{"id":16419,"date":"2022-01-19T10:16:58","date_gmt":"2022-01-19T02:16:58","guid":{"rendered":"https:\/\/www.paiqinano.com\/?p=16419"},"modified":"2022-01-17T15:21:17","modified_gmt":"2022-01-17T07:21:17","slug":"%e6%8a%80%e6%9c%af%e5%89%8d%e6%b2%bf%ef%bc%9a%e8%81%9a%e5%9b%9b%e6%b0%9f%e4%b9%99%e7%83%af%e7%bb%93%e6%9e%84%e6%b0%9f%e7%a2%b3%e8%81%9a%e5%90%88%e7%89%a9%e8%96%84%e8%86%9c%e7%9a%84%e7%a0%94%e7%a9%b6","status":"publish","type":"post","link":"https:\/\/www.paiqinano.com\/?p=16419","title":{"rendered":"\u6280\u672f\u524d\u6cbf\uff1a\u805a\u56db\u6c1f\u4e59\u70ef\u7ed3\u6784\u6c1f\u78b3\u805a\u5408\u7269\u8584\u819c\u7684\u7814\u7a76\u8fdb\u5c55"},"content":{"rendered":"

\u6458\u3000\u8981: \u805a\u56db\u6c1f\u4e59\u70ef\u6784\u9020\u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269(Polytetrafluoroethylene – like fluorocarbon , PTFE – like FC) \u5851\u6599\u8584\u819c\u5177\u5907\u6781\u4f4e\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u3001\u9ad8\u758f\u6c34\u6027\u548c\u76f8\u6eb6\u6027\u7b49\u4f18\u52bf\u5177\u4f53\u63cf\u8ff0\u4e86\u6d77\u5916\u5236\u53d6PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u8bd5\u9a8c\u8fdb\u5ea6, \u5256\u6790\u4e86PTFE – like FC \u5851\u6599\u8584\u819c\u5f88\u6709\u53ef\u80fd\u7684\u5806\u79ef\u539f\u7406, \u5f3a\u8c03\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(HFCVD) \u548c\u5fae\u6ce2\u5c04\u9891\u7b49\u79bb\u5b50\u534f\u52a9\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(rf – PECVD) \u8fd92 \u79cd\u505a\u6cd5\u66f4\u6709\u76ca\u4e8e\u964d\u4f4e\u79bb\u5b50\u5bf9\u5851\u6599\u8584\u819c\u8868\u5c42\u7684\u8d1f\u7535\u5b50\u529f\u6548, \u88ab\u89c9\u5f97\u662f\u73b0\u9636\u6bb5\u5806\u79efPTFE – like FC \u5851\u6599\u8584\u819c\u6700\u597d\u662f\u76842 \u79cd\u65b9\u5f0f,\u00a0\u8be6\u7ec6\u4ecb\u7ecd\u4e86\u8fd0\u7528\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535(DBD) \u65b9\u5f0f\u5728\u6c14\u538b\u4f4e\u4e0b\u5236\u53d6PTFE -like FC \u5851\u6599\u8584\u819c\u7684\u6700\u65b0\u6d88\u606f<\/p>\n

\u5173\u952e\u5b57: \u76f8\u5bf9\u4ecb\u7535\u5e38\u6570; \u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269\u5851\u6599\u8584\u819c; \u7b49\u79bb\u5b50\u534f\u52a9\u5316\u5b66\u6c14\u76f8\u6c89\u79ef; \u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef<\/p>\n

\u3000\u00a0 \u00a0 \u6c1f\u78b3\u55b7\u6d82( FC) \u5851\u6599\u8584\u819c\u662f\u4e00\u79cd\u65b0\u5f0f\u542b\u6c1f\u78b3\u55b7\u6d82\u539f\u6750\u6599,\u53ef\u4ee5\u4f5c\u4e3a\u4f4e\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u7684\u7269\u8d28\u819c\u3001\u81ea\u6da6\u6ed1\u4f4e\u78e8\u64e6\u819c\u3001\u6298\u5149\u7387\u4f4e\u6563\u5c04\u5c0f\u7684\u6297\u53cd\u5c04\u819c\u53ca\u5176\u7d2b\u5916\u5149\u5f3a\u6d88\u5316\u5438\u6536\u7684\u9632\u62a4\u819c\u7b49FC \u819c\u6240\u5177\u5907\u7684\u5dee\u5f02\u7684\u5316\u5b66\u6027\u8d28\u662f\u7531\u5851\u6599\u8584\u819c\u5167\u90e8\u78b3\u7684\u878d\u5408\u65b9\u6cd5\u548c\u6c1f\u3001\u6c22\u7684\u4e0d\u4e00\u6837\u6210\u5206\u6240\u81f4\u4f7f\u7684, \u56e0\u800c\u5236\u53d6FC \u5851\u6599\u8584\u819c\u7684\u4e00\u8d77\u53c8\u80fd\u64cd\u7eb5\u5851\u6599\u8584\u819c\u7684\u5206\u5b50\u5f0f\u5c06\u66f4\u4e3a\u66f4\u6709\u610f\u4e49, \u805a\u56db\u6c1f\u4e59\u70ef\u6784\u9020\u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269(PTFE – like FC) \u5851\u6599\u8584\u819c\u4ee5- (CF2) n – \u94fe\u72b6\u4e95\u7136\u6709\u5e8f\u6784\u9020\u4e3a\u4e3b\u5bfc, \u4e0e\u4f20\u7edf\u7684\u7684\u4ee5\u5316\u5b66\u4ea4\u8054\u6784\u9020\u4e3a\u4e3b\u5bfc\u7684\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u5bf9\u6bd4, PTFE – like FC \u5851\u6599\u8584\u819c\u4e3b\u8981\u8868\u73b0\u51fa\u66f4\u4f4e\u7684\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u548c\u76f8\u6eb6\u6027[3 ] \u7b49\u5173\u952e\u7279\u70b9, \u73b0\u9636\u6bb5\u5728\u7535\u5b50\u5149\u5b66\u3001\u751f\u7269\u6d3b\u6027\u9540\u5c42\u548c\u76f8\u6eb6\u6027\u9540\u5c42\u7b49\u884c\u4e1a\u90fd\u662f\u6709\u4e3b\u8981\u7684\u8fd0\u7528\u8fd1\u4e9b\u5e74, \u6d77\u5916\u5bf9\u5236\u53d6PTFE- like FC \u5851\u6599\u8584\u819c\u7684\u63a2\u8ba8\u5df2\u53d8\u6210\u7535\u529b\u5b66\u539f\u6750\u6599\u7684\u4e00\u4e2a\u79d1\u5b66\u7814\u7a76\u7f51\u7edc\u70ed\u70b9, \u800c\u4e2d\u56fd\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u63a2\u8ba8\u5c1a\u5904\u5728\u542f\u52a8\u73af\u8282,\u6587\u4e2d\u5c06\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u6700\u8fd1\u79d1\u7814\u6210\u679c\u4ee5\u53ca\u53d1\u5c55\u8d8b\u5411\u4f5c\u4e00\u7b80\u8ff0<\/p>\n

1 \u3000\u6d77\u5916\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u7814\u7a76\u73b0\u72b6<\/p>\n

1.1 \u3000PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u5236\u53d6<\/p>\n

PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u5173\u952e\u6210\u5206\u662fCF2 \u5b98\u80fd\u56e2,\u5176\u5085\u91cc\u53f6\u53d8\u6362\u7ea2\u5916\u5149\u8c31( FTIR) \u4e2d1150\uff5e1250cm-,\u4e2d\u95f4\u5177\u6709\u663e\u8457\u7684CF2 \u5bf9\u79f0\u6027\u548c\u62b5\u5236\u79f0\u4f38\u7f29\u5f0f\u9707\u52a8\u5cf0, X X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31(XPS) \u5206\u6790\u8868\u660e, CF2\u7684\u6210\u5206\u7ea6\u4e3a80 %[4 – 6 ] \u7f8e\u56fd\u9ebb\u7701\u7406\u5de5\u5b66\u9662(MIT) \u7684Gleason \u79d1\u5b66\u7814\u7a76\u5de5\u4f5c\u7ec4\u548cRastogi \u79d1\u5b66\u7814\u7a76\u5de5\u4f5c\u7ec4, \u9009\u7528HFCVD \u65b9\u5f0f, \u7528\u516d\u6c1f\u73af\u6c27\u4e19\u70f7(Hexafluoropropylene oxide , HFPO) \u505a\u4e3a\u524d\u8f6e\u9a71\u52a8\u6c7d\u4f53, \u5404\u81ea\u5236\u53d6\u51fa\u6781\u4e3a\u7c7b\u4f3c\u805a\u56db\u6c1f\u4e59\u70ef\u7684\u5851\u6599\u8584\u819c[7 – 9 ]Gleason \u5de5\u4f5c\u7ec4\u5f3a\u8c03[8 ] , HFPO \u7684\u7a7a\u6c14\u6d41\u901f\u548c\u70ed\u4e1d\u9884\u5907\u5904\u7406\u6642\u95f4\u4e25\u91cd\u5f71\u54cd\u4e86HFCVD \u65b9\u5f0f\u5806\u79ef\u7684\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u7684\u6784\u9020\u548c\u5916\u8c8c, \u70ed\u4e1d\u9884\u5907\u5904\u7406\u548c\u63d0\u5347HF2PO \u6d41\u52a8\u901f\u5ea6\u53ef\u4ee5\u51cf\u5c11\u5851\u6599\u8584\u819c\u7684\u53d1\u80b2\u901f\u5ea6, \u964d\u4f4e\u6c27\u542b\u91cf,\u63d0\u5347(CF2 ) n \u94fe\u72b6\u6784\u9020\u7684\u5bbd\u9ad8\u6bd4. Rastogi \u5de5\u4f5c\u7ec4\u5f3a\u8c03[9 ] ,\u5e95\u6750\u6eab\u5ea6\u5371\u5bb3\u5851\u6599\u8584\u819c\u7684\u5916\u8c8c\u548c\u5206\u5b50\u5f0f\u662f\u7531\u4e8e\u88ab\u5438\u5490\u7684\u6c27\u81ea\u7531\u57fa\u548c\u5176\u5b83\u5916\u6765\u7269\u79cd\u7684\u5438\u6536\u6307\u6570\u4e0d\u4e00\u6837.\u5728\u8bd5\u9a8c\u4e2d\u5979\u4eec\u8fd8\u53d1\u89c9,\u70ed\u4e1d\u6eab\u5ea6\u2264450 \u2103\u65f6,\u5806\u79ef\u7684\u5851\u6599\u8584\u819c\u5177\u5907\u805a\u56db\u6c1f\u4e59\u70ef\u9ad8\u805a\u7269\u7684(CF2 ) n \u94fe\u72b6\u6784\u9020;\u70ed\u4e1d\u6eab\u5ea6\u2265600 \u2103\u65f6,\u5806\u79ef\u7684\u5851\u6599\u8584\u819c\u5177\u5907(CF2 ) n\u94fe\u72b6\u6784\u9020\u548cm(C:Fx) n \u5316\u5b66\u4ea4\u8054\u6784\u9020\u7684\u6df7\u5408\u7ed3\u6784[6 ]<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u82f1\u56fd\u79d1\u7f57\u62c9\u591a\u83b1\u65af\u5927\u5b66\u7684Fisher \u79d1\u5b66\u7814\u7a76\u5de5\u4f5c\u7ec4,\u9009\u7528\u7535\u611f\u8026\u5408HFPO \u7b49\u79bb\u5b50\u5806\u79ef\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c,\u5728\u6301\u7eed\u6ce2\u8f93\u51fa\u529f\u7387\u4e3a13 W \u65f6, \u7535\u78c1\u7ebf\u5708\u4e2d\u4e0b\u6e3828 cm \u5904\u5806\u79ef\u51fa\u7279\u522b\u4e95\u7136\u6709\u5e8f\u7684\u5851\u6599\u8584\u819c, CF2 \u6210\u5206\u7ea6\u4e3a80 %[4 ] ; \u5728\u76f8\u540c\u7684\u90e8\u4f4d, \u5979\u4eec\u5e94\u7528\u5355\u8109\u51b2\u5145\u653e\u7535\u65b9\u5f0f(\u6700\u9ad8\u503c\u8f93\u51fa\u529f\u7387300 W, pwm\u5360\u7a7a\u6bd45 %) \u4e5f\u5806\u79ef\u51fa\u5305\u62ec\u975e\u5e38\u5c11\u5316\u5b66\u4ea4\u8054\u6784\u9020\u548c\u76f8\u5bf9\u9ad8\u5ea6\u4e95\u7136\u6709\u5e8f\u7684\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c[5 ]\u00a0 \u610f\u5927\u5229\u5df4\u91cc\u9ad8\u6821\u7684d\u2019Agostino \u79d1\u5b66\u7814\u7a76\u5de5\u4f5c\u7ec4, \u9009\u7528\u7535\u5bb9\u8026\u5408\u516b\u6c1f\u73af\u4e01\u70f7(C4 F8 ) \u7b49\u79bb\u5b50\u5806\u79ef\u83b7\u5f97\u805a\u56db\u6c1f\u4e59\u70ef\u6784\u9020\u7684\u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269\u5851\u6599\u8584\u819c,\u00a0\u5979\u4eec\u53d1\u89c9, \u66f4\u4f4e\u7684\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387\u4f1a\u9020\u6210\u8d8a\u6765\u8d8a\u5c11\u7684\u5316\u5b66\u4ea4\u8054\u548c\u5927\u91cfCF2 \u805a\u96c6\u7684\u5851\u6599\u8584\u819c \u5728\u4f4epwm\u5360\u7a7a\u6bd4\u4e3a5 %\u3001\u957f\u5468\u671f\u4e3a320 ms \u65f6, \u5806\u79ef\u7684\u5851\u6599\u8584\u819c\u4e0d\u9519\u7684\u7ef4\u6301\u4e86\u5355\u4e2a\u6784\u9020\u4e14\u4e0e\u805a\u56db\u6c1f\u4e59\u70ef\u5341\u5206\u7c7b\u4f3c, \u8fd9\u65f6FPC \u6bd4\u4f8b\u6700\u5927\u53ef\u8fbe119[10 ] \u5979\u4eec\u8fd8\u53d1\u89c9, \u4f4epwm\u5360\u7a7a\u6bd4( \u22647 %) \u662f\u4ea7\u751f\u7ed3\u6676\u4f53\u8fde\u7eed\u5f0f\u7eb3\u7c73\u6280\u672f\u6784\u9020(PTFE\u7279\u70b9\u6784\u9020) \u7684\u6839\u672c\u6027\u8981\u7d20,\u00a0 \u6676\u5e26\u7684\u89c4\u683c\u548c\u76f8\u5bf9\u5bc6\u5ea6\u5371\u5bb3\u4e86\u5851\u6599\u8584\u819c\u8868\u5c42\u7684\u8868\u9762\u7c97\u7cd9\u5ea6, \u4ece\u800c\u51b3\u7b56\u4e86\u5851\u6599\u8584\u819c\u7684\u4e00\u4e9b\u7279\u6027, \u5c24\u5176\u662f\u8fd9\u7c7b\u5355\u8109\u51b2\u5145\u653e\u7535\u83b7\u5f97\u7684\u6750\u8d28\u7684\u9ad8\u758f\u6c34\u6027[11 ]<\/p>\n

