u524d\u6cbf\uff1a\u805a\u56db\u6c1f\u4e59\u70ef\u7ed3\u6784\u6c1f\u78b3\u805a\u5408\u7269\u8584\u819c\u7684\u7814\u7a76\u8fdb\u5c55","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2022\u5e741\u670819\u65e5","format":false,"excerpt":"\u6458\u3000\u8981:\u805a\u56db\u6c1f\u4e59\u70ef\u7ed3\u6784\u6c1f\u78b3\u805a\u5408\u7269(Polytetrafluoroethylene-likefluor\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215125656-61b9e618e5b66.jpg","width":350,"height":200},"classes":[]},{"id":23247,"url":"https:\/\/www.paiqinano.com\/?p=23247","url_meta":{"origin":16435,"position":1},"title":"\u5927\u6c14\u538b\u7b49\u79bb\u5b50\u4f53\u5236\u5907\u8d85\u758f\u6c34\u8868\u9762\u53ca\u5176\u9632\u51b0\u6291\u971c\u7684\u7814\u7a76","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2021\u5e7412\u670830\u65e5","format":false,"excerpt":"\u6458\u8981\u8d35\u5dde\u7535\u7f51\u6709\u9650\u8d23\u4efb\u516c\u53f8\u7535\u529b\u79d1\u5b66\u7814\u7a76\u9662\u3001\u8f93\u914d\u7535\u88c5\u5907\u53ca\u7cfb\u7edf\u5b89\u5168\u4e0e\u65b0\u6280\u672f\u56fd\u5bb6\u91cd\u70b9\u5b9e\u9a8c\u5ba4\uff08\u91cd\u5e86\u5927\u5b66\uff09\u7684\u7814\u7a76\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215133811-61b9efc306384.jpg","width":350,"height":200,"srcset":"\/wp-content\/uploads\/2021\/12\/20211215133811-61b9efc306384.jpg 1x, \/wp-content\/uploads\/2021\/12\/20211215133811-61b9efc306384.jpg 2x"},"classes":[]},{"id":19564,"url":"https:\/\/www.paiqinano.com\/?p=19564","url_meta":{"origin":16435,"position":2},"title":"\u6d45\u8c08\u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u7684\u539f\u7406\u53ca\u5176\u6280\u672f\u5173\u952e","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2022\u5e741\u670812\u65e5","format":false,"excerpt":"\u4e00\u3001\u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u7684\u5185\u5bb9\u53ca\u5173\u952e \u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u539f\u7406\u662f\u5229\u7528\u4f4e\u6e29\u7b49\u79bb\u5b50\u4f53(\u975e\u5e73\u8861\u7b49\u79bb\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215131117-61b9e9755b80a.jpg","width":350,"height":200},"classes":[]},{"id":19412,"url":"https:\/\/www.paiqinano.com\/?p=19412","url_meta":{"origin":16435,"position":3},"title":"\u7535\u6d46\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u6280\u672f","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2022\u5e741\u670825\u65e5","format":false,"excerpt":"\u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f1\uff0e\u6280\u672f\u5185\u5bb9\u53ca\u6280\u672f\u5173\u952e\u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u539f\u7406\u662f\u5229\u7528\u4f4e\u6e29\u7b49\u79bb\u5b50\u4f53\uff08\u975e\u5e73\u8861\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215131031-61b9e947dbdec.png","width":350,"height":200},"classes":[]},{"id":19803,"url":"https:\/\/www.paiqinano.com\/?p=19803","url_meta":{"origin":16435,"position":4},"title":"PECVD \u7684\u7535\u8def\u677f\u9632\u6c34\u539f\u7406\u4e0e\u6545\u969c\u539f\u56e0\u5206\u6790","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2022\u5e742\u67083\u65e5","format":false,"excerpt":"\u6458\u8981 \u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b\uff1a\u7269\u7406\u6c14\u76f8\u6c89\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215131235-61b9e9c3b85d3.png","width":350,"height":200},"classes":[]},{"id":19424,"url":"https:\/\/www.paiqinano.com\/?p=19424","url_meta":{"origin":16435,"position":5},"title":"PECVD \u7684\u539f\u7406\u4e0e\u6545\u969c\u5206\u6790","author":"\u6d3e\u65d7\u7eb3\u7c73","date":"2022\u5e741\u670822\u65e5","format":false,"excerpt":"1PECVD\u7684\u79cd\u7c7b \u3000\u30001.1\u5c04\u9891\u589e\u5f3a\u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\uff08RF-PECVD\uff09 \u3000\u3000\u7b49\u79bb\u5b50\u4f53\u5316\u5b66\u6c14\u76f8\u2026","rel":"","context":"\u5728\u201c\u884c\u4e1a\u8d44\u8baf\u201d\u4e2d","block_context":{"text":"\u884c\u4e1a\u8d44\u8baf","link":"https:\/\/www.paiqinano.com\/?cat=59"},"img":{"alt_text":"","src":"\/wp-content\/uploads\/2021\/12\/20211215131034-61b9e94a8a267.png","width":350,"height":200,"srcset":"\/wp-content\/uploads\/2021\/12\/20211215131034-61b9e94a8a267.png 1x, \/wp-content\/uploads\/2021\/12\/20211215131034-61b9e94a8a267.png 2x"},"classes":[]}],"_links":{"self":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts\/16435","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16435"}],"version-history":[{"count":3,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts\/16435\/revisions"}],"predecessor-version":[{"id":28734,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/posts\/16435\/revisions\/28734"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=\/wp\/v2\/media\/16424"}],"wp:attachment":[{"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16435"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16435"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.paiqinano.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16435"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}