1.2 \u3000\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u7269\u7406\u6027\u80fd\u5256\u6790<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u9009\u7528\u4ee5\u4e0a\u4e8c\u79cd\u65b9\u5f0f\u5236\u53d6PTFE – like FC \u5851\u6599\u8584\u819c,\u5b66\u8005\u5728\u5851\u6599\u8584\u819c\u7279\u70b9\u3001\u53cd\u5e94\u52a8\u529b\u5b66\u7b49\u5c42\u9762\u5e72\u4e86\u5f88\u591a\u7684\u79d1\u7814\u5de5\u4f5c\u4e2d,\u00a0 \u5e94\u7528HFCVD \u65b9\u5f0f\u5806\u79efPTFE – likeFC\u5851\u6599\u8584\u819c, \u5851\u6599\u8584\u819c\u5916\u8868\u7c97\u7cd9\u5ea6\u4e00\u822c\u663e\u8457\u8d85\u8fc7rf -PECVD \u65b9\u5f0f\u914d\u5236\u7684\u5851\u6599\u8584\u819c,\u00a0 \u524d\u9762\u4e00\u79cd\u7684\u5747\u65b9\u6839\u503c(rms)\u7ea6\u4e3a50 \u00b110 nm[9 ] ; \u540e\u8005\u5219\u57282\uff5e20 nm \u4e2d\u95f4[5 ,10 ] ,\u53ef\u662f\u4f34\u968f\u7740\u5851\u6599\u8584\u819c\u8584\u539a\u7684\u63d0\u5347, \u5851\u6599\u8584\u819c\u5916\u8868\u7c97\u7cd9\u5ea6\u4e5f\u968f\u7740\u63d0\u5347, \u5f53\u5851\u6599\u8584\u819c\u8584\u539a\u505a\u5230\u03bcm\u6570\u91cf\u7ea7\u65f6, rms \u53ef\u8fbe220 nm[11 ] ,\u00a0 \u8fd9\u53ef\u80fd\u662f\u56e0\u4e3a\u2014 (CF2 ) n \u2014\u5728\u6c14\u76f8\u8272\u8c31\u4e2d\u6c47\u805a\u540e\u518d\u5806\u79ef\u8f6c\u5316\u6210PTFE – like FC \u5851\u6599\u8584\u819c, \u9020\u6210\u5851\u6599\u8868\u5c42\u8f83\u4e0d\u5149\u6ed1\u7684\u539f\u56e01 \u65e5\u672c\u540d\u53e4\u5c4b\u5927\u5b66\u7684Shibagaki \u53d1\u89c9, \u5728C4 F8 \u7b49\u79bb\u5b50\u4e2d\u5939\u6742\u5c0f\u91cf\u7684H2 (10 %) \u53ef\u4ee5\u63d0\u5347\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u8868\u5c42\u7684\u5149\u6cfd\u5ea6, \u4e14XPS \u5206\u6790\u8868\u660e, \u8fd9\u65f6\u5851\u6599\u8584\u819c\u4e2d\u5173\u952e\u7684\u79bb\u5b50\u952e\u4e3aCF2,\u00a0\u4f46\u4f34\u968f\u7740H2 \u767e\u5206\u6570\u7684\u63d0\u5347, \u5851\u6599\u8584\u819c\u8868\u5c42\u8d8a\u6765\u8d8a\u6108\u6765\u6108\u4e0d\u5149\u6ed1, \u4e14\u5173\u952e\u7684\u79bb\u5b50\u952e\u7531CF2 \u5411C – CFx \u53d8\u5316[12 ] 1PTFE – like FC \u5851\u6599\u8584\u819c\u8868\u9762\u5f20\u529b\u8fbe\u5230120\u00b0[2 ,5 ] ,XPS \u5256\u6790\u53d1\u89c9, \u6bd4\u7167\u5316\u5b66\u4ea4\u8054\u6784\u9020\u4e3a\u4e3b\u5bfc\u7684\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c,PTFE- like FC \u5851\u6599\u8584\u819c\u8868\u5c42\u7684CF3 \u6210\u5206\u66f4\u9ad8\u4e00\u4e9b, \u8fd9\u4e0eBogart \u7684\u79d1\u5b66\u7814\u7a76\u7d50\u679c\u4e00\u81f4[13 ] ,\u00a0 \u6781\u4f4e\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u539f\u6750\u6599\u662f\u73b0\u5728\u7684\u4e00\u4e2a\u79d1\u5b66\u7814\u7a76\u7f51\u7edc\u70ed\u70b9, \u505a\u4e3a\u7406\u60f3\u5316\u5907\u9009\u539f\u6750\u6599\u4e4b\u4e00,PTFE – like FC \u5851\u6599\u8584\u819c\u6bd4\u5316\u5b66\u4ea4\u8054\u6784\u9020\u4e3a\u4e3b\u5bfc\u7684\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u66f4\u5177\u5907\u4f18\u70b9, \u7f18\u6545\u662f\u5f88\u591a\u4e95\u7136\u6709\u5e8f\u7684(CF2 ) n \u94fe\u72b6\u6784\u9020\u53ef\u4ee5\u660e\u663e\u51cf\u5c11\u5851\u6599\u8584\u819c\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570, \u4f46\u4e0d\u8db3\u4e4b\u5904\u662f\u592a\u591a\u7684\u4e95\u7136\u6709\u5e8f(CF2 ) n \u94fe\u72b6\u6784\u9020\u4f1a\u76f4\u63a5\u5f71\u54cd\u5230\u5851\u6599\u8584\u819c\u7684\u8010\u70ed\u6027[6 ] ,\u00a0\u7528PECVD \u65b9\u5f0f\u5806\u79efPTFE – like FC \u5851\u6599\u8584\u819c,\u5806\u79ef\u901f\u5ea6\u8f83\u4f4e, \u4e00\u822c\u4f4e\u4e8e20 nmPmin[2 ,5 ,11 ] ; \u6bd4\u7167\u4e0b, HFCVD \u65b9\u5f0f\u5806\u79ef\u901f\u5ea6\u66f4\u5feb, \u7ea620 \uff5e 35nmPmin[6 ] ,\u00a0 \u9009\u7528\u8fd92\u79cd\u65b9\u5f0f\u5236\u53d6PTFE – like FC \u5851\u6599\u8584\u819c\u65f6, \u6839\u636e\u66f4\u6539\u8f93\u51fa\u529f\u7387\u6216\u6eab\u5ea6\u7b49\u4e3b\u8981\u53c2\u6570, \u63d0\u5347\u6216\u51cf\u5c11\u5806\u79ef\u901f\u5ea6\u90fd\u53ef\u80fd\u5371\u5bb3\u5851\u6599\u8584\u819c\u6784\u9020, CF2 \u7684\u6210\u5206\u5c06\u51cf\u5c11, \u5316\u5b66\u4ea4\u8054\u6784\u9020\u53ef\u80fd\u63d0\u5347.<\/p>\n

1.3 \u3000\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u6d82\u819c\u673a\u5236\u7684\u8ba8\u8bba<\/p>\n

\u00a0 \u00a0 \u00a0 Lau \u660e\u786e\u63d0\u51fa\u4e86\u9009\u7528\u70ed\u4e1d\u5145\u653e\u7535HFPO \u7b49\u79bb\u5b50\u5806\u79efPTFE – like \u5851\u6599\u8584\u819c\u5f88\u6709\u53ef\u80fd\u7684\u5806\u79ef\u539f\u7406\u662f: \u5f53\u6eab\u5ea6\u8d85\u8fc7150 \u2103\u65f6, HFPO \u6eb6\u89e3\u9020\u6210CF2 \u6c27\u81ea\u7531\u57fa\u548c\u4e09\u6c1f\u4e59\u9178\u6c2f\u5316\u7269(CF3COF) \u6c7d\u4f53, CF2 \u6c27\u81ea\u7531\u57fa\u7acb\u5373\u6c47\u805a\u8f6c\u5316\u6210PTFE \u7684CF2 \u7ebf\u5f62\u94fe\u5e26,\u00a0 \u800c\u6839\u636e2\u4e2aCF2\u6c27\u81ea\u7531\u57fa\u6c14\u76f8\u8272\u8c31\u8d44\u4ea7\u91cd\u7ec4\u8f6c\u5316\u6210\u56db\u6c1f\u4e59\u70ef(TFE) , TFE \u518d\u805a\u5408\u8f6c\u5316\u6210PTFE \u65b9\u6cd5\u7684\u6982\u7387\u5219\u4e0d\u5927,\u00a0 \u4f46Lau \u5e76\u6c92\u6709\u5f3a\u8c03\u7f29\u805a\u53cd\u5e94\u662f\u51fa\u73b0\u5728\u5e95\u6750\u4e0a\u6216\u662f\u4ea7\u751f\u5728\u6c14\u76f8\u8272\u8c31\u4e2d, \u6216\u662f\u6839\u636e\u8fd9\u4e24\u4e2a\u65b9\u5f0f\u4e0e\u6b64\u540c\u65f6\u4ea7\u751f[7 ] 1Milella \u79d1\u5b66\u7814\u7a76\u4e86\u7535\u5bb9\u8026\u5408C4 F8 \u7b49\u79bb\u5b50\u5806\u79ef\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u5168\u8fc7\u7a0b\u4e2d\u7684\u6c14\u76f8\u8272\u8c31\u6784\u6210, \u53d1\u89c9\u5728\u5355\u8109\u51b2\u5145\u653e\u7535( pwm\u5360\u7a7a\u6bd4<20 %) \u548c\u6301\u7eed\u5145\u653e\u7535(\u8f93\u51fa\u529f\u7387< 40W) \u4e8c\u79cd\u72b6\u51b5\u4e0b,\u5851\u6599\u8584\u819c\u6210\u4efd\u4ee5(CF2 ) n \u94fe\u72b6\u6784\u9020\u4e3a\u4e3b\u5bfc, \u8fd9\u65f6\u5085\u91cc\u53f6\u53d8\u6362\u7ea2\u5916\u7ebf\u5149\u8c31\u56fe( FT – IRAS) \u8868\u660eC4 F8 \u4e3a\u5851\u6599\u8584\u819c\u7684\u5173\u952e\u5806\u79ef\u7269\u79cd, \u5149\u8c31\u5206\u6790\u6cd5(OES) \u8868\u660e\u6c14\u76f8\u8272\u8c31\u6784\u6210\u4ee5CF2 \u6c27\u81ea\u7531\u57fa\u4e3a\u4e3b\u5bfc1 \u5728\u9879\u76ee\u524d\u671f\u7684\u6839\u57fa\u4e0a, \u4ed6\u8fdb\u4e00\u6b65\u660e\u786e\u63d0\u51faC4 F8 \u7b49\u79bb\u5b50\u5806\u79efPTFE -like \u5851\u6599\u8584\u819c\u5f88\u6709\u53ef\u80fd\u7684\u5806\u79ef\u539f\u7406,\u00a0 \u5728\u4f4epwm\u5360\u7a7a\u6bd4\u60c5\u51b5\u4e0b,CF2\u6c27\u81ea\u7531\u57fa\u76f8\u5bf9\u5bc6\u5ea6\u5f88\u4f4e, \u8fd9\u65f6\u5b83\u5e76\u4e0d\u662f\u5177\u4f53\u7684\u524d\u8f6e\u9a71\u52a8,\u53cd\u8fc7\u6765, \u6839\u636eC4 F8 \u5f00\u542f\u73af\u5f62\u6784\u9020\u800c\u4ea7\u751f\u7684\u524d\u8f6e\u9a71\u52a8\u5219\u5bf9PTFE – like \u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u5177\u6709\u4e86\u91cd\u8981\u7684\u529f\u65481 \u4f34\u968f\u7740pwm\u5360\u7a7a\u6bd4\u7684\u63d0\u5347, \u74e6\u89e3\u7684\u5355\u4e2a\u968f\u7740\u63d0\u5347, \u5f53pwm\u5360\u7a7a\u6bd4\u8d85\u8fc750 %\u65f6, \u5085\u91cc\u53f6\u53d8\u6362\u7ea2\u5916\u7ebf\u5149\u8c31\u56fe( FT- IRAS) \u548c\u5149\u8c31\u5206\u6790\u6cd5(OES) \u8868\u660eC4 F8 \u4e0eC2 F4\u7b49\u79bb\u5b50\u7684\u524d\u8f6e\u9a71\u52a8\u6c14\u76f8\u8272\u8c31\u6784\u6210\u5341\u5206\u7c7b\u4f3c, \u56e0\u6b64\u8fd9\u65f6\u53ef\u89c9\u5f97\u8fd9\u4e8c\u79cd\u6c7d\u4f53\u5806\u79ef\u539f\u7406\u540c\u6837[10 ] 1Shibagaki \u9009\u7528\u6fc0\u5149\u5668\u5206\u6790\u822a\u884c\u6642\u95f4\u8d28\u8c31\u5206\u6790(LD – TOFMS) \u6765\u786e\u8bca\u7535\u611f\u8026\u5408C4 F8PH2 \u7b49\u79bb\u5b50\u5806\u79ef\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u5168\u8fc7\u7a0b\u4e2d\u7684\u6c14\u76f8\u8272\u8c31\u6784\u6210, \u53d1\u89c9\u5728PTFE – like \u5851\u6599\u8584\u819c\u5806\u79ef\u5168\u8fc7\u7a0b\u4e2d,\u9633\u79bb\u5b50\u5173\u952e\u4e3aF- , \u6b63\u79bb\u5b50\u5173\u952e\u4e3aCnFm (\u5305\u542bCF3 \u3001CF \u3001CF 2 \u3001C2 F 4 \u3001C3 F 5 \u548cC3H6 )<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0 FT – IRAS\u3001OES \u548cLD – TOFMS \u8fd93 \u79cd\u7edf\u8ba1\u5206\u6790\u65b9\u6cd5\u53ea\u662f\u662f\u5bf9\u7b49\u79bb\u5b50\u4e2d\u5404\u79cd\u5404\u6837\u6c27\u81ea\u7531\u57fa\u5747\u503c\u6c14\u76f8\u8272\u8c31\u5bc6\u5ea6\u7684\u6d4b\u91cf, \u5e76\u975e\u5728\u5851\u6599\u8584\u819c\u5806\u79ef\u5168\u8fc7\u7a0b\u4e2d\u5bf9\u5851\u6599\u8584\u819c\u8868\u9762\u53cd\u5e94\u7684\u6c27\u81ea\u7531\u57fa\u7684\u7acb\u5373\u7cbe\u786e\u6d4b\u91cf,\u00a0 \u6c27\u81ea\u7531\u57fa\u8868\u9762\u53cd\u5e94\u4e09\u7ef4\u6210\u50cf( IRIS) \u6280\u672f\u6027\u89e3\u51b3\u4e86\u4ee5\u4e0a\u65b9\u5f0f\u7684\u4e0d\u591f, \u878d\u5408\u5206\u5b50\u7ed3\u6784\u675f\u3001\u7b49\u79bb\u5b50\u6280\u672f\u6027\u548c\u6fc0\u5149\u5668\u8bf1\u53d1\u83b9\u5149\u6280\u672f\u6027, \u7acb\u5373\u52fe\u753b\u51fa\u4ea7\u4e1a\u57fa\u5730\u8868\u5c42\u6c27\u81ea\u7531\u57fa\u5916\u6765\u7269\u79cd\u7684\u4e8c\u7ef4\u7a7a\u95f4\u904d\u5e03\u72b6\u51b5,\u00a0Fisher \u5de5\u4f5c\u7ec4\u9009\u7528( IRIS) \u6280\u672f\u6027\u79d1\u5b66\u7814\u7a76\u4e86\u6b63\u79bb\u5b50\u3001\u7535\u5b50\u675f\u52a8\u80fd\u548c\u4e0d\u4e00\u6837\u7684\u5e95\u6750\u5bf9CF2 \u6c27\u81ea\u7531\u57fa\u8868\u9762\u53cd\u5e94\u7684\u5371\u5bb31 \u5979\u4eec\u754c\u5b9a\u5e95\u6750\u8868\u5c42\u6c27\u81ea\u7531\u57fa\u6563\u5c04\u7cfb\u6570\u4e3aS , S> 1 \u8868\u660e\u5728\u5e95\u6750\u8868\u9762\u53cd\u5e94\u7684\u73af\u8282\u4e2d\u201c\u9020\u6210\u201d\u6c27\u81ea\u7531\u57fa, S < 1 \u8868\u660e\u5728\u5e95\u6750\u8868\u9762\u53cd\u5e94\u7684\u73af\u8282\u4e2d\u201c\u8017\u8d39\u201d\u6c27\u81ea\u7531\u57fa, \u5047\u5982S\u22481 , \u5219\u8868\u660e\u5728\u5e95\u6750\u8868\u9762\u53cd\u5e94\u7684\u73af\u8282\u4e2d\u65e2\u4e0d\u201c\u9020\u6210\u201d\u90fd\u4e0d\u201c\u8017\u8d39\u201d\u6c27\u81ea\u7531\u57fa1Butoi\u53d1\u89c9, \u5728\u5e94\u7528HFPO \u7b49\u79bb\u5b50\u5806\u79efPTFE – like \u5851\u6599\u8584\u819c\u7684\u73af\u8282\u4e2d, S (CF2 ) \u4f34\u968f\u7740\u5fae\u6ce2\u5c04\u9891\u8f93\u51fa\u529f\u7387\u7684\u63d0\u9ad8\u800c\u63d0\u53471 \u5728HFPO \u7b49\u79bb\u5b50\u4e2d\u51fa\u73b0\u5f88\u591a\u6b63\u79bb\u5b50\u7684\u60c5\u5f62\u4e0b, S (CF2 ) \u22651 ; \u5728HFPO \u7b49\u79bb\u5b50\u4e2d\u5f88\u591a\u6b63\u79bb\u5b50\u88ab\u9664\u53bb\u7684\u60c5\u5f62\u4e0b, S (CF2 ) < 11 \u8fd9\u8868\u660e\u79bb\u5b50\u5bf9\u5851\u6599\u8584\u819c\u7684\u78c1\u63a7\u6e85\u5c04\u9020\u6210\u4e00\u90e8\u5206CF2 \u6c27\u81ea\u7531\u57fa\u7684\u201c\u9020\u6210\u201d,\u8fd9\u4e00\u70b9\u4e00\u6837\u8fd8\u53ef\u4ee5\u6839\u636e\u6bd4\u7167\u6301\u7eed\u6ce2\u548c\u5355\u8109\u51b2\u5145\u653e\u7535\u72b6\u51b5\u4e0b\u7684S \u975e\u5e38\u503c\u5f97\u5230\u786e\u8ba41 \u5355\u8109\u51b2\u5145\u653e\u7535\u72b6\u51b5\u4e0bS (CF2 )\u503c\u4f4e\u4e8e\u6301\u7eed\u6ce2\u5145\u653e\u7535, \u5176\u7f18\u6545\u5f88\u6709\u53ef\u80fd\u662f\u5728\u6bcf\u4e00\u4e2a\u5355\u8109\u51b2\u5468\u671f\u65f6\u95f4\u7684\u5fae\u6ce2\u5c04\u9891\u5173\u6389\u671f\u5185\u6b63\u79bb\u5b50\u8fc5\u901f\u7684\u91cd\u65b0\u6392\u5217, \u9020\u6210\u5f88\u591a\u6b63\u79bb\u5b50\u5728\u62b5\u8fbe\u5e95\u6750\u8868\u5c42\u7684\u73af\u8282\u4e2d\u5c31\u65e9\u5df2\u6d88\u9000, \u90a3\u6837\u4e5f\u5c31\u964d\u4f4e\u4e86\u79bb\u5b50\u5bf9\u5851\u6599\u8584\u819c\u7684\u78c1\u63a7\u6e85\u5c04, \u4fc3\u4f7fS (CF2 )\u503c\u8f83\u5c0f[14 ] 1Martin \u5f3a\u8c03, \u7528C3 F8 \u548cC4 F8 \u7b49\u79bb\u5b50\u5806\u79ef\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u65f6, \u6563\u5c04\u7cfb\u6570S (CF2 ) \u4e0e\u5851\u6599\u8584\u819c\u7279\u70b9\u6b63\u76f8\u5173, S (CF2 ) \u8d8a\u5c0f, \u5851\u6599\u8584\u819c\u4e2d\u7684\u5316\u5b66\u4ea4\u8054\u6784\u9020\u8d8a\u5c11[15 ] ; \u6563\u5c04\u7cfb\u6570S (CF2 ) \u4e0e\u5747\u503c\u6b63\u79bb\u5b50\u52a8\u80fd\u6b63\u76f8\u5173[16 ]1 \u5728\u4e0d\u4e00\u6837\u7684\u8f93\u51fa\u529f\u7387\u548c\u6c14\u4f53\u538b\u5f3a\u4e0b\u5806\u79ef\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c, S(CF2 ) \u5747\u4f4e\u4e8e1 , \u8fd9\u8868\u660e\u5728C3 F8 \u548cC4 F8 \u7b49\u79bb\u5b50\u4e2dCF2 \u6c27\u81ea\u7531\u57fa\u5e76\u5e76\u4e0d\u662f\u5851\u6599\u8584\u819c\u5806\u79ef\u7684\u524d\u8f6e\u9a71\u52a8\u5916\u6765\u7269\u79cd<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u5806\u79efPTFE – like FC \u5851\u6599\u8584\u819c\u6700\u91cd\u8981\u7684\u5916\u6765\u7269\u79cd\u662fCF2 \u6c27\u81ea\u7531\u57fa, CF2 \u6c47\u805a\u751f\u957f\u53d1\u80b2\u4ea7\u751fPTFE – like FC \u5851\u6599\u8584\u819c[17 – 18 ],\u00a0 \u5e94\u7528HFCVD \u65b9\u5f0f, \u53ef\u5c06HFPO \u88c2\u5316\u6210CF2 \u548c\u7a33\u5b9a\u6027\u7684\u5206\u5b50\u7ed3\u6784(C2 F4O) [8 ] ,\u00a0 \u5bc6\u5ea6\u4f4e\u5fae\u6ce2\u5c04\u9891\u7b49\u79bb\u5b50\u5c24\u5176\u662f\u5fae\u6ce2\u5c04\u9891\u5355\u8109\u51b2\u7b49\u79bb\u5b50, \u53ef\u4ee5\u5c06\u6c1f\u78b3\u55b7\u6d82\u6c7d\u4f53(\u5982CHF3 \u3001C3 F8 \u3001C4 F8 \u3001HFPO \u7b49) \u6eb6\u89e3, \u9020\u6210\u8f83\u9ad8\u7684CF2 \u76f8\u5bf9\u5bc6\u5ea6, \u4ea7\u751fPTFE – like FC \u5851\u6599\u8584\u819c,\u00a0\u8bd5\u9a8c\u7d50\u679c\u4e5f\u6697\u793a\u7740, \u4e0eCF2 \u6c27\u81ea\u7531\u57fa\u5bf9\u6bd4, \u6b63\u79bb\u5b50\u5f88\u6709\u53ef\u80fd\u5177\u5907\u8f83\u77ed\u7684\u4f7f\u7528\u5bff\u547d1 \u5728\u5fae\u6ce2\u5c04\u9891\u5355\u8109\u51b2\u7b49\u79bb\u5b50\u4e2d, \u5177\u5907\u8f83\u5bff\u547d\u957f\u7684CF2 \u5f88\u6709\u53ef\u80fd\u64cd\u7eb5\u4e86\u5851\u6599\u8584\u819c\u7684\u751f\u957f\u53d1\u80b2, \u8fdb\u800c\u6709\u5229\u4e8ePTFE – like FC \u5851\u6599\u8584\u819c\u7684\u4ea7\u751f[14 ] ,\u00a0 \u6070\u597d\u662f\u56e0\u4e3a\u5728Hot- filament CVD \u548crf – PECVD \u5806\u79ef\u7a0b\u5e8f\u6d41\u7a0b\u4e2d, CF2 \u6c27\u81ea\u7531\u57fa\u5f88\u6709\u53ef\u80fd\u64cd\u7eb5\u5851\u6599\u8584\u819c\u751f\u957f\u53d1\u80b2, \u56e0\u800c\u4ed6\u4eec\u88ab\u89c9\u5f97\u662f\u73b0\u9636\u6bb5\u5806\u79efPTFE – like FC \u5851\u6599\u8584\u819c\u6700\u597d\u662f\u76842 \u79cd\u65b9\u5f0f<\/p>\n

2 \u3000\u4e2d\u56fd\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u79d1\u5b66\u7814\u7a76\u7684\u73b0\u51b5<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u4e2d\u56fd\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u5206\u6790\u8fd8\u521a\u53d1\u5c55,\u00a0\u73b0\u9636\u6bb5\u5bf9\u6c1f\u78b3\u55b7\u6d82\u5851\u6599\u8584\u819c\u7684\u5206\u6790\u4e3b\u8981\u662f\u805a\u96c6\u5728\u6c1f\u5316\u6c22\u975e\u6676\u78b3(a – C: F) \u5851\u6599\u8584\u819c\u7684\u5236\u53d6\u4e0e\u5256\u6790\u5c42\u9762, \u6240\u5806\u79ef\u7684\u6c1f\u78b3\u55b7\u6d82\u9ad8\u805a\u7269\u5851\u6599\u8584\u819c\u5927\u591a\u6570\u662f\u4ee5\u5316\u5b66\u4ea4\u8054\u6784\u9020\u4e3a\u4e3b\u5bfc\u7684a -C: F \u9ad8\u805a\u7269\u5851\u6599\u8584\u819c, C = C \u6216C \u2014CFx \u952e\u6210\u5206\u6bd4\u8f83\u5927,\u5c1a\u4e0d\u5177\u5907\u805a\u56db\u6c1f\u4e59\u70ef\u7684\u6784\u9020[19 – 21 ]<\/p>\n

\u00a0 \u00a0 \u00a0 \u5927\u8fde\u6c11\u65cf\u5b66\u9662\u5218\u4e1c\u5e73\u53bf\u79d1\u5b66\u7814\u7a76\u5de5\u4f5c\u7ec4, \u73b0\u9636\u6bb5\u6b63\u4e13\u6ce8\u4e8e\u5806\u79efPTFE – like FC \u5851\u6599\u8584\u819c\u7684\u79d1\u7814\u5de5\u4f5c\u4e2d\u5f53\u4e2d, \u5df2\u9009\u7528\u4e86rf – PECVD \u548c\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535(DBD) 2 \u79cd\u5806\u79ef\u65b9\u5f0f,\u00a0 \u5728\u5176\u4e2dDBD \u5b9e\u9a8c\u65b9\u6cd5\u8bbe\u5907\u56fe\u5982\u4e0b\u56fe,\u00a0\u6240\u663e\u793a, \u53cd\u6620\u5ba4\u5173\u952e\u7531\u9ad9\u538b\u7535\u7ea7\u30013 mm \u539a\u7684\u77f3\u82f1\u52a0\u70ed\u7ba1(\u76f4\u5f8460 mm) \u548c\u5730\u7535\u7ea7\u6784\u62101 \u9ad9\u538b\u7535\u7ea7\u4e0e\u77f3\u82f1\u52a0\u70ed\u7ba1\u5e95\u7aef\u76f4\u63a5\u63a5\u89e6, \u5145\u653e\u7535\u5168\u8fc7\u7a0b\u5c06\u9020\u6210\u77f3\u82f1\u52a0\u70ed\u7ba1\u663e\u8457\u63d0\u6e29, \u84b8\u53d1\u51b7\u5374\u7cfb\u7edf\u8f6f\u4ef6\u5219\u627f\u62c5\u77f3\u82f1\u77f3\u7269\u8d28\u51cf\u6e291 \u8bd5\u9a8c\u4e2d\u6e90\u6c7d\u4f53C4 F8 (991999 %) \u7ef4\u630130sccm \u4e0d\u4f1a\u6539\u53d8, \u77f3\u82f1\u77f3\u7269\u8d28\u4e0e\u5730\u7535\u7ea7\u7a7a\u96991\uff5e10 mm \u53ef\u8c03\u5f0f, \u51b7\u5374\u6c34\u7cfb\u7edf\u8f6f\u4ef6\u627f\u62c5\u51cf\u6e29\u5355\u6676\u7845\u7247\u5e95\u67501 \u5145\u653e\u7535\u5168\u8fc7\u7a0b\u4e2d\u5cf0- \u6700\u9ad8\u503c\u5de5\u4f5c\u7535\u538b\u7ef4\u630124 kV \u4e0d\u4f1a\u6539\u53d8, \u57281\uff5e10 kHz \u5de5\u4f5c\u9891\u7387\u4e0b\u66f4\u6539\u5806\u79ef\u6807\u51c6\u6c14\u538b(25 \uff5e125 Pa) ,\u00a0 \u8fd0\u7528\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535(DBD)\u5236\u53d6\u5851\u6599\u8584\u819c\u5177\u5907\u5176\u7279\u6709\u7684\u4f18\u70b9, \u5982\u5145\u653e\u7535\u65b9\u6cd5\u7b80\u6613,\u673a\u5668\u8bbe\u5907\u4f4e\u6210\u672c; \u5145\u653e\u7535\u5ba4\u6c7d\u4f53\u7a7a\u9699\u5c0f, \u7bb1\u4f53\u4f53\u578b\u5c0f,\u6c14\u4f53\u538b\u529b\u4f4e; \u56e0\u4e3a\u7269\u8d28\u7684\u5b58\u6709, \u9632\u6b62\u4e86\u6c7d\u4f53\u5728\u7535\u7ea7\u95f4\u7684\u5f7b\u5e95\u7a7f\u900f, \u56e0\u800c\u80fd\u8017\u8f83\u4f4e; \u7b49\u79bb\u5b50\u76f8\u5bf9\u5bc6\u5ea6\u4f4e, \u5728\u6c14\u538b\u4f4e\u4e0b\u53ef\u4ea7\u751f\u5355\u8109\u51b2\u7535\u5f27\u653e\u7535, \u9488\u5bf9PT2FE – like FC \u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u5177\u5907\u6709\u76ca\u7684\u8981\u7d20,\u00a0Li Wei\u7b49\u65e9\u5df2\u8fd0\u7528C4 F8 \u5355\u8109\u51b2\u8f89\u5149\u7269\u8d28\u963b\u62e6\u5145\u653e\u7535, \u5728\u591a\u79cd\u591a\u6837\u6807\u51c6\u6c14\u538b\u4e0b\u5806\u79ef\u4e86\u6bd4\u8f83\u5927\u603b\u9762\u79ef(\u76f4\u5f91\u4e3a60 mm) \u7684FC \u5851\u6599\u8584\u819c,\u00a0 \u5f53\u6c14\u4f53\u538b\u5f3a\u4ece25 Pa \u63d0\u5347\u81f3125 Pa \u65f6, XPS\u5206\u6790\u8868\u660e, \u5851\u6599\u8584\u819c\u4e2dCF2 \u6210\u5206\u6301\u7eed\u4e0a\u5347(\u5982\u4e0b\u56fe2 \u6240\u663e\u793a) , \u4e14\u6b64\u6807\u51c6\u4e0b\u8981\u539f\u5b50\u529b\u663e\u5fae\u955c(AFM) \u89c2\u67e5\u53d1\u89c9, \u5851\u6599\u8584\u819c\u8868\u5c42\u5177\u5907\u4e0d\u9519\u7684\u6574\u9f50\u6027(\u5982\u4e0b\u56fe3 \u6240\u663e\u793a) ,\u00a0\u5851\u6599\u8584\u819c\u7684\u5916\u8868\u7c97\u7cd9\u5ea6\u57280115\uff5e0145 \u4e2d\u95f4, \u663e\u8457\u4f4e\u4e8e\u7528HFCVD \u548crf – PECVD \u8fd92 \u79cd\u65b9\u5f0f\u914d\u5236\u7684PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u5916\u8868\u7c97\u7cd9\u5ea6; \u800c\u5851\u6599\u7684\u5806\u79ef\u901f\u5ea6\u572881\uff5e152 nmPmin \u4e2d\u95f4, \u663e\u8457\u8d85\u8fc7HF2CVD \u548crf – PECVD 2 \u79cd\u65b9\u5f0f\u914d\u5236\u7684PTFE – like FC\u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u901f\u5ea6[22 ]<\/p>\n

\"1.JPG\"<\/p>\n

\"2.JPG\"<\/p>\n

\"3.JPG\"<\/p>\n

3 \u3000\u7ed3\u8bed<\/p>\n

\u00a0 \u00a0 \u00a0 \u00a0\u5c3d\u7ba1\u65e9\u5df2\u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u5806\u79ef\u548c\u5256\u6790\u5f00\u5c55\u4e86\u5927\u6279\u91cf\u7684\u5de5\u4f5c\u4e2d, \u4f46\u5f88\u591a\u79d1\u7814\u6570\u636e\u663e\u793a, \u5851\u6599\u8584\u819c\u7684\u8868\u5c42\u6784\u9020\u4ecd\u8f83\u4e0d\u5149\u6ed1. \u6b64\u5916, \u5bf9\u7b49\u79bb\u5b50\u786e\u8bca\u548c\u5851\u6599\u8584\u819c\u5806\u79ef\u5168\u8fc7\u7a0b\u5256\u6790\u5c42\u9762\u7684\u4f5c\u4e1a\u8fd8\u5f88\u6b20\u7f3a, \u56e0\u800c, \u5bf9PTFE – like FC \u5851\u6599\u8584\u819c\u7684\u4ea7\u751f\u539f\u7406\u4ecd\u9700\u4e0d\u65ad\u6df1\u5165\u5206\u6790,\u00a0 \u575a\u4fe1\u4f34\u968f\u7740\u5256\u6790\u6280\u672f\u6027\u7684\u8fdb\u4e00\u6b65\u63d0\u9ad8, \u5728\u4e00\u6bb5\u65f6\u95f4\u7684\u672a\u6765, PTFE – like FC \u8584\u819c\u6280\u672f\u53ef\u80fd\u5954\u5411\u4ea7\u54c1\u5316\u65b9\u4f4d\u53d1\u5c55\u8d8b\u52bf, PTFE – like FC \u5851\u6599\u8584\u819c\u539f\u6750\u6599\u53ef\u80fd\u5728ULSI \u4e2d\u83b7\u5f97\u89c4\u6a21\u6027\u7684\u8fd0\u7528.<\/p>\n

\u8bba\u6587\u53c2\u8003\u6587\u732e:<\/p>\n

[1 ] Lau K K S , Murthy S K, Lewis H G P , et al. Fluorocar2bon Dielectrics via Hot Filament Chemical Vapor Deposition[J ] . J . Fluorine Chem. , 2003 , 122 (1) : 93 – 96.<\/p>\n

[2 ] Nitschke M, Uhlmann S , Schulze R , et al. Plasma poly2merization of tetrafluoroethylene – towards CF2 dominatedfluorocarbon films [J ] . e – Polymers , 2006 , 006.<\/p>\n

[3 ] Lau K K S , Bico J , Teo K B , et al. SuperhydrophobicCarbon Nanotube Forests [J ]. Nano Lett , 2003 , 3 (12) :1701 – 1705.<\/p>\n

[4 ] Carmen I B , Neil M M, Jeffrey L B , et al. Control ofSurface Film Composition and Orientation with DownstreamPECVD of Hexafluoropropylene Oxide [J ] . Chem. Ma2ter. , 1999 , 11 (4) : 862 – 864.<\/p>\n

[5 ] Butoi C I , Mackie N M, Gamble L J , et al. Deposition of Highly Ordered CF2 – Rich Films Using Continuous Wave and Pulsed Hexafluoropropylene Oxide Plasmas [J ]. Chem.Mater. , 2000 , 12 (7) : 2014 – 2024.<\/p>\n

[6 ] Rastogi A C , Desu S B. Characterization of low pressurechemical vapor deposited polymeric fluorinated carbon m(C: Fx) n thin films with low dielectric constant [ J ] .Appl. Phys. A , 2006 , 83 (1) : 57 – 66.<\/p>\n

[7 ] Lau K K S , Lewis H G P , Limb S J , et al. Hot – wire chemical vapor deposition (HWCVD) of fluorocarbon and organosilicon thin films [J ] . Thin Solid Films , 2001 , 395(1 – 2) : 288 – 291.<\/p>\n

[8 ] Lau K K S , Caulfield J A , Gleason K K. Structure andMorphology of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition [J ] . Chem. Mater. , 2000 ,12 (10) : 3032 – 3037.<\/p>\n

[9 ] Rastogi A C , Desu S B. Thermal chemical vapor deposi2 tion of fluorocarbon polymer thin films in a hot filament re2 actor [J ] . Polymer , 2005 , 46 (10) : 3440 – 3451.<\/p>\n

[10 ] Milella A , Palumbo F , Favia P , et al. Continuous and Modulated Deposition of Fluorocarbon Films from c – C4F8 Plasmas [J ] . Plasma Process. Polym. , 2004 , 1 (2) :164 – 170.<\/p>\n

[11 ] Cicala G, Milella A , Palumbo F , et al. Morphological and structural study of plasma deposited fluorocarbon films at different thicknesses [J ] . Diamond and Related Mate2 rials , 2003 , 12 (10 – 11) : 2020 – 2025.<\/p>\n

[12 ] Shibagaki K, Maeda T, Takada N , et al. Laser desorp2 tion time – of – flight mass spectrometry of fluorocarbon films synthesized by C4 F8<\/p>\n

PH2 plasmas [J ] . J . Vac. Sci. Technol. A , 2003 , 21 (4) : 866 – 873.<\/p>\n

[13 ] Bogart K H A , Dalleska N F , Bogart G, et al. Plasma enhanced chemical vapor deposition of silicon dioxide using novel alkoxysilane precursors [J ] . J . Vac. Sci. Techn2 ol. A , 1995 , 13 (2) : 476 – 480.<\/p>\n

[14 ] Butoi C I , Mackie N M, Williams K L , et al. Ion and substrate effects on surface reactions of CF2 using C2 F6 ,C2 F6 PH2 , and hexafluoropropylene oxide plasmas [ J ] .J . Vac. Sci. Technol. A , 2000 , 18 ( 6) : 2685 -2698.<\/p>\n

[15 ] Martin I T , Fisher E R. Ion effects on CF2 surface inter2 actions during C3 F8 and C4F8 plasma processing of Si[J ] . J . Vac. Sci. Technol. A , 2004 , 22 (5) : 2168- 2176.<\/p>\n

[16 ] Martin I T, Zhou J , Fisher E R. Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon [J ] . J . Appl. Phys. , 2006 , 100(1) : 013301 – 1 – 013301 – 10.<\/p>\n

[17 ] Liu Dong – ping , Martin I T, Fisher E R. CF2 surface re2 activity during hot filament and plasma – enhanced chemi2 cal vapor deposition of fluorocarbon films [J ] . Chemical Physics Letters , 2006 , 430 (1 – 3) : 113 – 116.<\/p>\n

[18 ] Liu Dong – ping , Marin I T, Jie zhou , et al. Radical -surface interactions during film deposition : A sticky situ2 ation ? [J ] . Pure Appl. Chem. , 2006 , 78 (6) : 1187- 1202.<\/p>\n

[19 ] \u53f6\u3000\u8d85, \u5b81\u5146\u5143, \u7a0b\u73ca\u534e, \u7b49. \u6c1f\u5316\u6c22\u975e\u6676\u78b3\u5851\u6599\u8584\u819c\u7684\u4f4e\u9891\u7387\u7535\u6781\u5316\u7279\u6027\u5256\u6790[J ] . \u65b0\u578b\u529f\u80fd\u6750\u6599, 2004 , 5 (3) :338 – 340.<\/p>\n

[20 ] \u5434\u632f\u5b87, \u6768\u94f6\u5802, \u6c6a\u5bb6\u53cb. \u5fae\u6ce2\u52a0\u70ed\u7535\u5b50\u5668\u4ef6\u56de\u8f6c\u5171\u9707\u7b49\u79bb\u5b50\u6709\u673a\u5316\u5b66\u6c14\u76f8\u8272\u8c31\u6dc0\u79ef\u6cd5\u5236\u53d6\u975e\u6676\u6c1f\u5316\u6c22\u78b3\u5851\u6599\u8584\u819c\u7684\u79d1\u5b66\u7814\u7a76[J ] . \u7269\u7406\u5b66\u62a5, 2006 , 55 (5) : 2572 – 2577<\/p>\n

\u7eb3\u7c73\u9632\u6c34\u7f51(www.wateroff.cn)\u6574\u7406\u51fa\u6765,\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8054\u7edc\u5220\u6389.<\/p>\n

 <\/p>\n

\n

\u6d3e\u65d7\u7eb3\u7c73\u5b98\u7f51\uff1ahttps:\/\/www.paiqinano.com<\/p>\n

\u5927\u91cf\u7535\u5b50\u7eb3\u7c73\u9632\u62a4\u6d82\u5c42\u5242\u3001\u914d\u5957\u55b7\u9540\u8bbe\u5907\u3001OEM\u4ee3\u5de5\u670d\u52a1\u7b49\u8bf7\u5173\u5fc3\u201c\u6d3e\u65d7\u7eb3\u7c73\u201d\u5fae\u4fe1\u516c\u4f17\u53f7<\/p>\n

\u7eb3\u7c73\u6d82\u5c42\u5242\u7406\u5316\u6027\u80fd\u8be6\u7ec6\u53c2\u6570\u76f4\u63a5\u70b9\u51fb\uff1a\u7eb3\u7c73\u7535\u5b50\u9632\u62a4\u6d82\u5c42\u5242\u53c2\u6570<\/a><\/p>\n

\u6280\u672f\u54a8\u8be2\uff1a\u8d75\u5148\u751f\uff1a13048960888<\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u8be5\u6587\u7ae0\u5185\u5bb9\u63d0\u9ad8\u6563\u64ad\u65b0\u6280\u672f\u5e94\u7528\u65b0\u95fb\u8d44\u8baf\uff0c\u5f88\u6709\u53ef\u80fd\u6709\u8f6c\u622a\/\u5f15\u5165\u4e4b\u72b6\u51b5\uff0c\u82e5\u6709\u4fb5\u6743\u884c\u4e3a\u8bf7\u8054\u7edc\u5220\u6389\u3002<\/em><\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

\u6458\u3000\u8981:\u805a\u56db\u6c1f\u4e59\u70ef\u7ed3\u6784\u6c1f\u78b3\u805a\u5408\u7269(Polytetrafluoroethylene-likefluorocarbon,PTFE-likeFC)\u8584\u819c\u5177\u6709\u8d85\u4f4e\u4ecb\u7535\u5e38\u6570\u3001\u9ad8\u758f\u6c34\u6027\u548c\u751f\u7269\u76f8\u5bb9\u6027\u7b49\u4f18\u70b91\u7efc\u8ff0\u4e86\u56fd\u5916\u5236\u5907PTFE-likeFC\u8584\u819c\u7684\u5b9e\u9a8c\u8fdb\u5c55,\u5206\u6790\u4e86PTFE-likeFC\u8584\u819c\u53ef\u80fd\u7684<\/p>\n","protected":false},"author":1,"featured_media":16418,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[59],"tags":[1506,1501,1508,1507],"class_list":["post-16419","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-information","tag-pecvd","tag-1501","tag-1508","tag-1507"],"jetpack_featured_media_url":"\/wp-content\/uploads\/2021\/12\/20211215125656-61b9e618e5b66.jpg","jetpack-related-posts":[{"id":19542,"url":"https:\/\/www.paiqinano.com\/?p=19542","url_meta":{"origin":16419,"position":0},"title":"Parylene 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